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JPH021811A - Light beam homogenizer and formation thereof - Google Patents

Light beam homogenizer and formation thereof

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Publication number
JPH021811A
JPH021811A JP63142996A JP14299688A JPH021811A JP H021811 A JPH021811 A JP H021811A JP 63142996 A JP63142996 A JP 63142996A JP 14299688 A JP14299688 A JP 14299688A JP H021811 A JPH021811 A JP H021811A
Authority
JP
Japan
Prior art keywords
light
transparent body
intensity distribution
convex lens
scatterer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP63142996A
Other languages
Japanese (ja)
Inventor
Yoshihiro Kajiki
善裕 梶木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP63142996A priority Critical patent/JPH021811A/en
Publication of JPH021811A publication Critical patent/JPH021811A/en
Pending legal-status Critical Current

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  • Lasers (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To convert a distributed intensity beam which has an intensity distribution in its cross section into a beam which has a uniform intensity distribution in cross section by arranging light converting elements which converge parallel light on one point opposite each other while aligning their optical axes so that their focus are at the same position and then arranging a scattering body at the focus position. CONSTITUTION:The incidence-side convex lens 1 and emission-side convex lens 5 are arranged opposite each other having their focuses at the same position and the scattering body 4 is arranged at the focus position. The intensity distributed beam 2 which is made incident on the incidence-side convex lens 1 is converged on the focus position and scattered by the scattering body 4 arranged there. The scatterrd light becomes parallel light through the emission side convex lens 5 to obtain the uniform beam 6. Therefore, the light beam having the intensity distribution in its cross section like excimer laser light can be converted into the light beam which has the uniform intensity distribution in the cross section. The scattering body is formed in a transparent body or a light converging transparent body by projecting laser light on the focus position in the light converging transparent body and working the focus position by heat or optochemical reaction.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はエキシマレーザ光のように横断面内に強度分布
を持つ光ビーム(以下、強度分布ビーム)を横断面内の
強度分布が均一である光ビーム(以下、均一ビーム)に
変換する光ビームホモジナイザとその形成方法に関する
ものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention is a method for converting a light beam (hereinafter referred to as an intensity distribution beam) having an intensity distribution in a cross section, such as an excimer laser beam, into a light beam with a uniform intensity distribution in a cross section. The present invention relates to a light beam homogenizer that converts into a certain light beam (hereinafter referred to as a uniform beam) and a method of forming the same.

〔従来の技術〕[Conventional technology]

従来の光ビームホモジナイザについては、文献「ソリッ
ド・ステート・テクノロジー(Solid−3tate
 TechnoIogy ) J 1980年、8月号
Conventional optical beam homogenizers are described in the document “Solid-3tate Technology”.
TechnoIogy ) J 1980, August issue.

115〜120頁に記載されている。第5図(a)は、
上記文献に記載されたプリズムを用いた従来の光ビーム
ホモジナイザの構成図である。第5図(a)に示した光
ビームホモジナイザにおいては、強度分布ビーム2を4
つに分割したプリズム13に入射させ、プリズム13の
各々より出射したビームを重ね合わせることにより均一
ビーム6に変換している。
It is described on pages 115-120. Figure 5(a) shows
FIG. 2 is a configuration diagram of a conventional light beam homogenizer using a prism described in the above-mentioned document. In the light beam homogenizer shown in FIG. 5(a), the intensity distribution beam 2 is
The beam is made incident on a prism 13 divided into two parts, and the beams emitted from each prism 13 are superimposed to be converted into a uniform beam 6.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

プリズムまたはレンズまたはミラーを用いた従来の光ビ
ームホモジナイザは、上記文献に記されているように強
度分布ビーム2を横断面方向に分割し重ね合わせること
により横断面内の強度分布を均一化して均一ビーム6を
得ている。しがし、第5図(b)に示したように均一ビ
ームの強度分布は強度分布ビームを榊断面方向に分割す
る際の分割数によって横断面内の強度分布の均一性に限
界がある。このなめ、前記の均一ビームを用いて半導体
プロセスであるCVDやアニーリングなどを行うと均一
ビームの横断面内の不均一に起因した加工むらが生じる
欠点があった。
Conventional light beam homogenizers using prisms, lenses, or mirrors divide the intensity distribution beam 2 in the cross-sectional direction and overlap them to make the intensity distribution uniform in the cross-sectional direction, as described in the above-mentioned literature. I'm getting beam 6. However, as shown in FIG. 5(b), there is a limit to the uniformity of the intensity distribution in the cross section depending on the number of divisions when dividing the intensity distribution beam in the cross-sectional direction of the sakaki. For this reason, when a semiconductor process such as CVD or annealing is performed using the uniform beam, processing unevenness occurs due to non-uniformity in the cross section of the uniform beam.

本発明の目的は、従来の欠点を解決し、横断面内に強度
分布を持つ強度分布ビームを横断面内に強度分布が均一
である均一ビームに変換する光ビームホモジナイザとそ
の形成方法を提供することにある。
An object of the present invention is to solve the conventional drawbacks and provide a light beam homogenizer and a method for forming the same, which converts an intensity distributed beam having an intensity distribution in a cross section into a uniform beam having an even intensity distribution in a cross section. There is a particular thing.

〔課題を解決するための手段〕[Means to solve the problem]

本発明による光ホモジナイザは、平行光を一点に集光す
る集光素子を少くとも2つ、光軸を合せ、かつ、互いの
焦点が同じ位置になるよう対向して配置し、前記焦点位
置に散乱体を配置した構成となっている。
In the optical homogenizer according to the present invention, at least two condensing elements for condensing parallel light to one point are arranged facing each other so that their optical axes are aligned and their focal points are at the same position, and It has a structure in which scatterers are arranged.

さらに、本発明によるもう1つの光ビームホモジナイザ
は、入射した平行光を自己内部の一点に集光する集光性
透明体の内部の焦点位置に散乱体を置いて構成となって
いる。
Furthermore, another light beam homogenizer according to the present invention has a structure in which a scatterer is placed at a focal position inside a light-converging transparent body that focuses incident parallel light onto a single point inside the homogenizer.

また、本発明による光ビームホモジナイザの形成方法は
、透明体あるいは集光性透明体にレーザ光を照射するこ
とによって透明体あるいは集光性透明体内焦点位置に周
囲とは屈折率、組織密度等の物理的・化学的性質の異な
る領域を形成する工程を備えた構成となっている。
In addition, the method for forming a light beam homogenizer according to the present invention is to irradiate a transparent body or a light-concentrating transparent body with a laser beam, so that a focal position within the transparent body or a light-concentrating transparent body is different from that of the surroundings in terms of refractive index, tissue density, etc. The structure includes a process of forming regions with different physical and chemical properties.

〔作用・原理〕[Action/Principle]

本発明による光ビームホモジナイザは、集光素子及び散
乱体からなり、かつ集光素子の焦点位置に散乱体が設置
されている。このような光ビームホモジナイザにおいて
は、強度分布ビームは集光素子の焦点位置にて集光され
るため散乱体の影響を受けやすく、強度分布ビームは散
乱され均一な強度分布となり均一ビームを得ることがで
きる。
The light beam homogenizer according to the present invention includes a condenser element and a scatterer, and the scatterer is installed at the focal point of the condenser element. In such a light beam homogenizer, the intensity distribution beam is focused at the focal point of the condensing element, so it is easily affected by scatterers, and the intensity distribution beam is scattered and has a uniform intensity distribution, making it difficult to obtain a uniform beam. I can do it.

さらに、本発明の光ビームホモジナイザの散乱体はレー
ザ光を用いた加工により形成することができる。すなわ
ち、透明体あるいは集光性透明体内部の焦点位置にレー
ザ光を照射することにより焦点位置を熱あるいは光化学
反応によって加工し、集光性透明体内に散乱体を形成す
ることができる。
Furthermore, the scatterer of the light beam homogenizer of the present invention can be formed by processing using laser light. That is, by irradiating the focal position inside the transparent body or the light-concentrating transparent body with a laser beam, the focal position can be processed by heat or photochemical reaction, and a scatterer can be formed inside the light-concentrating transparent body.

〔実施例〕〔Example〕

次に、図面を用いて本発明を説明する。 Next, the present invention will be explained using the drawings.

第1図に本発明による光ビームホモジナイザの第1の実
施例を示す。入射側凸レンズ1に入射した強度分布ビー
ム2は、焦点位置3に集光される。集光された光は、焦
点位置3に置いて散乱体4の影響を受け、散乱される。
FIG. 1 shows a first embodiment of a light beam homogenizer according to the present invention. The intensity distribution beam 2 that has entered the entrance side convex lens 1 is focused at a focal point position 3. The focused light is placed at the focal point 3 and is affected by the scatterer 4, where it is scattered.

この光を出射側凸レンズ5にて平行光にし、均一ビーム
6を得ることにより、強度分布ビーム2を均一ビーム6
に変換する。この実施例では集光素子として1枚の凸レ
ンズを用いたが、例えばカメラのレンズのように、数枚
のレンズを貼り合せ、または組合せて集光素子としても
よい。また第1図の構成を数組直列に配置してもよい。
This light is made into parallel light by the exit side convex lens 5 to obtain a uniform beam 6, thereby converting the intensity distribution beam 2 into a uniform beam 6.
Convert to In this embodiment, a single convex lens is used as the condensing element, but the condensing element may also be formed by bonding or combining several lenses, for example, like a camera lens. Furthermore, several sets of the configuration shown in FIG. 1 may be arranged in series.

尚、散乱体には裏面に凹凸のあるガラス球を用いた。Note that a glass bulb with an uneven back surface was used as the scatterer.

第2図(a)に本発明による光ビームホモジナイザの第
2の実施例を示す。入射側凹面鏡7に入射した強度分布
ビーム2は、焦点位置3に集光される。集光された光は
、焦点位置3に置いた散乱体4の影響を受け、散乱され
る。この光を出射側凹面鏡8にて平行光にし、均一ビー
ム6を得ることにより、強度分布ビーム2を均一ビーム
6に変換する。
FIG. 2(a) shows a second embodiment of a light beam homogenizer according to the present invention. The intensity distribution beam 2 that has entered the incident side concave mirror 7 is focused at a focal point position 3. The focused light is affected by the scatterer 4 placed at the focal point position 3 and is scattered. The intensity distribution beam 2 is converted into a uniform beam 6 by converting this light into parallel light by the exit side concave mirror 8 to obtain a uniform beam 6.

この実施例では出射側凹面鏡8に孔を設けているが、出
射側凹面鏡に孔を設けることなく、第2図(b)の如く
各凹面鏡を配置してもよい。この場合は均一ビーム中に
入射側凹面鏡の影ができないのでより均一性のよいビー
ムとなる。また、集光素子として凹面鏡を用いているが
、平面鏡と凸レンズを組合せて集光素子としてもよい。
In this embodiment, the exit side concave mirror 8 is provided with a hole, but each concave mirror may be arranged as shown in FIG. 2(b) without providing a hole on the exit side concave mirror. In this case, the shadow of the concave mirror on the incident side is not formed in the uniform beam, resulting in a beam with better uniformity. Furthermore, although a concave mirror is used as the condensing element, the condensing element may also be a combination of a plane mirror and a convex lens.

この場合は平面鏡と凸レンズの配置を工夫することで、
各集光素子の配置の自由度が大となる。散乱体は第1の
実施例と同じものを用いた。
In this case, by carefully arranging the plane mirror and convex lens,
The degree of freedom in arranging each light condensing element is increased. The same scatterer as in the first example was used.

第3図に本発明による集光性透明体内1部の焦点位置に
散乱体を具備する光ビームホモジナイザの実施例を示す
。凸レンズ9は、内部に焦点位置3を含むように光軸方
向に長くする。入射側凸レンズ面10に入射した強度分
布ビーム2は、凸レンズ9内部の焦点位置3に集光され
る。集光された光は、焦点位置3に設けた散乱体4の影
響を受け、散乱される。この光を出射側凸レンズ面11
にて平行にし、均一ビーム6を得ることにより、強度分
布ビーム2を均一ビーム6に変換する。
FIG. 3 shows an embodiment of a light beam homogenizer according to the present invention, which is provided with a scatterer at a focal point in a part of a light-condensing transparent body. The convex lens 9 is elongated in the optical axis direction so as to include the focal point 3 therein. The intensity distribution beam 2 that has entered the entrance-side convex lens surface 10 is focused at a focal point 3 inside the convex lens 9 . The focused light is affected by the scatterer 4 provided at the focal point position 3 and is scattered. This light is transferred to the exit side convex lens surface 11
The intensity distribution beam 2 is converted into a uniform beam 6 by collimating the beams 2 and 3 to obtain a uniform beam 6.

この実施例では端部に集光作用のある透明媒体に凸レン
ズを用いたが、端部を平坦または凹面にし、この部分に
平凸レンズ、凸レンズ等を貼り合せた構成としてもよい
。あるいは端部形状は任意とし、イオン交換、不純物拡
散等により端部の組成を変え、端部屈折率を変化せしめ
て集光作用を生じるように構成してもよい。屈折率の変
化は端部だけでなく全体に渡って変化、すなわち透明体
内に屈折率分布を形成して集光機能をもたせてもよい。
In this embodiment, a convex lens is used as a transparent medium having a light condensing function at the end, but it may also be configured such that the end is made flat or concave and a plano-convex lens, a convex lens, etc. is bonded to this part. Alternatively, the shape of the end portion may be arbitrary, and the composition of the end portion may be changed by ion exchange, impurity diffusion, etc., and the refractive index of the end portion may be changed to produce a light condensing effect. The refractive index may change not only at the ends but also throughout the transparent body, that is, a refractive index distribution may be formed within the transparent body to provide a light condensing function.

次に、第3図に示した本発明による集光性透明体内部の
焦点位置に散乱体を具備する光ビームホモジナイザの散
乱体の形成方法を説明する。第4図(a)に散乱体を形
成する前の、内部に焦点位置を持つ凸レンズ9を示す。
Next, a method of forming a scatterer of a light beam homogenizer having a scatterer at a focal point inside a light-condensing transparent body according to the present invention shown in FIG. 3 will be described. FIG. 4(a) shows a convex lens 9 having an internal focal point before forming a scatterer.

この凸レンズ9に第4図(b)に示すように入射側凸レ
ンズ面10よりレーザ光12を入射すると、レーザ光1
2は焦点位置3に集光される。レーザ光が集光されたた
め、焦点位置3におけるレーザ光のパワー密度は増大す
る。レーザ光のパワー密度が増大したため、焦点位置3
は熱あるいは光化学反応によって加工され、散乱体が形
成される。この結果、第4図(C)に示すように、レー
ザ光12を照射したことにより焦点位置3に散乱体4を
形成することができる。
When a laser beam 12 is incident on this convex lens 9 from the entrance side convex lens surface 10 as shown in FIG. 4(b), the laser beam 1
2 is condensed at focal point position 3. Since the laser beam is focused, the power density of the laser beam at the focal point position 3 increases. Because the power density of the laser beam has increased, the focal position 3
is processed by heat or photochemical reaction to form a scatterer. As a result, a scatterer 4 can be formed at the focal position 3 by irradiating the laser beam 12, as shown in FIG. 4(C).

また、散乱体は透明体を凸レンズにする以前、すなわち
端部を集光機能を設ける以前、すなわち端部に集光機能
を設ける以前の透明体に集光光学系を介してレーザ光を
照射して形成し、この後、透明体端部を加工して集光性
をもたせて集光性透明体としてもよい。
In addition, the scatterer is made by irradiating the transparent body with laser light through a condensing optical system before the transparent body is made into a convex lens, that is, before the end has a condensing function, that is, before the end has a condensing function. After that, the ends of the transparent body may be processed to have light condensing properties to form a light condensing transparent body.

実施例では表面に凹凸のあるガラス球を散乱体に用いた
が、他の材料、例えば、気泡を多数内包するガラス球、
ガラス板あるいはオパール(石英の微粒子の集合体であ
る)のように微粒子の集合体から成る球や板等、光を散
乱するものであればどのようなものでもよい。
In the example, a glass sphere with an uneven surface was used as the scatterer, but other materials such as a glass sphere containing many bubbles,
Any material that scatters light may be used, such as a glass plate or a sphere or plate made of an aggregate of fine particles such as opal (which is an aggregate of fine quartz particles).

〔発明の効果〕〔Effect of the invention〕

以上述べたように本発明によれば、横断面内に強度分布
を持つ強度分布ビームを横断面内に強度分布が均一であ
る均一ビームに変換することができる。
As described above, according to the present invention, an intensity distribution beam having an intensity distribution within a cross section can be converted into a uniform beam having an even intensity distribution within a cross section.

さらに、本発明による集光性透明体内部の焦点位置に散
乱体を具備する光ビームホモジナイザにおいては、集光
素子および散乱体を一体化することにより、外部から機
械的に振動を受けても集光素子と散乱体との位置関係が
不動であるため、光軸がずれにくい。
Furthermore, in the light beam homogenizer according to the present invention, which is equipped with a scatterer at the focal point inside the light-concentrating transparent body, by integrating the light-condensing element and the scatterer, the light beam can be focused even when subjected to external mechanical vibrations. Since the positional relationship between the optical element and the scatterer is immovable, the optical axis is unlikely to shift.

また、本発明による光ビームホモジナイザの散乱体の形
成方法は、レーザ光により焦点位置を正確に検出し加工
するために簡便かつ正確な形成方法である。
Further, the method for forming the scatterer of the light beam homogenizer according to the present invention is a simple and accurate method for accurately detecting and processing the focal position using laser light.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の第1の実施例である光ビームホモジナ
イザの構成図、第2図(a)、(b)は本発明の第2の
実施例である光ビームホモジナイザの構成図、第3図は
本発明による集光性透明体内部の焦点位置に散乱体を具
備する光ビームホモジナイザの実施例の構成図である。 また、第4図(a)。 (b)、(c)は本発明による光ビームホモジナイザの
散乱体の形成方法を示す概念図であり、第4図(a)、
散乱体を形成する前、(b)は形成中、(c)は形成し
た後の状態をあられす。さらに、第5図(a)は従来の
光ビームホモジナイザの構成図、第5図(b)は従来の
光ビームホモジナイザにおける均一ビームの横断面内の
強度分布である。 1・・・入射側凸レンズ、2・・・強度分布ビーム、3
・・・焦点位置、4・・・散乱体、5・・・出射側凸レ
ンズ、6・・・均一ビーム、7・・・入射側凹面鏡、8
・・・出射側凹面鏡、9・・・凸レンズ、10・・・入
射側凸レンズ面、11・・・出射側凸レンズ面、12・
・・レーザ光、13・・・プリズム。
FIG. 1 is a block diagram of a light beam homogenizer which is a first embodiment of the present invention, and FIGS. 2(a) and (b) are block diagrams of a light beam homogenizer which is a second embodiment of the present invention. FIG. 3 is a configuration diagram of an embodiment of a light beam homogenizer including a scatterer at a focal position inside a light-condensing transparent body according to the present invention. Also, FIG. 4(a). (b) and (c) are conceptual diagrams showing a method of forming a scatterer of a light beam homogenizer according to the present invention;
(b) shows the state before the scatterer is formed, (b) shows the state during formation, and (c) shows the state after the scatterer is formed. Furthermore, FIG. 5(a) is a block diagram of a conventional optical beam homogenizer, and FIG. 5(b) is an intensity distribution in a cross section of a uniform beam in the conventional optical beam homogenizer. 1... Incidence side convex lens, 2... Intensity distribution beam, 3
... Focal point position, 4... Scatterer, 5... Outgoing side convex lens, 6... Uniform beam, 7... Incoming side concave mirror, 8
... Output side concave mirror, 9... Convex lens, 10... Incident side convex lens surface, 11... Output side convex lens surface, 12.
... Laser light, 13... Prism.

Claims (3)

【特許請求の範囲】[Claims] (1)平行光を一点に集光する集光素子を少くとも2つ
、互いの焦点が同じ位置になるよう配置し、前記集光素
子の焦点の位置(以下、焦点位置)に散乱体を置いたこ
とを特徴とする光ビームホモジナイザ。
(1) At least two condensing elements that condense parallel light to one point are arranged so that their focal points are at the same position, and a scatterer is placed at the focal point of the condensing elements (hereinafter referred to as the focal position). A light beam homogenizer characterized by:
(2)入射した平行光を自己内部の一点に集光する集光
性透明体の内部焦点位置に散乱体を設けたことを特徴と
する光ビームホモジナイザ。
(2) A light beam homogenizer, characterized in that a scatterer is provided at the internal focus position of a light-condensing transparent body that focuses incident parallel light onto a single point inside the light beam homogenizer.
(3)透明体または集光性透明体に集光光学系を介して
、または集光光学系を介さず直接にレーザ光を照射して
、前記透明体または集光性透明体内焦点位置に物理的・
化学的性質が周囲とは異なる領域を形成する工程を有す
ることを特徴する光ビームホモジナイザの形成方法。
(3) Irradiating a transparent body or a light-concentrating transparent body with a laser beam through a condensing optical system or directly without passing through a condensing optical system to physically target the focal position within the transparent body or light-concentrating transparent body. Target/
A method for forming a light beam homogenizer, comprising the step of forming a region having different chemical properties from surrounding areas.
JP63142996A 1988-06-09 1988-06-09 Light beam homogenizer and formation thereof Pending JPH021811A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63142996A JPH021811A (en) 1988-06-09 1988-06-09 Light beam homogenizer and formation thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63142996A JPH021811A (en) 1988-06-09 1988-06-09 Light beam homogenizer and formation thereof

Publications (1)

Publication Number Publication Date
JPH021811A true JPH021811A (en) 1990-01-08

Family

ID=15328518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63142996A Pending JPH021811A (en) 1988-06-09 1988-06-09 Light beam homogenizer and formation thereof

Country Status (1)

Country Link
JP (1) JPH021811A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100862954B1 (en) * 2002-01-15 2008-10-13 노키아 코포레이션 Rescue beacon
US8432500B2 (en) 2008-09-23 2013-04-30 Koninklijke Philips Electronics N.V. Lighting device with thermally variable reflecting element

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100862954B1 (en) * 2002-01-15 2008-10-13 노키아 코포레이션 Rescue beacon
US8432500B2 (en) 2008-09-23 2013-04-30 Koninklijke Philips Electronics N.V. Lighting device with thermally variable reflecting element

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