JPH0943627A - Liquid crystal display device and production method therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compact and light weight display device which generates on deviation in the direction of line of sight in a receiving image for both communicators in a two-way communication and to which an image can be inputted. SOLUTION: On an element side substrate 20 on which a liquid crystal driving active element 12 of a liquid crystal display device is formed in a display screen, a photo diode 17 of a part of an image input element is formed at least. Also, a CCD 14 of the other part of the image input element and an image processing circuit 15 are formed similarly on the element side substrate 20.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid crystal display device used in a two-way image communication device such as a videophone, a portable information terminal and various video devices.

[0002]

2. Description of the Related Art With the development of information communication networks in recent years, bidirectional multimedia information communication with image information such as moving images and still images in addition to the conventional information transmission using voice and characters. The need for is increasing. Conventionally, a communication device such as a videophone has been considered as a means for bidirectionally communicating image information and audio information, and recently, images recorded by a video camera have also been exchanged through a telephone line.

[0003]

However, communication devices that handle bidirectional image information have the following problems.

In the case of two-way communication such as a videophone, the line of sight of the communicator is directed to the image display portion where the image of the other party is displayed, whereas the camera portion which is the image input portion is It cannot be placed on an extension of that line of sight. For this reason, the display images received by the communicators are images in which the line-of-sight directions of the two are shifted.

As an image input device usually used for home video for home use, a structure including an optical system as shown in FIG. 10, that is, a lens 1, an iris 2 and an IR is used.
Cut filter 3, optical low-pass filter 4, color filter 5, charge-coupled device (Charge Coupl)
ed Device (hereinafter simply referred to as CCD) 6, and CC
In general, the camera is composed of a signal / image processing circuit 7 connected to D6, a color filter array is provided on an image detection element such as a CCD array, and an incident image is reduced and projected to obtain color image information. However, in the case of incorporating this into a portable information terminal or the like having a communication function, downsizing is inevitable due to the necessity of configuring an optical system.

Further, Japanese Patent Application Laid-Open No. 7-28095 proposes a liquid crystal display device provided with an image input element. In this device, a driving active element is provided on one of a pair of substrates of a liquid crystal display device, and a photodiode and a MOS that are image input elements are provided on the other substrate.
A transistor is formed. However, in this apparatus, the substrate forming the image input element is limited to the transparent glass substrate. Therefore, the process temperature is limited to the heat resistant temperature of the glass substrate, and it is difficult to form a high-performance image input device. Further, if a transparent quartz substrate having high heat resistance is used, the temperature limitation can be eliminated, but in this case, there is a problem that the manufacturing cost becomes high.

The present invention has been made to solve the above problems, and by forming an image input element in the display screen of a liquid crystal display device, the display screen itself is
A liquid crystal display device having a function of inputting and displaying an image, in which a function as an image input device is added to achieve miniaturization and a display image received by both communication parties does not shift in a line-of-sight direction, and a manufacturing method thereof. The purpose is to provide.

[0008]

A liquid crystal display device according to the present invention comprises an element side substrate and a counter substrate arranged so as to face each other, and a liquid crystal layer sealed between the element side substrate and the counter substrate. In the liquid crystal display device, the element-side substrate includes a plurality of display electrodes for applying a display voltage to the liquid crystal layer, and a plurality of active elements for respectively supplying the display voltage to the plurality of display electrodes. And further comprising an image input device provided on the device-side substrate for inputting an image, and an image processing unit for processing the image input from the image input device. The above object is achieved by.

The image input element has a light receiving portion and a charge coupled element electrically connected to the light receiving portion, and the light receiving portion may be provided in the vicinity of the display electrode. .

The element-side substrate has a substrate on which the active element, the image input element, and the image processing section are formed, and the active element, the image input element, and the image processing section are provided on the active element, the image input element, and the image processing section. An insulating film is provided, the display electrode and the light receiving portion are formed on the insulating film, and are connected to the active device and the charge coupled device through contact holes provided in the insulating film. It may have been done.

The plurality of display electrodes are arranged in a matrix, and the counter substrate corresponds to between a substrate, a counter electrode formed on the substrate, and the plurality of display electrodes on the substrate. A black matrix provided at a position, and the light receiving unit may be arranged at a position corresponding to the opening provided in the black matrix.

The liquid crystal display device further includes a tubular member provided between the opening and the light receiving portion,
The tubular member may be a hollow member having a wall made of a light absorbing material.

The counter substrate may further have a color filter arranged on the substrate, and a part of the color filter may be arranged in the opening.

The element-side substrate may include a semiconductor substrate, and at least the active element and the image input element may be formed on the semiconductor substrate.

The element-side substrate may be a semiconductor substrate, and a drive circuit for applying the display voltage to the active element may be further formed on the semiconductor substrate.

The plurality of display electrodes may be reflection electrodes made of a light reflecting material, and the image processing section may be formed on the element side substrate.

The element side substrate has a light transmissive substrate, the active element and the image input element are formed on the light transmissive substrate, and the plurality of display electrodes are made of a light transmissive material. It may be formed.

The liquid crystal display device further includes a backlight provided on the side of the element side substrate opposite to the liquid crystal layer, and the image processing section may be formed on the light transmissive substrate. Good.

The image input device is a semiconductor device formed on a semiconductor substrate, and may be transferred onto the light transmissive substrate.

A method of manufacturing a liquid crystal display device according to the present invention comprises an element-side substrate and an opposite substrate arranged to face each other, a liquid crystal layer sandwiched between the element-side substrate and the opposite substrate,
A method for manufacturing a liquid crystal display device, comprising: an image input device for inputting an image; and an image processing unit for processing the input image, wherein a plurality of liquid crystal display devices are provided with a display voltage. A step of producing an element-side substrate by forming display electrodes, active elements for respectively supplying the display voltage to the plurality of display electrodes, and the image input element on the substrate;
The step of adhering the element-side substrate and the counter substrate and forming a liquid crystal layer by enclosing a liquid crystal material between them is included, thereby achieving the above object.

The substrate of the element side substrate is a light-transmissive substrate, and the step of manufacturing the element side substrate includes the step of forming the image input element on a semiconductor substrate and the step of forming the image input element formed. The step of transferring to a light transmissive substrate may be included.

The step of manufacturing the element-side substrate includes the steps of forming the active element, the image processing section, and a drive circuit section for supplying the display voltage to the active element on the semiconductor substrate, and the active element. The image processing unit and the drive circuit unit may further include a step of transferring the image processing unit and the drive circuit unit onto the light transmissive substrate.

The manufacturing method further includes a step of forming the counter substrate by forming a counter electrode and a black matrix on the substrate, the black matrix corresponding to a space between the plurality of display electrodes. May have an image input opening, and at least a part of the image input element may be provided at a position corresponding to the image input opening.

The step of forming the counter substrate includes the step of forming a color filter, and a part of the color filter may be arranged in the image input opening.

The image input element has a light receiving portion and a charge coupled element electrically connected to the light receiving portion, and at least the light receiving portion is arranged at a position corresponding to the image input opening. Good.

In the above manufacturing method, a hollow cylindrical member having a wall portion formed of a light absorbing material is located between the image input opening and at least a part of the image input element. The step of providing may be further included.

The substrate of the element side substrate is a semiconductor substrate, and the step of manufacturing the element side substrate further includes a step of forming at least a part of the active element and the image input element on the semiconductor substrate. May be.

The step of manufacturing the element-side substrate may further include the step of forming a drive circuit section for supplying the image processing section and the display voltage to the active element on the semiconductor substrate.

In the liquid crystal display device of the present invention, in the case of two-way communication such as a videophone, since the display screen seen by the communicator has at least one image input element, The received display image does not become an image in which the line-of-sight directions of each other are different from each other, unlike the conventional case.

If, for example, a charge coupled device or a photodiode is used as the image input device and the image input device and its image processing section are provided on the same substrate as the active device, the entire display screen can be used as the image input device. , An optical system for reducing and projecting an input image onto a detection element unlike a normal camera is not required, and a device that integrates image display and image input can be configured, which is small and portable. The image communication device can be configured. Moreover, the manufacturing process is also simplified.

Further, if the image input opening is provided in the black matrix provided between the pixel portions, the image input element can be arranged in the display screen regardless of the display of the screen. .

Further, if a cylindrical member made of a material that absorbs scattered light is interposed between the image input aperture and the image input element, incident light other than the vertical component to the image input element is scattered. Since the light is absorbed without being detected, the image input element detects only the vertical component of the incident light and a signal with a good S / N ratio is obtained.

Further, if a part of the color filter is extended and arranged in the input opening, an optical signal corresponding to the color of the color filter on each pixel is input to the image input element.

Furthermore, if a semiconductor substrate is used as the element side substrate, active elements and image input elements can be easily manufactured by using an LSI process, and reliability is improved.

Further, the image input device is separately formed on the semiconductor substrate, and is transferred and mounted on the liquid crystal display device, so that the conventional LSI process is used for forming the image input device, and high performance and high performance are achieved. It is possible to produce a reliable image input device with a high yield and mount it on a liquid crystal display device.

[0036]

Embodiments of the present invention will be described below with reference to the drawings. The present invention is not limited to the embodiments described below.

(Embodiment 1) FIG. 1 is a sectional view of a reflective color liquid crystal display device showing an embodiment of the present invention.

In FIG. 1, a liquid crystal driving active element 12 and a liquid crystal driving driver circuit 13 are provided on a semiconductor substrate 11 made of, for example, silicon (Si), and further,
The shift register unit 14 and the image processing circuit 15 each including a charge coupled device (CCD) that is a part of the image input device are provided. The shift register unit 14 and the image processing circuit 15 constitute an image processing unit. Active element 12,
Circuit 13, shift register unit 14 and image processing circuit 1
Interlayer insulating films 16 a to 16 c are provided on the upper part of the wiring 5.

A photodiode 17, which is a part of an image input element, is provided above the CCD shift register section 14 and the image processing element section 15 via the interlayer insulating film 16a. The photodiode 17 is connected to the CCD shift register section 14 in the lower layer by a signal line 18, and functions as a photosensitive section of the CCD. Further, the liquid crystal driving active element 12 and the liquid crystal driving driver circuit 13
A reflective electrode 19 for driving a liquid crystal is provided above the substrate via the interlayer insulating films 16a to 16c. The liquid crystal driving reflection electrode 19 is connected to the liquid crystal driving active element 12 located therebelow. An alignment film (not shown) is provided on the reflective electrode 19. Thereby, the element side substrate 20 is configured.

On the other hand, the counter substrate 25 has a substrate 21 which is a transparent insulating substrate, and a color filter 22 and a black matrix 23 made of a light absorbing material are provided on the substrate 21. Further, a counter electrode 24 made of a transparent conductive material is provided on the color filters 22 and the black matrix 23, and an alignment film (not shown) is further provided thereon. The counter substrate 25 and the element-side substrate 20 having such a configuration are arranged so as to face each other with the alignment films (not shown) inside, and the liquid crystal layer 26 is sandwiched therebetween.

On each photodiode 17 below the black matrix 23, a pillar 27 formed of a polymer material or the like as a cylindrical member is provided. The inside of the pillar 27 is hollow and is used as a light passage path. As a result, the image light from the outside that has passed through the pillar 27 can enter the photodiode 17, which is the photosensitive portion of the image input element. As the polymer material forming the pillar 27, a material that does not scatter light, for example, a polymer mixed with a black pigment as used in a resin black matrix can be used, and thereby, in the optical path ( It is possible to suppress the scattering of incident light inside the pillar 27). Therefore, only the vertically incident light can be guided to the photodiode 17, and an image with good contrast can be obtained. Further, since the pillar 27 is formed below the black matrix 23, even if it is black, it does not appear as a black dot on the display screen.
A part of the color filter 22 of each color arranged on each pixel is arranged so as to extend in a position corresponding to the pillar 27 of the counter substrate 25, that is, in the black matrix 23. As a result, an optical signal corresponding to the color of the color filter on each pixel is input to the photodiode 17.

As described above, in the liquid crystal display device of this embodiment, the color image input device including the photodiode 17, the signal line 18, the shift register section 14, the image processing circuit 15, and the pillar 27 is incorporated in the liquid crystal display screen. Has been.

A method of manufacturing a liquid crystal display device having the structure shown in FIG. 1 will be described below with reference to FIGS.

FIG. 2 is a cross-sectional view sequentially showing each manufacturing process of the reflective color liquid crystal display device of FIG.

First, as shown in FIG. 2A, on the semiconductor substrate 11, the liquid crystal driving active element 12 and its peripheral circuits,
A liquid crystal driving driver circuit 13, a CCD 14 which is a part of an image input element, and an image processing circuit 15 are formed. In this embodiment, a silicon (Si) substrate is used as the semiconductor substrate 11. A conventional IC process can be used to form these elements and circuits.

Next, as shown in FIG. 2B, an interlayer insulating film 16a is formed on the substrate 11 so as to cover these elements and circuits, and the interlayer insulating film 16a is planarized. Then, a photodiode is formed on the interlayer insulating film 16a. Form 17. The interlayer insulating film 16a is formed by, for example, APCVD method, PCVD method (plasma C
VD method). In this embodiment, A
After a SiO ₂ film having a thickness of 500 nm is formed as the interlayer insulating film 16a by the PCVD method, CMP (Chemical Mec
hanical polishing) method or the like
The surface a was flattened.

The photodiode 17 is formed as follows. First, an n ⁺ amorphous Si (n ⁺ a-Si) film 17a is formed on the interlayer insulating film 16a by a low pressure CVD method. In the present embodiment, the n ⁺ a-Si film 17a is 2
It was formed to a thickness of 100 nm at a temperature of 00 ° C to 300 ° C. Then, after making the n ⁺ a-Si film 17a into an island by photolithography and etching, p
The p ⁺ a-Si layer 17b for forming the −n junction is formed by using, for example, an ion implantation method or a thermal diffusion method. The n ⁺ a-Si film 17a and the p ⁺ a-Si layer 17b form a photodiode 17 that converts light energy into a current or a voltage.

Next, as shown in FIG. 3, after forming an interlayer insulating film 16b on the photodiode 17, a contact hole for connecting the photodiode 17 to the CCD shift register portion 14 is formed by photolithography and etching. Then, the signal line 18 is formed using a metal material. In the present embodiment, the interlayer insulating film 16b
As a result, a SiO ₂ film having a thickness of 500 nm was formed by the CVD method. In addition, the n ⁺ a-Si film 17a and the p ⁺ a-
The signal line 18 connecting the Si layer 17b to the CCD shift register circuit 14 and the image processing circuit 15 is made of aluminum (Al).

Next, the liquid crystal driving electrode 19 is formed from a reflective material. In this embodiment, the method shown in Japanese Patent Laid-Open No. 6-75238 is used to form the liquid crystal driving electrode 19.

As shown in FIG. 3, first, a lower layer of the interlayer insulating film 16c is formed as a base film of the electrode 19 on the substrate 11 using, for example, a photosensitive acrylic resin, and its surface is processed into a dot shape. Subsequently, heat treatment is performed to round the edges of each dot. This heat treatment is 120 ° C to 250
It is performed in a temperature range of ° C. After the heat treatment, an upper layer of the insulating film 16c is further formed thereon by, for example, a photosensitive acrylic resin to fill the flat portion between the dots. At this time, the height of the convex portion of the interlayer insulating film 16c can be adjusted by controlling the height of each dot in the lower layer of the insulating film 16c by etching. In this embodiment, the lower layer of the interlayer insulating film 16c is formed to a thickness of 2 μm by spin coating.
The upper layer was formed to a thickness of 0.5 μm. The height of each dot in the lower layer was set so that the height of the convex portion after forming the upper layer was 1 μm.

The uneven shape of the interlayer insulating film 16c suppresses interference of light reflected by the liquid crystal driving electrode 19 formed on the flat portion between the dots by filling the flat portion between the dots, and the reflection characteristic of the electrode 19 is improved. The dot spacing and its size are designed to be optimal. Further, since the uneven shape is formed by the photolithography method using the photomask, the reflective electrode 19 can be formed with good reproducibility.

Subsequently, as shown in FIG. 2C, a contact hole for connecting the active element 12 and the liquid crystal driving reflection electrode 19 is formed by photolithography and etching, and then a sputtering method or an evaporation method is used. hand,
A film of a metal material such as Al, Ag, Ni, Cr, and Au is formed on the uneven interlayer insulating film 16c. In this embodiment, a film made of Al is formed to a thickness of 1 μm.

By patterning this metal film using photolithography and etching, a plurality of liquid crystal driving reflection electrodes 19 arranged in a matrix are formed.
Is obtained. Each reflective electrode 19 is connected to the corresponding active element 12 via a contact hole. At the same time when the reflective electrode 19 is formed, the interlayer insulating film 16c on the photodiode 17 is also removed by etching as shown in FIG. This improves the sensitivity of the photodiode 17. Further, as shown in FIG. 3, each reflective electrode 19 also serves as a light-shielding film that prevents light from the surroundings other than the input light from entering the photodiode 17.

Each of the liquid crystal driving reflection electrodes 19 arranged in a matrix corresponds to one pixel, and the photodiode 17 is arranged between the electrodes 19 as shown in FIG. Therefore, by providing the image input opening 28 as an image light incident portion in the black matrix 23 formed between the pixel portions where the reflective electrode 19 and the counter electrode 24 overlap with respect to the display image, The photodiode 17 can be arranged in the display screen regardless of the display.

Next, as shown in FIG. 2 (E), the substrate 11
An alignment film 29 is formed over the entire surface of the substrate, and a rubbing process for controlling the alignment direction of liquid crystal molecules is performed. Alignment film 29
A transparent polymer material such as polyimide can be used as the material. In the present embodiment, an alignment film made of polyimide is formed on the substrate 11 and subjected to horizontal alignment processing. After this alignment treatment, the alignment film 29 on the photodiode 17 is removed by photolithography and etching.

Subsequently, as shown in FIG. 2E, a pillar 27 is formed near the upper portion of the photodiode 17 as follows. First, an ultraviolet curable polyimide resin in which a black pigment is dispersed is spin-coated on the alignment film 29.
Then, using a photolithography method, only the polyimide resin in the vicinity of the upper end portion of the photodiode 17 is cured by ultraviolet irradiation with a mask, and the non-irradiated portion is removed by a solvent. At this time, using a photomask,
The portion above the photodiode 17, that is, the portion inside the pillar 27 is not irradiated with ultraviolet light, and only the wall portion of the pillar 27 is cured. This allows pillar 2
The inside of 7 can be hollow. The height of the pillar 27 is made equal to the substrate interval of the liquid crystal cell by adjusting the thickness when the polyimide resin is applied. In this embodiment, the height of the pillar 27 is 4 μm. This pillar 27
Thereby, the incident light can reach the photodiode 17 without being disturbed by the surrounding liquid crystal material. Further, since the wall portion of the pillar 27 is formed of a polymer material in which a black pigment is dispersed, components other than the components that are vertically incident on the photodiode 17 are absorbed without being scattered. Therefore, the photodiode 17 detects only the vertical component of the incident light, and a signal with a good S / N ratio can be obtained. With the above, the element-side substrate 20 is completed.

In the process of manufacturing the device-side substrate 20 described above, all processes performed after manufacturing the devices 12 and 14 and the circuits 13 and 15 using the conventional LSI technique are performed at 600 ° C. or lower. Therefore, re-diffusion of impurities does not occur in the element manufactured by using the LSI technique, and the LSI characteristics of the element previously formed on the semiconductor substrate 11 are not damaged by the subsequent manufacturing process. Further, by providing a reflective liquid crystal display device using a semiconductor substrate as the substrate 11 of the element side substrate 20, for example, a liquid crystal driving element, a liquid crystal driving driver circuit, a CCD shift register, an image processing circuit, etc. are implemented in the present embodiment. As described in the form, it becomes possible to manufacture by using the LSI process, and the reliability can be improved. Further, the manufacturing cost can be reduced by forming each driver circuit on the same substrate to have a monolithic structure.

On the other hand, the counter substrate 25 is manufactured as follows. First, a transparent substrate 21 is prepared as shown in FIG. 2 (F), and a color filter 22 is formed thereon by an electrodeposition method or a photolithography method as shown in FIG. 2 (G). Color filter 22 is red, blue, green (R, G, B)
Of the three primary colors, each filter portion is formed so as to correspond to one liquid crystal driving electrode 19. In this embodiment, the transparent substrate 21 has a thickness of 1.1 μm.
m glass substrate was used.

Subsequently, the liquid crystal driving electrode 19 on the substrate 21
The black matrix 23 is formed by using a light absorbing material in a portion corresponding to the space. In the black matrix 23, as shown in FIG. 1, an image input opening 28 for allowing light to enter the photodiode 17 is provided, and an adjacent filter portion is extended in the opening 28. Is formed. As a result, light corresponding to each of the three primary colors of R, G, and B can be guided to the photodiode 17, and an image signal corresponding to each color can be obtained.
In this embodiment, like the pillar 27, the black matrix 23 is formed of a polymer material in which a black pigment is dispersed, and the size of the opening 28 is 80 μm × 80 μm.

Further, as shown in FIG. 2G, a counter electrode 24 is formed on the color filter 22 and the black matrix 23 by using a transparent conductive material. In this embodiment, the counter electrode 24 made of ITO (Indium Tin Oxide) is used.
Was formed to a thickness of 100 nm. Further, an alignment film (not shown) is formed on the entire surface of the substrate 21, and the alignment process is performed on the alignment film. In this embodiment, similarly to the alignment film 29 of the element side substrate 20, a polyimide resin is used to form the alignment film, and the horizontal alignment process is performed. Thus, the counter substrate 25 is completed.

Next, spacers (not shown) for maintaining a space between the substrates are scattered on the element side substrate 20, and the counter substrate 2 is formed.
A sealing material (not shown) for adhesion is transferred onto the pattern 5 in a pattern. In this embodiment, the pillar 2 is used as the spacer.
The one having the same particle size of 4 μm as the height of 7 was used. Subsequently, with the reflective electrode 19 for driving the liquid crystal and the color filter 22, and the pillar 27 and the black matrix 23 aligned, respectively, as shown in FIG. 2 (I), the element-side substrate 20 and the counter substrate 25 are separated from each other. to paste together. A liquid crystal cell is completed by injecting a liquid crystal material between the bonded substrates 20 and 25 to form a liquid crystal layer 26. In this embodiment, as the liquid crystal material, for example, a phase transition type guest-host liquid crystal material using a black dye (manufactured by Merck: product name ZLI2
327) is an optically active substance (manufactured by Merck & Co., Inc .: trade name S81
A mixture containing 4.5% of 1) is used. That is, the liquid crystal display device of the present embodiment performs display in the phase transition type guest-host mode using the black dye. As a result, it is not necessary to use a polarizing plate, and bright display using all the components of light becomes possible.

Finally, the liquid crystal driving driver circuit 13, the image processing section and the like are connected to an external circuit and the like to complete the liquid crystal display device shown in FIG.

In the liquid crystal display device shown in FIG. 1, the input image is detected as follows.

First, as shown in FIG. 1, light from a certain object passes through the color filter 22 through the image input opening 28 as an entrance provided in the black matrix 23 in the display screen. The light enters the photodiode 17 as a signal of each color component. The optical signal input to each photodiode 17 is absorbed by the wall portion of the pillar 27 without being scattered in the passage, except for the component perpendicular to the photodiode 17, so Only the vertical component directly facing the display screen will be incident. The arrangement of the photodiodes 17 for detecting the R, G, and B color signals in the screen, that is, the arrangement in which a part of the color filter 22 is extended to the image input opening 28 is as shown in FIG. By using the delta arrangement for the arrangement of each color, it is possible to arrange the elements that sense the color signals of three colors of R, G and B side by side at substantially the same position, and reduce the image shift due to the difference in the detection position. be able to. The image signal input to the image input device from each photodiode 17 is transferred to the device side substrate 2
It is transferred to the image processing unit 15 by the CCD shift register unit 14 formed to 0, where the image signal processing is performed and the input image is obtained.

Although FIG. 1 shows only a portion corresponding to three pixels of the liquid crystal display device of the present embodiment,
An image is input as described above on the entire display screen, that is, the entire area where the pixels are provided. Since the image input elements are thus arranged in the line-of-sight direction of the communicator, it is possible to input an image in which the line-of-sight direction of the communicator is the same when performing bidirectional communication including images. Further, since the entire display screen functions as an image input surface on the image input device, the optical system as shown in FIG. 10 is not necessary unlike the conventional camera, and the device which integrates the image display and the image input is used. It is possible to realize a small and lightweight display device for two-way communication.

(Second Embodiment) Next, a second embodiment of the liquid crystal display device of the present invention will be described with reference to FIG.

In this embodiment, as shown in FIG. 5, the color filter 22 is not provided above the photodiode 17, that is, in the opening 28, and therefore the input image is a monochrome image. Except for this point, the configuration of this embodiment is the same as that of the above-described first embodiment, and thus the description thereof is omitted.

As in the first embodiment, the color filter 2
When the photodiodes 2 are provided in the opening 28 and the respective color signals are detected by the photodiodes 17, the photodiodes 17 are required for each color. Therefore, the photodiodes 17 are configured as a set of three. . Therefore, in order to improve the resolution of the input image, the photodiode 1
It is necessary to increase the number of 7. On the other hand, as in the present embodiment, the color filter 22 is provided on the photodiode 17.
If the element is not provided, the obtained image will be a monochrome image, but if the same number of input elements as the color input is formed, the resolution will be tripled. Therefore, the liquid crystal display device of this embodiment is suitable for inputting a high-resolution image.

In the first and second embodiments, the semiconductor substrate 11 is used, and the liquid crystal driving active element 12 and the liquid crystal driving driver circuit 13, the CCD shift register section 14 and the image processing circuit 15 are also formed on the semiconductor substrate 11. Fabricated above, a reflective liquid crystal panel is constructed. However, these circuits 13, 14, 15 are external IC circuits,
If a transparent glass substrate is used as the element side substrate 20 and the liquid crystal driving active element 12 and the photodiode 17 are formed on the substrate, a transmissive liquid crystal display device having an image input element can be obtained.

Further, the display mode of the liquid crystal display device of Embodiments 1 and 2 is the phase transition type guest-host mode, but it is not limited to this. For example, even if a light-scattering display mode such as a polymer dispersed liquid crystal display device or a birefringence display mode used in a ferroelectric liquid crystal display device is used, a liquid crystal having an image input element having the same effect is obtained. A display device can be configured.

(Third Embodiment) Hereinafter, a third embodiment of the liquid crystal display device of the present invention will be described with reference to FIG.
In this embodiment, a transparent insulating substrate such as a glass substrate is used as the element-side substrate instead of the semiconductor substrate.

FIG. 6 is a sectional view of the transmissive color liquid crystal display device of this embodiment. The liquid crystal display device according to the present embodiment has, for example, a region of the transparent insulating substrate 101 such as a glass substrate where pixels are provided (hereinafter, simply referred to as a pixel portion),
Liquid crystal driving active element 102, liquid crystal driving display electrode 10
3 and the photodiode 104 are formed.
The photodiode 104 is connected by a signal line (not shown) to a shift register (not shown) composed of a CCD provided in the peripheral portion of the substrate 101, that is, in the peripheral portion of the pixel portion. Functions as an input element. Further, in the peripheral portion of the substrate 101, a liquid crystal driving peripheral circuit that applies a display voltage to the active element 102 and an image processing circuit (not shown) that processes an image input from the image input element are provided. , And the active element 102 and the shift register, respectively. An alignment film (not shown) is further formed on these.

On the other hand, on the opposite side of the substrate 101 through the liquid crystal layer 105, an alignment film (not shown) and a transparent counter electrode 10 are provided.
A counter substrate having a transparent substrate 109 provided with a color filter 107 including three color filters of R, G, B and a black matrix 108 having an opening 111 is arranged. In the counter substrate, the black matrix 108 corresponds between the liquid crystal driving display electrodes 103,
In addition, the opening 111 in the black matrix 108 is aligned with the element side substrate so as to correspond to the photodiode 104.

A pillar 110, which is a cylindrical member having a wall formed of a polymer material or the like, is provided at a position corresponding to the opening in the black matrix 108, as in the first and second embodiments. ing. This pillar 11
When the inside of 0 is made hollow to form a light passage path, image light from the outside can be incident on the photodiode 104, which is a photosensitive portion. As the polymer material forming the wall portion of the pillar 110, a material that does not cause light scattering is used, and for example, a polymer material mixed with a black pigment such as used in a resin black matrix can be used. In this way, by forming the wall portion of the pillar 110 with a light-absorbing material, the inside of the optical path, that is, the pillar 11
It is possible to suppress the scattering of the incident light inside 0, and it is possible to guide only the light incident perpendicularly to the photodiode 104 to the photodiode 104. Therefore, an input image with good contrast can be obtained.

Since the pillars 110 are provided at the positions corresponding to the black matrix 108, the pillars 110 will not appear as black dots on the display screen even if they are black. Further, a part of the color filter 107 is extended and formed on the pillar 110, that is, in the opening 111.
As a result, light corresponding to the color of the color filter 107 enters the photodiode 104. As described above, the color image input device is incorporated in the liquid crystal display device of the present embodiment.

Next, an example of a method of manufacturing the liquid crystal display device having the structure of FIG. 6 will be described.

In this embodiment, in order to mount a high-performance image input device using a semiconductor element on a glass substrate having low heat resistance, the semiconductor element is formed on the semiconductor substrate and then the liquid crystal display device is constructed. Transfer to a glass substrate. As a method of mounting an element formed on a semiconductor substrate on a glass substrate, JP Salerno et al. (SID'93 Digest pp.6.
The method proposed in 3-66) can be used. In this method, first, a semiconductor element / circuit is manufactured using a single crystal Si film obtained by epitaxial growth on a single crystal Si wafer via an insulating film. Semiconductor device manufactured subsequently
Move and mount the circuit on the glass substrate. As a result, the pixel TF as a semiconductor element / circuit using the single crystal Si film
Active matrix LCD with T and drive circuit
Is created.

The method of manufacturing the liquid crystal display device of this embodiment will be described below with reference to FIG.

First, as shown in FIG. 8A, single crystal S
An insulating film 113 is formed on the i substrate 112. In this embodiment, a thermal oxidation film having a thickness of 1 μm is formed as the insulating film 113 by performing thermal oxidation treatment at 900 ° C. next,
The insulating film 113 on the end of the Si substrate 112 is removed to expose a part of the surface of the single crystal Si substrate 112, and then a poly-Si film 114 is formed on the substrate by using a plasma CVD method. A cap SiO ₂ layer 115 that covers this is formed. In this embodiment, the thickness of the poly-Si film 114 is 3000 Å, and the thickness of the cap SiO ₂ layer 115 is 3000 Å.

Next, as shown in FIG. 8B, a heater 116 using a hot filament is formed on the cap layer 115.
By scanning the surface of the substrate 112 while heating it in one direction, the poly-Si film is recrystallized (lateral epi growth) using the single crystal Si of the exposed portion of the end of the substrate 112 as a nucleus. A single crystal Si film is formed. After recrystallization, the cap layer 115 is removed by etching.

Next, as shown in FIG. 8C, each semiconductor element constituting the image input element is formed into a normal semiconductor by using the single crystal Si film formed on the insulating film 113 as described above. It is made by a manufacturing process. In this case, since the element is manufactured on the semiconductor substrate made of single crystal Si, there is no restriction on the process temperature due to the use of the glass substrate as in a normal liquid crystal display device. Therefore, a semiconductor element having high performance and high reliability can be manufactured. In this step, a shift register (not shown) including a photodiode 104 which is an image input element and a CCD, and an image processing circuit (not shown) are formed.

Further, as shown in FIG. 8C, at the same time as the image input element and the image processing circuit, the TFT 102 as an active element for driving the liquid crystal and a driving peripheral circuit (not shown) for supplying a display voltage thereto. Is manufactured using a single crystal Si film, an active matrix type liquid crystal display device with higher performance and higher definition can be realized. Among the elements described above, the photodiode 104 and the TFT 102 are arranged in each pixel in the pixel portion and the CC in the peripheral portion.
A shift register made of D, an image processing circuit, and a liquid crystal driving circuit (none of which are shown) are arranged. The photodiode 104 and the TFT 102 in the pixel portion are connected to the shift register and the liquid crystal driving circuit by wirings (not shown) arranged in a matrix, respectively.

Next, a protective layer and an adhesive layer are provided in this order on the liquid crystal driving active element 102 manufactured as described above, the image input element having the photodiode 104, and each circuit provided in the peripheral portion in this order. It is provided and adhered on a glass substrate which becomes the transparent substrate 101 of the element side substrate. Then, the semiconductor substrate is etched from the back surface with the insulating film 113 as a boundary, or CMP (Chemical Mechanical Poli) is performed.
sh), etc., and remove the semiconductor element / circuit formed on the semiconductor substrate as shown in FIG.
Moved to 1 above.

Through the above steps, the image input device having the liquid crystal driving active device 102 using the single crystal Si film, the peripheral circuit (not shown) and the photodiode 104 on the transparent insulating substrate 101 of the device side substrate. And an image processing circuit (not shown) is formed.

Then, a contact hole is provided in the insulating film 113 at a position corresponding to the drain portion of the TFT which is the active element 102, and a metal wiring 117 made of, for example, Al is formed so as to be connected to the drain portion of the TFT 102. Then, ITO (Indium T
In Oxide) and the like, a transparent conductive film is formed, and this is patterned to form the liquid crystal driving display electrodes 103 arranged in a matrix. Next, the insulating film 113 on the photodiode 104, which is a part of the image input element, is removed to improve the sensitivity of light input to the photodiode 104.

Subsequently, an alignment film (not shown) is formed on the entire surface of the substrate 101 using a transparent polymer material such as polyimide, and an alignment treatment such as rubbing is performed on the alignment film. In this embodiment, a TN mode which is normally used as a liquid crystal display mode is used, and the rubbing process is performed so that the rubbing direction of the element side substrate and the rubbing direction of the counter substrate form an angle of 90 degrees. After performing the alignment treatment, the alignment film located above the photodiode 104 is removed by photolithography and etching.

Next, as shown in FIG. 8F, the pillar 110 is formed so that the hollow portion is located above the photodiode 104. First, an ultraviolet curable polyimide resin in which a black pigment is dispersed is spin-coated on the entire surface of the substrate 101, and only the polyimide resin near the upper end of the photodiode 104 is irradiated with ultraviolet rays by using a mask by photolithography. And the unirradiated portion is removed with a solvent. At this time, the portion inside the pillar 110 is not irradiated with ultraviolet light using a photomask, and only the portion corresponding to the wall portion of the pillar 110 is cured to expose the photodiode 104 inside the pillar 110. Through the above steps, the element-side substrate is completed.

The height of the pillar 110 is set to be the same as the substrate interval of the liquid crystal cell by adjusting the thickness when applying the polyimide resin. In this embodiment, the height of the pillar 110 is 4 μm. The pillar 110 allows incident light to reach the photodiode 104 without being disturbed by surrounding liquid crystal material. Further, since the wall portion of the pillar 110 is formed of the polymer material in which the black pigment is dispersed, the incident light other than the component vertically incident on the photodiode 104 is not scattered but is absorbed by the wall portion. . Therefore, the photodiode 104 detects only the vertical component of the incident light, and as a result, a signal with a good S / N ratio can be obtained.

On the other hand, the counter substrate is manufactured as follows. First, a 1.1 μm-thick glass substrate is used as the transparent substrate 109, and a color filter 107 having a red filter portion, a blue filter portion, and a green filter portion is first formed thereon by an electrodeposition method or a photolithography method. Form. The color filter 107 is formed at a position facing the display electrode 103 when the counter substrate and the element-side substrate are bonded together. Then, the transparent substrate 10
A black matrix 108 is formed of a light absorbing material in a portion corresponding to between the display electrodes 103 on the display panel 9. As the material of the black matrix 108, for example, a polymer material in which a black pigment is dispersed can be used as in the wall portion of the pillar 110. In the black matrix 108, as shown in FIG. 6, an opening 111 for allowing light to enter the photodiode 104 is provided, and R,
The G and B color filter portions are formed so as to extend into the opening 111 as well. As a result, the optical signal corresponding to each color of R, G, and B can be guided to the photodiode 104.

Next, a transparent conductive film such as ITO (Indium Tin Oxide) is formed over the entire surface of the transparent substrate 109 and is patterned to form the counter electrode 106.
To form In this embodiment, an IT having a thickness of 100 nm is used.
The counter electrode 106 made of O was formed. Further, an alignment film is formed on the entire surface of the transparent substrate 109 in the same manner as the element side substrate, and an alignment treatment is performed. Thus, the counter substrate is completed.

Subsequently, spacers (not shown) for keeping the substrate spacing are scattered on the element side substrate manufactured as described above, and a sealing material (not shown) for adhesion is provided on the counter substrate. Transfer in a pattern. In this state, the display electrode 1
03 and the color filter 107, and the pillar 110 and the black matrix 108 are aligned to bond the element-side substrate and the counter substrate to form a cell.
At this time, as the spacer, a spacer having a particle diameter of 4 μm was used according to the height of the pillar 110.

Subsequently, a liquid crystal material is injected into the cell to form a liquid crystal layer 105. A TN liquid crystal material for active matrix is used as the liquid crystal material to be injected, and ZLI-4792 manufactured by Merck Ltd. is used in the present embodiment. Liquid crystal layer 1
After forming 05, each circuit provided in the peripheral portion of the substrate 101 is connected to an external circuit, a pair of polarizing plates are arranged so as to sandwich the liquid crystal cell, and a backlight is provided on the back surface of the element side substrate. Thus, the transmissive liquid crystal display device shown in FIG. 6 is completed.

In the liquid crystal display device having the structure shown in FIG. 6, the input image is detected as follows.

First, the light from the object passes through the color filter 107 through the opening 111 provided in the black matrix 108 in the display screen and is input to the photodiode 104 as an optical signal of each color component. The optical signal input to each photodiode 104 is absorbed by the wall portion of the pillar 110 without being scattered in the passage path except for the component perpendicular to the photodiode 104, and thus the optical signal is input to the photodiode 104. , Only the vertical component directly facing the display screen is incident. The layout of the photodiodes in the screen is R, G, by using a delta array for the layout of the color filters as shown in FIG.
It is possible to provide the elements for detecting the color signals of the three colors of B at substantially the same positions, and it is possible to reduce the image shift due to the difference in the detection positions. The image signal input from each photodiode 104 is transferred to an image processing circuit (not shown) by a CCD shift register section (not shown) formed on the substrate 101 of the element side substrate, and the image signal processing is performed here. The input image is obtained by performing.

Although FIG. 6 shows only a portion corresponding to three pixels of the liquid crystal display device of the present embodiment,
An image is input as described above on the entire display screen, that is, the entire area where the pixels are provided. Since the image input elements are thus arranged in the line-of-sight direction of the communicator, it is possible to input an image in which the line-of-sight direction of the communicator is the same when performing bidirectional communication including images. Further, since the entire display screen can be used for image input, an optical system for projecting the input image on the detection element in a reduced size, unlike a normal camera, is unnecessary, and an apparatus in which image display and image input are integrated. Can be configured, and a small and lightweight bidirectional image communication device can be realized.

(Modification 1) FIG. 7 shows a modification of the transmissive liquid crystal display device according to the third embodiment. In this modified example, the color filter 107 is not installed above each photodiode 104, that is, inside the opening 111, and the obtained image is a monochrome image. Other than this point, FIG.
The liquid crystal display device shown in FIG. 6 has the same configuration as that shown in FIG.

In the structure in which the color filter is provided as described in the third embodiment, the photodiode 104, which is a part of the image input element for each color of R, G and B, is required. Are configured as a set of three. Therefore, in order to improve the resolution of the obtained image, it is necessary to increase the number of photodiodes 104. On the other hand, the photodiode 10
In this modified example in which the color filter 107 is not provided on the No. 4, the obtained image is a monochrome image, but when the same number of input elements as the color inputs are formed, the resolution is tripled. Therefore, the transmissive liquid crystal display device of this modification is suitable for inputting a high-resolution image.

(Modification 2) FIG. 9 shows a second modification of the liquid crystal display device of the third embodiment. In the second modified example, a reflective electrode is formed using a metal film as the liquid crystal driving display electrode 103, thereby realizing a reflective liquid crystal display device that does not require a backlight. Reflective electrode 10
As a material of 3, Al, Ni, Ag, Cr, Au or the like can be used. Except for this point, the liquid crystal display device shown in FIG. 9 has the same configuration as the liquid crystal display device shown in FIG. 6, and is manufactured in the same manner. The element-side substrate may of course be transparent or opaque.

Also in the liquid crystal display device of this modified example, the liquid crystal driving active element 102, the liquid crystal driving peripheral circuit (not shown) connected thereto, the photodiode 104 as the image input element, and the shift register section (see FIG. (Not shown), and the image processing circuit connected to the shift register unit,
After being manufactured on a semiconductor substrate, it is transferred to the device-side substrate. Therefore, since there is no temperature limitation when manufacturing these elements, a lightweight and inexpensive substrate such as a resin substrate can be used in addition to the glass substrate described in the third embodiment. In Modified Example 2, an opaque polyimide resin substrate was used as the element-side substrate 101, and the process described in Embodiment 3 was applied to manufacture a reflective liquid crystal display device.

Therefore, according to the second modification, there is provided a liquid crystal display device using, as the element-side substrate, a resin substrate which is lighter, thinner, cheaper, and excellent in impact resistance as compared with the conventional glass substrate. It becomes possible.

[0101]

As described above, in the liquid crystal display device of the present invention, at least a part of the image input element is arranged in the display screen, and image input and image display can be performed by one device. Is possible. By incorporating the image input element in the display screen, a display device having the image input element can be manufactured in a compact and lightweight manner. Further, since at least a part of the image input element is arranged in the line-of-sight direction of the communicator, an image matching the line-of-sight direction can be obtained when bidirectional communication including the image is performed.

Further, in the method of manufacturing a liquid crystal display device of the present invention, the liquid crystal driving element and circuit, and the image input element and the image processing circuit are formed on a semiconductor substrate different from the substrate constituting the cell of the liquid crystal display device. After that, it is transferred to the substrate that constitutes the cell. Therefore, there is no temperature limitation when manufacturing the element / circuit, and the element can be manufactured by using the LSI process, and the reliability can be improved.

Further, when the semiconductor substrate is used as the element side substrate of the liquid crystal display device, the manufacturing cost can be reduced by monolithically manufacturing the driver circuit and the image processing circuit for driving the liquid crystal on the element side substrate. You can

[Brief description of drawings]

FIG. 1 is a cross-sectional view of a reflective color liquid crystal display device showing an embodiment of the present invention.

2A to 2C are cross-sectional views sequentially showing each manufacturing process in the reflective color liquid crystal display device of FIG.

FIG. 3 is an enlarged cross-sectional view of a photodiode 17 of FIG. 1 and its peripheral portion.

FIG. 4 is a layout view of a photodiode entrance and a color filter in the reflective color liquid crystal display device of FIG.

FIG. 5 is a cross-sectional view of a reflective liquid crystal display device showing another embodiment of the present invention.

FIG. 6 is a cross-sectional view showing the configuration of a third embodiment of the liquid crystal display device of the present invention.

7 is a cross-sectional view showing a configuration of Modification 1 of the liquid crystal display device of FIG.

FIG. 8 is a diagram illustrating a manufacturing process of the liquid crystal display device of FIG.

9 is a cross-sectional view showing a configuration of Modification 2 of the liquid crystal display device of FIG.

FIG. 10 is a block diagram of a camera using a conventional CCD.

[Explanation of symbols]

11 Semiconductor Substrate 12 Liquid Crystal Driving Active Element 13 Liquid Crystal Driving Driver Circuit 14 CCD Shift Register Section 15 Image Processing Circuit 17 Photodiode 17a n ⁺ Amorphous Si (n ⁺ a-Si) Film 17 b p ⁺ Amorphous Si (p ⁺ a-) Si) film 18 signal line 19 liquid crystal driving reflective electrode 20 element side substrate 22 color filter 23 black matrix 24 counter electrode 25 counter substrate 26 liquid crystal layer 27 pillar 28 image input opening 101 substrate 102 liquid crystal driving active element 103 display electrode 104 photodiode 105 liquid crystal layer 106 counter electrode 107 color filter 108 black matrix 109 substrate 110 pillar 111 opening 112 semiconductor substrate 113 insulating film 114 poly-Si layer 115 cap SiO ₂ layer 116 heater 17 metal wiring

Continuation of the front page (51) Int.Cl. ⁶ Identification code Office reference number FI Technical display location H04N 7/14 H04N 7/14 9/30 9/30

Claims (21)

[Claims] 1. A liquid crystal display device comprising a device-side substrate and a counter substrate which are arranged to face each other, and a liquid crystal layer enclosed between the device-side substrate and the counter substrate, wherein the device The side substrate has a plurality of display electrodes that apply a display voltage to the liquid crystal layer and a plurality of active elements that respectively supply the display voltage to the plurality of display electrodes. The liquid crystal display device, further comprising: an image input element that inputs an image provided in the image input element; and an image processing unit that processes the image input from the image input element. 2. The image input device includes a light receiving portion and a charge coupled device electrically connected to the light receiving portion,
The liquid crystal display device according to claim 1, wherein the light receiving unit is provided in the vicinity of the display electrode. 3. The device-side substrate has a substrate on which the active device, the image input device, and the image processing unit are formed, and the active device, the image input device, and the image processing unit are mounted on the device-side substrate. Is provided with an insulating film, the display electrode and the light receiving portion are formed on the insulating film, and the active element and the charge coupled device are connected to the active element and the charge-coupled element through a contact hole provided in the insulating film. Each connected,
The liquid crystal display device according to claim 2. 4. The display electrodes are arranged in a matrix, and the counter substrate is provided between a substrate, a counter electrode formed on the substrate, and the display electrodes on the substrate. The liquid crystal display device according to claim 3, further comprising a black matrix provided at a corresponding position, wherein the light receiving unit is provided at a position corresponding to an opening provided in the black matrix. 5. The liquid crystal display device further comprises a tubular member provided between the opening and the light receiving portion, and the tubular member has a wall portion made of a light absorbing material. The liquid crystal display device according to claim 4, which is a hollow member. 6. The liquid crystal display according to claim 4, wherein the counter substrate further has a color filter arranged on the substrate, and a part of the color filter is arranged in the opening. apparatus. 7. The liquid crystal display device according to claim 1, wherein the element-side substrate has a semiconductor substrate, and at least the active element and the image input element are formed on the semiconductor substrate. 8. The liquid crystal display according to claim 3, wherein the element-side substrate is a semiconductor substrate, and a drive circuit for applying the display voltage to the active element is further formed on the semiconductor substrate. apparatus. 9. The liquid crystal display device according to claim 1, wherein the plurality of display electrodes are reflection electrodes formed of a light reflection material, and the image processing unit is formed on the element-side substrate. 10. The element-side substrate includes a light-transmissive substrate, the active element and the image input element are formed on the light-transmissive substrate, and the plurality of display electrodes are light-transmissive. The liquid crystal display device according to claim 1, which is formed of a material. 11. The liquid crystal display device further comprises a backlight provided on the side of the element side substrate opposite to the liquid crystal layer, and the image processing unit is formed on the light transmissive substrate. The liquid crystal display device according to claim 10, wherein 12. The liquid crystal display device according to claim 10, wherein the image input element is a semiconductor element formed on a semiconductor substrate and is transferred onto the light transmissive substrate. 13. A device-side substrate and a counter substrate arranged to face each other, a liquid crystal layer sandwiched between the device-side substrate and the counter substrate, an image input device for inputting an image, and an input. A method for manufacturing a liquid crystal display device, comprising: a plurality of display electrodes for applying a display voltage to the liquid crystal layer; and a plurality of display electrodes for displaying the plurality of display electrodes. A step of forming an element-side substrate by forming active elements for supplying a voltage and the image input element on the substrate, bonding the element-side substrate and the counter substrate, and enclosing a liquid crystal material between them And a step of forming the liquid crystal layer thereby to provide a method for manufacturing a liquid crystal display device. 14. The element-side substrate is a light-transmissive substrate, and the step of manufacturing the element-side substrate includes a step of forming the image input element on a semiconductor substrate, and the formed image input element. 15. The method for manufacturing a liquid crystal display device according to claim 13, further comprising: 15. The step of forming the element-side substrate comprises the steps of forming the active element, the image processing section, and a drive circuit section for supplying the display voltage to the active element on the semiconductor substrate. 15. The method of manufacturing a liquid crystal display device according to claim 14, further comprising a step of transferring the active element, the image processing unit and the drive circuit unit onto the light transmissive substrate. 16. The manufacturing method further includes a step of forming the counter substrate by forming a counter electrode and a black matrix on the substrate, wherein the black matrix is formed between the plurality of display electrodes. 14. The liquid crystal according to claim 13, wherein the liquid crystal is arranged at a position corresponding to, and has an image input opening, and at least a part of the image input element is arranged at a position corresponding to the image input opening. Manufacturing method of display device. 17. The step of forming the counter substrate includes the step of forming a color filter, and a part of the color filter is arranged in the image input opening.
The method for manufacturing a liquid crystal display device according to claim 16. 18. The image input device has a light receiving part and a charge coupled device electrically connected to the light receiving part, and at least the light receiving part is arranged at a position corresponding to the image input opening. The method for manufacturing a liquid crystal display device according to claim 16, wherein 19. The hollow cylindrical shape having a wall portion formed of a light absorbing material so as to be located between the image input opening and at least a part of the image input element in the manufacturing method. The method for manufacturing a liquid crystal display device according to claim 16, further comprising a step of providing a member. 20. The substrate of the element side substrate is a semiconductor substrate, and the step of manufacturing the element side substrate further includes a step of forming at least a part of the active element and the image input element on the semiconductor substrate. The method for manufacturing a liquid crystal display device according to claim 13, which includes. 21. The step of manufacturing the element-side substrate further includes the step of forming a drive circuit section for supplying the image processing section and the display voltage to the active element on the semiconductor substrate. Item 21. A method for manufacturing a liquid crystal display device according to item 20.