JPH09314551A - Wire saw - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a wire saw capable of automatically performing washing of a worked part. SOLUTION: The circumference of a wire line 20 for performing cutting of a ingot 36 is covered with a housing 56. Injection nozzles 64, 64,... of washing liquid are provided in every place within the housing 56 and inject washing liquid to wash the inside of the housing 56. Thereby, processing liquid 44 supplied at time of cutting is scattered only within the housing 56 and therefore the circumference is not polluted. After cutting is finished, the inside of the housing 56 polluted by cutting is washed by washing liquid 50 injected from the injection nozzles 64, 64,... of washing liquid which are provided in every place within the housing 56. Accordingly, it is unnecessary that a worker specially performs washing.

Description

Detailed Description of the Invention

[0001]

TECHNICAL FIELD The present invention relates to a wire saw.
In particular, it relates to a wire saw for cutting brittle materials such as silicon, glass and ceramics.

[0002]

2. Description of the Related Art A wire saw presses an object to be processed while supplying a working fluid containing abrasive particles to a row of wires traveling at a high speed, so that the object to be processed is lapped by the abrasive particles contained in the working fluid. This is a device for cutting into wafers. As described above, in the wire saw, since the working liquid containing the abrasive grains is supplied at the time of cutting, the periphery of the cut portion is contaminated with the working liquid. Therefore, in the wire saw, it is necessary to clean the periphery of the contaminated cut portion after cutting the workpiece. Conventionally, an operator manually performs this cleaning work.

[0003]

However, the cleaning work by hand is extremely difficult, and there is a drawback in that clothes and the like are contaminated during the work. The present invention has been made in view of such circumstances, and an object of the present invention is to provide a wire saw capable of automatically cleaning a processed portion.

[0004]

In order to achieve the above object, the present invention provides a working fluid containing abrasive grains in a wire row formed by stretching a running wire around a plurality of grooved rollers at predetermined intervals. By pressing the work piece while supplying it, in a wire saw that cuts the work piece into a large number of wafers,
A housing that covers the periphery of the wire row, a machining fluid injection nozzle that is provided in the housing and injects a machining fluid or a cleaning fluid toward the wire row, and a machining fluid ejection nozzle that is provided at various places in the housing to eject the cleaning fluid. A cleaning liquid injection nozzle for cleaning the inside of the housing, an oil pan provided in the lower part of the housing for collecting the processing liquid supplied to the wire row and the cleaning liquid sprayed into the housing, and a discharge port of the oil pan. And a recovery pipe that returns the processing liquid or the cleaning liquid recovered by the oil pan to each supply source, and the processing pipe is connected to the processing liquid supply source side. The cutting of the object is performed in the housing, and the working fluid jetted from the working fluid jetting nozzle toward the wire row during cutting is collected by the oil pan. While returning to the working liquid supply source through the recovery pipe, after cutting is completed, the recovery pipe is switched to the cleaning liquid supply source side, and the cleaning liquid is sprayed from the cleaning liquid spray nozzle and the processing liquid spray nozzle into the housing. It is characterized in that the cleaning liquid after cleaning is recovered by the oil pan and returned to the supply source of the cleaning liquid through the recovery pipe.

According to the invention, the cutting of the work piece is carried out in the housing. Then, the machining fluid jetted from the machining fluid jet nozzle toward the wire row at the time of cutting is collected by the oil pan and returned to the machining fluid supply source through the collection pipe connected to the machining fluid supply source side. . On the other hand, the processing liquid scattered in the housing is cleaned after the cutting of the workpiece by the cleaning liquid spray nozzles and the processing liquid spray nozzles installed at various places in the housing. The sprayed cleaning liquid is collected in an oil pan and returned to the cleaning liquid supply source through the recovery pipe whose connection is switched to the cleaning liquid supply source side.

[0006]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of a wire saw according to the present invention will be described below in detail with reference to the accompanying drawings. FIG.
FIG. 1 is a configuration diagram of an embodiment of a wire saw according to the present invention. As shown in the figure, the wire 14 unwound from one wire reel 12 has guide rollers 16, 16 ,.
It is wound around the three grooved rollers 18A, 18B and 18C through the wire running path formed by. A large number of grooves are formed at a constant pitch on the outer peripheral portions of the three grooved rollers 18A, 18B, 18C, respectively, and the wire 14 is sequentially wound around the grooves of the grooved rollers 18A, 18B, 18C. Hang up to form a horizontal wire row 20.

The wire 14 forming the wire row 20 passes through the wire running path on the other side symmetrically formed with the three grooved rollers 18A, 18B and 18C sandwiched between them and reaches the wire reel 12 on the other side. Being rolled up. The wire row 2
Wire guides 22 and 22, dancer rollers 24 and 24, and wire cleaning devices 26 and 26 are arranged on the wire running paths formed on both sides of 0, respectively. 12 to wire 1
Guide 4 at a constant pitch. Further, the dancer rollers 24, 24 have weights 28, 28 of a predetermined weight suspended thereon, and apply a constant tension to the traveling wire 14. In addition, the wire cleaning devices 26, 26 are used for the traveling wire 1
A cleaning liquid is sprayed on the wire 4 to remove the slurry (working liquid) attached during processing from the wire 14.

The pair of wire reels 12, 12 and the grooved roller 18C are respectively provided with a motor 3 capable of rotating in the forward and reverse directions.
0 and 30 are connected (the motor connected to the grooved roller 18C is not shown), and the wire 14 drives the motor to drive the wire reels 12 and 12
Travels back and forth at high speed. Above the wire row 20, a work feed table 32 is installed which is vertically moved with respect to the wire row 20 by a feed screw mechanism driven by a motor. Work feed table 32
Is provided with a tilting device 34, and the ingot 36 is held under the tilting device 34 and tilted at an arbitrary tilt angle.

Above the wire row 20, the ingot 3 held by the work feed table 32 is provided.
A pair of machining liquid jet nozzles 38, 38 are arranged with the nozzle 6 interposed therebetween. The pair of machining liquid injection nozzles 38, 38 are connected to the machining liquid supply pipe 40 and the cleaning liquid supply pipe 4, respectively.
2 are connected. The machining fluid supply pipe 40 is in communication with a machining fluid tank 46 in which a machining fluid 44 is stored, and by driving a machining fluid supply pump 48 disposed midway in the pipeline, the pair of machining fluids is supplied. Injection nozzle 3
The machining fluid 44 is sent to the Nos. 8 and 38. On the other hand, the cleaning liquid supply pipe 42 is connected to the cleaning liquid tank 5 in which the cleaning liquid 50 is stored.
The cleaning liquid 50 is sent to the pair of machining liquid jet nozzles 38, 38 by driving the cleaning liquid supply pump 54 which is connected to the pipe 2 and is disposed in the middle of the pipe.

The working liquid 44 or the cleaning liquid 50 sent to the pair of working liquid jet nozzles 38, 38 is jetted toward the wire row 20 from the pair of working liquid jet nozzles 38, 38. Since the sprayed machining liquid 44 or cleaning liquid 50 scatters around, the wire array 20 is surrounded by a housing 56 in order to prevent the scattering. Therefore, the cutting of the one ingot 36 is performed inside the housing 56, and an oil pan 58 for collecting the supplied processing liquid 44 or cleaning liquid 50 is provided in the lower portion of the housing 56.

The oil pan 58 is formed in a funnel shape, and a discharge port 60 for discharging the collected working liquid 44 or cleaning liquid 50 is formed in the center thereof. This outlet 60
A recovery pipe 62 formed in an L shape is swingably connected to the oil pan 58. The recovery pipe 62 is swung to switch the discharge position of the oil pan 58.
It is possible to switch the discharge destination of the processing liquid 44 or the cleaning liquid 50 collected in step 1 to either the processing liquid tank 46 or the cleaning liquid tank 52. The switching of the discharge destination of the recovery pipe 62 is performed by a cylinder (not shown) connected to the recovery pipe 62, and the extension of the cylinder rod causes
The recovery pipe 62 is swung.

As described above, the cutting of the ingot 36 is carried out in the housing 56, which prevents the supplied working liquid 44 from scattering around, but the inside of the housing 56 is supplied with the working liquid. Contaminated with 44. In order to clean the inside of the contaminated housing 56, cleaning liquid jet nozzles 64, 64, ... Are installed at various places inside the housing 56. Each cleaning processing liquid jet nozzle 64, 6
4, ... Are in communication with the cleaning liquid supply pipe 42 through pipes (not shown), and the machining liquid injection nozzles 38, 3
The cleaning liquid is sent along with the sending of the cleaning liquid 50 to 8.

In FIG. 1, the cleaning liquid jet nozzle 64,
64, ..., Typical installation conditions are shown, and they are provided toward the most contaminated grooved rollers 18A, 18B, 18C and ingot 36 support. Further, the oil pan 58 is also provided with cleaning liquid injection nozzles 64, 64, ... For forcibly guiding the collected processing liquid 44 to the discharge port 60.

The operation of the embodiment of the wire saw according to the present invention constructed as described above is as follows. First, the ingot 36 is attached to the work supporting portion of the tilting device 34. Then, the tilting device 34 is cut so that the ingot 36 is cut in a predetermined crystal orientation.
Is used to tilt the ingot 36 at a predetermined angle with respect to the wire row 20.

Next, the motors 30, 30 for driving the wire reels 12, 12 and the motor (not shown) for driving the grooved roller 18C are synchronously driven to drive the wire reels 12, 12.
The wire 14 wound between 12 is reciprocated at high speed. When the traveling of the wire row 20 is stable, the machining fluid supply pump 48 provided in the machining fluid supply pipe 40 is driven to eject the machining fluid 44 from the machining fluid injection nozzles 38, 38 toward the traveling wire row 20. To do.

Simultaneously with the jetting of the machining fluid 44, the work feed table 32 is driven to lower the ingot 36 toward the wire row 20, and the ingot 36 is pressed against the wire row 20 traveling at high speed. The ingot 36 pressed against the wire train 20 traveling at high speed is cut into a large number of wafers by the lapping action of the abrasive grains contained in the working liquid 44 supplied to the wire train 20.

The working liquid 44 supplied during cutting is recovered by the oil pan 58 and returned to the working liquid tank 46 via the recovery pipe 62. In the working liquid tank 46, the collected working liquid 44 is filtered, the shortage is supplemented, and the working liquid 44 is supplied to the wire row 20 again. When the cutting of the ingot 36 is completed, the feed of the work feed table 32 is stopped, and at the same time, the driving of the machining liquid supply pump 48 is stopped to stop the supply of the machining liquid 44 to the wire row 20.

After the supply of the working liquid 44 is stopped, when the supplied working liquid 44 is completely collected in the working liquid tank 46, the collecting pipe 62 is switched to the cleaning liquid tank 52 side. Then, the cleaning liquid supply pump 54 provided in the cleaning liquid supply pipe 42 is driven. By driving the cleaning liquid supply pump 54, the cleaning liquid 50 is sprayed from the processing liquid spraying nozzles 38, 38 that have been supplying the processing liquid 44 toward the wire row 20, and the cleaning liquid 50 is installed in various places in the housing 56. From the cleaning liquid injection nozzles 64, 64, ... To the housing 56
The cleaning liquid 50 is sprayed toward various places inside. The inside of the housing 56 is cleaned with the sprayed cleaning liquid 50. The running of the wire 14 is not stopped during this cleaning.

On the other hand, the cleaning liquid 50 used for cleaning is recovered in the oil pan 58 and returned to the cleaning liquid tank 52, like the processing liquid 44. In the cleaning liquid tank 52, the collected cleaning liquid 50 is filtered, the shortage is supplemented, and the cleaning liquid 50 is supplied again into the housing 56. Also, the ingot 3 after cutting
The lifting of 6 is performed during the cleaning of the inside of the housing 56, whereby the working liquid 44 that has entered between the cut wafers can be removed. That is, the cleaning liquid 5 is directed from the machining liquid injection nozzles 38, 38 toward the wire row 20.
By supplying 0, the wire row 20 is cleaned, but at the same time, the cleaning liquid 50 adhering to the wire row 20 is carried between the wafers as the wire row 20 travels. The machining liquid 44 that has entered the space is removed.

As described above, each cleaning liquid jet nozzle 64,
64, ... and the machining liquid jet nozzles 38, 38 to the cleaning liquid 5
The inside of the housing 56 is cleaned by injecting 0, and the supply of the cleaning liquid 50 is stopped when a predetermined time has elapsed. As a result, the cleaning is completed and the tilting device 34
Remove the ingot 36 from the. As described above, according to the wire saw of the present embodiment, since the cutting is performed inside the housing 56, the machining liquid 44 does not scatter around. Further, the inside of the housing 56 contaminated by the cutting is automatically cleaned by the cleaning liquid 50 sprayed from the cleaning liquid spraying nozzles 64, 64, ... You don't have to.

Further, since the cleaning is performed in the closed space, it is possible to prevent the cleaning liquid 50 from being scattered around during the cleaning, and the housing 5 can be cleaned as compared with the cleaning by the hand of the operator.
It is possible to wash every corner of 6. As a result, the maintenance of the cutting portion can be facilitated and the life of the device can be improved. Also, due to poor cleaning, the machining fluid 44
Can be prevented from sticking to each other and causing a malfunction of the cutting portion.

Further, the working fluid 4 collected in the oil pan 58
By making the recovery destinations of 4 and the cleaning liquid 50 switchable, both the processing liquid 44 and the cleaning liquid 50 can be circulated and used, and extremely economical operation can be performed. Further, by sharing the working liquid jet nozzles 38, 38 for supplying the working liquid 44 to the wire row 20 for supplying the cleaning liquid 50, it is possible to simplify the device configuration.
Cleaning of the wafer after cutting can also be performed.

As described above, the installation state of the cleaning liquid jet nozzles 64, 64, ... Shown in FIG. 1 is only a representative example, and the number of installations may be increased as necessary. Further, the shape of the cleaning liquid jet nozzle 64 is not particularly limited, and for example, a nozzle having a plurality of nozzles, a shower nozzle, or a head that can be freely lowered can be used. Alternatively, a sprinkler that automatically lowers the neck may be used, which makes it possible to further clean every corner of the housing 56.

[0024]

As described above, according to the present invention,
Since the workpiece is cut inside the housing, the machining liquid does not scatter around. Further, the inside of the housing contaminated by the cutting is cleaned with the cleaning liquid sprayed from the cleaning liquid spraying nozzles installed at various places inside the housing after the completion of the cutting, so that the operator does not need to separately clean it.

[Brief description of drawings]

FIG. 1 is a configuration diagram of an embodiment of a wire saw according to the present invention.

[Explanation of symbols]

 12 ... Wire reel 14 ... Wires 18A to 18C ... Grooved roller 20 ... Wire row 36 ... Ingot 38 ... Machining liquid injection nozzle 44 ... Machining liquid 46 ... Machining liquid tank 50 ... Cleaning liquid 52 ... Cleaning liquid tank 56 ... Housing 58 ... Oil pan 60 ... Discharge port 62 ... Recovery pipe 64 ... Cleaning liquid injection nozzle

Claims (1)

[Claims] 1. A work wire is formed by stretching a running wire around a plurality of grooved rollers at a predetermined interval and pressing a work piece while supplying a working fluid containing abrasive grains to the work piece by pressing the work piece. In a wire saw that cuts an object into a large number of wafers, a housing that covers the periphery of the wire row, a machining fluid injection nozzle that is provided in the housing and ejects a machining fluid or a cleaning fluid toward the wire row, and the inside of the housing A cleaning liquid injection nozzle that is provided at various locations to inject a cleaning liquid to clean the inside of the housing, and an oil pan that is provided at a lower portion of the housing and collects the processing liquid supplied to the wire row and the cleaning liquid injected into the housing. And a switching fluid that is movably connected to the discharge port of the oil pan, and returns the processing liquid or cleaning liquid collected in the oil pan to each supply source. And cutting the workpiece in the housing with the recovery pipe communicating with the machining liquid supply source side, and directing the machining liquid jet nozzle toward the wire row during cutting. The sprayed machining fluid is collected by the oil pan and returned to the machining fluid supply source via the collection pipe, and after cutting is completed, the collection pipe is switched to the cleaning fluid supply source side to make the inside of the housing A wire saw, wherein a cleaning liquid is sprayed from the cleaning liquid spraying nozzle and the processing liquid spraying nozzle for cleaning, and the cleaned cleaning liquid is recovered by the oil pan and returned to the cleaning liquid supply source through the recovery pipe.