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JPH09165600A - Water-based detergent and cleaning using the same - Google Patents

Water-based detergent and cleaning using the same

Info

Publication number
JPH09165600A
JPH09165600A JP34757495A JP34757495A JPH09165600A JP H09165600 A JPH09165600 A JP H09165600A JP 34757495 A JP34757495 A JP 34757495A JP 34757495 A JP34757495 A JP 34757495A JP H09165600 A JPH09165600 A JP H09165600A
Authority
JP
Japan
Prior art keywords
oil
cleaning
water
detergent
cleaning liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP34757495A
Other languages
Japanese (ja)
Inventor
Keisen So
慶泉 蘇
Hiroaki Sato
広昭 佐藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP34757495A priority Critical patent/JPH09165600A/en
Publication of JPH09165600A publication Critical patent/JPH09165600A/en
Pending legal-status Critical Current

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Abstract

PROBLEM TO BE SOLVED: To obtain a water-based detergent and to provide a cleaning method using the same, improved in adaptability to oil kind so as to be adaptable to broader range of oil kinds. SOLUTION: This water-based detergent is obtained by blending a cationic surfactant in a detergent consisting manly of a nonionic surfactant and a builder which is an inorganic salt with its valence of 1:1 type such as NaCl, NaHCO3 or KBr. The proportion of the builder to be blended is pref. 0.05-2.0 (esp. 0.2-0.8)mol per L of the final detergent. The objective cleaning method is such method that a cleaning liquid is prepared by diluting this detergent with water, and a used cleaning liquid contaminated with oil-and-fat is heated to a temperature higher than the cloud point of this detergent to allow the oil-and-fat in the used cleaning liquid to float up and separate it from the liquid.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、水系洗浄剤及びそ
れを用いた洗浄方法に係り、特に、金属部品、半導体ウ
エハー、ガラスや液晶等の工業製品の製造過程におい
て、製品又は中間製品からの汚れ(油分、埃やバリな
ど)を洗浄除去するための水系洗浄工程に用いられる洗
浄剤及び洗浄方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a water-based cleaning agent and a cleaning method using the same, and in particular, in the manufacturing process of industrial products such as metal parts, semiconductor wafers, glass and liquid crystals The present invention relates to a cleaning agent and a cleaning method used in a water-based cleaning process for cleaning and removing dirt (oil, dust, burr, etc.).

【0002】[0002]

【従来の技術】これまで、工業洗浄剤として広く使われ
てきた塩素系有機溶剤のフロンやトリクロロエタンは、
オゾン層破壊物質であることが確認されたために、国際
的取り決めで95年までに製造中止となった。フロン・
トリクロロエタン代替洗浄剤の開発は急務となっている
が、界面活性剤やアルカリを主成分とする水系洗浄剤、
アルコールやグリコールエーテルの有機溶媒に水を配合
した準水系洗浄剤、及び炭化水素系溶剤に代表される非
水系洗浄剤等が主流となりつつある。しかしながら、非
水系洗浄剤の場合は、洗浄剤そのもので洗浄するために
ランニングコストが高く、また、その多くは可燃性物質
なので、洗浄装置には防爆仕様が必要で高価となった
り、あるいは大型化できないという難点を抱えている。
2. Description of the Related Art Freon and trichloroethane, which are chlorine-based organic solvents that have been widely used as industrial detergents, are
Since it was confirmed to be an ozone-depleting substance, it was discontinued by 1995 under international agreement. Freon
There is an urgent need to develop alternative cleaning agents for trichloroethane, but water-based cleaning agents containing surfactants and alkalis as the main ingredients,
Semi-aqueous detergents in which water is mixed with an organic solvent such as alcohol or glycol ether, and non-aqueous detergents represented by hydrocarbon solvents are becoming mainstream. However, in the case of non-aqueous cleaning agents, the cleaning costs are high because they are cleaned with the cleaning agents themselves, and because most of them are flammable substances, the cleaning equipment requires explosion-proof specifications, which makes them expensive or large. I have a difficulty that I can not do it.

【0003】一方、準水系、とくに水系の場合は、大量
の水で洗浄剤を希釈して使用するために、ランニングコ
ストが安く、また、危険性物質ではないので洗浄装置は
大型化が容易で、比較的安価である。しかし、大量の水
を使用することは同時に、洗浄液の油水分離やリンス水
の排水処理に対処できる水処理システムを、洗浄システ
ムの不可欠な一部にしてしまうという課題をもつ。水系
洗浄剤を用いて被洗浄物を洗浄する場合において、洗浄
に伴って洗浄液に被洗浄物からの油分等の汚れが徐々に
蓄積し、洗浄液の洗浄力が低下する。当然なことなが
ら、洗浄液の洗浄力を維持しつつ洗浄液の使用寿命を延
ばすためには、洗浄液から油分等の汚れを常時取り除く
必要がある。
On the other hand, in the case of a semi-water system, especially a water system, since the cleaning agent is diluted with a large amount of water and used, the running cost is low, and since it is not a hazardous substance, the cleaning device can be easily enlarged. , Relatively cheap. However, the use of a large amount of water has a problem that a water treatment system that can deal with oil-water separation of a washing liquid and wastewater treatment of rinse water becomes an integral part of the washing system. When an object to be cleaned is cleaned using a water-based cleaning agent, dirt such as oil content from the object to be cleaned gradually accumulates in the cleaning liquid along with the cleaning, and the cleaning power of the cleaning liquid decreases. As a matter of course, in order to extend the service life of the cleaning liquid while maintaining the cleaning power of the cleaning liquid, it is necessary to constantly remove dirt such as oil from the cleaning liquid.

【0004】従来、水系洗浄液の油水分離方法は、エマ
ルジョンブレーカなどの化学薬品を使用する乳化破壊・
浮上分離法、静電分離法、油分粒子の合一・粗大化を促
進するコアレッサ法、そして精密ろ過膜又は限外ろ過膜
を用いる膜分離法等がある。さらには、発明者らは先
に、曇点が40〜70℃の非イオン性界面活性剤に、曇
点が20〜40℃の非イオン性界面活性剤を配合してな
る水系洗浄剤を用いることにより、油脂を含んだ該洗浄
液を、単に洗浄剤の曇点温度以上に加熱するだけで、洗
浄液中の油脂を浮上分離できる水系洗浄剤及びその油水
分離方法を発明した。
Conventionally, the oil-water separation method of the water-based cleaning liquid has been carried out by destructing the emulsion using a chemical such as an emulsion breaker.
There are a floating separation method, an electrostatic separation method, a coalescer method for promoting coalescence and coarsening of oil particles, and a membrane separation method using a microfiltration membrane or an ultrafiltration membrane. Furthermore, the inventors previously used an aqueous detergent prepared by blending a nonionic surfactant having a cloud point of 40 to 70 ° C. with a nonionic surfactant having a cloud point of 20 to 40 ° C. As a result, the present invention has invented a water-based cleaning agent capable of floating and separating oils and fats in a cleaning liquid by simply heating the cleaning liquid containing the oils and fats to a temperature above the cloud point of the cleaning agent, and an oil-water separation method thereof.

【0005】ところが、これらの従来技術はそれぞれ課
題を抱えている。例えば、エマルジョンブレーカの使用
による乳化破壊・浮上分離法では、油分分離後の洗浄液
が洗浄力を失い、再使用できない問題がある。また、静
電分離法やコアレッサ法では、洗浄液中の油分が微細な
エマルジョン粒子として存在する場合においては、油水
分離効果が得られにくい。そして、精密ろ過膜や限外ろ
過膜法では、油分と共に洗浄剤成分も同時に取り除かれ
る課題と、装置が高価である難点を抱えている。発明者
らが先に開発した水系洗浄剤、及び該洗浄剤を適用した
加熱方式の油水分離方法は、前記従来技術の課題を解決
した簡単で安価な油水分離技術であるが、当技術が適用
できない油種があった。即ち、適用できない油種として
は、カルシウムスルホネート等のアニオン性界面活性物
質が、防錆剤として多量に配合された油種などが挙げら
れる。
However, each of these conventional techniques has problems. For example, in the emulsion destruction / floating separation method using an emulsion breaker, there is a problem that the cleaning liquid after oil separation loses cleaning power and cannot be reused. Further, in the electrostatic separation method or coalescer method, when the oil content in the cleaning liquid exists as fine emulsion particles, it is difficult to obtain the oil-water separation effect. Further, the microfiltration membrane and ultrafiltration membrane methods have a problem that the cleaning agent component is removed at the same time as the oil component and that the apparatus is expensive. The water-based cleaning agent developed by the inventors and the heating-type oil-water separation method to which the cleaning agent is applied are simple and inexpensive oil-water separation technologies that solve the above-mentioned problems of the prior art. There was some oil that I couldn't. That is, examples of the oil species that cannot be applied include oil species in which a large amount of an anionic surfactant such as calcium sulfonate is blended as a rust preventive.

【0006】[0006]

【発明が解決しようとする課題】本発明は、上記先行技
術の問題点を解決し、油種に対する適用性を改善し、よ
り広範囲な油種に適用できる水性洗浄剤及び洗浄方法を
提供することを課題とする。
DISCLOSURE OF THE INVENTION The present invention solves the above-mentioned problems of the prior art, improves the applicability to oil species, and provides an aqueous detergent and a washing method applicable to a wider range of oil species. Is an issue.

【0007】[0007]

【課題を解決するための手段】上記課題を解決するため
に、本発明では、非イオン性界面活性剤とビルダーとを
主成分とする洗浄剤に、カチオン性界面活性剤を配合す
ることを特徴とする水系洗浄剤としたものである。使用
する非イオン性界面活性剤としては、ポリオキシエチレ
ンアルキルフェニルエーテル型、ポリオキシエチレンア
ルキルエーテル型、ポリエチレングリコール型、ソルビ
タン脂肪酸エステル型、ポリオキシエチレンソルビタン
脂肪酸エステル型やプルロニック型のいずれでもよい。
また、このような非イオン系界面活性剤の曇点温度は、
20〜70℃の範囲にあればよいが、40〜60℃の曇
点を有する非イオン性界面活性剤と、25〜30℃の曇
点を有する非イオン性界面活性剤とを配合して用いるの
が好ましい。
In order to solve the above problems, the present invention is characterized in that a detergent containing a nonionic surfactant and a builder as a main component is mixed with a cationic surfactant. It is a water-based cleaning agent. The nonionic surfactant to be used may be any of polyoxyethylene alkylphenyl ether type, polyoxyethylene alkyl ether type, polyethylene glycol type, sorbitan fatty acid ester type, polyoxyethylene sorbitan fatty acid ester type and pluronic type.
Further, the cloud point temperature of such a nonionic surfactant is
It may be in the range of 20 to 70 ° C, but a nonionic surfactant having a cloud point of 40 to 60 ° C and a nonionic surfactant having a cloud point of 25 to 30 ° C are used in combination. Is preferred.

【0008】前記洗浄剤において、ビルダーは、原子価
が1:1型の無機塩類であって、その配合率は洗浄剤1
リットル当たり0.05モル以上、2.0モル以下、好
ましくは、0.2モル以上、0.8モル以下であるのが
よい。また、本発明では、前記の水系洗浄剤を水で希釈
した洗浄液を用いる洗浄方法において、洗浄後の油脂を
含んだ洗浄液を前記洗浄剤の曇点温度以上に加熱して洗
浄液中の油脂を浮上分離することを特徴とする洗浄方法
としたものである。
In the above detergent, the builder is an inorganic salt having a valence of 1: 1 and the compounding ratio thereof is detergent 1
It is 0.05 mol or more and 2.0 mol or less, preferably 0.2 mol or more and 0.8 mol or less per liter. Further, in the present invention, in a cleaning method using a cleaning liquid obtained by diluting the above-mentioned aqueous cleaning agent with water, the cleaning liquid containing the oil and fat after cleaning is heated to a temperature not lower than the cloud point of the cleaning agent to float the oil and fat in the cleaning liquid. The cleaning method is characterized by separation.

【0009】[0009]

【発明の実施の形態】次に、本発明を詳細に説明する。
本発明は、油脂に配合されたカルシウムスルホネート等
のアニオン性界面活性物資が、洗浄液の油水分離性に与
える影響の機構を明らかにし、カチオン性界面活性剤を
洗浄剤に添加することによって、アニオン性界面活性物
質の影響を抑制できることを見い出してなされたもので
ある。非イオン性界面活性剤とビルダーとを主成分とす
る洗浄液を用いて金属部品等の脱脂洗浄を行うと、油分
が非イオン性界面活性剤によって乳化し洗浄液に分散す
る。乳化油分を含んだ洗浄液を非イオン性界面活性剤の
曇点温度以上に加熱すると、乳化油分が乳化破壊し、油
分が浮上分離する。しかし、油分の中にアニオン性界面
活性物質、特にカルシウムスルホネートやバリウムスル
ホネートが配合されている場合、該物質の一部が洗浄液
に溶出する。
Next, the present invention will be described in detail.
The present invention clarifies the mechanism of the effect of anionic surface active substances such as calcium sulfonate compounded in fats and oils on the oil-water separability of the cleaning liquid, and by adding a cationic surfactant to the cleaning agent, It was made by discovering that the influence of surface-active substances can be suppressed. When degreasing cleaning is performed on a metal part or the like using a cleaning liquid containing a nonionic surfactant and a builder as main components, oil is emulsified by the nonionic surfactant and dispersed in the cleaning liquid. When the cleaning liquid containing the emulsified oil is heated above the cloud point temperature of the nonionic surfactant, the emulsified oil is demulsified and the oil is floated and separated. However, when an anionic surface-active substance, especially calcium sulfonate or barium sulfonate, is mixed in the oil component, a part of the substance is eluted in the washing liquid.

【0010】これは、洗浄液中の非イオン性界面活性
剤の曇点が上昇することと、アニオン性界面活性物質
による油分の乳化が進行することがもたらされる。洗浄
剤の曇点が油水分離機の設定加熱温度以上に上昇した時
と、アニオン性界面活性物質によって乳化した油分が多
くなった時には、設定温度までの加熱による油水分離機
構が機能できなくなる。本発明はアニオン対策として、
洗浄剤に予め適量のカチオン性界面活性剤を配合する方
法を試みた。その結果、カチオンとアニオンとが反応に
より結合して不溶性の化合物となり、それによってアニ
オンが界面活性を失い、前記アニオンの効果が抑制され
ることを確認した。なお、洗浄剤へのカチオン性界面活
性剤の配合による不都合がないことも、併せて確認し
た。本発明で用いるカチオン性界面活性剤としては、第
4級アンモニウム塩や、イミダゾリン型カチオン性界面
活性剤などが好適で、配合比は適用する油種のアニオン
含有率によって決定されるが、重量比で0.2%から
2.0%の範囲でよい。
This results in an increase in the cloud point of the nonionic surfactant in the cleaning liquid and an increase in the emulsification of oil by the anionic surfactant. When the cloud point of the cleaning agent rises above the set heating temperature of the oil-water separator or when the amount of oil emulsified by the anionic surface-active substance increases, the oil-water separation mechanism by heating to the set temperature cannot function. The present invention, as a countermeasure against anions,
An attempt was made to add a suitable amount of cationic surfactant to the detergent in advance. As a result, it was confirmed that the cation and the anion are bonded to each other by the reaction to form an insoluble compound, whereby the anion loses the surface activity and the effect of the anion is suppressed. It was also confirmed that there is no inconvenience due to the addition of the cationic surfactant to the detergent. The cationic surfactant used in the present invention is preferably a quaternary ammonium salt or an imidazoline type cationic surfactant, and the compounding ratio is determined by the anion content of the oil species to be applied, but the weight ratio is And may be in the range of 0.2% to 2.0%.

【0011】洗浄剤に配合するビルダーとしては、原子
価が1:1型の無機塩類が好適で、炭酸水素ナトリウ
ム、塩化ナトリウム、臭化ナトリウム、炭酸水素カリウ
ム、塩化カリウム、臭化カリウムなどが挙げられ、これ
らは混合して使用してもよい。ビルダーの配合率は、洗
浄剤1リットル当たり0.05モル以上、2.0モル以
下、好ましくは0.2モル以上、0.8モル以下の範囲
が好ましい。他の型の無機塩類、例えば原子価が1:2
型の硫酸ナトリウムを用いると、2価のアニオンである
硫酸イオンがカチオン性界面活性剤と反応し、カチオン
性界面活性剤とアニオン性界面活性物質との反応を阻害
する懸念があり、その使用には注意を要する。また、エ
タノールアミンなどの第1級アミン、ジエタノールアミ
ンなどの第2級アミン、トリエタノールアミンなどの第
3級アミンや第4級アンモニウム塩をアルカリ性有機ビ
ルダーとして用いることもできる。
As the builder to be added to the detergent, inorganic salts having a valence of 1: 1 are suitable, and examples thereof include sodium hydrogen carbonate, sodium chloride, sodium bromide, potassium hydrogen carbonate, potassium chloride and potassium bromide. These may be used as a mixture. The compounding ratio of the builder is preferably 0.05 mol or more and 2.0 mol or less, preferably 0.2 mol or more and 0.8 mol or less, per liter of the detergent. Other types of inorganic salts, for example having a valence of 1: 2
When sodium sulfate of the type is used, there is a concern that the sulfate ion, which is a divalent anion, will react with the cationic surfactant and inhibit the reaction between the cationic surfactant and the anionic surfactant. Requires attention. Also, primary amines such as ethanolamine, secondary amines such as diethanolamine, tertiary amines such as triethanolamine, and quaternary ammonium salts can be used as the alkaline organic builder.

【0012】[0012]

【実施例】以下、本発明を実施例により具体的に説明す
る。 実施例1 曇点温度49℃のポリエチレンアルキルフェニルエーテ
ル型非イオン性界面活性剤が15%、曇点温度27℃の
プルロニック型非イオン性界面活性剤が6%、イミダゾ
リン型カチオン性界面活性剤が1%、炭酸水素ナトリウ
ムが3.5%の水溶液を調整して洗浄剤とした。該洗浄
剤を水で5%に希釈し洗浄液として用いた。該洗浄液の
pHが8.8であった。また、試験対象油種としては乳
化型不水溶性油の防錆油を用い、洗浄液中の油分濃度を
2%とした。該防錆油の中にアルキルスルホン酸バリウ
ムが防錆油として多量に配合されている。なお、油を添
加した洗浄液を安定な乳化状態にするために、家庭用ミ
キサーで2分間強攪拌した。
The present invention will be described below in more detail with reference to examples. Example 1 15% of a polyethylene alkyl phenyl ether type nonionic surfactant having a cloud point temperature of 49 ° C., 6% of a pluronic type nonionic surfactant having a cloud point temperature of 27 ° C., and an imidazoline type cationic surfactant. An aqueous solution containing 1% and 3.5% sodium hydrogen carbonate was prepared as a cleaning agent. The cleaning agent was diluted to 5% with water and used as a cleaning solution. The pH of the washing solution was 8.8. Further, as the oil type to be tested, an emulsion type water-insoluble oil rust preventive oil was used, and the oil concentration in the cleaning liquid was set to 2%. Barium alkyl sulfonate is mixed in a large amount as rust preventive oil in the rust preventive oil. It should be noted that, in order to make the oil-added cleaning liquid a stable emulsified state, it was vigorously stirred with a household mixer for 2 minutes.

【0013】かくして調製した洗浄液1リットルをメス
シリンダーに移して、加熱のため該メスシリンダーを6
5℃の恒温水槽にいれた。すると、加熱5分後に油分が
浮上し始め、10分後には18ミリリットルすなわち9
0%の油分が浮上した。一方、洗浄剤成分が底に沈降し
た。このように、非イオン性界面活性剤が主成分の洗浄
剤にカチオン性界面活性剤を配合することにより、加熱
方式では油水分離できなかった乳化型不水溶性油に対し
ても油水分離できるようになった。
1 liter of the washing solution thus prepared was transferred to a graduated cylinder, and the graduated cylinder was heated to 6 liters for heating.
It was placed in a constant temperature water bath at 5 ° C. Then, after 5 minutes of heating, oil began to float, and after 10 minutes, 18 ml, or 9
0% of oil surfaced. On the other hand, the detergent component settled to the bottom. In this way, by adding a cationic surfactant to a detergent containing a nonionic surfactant as a main component, it is possible to separate oil-water from emulsified water-insoluble oil that could not be separated from oil-water by the heating method. Became.

【0014】比較例1 さらに、本発明の効果をより明確にするために、実施例
の洗浄剤にカチオン性界面活性剤を配合しない場合の油
水分離試験を実施例と同じ条件で行ったが、加熱して6
0分経過しても油分の浮上がまったく見られなかった。
Comparative Example 1 Further, in order to further clarify the effect of the present invention, an oil-water separation test was carried out under the same conditions as those of the Examples, in the case where the detergent of the Examples was not blended with a cationic surfactant. Heat up 6
Even after 0 minutes, no oil floating was observed.

【0015】[0015]

【発明の効果】洗浄剤にカチオン性界面活性剤を添加す
ると、添加したカチオン性界面活性剤と、油脂より洗浄
液に溶出したアニオン性界面活性物質とが結合反応し、
不溶性の化合物となる。それによって、洗浄液の油水分
離法に対するアニオン性界面活性物質の悪影響が抑えら
れる。このように、本発明では、洗浄剤にカチオン性界
面活性剤を添加することで、該洗浄剤並びに加熱方式の
油水分離方法がアニオン性界面活性物質が配合された油
種に対しても適用できるようになり、洗浄剤の適用範囲
を拡大できた。
When a cationic surfactant is added to the cleaning agent, the added cationic surfactant and the anionic surface active substance eluted from the fat and oil into the cleaning solution undergo a binding reaction,
It becomes an insoluble compound. Thereby, the adverse effect of the anionic surface-active substance on the oil-water separation method of the cleaning liquid is suppressed. As described above, in the present invention, by adding the cationic surfactant to the detergent, the detergent and the heating method of separating oil / water can be applied to the oil species containing the anionic surfactant. As a result, the range of application of the cleaning agent can be expanded.

フロントページの続き (51)Int.Cl.6 識別記号 庁内整理番号 FI 技術表示箇所 C11D 7:10 1:38) Continuation of the front page (51) Int.Cl. 6 Identification code Office reference number FI technical display area C11D 7:10 1:38)

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 非イオン性界面活性剤とビルダーとを主
成分とする洗浄剤に、カチオン性界面活性剤を配合する
ことを特徴とする水系洗浄剤。
1. A water-based detergent comprising a detergent mainly composed of a nonionic surfactant and a builder, and a cationic surfactant.
【請求項2】 前記ビルダーは、原子価が1:1型の無
機塩類であって、その配合率は洗浄剤1リットル当たり
0.05モル以上、2.0モル以下であることを特徴と
する請求項1記載の水系洗浄剤。
2. The builder is an inorganic salt having a valence of 1: 1 and the compounding ratio thereof is 0.05 mol or more and 2.0 mol or less per liter of the cleaning agent. The water-based cleaning agent according to claim 1.
【請求項3】 請求項1又は2に記載の洗浄剤を水で希
釈した洗浄液を用いる洗浄方法において、洗浄後の油脂
を含んだ洗浄液を前記洗浄剤の曇点温度以上に加熱して
洗浄液中の油脂を浮上分離することを特徴とする洗浄方
法。
3. A cleaning method using a cleaning solution obtained by diluting the cleaning agent according to claim 1 or 2 in a cleaning solution by heating the cleaning solution containing oil and fat after cleaning to a cloud point temperature of the cleaning agent or higher. A method for cleaning, characterized in that the oil and fat of the above is floated and separated.
JP34757495A 1995-12-18 1995-12-18 Water-based detergent and cleaning using the same Pending JPH09165600A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34757495A JPH09165600A (en) 1995-12-18 1995-12-18 Water-based detergent and cleaning using the same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34757495A JPH09165600A (en) 1995-12-18 1995-12-18 Water-based detergent and cleaning using the same

Publications (1)

Publication Number Publication Date
JPH09165600A true JPH09165600A (en) 1997-06-24

Family

ID=18391144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34757495A Pending JPH09165600A (en) 1995-12-18 1995-12-18 Water-based detergent and cleaning using the same

Country Status (1)

Country Link
JP (1) JPH09165600A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100505814B1 (en) * 1997-12-30 2005-10-28 주식회사 엘지생활건강 Multipurpose liquid detergent composition
WO2010088194A3 (en) * 2009-01-28 2010-11-25 Advanced Technology Materials, Inc. Lithographic tool in situ clean formulations
JP2013185120A (en) * 2012-03-09 2013-09-19 Yuken Industry Co Ltd Method for producing reproduced cleaning solution and reuse agent
KR102298092B1 (en) * 2021-05-17 2021-09-02 최주원 Water-based cleaner with excellent cleaning effect, and its manufacturing method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100505814B1 (en) * 1997-12-30 2005-10-28 주식회사 엘지생활건강 Multipurpose liquid detergent composition
WO2010088194A3 (en) * 2009-01-28 2010-11-25 Advanced Technology Materials, Inc. Lithographic tool in situ clean formulations
US9074169B2 (en) 2009-01-28 2015-07-07 Advanced Technology Materials, Inc. Lithographic tool in situ clean formulations
JP2013185120A (en) * 2012-03-09 2013-09-19 Yuken Industry Co Ltd Method for producing reproduced cleaning solution and reuse agent
KR102298092B1 (en) * 2021-05-17 2021-09-02 최주원 Water-based cleaner with excellent cleaning effect, and its manufacturing method

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