JPH08191574A - Ultrasonic motor - Google Patents
Ultrasonic motorInfo
- Publication number
- JPH08191574A JPH08191574A JP7000816A JP81695A JPH08191574A JP H08191574 A JPH08191574 A JP H08191574A JP 7000816 A JP7000816 A JP 7000816A JP 81695 A JP81695 A JP 81695A JP H08191574 A JPH08191574 A JP H08191574A
- Authority
- JP
- Japan
- Prior art keywords
- ultrasonic motor
- elastic
- members
- elastic member
- guide wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は、電気機械変換素子を使
用した超音波モータに関し、特に、弾性体がH型をした
超音波モータに関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ultrasonic motor using an electromechanical conversion element, and more particularly to an ultrasonic motor having an H-shaped elastic body.
【0002】[0002]
【従来の技術】従来、この種の装置として、例えば、圧
電材料よりなり、二本の水平ビームと、これら二本の水
平ビームの中間部間を互いに連結する三本の垂直ビーム
とが一体に形成され、前記二本の水平ビーム、および前
記三本の垂直ビームのうち少なくとも左右二本の垂直ビ
ームに駆動用電極を設けた圧電体変位装置が知られてい
る(特公平4−79155号)。2. Description of the Related Art Conventionally, as a device of this type, for example, two horizontal beams made of a piezoelectric material and three vertical beams connecting the intermediate portions of these two horizontal beams to each other are integrally formed. There is known a piezoelectric body displacement device in which driving electrodes are formed on at least two right and left vertical beams of the two horizontal beams and the three vertical beams (Japanese Patent Publication No. 4-79155). .
【0003】[0003]
【発明が解決しようとする課題】しかし、前述した従来
の装置は、三本の垂直ビームの左右二本の垂直ビームに
駆動用電極を設けて、伸縮の変位を与えて、二本の水平
ビームを撓ませるようにしていたので、ビームの数が多
く、大型でかつ重量が増すとともに、大きな撓み量を得
ることができず、高速な粗動を行うことができなかっ
た。また、圧電素子に電圧を印加して生ずる伸縮は、極
めてわずかなものであるので、大きな伸縮量を得るため
には、高い電圧を印加しなければならず、高速に駆動す
ることができなかった。さらに、直流駆動しているの
で、印加サイクルが可聴周波数領域に存在する場合に
は、騒音が発生するという問題があった。However, in the above-mentioned conventional device, the driving electrodes are provided on the left and right two vertical beams of the three vertical beams to give the expansion and contraction displacement, and the two horizontal beams are provided. However, since the number of beams is large, the beam is large and the weight is large, a large amount of deflection cannot be obtained, and high-speed coarse movement cannot be performed. Further, since the expansion and contraction caused by applying a voltage to the piezoelectric element is extremely small, it was necessary to apply a high voltage in order to obtain a large expansion and contraction amount, and it was impossible to drive at high speed. . Furthermore, since it is driven by direct current, there is a problem that noise is generated when the application cycle is in the audible frequency range.
【0004】本発明の目的は、低い電圧の印加によっ
て、静かで効率よく高速駆動ができ、しかも、構造がシ
ンプルで、小型・軽量化を可能とする超音波モータを提
供することである。An object of the present invention is to provide an ultrasonic motor which can be driven quietly and efficiently at high speed by applying a low voltage, has a simple structure, and can be made compact and lightweight.
【0005】[0005]
【課題を解決するための手段】前記課題を解決するため
に、請求項1の発明は、略平行な2つのガイド壁面を有
する相対移動部材との間で相対移動を行う超音波モータ
において、略平行に配置され前記ガイド壁面に接触する
第1及び第2の弾性部材とそれらの弾性部材の略中心部
を連結する第3の弾性部材とからなるH型の弾性体と、
前記第1及び第2の弾性部材に設けられ、伸縮方向に変
位する第1の電気機械変換素子と、前記第3の弾性部材
に設けられ、曲げ方向に変位する第2の電気機械変換素
子と、を備えたことを特徴としている。In order to solve the above-mentioned problems, the invention of claim 1 is an ultrasonic motor that relatively moves between a relative moving member having two guide walls that are substantially parallel to each other. An H-shaped elastic body composed of first and second elastic members arranged in parallel and in contact with the guide wall surface, and a third elastic member connecting substantially central portions of these elastic members;
A first electromechanical conversion element provided on the first and second elastic members and displaced in the expansion / contraction direction; and a second electromechanical conversion element provided on the third elastic member and displaced in the bending direction. It is characterized by having.
【0006】請求項2の発明は、請求項1に記載の超音
波モータにおいて、前記第1及び第2の弾性部材に設け
られ、前記ガイド壁面に接触する突起部材を備えたこと
を特徴としている。According to a second aspect of the present invention, in the ultrasonic motor according to the first aspect, a projection member is provided on the first and second elastic members and is in contact with the guide wall surface. .
【0007】請求項3の発明は、請求項1又は請求項2
に記載の超音波モータにおいて、前記第1及び/又は第
2の弾性部材と前記ガイド壁面との接触圧を高める加圧
部材を備えたことを特徴としている。The invention of claim 3 relates to claim 1 or claim 2.
The ultrasonic motor according to the aspect (1) is characterized in that a pressure member for increasing the contact pressure between the first and / or second elastic member and the guide wall surface is provided.
【0008】請求項4の発明は、請求項1〜請求項3の
いずれか1項に記載の超音波モータにおいて、前記第1
及び第2の電気機械変換素子に位相の異なる高周波信号
を印加して、前記第1及び第2の弾性部材に長さ固有振
動を励起し、前記第3の弾性部材に曲げ固有振動を励起
する駆動回路を備えたことを特徴している。請求項5の
発明は、請求項1〜請求項4のいずれか1項に記載の超
音波モータにおいて、前記第1〜第3の部材の寸法、形
状、材質などの機械的特性を調整することによって、前
記第1及び第2の部材の長さ固有振動数と前記第3の部
材の曲げ固有振動数とをほぼ一致させることを特徴とし
ている。According to a fourth aspect of the present invention, in the ultrasonic motor according to any one of the first to third aspects,
And high frequency signals having different phases are applied to the second electromechanical conversion element to excite length natural vibration in the first and second elastic members and excite bending natural vibration in the third elastic member. It is characterized by having a drive circuit. According to a fifth aspect of the present invention, in the ultrasonic motor according to any one of the first to fourth aspects, the mechanical characteristics such as the size, shape and material of the first to third members are adjusted. According to this, the length natural frequency of the first and second members and the bending natural frequency of the third member are made to substantially match.
【0009】[0009]
【作用】請求項1の発明によれば、弾性体は、第1及び
第2の弾性部材の略中心部を連結するのが、1本の第3
の弾性部材であるので、軽量化できると共に、曲げ変形
による駆動を採用できる。請求項2の発明によれば、第
1及び第2の弾性部材に突起部材を設けたので、ガイド
壁面との接触がしやすい。請求項3の発明によれば、加
圧部材を設けたので、前記第1及び第2の弾性部材とガ
イド壁面との接触圧を高め、確実に接触できる。請求項
4の発明によれば、ガイド壁面に対して略平行に設けら
れた第1及び第2の弾性部材の先端に生じる長さ固有振
動と、第3の弾性部材に生ずる曲げ固有振動の変位とを
複合した楕円運動を進行力として用いるので、大きな変
位を得ることができるとともに、静かでしかも高速駆動
が可能となる。請求項5の発明によれば、前記第1〜第
3の部材の寸法、形状、材質などの機械的特性を調整し
て、第1及び第2の部材の長さ固有振動数と第3の部材
の曲げ固有振動数とをほぼ一致させることができるの
で、長さ固有振動と曲げ固有振動の変位とを複合した楕
円運動を容易に得ることができる。According to the first aspect of the present invention, the elastic body connects the substantially central portions of the first and second elastic members to each other by using one third member.
Since it is an elastic member, it is possible to reduce the weight and adopt the drive by bending deformation. According to the invention of claim 2, since the protrusion members are provided on the first and second elastic members, it is easy to make contact with the guide wall surface. According to the third aspect of the present invention, since the pressing member is provided, the contact pressure between the first and second elastic members and the guide wall surface can be increased and reliable contact can be achieved. According to the invention of claim 4, the displacements of the length natural vibrations generated at the tips of the first and second elastic members provided substantially parallel to the guide wall surface and the bending natural vibrations generated in the third elastic member. Since an elliptic motion that combines and is used as a traveling force, a large displacement can be obtained, and quiet and high speed driving is possible. According to the invention of claim 5, mechanical characteristics such as dimensions, shapes, and materials of the first to third members are adjusted to adjust the natural frequency of the length of the first and second members and the third characteristic frequency. Since it is possible to make the bending natural frequencies of the members substantially coincide with each other, it is possible to easily obtain an elliptic motion that combines the length natural vibration and the displacement of the bending natural vibration.
【0010】[0010]
(第1の実施例)以下、図面などを参照して、実施例を
あげて、本発明を詳細に説明する。図1は、本発明によ
る超音波モータの第1の実施例を示す斜視図、図2は、
第1の実施例に係る超音波モータの動作を説明する図、
図3及び図4は、第1の実施例に係る超音波モータの駆
動回路を示すブロック図である。本実施例の超音波モー
タは、弾性体1と、突起部材2と、圧電素子3,4と、
加圧用ばね5と、ガイドステージ6等とから構成されて
いる。弾性体1は、金属又はプラスチックス等からなる
弾性を有する材料で作製されており、略平行に配置され
た2本の弾性部材1A,1Aと、それらの弾性部材1
A,1Aの略中心部を連結する弾性部材1Bとからなる
H型の部材である。また、弾性体1の材料や寸法形状等
は、1組の弾性部材1A,1Aの長さ固有振動数と、そ
れを連結する1つの弾性部材1Bの曲げ固有振動数とが
一致するようにそれぞれ設計されている。この弾性体1
の弾性部材1A,1Aには、その両端に外側に突出した
突起部材2(2A,2B)が設けられている。(First Embodiment) The present invention will be described in detail below with reference to the drawings and the like. FIG. 1 is a perspective view showing a first embodiment of an ultrasonic motor according to the present invention, and FIG.
The figure explaining operation | movement of the ultrasonic motor which concerns on a 1st Example,
3 and 4 are block diagrams showing a drive circuit of the ultrasonic motor according to the first embodiment. The ultrasonic motor of this embodiment includes an elastic body 1, a protrusion member 2, piezoelectric elements 3 and 4,
The pressure spring 5 and the guide stage 6 are included. The elastic body 1 is made of an elastic material such as metal or plastics, and has two elastic members 1A and 1A arranged substantially parallel to each other and the elastic members 1A and 1A.
It is an H-shaped member including an elastic member 1B that connects the substantially central portions of A and 1A. Further, the material, dimensions, and the like of the elastic body 1 are set so that the length natural frequency of one set of elastic members 1A and 1A and the bending natural frequency of one elastic member 1B connecting them are the same. Is designed. This elastic body 1
The elastic members 1A, 1A are provided with protruding members 2 (2A, 2B) protruding outward at both ends thereof.
【0011】圧電素子3は、電気エネルギーを機械エネ
ルギーに変換して、弾性部材1A,1Aを長手方向に伸
縮するように変位させる素子(第1の電気機械変換素
子)であり、弾性部材1A,1Aの上下の少なくとも一
方の面に設けられている。圧電素子4は、電気エネルギ
ーを機械エネルギーに変換して、弾性部材1Bを曲げ方
向に変位させる素子(第2の電気機械変換素子)であ
り、弾性部材1Bの両側面の少なくとも一方の面に設け
られている。The piezoelectric element 3 is an element (first electromechanical conversion element) that converts electric energy into mechanical energy and displaces the elastic members 1A, 1A so as to expand and contract in the longitudinal direction. It is provided on at least one surface above and below 1A. The piezoelectric element 4 is an element (second electromechanical conversion element) that converts electric energy into mechanical energy to displace the elastic member 1B in the bending direction, and is provided on at least one of both side surfaces of the elastic member 1B. Has been.
【0012】加圧用ばね(加圧部材)5は、弾性部材1
A,1Aの両端に連結されており、弾性部材1Aに設け
られた突起部材2,2をガイドステージ6のガイド壁面
6a,6aに加圧して、接触圧を高めるための部材であ
る。ガイドステージ6は、弾性体1が相対移動する部材
であって、略平行な2つのガイド壁面6a,6aが形成
されている。The pressing spring (pressurizing member) 5 is an elastic member 1.
It is a member that is connected to both ends of A and 1A and presses the projecting members 2 and 2 provided on the elastic member 1A against the guide wall surfaces 6a and 6a of the guide stage 6 to increase the contact pressure. The guide stage 6 is a member to which the elastic body 1 relatively moves, and has two substantially parallel guide wall surfaces 6a, 6a.
【0013】交流用の駆動回路は、図3に示すように、
圧電素子3,4に位相の異なる高周波信号を印加して、
弾性部材1A,1Aに長さ固有振動を励起し、弾性部材
1Bに曲げ固有振動を励起して、高速な粗動を行うため
の回路である。発振器11は、高周波信号を発振するた
めのものであり、その出力は3つに分岐して、第1の出
力は、移相器12によって90°移相し[図2(A),
(B)参照]、増幅器13で増幅された後に、左右の圧
電素子3に接続されている。第2の出力は、増幅器14
によって増幅された後に、圧電素子4Aに接続されてい
る。第3の出力は、180°位相器15によって位相を
反転し、増幅器16で増幅された後に、圧電素子4Bに
接続されている。180°位相器15は、弾性部材1B
の両側に設けられた圧電素子4A,4Bの曲げの方向を
逆にするために設けられている。As shown in FIG. 3, the driving circuit for alternating current is as follows.
Applying high-frequency signals with different phases to the piezoelectric elements 3 and 4,
This is a circuit for exciting the natural length vibrations of the elastic members 1A and 1A and the bending natural vibrations of the elastic member 1B to perform high-speed coarse movement. The oscillator 11 is for oscillating a high frequency signal, the output of which is branched into three, and the first output is phase-shifted by 90 ° by the phase shifter 12 [FIG. 2 (A),
(B)], and after being amplified by the amplifier 13, they are connected to the left and right piezoelectric elements 3. The second output is the amplifier 14
After being amplified by, it is connected to the piezoelectric element 4A. The third output has its phase inverted by the 180 ° phase shifter 15, amplified by the amplifier 16, and then connected to the piezoelectric element 4B. The 180 ° phaser 15 includes the elastic member 1B.
It is provided to reverse the bending directions of the piezoelectric elements 4A and 4B provided on both sides of.
【0014】直流用の駆動回路は、図4に示すように、
圧電素子3、4を直流電圧によって駆動し、低速な微動
を行うため回路である。流電源21がスイッチ22を介
して3つの圧電素子3に接続されている。また、直流電
源23がスイッチ24を介して圧電素子4Aに、直流電
源25がスイッチ26を介して圧電素子4Bにそれぞれ
接続されている。スイッチ22、24、26の他端は、
弾性体1に接続されて接地されている。As shown in FIG. 4, the drive circuit for direct current is as follows.
This is a circuit for driving the piezoelectric elements 3 and 4 with a DC voltage to perform low-speed fine movement. The current source 21 is connected to the three piezoelectric elements 3 via the switch 22. The DC power supply 23 is connected to the piezoelectric element 4A via the switch 24, and the DC power supply 25 is connected to the piezoelectric element 4B via the switch 26. The other ends of the switches 22, 24, 26 are
It is connected to the elastic body 1 and grounded.
【0015】例えば、図3の交流用の駆動回路によって
高速な粗動で目標位置付近まで移動し、次いで、図4の
直流用の駆動回路に切り換えて、低速な粗動を行い、目
標位置に到達するように制御することができる。図3の
発振器11は、20kHz以上の高周波を用いることが
できるので、共振モードを主に使用すれば、静音化が可
能となり、騒音を嫌う使用環境に好適に使用できる。For example, the driving circuit for AC of FIG. 3 moves to the vicinity of the target position by high-speed coarse movement, and then the driving circuit for DC of FIG. 4 is switched to perform low-speed coarse movement to reach the target position. Can be controlled to reach. Since the oscillator 11 of FIG. 3 can use a high frequency of 20 kHz or more, if the resonance mode is mainly used, it is possible to reduce the noise, and it can be suitably used in a use environment where noise is disliked.
【0016】次に、図2を主に参照しながら、本実施例
の動作を詳細に説明する。まず、図2(a) の状態におい
ては、弾性部材1Aは、長さ固有振動中に縮み量が最大
となるときであり、弾性部材1Bは、曲げの固有振動中
に曲げ量が0となるときである。このときに、弾性部材
1Aの端部に設けられた突起部材2は、すべてガイド壁
面6aに接触している。また、この状態では、進行方向
に対して、後方の2つの突起部材2Bの接触位置を初期
位置x0 、前方の2つの突起部材2Aの接触位置を初期
位置x0 ’とする。Next, the operation of the present embodiment will be described in detail with reference mainly to FIG. First, in the state of FIG. 2 (a), the elastic member 1A has the maximum contraction amount during the natural vibration of length, and the elastic member 1B has the bending amount of 0 during the natural vibration of bending. It's time. At this time, the projection members 2 provided at the ends of the elastic member 1A are all in contact with the guide wall surface 6a. Further, in this state, the contact position of the two rear protruding members 2B with respect to the traveling direction is the initial position x0, and the contact position of the two front protruding members 2A is the initial position x0 '.
【0017】図2の(a) →(b) →(c) の状態では、弾性
部材1Aは、縮み量が最大の状態[図2(a) の状態]か
ら、変形量が0[図2(b) の状態]、さらに前2つの突
起部材2Aがガイド壁面6aに接触する瞬間には、弾性
部材1Aの伸び量が最大[図2(c) の状態]となる。こ
の間に、弾性部材1Aの前2つの突起部材2Aは、弾性
部材1Bの曲げ作用によりガイド壁面6aに非接触の状
態又はガイド壁面6aに対する接触圧が後ろ2つの突起
部材2Bに比較して極めて低い状態にある。そのため
に、弾性部材1Aは、近似的に後ろ2つの突起部材2B
の接触位置を支持端とした形で、進行方向に対してその
伸び変形を行う形となる。In the states of (a) → (b) → (c) of FIG. 2, the elastic member 1A has a maximum amount of contraction [state of FIG. 2 (a)] and a deformation amount of 0 [FIG. (state of (b)], and at the moment when the front two projecting members 2A contact the guide wall surface 6a, the amount of expansion of the elastic member 1A becomes maximum [state of FIG. 2 (c)]. In the meantime, the front two projecting members 2A of the elastic member 1A are not in contact with the guide wall surface 6a due to the bending action of the elastic member 1B, or the contact pressure on the guide wall surface 6a is extremely lower than that of the rear two projecting members 2B. Is in a state. Therefore, the elastic member 1A has approximately two rear projection members 2B.
With the contact position of as the supporting end, the elastic deformation is performed in the traveling direction.
【0018】この図2(c) の状態までの段階で、本実施
例のモータの後ろ2つの突起部材2Bは、初期位置x0
のままで、前2つの突起部材1Aは、Δxだけ前方へ進
んだ位置でガイド壁面6aに接触している状態にある。
また、このとき弾性部材1Aは、伸び変形量は最大、弾
性部材1Bは、曲げ変形量が0の状態にある。In the stage up to the state of FIG. 2 (c), the two rear projecting members 2B of the motor of this embodiment have the initial position x0.
As it is, the front two protruding members 1A are in contact with the guide wall surface 6a at the position advanced by Δx.
Further, at this time, the elastic member 1A is in the maximum elongation deformation amount, and the elastic member 1B is in the bending deformation amount 0.
【0019】次に、図2の(c) →(d) →(e) の状態で
は、弾性部材1Aは、伸び量が最大の状態[図2(c) の
状態]から、変形量が0[図2(d) の状態]、さらに、
後ろ2つの突起部材2Bがガイド壁面6aに接触する瞬
間には、弾性部材1Aの縮み量が最大[図2(e) の状
態]となる。この間に、弾性部材1Aの後ろ2つの突起
部材2Bは、弾性部材1Bの曲げ作用によりガイド壁面
6aに非接触の状態又はガイド壁面6aに対する接触圧
が前2つの突起部材2Aに比較して極めて低い状態にあ
る。そのために、弾性部材1Aは、近似的に前2つの突
起部材2Aの接触位置を支持端とした形で、進行方向に
対してその縮み変形を行う。Next, in the state of (c) → (d) → (e) of FIG. 2, the elastic member 1A has a maximum amount of elongation [state of FIG. 2 (c)] and a deformation amount of 0. [State of Fig. 2 (d)]
At the moment when the two rear projecting members 2B come into contact with the guide wall surface 6a, the amount of contraction of the elastic member 1A becomes the maximum [state of FIG. 2 (e)]. In the meantime, the two protruding members 2B behind the elastic member 1A are not in contact with the guide wall surface 6a due to the bending action of the elastic member 1B, or the contact pressure on the guide wall surface 6a is extremely lower than that of the front two protruding members 2A. Is in a state. For this reason, the elastic member 1A is contracted and deformed with respect to the traveling direction in a form in which the contact position of the front two protruding members 2A is approximately used as the support end.
【0020】この図2の(e) の状態までの段階で、前2
つ、後ろ2つの突起部材2A,2Bは、それぞれxだけ
前方へ進んだx0 ’+Δx、x0 +Δxの位置に接触位
置を変え、結果として、本実施例のモータは、全体とし
て、初期位置からΔx分、前進していることになる。At the stage up to the state of (e) in FIG.
The two rear projection members 2A and 2B change their contact positions to the positions of x0 '+ Δx and x0 + Δx which have moved forward by x, respectively. As a result, the motor of this embodiment as a whole has Δx from the initial position. It means that we are moving forward.
【0021】以上の説明において、長さ固有振動と曲げ
固有振動の位相を逆転させれば、本実施例のモータの進
行方向を逆転させることができる。なお、図4の直流電
源による動作も、1回の動きは、図2(a) 〜(e) の同じ
であるので、詳細な説明は省略する。In the above description, by reversing the phases of the length natural vibration and the bending natural vibration, the traveling direction of the motor of this embodiment can be reversed. The operation of the DC power supply shown in FIG. 4 is the same as that shown in FIGS. 2 (a) to 2 (e), so a detailed description thereof will be omitted.
【0022】(第2の実施例)図5は、本発明による超
音波モータの第2の実施例を示す斜視図である。なお、
以下に説明する各実施例では、前述した第1の実施例と
同様な機能を果たす部分には、同一の符号を付して、重
複する説明を適宜省略する。第2実施例では、ガイドス
テージ6は、一方のガイド壁面6a−1を持つ本体6A
と、一方のガイド壁面6a−2を持つガイド部材6Bに
分割されており、ガイド部材6Bを加圧ばね5A,5A
によって、弾性体1に加圧するようにしたものである。
第2の実施例によれば、弾性体1側に加圧ばね6を設け
なくても済むので、軽量化を図ることができる。(Second Embodiment) FIG. 5 is a perspective view showing a second embodiment of the ultrasonic motor according to the present invention. In addition,
In each of the embodiments described below, parts having the same functions as those of the first embodiment described above are designated by the same reference numerals, and redundant description will be appropriately omitted. In the second embodiment, the guide stage 6 has a main body 6A having one guide wall surface 6a-1.
And a guide member 6B having one guide wall surface 6a-2, and the guide member 6B is divided into pressure springs 5A, 5A.
By this, the elastic body 1 is pressed.
According to the second embodiment, since it is not necessary to provide the pressure spring 6 on the elastic body 1 side, it is possible to reduce the weight.
【0023】(第3の実施例)図6は、本発明による超
音波モータの第3の実施例を示す平面図である。第3の
実施例では、弾性部材1Aは、先端部10Aと、傾斜部
10Bと、基礎部10Cとから構成されており、2つの
弾性部材1A,1Aは、左右が対称に配置されている。
第3の実施例によれば、弾性部材1Cの曲げ振動の変位
を大きく取ることができる。また、このように、弾性部
材1A,1Aの寸法や形状を工夫することによって、2
つの弾性部材1A,1Aの長さ固有振動数と弾性部材1
Cの曲げ固有振動数とを、ほぼ一致させることができ
る。なお、前述した長さ固有振動数と曲げ固有振動数と
をほぼ一致させるには、弾性部材1A,1Aの寸法や形
状だけでなく、材質など他の機械的特性を工夫してもよ
い。(Third Embodiment) FIG. 6 is a plan view showing a third embodiment of the ultrasonic motor according to the present invention. In the third embodiment, the elastic member 1A includes a tip portion 10A, an inclined portion 10B, and a base portion 10C, and the two elastic members 1A and 1A are arranged symmetrically on the left and right.
According to the third embodiment, the displacement of the bending vibration of the elastic member 1C can be made large. In addition, by devising the size and shape of the elastic members 1A, 1A in this way,
Elastic members 1A, 1A and the natural frequency of the length of the elastic members 1A
The bending natural frequency of C can be made to substantially match. In order to make the length natural frequency and the bending natural frequency substantially coincide with each other, not only the size and shape of the elastic members 1A and 1A but also other mechanical characteristics such as material may be devised.
【0024】以上説明した実施例に限定されることな
く、種々の変形や変更が可能であって、それらも本発明
に含まれる。例えば、電気機械変換素子は、圧電素子の
例で説明したが、電歪素子や磁歪素子などであってもよ
い。また、実施例とは逆に弾性体1を固定して、ガイド
レールを移動体とすることも可能である。この実施例で
は、図2のモデルを用いて説明したが、本発明は図2の
モデルに限定されるものではなく、弾性体の長さ固有振
動モードと曲げ振動モードを利用してリニアな進行力を
得るものはすべて本発明に含まれる。The present invention is not limited to the embodiments described above, and various modifications and changes are possible, and these are also included in the present invention. For example, although the electromechanical conversion element is described as an example of a piezoelectric element, it may be an electrostrictive element or a magnetostrictive element. Further, it is also possible to fix the elastic body 1 and use the guide rail as a moving body, contrary to the embodiment. Although this embodiment has been described using the model of FIG. 2, the present invention is not limited to the model of FIG. 2, and linear progression using the length natural vibration mode and bending vibration mode of the elastic body is performed. Everything that gains power is included in the present invention.
【0025】[0025]
【発明の効果】請求項1によれば、弾性体は、第1及び
第2の弾性部材の略中心部を連結するのが、1本の第3
の弾性部材であるので、軽量化できると共に、曲げ変形
による駆動を採用できる。According to the first aspect of the present invention, the elastic body connects the substantially central portions of the first and second elastic members to one third
Since it is an elastic member, it is possible to reduce the weight and adopt the drive by bending deformation.
【0026】請求項2によれば、第1及び第2の弾性部
材に突起部材を設けたので、ガイド壁面との接触がしや
すい。According to the second aspect, since the protrusion members are provided on the first and second elastic members, it is easy to contact the guide wall surface.
【0027】請求項3によれば、加圧部材を設けたの
で、前記第1及び第2の弾性部材とガイド壁面との接触
圧を高め、確実に接触できる。According to the third aspect, since the pressing member is provided, the contact pressure between the first and second elastic members and the guide wall surface can be increased to ensure reliable contact.
【0028】請求項4によれば、ガイド壁面に対して略
平行に設けられた第1及び第2の弾性部材の先端に生じ
る長さ固有振動と、第3の弾性部材に生ずる曲げ固有振
動の変位とを複合した楕円運動を進行力として用いるの
で、大きな変位を得ることができるとともに、静かでし
かも高速駆動が可能となる。According to the fourth aspect, the length natural vibration generated at the tips of the first and second elastic members provided substantially parallel to the guide wall surface and the bending natural vibration generated in the third elastic member. Since an elliptic motion that combines displacement and displacement is used as a progressive force, a large displacement can be obtained, and quiet and high-speed driving is possible.
【0029】請求項5の発明によれば、第1〜第3の部
材の機械的特性を調整して、長さ固有振動数と曲げ固有
振動数とを容易に一致させることができるので、設計の
自由度を向上させることができる。According to the invention of claim 5, the mechanical characteristics of the first to third members can be adjusted so that the natural frequency of bending and the natural frequency of bending can be easily matched. The degree of freedom of can be improved.
【図1】本発明による超音波モータの第1の実施例を示
した図である。FIG. 1 is a diagram showing a first embodiment of an ultrasonic motor according to the present invention.
【図2】第1の実施例に係る超音波モータの駆動原理を
説明する図である。FIG. 2 is a diagram illustrating a driving principle of the ultrasonic motor according to the first embodiment.
【図3】第1の実施例に係る超音波モータの駆動回路を
示すブロック図である。FIG. 3 is a block diagram showing a drive circuit of the ultrasonic motor according to the first embodiment.
【図4】第1の実施例に係る超音波モータの駆動回路を
示す回路図である。FIG. 4 is a circuit diagram showing a drive circuit of the ultrasonic motor according to the first embodiment.
【図5】本発明による超音波モータの第2の実施例を示
した斜視図である。FIG. 5 is a perspective view showing a second embodiment of the ultrasonic motor according to the present invention.
【図6】本発明による超音波モータの第3の実施例を示
した平面図である。FIG. 6 is a plan view showing a third embodiment of the ultrasonic motor according to the present invention.
1 弾性体 1A,1B 弾性部材 2 突起部材 3,4 圧電素子 5,5A 加圧ばね 6 ガイドステージ DESCRIPTION OF SYMBOLS 1 Elastic body 1A, 1B Elastic member 2 Projection member 3,4 Piezoelectric element 5,5A Pressure spring 6 Guide stage
Claims (5)
移動部材との間で相対移動を行う超音波モータにおい
て、 略平行に配置され前記ガイド壁面に接触する第1及び第
2の弾性部材とそれらの弾性部材の略中心部を連結する
第3の弾性部材とからなる弾性体と、 前記第1及び第2の弾性部材に設けられ、伸縮方向に変
位する第1の電気機械変換素子と、 前記第3の弾性部材に設けられ、曲げ方向に変位する第
2の電気機械変換素子と、を備えたことを特徴とする超
音波モータ。1. An ultrasonic motor that performs relative movement between a relative moving member having two guide walls that are substantially parallel to each other. First and second elastic members that are arranged substantially parallel and contact the guide wall surfaces. An elastic body including a third elastic member that connects substantially central portions of the elastic members; a first electromechanical conversion element that is provided in the first and second elastic members and that is displaced in the expansion and contraction direction; An ultrasonic motor comprising: a second electromechanical conversion element that is provided on the third elastic member and is displaced in the bending direction.
て、 前記第1及び第2の弾性部材に設けられ、前記ガイド壁
面に接触する突起部材を備えたことを特徴とする超音波
モータ。2. The ultrasonic motor according to claim 1, further comprising a protrusion member provided on each of the first and second elastic members and contacting the guide wall surface.
ータにおいて、 前記第1及び/又は第2の弾性部材と前記ガイド壁面と
の接触圧を高める加圧部材を備えたことを特徴とする超
音波モータ。3. The ultrasonic motor according to claim 1, further comprising a pressure member that increases a contact pressure between the first and / or second elastic member and the guide wall surface. And ultrasonic motor.
載の超音波モータにおいて、 前記第1及び第2の電気機械変換素子に位相の異なる高
周波信号を印加して、前記第1及び第2の弾性部材に長
さ固有振動を励起し、前記第3の弾性部材に曲げ固有振
動を励起する駆動回路を備えたことを特徴とする超音波
モータ。4. The ultrasonic motor according to claim 1, wherein high frequency signals having different phases are applied to the first and second electromechanical conversion elements, and the first and second electromechanical conversion elements are applied. And an ultrasonic motor including a drive circuit that excites a length natural vibration in the second elastic member and a bending natural vibration in the third elastic member.
載の超音波モータにおいて、 前記第1〜第3の部材の寸法、形状、材質などの機械的
特性を調整することによって、前記第1及び第2の部材
の長さ固有振動数と前記第3の部材の曲げ固有振動数と
をほぼ一致させることを特徴とする超音波モータ。5. The ultrasonic motor according to any one of claims 1 to 4, wherein the mechanical characteristics such as size, shape and material of the first to third members are adjusted, An ultrasonic motor, wherein the length natural frequency of the first and second members and the bending natural frequency of the third member are made to substantially match.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7000816A JPH08191574A (en) | 1995-01-06 | 1995-01-06 | Ultrasonic motor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7000816A JPH08191574A (en) | 1995-01-06 | 1995-01-06 | Ultrasonic motor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH08191574A true JPH08191574A (en) | 1996-07-23 |
Family
ID=11484206
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7000816A Pending JPH08191574A (en) | 1995-01-06 | 1995-01-06 | Ultrasonic motor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH08191574A (en) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005057838A (en) * | 2003-08-06 | 2005-03-03 | Olympus Corp | Vibration wave linear motor |
JP2007068367A (en) * | 2005-09-02 | 2007-03-15 | Tokyo Institute Of Technology | Ultrasonic levitator |
JP2007068350A (en) * | 2005-09-01 | 2007-03-15 | Tokyo Institute Of Technology | Driving/guiding apparatus |
CN105006990A (en) * | 2015-07-16 | 2015-10-28 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working mode thereof |
CN105259782A (en) * | 2015-10-09 | 2016-01-20 | 华中科技大学 | Simulation method of H-type air-floating motion platform |
-
1995
- 1995-01-06 JP JP7000816A patent/JPH08191574A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005057838A (en) * | 2003-08-06 | 2005-03-03 | Olympus Corp | Vibration wave linear motor |
JP2007068350A (en) * | 2005-09-01 | 2007-03-15 | Tokyo Institute Of Technology | Driving/guiding apparatus |
JP2007068367A (en) * | 2005-09-02 | 2007-03-15 | Tokyo Institute Of Technology | Ultrasonic levitator |
CN105006990A (en) * | 2015-07-16 | 2015-10-28 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working mode thereof |
CN105006990B (en) * | 2015-07-16 | 2017-02-01 | 南昌航空大学 | Planar ultrasonic motor driven based on H-shaped piezoelectric transducer structure and working method thereof |
CN105259782A (en) * | 2015-10-09 | 2016-01-20 | 华中科技大学 | Simulation method of H-type air-floating motion platform |
CN105259782B (en) * | 2015-10-09 | 2017-10-13 | 华中科技大学 | A kind of emulation mode of H types air supporting motion platform |
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