JPH0797059B2 - Pressure sensor - Google Patents
Pressure sensorInfo
- Publication number
- JPH0797059B2 JPH0797059B2 JP9080490A JP9080490A JPH0797059B2 JP H0797059 B2 JPH0797059 B2 JP H0797059B2 JP 9080490 A JP9080490 A JP 9080490A JP 9080490 A JP9080490 A JP 9080490A JP H0797059 B2 JPH0797059 B2 JP H0797059B2
- Authority
- JP
- Japan
- Prior art keywords
- deformed portion
- pressure
- magnetic alloy
- amorphous magnetic
- pressure sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Description
【発明の詳細な説明】 産業上の利用分野 本発明は、非晶質磁性合金の磁歪効果を用いた圧力セン
サに関する。TECHNICAL FIELD The present invention relates to a pressure sensor using the magnetostriction effect of an amorphous magnetic alloy.
従来の技術 近年、非晶質磁性合金の磁歪効果を用いた圧力センサが
提案されている。第３図はこのような圧力センサの一例
の概略を示す断面図である。図において、11は直径10m
m,高さ70mmの円柱状の本体、12は直径6mmの圧力導入
口、13は圧力を伝える圧力室である。14は本体11の一部
を薄く加工した変形部分、15は圧力による歪が生じない
ようにした非変形部分である。非変形部分15の内部は圧
力室13と同じ大きさの中空部分16を持つ。17は本体11の
外周上で、変形部分14および非変形部分15の上に接着し
た非晶質磁性合金である。18は圧力検出コイルで、変形
部分14の外周上に接着した非晶質磁性合金17の外側にボ
ビン19を介して配されヨーク21とともに透磁率検出素子
の働きをする。20は圧力検出コイル18と同構成の差動用
コイルで、非変形部分15の外周上に接着した非晶質磁性
合金17の外側にボビン19を介して配されヨーク21ととも
に透磁率検出素子の働きをする。22は本体11の固定用ね
じ部分、23は検出回路である。2. Description of the Related Art In recent years, pressure sensors using the magnetostrictive effect of amorphous magnetic alloys have been proposed. FIG. 3 is a sectional view schematically showing an example of such a pressure sensor. In the figure, 11 is 10 m in diameter
A columnar body having a height of 70 mm and m, 12 is a pressure inlet having a diameter of 6 mm, and 13 is a pressure chamber for transmitting pressure. Reference numeral 14 is a deformed portion obtained by processing a part of the main body 11 thinly, and 15 is a non-deformed portion in which distortion due to pressure is prevented. The inside of the non-deformable portion 15 has a hollow portion 16 having the same size as the pressure chamber 13. Reference numeral 17 denotes an amorphous magnetic alloy bonded on the deformed portion 14 and the non-deformed portion 15 on the outer circumference of the main body 11. Reference numeral 18 denotes a pressure detecting coil, which is arranged outside the amorphous magnetic alloy 17 adhered on the outer periphery of the deformed portion 14 via a bobbin 19 and functions as a magnetic permeability detecting element together with the yoke 21. Reference numeral 20 denotes a differential coil having the same configuration as the pressure detection coil 18, which is arranged outside the amorphous magnetic alloy 17 adhered on the outer periphery of the non-deformed portion 15 via the bobbin 19 and together with the yoke 21 of the magnetic permeability detection element. Work. Reference numeral 22 is a fixing screw portion of the main body 11, and 23 is a detection circuit.
圧力は圧力導入口12から圧力室13に伝わり、圧力室13を
膨らませる方向に応力をかける。その結果、変形部分14
が変動し、その表面に接着された非晶質磁性合金17の透
磁率が変化する。この透磁率変化を圧力検出コイル18で
インダクタンスの変化として検出し、差動用コイル20と
の差動出力より圧力の変化を得ている。The pressure is transmitted from the pressure introduction port 12 to the pressure chamber 13, and stress is applied in the direction in which the pressure chamber 13 is expanded. As a result, the deformed portion 14
Fluctuates, and the magnetic permeability of the amorphous magnetic alloy 17 adhered to the surface changes. This change in permeability is detected by the pressure detection coil 18 as a change in inductance, and the change in pressure is obtained from the differential output from the differential coil 20.
発明が解決しようとする課題 このような従来の圧力センサでは、非晶質磁性合金17と
本体11の間の接着剤量の不均一性により温度変化による
０点ドリフトはセンサ出力感度幅に対して約20％と大き
かった。すなわち上述の構成の本体では、本体と非晶質
磁性合金の間の接着剤量が場所により不均一であった場
合、余分な接着剤は逃げることができず、厚みむらを持
って固化するので、変形部分および非変形部分に加わる
応力状態が不均一となり、そのため０点ドリフトが変動
するという課題があった。In such a conventional pressure sensor, the zero-point drift due to the temperature change due to the non-uniformity of the adhesive amount between the amorphous magnetic alloy 17 and the main body 11 is relative to the sensor output sensitivity width. It was as large as about 20%. That is, in the main body having the above-described configuration, if the amount of adhesive between the main body and the amorphous magnetic alloy is uneven depending on the location, excess adhesive cannot escape and solidifies with uneven thickness. However, the stress state applied to the deformed portion and the non-deformed portion becomes non-uniform, which causes a problem that the zero-point drift fluctuates.
本発明は上記課題を解決するもので、０点ドリフトの少
ない圧力センサを提供することを目的としている。The present invention solves the above problems, and an object of the present invention is to provide a pressure sensor with less zero-point drift.
課題を解決するための手段 本発明は上記目的を達成するために、非晶質磁性合金を
接着剤で固着する本体の変形部分および非変形部分に、
前述の非晶質磁性合金の厚さより大きな段差を設けたも
のである。Means for Solving the Problems In order to achieve the above-mentioned object, the present invention comprises a deformed portion and a non-deformed portion of a main body for fixing an amorphous magnetic alloy with an adhesive,
It is provided with a step greater than the thickness of the above-mentioned amorphous magnetic alloy.
作用 本発明は上述した構成により、非晶質磁性合金接着時の
余分な接着剤を段差に逃がすことができるので均一な厚
さで接着でき、変形部分および非変形部分に加わる応力
状態が等しくなり、温度変化に対する０点ドリフトを低
減することが可能である。Effect The present invention, which has the above-described configuration, allows excess adhesive at the time of adhering the amorphous magnetic alloy to escape to the step, so that the adhesive can be adhered with a uniform thickness, and the stress state applied to the deformed portion and the non-deformed portion becomes equal. It is possible to reduce the zero-point drift with respect to temperature changes.
実施例 以下、本発明の一実施例について第１図および第２図を
参照しながら、第３図の従来例と同一部分には同一番号
を付して説明を省略し、本発明の特徴となる部分につい
て説明する。Embodiment An embodiment of the present invention will be described below with reference to FIGS. 1 and 2, and the same parts as those in the conventional example of FIG. That part will be described.
すなわち本発明の特徴は、第１図において本体１の変形
部分14および非変形部分15に非晶質磁性合金17の厚さよ
り大きい段差、たとえば0.5mmの円筒状の段差２が配さ
れたことである。その凹んだ変形部分14および非変形部
分15をおおうようにイミド系接着剤で250℃、２時間で
厚さ0.03mmのFe−Si−Ｂ−Cr系非晶質磁性合金17を接着
するのであるが、余分な接着剤が段差２の空間部分へ逃
げ込み、均一な厚みの接着剤で固着されることになる。
その結果、変形部分14および非変形部分15の応力状態が
均一に近づく。That is, the feature of the present invention is that in FIG. 1, the deformed portion 14 and the non-deformed portion 15 of the main body 1 are provided with a step greater than the thickness of the amorphous magnetic alloy 17, for example, a cylindrical step 2 of 0.5 mm. is there. The Fe-Si-B-Cr system amorphous magnetic alloy 17 having a thickness of 0.03 mm is adhered to the recessed deformed portion 14 and the non-deformed portion 15 with an imide adhesive at 250 ° C for 2 hours so as to cover the recessed deformed portion 14 and the non-deformed portion 15. However, the excess adhesive escapes into the space of the step 2 and is fixed by the adhesive having a uniform thickness.
As a result, the stress state of the deformed portion 14 and the non-deformed portion 15 approaches uniform.
本構成による圧力センサにおいて温度変化による０点ド
リフトは約10％と、従来に比べ半減した。In the pressure sensor of this configuration, the zero-point drift due to temperature change is about 10%, which is half that of the conventional one.
第２図は余分な接着剤を逃がす他の構成を示したもので
ある。すなわち本体３の変形部分14および非変形部分15
の両端部分表面には深さ0.5mmの溝状の段差４が配され
ている。この溝状の段差４に、第１図の場合と同様に余
分の接着剤が逃げ込むことになる。この構成による圧力
センサにおいても第１図の場合と同様に温度変化による
０点ドリフトは約10％であり、従来に比べ半減した。FIG. 2 shows another structure for releasing excess adhesive. That is, the deformed portion 14 and the non-deformed portion 15 of the body 3
Groove-shaped steps 4 having a depth of 0.5 mm are arranged on the surfaces of both end portions of. As in the case of FIG. 1, excess adhesive will escape into the groove-like step 4. Also in the pressure sensor with this configuration, the zero-point drift due to temperature change is about 10%, which is half that of the conventional one, as in the case of FIG.
なお、第２図の実施例によれば、第１図の実施例のよう
に本体外径を大きくする必要がなく、従来例の圧力セン
サ本体11と全く同じ寸法にできる利点がある。According to the embodiment shown in FIG. 2, it is not necessary to increase the outer diameter of the main body as in the embodiment shown in FIG.
以上の構成、動作により従来に比べて０点ドリフトの少
ない圧力センサを得ることができた。With the above configuration and operation, a pressure sensor with less zero-point drift than the conventional one could be obtained.
発明の効果 上記の実施例から明らかなように本発明によれば、非晶
質磁性合金を接着剤で固着する本体の変形部分および非
変形部分に、非晶質磁性合金の厚さより大きな段差を設
けたので、余分な接着剤がその段差の空間部分に逃げ、
０点ドリフトの少ない圧力センサを提供することができ
る。EFFECTS OF THE INVENTION According to the present invention, as is apparent from the above-described embodiments, a step greater than the thickness of the amorphous magnetic alloy is formed in the deformed portion and the non-deformed portion of the main body that fixes the amorphous magnetic alloy with an adhesive. Since it is provided, excess adhesive escapes to the space of the step,
It is possible to provide a pressure sensor with little zero-point drift.
第１図は本発明の一実施例の圧力センサの断面図、第２
図は本発明の他の実施例の圧力センサの断面図、第３図
は従来の圧力センサの断面図である。 １……本体、２……段差、12……圧力導入口、13……圧
力室、14……変形部分、15……非変形部分、17……非晶
質磁性合金、18,19,21……変形部分14の透磁率検出素子
を構成する圧力検出コイルとボビンとヨーク、19,20,21
……非変形部分15の透磁率検出素子を構成するボビンと
差動用コイルとヨーク。FIG. 1 is a sectional view of a pressure sensor according to an embodiment of the present invention, and FIG.
FIG. 3 is a sectional view of a pressure sensor of another embodiment of the present invention, and FIG. 3 is a sectional view of a conventional pressure sensor. 1 ... Main body, 2 ... Step, 12 ... Pressure inlet, 13 ... Pressure chamber, 14 ... Deformed portion, 15 ... Undeformed portion, 17 ... Amorphous magnetic alloy, 18,19,21 ...... Pressure detecting coil, bobbin, and yoke that form the magnetic permeability detecting element of the deformed portion 14, 19, 20, 21
...... A bobbin, a differential coil, and a yoke that constitute the magnetic permeability detection element of the non-deformed portion 15.
Claims (1)
る圧力によってひずむ圧力室を持つ変形部分と圧力によ
って歪が生じない非変形部分とからなる本体と、前記変
形部分および非変形部分の外周上に接着剤により固着さ
れた磁歪を有する非晶質磁性合金と、その非晶質磁性合
金の外側にその非晶質磁性合金と磁気回路をなすように
配置された前記変形部分の透磁率検出素子と前記非変形
部分の透磁率検出素子とを有する圧力センサにおいて、
前記非晶質磁性合金を固着する前記本体の変形部分およ
び非変形部分に前記非晶質磁性合金の厚さより大きな段
差を設けた圧力センサ。1. A body comprising a deformed portion having a pressure introducing port and a pressure chamber distorted by the pressure introduced from the pressure introducing port, and a non-deformable portion in which no strain is generated by the pressure, and the deformed portion and the non-deformed portion. Magnetostrictive amorphous magnetic alloy fixed on the outer periphery by an adhesive, and magnetic permeability of the deformed portion arranged outside the amorphous magnetic alloy so as to form a magnetic circuit with the amorphous magnetic alloy. In a pressure sensor having a detection element and a magnetic permeability detection element of the non-deformed portion,
A pressure sensor having a step greater than the thickness of the amorphous magnetic alloy in the deformed portion and the non-deformed portion of the main body to which the amorphous magnetic alloy is fixed.
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9080490A JPH0797059B2 (en) | 1990-04-05 | 1990-04-05 | Pressure sensor |
| US07/678,160 US5165284A (en) | 1990-04-05 | 1991-04-01 | Pressure sensor utilizing a magnetostriction effect |
| EP91302919A EP0450933B1 (en) | 1990-04-05 | 1991-04-03 | Pressure sensor utilizing a magnetostriction effect |
| DE69104255T DE69104255T2 (en) | 1990-04-05 | 1991-04-03 | Magnetoresistive pressure transducer. |
| KR1019910005450A KR930005167B1 (en) | 1990-04-05 | 1991-04-04 | Pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9080490A JPH0797059B2 (en) | 1990-04-05 | 1990-04-05 | Pressure sensor |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH03289529A JPH03289529A (en) | 1991-12-19 |
| JPH0797059B2 true JPH0797059B2 (en) | 1995-10-18 |
Family
ID=14008779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9080490A Expired - Lifetime JPH0797059B2 (en) | 1990-04-05 | 1990-04-05 | Pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0797059B2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001116551A (en) | 1999-10-18 | 2001-04-27 | Matsushita Electric Ind Co Ltd | Angular velocity sensor |
-
1990
- 1990-04-05 JP JP9080490A patent/JPH0797059B2/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH03289529A (en) | 1991-12-19 |
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