JPH0796915B2 - Quartz pipe fittings - Google Patents

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a quartz pipe joint used, for example, for connecting a quartz tank for cleaning a silicon wafer and a chemical liquid supply system, or for a chemical liquid supply system in a semiconductor manufacturing line.

[0002]

Conventionally, as a pipe joint for use in chemical supply system as described above, for example, as shown in FIG. 6, those application pipe joint already developed by people (KOKOKU 1
-54599). This pipe joint 30
After the tightening ring 32 and the tightening nut 33 are sequentially fitted on the outer peripheral surface of the synthetic resin tube 31, the end portion of the synthetic resin tube 31 is inserted into the one end side connecting portion 34a of the joint body 34 to form the synthetic resin tube. The tightening nut 33 fitted on the outer peripheral surface of the tube 31 and the joint body 34 are screwed together. After that, the tightening nut 33 is rotated in a direction in which the tapered surface 34b formed on the joint body 34 and the tapered surface 32a formed on the tightening ring 32 are pressed against each other, and the tightening ring 32 is rotated.
Is a pipe joint 30 in which the tightening ring 32 is bitten on the outer peripheral surface of the synthetic resin tube 31 and is prevented from being pulled out and fixed by being radially contracted and deformed against the material elasticity.

[0003]

However, in the pipe joint 30 as described above, when the fluid pressure applied during use becomes higher than the limit, the biting portion of the synthetic resin tube 31 is deformed and is easily pulled out. Even if the fluid pressure applied at times is below the limit, if the fluid temperature rises, the bite portion of the synthetic resin tube 31 will soften and will easily come off.
And pipe diameter of the synthetic resin tube 31 becomes remarkable stress relaxation occurring in the extent eating <br/> included part diameter increases, there is a problem that its application range is limited.

As a means for solving the above-mentioned stress relaxation, for example, a quartz tube (not shown) made of a material which is not easily affected by the pressure change and the high temperature change of the fluid may be used. One end side connection portion 34a of the joint body 34
After forcing the tightening nut 33 to rotate with a jig such as a wrench, the quartz tube hardly undergoes diameter reduction deformation, and as a tube joint for connecting the quartz tube, the retaining force is high. , A pipe fitting with excellent safety and reliability has not been developed.

In view of the above problems, the present invention is such that a tightening ring is contracted to the outer peripheral surface of a quartz tube by diameter reduction deformation and pressure-fixed, and a retaining ring is fitted and fixed to a peripheral groove formed in the outer peripheral surface of the quartz tube. It is an object of the present invention to provide a quartz pipe joint in which the quartz pipe and other pipe members can be firmly connected to each other by fixing and retaining the pipe, and a joint function with high safety and reliability can be obtained.

[0006]

According to the present invention, an end portion of a quartz tube is inserted into a connecting portion on one end side of a joint body, and a tightening nut inserted on the outer peripheral surface of the quartz tube is connected to one end side of the joint body. Part is screwed through a tightening ring inserted on the outer peripheral surface of the quartz tube, and the tapered surface formed at the end of the tightening ring and the one end side connecting portion of the joint body is matched, The tightening ring is reduced in diameter in the direction in which it is crimped and fixed on the outer peripheral surface of the quartz tube, and a retaining ring is fitted and fixed in a peripheral groove engraved on the outer peripheral surface of the quartz tube. It is a quartz pipe joint that holds a retaining ring between opposing faces of a clamping nut and a clamping ring that are fitted on the quartz pipe.

[0007]

According to the present invention, since the end portion of the quartz tube is inserted into the one end side connecting portion of the joint body, the tightening ring is deformed by the diameter reduction on the outer peripheral surface of the quartz tube and fixed by pressure. The outer peripheral surface of the quartz tube can be used as it is as a sealing surface, and the large crimping force due to the shrinking deformation of the tightening ring not only reliably prevents the leakage of the transport fluid, but also greatly reduces the deforming deformation of the tightening ring. The crimping force acts as a retaining force,
Further, as a holding force for the quartz tube, these crimping force, retaining action force, and holding force can be obtained only by tightening the tightening nut, and the operation is simple. For example, the connection between the quartz tube and the quartz tube or the quartz tube. Connection between the pipe and other pipe members can be done easily,
Workability can be improved. Moreover, since the retaining ring is fitted and fixed in the circumferential groove engraved on the outer peripheral surface of the quartz tube to retain and fix the retaining ring, in addition to the retaining force of the contraction deformation of the tightening ring described above, A high retaining force that exceeds the breaking limit is obtained.In addition, the retaining ring receives the tightening ring, so there is no looseness of the tightening ring, and a sealing effect with excellent reliability and durability is obtained. Since it has a small number of parts and a simple structure, as a result, it is possible to obtain a high joint function with excellent safety and reliability, and it is a material that is not easily adversely affected by changes in fluid pressure and temperature, so it is best used. The temperature and maximum operating pressure are greatly improved, and the range of application as a pipe joint can be expanded.

[0008]

EXAMPLES The drawings illustrate quartz tube fittings that are used to connect the synthetic resin tube with a quartz tube, 1 and 2
Contact stomach, this quartz pipe joint 1 after forme difference ends 3a of the quartz tube 3 on one end side connecting portion 2a of the joint body 2 formed in a cylindrical shape, and one end side connecting portion 2a of the joint body 2 Quartz tube 3
Of the retaining ring 5 and the quartz tube 3 which are fitted and fixed on the outer peripheral surface of the quartz tube 3 and the one end side connecting portion 2a of the joint body 2 by screwing together with the tightening nut 4 fitted on the outer peripheral surface of the quartz tube 3. Tightening is performed in the direction in which the opposing surface of the tightening ring 6 fitted on the outer peripheral surface is pressed, and the one end side connecting portion 2a of the joint body 2 and the end portion 3a of the quartz tube 3 are connected in an airtight state.

On the other hand, P is attached to the other end side connecting portion 2b of the joint body 2.
After the end portion 7a of the synthetic resin tube 7 made of synthetic resin such as FA is fitted and inserted on the outer peripheral surface of the sleeve 8, the other end side connecting portion 2b of the joint body 2 and the synthetic resin tube 7 are joined together. By screwing a tightening nut 9 fitted on the outer peripheral surface, the other end side connecting portion 2b of the joint body 2 is tightened in a direction in which the opposing surfaces of the synthetic resin tube 7 and the sleeve 8 are pressed together. The other end side connecting portion 2b of 2 and the end portion 7a of the synthetic resin tube 7 are connected in an airtight state.

The elements 2, 4, 5, 6, 8 and 9 constituting the above quartz pipe joint 1 are, for example, chemically resistant and heat resistant for transporting chemicals such as strong acid and strong alkali. It consists of pressure resistance excellent resin material, and the joint body 2 of synthetic resin such as PTFE or PFA, clamping the ring 6 constitute each form <br/>, nut 4 tightened synthetic resin such as PFA or PP,
9, a retaining ring 5 and a sleeve 8 are formed respectively .

In the joint body 2 described above, an insertion recess 10 having a shape and size that matches the end 3a of the quartz tube 3 is formed in the connecting portion 2a on one end side of the joint body 2, and the inner peripheral edge of the insertion recess 10 is formed. A male screw portion 1 is formed on the outer peripheral surface of the same-side connecting portion 2a, which is formed with a conical tapered surface 10a having a small diameter toward the direction in which the quartz tube 3 is inserted, and which is screwed onto the female screw portion 4a of the tightening nut 4.
0b is threaded. Or One, to form a plug recess 11 geometry that matches with the end 7a and the sleeve 8 of plastic tube 7 to the other end side connecting portion 2b of the joint body 2, the synthetic resin inside the peripheral edge portion of the insertion recess 11 forming a male screw portion 11b which forms a tapered surface 11a of the conical decreasing diameter toward the tube 7 in the direction plugged, screwed with the female screw portion 9a of the tightening nut 9 on the outer peripheral surface of the ipsilateral connecting portion 2b is doing.

The tightening nut 4 described above has a female screw portion 4a formed on the inner peripheral surface of the tightening nut 4, and an insertion hole having a diameter slightly larger than the outer diameter of the quartz tube 3 is formed at the center of the tightening nut 4. 4b is formed, and a step portion 4c that abuts the rear end surface of the retaining ring 5 is formed on the inner peripheral edge of the insertion hole 4b.

The retaining ring 5 has a through hole 5a formed at the center of the retaining ring 5 and having a shape and size that matches the peripheral groove 3b formed on the outer peripheral surface of the quartz tube 3 to prevent retaining. The outer peripheral portion on one end side of the ring 5 is radially cut to form a dividing groove 5b, and the outer peripheral portion on the other end side of the retaining ring 5 is partially cut away to form a connecting portion 5c. That is, the quartz tube 3
When inserting the retainer ring 5 on the outer peripheral surface of the slightly deflected against the connecting portion 5c of the retaining ring 5 to the material elasticity, retaining slightly larger diameter than the outer diameter of the quartz tube 3 The insertion hole 5a of the ring 5 is inserted while being radially expanded and deformed.

The tightening ring 6 has a through hole 6a having a diameter slightly smaller than the outer diameter of the quartz tube 3 at the center of the tightening ring 6, and the quartz tube 3 is formed on one end surface of the tightening ring 6. Conical taper surface 6 with a smaller diameter toward the insertion direction
b is formed, and the tapered surface 6b is formed to have a shape and dimension that match the tapered surface 10a formed on the one end side connecting portion 2a of the joint body 2 described above.

[0015] illustrated embodiment to what constitutes as described above, will be described how to connect the quartz tube 3 by a quartz tube fitting 1 and the synthetic resin tube 7. First, FIG. 1 and FIG.
After the tightening nut 4 is fitted on the outer peripheral surface of the quartz tube 3 and is moved rearward of the peripheral groove 3b engraved on the outer peripheral surface of the quartz tube 3, as shown in FIG. The retaining ring 5 is radially expanded and deformed and fitted on the outer peripheral surface of the quartz tube 3. That is, the connecting portion 5c of the retaining ring 5 is slightly bent against the elasticity of the material, and the insertion hole 5 of the retaining ring 5 is inserted.
a is inserted into the quartz tube 3 while being expanded and deformed to a diameter slightly larger than the outer diameter of the quartz tube 3, and the retaining ring 5 is fitted to the circumferential groove 3b formed on the outer peripheral surface of the quartz tube 3. Fix it.

Next, the tightening ring 6 is fitted on the outer peripheral surface of the quartz tube 3 and moved to a position where it comes into contact with the retaining ring 5 fitted and fixed on the outer peripheral surface of the quartz tube 3. After that, the end portion 3a of the quartz tube 3 is inserted into the insertion recess 10 formed in the one end side connecting portion 2a of the joint main body 2, and the tapered surface 10a formed in the one end side connecting portion 2a of the joint main body 2;
The quartz tube 3 is deeply inserted to the position where the tapered surface 6b formed on the tightening ring 6 abuts. After that, a tightening nut 4 fitted on the outer peripheral surface of the quartz tube 3 is screwed into the one end side connecting portion 2a of the joint body 2 to connect the one end side connecting portion 2a of the joint body 2.
The tightening nut 4 is manually rotated in a direction in which the tapered surface 10a formed on the upper surface and the tapered surface 6b formed on the tightening ring 6 are pressed against each other.
The tightening nut 4 is rotated a prescribed number of times with the tool to fix and tighten, and the other end side connecting portion 2b of the joint body 2 and the end portion 3a of the quartz tube 3 are connected in an airtight state.

That is, the stepped portion 4c of the tightening nut 4 is pressed against the retaining ring 5, and the opposite end faces of the retaining ring 5 and the tightening ring 6 are pressure contacted to the connecting portion 2a on the one end side of the joint body 2. Formed taper surface 10a and tightening ring 6
By making pressure contact with the taper surface 6b formed in the above, the tightening ring 6 is forcibly contracted and deformed against the material elasticity,
The tightening ring 6 can be crimped and fixed on the outer peripheral surface of the quartz tube 3.

On the other hand, after the end portion 7a of the synthetic resin tube 7 is fitted onto the outer peripheral surface of the sleeve 8 and inserted into the other end side connecting portion 2b of the joint body 2, the other end portion of the joint body 2 is connected. Part 2b
A tightening nut 9 inserted into the outer peripheral surface of the synthetic resin tube 7 is screwed into the socket, and the insertion recess 11 formed in the other end side connecting portion 2b of the joint body 2 faces the synthetic resin tube 7 and the sleeve 8. The tightening nut 9 is manually rotated in the direction in which the surfaces are pressed against each other, and the tightening nut 9 is rotated a specified number of times with a wrench or the like from the time when the tightening nut 9 is no longer tightened by hand, as described above. The other end side connecting portion 2b of 2 and the end portion 7a of the synthetic resin tube 7 are connected in an airtight state.

As a test method for the above quartz pipe joint 1,
For example, the sample NO. 1 to
NO. No. 4 and the sample No. 5
~ NO. A heat cycle test was carried out in a state where 8 and 8 were hand-tightened and then tightened 1/2 turn with a spanner or the like.

These sample NO. 1-NO. 8 is subjected to a heat cycle test, as shown in FIG. 3, one end side of the test path 13 constituting the heat cycle test apparatus 12 is connected to the oil supply path 1
4, the other end of the test path 13 is connected to the middle part of the oil recovery path 15, and the thermometer 16 and the pressure gauge 17 are connected to the oil recovery side of the test path 13. . On the other hand, one end of the oil supply passage 14 is connected to the supply pump 18
And the outlet side of the high temperature tank 20 via the switching valve 19, and the other end of the oil supply passage 14 is connected to the supply pump 2
1 and a switching valve 22 to connect to the outlet side of the low temperature tank 23. Moreover , one end side of the oil recovery passage 15 is connected to the inlet side of the high temperature tank 20 via the switching valve 24, and the other end side of the oil recovery passage 15 is connected to the inlet side of the low temperature tank 23 via the switching valve 25. is doing.

As shown in FIG. 4, in the test passage 13 described above, the sample No. 3 was provided on the oil supply passage 14 side via the synthetic resin tube 7 and the stone tube 3. 1-NO. Connect 4 and tighten by hand, then tighten 1/2 turn with a tool such as a spanner. On the other hand, on the oil recovery passage 15 side, the sample NO. 5 to NO. Connect 8 and tighten by hand, then tighten 1/2 turn with a tool such as a spanner. Or
No. 2 on the oil supply side 4 and sample No. 4 on the oil recovery side. 5 is connected via a synthetic resin tube 7 and a metal tube 26 made of SUS, and each synthetic resin tube 7
Is the sample No. 1-NO. Each connected 8 to the tube connecting portion 27 constituting the respective quartz tubes 3 ... sample NO. 1 to
NO. 8 are connected to the quartz tube connecting portions 28, respectively .

As described above, the sample NO. 1-NO. After piping 8, the switching valves 19, 2 installed on the high temperature oil supply side
4 and switching valves 22, 2 provided on the low temperature oil supply side
5 and 5 are alternately opened and closed, and as shown in FIG. 5, silicon oil of about 200 ° C. stored in the high temperature tank 20,
The normal temperature silicone oil stored in the low temperature tank 23 is alternately circulated and supplied every hour, and this is set as one cycle (2 hours), and the cycle is repeatedly supplied for 100 cycles during the test. Piping sample No. 1 to N
O. Test 8 performance.

That is, silicon oil (KF968) is used as a test transportation fluid, the hydraulic pressure during high temperature oil supply and low temperature oil supply is set to 1 kg / cm ² , and the tank during high temperature oil supply is set. The outlet temperature is set to 196 ° C (measured temperature), and the tank outlet temperature during low temperature oil supply is about 40 ° C.
Set to (measured temperature), the cycle of supplying 196 ° C. silicon oil and room temperature silicon oil alternately every hour is set as one cycle (2 hours), and the number of cycles during the test is set to 100 cycles. , Sample NO. During high temperature oil supply and low temperature oil supply. 1-NO. The leakage situation of No. 8 was measured. Table 1 below shows sample N under the above conditions.
O. 1-NO. 8 is the result of performance test of No. 8.

[0024]

[Table 1]

As a result of the test, the sample No. which was tightened by 1/2 rotation with a tool such as a spanner was tightened as compared with the initial tightening. 1 to N
O. With respect to No. 4, even if the operation of alternately circulating and supplying high-temperature silicone oil and normal-temperature silicone oil is repeated 100 cycles, no leakage occurs and good test results are obtained.

Therefore, when connecting the quartz tube 3 having a tube diameter of 19 mm or a tube diameter of 8 mm, after tightening the tightening nut 4 by hand at the time of the initial installation, it is manually tightened and then 1 / with a tool such as a spanner.
It is better to tighten it twice, so that the leakage of the transport fluid can be reliably prevented. Also , the peripheral groove 3b formed in the quartz tube 3
Since the retaining ring 5 is fitted and fixed on the sample No.
1-NO. Even if high pressure and high temperature are applied to the quartz tube 3, the quartz tube 3 does not come off, and a high tube holding force exceeding the breakage limit of the quartz tube 3 itself can be obtained.

As shown by the above test results, the joint body 2
After inserting the end portion 3a of the quartz tube 3 into the connection portion 2a on one end side of the quartz tube 3, the tightening ring 6 is contracted and fixed on the outer peripheral surface of the quartz tube 3 by reducing the diameter, so that the leakage of the transport fluid can be surely performed. Not only is this prevented, but also the quartz tube 3 and the quartz tube 3 or the quartz tube 3 and another synthetic resin tube 7 can be easily connected, and workability can be improved.

Moreover, since the retaining ring 5 is fitted and fixed in the peripheral groove 3b formed on the outer peripheral surface of the quartz tube 3 to secure the retaining, a high retaining force exceeding the breaking limit of the quartz tube 3 itself is exerted. The maximum operating temperature (200 ° C), because it is a material that is highly safe and reliable, and has a high joint function, and that it is not easily adversely affected by changes in fluid pressure or temperature.
Also, the maximum working pressure (2 kg / cm ^{2 at} all times) is greatly improved, and the range of application as a pipe joint can be expanded .

[0029] The Contact, the invention is not limited only to that of the above-described embodiment, the joint structure of the quartz pipe joint 1 constituting the present invention connects the quartz tube 3 and the quartz tube 3 It can also be applied to a pipe joint (not shown) exclusively used for the quartz pipe.

[Brief description of drawings]

FIG. 1 is an exploded perspective view showing a quartz pipe joint of the present invention .

FIG. 2 is a vertical sectional side view of a quartz pipe joint.

FIG. 3 is a configuration diagram of a thermal cycle test device showing a test method for a quartz pipe joint.

FIG. 4 is a sample piping diagram showing a piping state of a quartz pipe joint.

FIG. 5 is a time chart diagram showing thermal cycle temperature conditions during a test .

Figure 6 is a longitudinal side view showing a pipe joint of the prior art.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... Quartz pipe joint 2 ... Joint body 2a, 2b ... Connection part 3 ... Quartz pipe 3b ... Circumferential groove 4 ... Tightening nut 5 ... Detachment ring 6 ... Tightening ring 6b, 10a ... Tapered surface 7 ... Synthetic resin tube

Claims (1)

[Claims] 1. An end portion of a quartz tube is inserted into a connection portion on one end side of a joint body, and a tightening nut inserted on an outer peripheral surface of the quartz tube and a connection portion on one end side of the joint body are attached to the outer periphery of the quartz tube. It is screwed through a tightening ring inserted on the surface, and the tapered surface formed on the end of the tightening ring and the connecting portion on the one end side of the joint main body is aligned with each other, and is fitted on the outer peripheral surface of the quartz tube. The tightening ring is reduced in diameter in the direction of being crimped and fixed, and a retaining ring is fitted and fixed in a circumferential groove formed on the outer peripheral surface of the quartz tube, and the retaining ring is mounted on the quartz tube. A quartz tube fitting that holds the inserted tightening nut between the opposing surfaces of the tightening ring.