JPH079129Y2 - Cross table - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial field of application] The present invention relates to a cross table that is applied to, for example, a microscope and displaces an object to be observed in two coordinate directions, and in particular, an improvement of a drive operation unit of the table. Regarding

[Prior Art] In a conventional cross table of this type, a first table is supported by a base so as to be displaceable in an uniaxial direction, for example, a Y direction, and the displacement direction of the first table on the first table is A second table is supported so as to be displaceable in different directions, for example, the X direction.

As a driving mechanism for such a cross table, first and second racks respectively provided on the base and the second table, and a first rack coaxially supported on the first table by being meshed with these racks, respectively. There is a structure in which the first table and the second table are displaced by changing the meshing state of the rack and the pinion that are composed of the first and second pinions and are meshed in correspondence with each other. In such a mechanism, since the operation knobs for driving each pinion are arranged close to each other, the device can be downsized and the first table and the second table can be operated at substantially the same operation point. Because the operation can be selectively performed,
It has good operability and is widely used in microscopes.

Further, the driving mechanism in such a cross table has a clamping structure for restricting the rotation of the first and second pinions, so that both pinions are not clamped, only one pinion is clamped.
As shown in No. 61-246714, both pinions can be clamped at the same time, both pinions can be clamped, but there are those that clamp each pinion separately, and these are used according to the purpose of use. .

[Problems to be solved by the device]

By the way, in a cross table adapted to a microscope, for example, the first table or the second table is usually selectively displaced to observe an object to be observed on the cross table. For example, when the object to be observed is a wafer on which a large number of ICs are formed, in order to observe each IC formed continuously in the X direction and the Y direction, use either the first table or the second table. While stopped, the other IC is displaced and each IC is placed in the field of view of the microscope for observation.

However, in the conventional cross table, when the pinion clamping structure is of the form (1), one of the pinions is in a state in which it can easily rotate, and the two pinions are selectively rotationally restricted. Not a configuration. Therefore, when observing the object to be observed, it may be necessary to displace one of the first table and the second table while the other is not fixed, depending on the observation direction. Therefore, in the forms (1) to (3), when the predetermined knob is operated to displace one of the tables in the observation direction, the operator may touch or collide with the table or the operation knob outside the observation direction, so that the table outside the observation direction is not detected. The table may be displaced, and as a result, the object to be observed may be out of the field of view of the microscope. In particular, when fine positioning of the table is required, such as when observing an IC on a wafer with a microscope, the operation must be performed more carefully, and the operation is very complicated.

On the other hand, in the structure of the conventional cross table, since each pinion has an independent clamp mechanism, movement of the table outside the observation direction is prevented, but the structure becomes large and complicated, and the product cost is reduced. There is a problem of increasing. Further, in the table of this structure, the clamp mechanism for each pinion must be operated separately to selectively perform table displacement,
There is also a problem in that operability is poor because a clamping operation and a releasing operation are required for each clamping mechanism.

An object of the present invention is to provide a cross table which has a small size and a simple structure and can selectively clamp the table by an easy operation.

[Means for Solving the Problems]

According to the present invention, in a cross table having a first table and a second table which are respectively displaced in a predetermined direction by a rack and a pinion mechanism, two operating knobs for rotating each pinion are coaxially arranged on the axis of the pinion bearing. The clamp knobs are arranged in series at intervals, and the clamp knobs are screwed into the bearing between these two operation knobs, and the clamp knobs are rotated in a predetermined direction so that the clamp knobs are screw-operated to either one of the two operation knobs. It is intended to achieve the above-mentioned object by pressing the operation knob to regulate the rotation of the operation knob.

Specifically, the base, a first table uniaxially displaceably supported by the base, and the first table displaceably supported in a direction different from the displacement direction of the first table. A second table, a bearing projectingly provided on the first table, and a first rack fixed to the base so that a tooth surface extends along the displacement direction of the first table,
A first pinion meshed with the first rack and rotatably supported by the bearing, and a first operation that is coaxially fixed to the first pinion and rotationally drives the first pinion. A knob, a second rack fixed to the second table so that its tooth surface extends along the displacement direction of the second table, and meshed with the second rack and rotatably supported by the bearing. And a second pinion,
A second operation knob that is coaxially fixed to the second pinion and that is arranged in series with the first operation knob at a predetermined interval in the axial direction of the bearing to drive the second pinion for rotation; The first operation knob or the second operation is screwed into the bearing between the first operation knob and the second operation knob, and moves forward and backward in the axial direction of the bearing in accordance with the rotation operation along the bearing. A cross table comprising: a clamp knob that is selectively pressed by a knob to restrict rotation of the pressed first or second operation knob.

[Action]

In such a configuration, when the clamp knob is rotated, the clamp knob advances and retreats along the screw provided on the bearing and is pressed by the first operation knob or the second operation knob to restrict the rotation of the operation knob. . In this operation of the clamp knob, the other operation knob can be clamped by rotating the operation knob after opening one operation knob, and the operation of the other operation knob can be selectively performed by one operation. Clamping can be performed very quickly because it can be clamped easily. Moreover, since the single clamp knob can perform the selective clamp operation, the structure is simple and downsized.

〔Example〕

 An embodiment of the present invention will be described below with reference to the drawings.

In the overall configuration diagram of FIG. 1 and the enlarged cross-sectional view of the main part of FIG. 2, the first table 13 is displaceable on the base 11 via the linear guide 12 in the uniaxial direction, that is, the Y direction in the figure. The second table 15 is supported on the first table 13 via a linear guide 14 so that the second table 15 can be displaced in a direction different from the displacement direction of the first table 13, for example, in the X direction orthogonal to the Y direction. It is supported.

A bearing 20 is projectingly provided on the first table 13. The bearing 20 has a small-diameter insert portion 21 that is fitted to the first table 13, and a flange portion 22 for fixing the bearing 20 to the lower surface of the first table 13, and is provided continuously with this flange portion. Large diameter portion 23, medium diameter portion 2 connected to the large diameter portion 23
4, and the small diameter part 2 at the lowermost end that is connected to this medium diameter part 24
Formed with 5.

A first rack 31 having a tooth surface 31A arranged along the displacement direction (Y direction) of the first table 13 is fixed to the lower surface of the base 11, and is meshed with the first rack 31. 1
The pinion 32 is rotatably supported by the medium diameter portion 24 of the bearing 20. In this first pinion 32, a part (lower part) of a first operation knob 33 formed in the shape of a hollow cylinder is formed.
The pinion 32 is fixed coaxially with the pinion 32. Here, the first rack 31 and the first pinion 32
The first operating knob 33 forms the first drive means 30.

A male screw portion 26 is formed on the medium diameter portion 24 of the bearing 20, and the male screw portion 26 has a support pair in the inner diameter portion of the operation knob 33.
35 is screwed and fixed. This support pair 35 and the first
A wave washer is placed between the pinion 32 and the lower end surface of the pinion 32 in the figure.
36 is interposed, and the first pinion 32 is brought into contact with the lower surface of the large diameter portion 23 of the bearing 20 with a predetermined pressing force by the urging force of the wave washer 36 to support the pinion 32. Here, the support body 35 and the wave washer 36 constitute a holding means 37 for the first pinion 32.

The second table 15 has a tooth surface 41A which is the second table 1
The second rack 41 arranged along the displacement direction (X direction) of 5 is fixed, and the second pinion 42 meshed with the second rack 41 has the bearing 20 through the pinion shaft 43.
It is rotatably supported by. The pinion shaft 43 penetrates through a through hole 27 provided along the axial direction of the bearing 20 and extends downward, and a lower end portion protruding from the bearing 20 has a second operating knob via a spacer 44. 45 is fixed with a nut 46. Here, the second rack 41, the second pinion 42, the pinion shaft 43, the spacer 44, and the second operation knob 45 constitute the second drive means 40. The second operation knob 45 is coaxially supported by the pinion shaft 43 coaxially with the second pinion 42, and is arranged in series at a predetermined interval in the axial direction of the first operation knob 33 and the bearing 20. Has been done.

A male screw portion 28 is formed on the outer periphery of the small-diameter portion 25 of the bearing 20, and a cylindrical clump knob 51 is provided on the male screw portion 28 so as to be movable back and forth in the axial direction of the bearing 20, and the first and second portions. The operation knobs 33 and 45 are screwed together. The clamp knob 51 is provided with a click stop mechanism (moderation mechanism) 60 for stopping the clump knob 51 on the bearing 20 with a detent feeling at an intermediate position in the moving range of the clamp knob 51 with respect to the bearing 20. The click stop mechanism 60 includes a steel ball 61 that can be engaged with a recess provided in a corresponding position of the bearing 20, two set screws 62 screwed into the knob 51, the set screw 62 and the steel ball 61. The compression coil spring 63 is interposed between the steel balls 61 and constantly urges the steel balls 61 toward the circumferential surface of the bearing 20.
It consists of and.

A cylindrical clamp ring 52 is fitted in the inner diameter portion of the first operation knob 33, and one end of the clamp ring 52 can be brought into contact with the lower end surface of the first pinion 32 and the clamp ring 52 is clamped. A first clamp plate 53 is provided on the other end of the ring 52.
Are fixed together. The central portion of the first clamp plate 53 is loosely fitted in the small diameter portion 25 of the bearing 20, and
As shown in the enlarged sectional view of the figure, the first clamp plate
A pin 38 protruding from the support 35 is engaged with a notch 54 formed in a part of 53. The engagement between the pin 38 and the notch 54 allows the clamp ring 52 and the clamp plate 53, which are integrally formed, to move only in the axial direction of the bearing 20 while being restricted in rotation. Further, the upper end surface of the clamp knob 51 can be brought into contact with the clamp plate 53, and the clamp knob 51 is attached to the male screw portion 28.
Clamp knob 51 is rotated along the first table.
When moving to the 13 side, the upper end surface of the clamp knob 51 and the lower end surface of the clamp plate 53 are pressed, and the first pinion 32 is pressed against the end surface of the large diameter portion 23 of the bearing 20 via the clamp ring 52. Thus, the rotation of the first pinion 32 can be restricted. At this time, since the clamp plate 53 and the clamp ring 52 are moved only in the axial direction of the bearing 20 without rotating due to the action of the pin 38 and the notch 54 as described above, the clamp knob 51 moves forward and backward. The first pinion 32 is not rotated regardless of the above.

A second clamp plate 56 is provided on the upper surface of the second operation knob 45.
Are arranged. As shown in the enlarged cross-sectional view of FIG. 4, the second clamp plate 56 is loosely fitted to the outer periphery of the small diameter portion 25 of the bearing 20 and partially protrudes toward the inner diameter side of the bearing 20. The locking portion 57 is engaged with the groove 29 formed in the small diameter portion 25 of the bearing 20, so that the second clamp plate 56 can move only in the axial direction of the bearing 20 without rotating around the bearing 20. It has become. Further, the lower end surface of the clamp knob 51 can be pressed against the second clamp plate 56,
The pressing of the clamp knob 51 against the second clamp plate 56 is performed by moving the clamp knob 51 forward and backward along the male screw portion 28. That is, when the clamp knob 51 is rotated to move the lower end surface of the clamp knob 51 downward in the figure, the lower end surface of the clamp knob 51 contacts the upper end surface of the clamp plate 56, and the second operation knob 45 is further moved. Press down. This allows the second pinion to pass through the pinion shaft 43.
42 is moved downward, and the lower surface of the second pinion 42 is pressed against the upper end portion of the bearing 20, so that the second pinion 42
The rotation of 42 is restricted, and the rotation of the second pinion 42 is restricted.

It should be noted that when the click stop mechanism 60 of the clamp knob 51 is just locked, that is, when the clamp knob 51 is at the center position of the forward / backward movement along the male screw 28, both upper and lower ends of the clamp knob 51 are shown. Both surfaces do not come into contact with the first and second clamp plates 53 and 56, so that the rotation of the first and second pinions 32 and 42 is not restricted.

Next, the operation of this embodiment will be described.

An appropriate object to be observed is placed on the second table 15 and fixed. In this state, the clamp knob 51 is at the center position of its advance / retreat movement range, the click stop mechanism 60 is just engaged, and the upper and lower end surfaces of the clamp knob 51 are both of the first and second clamp plates 53, 56. It is in a state where it is not pressed. Therefore, the first and second pinions 32 and 42 are both in a freely rotatable state, and the first and second tables 13 and 1
Each of 5 is in a state where it can move in a predetermined direction (Y, X directions). In this freely movable state, the first and second operation knobs 33 and 45 are operated to position the object to be observed at the observation start position within the field of view of the microscope, for example.

Then, the clamp knob 51 is rotated to operate one of the first and second pinions 32 and 42, for example, the first pinion 3
Restrict rotation of 2. The rotation of the first pinion 32 is regulated by raising the clamp knob 51 in the figure, bringing the upper end surface of the clamp knob 51 into contact with the first clamp plate 53, and further rotating the clamp knob 51. This is performed by pressing the first pinion 32 against the large diameter portion 23 of the bearing 20 via the ring 52. At this time, since the clamp photograph 51 is screwed into the male screw portion 28 of the bearing 20, the first pinion 32 is axially pressed by the bearing 20 with an extremely large pressing force by the tightening action of this screw. The rotation is surely regulated. Further, the clamp knob 51 presses the first pinion 32 through the clamp ring 52 coaxially with the first pinion 32 and along the axial direction of the first pinion 32, so that a large pressing force is applied. Also does not deform each member, and the pinion 32
Is subject to rotation restrictions.

When the rotation of the first pinion 32 is restricted by the clamp knob 51, the first clamp plate 53 and the clamp ring
Since the rotation of 52 is restricted by the pin 38 and the notch 54 as described above, the first pinion 32 is not rotated even by the rotation of the clamp knob 51, and the initially set position of the pinion 32 is maintained. The rotation is regulated while keeping it as it is.

The first pinion 32 is axially supported by the bearing 20 with a predetermined pressing force by the urging force of the wave washer 36. Even when the first pinion 32 is not pressed by the clamp knob 51, the first pinion 32 has an axial play. Without, on the other hand, the first operating knob
The operating force by the 33 is adjusted so that the knob 33 can be operated smoothly by appropriately setting the spring force of the wave washer 36.

After the rotation of the first pinion 32 is restricted in this way, if the second operation knob 45 is operated to rotate the second pinion 42, as the second pinion 42 rotates, The second table 15 is displaced in the X direction via the rack 41,
The observed object can be moved only in the X direction. Therefore, when the object to be observed is an IC, for example, the ICs sequentially arranged in the X direction can be observed one after another, and the operation can be smoothly performed.

When the observation of the object to be observed in this direction is completed, the clamp knob 51 is lowered to release the rotation restriction of the first pinion 32, and the clamp knob 51 is further lowered to move the clamp knob 51 to the second clamp plate. The second operation knob 45 is brought into contact with the second operation knob 45 via 56, and further the clamp knob 51 is moved downward to press the second operation knob 45 downward to push it down. Second pinion 42 by pressing the pinion 42 of the
42 rotation regulation. In this way the second pinion 42
After the rotation is restricted, the first operation knob 33 is operated to move the first table 13 in the Y direction to observe the observed object in the Y direction.

Thereafter, the X-direction and the Y-direction are similarly observed at predetermined intervals to observe all observation points of the object.

When the second table 15 and the first table 13 are moved in the X direction or the Y direction, the second pinion 42 is interposed between the lower end surface of the bearing 20 and the upper end surface of the second operation knob 45. The first pinion 32 is stopped by the urging force of the wave washer 36 by the frictional force of the spacer 44, and the second and first pinsion 32 are also stopped by the urging force of the wave washer 36. The tables 15 and 13 have an appropriate resting force during the observation, and are prevented from moving freely.

According to this embodiment as described above, there are the following effects.

That is, since the rotation of the first pinion 32 and the second pinion 42 arranged coaxially can be selectively restricted by one clamp knob 51, the structure is simplified and the device can be downsized. . Also, the clamp knob
Since there is one 51, the clamping operation of each pinion 32, 42 can be simplified and the work efficiency can be improved, and the first and second tables 13, 15 can be clamped reasonably and reliably. In addition, the clamp knob 51 is screwed into the bearing 20 coaxially with the first pinion 32 and the second pinion 42, and by moving back and forth, the first pinion 32 or the second pinion 42.
Is pressed along its axis, the rotation of the pinions 32, 42 can be reliably and reliably regulated. In addition, the clamp knob 5
Since the clip stop mechanism 60 is provided in 1,
It is possible to reliably grasp the center position where the clamp is not performed, and it is easy to use, and when not performing the clamp, the clamp knob 51 can be reliably locked at the center position, preventing unnecessary clamping during operation. it can. In addition, when the first and second pinions 32 and 42 are clamped, the first and second clamp plates 53 and 56 are pin 3 respectively.
8 or the movement of the clamp knob 51, which is rotationally operated, is transmitted to the first and second pinions 32, 42 because the movement is performed only in the axial direction while the rotation is restricted by the groove 29 of the bearing 20. The pinions 32 and 42 can be accurately clamped in their original positions. Further, in a state where the clamp knob 51 does not clamp the first and second pinions 32 and 42, the first pinion 32 is appropriately operated by the wave washer 36 and the second pinion 42 is appropriately operated by the spacer 44. Since the bearing 20 is supported by the bearing 20 with a static force, the first and second tables 13 and 15 do not move with a slight force, and the observation can be performed accurately.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications within a range in which the object of the present invention can be achieved are included in the present invention. That is, when the first and second pinions 32, 42 are clamped by the clamp knob 51, if the first and second operation knobs 33, 45 are clamped while being held by hand, Second clamp
52 and 56 do not necessarily need to be restricted in the rotation direction by the pin 38, the groove 39, and the like. However, if the rotation direction is restricted as in the above-mentioned embodiment, there is an advantage that it is not necessary to fix the first and second operation knobs 33 and 45 with a hand or the like. Further, when the clamp plates 53, 56 are not restricted in rotation, it is not always necessary to provide these clamp plates 53, 56, and the clamp knob 51 may be brought into direct contact with the first and second operation knobs 33, 45. Good. In addition, the bearing 20 of the clamp knob 51
The screwing with respect to is not limited to the one in which the bearing 20 side is the male screw as in the above embodiment, but may be configured in the opposite way. Further, the first clamp plate 53 is restricted in the rotation direction by providing a pin 38 on the support body 35 and a notch 54 that engages with the pin 38 on the first clamp plate 53.
However, the support member 35 is provided with the notch 54, and the first
The clamp plate 53 may be provided with the pins 38. Furthermore, the second
Similarly, in the restriction of the rotation direction of the clamp plate 56, the groove 29 may be provided in the second clamp plate 56 and the engaging portion 57 may be provided in the bearing 20, contrary to the above embodiment. Further, the regulation of the rotation direction of the first clamp plate 53 and the second clamp plate 56 is performed by the pin 38 and the notch 54, and the locking portion 57 and the groove 29, as in the above-described embodiment.
It does not have to be, but the point is that the first clamp plate
Other configurations may be used as long as the rotation of the 53 and the second clamp plate 56 can be restricted.

[Effect of device]

As described above, according to the present invention, there is an effect that it is possible to provide a cross table that can be selectively clamped by a simple operation even with a small and simple structure.

[Brief description of drawings]

FIG. 1 shows an embodiment of the present invention. FIG. 1 is a perspective view showing the entire structure, FIG. 2 is an enlarged sectional view taken along line II-II of FIG. 1, and FIGS. III-III of Fig. 2 respectively
FIG. 4 is an enlarged cross-sectional view taken along the line IV-IV. 11 …… Base, 13 …… First table, 15 …… Second table, 20 …… Bearing, 28 …… Male thread, 31 …… First rack, 31A …… Tooth surface, 32 …… Second 1 pinion, 33 ... first operation knob, 41 ... second rack, 41A ... tooth surface, 4
2 ... second pinion, 45 ... second operation knob, 51 ...
… Clamp knob.

Claims (1)

[Scope of utility model registration request] 1. A base, a first table supported by the base so as to be uniaxially displaceable, and a first table supported by the first table so as to be displaceable in a direction different from the displacement direction of the first table. A second table, a bearing projectingly provided on the first table, and a first rack fixed to the base so that a tooth surface extends along the displacement direction of the first table,
A first pinion meshed with the first rack and rotatably supported by the bearing, and a first operation that is coaxially fixed to the first pinion and rotationally drives the first pinion. A knob, a second rack fixed to the second table so that its tooth surface extends along the displacement direction of the second table, and meshed with the second rack and coaxial with the first pinion. A second pinion rotatably supported by the bearing, coaxially fixed to the second pinion, and arranged in series at a predetermined interval in the axial direction of the first operating knob and the bearing. A second operation knob that rotationally drives the second pinion, and a shaft of the bearing that is screwed into the bearing between the first operation knob and the second operation knob and that is rotated along the bearing. Go back and forth Serial first operation knob or the selectively pressed on the second operation knob cross table which is characterized by comprising a knob clamp to restrict the rotation of the first or the second operation knob which is the pressing.