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JPH07321501A - Structure of air-tight window for microwave transmission - Google Patents

Structure of air-tight window for microwave transmission

Info

Publication number
JPH07321501A
JPH07321501A JP11257694A JP11257694A JPH07321501A JP H07321501 A JPH07321501 A JP H07321501A JP 11257694 A JP11257694 A JP 11257694A JP 11257694 A JP11257694 A JP 11257694A JP H07321501 A JPH07321501 A JP H07321501A
Authority
JP
Japan
Prior art keywords
dielectric
window
circular waveguide
parts
waveguide section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11257694A
Other languages
Japanese (ja)
Inventor
Koichiro Hirano
耕一郎 平野
Isamu Sato
勇 佐藤
Satoshi Ito
聡志 伊藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Doryokuro Kakunenryo Kaihatsu Jigyodan
Power Reactor and Nuclear Fuel Development Corp
Original Assignee
Toshiba Corp
Doryokuro Kakunenryo Kaihatsu Jigyodan
Power Reactor and Nuclear Fuel Development Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Doryokuro Kakunenryo Kaihatsu Jigyodan, Power Reactor and Nuclear Fuel Development Corp filed Critical Toshiba Corp
Priority to JP11257694A priority Critical patent/JPH07321501A/en
Publication of JPH07321501A publication Critical patent/JPH07321501A/en
Pending legal-status Critical Current

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  • Non-Reversible Transmitting Devices (AREA)

Abstract

PURPOSE:To provide the structure of an air-tight window for microwave transmission which is easily assembled and in which a dielectric air-tight window and a circular waveguide are entirely and efficiently cooled. CONSTITUTION:The window structure is made up of a rectangular waveguide section 1, a circular waveguide section 12 whose axial length is equal to or more than a guide wavelength and a rectangular waveguide section 13 in this order, a dielectric airtight window 23 is provided to a middle part of the circular waveguide section 12, a coolant path 20 is formed in a part corresponding to the outer circumferential part of the dielectric air-tight window 23, and the circular waveguide section 12 is divided into three parts being a part having a dielectric airtight window 30 and parts with which each of the rectangular waveguide sections 11, 13 is integrally coupled at both sides and whose outer circumferential parts are formed with coolant paths 21, 22, and the three parts are removably and air-tightly connected.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、クライストロン等の
マイクロ波管装置に使用して好適なマイクロ波伝送用気
密窓構体に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an airtight window structure for microwave transmission suitable for use in a microwave tube device such as a klystron.

【0002】[0002]

【従来の技術】一般にマイクロ波伝送用気密窓構体は、
大電力クライストロンの出力部や、その他の大電力マイ
クロ波の伝送回路を備える種々の機器に利用されている
が、例えばクライストロンの出力部の導波管としていわ
ゆるピルボックス型が使用される。即ち、円形導波管部
の長さをLとし管内波長をλgとしたとき、Lをλgの
4分の1前後とする従来のマイクロ波伝送用気密窓構体
は、図4に示すように構成されている。矩形導波管部
1,円形導波管部2及び矩形導波管部3の順で連結さ
れ、且つ円形導波管部2の中間部分に誘電体気密窓4が
設けられると共に、この誘電体気密窓4の外周に対応す
る部分に冷却媒体路5が形成されている。そして、円形
導波管部2の両端近くの各フランジ6,7はそれぞれフ
ランジ8,9にねじ10により気密に接続されている。
このピルボックス型のマイクロ波伝送用気密窓構体は、
上記のように円形導波管部2の長さLを管内波長λgの
約4分の1に選ぶ。一方、Lを管内波長λgの4分の1
の2倍以上の長さに設定するいわゆるロングピルボック
ス型も、例えば米国特許3110000号や、同333
9102号明細書、その他で周知である。このようなロ
ングピルボックス型は、誘電体気密窓の位置における電
界強度が比較的低いため、より大電力の透過に耐える。
2. Description of the Related Art Generally, an airtight window structure for microwave transmission is
It is used in various devices including an output part of a high power klystron and other high power microwave transmission circuits. For example, a so-called pill box type is used as a waveguide of the output part of the klystron. That is, when the length of the circular waveguide portion is L and the in-tube wavelength is λg, a conventional microwave-tight window structure for microwave transmission, in which L is about ¼ of λg, is constructed as shown in FIG. Has been done. The rectangular waveguide part 1, the circular waveguide part 2 and the rectangular waveguide part 3 are connected in this order, and the dielectric airtight window 4 is provided in the middle part of the circular waveguide part 2 and A cooling medium passage 5 is formed in a portion corresponding to the outer circumference of the airtight window 4. The flanges 6 and 7 near both ends of the circular waveguide portion 2 are hermetically connected to the flanges 8 and 9 by screws 10.
This pill box type airtight window structure for microwave transmission is
As described above, the length L of the circular waveguide section 2 is selected to be about ¼ of the guide wavelength λg. On the other hand, L is a quarter of the guide wavelength λg
The so-called long pill box type, which is set to a length more than twice as long as that of US Pat.
9102 and others. Such a long pill box type has a relatively low electric field strength at the position of the dielectric hermetic window, and therefore can withstand transmission of a larger amount of power.

【0003】[0003]

【発明が解決しようとする課題】このようないわゆるロ
ングピルボックス型のマイクロ波伝送用気密窓構体にお
いては、円形導波管部の長さLが長いため、次のような
問題が生じる。 (1) 誘電体気密窓の表面に例えばTiNからなるマルチ
パクタ放電防止用被膜を均一な膜厚で蒸着することが困
難であり、且つ組立てが困難である。
In such a so-called long pillbox type airtight window structure for microwave transmission, since the length L of the circular waveguide portion is long, the following problems occur. (1) It is difficult to vapor-deposit a multipactor discharge preventing coating made of, for example, TiN to a uniform thickness on the surface of the dielectric hermetic window, and it is difficult to assemble.

【0004】(2) 円形導波管部の管壁を全体的に冷却す
ることが困難である。即ち、局部的に薄く構成した管壁
に誘電体気密窓を気密接合するが、この薄肉の管壁に大
きな水圧をかけることが出来ないため、円形導波管部の
全体を効率良く水冷することが困難になる。
(2) It is difficult to cool the entire tube wall of the circular waveguide section. That is, a dielectric airtight window is airtightly joined to a locally thin tube wall, but a large water pressure cannot be applied to this thin wall, so the entire circular waveguide section must be efficiently water cooled. Becomes difficult.

【0005】尚、その他の従来例として、特開昭60−
187101号公報および実開昭61−62337号公
報に記載されたものがあるが、マルチパクタ放電防止用
被膜の均一な蒸着が困難であったり、あるいは構造が極
めて複雑化する等の不都合がある。
Incidentally, as another conventional example, Japanese Unexamined Patent Publication No. 60-
Although there are those described in Japanese Patent No. 187101 and Japanese Utility Model Laid-Open No. 61-62337, there are disadvantages that it is difficult to uniformly deposit a multipactor discharge preventing coating, or the structure becomes extremely complicated.

【0006】この発明は、以上のような不都合を解消
し、組立てが容易で、且つ誘電体気密窓および円形導波
管部の全体的な効率良い冷却を行うことが出来るマイク
ロ波伝送用気密窓構体を提供することを目的とする。
The present invention eliminates the above-mentioned inconveniences, is easy to assemble, and is capable of efficiently cooling the dielectric airtight window and the circular waveguide part as a whole. The purpose is to provide a structure.

【0007】[0007]

【課題を解決するための手段】この発明は、矩形導波管
部、管内波長と同等又はそれ以上の軸方向長さを有する
円形導波管部及び矩形導波管部の順で構成され、且つ円
形導波管部の中間部分に誘電体気密窓が設けられると共
に誘電体気密窓の外周に対応する部分に冷却媒体路が形
成されてなるマイクロ波伝送用気密窓構体において、円
形導波管部は誘電体気密窓を有する部分と、その両側の
各円形導波管部が一体結合され且つ外周に冷却媒体路が
形成されている部分の3者に分割され、これら3者が着
脱可能に気密接続されてなるマイクロ波伝送用気密窓構
体である。
The present invention comprises a rectangular waveguide section, a circular waveguide section having an axial length equal to or longer than the in-tube wavelength, and a rectangular waveguide section in this order. In the hermetic window structure for microwave transmission, a dielectric airtight window is provided in an intermediate portion of the circular waveguide portion, and a cooling medium path is formed in a portion corresponding to the outer periphery of the dielectric airtight window. The part is divided into three parts, a part having a dielectric airtight window and a part in which the circular waveguide parts on both sides thereof are integrally coupled and a cooling medium path is formed on the outer periphery, and these three parts can be detached. This is an airtight window structure for microwave transmission that is airtightly connected.

【0008】[0008]

【作用】この発明によれば、組立てが容易で、且つ誘電
体気密窓および円形導波管部の全体的な効率良い冷却を
行うことが出来る。又、必要に応じ各部を分解して、再
利用することも可能である。
According to the present invention, the assembly is easy, and the dielectric airtight window and the circular waveguide can be efficiently cooled as a whole. Further, it is also possible to disassemble each part as required and reuse it.

【0009】[0009]

【実施例】以下、図面を参照して、この発明の一実施例
を詳細に説明する。この発明によるマイクロ波伝送用気
密窓構体は図1〜図3に示すように構成され、図1は全
体を示したもの、図2は図1の要部を拡大して示したも
の、図3は図2を分解して示したものであり、同一部分
は同一符号で示している。即ち、真空領域側の矩形導波
管部11、円形導波管部12及び矩形導波管部13の順
で構成され、円形導波管部12は管内波長λgと同等又
はそれ以上の軸方向長さLを有するいわゆるロングピル
ボックス型であり、L≧λgの関係にある。更に、この
円形導波管部12は、図3の分解図からも明らかなよう
に、予め、誘電体気密窓(後述)を有するA部と、その
両側の各矩形導波管部11,13が一体結合されたB部
およびC部との3者に分割され、これら3者が着脱可能
に気密接続されている。そして、各部はそれぞれ銅から
なる内側円筒14,15,16とステンレス鋼からなる
外側円筒17,18,19とからなっている。このよう
に内側円筒14,15,16は銅からなっているため高
周波損失が少なく、外側円筒17,18,19はステン
レス鋼からなっているため機械的強度を確保出来る。こ
れら内側円筒14,15,16と外側円筒17,18,
19との間が、それぞれ独立した冷却媒体路20,2
1,22となっている。つまり、円形導波管部12は、
各外周にはそれぞれ冷却媒体路20,21,22が形成
されていることになる。円形導波管部12の中間部分即
ちA部の中央にはセラミックスからなる誘電体気密窓2
3が設けられて、内側円筒14の薄肉部にろう付けによ
り気密接合されている。この誘電体気密窓23の片面又
は両面には、例えばTiNからなるマルチパクタ防止用
被膜24が蒸着により付着されている。そして、上記の
薄肉部の冷却媒体路20側には、モリブデン製のワイヤ
25が巻回されている。但し、このワイヤ25は図1に
は図示が省略されている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS An embodiment of the present invention will be described in detail below with reference to the drawings. The microwave transmission airtight window structure according to the present invention is constructed as shown in FIGS. 1 to 3, FIG. 1 shows the whole, FIG. 2 shows an enlarged main part of FIG. 1, and FIG. 2 is an exploded view of FIG. 2, and the same portions are denoted by the same reference numerals. That is, the rectangular waveguide portion 11, the circular waveguide portion 12, and the rectangular waveguide portion 13 on the vacuum region side are configured in this order, and the circular waveguide portion 12 has an axial direction equal to or greater than the guide wavelength λg. It is a so-called long pill box type having a length L, and has a relationship of L ≧ λg. Further, as is clear from the exploded view of FIG. 3, the circular waveguide portion 12 has a portion A having a dielectric airtight window (described later) in advance and the rectangular waveguide portions 11 and 13 on both sides thereof. Is divided into three parts, a B part and a C part, which are integrally connected, and these three parts are detachably airtightly connected. Each part is composed of an inner cylinder 14, 15, 16 made of copper and an outer cylinder 17, 18, 19 made of stainless steel. As described above, since the inner cylinders 14, 15, 16 are made of copper, high frequency loss is small, and the outer cylinders 17, 18, 19 are made of stainless steel, so that mechanical strength can be secured. These inner cylinders 14, 15, 16 and outer cylinders 17, 18,
19 and the independent cooling medium paths 20 and 2
It is 1, 22. That is, the circular waveguide 12 is
The cooling medium paths 20, 21, 22 are formed on the respective outer peripheries. A dielectric airtight window 2 made of ceramics is provided in the middle of the circular waveguide 12, that is, in the center of the portion A.
3 is provided and airtightly joined to the thin portion of the inner cylinder 14 by brazing. On one side or both sides of the dielectric airtight window 23, a multipactor preventing coating 24 made of, for example, TiN is attached by vapor deposition. A wire 25 made of molybdenum is wound around the cooling medium passage 20 side of the thin portion. However, the wire 25 is not shown in FIG.

【0010】更に、A,B,およびC部の各相互結合部
には、それぞれ薄肉金属からなる気密接合用フランジ2
6,27,28,29が突設され、溶接部D,Eでヘリ
ア−クにより気密接合されている。又、各相互結合部に
は、それぞれ厚肉の締結用フランジ30,31,32,
33が突設固定され、導電ガスケット(図示せず)を介
して複数個の締結ボルト34とナット35で機械的に締
付け固定されている。尚、各冷却媒体路20,21,2
2には、各々独立して冷却水を導入・排水できるよう
に、通水パイプ(図示せず)が接続されている。又、図
1中の符号36,37はいずれも導波管フランジであ
る。
Further, the airtight joining flange 2 made of thin metal is provided at each of the mutual connecting portions of the A, B, and C portions.
6, 27, 28, and 29 are provided in a protruding manner, and welded at D and E, which are hermetically joined by a heliarc. In addition, each of the mutual coupling portions has a thick fastening flange 30, 31, 32,
33 is projected and fixed, and mechanically tightened and fixed by a plurality of fastening bolts 34 and nuts 35 through a conductive gasket (not shown). In addition, each cooling medium path 20, 21, 2
A water pipe (not shown) is connected to each of 2 so that cooling water can be independently introduced and drained. Further, reference numerals 36 and 37 in FIG. 1 are both waveguide flanges.

【0011】組立てに当っては、図3に示すように予め
A,B,およびC部を各々単体で独立して組立てる。A
部は比較的短い寸法であるため、誘電体気密窓14の全
片面にマルチパクタ放電防止用被膜24を蒸着する場
合、A部のみが蒸着炉に入るので、容易に被膜形成が可
能である。従って、均一な膜厚のマルチパクタ放電防止
用被膜24を形成することが出来る。
In assembling, as shown in FIG. 3, parts A, B, and C are preliminarily assembled individually. A
Since the portion has a relatively short size, when depositing the multipactor discharge preventing coating 24 on the entire surface of the dielectric hermetic window 14, only the portion A enters the vapor deposition furnace, so that the coating can be easily formed. Therefore, the multipactor discharge preventing coating 24 having a uniform film thickness can be formed.

【0012】このようなロングピルボックス型のマイク
ロ波伝送用気密窓構体は、長大な寸法でありながら、マ
ルチパクタ放電防止用被膜24を形成や連結が比較的容
易であり、組立て性に優れている。又、A,B,および
C部がそれぞれ独立した冷却媒体路20,21,22を
有しているので、各部に最適な冷却のための通水が可能
であり、効率の良い冷却が出来る。そして、比較的高水
圧をかけることが可能であり、流量も大きく取ることが
容易になる。このことにより、高周波が伝播する面につ
いても特に熱伝達係数の大きな材質を選択する必要がな
くなり、材料の選択範囲が拡がる。又、A部,B部およ
びC部は分離・分割可能なため、それぞれは再利用可能
である。特に、誘電体気密窓14がろう接されるA部
は、出力窓構体単体として組合わせ試験した後に、分解
したうえで例えばクライストロンなどの大電力高周波源
の出力窓部品として再組立てして使用可能である。
Such a long pill box type airtight window structure for microwave transmission has a long size, but it is relatively easy to form and connect the multipactor discharge preventing coating 24 and is excellent in assembling. . Further, since the A, B, and C sections have independent cooling medium passages 20, 21, and 22, water can be passed to each section for optimal cooling, and efficient cooling can be performed. Further, it is possible to apply a relatively high water pressure, and it becomes easy to obtain a large flow rate. As a result, it is not necessary to select a material having a large heat transfer coefficient for the surface on which the high frequency is propagated, and the material selection range is expanded. Further, since the parts A, B, and C can be separated / divided, they can be reused. In particular, the portion A to which the dielectric airtight window 14 is brazed can be used by reassembling it as an output window component of a high power high frequency source such as a klystron after being combined and tested as a single output window structure. Is.

【0013】[0013]

【発明の効果】以上説明したようにこの発明によれば、
円形導波管部は誘電体気密窓を有する部分と、その両側
の各円形導波管部が一体結合され且つ外周に冷却媒体路
が形成されている部分の3者に分割され、これら3者が
着脱可能に気密接続されているので、組立てが容易で、
且つ誘電体気密窓および円形導波管部の全体的な効率良
い冷却を行うことが出来る。しかも、誘電体気密窓の面
への被膜形成も容易で且つ均一な膜厚に形成出来る。
又、必要に応じ各部を分解して、再利用することも可能
である。
As described above, according to the present invention,
The circular waveguide part is divided into three parts, a part having a dielectric airtight window and a part in which the circular waveguide parts on both sides thereof are integrally coupled and a cooling medium path is formed on the outer periphery. Is detachably airtightly connected, so assembly is easy and
In addition, the dielectric airtight window and the circular waveguide section can be efficiently cooled as a whole. Moreover, it is easy to form a film on the surface of the dielectric airtight window and a uniform film thickness can be formed.
Further, it is also possible to disassemble each part as required and reuse it.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明の一実施例に係るマイクロ波伝送用気
密窓構体を示す断面図。
FIG. 1 is a sectional view showing an airtight window structure for microwave transmission according to an embodiment of the present invention.

【図2】図1の要部を拡大して示す断面図。FIG. 2 is an enlarged cross-sectional view showing a main part of FIG.

【図3】図2を分解して示す断面図。FIG. 3 is a sectional view showing FIG. 2 in an exploded manner.

【図4】従来のマイクロ波伝送用気密窓構体を示す断面
図。
FIG. 4 is a cross-sectional view showing a conventional airtight window structure for microwave transmission.

【符号の説明】[Explanation of symbols]

11,13…矩形導波管部、12…円形導波管部、1
4,15,16…内側円筒、17,18,19…外側円
筒、20,21,22…冷却媒体路、23…誘電体気密
窓、24…マルチパクタ放電防止用被膜。
11, 13 ... Rectangular waveguide section, 12 ... Circular waveguide section, 1
4, 15, 16 ... Inner cylinder, 17, 18, 19 ... Outer cylinder, 20, 21, 22 ... Cooling medium passage, 23 ... Dielectric airtight window, 24 ... Multipactor discharge prevention coating.

───────────────────────────────────────────────────── フロントページの続き (72)発明者 伊藤 聡志 栃木県大田原市下石上1385番の1 株式会 社東芝那須電子管工場内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Satoshi Ito 1385-1 Shimoishigami, Otawara-shi, Tochigi Stock Company Toshiba Nasu Electronic Tube Factory

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 矩形導波管部、管内波長と同等又はそれ
以上の軸方向長さを有する円形導波管部および矩形導波
管部の順で構成され、且つ上記円形導波管部の中間部分
に誘電体気密窓が設けられると共に該誘電体気密窓の外
周に対応する部分に冷却媒体路が形成されてなるマイク
ロ波伝送用気密窓構体において、 上記円形導波管部は上記誘電体気密窓を有する部分と、
その両側の各矩形導波管部が一体結合され且つ外周に冷
却媒体路が形成されている部分の3者に分割され、これ
ら3者が着脱可能に気密接続されてなることを特徴とす
るマイクロ波伝送用気密窓構体。
1. A rectangular waveguide section, a circular waveguide section having an axial length equal to or longer than an in-tube wavelength, and a rectangular waveguide section are formed in this order, and the circular waveguide section has In a microwave transmitting airtight window structure in which a dielectric airtight window is provided in an intermediate portion and a cooling medium path is formed in a portion corresponding to the outer periphery of the dielectric airtight window, the circular waveguide portion is made of the dielectric material. A portion having an airtight window,
Each of the rectangular waveguide parts on both sides thereof is integrally connected and divided into three parts in which a cooling medium path is formed on the outer periphery, and these three parts are detachably airtightly connected. Airtight window structure for wave transmission.
JP11257694A 1994-05-26 1994-05-26 Structure of air-tight window for microwave transmission Pending JPH07321501A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11257694A JPH07321501A (en) 1994-05-26 1994-05-26 Structure of air-tight window for microwave transmission

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11257694A JPH07321501A (en) 1994-05-26 1994-05-26 Structure of air-tight window for microwave transmission

Publications (1)

Publication Number Publication Date
JPH07321501A true JPH07321501A (en) 1995-12-08

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Family Applications (1)

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JP11257694A Pending JPH07321501A (en) 1994-05-26 1994-05-26 Structure of air-tight window for microwave transmission

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JP (1) JPH07321501A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023095284A1 (en) 2021-11-26 2023-06-01 キヤノン電子管デバイス株式会社 Pillbox window and method for manufacturing pillbox window

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023095284A1 (en) 2021-11-26 2023-06-01 キヤノン電子管デバイス株式会社 Pillbox window and method for manufacturing pillbox window

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