JPH07198446A - Instrument for measuring liquid level in tank - Google Patents
Instrument for measuring liquid level in tankInfo
- Publication number
- JPH07198446A JPH07198446A JP5338030A JP33803093A JPH07198446A JP H07198446 A JPH07198446 A JP H07198446A JP 5338030 A JP5338030 A JP 5338030A JP 33803093 A JP33803093 A JP 33803093A JP H07198446 A JPH07198446 A JP H07198446A
- Authority
- JP
- Japan
- Prior art keywords
- liquid
- tank
- liquid level
- pipe
- flow path
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
- Control Of Non-Electrical Variables (AREA)
Abstract
Description
【０００１】[0001]
【産業上の利用分野】本発明はタンク内液体の液位計測
装置に関し、更に詳しくは、タンク内に貯留されている
液体の性状や、タンクを取り巻く環境の変化などによっ
ても影響を受けることなく、正確にタンク内液体の液位
を計測することができる装置に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid level measuring device for a liquid in a tank, and more specifically, it is not affected by the properties of the liquid stored in the tank or changes in the environment surrounding the tank. The present invention relates to an apparatus capable of accurately measuring the liquid level of a liquid in a tank.
【０００２】とくに、冷却塔，ボイラなどの薬注設備等
の情報を、通信回線を介して得るもので、その液位等を
監視する作業者がいない場合の液位計測装置として有効
に利用できるものである。In particular, information about a chemical injection facility such as a cooling tower or a boiler is obtained through a communication line, and can be effectively used as a liquid level measuring device when there is no operator who monitors the liquid level. It is a thing.
【０００３】[0003]
【従来の技術】タンク内に貯留されている流体の液位変
動を計測する方法としては、超音波式や圧力式をはじめ
として、各種の方法が実用化されている。それらの方法
のうち、例えば超音波を利用する方法は、測定値に対し
て温度補正することが必要であったり、また、発振部に
液体などが付着すると、超音波の送信効率や受信効率の
低下を招くという問題が生じている。そして、このよう
な問題への対策を施した場合には、構成された計測系は
高価なものになってしまう。2. Description of the Related Art As a method of measuring the liquid level fluctuation of a fluid stored in a tank, various methods such as an ultrasonic method and a pressure method have been put into practical use. Among these methods, for example, a method using ultrasonic waves requires temperature correction for measured values, and when liquid or the like adheres to the oscillating section, the ultrasonic wave transmission efficiency or ultrasonic wave reception efficiency is reduced. There is a problem of causing a decrease. If a measure against such a problem is taken, the configured measuring system becomes expensive.
【０００４】また、圧力を利用して計測する方法の場合
には、計測対象の液体の比重が相違すると測定値に誤差
が発生するため、計測する液体の種類や性状に応じて測
定値を補正することが必要になる。Further, in the case of the method of measuring using pressure, an error occurs in the measured value when the specific gravity of the liquid to be measured is different, so the measured value is corrected according to the type and properties of the liquid to be measured. Will be required.
【０００５】[0005]
【発明が解決しようとする課題】本発明は、従来の液位
計測方法における上記した問題を解決し、タンク内液体
の性状変化や環境変化が起こったときであっても、正確
にその液位を計測することができるタンク内液体の液位
計測装置の提供を目的とする。SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems in the conventional liquid level measuring method, and the liquid level in the tank can be accurately measured even when the property or environment of the liquid in the tank changes. It is an object of the present invention to provide a liquid level measuring device for a liquid in a tank capable of measuring the liquid level.
【０００６】[0006]
【課題を解決するための手段】上記した目的を達成する
ために、本発明においては、計測対象の液体を貯留する
タンクと、前記タンクの下部に接続されて前記液体を送
出するポンプと、前記ポンプに接続されて前記ポンプか
ら送出された前記液体の流路を切り替える流路切替手段
と、前記タンクの下部に接続されて前記液体の流れを阻
止または許容する電磁弁と、前記電磁弁に接続されて前
記電磁弁を開放したときの前記液体の流量を計測する流
量計と、一端は前記タンクの上部に接続され、他端は前
記流量計と前記流路切替手段とにそれぞれ独立して接続
されて、タンク内液体の液位表示ができる液位ゲージ
と、前記ポンプ，前記流路切替手段および前記電磁弁の
動作制御を行うとともに、前記流量計からの信号を演算
してタンク内液体の液位を算出する演算部とを備えてい
ることを特徴とするタンク内液体の液位計測装置が提供
される。In order to achieve the above object, in the present invention, a tank for storing a liquid to be measured, a pump connected to a lower portion of the tank for delivering the liquid, and A flow path switching unit that is connected to a pump and switches a flow path of the liquid sent from the pump, a solenoid valve that is connected to a lower portion of the tank to block or allow the flow of the liquid, and is connected to the solenoid valve. And a flow meter for measuring the flow rate of the liquid when the solenoid valve is opened, one end of which is connected to the upper portion of the tank, and the other end of which is independently connected to the flow meter and the flow path switching means. The liquid level gauge capable of displaying the liquid level of the liquid in the tank and the operation control of the pump, the flow path switching means and the electromagnetic valve are performed, and the signal from the flow meter is calculated to calculate the liquid in the tank. Tank liquid level measuring system for a liquid, wherein there is provided that an arithmetic unit for calculating the position.
【０００７】[0007]
【作用】まず、演算部からの指令に基づき、ポンプおよ
び流路切替手段を起動し、かつ電磁弁を閉にすることに
よって、タンク−ポンプ−流路切替手段−液位ゲージ−
タンクを結ぶ閉流路（以下、閉流路１という）が形成さ
れる。したがって、ポンプによって送出されたタンク内
の液体は、上記した閉流路１を循環する。すなわち、タ
ンク内の液体は、ポンプで送出され、流路切替手段を通
過して液位ゲージを上昇してその中を満たしたのち、タ
ンクの上部からタンク内に還流する。First, the pump and the flow passage switching means are started and the solenoid valve is closed based on the command from the arithmetic unit, so that the tank-pump-flow passage switching means-liquid level gauge-
A closed flow path (hereinafter referred to as closed flow path 1) that connects the tanks is formed. Therefore, the liquid in the tank delivered by the pump circulates in the closed flow path 1 described above. That is, the liquid in the tank is pumped out, passes through the flow path switching means, rises in the liquid level gauge to fill it, and then flows back from the upper part of the tank into the tank.
【０００８】ついで、演算部の指令に基づき、ポンプ動
作を停止し、かつ電磁弁を開にすることにより、タンク
−電磁弁−流量計−液位ゲージ−タンクを結ぶ閉流路
（以下閉流路２という）が形成される。この閉流路２が
形成された瞬間には、液位ゲージの中は閉流路１を循環
していた液体で充満していることになる。Then, based on a command from the arithmetic unit, the pump operation is stopped and the solenoid valve is opened to connect a tank-solenoid valve-flowmeter-liquid level gauge-tank (hereinafter referred to as a closed flow path). Road 2) is formed. At the moment when the closed flow path 2 is formed, the liquid level gauge is filled with the liquid circulating in the closed flow path 1.
【０００９】閉流路２が形成されると、液位ゲージ内の
流体は、流量計と電磁弁をこの順序で通過してタンク内
に流入し、最終的には、液位ゲージが表示する液位とタ
ンク内液体の液位とが等しくなった時点で、閉流路２内
の液体の移動は停止する。この過程でタンク内に流入し
た液体の流量は、流量計によって計測され、その情報は
流量計から出力されて演算部に入力される。When the closed flow path 2 is formed, the fluid in the liquid level gauge passes through the flow meter and the solenoid valve in this order to flow into the tank, and finally, the liquid level gauge indicates the value. When the liquid level and the liquid level of the liquid in the tank become equal, the movement of the liquid in the closed flow path 2 stops. The flow rate of the liquid flowing into the tank in this process is measured by the flow meter, and the information is output from the flow meter and input to the calculation unit.
【００１０】演算部においては、上記入力信号に基づ
き、次式： タンク内液体の液位＝閉流路２の形成時における液位ゲージの最高値 −流量計を通過した液体の総流量／液位ゲージの断面積 ………（１） に基づき、タンク内液体の液位が算出される。In the calculation unit, based on the above input signal, the following expression: liquid level of liquid in tank = maximum value of liquid level gauge when closed flow path 2 is formed−total flow rate of liquid that has passed through flow meter / liquid The liquid level of the liquid in the tank is calculated based on the cross-sectional area of the position gauge (1).
【００１１】（１）式から求められる値は、液体の流量
と液位ゲージの断面積で決定される値であり、液体性状
等には無関係の値である。したがって、本発明の計測装
置によれば、液体の性状とは無関係に、タンク内液体の
液位を正確に計測することができる。The value obtained from the equation (1) is a value determined by the flow rate of the liquid and the cross-sectional area of the liquid level gauge, and is a value irrelevant to the liquid property and the like. Therefore, according to the measuring device of the present invention, the liquid level of the liquid in the tank can be accurately measured regardless of the property of the liquid.
【００１２】[0012]
【実施例】以下に、図面に基づいて本発明の計測装置と
その作用を説明する。図１は、本発明の計測装置の１例
を示す基本構成図である。図１において、まず、計測対
象の液体１がある液位でタンク２の中に貯留されてい
る。タンク２には、パイプｐ1 を介してポンプ３が接続
され、更に、前記ポンプ３にはパイプｐ2 を介して流路
切替手段４が接続されている。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The measuring device of the present invention and its operation will be described below with reference to the drawings. FIG. 1 is a basic configuration diagram showing an example of a measuring device of the present invention. In FIG. 1, first, a liquid 1 to be measured is stored in a tank 2 at a certain liquid level. A pump 3 is connected to the tank 2 via a pipe p 1, and a flow path switching means 4 is connected to the pump 3 via a pipe p 2 .
【００１３】ポンプ３は演算部５の指令を受けて作動ま
たは停止することができ、作動時には、液体１をパイプ
ｐ2 を介して流路切替手段４に送出する。流路切替手段
４も演算部５の指令を受けて作動する。すなわち、演算
部５から発信される所定の指令（以下、指令１という）
を受けて作動するときは、流路切替手段４から後述する
液位ゲージ６の下部に接続されるパイプｐ3 とパイプｐ
2を結ぶ流路を形成し、また、他の指令（以下、指令２
という）を受けて作動するときは、薬注点７と接続する
パイプｐ4 とパイプｐ2 を結ぶ流路を形成してタンク２
内の液体１を薬注点７に供給する。The pump 3 can be activated or deactivated in response to a command from the calculation section 5, and when activated, delivers the liquid 1 to the flow path switching means 4 via the pipe p 2 . The flow path switching means 4 also operates upon receiving a command from the calculation section 5. That is, a predetermined command (hereinafter referred to as command 1) transmitted from the calculation unit 5
When receiving and operating, the pipe p 3 and the pipe p connected from the flow path switching means 4 to the lower part of the liquid level gauge 6 described later.
It forms a flow path that connects the two , and also other commands (hereinafter, command 2
When operating in response to the above, the tank 2 is formed by forming a flow path connecting the pipe p 4 and the pipe p 2 connected to the chemical injection point 7.
The liquid 1 therein is supplied to the chemical injection point 7.
【００１４】タンク２の下部にはパイプｐ5 を介して電
磁弁８が接続され、更に、パイプｐ 6 を介して流量計９
が前記電磁弁８に接続され、その流量計９は、パイプｐ
7 を介して後述する液位ゲージ６の下部と接続されてい
る。電磁弁８は、演算部５が発信する指令を受けて開閉
動作を行う。すなわち、演算部５から発信される所定の
指令を受けて開弁し、その結果、タンク２と液位ゲージ
６との間は、パイプｐ5 −電磁弁８−パイプｐ6 −流量
計９−パイプｐ7 を介して連通し、そこに液体１の流路
が形成される。また、別の指令を受けて閉弁し、上記し
た流路を閉じて液体１の流れを阻止する。At the bottom of the tank 2, a pipe pFiveThrough electricity
The magnetic valve 8 is connected, and the pipe p 6Through the flowmeter 9
Is connected to the solenoid valve 8, and the flow meter 9 is connected to the pipe p.
7Is connected to the lower part of the liquid level gauge 6 described later via
It The solenoid valve 8 opens and closes in response to a command transmitted by the calculation unit 5.
Take action. That is, the predetermined amount transmitted from the calculation unit 5
Upon receiving a command, the valve was opened, and as a result, the tank 2 and liquid level gauge
Between 6 and pipe pFive-Solenoid valve 8-Pipe p6-Flow rate
Total 9-pipe p7Through which there is a flow path for liquid 1.
Is formed. Also, in response to another command, the valve is closed and
The flow path is closed to block the flow of the liquid 1.
【００１５】流量計９は、電磁弁８が開弁したときに形
成される上記流路内を流れる液体１の流量を計測し、そ
の計測値を電気信号に変えて演算部５に入力する。タン
ク２の上部には、パイプｐ8 を介して液位ゲージ６が接
続されている。そして、この液位ゲージ６の下端は、前
記したパイプｐ3 を介して流路切替手段４に接続され、
かつ、パイプｐ7 を介して流路切替手段４に接続されて
いる。The flow meter 9 measures the flow rate of the liquid 1 flowing in the flow path formed when the electromagnetic valve 8 is opened, converts the measured value into an electric signal, and inputs it to the arithmetic unit 5. A liquid level gauge 6 is connected to the upper portion of the tank 2 via a pipe p 8 . The lower end of the liquid level gauge 6 is connected to the flow path switching means 4 via the pipe p 3 described above,
Further, it is connected to the flow path switching means 4 via the pipe p 7 .
【００１６】次に作用を説明する。電磁弁８を閉，ポン
プ３を作動させ、流路切替手段４を作動させることによ
り、タンク１→パイプｐ1 →ポンプ３→パイプｐ2 →流
路切替手段４→パイプｐ4の流路を形成して、タンク２
内の液体１を薬注点７に供給する。そして、薬注点７へ
の液体供給を進めたのち、タンク２内の液体１の液位を
計測する必要が生じた場合には、まず、電磁弁８を閉の
まま、かつポンプ３を起動させ続けたまま、流路切替手
段４に対しては指令１に相当する信号が演算部５から発
信される。その結果、タンク２から薬注点７を結ぶ流路
は閉となり、代わりに、装置内には前記した閉流路１が
形成される。Next, the operation will be described. The electromagnetic valve 8 is closed, the pump 3 is operated, and the flow path switching means 4 is operated to change the flow path of the tank 1 → the pipe p 1 → the pump 3 → the pipe p 2 → the flow path switching means 4 → the pipe p 4. Form, tank 2
The liquid 1 therein is supplied to the chemical injection point 7. When it is necessary to measure the liquid level of the liquid 1 in the tank 2 after advancing the liquid supply to the chemical injection point 7, first, the solenoid valve 8 is kept closed and the pump 3 is started. The signal corresponding to the command 1 is transmitted to the flow path switching unit 4 from the arithmetic unit 5 while continuing to keep the operation. As a result, the flow path connecting the tank 2 to the chemical injection point 7 is closed, and instead, the above-mentioned closed flow path 1 is formed in the apparatus.
【００１７】したがって、タンク１内の流体は、図１の
矢印ｑ1 で示したように、タンク１→パイプｐ1 →ポン
プ３→パイプｐ2 →流路切替手段４→パイプｐ3 →液位
ゲージ６→パイプｐ8 を流れて、タンク２の上部からタ
ンク内に流入する。ついで、ポンプ３を停止させ、電磁
弁８を開弁する信号が演算部５から発信される。その結
果、前記閉流路１は閉じ、装置内には前記した閉流路２
が形成される。Therefore, the fluid in the tank 1 is, as shown by the arrow q 1 in FIG. 1, the tank 1 → the pipe p 1 → the pump 3 → the pipe p 2 → the flow path switching means 4 → the pipe p 3 → the liquid level. It flows from the gauge 6 to the pipe p 8 and flows into the tank from the upper part of the tank 2. Then, a signal for stopping the pump 3 and opening the solenoid valve 8 is transmitted from the arithmetic unit 5. As a result, the closed flow path 1 is closed, and the closed flow path 2 described above is provided in the apparatus.
Is formed.
【００１８】閉流路２が形成されたとき、それまでの閉
流路１を流れていた液体１の液位ゲージ６内における液
位の最高点は、液位ゲージ６の上端６ａに位置する。閉
流路２が形成されると、液位ゲージ６内に充満していた
液体１は、図の矢印ｑ2 で示したように、液位ゲージ６
内を流下し、液位ゲージ６→パイプｐ7 →流量計９→パ
イプｐ6 →電磁弁８→パイプｐ5 を流れてタンク２の下
部からタンク内に流入する。この液体の移動が進み、タ
ンク内の液体１の液位と液位ゲージ６内の液体１の液体
とが一致した時点で、図の矢印ｑ2 で示した液体の流れ
は停止する。When the closed flow path 2 is formed, the highest point of the liquid level in the liquid level gauge 6 that has been flowing through the closed flow path 1 is located at the upper end 6 a of the liquid level gauge 6. . When the closed flow path 2 is formed, the liquid 1 filled in the liquid level gauge 6 is filled with the liquid level gauge 6 as shown by an arrow q 2 in the figure.
Flowing down, the liquid level gauge 6 → pipe p 7 → flowmeter 9 → pipe p 6 → solenoid valve 8 → pipe p 5 flows into the tank from the lower part of the tank 2. When the movement of the liquid progresses and the liquid level of the liquid 1 in the tank and the liquid of the liquid 1 in the liquid level gauge 6 coincide with each other, the flow of the liquid shown by the arrow q 2 in the figure stops.
【００１９】そして、液位ゲージ６の上端６ａから上記
した停止位置までの液体流量は、流量計９で計測され
る。その信号は演算部５に入力され、そこで、前記した
演算式（１）に基づいて、タンク内流体の液位が算出さ
れる。なお、例えばタイマ装置などを用いることによ
り、薬注点７への液体供給時を除いて、演算部５から、
ポンプ３，流路切替手段４への起動・停止信号や電磁弁
の開閉信号を定期的に発信すれば、上記したタンク内液
体の液位を定期的に計測することができる。The liquid flow rate from the upper end 6a of the liquid level gauge 6 to the above-mentioned stop position is measured by the flow meter 9. The signal is input to the calculation unit 5, where the liquid level of the fluid in the tank is calculated based on the calculation formula (1) described above. It should be noted that, for example, by using a timer device, etc., except when the liquid is supplied to the chemical injection point 7,
If the start / stop signal to the pump 3 and the flow path switching means 4 and the opening / closing signal of the electromagnetic valve are periodically transmitted, the liquid level of the liquid in the tank described above can be regularly measured.
【００２０】液位計測が終了した時点で、再び電磁弁を
閉にし、ポンプ３を起動させ、流路切替手段４を作動し
て、タンク２と薬注点７を結ぶ流路を形成し、薬注点７
への液体供給を再開することができる。When the liquid level measurement is completed, the solenoid valve is closed again, the pump 3 is started, the flow path switching means 4 is operated, and a flow path connecting the tank 2 and the chemical injection point 7 is formed, Drug injection point 7
The liquid supply to the can be restarted.
【００２１】[0021]
【発明の効果】以上の説明で明らかなように、本発明の
計測装置によれば、閉流路２を形成したとき、流量計が
計測する液体の流量と液位ゲージの断面積とからのみタ
ンク内液体の液位を計測することができる。したがっ
て、計測対象の液体の温度や比重などの性状とは無関係
にタンク内における液位を把握することができる。更
に、タンク内液位の監視者がいないような、通信により
情報を得る設備等においてその工業的価値は大である。As is apparent from the above description, according to the measuring device of the present invention, when the closed flow path 2 is formed, only from the flow rate of the liquid measured by the flow meter and the cross-sectional area of the liquid level gauge. It is possible to measure the liquid level of the liquid in the tank. Therefore, the liquid level in the tank can be grasped regardless of the properties such as the temperature and the specific gravity of the liquid to be measured. Further, the industrial value thereof is great in equipment and the like for obtaining information by communication, where there is no person who monitors the liquid level in the tank.
【図１】本発明装置の基本構成を示す概略図である。FIG. 1 is a schematic diagram showing a basic configuration of a device of the present invention.
１ 計測対象の液体 ２ タンク ３ ポンプ ４ 流路切替手段 ５ 演算部 ６ 液位ゲージ ６ａ 液位ゲージの上端 ７ 薬注点 ８ 電磁弁 ９ 流量計 ｐ1 ，ｐ2 ，ｐ3 ，ｐ4 ，ｐ5 ，ｐ6 ，ｐ7 ，ｐ8 パ
イプ ｑ1 ，ｑ2 液体の流れ1 liquid to be measured 2 tank 3 pump 4 flow path switching means 5 arithmetic unit 6 liquid level gauge 6a upper end of liquid level gauge 7 chemical injection point 8 solenoid valve 9 flowmeter p 1 , p 2 , p 3 , p 4 , p 5 , p 6 , p 7 , p 8 pipe q 1 , q 2 Liquid flow
Claims (1)
記タンクの下部に接続されて前記液体を送出するポンプ
と、前記ポンプに接続されて前記ポンプから送出された
前記液体の流路を切り替える流路切替手段と、前記タン
クの下部に接続されて前記液体の流れを阻止または許容
する電磁弁と、前記電磁弁に接続されて前記電磁弁を開
放したときの前記液体の流量を計測する流量計と、一端
は前記タンクの上部に接続され、他端は前記流量計と前
記流路切替手段とにそれぞれ独立して接続されて、タン
ク内液体の液位表示が可能な液位ゲージと、前記ポン
プ，前記流路切替手段および前記電磁弁の動作制御を行
うとともに、前記流量計からの信号を演算してタンク内
液体の液位を算出する演算部とを備えていることを特徴
とするタンク内液体の液位計測装置。1. A tank that stores a liquid to be measured, a pump that is connected to a lower portion of the tank to discharge the liquid, and a flow path of the liquid that is connected to the pump and that is discharged from the pump are switched. Flow path switching means, a solenoid valve connected to the lower part of the tank to block or allow the flow of the liquid, and a flow rate that is connected to the solenoid valve and measures the flow rate of the liquid when the solenoid valve is opened. A meter, one end of which is connected to the upper part of the tank and the other end of which is independently connected to the flow meter and the flow path switching means, and a liquid level gauge capable of displaying the liquid level of the liquid in the tank, It is characterized by further comprising: a calculation unit that controls the operation of the pump, the flow path switching unit, and the electromagnetic valve, and that calculates a signal from the flow meter to calculate the liquid level of the liquid in the tank. Of the liquid in the tank Liquid level measuring device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338030A JPH07198446A (en) | 1993-12-28 | 1993-12-28 | Instrument for measuring liquid level in tank |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5338030A JPH07198446A (en) | 1993-12-28 | 1993-12-28 | Instrument for measuring liquid level in tank |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH07198446A true JPH07198446A (en) | 1995-08-01 |
Family
ID=18314276
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5338030A Pending JPH07198446A (en) | 1993-12-28 | 1993-12-28 | Instrument for measuring liquid level in tank |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07198446A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009047974A1 (en) * | 2007-10-11 | 2009-04-16 | Tokyo Electron Limited | Processing-liquid supply mechanism and processing-liquid supply method |
| JP2010144672A (en) * | 2008-12-22 | 2010-07-01 | Ud Trucks Corp | Exhaust emission control device and water level measuring device |
| CN109812708A (en) * | 2019-03-26 | 2019-05-28 | 浙江海盐力源环保科技股份有限公司 | A kind of valuable or toxic or strongly corrosion liquid full-automatic collection and conveying device |
-
1993
- 1993-12-28 JP JP5338030A patent/JPH07198446A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009047974A1 (en) * | 2007-10-11 | 2009-04-16 | Tokyo Electron Limited | Processing-liquid supply mechanism and processing-liquid supply method |
| US8286482B2 (en) | 2007-10-11 | 2012-10-16 | Tokyo Electron Limited | Process-liquid supply mechanism and process-liquid supply method |
| JP5090460B2 (en) * | 2007-10-11 | 2012-12-05 | 東京エレクトロン株式会社 | Treatment liquid supply mechanism and treatment liquid supply method |
| JP2010144672A (en) * | 2008-12-22 | 2010-07-01 | Ud Trucks Corp | Exhaust emission control device and water level measuring device |
| WO2010073791A1 (en) * | 2008-12-22 | 2010-07-01 | 日産ディーゼル工業株式会社 | Exhaust purifying device and liquid level measuring device |
| US8893477B2 (en) | 2008-12-22 | 2014-11-25 | Volvo Powertrain Aktiebolag | Exhaust emission purifying apparatus and liquid level measuring device |
| CN109812708A (en) * | 2019-03-26 | 2019-05-28 | 浙江海盐力源环保科技股份有限公司 | A kind of valuable or toxic or strongly corrosion liquid full-automatic collection and conveying device |
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