JPH06349319A - Conductive paste - Google Patents
Conductive pasteInfo
- Publication number
- JPH06349319A JPH06349319A JP13582493A JP13582493A JPH06349319A JP H06349319 A JPH06349319 A JP H06349319A JP 13582493 A JP13582493 A JP 13582493A JP 13582493 A JP13582493 A JP 13582493A JP H06349319 A JPH06349319 A JP H06349319A
- Authority
- JP
- Japan
- Prior art keywords
- powder
- silver
- conductive paste
- covered
- ceramics powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims abstract description 42
- 239000000843 powder Substances 0.000 claims abstract description 31
- 239000000919 ceramic Substances 0.000 claims abstract description 19
- 229910052709 silver Inorganic materials 0.000 claims abstract description 13
- 239000004332 silver Substances 0.000 claims abstract description 13
- 238000000034 method Methods 0.000 abstract description 9
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 8
- 238000000227 grinding Methods 0.000 abstract description 3
- 239000002245 particle Substances 0.000 abstract description 3
- 230000005684 electric field Effects 0.000 abstract description 2
- 230000002349 favourable effect Effects 0.000 abstract 4
- 238000009413 insulation Methods 0.000 description 9
- 239000004020 conductor Substances 0.000 description 7
- 239000011812 mixed powder Substances 0.000 description 6
- 239000011342 resin composition Substances 0.000 description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 description 4
- DZCLVBQEPZQZNN-UHFFFAOYSA-N copper;phenol Chemical compound [Cu].OC1=CC=CC=C1 DZCLVBQEPZQZNN-UHFFFAOYSA-N 0.000 description 4
- 230000035939 shock Effects 0.000 description 4
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000013508 migration Methods 0.000 description 3
- 230000005012 migration Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000004593 Epoxy Substances 0.000 description 2
- IOJUPLGTWVMSFF-UHFFFAOYSA-N benzothiazole Chemical compound C1=CC=C2SC=NC2=C1 IOJUPLGTWVMSFF-UHFFFAOYSA-N 0.000 description 2
- 239000003153 chemical reaction reagent Substances 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- XXJWXESWEXIICW-UHFFFAOYSA-N diethylene glycol monoethyl ether Chemical compound CCOCCOCCO XXJWXESWEXIICW-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 239000003112 inhibitor Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- HYZJCKYKOHLVJF-UHFFFAOYSA-N 1H-benzimidazole Chemical compound C1=CC=C2NC=NC2=C1 HYZJCKYKOHLVJF-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 1
- ULKLGIFJWFIQFF-UHFFFAOYSA-N 5K8XI641G3 Chemical compound CCC1=NC=C(C)N1 ULKLGIFJWFIQFF-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000011889 copper foil Substances 0.000 description 1
- 229910002804 graphite Inorganic materials 0.000 description 1
- 239000010439 graphite Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 239000004850 liquid epoxy resins (LERs) Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910017464 nitrogen compound Inorganic materials 0.000 description 1
- 150000002830 nitrogen compounds Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005011 phenolic resin Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 229920006337 unsaturated polyester resin Polymers 0.000 description 1
Landscapes
- Conductive Materials (AREA)
- Parts Printed On Printed Circuit Boards (AREA)
- Paints Or Removers (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は電気回路形成用の導電ペ
ーストに関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a conductive paste for forming an electric circuit.
【0002】[0002]
【従来の技術】従来、プリント配線板、電子部品等の配
線導体を形成する方法として、導電性に優れた銀粉を含
有するペーストを塗布又は印刷して形成する方法が一般
的に知られている。2. Description of the Related Art Conventionally, as a method for forming a wiring conductor of a printed wiring board, an electronic component or the like, a method of applying or printing a paste containing silver powder having excellent conductivity is generally known. .
【0003】[0003]
【発明が解決しようとする課題】銀粉を用いた導電ペー
ストは導電性が良好なことから印刷配線板、電子部品等
の配線導体や電極として使用されているが、これらは高
温多湿の雰囲気下で電界が印加されると、配線導体や電
極にマイグレーションと称する銀の電析が生じ電極間又
は配線間が短絡するという欠点が生じる。このマイグレ
ーションを防止するための方策はいくつか行われてお
り、導体の表面に防湿塗料を塗布するか又は導電ペース
トに窒素化合物などの腐食抑制剤を添加するなどの方策
が検討されているが十分な効果が得られるものではなか
った。Since a conductive paste using silver powder has good conductivity, it is used as a wiring conductor or an electrode for printed wiring boards, electronic parts, etc., but these are used under a high temperature and high humidity atmosphere. When an electric field is applied, there is a drawback that a wiring conductor or an electrode is electro-deposited with silver called migration and a short circuit occurs between electrodes or between wirings. Several measures have been taken to prevent this migration, and measures such as applying a moisture-proof coating to the surface of the conductor or adding a corrosion inhibitor such as a nitrogen compound to the conductive paste have been studied, but it is sufficient. It was not possible to obtain such an effect.
【0004】また、導通抵抗の良好な導体を得るには銀
粉の配合量を多くしなければならず、銀粉が高価である
ことから導電ペーストも高価になるという欠点があっ
た。Further, in order to obtain a conductor having good conduction resistance, it is necessary to increase the amount of silver powder blended, and the silver paste is expensive, so that the conductive paste is also expensive.
【0005】本発明はかかる欠点のない導電ペーストを
提供するものである。The present invention provides a conductive paste that does not have such drawbacks.
【0006】[0006]
【課題を解決するための手段】本発明は銀粉及び表面の
一部又は全面が銀で覆われたセラミックス粉を含む導電
ペーストに関する。The present invention relates to a conductive paste containing silver powder and a ceramic powder whose surface is partially or entirely covered with silver.
【0007】本発明における銀粉はその形状を限定する
ものではないが、アスペクト比が大略3以上あるフレー
ク状銀粉を用いることが好ましく、10以上であるフレ
ーク状銀粉を用いればさらに好ましい。また、その粒径
は長径が20μm以下が好ましく、10μm以下であれ
ば印刷性を低下させないのでさらに好ましい。The shape of the silver powder in the present invention is not limited, but flake silver powder having an aspect ratio of about 3 or more is preferably used, and flake silver powder having an aspect ratio of 10 or more is more preferably used. The major axis of the particle diameter is preferably 20 μm or less, and more preferably 10 μm or less because printability is not deteriorated.
【0008】セラミックス粉はその形状を限定するもの
ではないが不定形のものが適しており、その粒径は長径
が10μm以下が好ましく、5μm以下であればさらに
好ましい。また、セラミックス粉の種類については特に
制限はないがアルミナ粉を用いることが好ましい。さら
にセラミックス粉は全表面が銀で覆われていることが望
ましいが、大略表面の1/2以上が覆われていれば何ら
問題はない。銀の被覆方法については特に制限はない
が、例えば銀粉とセラミックス粉を粉砕用ボールと共に
ボールミルに投入し、これを回転させて凝集した粉末を
分散させながらセラミックス粉の表面を銀粉で被覆する
方法が大量に処理できるので好ましい。The shape of the ceramic powder is not limited, but an irregular shape is suitable. The major axis of the ceramic powder is preferably 10 μm or less, more preferably 5 μm or less. The type of ceramic powder is not particularly limited, but alumina powder is preferably used. Further, it is desirable that the entire surface of the ceramic powder is covered with silver, but if about 1/2 or more of the surface is covered, there will be no problem. The method of coating silver is not particularly limited, but for example, a method of charging silver powder and ceramics powder together with a ball for grinding into a ball mill, and rotating this to disperse the agglomerated powders and coating the surface of the ceramics powder with silver powder is a method. It is preferable because a large amount can be processed.
【0009】銀粉とセラミックス粉の比率は導体の抵抗
とマイグレーションの防止の点から体積比で5:1〜
1:5(銀粉:セラミックス粉)であることが好まし
い。The volume ratio of the silver powder to the ceramic powder is 5: 1 from the viewpoint of resistance of the conductor and prevention of migration.
It is preferably 1: 5 (silver powder: ceramic powder).
【0010】導電ペーストは上記の材料以外に液状のエ
ポキシ樹脂、フェノール樹脂、不飽和ポリエステル樹脂
等の有機質の接着剤成分及び必要に応じてテルビネオー
ル、エチルカルビトール、カルビトールアセテート等の
溶媒、微小黒鉛粉末、ベンゾチアゾール、ベンズイミダ
ゾール等の腐食抑制剤などを含有する。銀粉及びセラミ
ックス粉の含有量は導電ペーストの固形分に対して導体
の抵抗と経済性から20〜60重量%であることが好ま
しく、30〜60重量%であることがさらに好ましい。In addition to the above materials, the conductive paste is an organic adhesive component such as liquid epoxy resin, phenol resin, unsaturated polyester resin and the like, if necessary, a solvent such as terbineol, ethyl carbitol, carbitol acetate, and fine graphite. It contains powders, corrosion inhibitors such as benzothiazole and benzimidazole. The content of the silver powder and the ceramic powder is preferably 20 to 60% by weight, more preferably 30 to 60% by weight, from the viewpoint of the resistance and economy of the conductor with respect to the solid content of the conductive paste.
【0011】[0011]
【実施例】以下本発明の実施例を説明する。 実施例1 ビスフェノールA型エポキシ樹脂(油化シェルエポキシ
製、商品名エピコート834)60重量部及びビスフェ
ノールA型エポキシ樹脂(油化シェルエポキシ製、商品
名エピコート828)40重量部を予め加温溶解させ、
次いで室温に冷却した後2エチル4メチルイミダゾール
(四国化成製)5重量部、エチルカルビトール(和光純
薬製、試薬)20重量部及びブチルセロソルブ(和光純
薬製、試薬)20重量部を加えて均一に混合して樹脂組
成物とした。EXAMPLES Examples of the present invention will be described below. Example 1 60 parts by weight of bisphenol A type epoxy resin (Oilized shell epoxy, trade name Epicoat 834) and 40 parts by weight of bisphenol A type epoxy resin (Oilized shell epoxy, trade name Epicoat 828) were dissolved by heating in advance. ,
Then, after cooling to room temperature, 5 parts by weight of 2 ethyl 4-methyl imidazole (manufactured by Shikoku Kasei), 20 parts by weight of ethyl carbitol (manufactured by Wako Pure Chemicals, reagent) and 20 parts by weight of butyl cellosolve (manufactured by Wako Pure Chemicals, reagent) were added. The resin composition was mixed uniformly.
【0012】一方、フレーク状銀粉(徳力化学研究所
製、商品名TCG−1)110g及び平均粒径が0.4
μmのアルミナ粉(住友化学製、商品名AES−12)
35gを粉砕用ボールと共にボールミルに投入し、10
0時間回転させて均一に分散させた銀粉及び表面を銀粉
で被覆したアルミナ粉の混合粉末を作製した。銀粉の被
覆割合を光学顕微鏡で観察したところ被覆割合は約70
%であった。この後上記で得た樹脂組成物145gに上
記の混合粉末145gを加えて撹拌らいかい機及び3本
ロールで均一に分散して導電ペーストを得た。On the other hand, 110 g of flake silver powder (trade name TCG-1 manufactured by Tokuriki Kagaku Kenkyusho) and an average particle size of 0.4.
μm alumina powder (Sumitomo Chemical, trade name AES-12)
35 g was put into a ball mill together with a ball for grinding, and 10
A mixed powder of silver powder which was rotated for 0 hours and uniformly dispersed and alumina powder whose surface was coated with silver powder was prepared. When the coverage of silver powder was observed with an optical microscope, the coverage was about 70.
%Met. Then, 145 g of the above-mentioned mixed powder was added to 145 g of the resin composition obtained above and uniformly dispersed by a stirrer and a triple roll to obtain a conductive paste.
【0013】次に上記で得た導電ペーストで厚さが1.
6mmで直径が0.8mm(φ)のスルーホールを形成
した紙フェノール銅張積層板(日立化成工業製、商品名
MCL−437F)に図1に示すテストパターンを印刷
すると共にこれをスルーホール1に充てんしたものを大
気中で60℃30分さらに160℃30分の条件で加熱
処理して配線板を得た。なお図1において2は紙フェノ
ール銅張積層板である。次に得られた配線板の抵抗を測
定した。その結果銅箔の抵抗を除いたスルーホール1の
抵抗は23mΩ/穴であり、隣り合うスルーホール間の
絶縁抵抗は108Ω以上であった。該配線板の冷熱衝撃
試験を実施した結果、スルーホール1の抵抗は30mΩ
/穴であった。また該配線板の湿中負荷試験を実施した
結果、スルーホール間の絶縁抵抗は108Ω以上であっ
た。なお、冷熱試験条件は125℃30分〜−65℃3
0分を100サイクル行い、湿中負荷試験は40℃90
%RH中、隣あうライン間に50Vの電圧を印加して1
000時間保持した。Next, the conductive paste obtained above has a thickness of 1.
The test pattern shown in FIG. 1 is printed on a paper phenol copper clad laminate (Hitachi Chemical Co., Ltd., trade name MCL-437F) in which a through hole having a diameter of 6 mm and a diameter of 0.8 mm (φ) is formed. The wiring board was obtained by heat-treating the material filled in the above in the atmosphere under the conditions of 60 ° C. for 30 minutes and 160 ° C. for 30 minutes. In FIG. 1, 2 is a paper phenol copper clad laminate. Next, the resistance of the obtained wiring board was measured. As a result, the resistance of the through hole 1 excluding the resistance of the copper foil was 23 mΩ / hole, and the insulation resistance between adjacent through holes was 10 8 Ω or more. As a result of the thermal shock test of the wiring board, the resistance of the through hole 1 is 30 mΩ.
/ It was a hole. Moreover, as a result of performing a wet and medium load test on the wiring board, the insulation resistance between the through holes was 10 8 Ω or more. The cold heat test conditions are 125 ° C. 30 minutes to −65 ° C. 3
100 cycles of 0 minutes, 90 ° C for humidity and medium load test
Apply a voltage of 50V between adjacent lines during% RH to set 1
Hold for 000 hours.
【0014】実施例2 実施例1で用いたフレーク状銀粉を200g及びアルミ
ナ粉を40g配合した以外は実施例1と同様の工程を経
て銀粉及び表面を銀粉で被覆したアルミナ粉の混合粉末
を作製し、次いで実施例1で得た樹脂組成物145gに
上記の混合粉末を240g加えて実施例1と同様の方法
で均一に混合分散して導電ペーストを得た。以下実施例
1と同様の工程を経て配線板を作製してその特性を評価
した。その結果、スルーホールの抵抗は22mΩ/穴で
あり、スルーホール間の絶縁抵抗は108Ω以上であっ
た。また該配線板の冷熱衝撃試験を実施した結果、スル
ーホールの抵抗は28mΩ/穴であり、湿中負荷試験の
結果では、スルーホール間の絶縁抵抗は108Ω以上で
あった。Example 2 A mixed powder of silver powder and alumina powder whose surface was coated with silver powder was produced through the same steps as in Example 1 except that 200 g of the flake silver powder used in Example 1 and 40 g of alumina powder were blended. Then, 240 g of the above mixed powder was added to 145 g of the resin composition obtained in Example 1, and the mixture was uniformly mixed and dispersed in the same manner as in Example 1 to obtain a conductive paste. A wiring board was manufactured through the same steps as in Example 1 and the characteristics thereof were evaluated. As a result, the resistance of the through holes was 22 mΩ / hole, and the insulation resistance between the through holes was 10 8 Ω or more. As a result of the thermal shock test of the wiring board, the resistance of the through holes was 28 mΩ / hole, and the result of the wet and medium load test showed that the insulation resistance between the through holes was 10 8 Ω or more.
【0015】実施例3 実施例1で用いたフレーク状銀粉を800g及びアルミ
ナ粉を70g配合した以外は実施例1と同様の工程を経
て銀粉及び表面を銀粉で被覆したアルミナ粉の混合粉末
を作製し、次いで実施例1で得た樹脂組成物145gに
上記の混合粉末を870g加えて実施例1と同様の方法
で均一に混合分散して導電ペーストを得た。以下実施例
1と同様の工程を経て配線板を作製してその特性を評価
した。その結果、スルーホールの抵抗は19mΩ/穴で
あり、スルーホール間の絶縁抵抗は108Ω以上であっ
た。また該配線板の冷熱衝撃試験を実施した結果、スル
ーホールの抵抗は26mΩ/穴であり、湿中負荷試験の
結果では、スルーホール間の絶縁抵抗は108Ω以上で
あった。Example 3 A mixed powder of silver powder and alumina powder whose surface was coated with silver powder was produced through the same steps as in Example 1 except that 800 g of the flake silver powder used in Example 1 and 70 g of alumina powder were blended. Then, 870 g of the above-mentioned mixed powder was added to 145 g of the resin composition obtained in Example 1 and uniformly mixed and dispersed in the same manner as in Example 1 to obtain a conductive paste. A wiring board was manufactured through the same steps as in Example 1 and the characteristics thereof were evaluated. As a result, the resistance of the through holes was 19 mΩ / hole, and the insulation resistance between the through holes was 10 8 Ω or more. As a result of a thermal shock test of the wiring board, the resistance of the through holes was 26 mΩ / hole, and the result of the wet and medium load test showed that the insulation resistance between the through holes was 10 8 Ω or more.
【0016】比較例1 実施例1で得た樹脂組成物145gに実施例1で用いた
フレーク状銀粉を1000g加えて実施例1と同様の方
法で均一に混合分散して導電ペーストを得た。以下実施
例1と同様の工程を経て配線板を作製してその特性を評
価した。その結果、スルーホールの抵抗は22mΩ/穴
であり、スルーホール間の絶縁抵抗は108Ω以上であ
った。また該配線板の冷熱衝撃試験を実施した結果、ス
ルーホールの抵抗は28mΩ/穴であり、湿中負荷試験
の結果では、スルーホール間の絶縁抵抗は配線板5枚の
うち1枚107Ω台に低下しているものがあった。Comparative Example 1 To 145 g of the resin composition obtained in Example 1, 1000 g of the flake silver powder used in Example 1 was added and uniformly mixed and dispersed in the same manner as in Example 1 to obtain a conductive paste. A wiring board was manufactured through the same steps as in Example 1 and the characteristics thereof were evaluated. As a result, the resistance of the through holes was 22 mΩ / hole, and the insulation resistance between the through holes was 10 8 Ω or more. As a result of a thermal shock test of the wiring board, the resistance of the through hole was 28 mΩ / hole, and the result of the wet and medium load test showed that the insulation resistance between the through holes was 10 7 Ω per one of the five wiring boards. There was something that was falling on the table.
【0017】[0017]
【発明の効果】本発明になる導電ペーストは配線板にお
けるスルーホールの抵抗が低い高導電性のペーストであ
り、また湿中負荷試験後におけるスルーホール間の絶縁
抵抗の低下が小さく、さらに銀粉と表面の一部又は全面
が銀で覆われたセラミックス粉を併用することにより銀
の使用量を少なくできるなど経済的にも優れた導電ペー
ストである。EFFECT OF THE INVENTION The conductive paste of the present invention is a highly conductive paste having a low resistance of through holes in a wiring board, has a small decrease in insulation resistance between through holes after a humidity and medium load test, and has a silver powder content. The conductive paste is economically excellent in that the amount of silver used can be reduced by using a ceramic powder whose surface is partially or entirely covered with silver.
【図1】紙フェノール銅張積層板に導電ペーストを印刷
すると共にスルーホールに充てんした状態を示す平面図
である。FIG. 1 is a plan view showing a state in which a conductive paste is printed on a paper phenol copper clad laminate and the through holes are filled.
1 スルーホール 2 紙フェノール銅張積層板 1 Through hole 2 Paper phenol copper clad laminate
Claims (1)
れたセラミックス粉を含む導電ペースト。1. A conductive paste containing silver powder and a ceramic powder whose surface is partially or entirely covered with silver.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13582493A JPH06349319A (en) | 1993-06-07 | 1993-06-07 | Conductive paste |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13582493A JPH06349319A (en) | 1993-06-07 | 1993-06-07 | Conductive paste |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH06349319A true JPH06349319A (en) | 1994-12-22 |
Family
ID=15160656
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13582493A Pending JPH06349319A (en) | 1993-06-07 | 1993-06-07 | Conductive paste |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH06349319A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004100046A (en) * | 1995-02-08 | 2004-04-02 | Hitachi Chem Co Ltd | Composite conductive powder, conductive paste, electric circuit and method for manufacturing electric circuit |
WO2013031751A1 (en) * | 2011-08-31 | 2013-03-07 | シャープ株式会社 | Conductive paste, electrode for semiconductor devices, semiconductor device, and method for manufacturing semiconductor device |
-
1993
- 1993-06-07 JP JP13582493A patent/JPH06349319A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004100046A (en) * | 1995-02-08 | 2004-04-02 | Hitachi Chem Co Ltd | Composite conductive powder, conductive paste, electric circuit and method for manufacturing electric circuit |
WO2013031751A1 (en) * | 2011-08-31 | 2013-03-07 | シャープ株式会社 | Conductive paste, electrode for semiconductor devices, semiconductor device, and method for manufacturing semiconductor device |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO1996024938A1 (en) | Composite conductive powder, conductive paste, method of producing conductive paste, electric circuit and method of fabricating electric circuit | |
JP3879749B2 (en) | Conductive powder and method for producing the same | |
JPH06349318A (en) | Conductive paste | |
JPH06349319A (en) | Conductive paste | |
JPH06333417A (en) | Conductive paste | |
JPH0714427A (en) | Conductive paste | |
JPH06338218A (en) | Conductive paste | |
JPH06338219A (en) | Conductive paste | |
JPH10152630A (en) | Conductive paste and composite conductive powder | |
JPH06336562A (en) | Conductive paste | |
JPH06333416A (en) | Conductive paste | |
JPH07307110A (en) | Conductive paste | |
JP3596563B2 (en) | Conductive paste | |
JPH07262822A (en) | Conductive paste | |
JP2000322933A (en) | Conductive paste and its manufacture | |
JPH06349322A (en) | Conductive paste | |
JPH06349320A (en) | Conductive paste | |
JPH07307112A (en) | Conductive paste | |
JP3618441B2 (en) | Conductive metal composite powder and manufacturing method thereof | |
JPH06329960A (en) | Conductive paste | |
JPH07262821A (en) | Conductive paste | |
JPH07262820A (en) | Conductive paste | |
JPH0714424A (en) | Conductive paste | |
JPH0714428A (en) | Conductive paste | |
JPH06338216A (en) | Conductive paste |