JPH06281389A - Circulating cooler using pure water - Google Patents

Abstract

PURPOSE:To obtain a circulating cooler using pure water in which elution of copper of a heat exchanger can be prevented and which has long lifetime and high reliability. CONSTITUTION:A circulating cooler using pure water circulates pure water through a cooler, a heat exchanger, an auxiliary tank and a pump to feed it partly to a pure water unit by utilizing pressure of the pump to maintain purity of the water, and comprises a cover 32 mounted at a vessel 30 of the tank 1 via a packing 31, a placing base 36a made of a material for permeating the air to place oxygen scavenger 35 inside the cover 32 of the tank 1, wherein the scavenger 35 containing iron powder, iron oxide as a main ingredient is filled in a bag and placed on the base 36a.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a circulating cooling device using pure water, and more particularly to preventing rust in a circulating cooling device for cooling a heating element by circulating cooling water of pure water by an ion exchange resin. Therefore, the present invention relates to a circulation cooling device using pure water that can remove oxygen contained in cooling water.

[0002]

2. Description of the Related Art As related to a conventional circulation cooling device using pure water of this kind, there are JP-A-60-78693, JP-A-59-64507, and JP-A-63-86096.
There is a technique disclosed in Japanese Patent Laid-Open No. 62-96076.

FIG. 8 is an overall configuration diagram showing an example of a conventional circulation cooling device using pure water. In the figure, 1 is an auxiliary tank for storing circulating water, 2 is a pump for forcibly circulating water, 3 is a cooler for cooling the circulating water, 4 is a container in which a laser oscillator is stored, and 5 is heat exchange. 6a and 6b are electrodes of a laser oscillator, 7 is a valve for adjusting the flow rate disposed in the middle of piping, 8a is a cooling water inlet, 8b is a cooling water outlet, and 18
Is a deionizer for maintaining the purity of the water fed by the pressure of the pump 2, and 19 is a laser oscillator.

In the circulation cooling device using pure water of this structure,
The water in the auxiliary tank 1 is sent to the cooler 3 by the pump 2, the water cooled in the cooler 3 is sent to the heat exchanger 5 in the container 4 of the laser oscillator 19 from the cooling water inlet 8a, and the auxiliary water is supplied from the cooling water outlet 8b. Return to 1. Further, the pressure inside the container 4 is close to a vacuum, and the water of the cooler 3 is also supplied to the electrodes 6a and 6b and returned to the auxiliary tank 1. In this way, the inside of the container 4 is cooled. On the other hand, a part of the water output by the pump 2 enters the deionizer 18 through the valve 7 for adjusting the flow rate, and is returned to the inlet of the pump 2 again.

FIG. 9 is an enlarged sectional view showing the laser oscillator shown in FIG. 8, and FIG. 10 is a vertical sectional view showing the laser oscillator shown in FIG. In the figure, the same reference numerals and symbols as those in FIG. 8 indicate the same or corresponding components as those of FIG. In the figure, 9 is a high frequency power source, 10 is a silent discharge generated between the electrodes 6a and 6b, 11 is a total reflection mirror, 12 is a partial transmission mirror arranged facing the total reflection mirror 11, 13 is a laser beam, 14
Is a laser medium gas containing CO2, 15a, 15b, 15
Reference numeral c is a blower arranged in the heat exchanger 5. 16a, 1
6b is a metal whose surface is covered with an insulator 18a, 18b such as glass, and the central portions of the metals 16a, 16b are cavities 17a, 17b. 16 is two electrodes 6
It is a waterway connecting a and 6b.

In the laser oscillator 19, the high frequency power source 9
Is connected to the electrodes 6a and 6b, and a high-voltage alternating current is applied to the electrodes 6a and 6b.
It is added between a and 6b. The electrodes 6a and 6b are made of a metal 16a coated with an insulator 18a or 18b such as glass,
16b, and the cavities 17a and 17b are formed at the centers of the metals 16a and 16b, and the cooling water flows through the cavities 17a and 17b. When a high voltage of the high frequency power source 9 is applied between the electrodes 6a and 6b, a silent discharge 10 is generated and the laser medium gas 14 containing CO2 is excited, so that the total reflection mirror 11 and the partial transmission mirror 12 are generated. Laser oscillation occurs between them, and laser light 13 is output from the partial transmission mirror 12. The laser medium gas 14 heated by the silent discharge 10 is circulated between the heat exchanger 5 and the blower 15a, 15b, 15c to be cooled. Of course, the electrodes 6a, 6b
Since it itself also generates heat due to the influence of this silent discharge 10, a part branched from the cooling water inlet 8a and the cooling water outlet 8b is passed through the inside of the electrodes 6a and 6b and is connected in series by a water passage 16 to be cooled. Since the voltage output from the high frequency power source 9 reaches as high as 10 KV, if the conductivity of the cooling water is low, the output voltage of the high frequency power source 9 will flow through the cooling water in the water channel 16, so that the cooling water has a high purity. Must be water.

FIG. 11 is a perspective view showing an example of the heat exchanger, which is an example of the heat exchanger 5 used in FIGS. 8 to 10. In the figure, 20 is a copper pipe through which cooling water flows, 21 is a U-shaped pipe located at the end of the copper pipe 20, and 22 is a heat dissipation fin that radiates heat by heat conduction of the heat dissipation fin. In the heat exchanger 5 having this configuration, the pure water that has entered from the cooling water inlet 8a flows dispersedly into the attached copper pipe 20, and the U-shaped pipe 21
Through the same heat exchanger 5 and exits from the cooling water outlet 8b. A large number of heat-dissipating fins 22 are attached to each copper tube 20, and the laser medium gas 14 heated to a high temperature by the silent discharge 10 passes through the heat-dissipating fins 22 and is cooled by pure water by heat conduction from the copper tube 20. To be done.

FIG. 12 is an enlarged cross-sectional view showing a main part of the heat exchanger of FIG. 11, and a U-shaped tube 21 which is a part of the heat exchanger 5.
FIG. In the figure, reference numeral 23 denotes an expanded portion of the U-shaped pipe 21, and the expanded portion 23 connects the U-shaped pipe 21 to the end of the copper pipe 20. 24 is a copper pipe 20 and a U-shaped pipe 21
Is attached to the heat-dissipating fins 22, 25 and 26 are stress scratches generated in the U-shaped pipe 21, and 28 is a U-shaped pipe 21. An external damage 29 is a gap generated at the connecting portion between the copper pipe 20 and the U-shaped pipe 21.

The heat exchanger 5 is attached by pushing the heat-dissipating fins 22 into the copper tube 20.
The U-shaped tube 21 is inserted and attached to the end portion of 0, and is attached. These copper pipes 20 and U-shaped pipes 21 have a diameter of about 10 mm, but the pipes are made of a thin material of 0.3 to 0.5 mm. This is to improve the thermal conductivity. The U-shaped tube 21 is inserted by expanding the expanded portion 23 so that the inner diameter is the same as that of the copper tube 20.

The copper pipe 20 was hit with a scratch 25 at the time of assembly when inserting the heat dissipation fin 22, a stress scratch 26 when expanding the U-shaped pipe 21, a stress scratch 27 when bending, a tool, and the like. There is a wound 28. There is also a gap 29 in the insertion part.
Although these scratches vary in size, copper pipes 20 and U-shaped pipes 21
There are some that enter the majority of the thickness, and some cannot be determined as defective by the initial operation check. In addition, the cooling water may stay in the gap 29 of the insertion portion, and the cooling water may invade to a position close to the fitting portion 24.

The inside of the container 4 of the laser oscillator 19 is filled with the laser medium gas 14 at a low atmospheric pressure. However, if the laser medium gas 14 contains a slight amount of impurities, the laser output decreases. In particular, when water is contained, it is significantly reduced. Also, due to the low atmospheric pressure in the container 4, water may evaporate even through fine holes due to various scratches as shown in FIG. 12, and the laser medium gas 14 in the container 4 of the laser oscillator 19 may be evaporated. It is in a situation where the purity tends to decrease.

[0012]

The conventional circulating cooling device using pure water as described above has the following problems. That is, the dotted line in FIG. 12 shows the elution state of the surface due to corrosion of the copper pipe 20 and the U-shaped pipe 21, but if the circulating cooling device is operated using pure water for a long period of time, The surface melts and becomes thinner. Then, when the depth of the scratch shown in FIG. 12 is reached, water will leak out. The melted copper is accumulated as ions in the ion exchange resin, but the ion exchange resin can be exchanged if it has no exchange ability. However, since the heat exchanger 5 is disposed in the inner part of the container 4, it cannot be easily replaced.

Therefore, the repair requires a great deal of cost and man-hours, which is a serious problem. Due to such copper elution, the useful life of the laser oscillator has become several years, and problems have occurred all at once several years after shipment.

Therefore, the present invention has been made to solve the above problems, and provides a circulation cooling device using pure water which can prevent copper from being eluted and has a long service life and high reliability. Is an issue.

[0015]

A circulation cooling device using pure water according to the invention of claim 1 is provided with a mounting table for mounting an oxygen scavenger on an air layer above the inside of an auxiliary tank, and this mounting table is deoxidized. The agent is placed on it.

In the circulation cooling device using pure water according to the second aspect of the present invention, a mounting table for mounting the oxygen absorber is provided above the water surface inside the float floated on the water surface of the auxiliary tank, and the oxygen absorber is mounted on this mounting table. It is placed.

In the circulation cooling device using pure water according to the third aspect of the present invention, the side surface of the auxiliary tank has a bellows structure, and a mounting table for mounting the oxygen scavenger is provided above the inside of the auxiliary tank. It is placed.

In the circulation cooling device using pure water according to the invention of claim 4, two auxiliary tanks are connected in series, and a mounting table for mounting an oxygen scavenger is provided above one of the auxiliary tanks.
An oxygen absorber is placed on this placing table.

In the circulation cooling device using pure water according to the invention of claim 5, a mounting table for mounting the oxygen scavenger is provided above the inside of the deionizer, and the oxygen scavenger is mounted on the table. .

[0020]

In the circulation cooling device using pure water according to the first aspect of the present invention, a mounting table for mounting the oxygen absorber is provided above the inside of the auxiliary tank, and the oxygen absorber is mounted on the mounting table. , Removes oxygen in the air in the auxiliary tank and also absorbs oxygen released from water in the auxiliary tank.

In the circulation cooling device using pure water according to the second aspect of the present invention, a mounting table for mounting the oxygen scavenger is provided above the water surface inside the float floated on the water surface of the auxiliary tank, and the oxygen scavenger is mounted on the table. Since it is placed, it removes oxygen from the air inside the float and also absorbs oxygen released from the water inside the float.

In the circulation cooling device using pure water according to the third aspect of the present invention, the side surface of the auxiliary tank has a bellows structure, and a mounting table for mounting the oxygen absorber is provided above the inside of the auxiliary tank. Since it is placed, it removes oxygen from the air in the auxiliary tank and also absorbs oxygen released from the water in the auxiliary tank. Moreover, the increase / decrease of circulating water is absorbed by the bellows structure of the auxiliary tank, and the operation can be performed for a long period of time even when the auxiliary tank is sealed.

In the circulation cooling device using pure water according to the present invention, there is provided two auxiliary tanks connected in series, and a mounting table for mounting the oxygen scavenger is provided above one of the auxiliary tanks. Since the oxygen scavenger is mounted on this mounting table, oxygen in the air in one of the auxiliary tanks is removed, and oxygen released from the water in the auxiliary tank is also absorbed.

In the circulation cooling device using pure water according to the fifth aspect of the present invention, a mounting table for mounting the oxygen scavenger is provided above the inside of the deionizer, and the oxygen scavenger is mounted on the mounting table. Removes oxygen from the air above the deionizer, and
It also absorbs oxygen released from the water above the inside of the water purifier and simultaneously exchanges ions.

[0025]

Embodiments of the present invention will be described below. <First Embodiment> FIG. 1 is a sectional view showing an auxiliary tank which is a main part of a circulation cooling device using pure water according to a first embodiment of the present invention, and corresponds to an embodiment of the invention of claim 1. To do. In the figure, 30 is a container of the auxiliary tank 1, 31 is the auxiliary tank 1
To keep the container airtight, 32 is the lid of the container 30, 33
Is water flowing into the auxiliary tank 1, 34 is water flowing out of the auxiliary tank 1, 35 is an oxygen scavenger, and 36a is a mounting table for mounting the oxygen absorber 35. Since the other configuration of the entire apparatus is the same as the configuration described in FIG. 8 of the conventional example, the description thereof is omitted here.

The auxiliary tank 1 of this construction is a container 30 with a packing 31 sandwiched between them and a lid 32. The container 30 has water 3 returned from a laser oscillator (not shown).
3 and water 34 exiting the pump (not shown). The inflowing water 33 is provided with an inflow port in the middle of the container 30, and this inflow port is provided below the surface of the water level in the container 30. By doing so, the water does not pass through the air, so that the air is less sucked in. Also, the lid 3 of the auxiliary tank 1
A mounting table 36a is provided on the inner side of 2, and the oxygen absorber 35 is contained therein. The oxygen scavenger 35 includes iron powder and iron oxide as a main component contained in a bag (for example, trade name: Ageless), but is not limited thereto. The mounting table 36a may be made of any material that allows air to pass therethrough, and may be wire mesh, punching metal, or perforated plastic. The mounting table 36a attached to the lid 32 is the auxiliary tank 1 of the circulation cooling device using pure water in FIG.

Here, it will be explained that if the oxygen in the water is eliminated, the consumption of the copper pipe used in the heat exchanger will be eliminated. [Formula 1] (a) Cu → Cu ²⁺ + 2e (b) 1 / 2O ₂ + H ₂ O + 2e → 2OH ⁻ Formula 1 shows a reaction when copper is in contact with water. In (a) of the formula 1, metallic copper is divided into copper ions Cu ²⁺ and an electron 2e, and in (b), a reaction of oxygen with water and the electron 2e produces a hydroxyl group 2OH ⁻ . This reaction occurs at the same time, but is divided for clarity. After all, copper ion Cu2 + and a hydroxyl group 2OH ^- can be.

[Formula 2] (c) Cu ²⁺ + 2H → Cu + 2H ⁺ (d) 2H ⁺ + 2OH ⁻ → 2H ₂ O Formula 2 shows the reaction in the ion exchange resin in the ion exchanger. In (c), the copper ion Cu ²⁺ formed on the surface of the conduit is taken in by the ion exchange resin to be metallic copper, and hydrogen ion is emitted instead. This is generally the principle of ion exchange. In (d), the hydrogen ion 2H ⁺ reacts with the hydroxyl group 2OH ⁻ formed in (b) to form water 2H ₂ O.
In addition, copper ions remain in the ion exchange resin and accumulate.

Thus, when oxygen is contained in water, copper is eluted, and the eluted copper continues to be accumulated in the ion exchange resin. However, since this reaction is slow, copper does not elute promptly, but copper accumulates in the ion exchange resin, which shortens the life of the ion exchange resin.

Calculating the elution amount of this copper, it is about 30 μm
If the copper pipe or U-shaped pipe of the heat exchanger is deeply scratched in 3 to 5 years, a hole may be opened. In addition, a portion of a material that is easily corroded, such as a sticking portion, elutes quickly, which may further shorten the life. However, if the oxygen in the water is removed, the reaction shown in Formula 1 does not occur, so the elution of copper disappears,
The life of the copper tube and U-tube of the heat exchanger can be considerably extended. Therefore, the oxygen scavenger 35 is placed on the mounting table 36a and is positioned in the space of the auxiliary tank 1 which is in contact with water,
By absorbing oxygen, it is possible to prevent the copper pipe of the heat exchanger and the copper of the U-shaped pipe from being eluted and to extend the life thereof. Further, since copper ions are not emitted, there is an effect that the life of the ion exchange resin is extended.

<Second Embodiment> FIG. 2 is a sectional view showing an auxiliary tank which is an essential part of a circulation cooling device using pure water according to a second embodiment of the present invention. It corresponds to the embodiment. In the figure, the same reference numerals and symbols as those in the first embodiment denote the same or corresponding components as those of the first embodiment.
In the figure, 36b is a mounting table for mounting the oxygen scavenger 35, and this mounting table 36b is attached to the side wall of the container 30. As with the first embodiment, the mounting table 36b may be made of any material that allows air to pass therethrough, and may be a wire net, a punching metal, or a perforated plastic. Thus, what mounts the mounting table 36b on the container 30 is the auxiliary tank 1 of the circulation cooling device using pure water in FIG. Except for the structure of the mounting table 36b, the structure is the same as that of the first embodiment described above, and the description thereof is omitted here.

Also, in the circulation cooling device using pure water according to this embodiment, the principle of preventing the consumption of the copper pipe used in the heat exchanger and the like by eliminating oxygen in the water is the above-mentioned first. Same as the embodiment. Therefore, the oxygen scavenger 35 is placed on the mounting table 36b, positioned in the space of the auxiliary tank 1 in contact with water, and absorbs oxygen to prevent elution of copper in the heat exchanger copper pipe and U-shaped pipe. However, this life can be extended. Moreover, since copper ions are not emitted, the life of the ion exchange resin is extended.

<Third Embodiment> FIG. 3 is a sectional view showing an auxiliary tank which is an essential part of a circulation cooling device using pure water according to a third embodiment of the present invention. Corresponding to the embodiment. In the figure, the same reference numerals and symbols as those of the first and second embodiments indicate the same or corresponding constituent parts as those of the first and second embodiments. In the figure, 36c is the oxygen absorber 3
5 is a mounting table for mounting the table 5, and the mounting table 36c is lifted from the bottom of the container 30 using the table. The mounting table 36c may be made of a material that allows air to pass therethrough, like the above-described embodiments, and may be a wire mesh, punching metal, or perforated plastic. Thus, what mounts the mounting table 36c on the container 30 is the auxiliary tank 1 of the circulation cooling device using pure water in FIG. Since the structure is the same as that of the first and second embodiments except the structure of the mounting table 36c, description thereof will be omitted here.

Also, in the circulation cooling device using pure water of the present embodiment, the principle of preventing the consumption of the copper pipe used in the heat exchanger and the like by eliminating oxygen in the water is the same as in each of the above embodiments. Same as the example. Therefore, the oxygen scavenger 35 is placed on the mounting table 36c, positioned in the space of the auxiliary tank 1 in contact with water, and absorbs oxygen to prevent elution of copper in the heat exchanger copper pipe and U-shaped pipe. Yes, this life can be extended and no copper ions are emitted.

As described above, the circulation cooling devices using pure water according to the first to third embodiments described above circulate through the cooler 3, the heat exchanger 5, the auxiliary tank 1 and the pump 2, and the pump 2 In the circulation cooling device using pure water in which a part of the water is sent to the pure water device 18 by using pressure to maintain the purity of water, the mounting bases 36a to 36c are provided above the inside of the auxiliary tank 1, and the mounting base 36a is described above. The deoxidizer 35 is placed on the surfaces 36c to 36c. Therefore, oxygen in the air in the auxiliary tank 1 is removed, and further oxygen released from the water in the auxiliary tank 1 is also absorbed, so that the oxidation reaction of the copper surface in water is prevented,
It is possible to prevent elution of the copper inner surface of the copper pipe of the heat exchanger and the copper pipe of the U-shaped pipe, and to extend this life. Further, since copper ions are not emitted, the life of the ion exchange resin is extended.

<Fourth Embodiment> FIG. 4 is a sectional view showing an auxiliary tank which is a main part of a circulation cooling device using pure water according to a fourth embodiment of the present invention. Corresponds to the example. In the figure, the same reference numerals and symbols as those of the above-mentioned respective embodiments indicate the same or corresponding constituent parts as those of the above-mentioned respective embodiments. In the figure, 40 is a float floated on the water surface of the auxiliary tank 1, 41 is a filler filled in the float 40, 3
6d is a mounting table for mounting the oxygen absorber 35, and the mounting table 36d is attached to the float 40. The mounting table 36d may be made of a material that allows air to pass through, like the above-described embodiments, and may be a wire net, a punching metal, or a perforated plastic. Since the other configuration of the entire apparatus is the same as the configuration described in FIG. 8 of the conventional example, the description thereof is omitted here.

The auxiliary tank 1 of this structure is provided with a mounting table 36d for containing the oxygen scavenger 35 between the water surface of the float 40 floated on the water surface of the container 30 in a cross-sectional shape of the container 30 and the water surface. It is a thing. The oxygen absorber 35 is placed in the mounting table 36d. The oxygen scavenger 35 includes iron powder and iron oxide as a main component contained in a bag (for example, trade name: Ageless), but is not limited thereto. In this way, the mounting table 36d is placed on the container 3
Attached to the float 40 in 0 is the auxiliary tank 1 of the circulation cooling device using pure water in FIG. The float 40 has a structure in which the periphery or part of a filler 41 made of a material having a smaller specific gravity than water is covered with a material that does not allow air to pass through.
1 may be, for example, foamed plastic or air. In the present embodiment, the mounting table 36d is provided inside the center of the float 40 and the deoxidizing material 35 is put therein, but the structure is not limited to this structure as long as it is between the water surface and the float 40. Although the packing between the lid 32 and the container 30 is omitted, even if some air enters between the lid 32 and the container 30, since the float 40 has substantially the same shape as the container 30, the water surface Not exposed. Moreover, since the float 40 floats even when the water surface rises and falls and always covers the water surface, oxygen in the air rarely dissolves in the water.

Also, in the circulation cooling device using pure water of this embodiment, the principle of preventing the consumption of the copper pipe used in the heat exchanger and the like by eliminating oxygen in the water is the same as in each of the above embodiments. Same as the example. Therefore, the oxygen scavenger 35 is placed on the mounting table 36d of the float 40, positioned in the space of the auxiliary tank 1 in contact with water, and absorbs oxygen, thereby removing the copper pipe of the heat exchanger and the copper pipe of the U-shaped pipe. The elution can be prevented and the life can be extended, and since copper ions are not emitted, the life of the ion exchange resin is extended.

As described above, the circulation cooling device using pure water of the present embodiment circulates through the cooler 3, the heat exchanger 5, the auxiliary tank 1 and the pump 2, and utilizes the pressure of the pump 2 to partially In the circulation cooling device using pure water for sending water to the deionizer 18 to maintain the purity of the water, the float 40 is floated on the water surface of the auxiliary tank 1, and the air layer and the mounting table 36d are placed above the water surface inside the float 40. The oxygen scavenger 35 is provided on the mounting table 36d.

Therefore, since oxygen in the air in the auxiliary tank 1 is removed and oxygen released from the water in the auxiliary tank 1 is also absorbed, oxidation reaction of the copper surface in water is prevented and heat exchange is performed. It is possible to prevent the elution of the copper inner surface of the copper tube of the container and the copper of the U-shaped tube and extend the life. Further, since copper ions are not emitted, the life of the ion exchange resin is extended. Furthermore, the float 40 has a shape substantially the same as the shape inside the container 30,
Even if the water surface rises and falls, if the float 40 is used to cover the water surface at all times, the packing 3 between the container 30 and the lid 32
1 can be omitted.

<Fifth Embodiment> FIG. 5 is a sectional view showing an auxiliary tank which is a main part of a circulation cooling device using pure water according to a fifth embodiment of the present invention. Corresponds to the example. In the figure, the same reference numerals and symbols as those of the above-mentioned respective embodiments indicate the same or corresponding constituent parts as those of the above-mentioned respective embodiments. In the figure, 42 is the container 30 and lid 3 of the auxiliary tank 1.
It is a bellows provided between the bellows and the bellows which can be expanded and contracted in the vertical direction. Reference numeral 36e denotes a mounting table disposed inside the lid 32 of the auxiliary tank 1, and this mounting table 36e may be made of a material that allows air to pass through, like the above-described embodiments, and may be a wire mesh, a punching metal, or a hole. Open plastic may be used. Since the other configuration of the entire apparatus is the same as the configuration described in FIG. 8 of the conventional example, the description thereof is omitted here.

The auxiliary tank 1 of this construction has a bellows 42 which can be expanded and contracted at least vertically between the container 30 and the lid 32.
And a mounting table 36e is provided inside the lid 32, and the oxygen absorber 35 is put in the mounting table 36e. A slight air layer is provided between the mounting table 36e and the water surface. Nitrogen may be filled here. A laser oscillator (not shown) is provided in the container 30.
There is water 33 returning from and water 34 exiting to a pump (not shown). Although this amount is almost the same, it decreases in the long term due to water leakage or the like, or increases when water is replenished. Therefore, if this increase / decrease is absorbed by the expansion / contraction of the bellows 42 of the auxiliary tank 1, the auxiliary tank 1 can be operated for a long period of time even if it is hermetically sealed, and the same effect as each of the above-described embodiments can be obtained.

Also, in the circulation cooling device using pure water of this embodiment, the principle of preventing the consumption of the copper pipe used in the heat exchanger or the like by eliminating oxygen in the water is the same as in each of the above embodiments. Same as the example. Therefore, the oxygen scavenger 35 is placed on the mounting table 36e, positioned in the space of the auxiliary tank 1 in contact with water, and absorbs oxygen, thereby preventing the elution of copper in the heat exchanger copper pipe and U-shaped pipe. However, this life can be extended. Moreover, since copper ions are not emitted, the life of the ion exchange resin is extended.

As described above, the circulation cooling device using pure water of the present embodiment circulates through the cooler 3, the heat exchanger 5, the auxiliary tank 1 and the pump 2, and utilizes the pressure of the pump 2 to partially In a circulation cooling device using pure water for feeding water to the pure water device 18 to maintain the purity of water, the side surface of the auxiliary tank 1 is provided with a bellows 42 which can expand and contract at least in the vertical direction to form a bellows structure. Air layer and oxygen absorber 3 above the inside
5 is provided with a mounting table 36e on which the oxygen absorber 35 is mounted. Therefore, the oxygen in the air in the auxiliary tank 1 is removed and the oxygen released from the water in the auxiliary tank is also absorbed, so that the oxidation reaction of the copper surface in the water is prevented and the copper pipe of the heat exchanger is , It is possible to prevent elution of the inner surface of the copper of the U-shaped tube and extend the life thereof. Further, since copper ions are not emitted, the life of the ion exchange resin is extended.

Particularly, in this embodiment, the increase / decrease of the circulating water of the circulating cooling device can be absorbed by the expansion / contraction of the bellows 42 of the auxiliary tank 1,
Since the operation can be performed for a long period of time even when the auxiliary tank 1 is sealed, air does not enter from between the lid 32 and the container 30, and oxygen in the air rarely dissolves in water. As a result, the above effect can be further promoted.

<Sixth Embodiment> FIG. 6 is a sectional view showing an essential part of a circulation cooling device using pure water according to a sixth embodiment of the present invention, which corresponds to an embodiment of the invention of claim 4. . In the figure, the same reference numerals and symbols as those of the above-mentioned respective embodiments indicate the same or corresponding constituent parts as those of the above-mentioned respective embodiments. In the figure, 4
3 is water flowing out from a laser oscillator (not shown), and 44 is a second auxiliary tank connected in series to the auxiliary tank 1. 36f is a mounting table for mounting the oxygen scavenger 35, and the mounting table 36f is attached above the inside of the second auxiliary tank 44. The mounting table 36f may be made of a material that allows air to pass therethrough, like the above-described embodiments, and may be a wire net, a punching metal, or a perforated plastic. Since the other configuration of the entire apparatus is the same as the configuration described in FIG. 8 of the conventional example, the description thereof is omitted here.

The auxiliary tank 1 having this structure is the auxiliary tank 1
Has a second auxiliary tank 44 connected in series to the mounting table 36f provided above the inside of the second auxiliary tank 44.
The oxygen scavenger 35 is placed on the table, and a slight air layer is provided between the table 36f and the water surface. It should be noted that this air layer may be filled with nitrogen. If you do this,
The conventional auxiliary tank 1 remains the same, but the second auxiliary tank 4
4 may be provided, and it can be easily attached to a device that is operating conventionally. Moreover, the new device has the effect of requiring less design changes. Also, this second auxiliary tank 44 may be located anywhere in the waterway of the device.

Also, in the circulation cooling device using pure water according to the present embodiment, the principle of preventing the consumption of the copper pipe used in the heat exchanger or the like by eliminating oxygen in the water is carried out in each of the above-mentioned embodiments. Same as the example. Therefore, the oxygen scavenger 35 is placed on the mounting table 36f and is positioned in the space of the portion of the second auxiliary tank 44 that comes into contact with water to absorb oxygen, so that the copper pipe of the heat exchanger and the copper pipe of the U-shaped pipe Elution can be prevented and this life can be extended. Moreover, since copper ions do not come out,
The life of the ion exchange resin is extended.

As described above, the circulation cooling device using pure water according to the present embodiment circulates through the cooler 3, the heat exchanger 5, the auxiliary tank 1 and the pump 2, and partially utilizes the pressure of the pump 2. In a circulation cooling device using pure water for sending water to the pure water device 18 to maintain the purity of water, a second auxiliary tank 44 is connected in series to the auxiliary tank 1, and an upper part of the inside of the second auxiliary tank 44 is connected. An air layer and a mounting table 36f are provided on the mounting table 3
The oxygen absorber 35 is placed on 6f.

Therefore, the oxygen in the air in the second auxiliary tank 44 is removed, and the oxygen released from the water in the second auxiliary tank 44 is also absorbed, so that the oxidation reaction of the copper surface in water is performed. And the elution of the inner surface of the copper pipe of the heat exchanger and the copper of the U-shaped pipe can be prevented, and this life can be extended. Further, since copper ions are not emitted, there is an effect that the life of the ion exchange resin is extended. In particular, in the present embodiment, by simply providing the second auxiliary tank 44 in the conventional device, the device operating in the related art can be used as it is, and even in the new device, there is an effect that the design change can be small.

<Seventh Embodiment> FIG. 7 is a sectional view showing an essential part of a circulation cooling device using pure water according to a seventh embodiment of the present invention, which corresponds to an embodiment of the invention of claim 5. . In the figure, the same reference numerals and symbols as those of the above-mentioned respective embodiments indicate the same or corresponding constituent parts as those of the above-mentioned respective embodiments. In the figure, 3
6 g is a mounting table for mounting the oxygen scavenger 35, and the mounting table 36 g is mounted above the inside of the deionizer 18. The mounting table 36g may also be made of a material that allows air to pass therethrough, as in the above-described embodiments, such as a wire mesh, punching metal,
It may be perforated plastic. Reference numeral 45 is an ion exchange resin disposed inside the deionizer 18. Since the other configuration of the entire apparatus is the same as the configuration described in FIG. 8 of the conventional example, the description thereof is omitted here.

In the deionizer 18 having this structure, a part of the water sent from the pump 2 is put into the deionizer 18 through the valve 7.
After passing through the ion exchange resin 45, it is returned to the inlet side of the pump 2. A mounting table 36g is provided above the inside of the portion of the deionizer 18 into which water flows, and the deoxidizing material 35 is mounted on the mounting table 36g. Therefore, this deionizer 18
Can exchange ions at the same time as absorbing oxygen.

Also, in the circulation cooling device using pure water of this embodiment, the principle of preventing the consumption of the copper pipe used in the heat exchanger or the like by eliminating the oxygen in the water is the same as in each of the above embodiments. Same as the example. Therefore, the oxygen scavenger 35 is placed on the mounting table 36g, and the deoxidizer 35 is positioned in the space of the deionizer 18 in contact with water to absorb oxygen, thereby elution of copper in the heat exchanger copper tube and U-tube. Can be prevented and this life can be extended. Moreover, since copper ions are not emitted, the life of the ion exchange resin is extended.

As described above, the circulation cooling device using pure water according to the present embodiment circulates through the cooler 3, the heat exchanger 5, the auxiliary tank 1 and the pump 2, and partially utilizes the pressure of the pump 2. In a circulation cooling device using pure water for sending water to the pure water device 18 to maintain the purity of water, an air layer and a mounting table 36g are provided above the inside of the pure water device 18, and the oxygen absorber 35 is placed on the mounting table 36g. Is placed.

Therefore, oxygen in the air in the deionizer 18 is removed, and oxygen released from the water in the deionizer 18 is also absorbed, so that the oxidation reaction of the copper surface in water is prevented,
It is possible to prevent elution of the copper inner surface of the copper pipe of the heat exchanger and the copper pipe of the U-shaped pipe, and to extend this life. Further, since copper ions are not emitted, the life of the ion exchange resin 45 is effectively extended. Moreover, in this embodiment, since the deionizer 18 can absorb oxygen and simultaneously perform ion exchange, a small-sized and highly functional circulating cooling device using pure water can be obtained.

By the way, in the above description, the auxiliary tank 1
The deoxidizer 35 is provided inside the second auxiliary tank 44, and the deoxidizer 35 is placed therein (first to fifth embodiments). And the mounting table 3 in the deionizer 18.
Although 6 g is provided and the oxygen absorber 35 is placed (seventh embodiment) separately, they may be appropriately combined to form one circulation cooling device.

[0057]

As described above, in the circulating cooling system using pure water according to the invention of claim 1, the mounting table is provided above the inside of the auxiliary tank, and the oxygen absorber is mounted on the mounting table. , Oxygen in the air in the auxiliary tank is removed, and oxygen released from the water in the auxiliary tank is also absorbed, so that the oxidation reaction of the copper surface in the water is prevented and the copper pipe of the heat exchanger, U The elution of the inner surface of the copper of the character tube can be prevented and this life can be extended. Further, since copper ions are not emitted, the life of the ion exchange resin is extended.

In the circulation cooling device using pure water according to the second aspect of the present invention, a mounting table is provided above the water surface inside the float floated on the water surface of the auxiliary tank, and the deoxidizing agent is mounted on the mounting table. Removes oxygen from the air inside the
Since it also absorbs oxygen released from the water inside the float, it prevents the oxidation reaction of the copper surface in water, prevents the elution of the copper tube of the heat exchanger and the inner surface of the copper of the U-shaped tube, and prolongs its life. It can be postponed. Further, since copper ions are not emitted, the life of the ion exchange resin is extended.

In the circulation cooling device using pure water according to the third aspect of the present invention, the side surface of the auxiliary tank has a bellows structure, a mounting table is provided above the inside of this auxiliary tank, and the oxygen scavenger is mounted on this mounting table. As a result, oxygen in the air in the auxiliary tank is removed, and oxygen released from the water in the auxiliary tank is also absorbed, so the oxidation reaction of the copper surface in water is prevented, and the copper tube of the heat exchanger, The elution of the inner surface of the copper of the U-tube can be prevented, and this life can be extended. Also, since copper ions do not come out,
The life of the ion exchange resin is extended. Moreover, since the increase / decrease of the circulating water can be absorbed by the bellows structure and the auxiliary tank can be operated for a long period of time even when the auxiliary tank is hermetically closed, air does not enter the auxiliary tank, and the above effect can be further promoted.

In the circulation cooling device using pure water according to the invention of claim 4, two auxiliary tanks are connected in series, a mounting table is provided above one of the auxiliary tanks, and the oxygen scavenger is placed on this mounting table. By placing it, the oxygen in the air in the auxiliary tank is removed, and the oxygen released from the water in the auxiliary tank is also absorbed, so the oxidation reaction of the copper surface in water is prevented and heat exchange is performed. It is possible to prevent the elution of the copper inner surface of the copper tube of the container and the copper of the U-shaped tube and extend the life. Further, since copper ions are not emitted, the life of the ion exchange resin is extended. Moreover, by simply providing the second auxiliary tank in the conventional device, the device operating in the related art can be used, and there is an effect that the design change can be reduced in the new device.

In the circulation cooling device using pure water according to the invention of claim 5, a mounting table is provided above the inside of the deionizer, and the oxygen scavenger is mounted on this mounting table. Removes the oxygen from the air and absorbs the oxygen released from the water above the inside of the water purifier, thus preventing the oxidation reaction of the copper surface in the water, and the copper pipe and U-shaped pipe of the heat exchanger. It is possible to prevent elution of the inner surface of the copper and extend this life. Further, since copper ions are not emitted, the life of the ion exchange resin is extended. Moreover, since the deionizer can perform oxygen exchange and ion exchange at the same time, a small-sized and highly functional circulation cooling device can be obtained.

[Brief description of drawings]

FIG. 1 is a sectional view showing a main part of a circulation cooling device using pure water according to a first embodiment of the present invention.

FIG. 2 is a sectional view showing an essential part of a circulation cooling device using pure water according to a second embodiment of the present invention.

FIG. 3 is a sectional view showing an essential part of a circulation cooling device using pure water according to a third embodiment of the present invention.

FIG. 4 is a sectional view showing an essential part of a circulation cooling device using pure water according to a fourth embodiment of the present invention.

FIG. 4 is a sectional view showing an essential part of a circulation cooling device using pure water according to a fifth embodiment of the present invention.

FIG. 6 is a sectional view showing a main part of a circulation cooling device using pure water according to a sixth embodiment of the present invention.

FIG. 7 is a sectional view showing an essential part of a circulation cooling device using pure water according to a seventh embodiment of the present invention.

FIG. 8 is an overall configuration diagram showing an example of a conventional circulation cooling device using pure water.

9 is an enlarged cross-sectional view showing the laser oscillator shown in FIG.

FIG. 10 is a vertical cross-sectional view showing the laser oscillator of FIG.

FIG. 11 is a perspective view showing an example of a heat exchanger.

12 is an enlarged cross-sectional view showing the main parts of the heat exchanger of FIG.

[Explanation of symbols]

 1 Auxiliary tank 2 Pump 3 Cooler 5 Heat exchanger 18 Pure water device 19 Laser oscillator 20 Copper tube 21 U-shaped tube 22 Heat dissipation fin 30 Container 31 Packing 32 Lid 35 Deoxidizer 36a-36g Mounting table 40 Float 41 Filler 42 bellows 44 second auxiliary tank 45 ion exchange resin

Claims (5)

[Claims] 1. A circulating cooling device using pure water, which circulates through a cooler, a heat exchanger, an auxiliary tank, and a pump, and uses the pressure of the pump to send a part of the water to a pure water device to maintain the purity of water. 2. A circulation cooling device using pure water, wherein a mounting table is provided in an air layer above the inside of the auxiliary tank, and the oxygen absorber is mounted on the mounting table. 2. A circulation cooling device using pure water, which circulates through a cooler, a heat exchanger, an auxiliary tank, and a pump, and uses the pressure of the pump to send a part of the water to a pure water device to maintain the purity of water. In the above, a circulation cooling device using pure water, characterized in that a float is floated on the water surface of the auxiliary tank, an air layer and a mounting table are provided above the water surface inside the float, and an oxygen absorber is mounted on the mounting table. . 3. A circulation cooling device using pure water, which circulates through a cooler, a heat exchanger, an auxiliary tank, and a pump, and uses the pressure of the pump to send a part of the water to a pure water device to maintain the purity of the water. In the above, the side surface of the auxiliary tank has a bellows structure, a mounting table for mounting an air layer and an oxygen absorber is provided above the inside of the auxiliary tank, and the oxygen absorber is mounted on the mounting table. Circulation cooling system using pure water. 4. A cooler, a heat exchanger, two auxiliary tanks,
A circulation cooling device using pure water, which circulates through a pump and sends a part of the pressure to the pure water device by using the pressure of the pump to maintain the purity of water, wherein the two auxiliary tanks are connected in series, A circulation cooling device using pure water, characterized in that an air layer and a mounting table are provided above one of the auxiliary tanks, and the oxygen absorber is mounted on the mounting table. 5. A circulation cooling device using pure water, which circulates through a cooler, a heat exchanger, an auxiliary tank, and a pump, and uses the pressure of the pump to send a part thereof to a pure water device to maintain the purity of water. 2. A circulation cooling device using pure water, wherein an air layer and a mounting table are provided above the inside of the deionizer, and a deoxidizer is mounted on the mounting table.