JPH0548378A - Piezoelectric element and manufacturing method thereof - Google Patents
Piezoelectric element and manufacturing method thereofInfo
- Publication number
- JPH0548378A JPH0548378A JP15362491A JP15362491A JPH0548378A JP H0548378 A JPH0548378 A JP H0548378A JP 15362491 A JP15362491 A JP 15362491A JP 15362491 A JP15362491 A JP 15362491A JP H0548378 A JPH0548378 A JP H0548378A
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric element
- compliance
- density
- porcelain plate
- paste
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 8
- 229910052573 porcelain Inorganic materials 0.000 claims abstract description 31
- 238000009792 diffusion process Methods 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 4
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000006185 dispersion Substances 0.000 description 5
- 239000000463 material Substances 0.000 description 5
- 239000000843 powder Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000000921 elemental analysis Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 230000010287 polarization Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- -1 Si O2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000011230 binding agent Substances 0.000 description 1
- WMWLMWRWZQELOS-UHFFFAOYSA-N bismuth(III) oxide Inorganic materials O=[Bi]O[Bi]=O WMWLMWRWZQELOS-UHFFFAOYSA-N 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- MRELNEQAGSRDBK-UHFFFAOYSA-N lanthanum oxide Inorganic materials [O-2].[O-2].[O-2].[La+3].[La+3] MRELNEQAGSRDBK-UHFFFAOYSA-N 0.000 description 1
- VASIZKWUTCETSD-UHFFFAOYSA-N manganese(II) oxide Inorganic materials [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- KTUFCUMIWABKDW-UHFFFAOYSA-N oxo(oxolanthaniooxy)lanthanum Chemical compound O=[La]O[La]=O KTUFCUMIWABKDW-UHFFFAOYSA-N 0.000 description 1
- 229920002689 polyvinyl acetate Polymers 0.000 description 1
- 239000011118 polyvinyl acetate Substances 0.000 description 1
- 238000001926 trapping method Methods 0.000 description 1
- 239000002966 varnish Substances 0.000 description 1
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
(57)【要約】
【目的】 ＰＴ系磁器板を用いる圧電素子において、電
極部の厚みを薄くするような機械的加工を用いることな
く、厚み縦振動基本波のエネルギ閉じ込めを可能にす
る。
【構成】 ＰＴ系磁器板１１の、対向する外部電極１２
および１３に挟まれた電極部１４とそれ以外の無電極部
１５との間で、コンプライアンスおよび密度の少なくと
も一方に関して差を持たせる。このような構造を得るた
め、ＰＴ系磁器のコンプライアンスおよび密度の少なく
とも一方を熱拡散により変化させ得る元素および導電性
金属を含むペーストを用意し、このペーストによって外
部電極１２および１３を形成するように付与し、その
後、熱処理する。
(57) [Summary] [Object] In a piezoelectric element using a PT-based porcelain plate, it is possible to confine the energy of the fundamental wave in the thickness longitudinal vibration without using mechanical processing to reduce the thickness of the electrode portion. [Structure] External electrodes 12 of a PT-based porcelain plate 11 facing each other
There is a difference in at least one of compliance and density between the electrode portion 14 sandwiched between and and 13 and the other electrodeless portion 15. In order to obtain such a structure, a paste containing an element and a conductive metal that can change at least one of compliance and density of PT-based porcelain by thermal diffusion is prepared, and the external electrodes 12 and 13 are formed by this paste. And then heat treated.
Description
【０００１】[0001]
【産業上の利用分野】この発明は、チタン酸鉛（ＰＴ）
系磁器板を備える圧電素子およびその製造方法に関する
もので、特に、厚み縦振動基本波のエネルギ閉じ込めを
可能とする新規な構造を備える圧電素子およびその製造
方法に関するものである。This invention relates to lead titanate (PT).
More specifically, the present invention relates to a piezoelectric element having a system porcelain plate and a method of manufacturing the same, and more particularly, to a piezoelectric element having a novel structure that enables energy trapping of a thickness longitudinal vibration fundamental wave and a method of manufacturing the same.
【０００２】[0002]
【従来の技術】ＰＴ系磁器は、低誘電率であるという特
徴を生かして、圧電受動部品、特に高周波用の部品への
応用が考えられている。2. Description of the Related Art PT-based porcelain is expected to be applied to piezoelectric passive components, especially components for high frequencies, by taking advantage of its low dielectric constant.
【０００３】しかしながら、ＰＴ系磁器板からなる圧電
基板では、厚み縦振動基本波において、圧電基板の一部
に電極を設け、その部分の遮断周波数を低下させること
による、通常のエネルギ閉じ込め方法を採用することが
できない。However, in the piezoelectric substrate made of a PT type porcelain plate, in the thickness longitudinal vibration fundamental wave, an ordinary energy trapping method is adopted by providing an electrode on a part of the piezoelectric substrate and lowering the cutoff frequency of the part. Can not do it.
【０００４】図５は、ＰＴの厚み縦振動基本波の分散曲
線を示している。図５において、Ωは規格化された周波
数、Ｐは伝搬定数（波数）、ΩN は、無電極部の遮断周
波数、ΩA は電極部の遮断周波数、ΩO は共振周波数を
それぞれ示している。また、図５における横軸は、伝搬
定数（波数）Ｐの実数部と虚数部とを示している。ま
た、電極部の分散曲線が点線で与えられ、無電極部の分
散曲線が実線で与えられている。FIG. 5 shows the dispersion curve of the thickness longitudinal vibration fundamental wave of PT. In FIG. 5, Ω is a normalized frequency, P is a propagation constant (wave number), Ω N is a cutoff frequency of the electrodeless portion, Ω A is a cutoff frequency of the electrode portion, and Ω O is a resonance frequency. .. In addition, the horizontal axis in FIG. 5 indicates the real number part and the imaginary number part of the propagation constant (wave number) P. The dispersion curve of the electrode part is given by the dotted line, and the dispersion curve of the electrodeless part is given by the solid line.
【０００５】ＰＴは、図５のような厚み縦振動基本波の
分散曲線を有するため、共振周波数ΩO において、無電
極部が実数の伝搬定数を持つ伝搬域に位置し電極部が虚
数の伝搬定数を持つ遮断域に位置することになるため、
通常は、エネルギ閉じ込めができないとされている。Since PT has a dispersion curve of the thickness longitudinal vibration fundamental wave as shown in FIG. 5, at the resonance frequency Ω O , the electrodeless portion is located in the propagation region having a real propagation constant and the electrode portion propagates an imaginary number. Since it is located in the cutoff area with a constant,
Usually, it is said that energy cannot be trapped.
【０００６】ＰＴでエネルギ閉じ込めを行なうには、電
極部遮断周波数を無電極部遮断周波数より大きくするこ
とで、電極部の伝搬定数を実数、無電極部の伝搬定数を
虚数にする必要がある。この条件を満足させ、ＰＴによ
ってもエネルギ閉じ込めを可能とするため、図６および
図７に示すような構造が提案されている。In order to confine energy with PT, it is necessary to make the propagation constant of the electrode part a real number and the propagation constant of the electrodeless part an imaginary number by making the cutoff frequency of the electrode part larger than the cutoff frequency of the electrodeless part. In order to satisfy this condition and enable energy confinement also by PT, structures as shown in FIGS. 6 and 7 have been proposed.
【０００７】図６および図７を参照して、ＰＴ板１の少
なくとも一方面に凹部２を設け、この凹部２が設けられ
た部分を挟むように、１対の外部電極３および４が形成
されている。なお、図７に示した矢印５は、分極方向を
示している。Referring to FIGS. 6 and 7, a recess 2 is provided on at least one surface of PT plate 1, and a pair of external electrodes 3 and 4 are formed so as to sandwich the portion provided with recess 2. ing. The arrow 5 shown in FIG. 7 indicates the polarization direction.
【０００８】規格化された遮断周波数Ωは、材料定数か
ら決まる量で、試料形状には依存しない。実際の遮断周
波数ｆは、このΩから以下の式に基づき求められる量で
ある。The normalized cutoff frequency Ω is an amount determined by the material constant and does not depend on the sample shape. The actual cutoff frequency f is an amount obtained from this Ω based on the following equation.
【０００９】ｆ＝Ω／｛π・ｔ・（ρ・Ｓ4 4 E ）
1 / 2 ｝ ｔ：厚み，ρ：密度，Ｓ4 4 E ：コンプライアンス 上述の関係を利用して、従来は、図６および図７に示す
ように、ＰＴ板１の外部電極３および４で挟まれた部分
すなわち電極部の厚みｔを小さくすることで、電極部の
実際の遮断周波数ｆを上げ、エネルギ閉じ込めを可能に
している。F = Ω / {πt (ρS 4 4 E )
1/2 } t: thickness, ρ: density, S 4 4 E : compliance Using the above relationship, conventionally, as shown in FIGS. 6 and 7, it is sandwiched between the external electrodes 3 and 4 of the PT plate 1. By reducing the thickness t of the broken portion, that is, the electrode portion, the actual cut-off frequency f of the electrode portion is increased and energy can be trapped.
【００１０】[0010]
【発明が解決しようとする課題】しかしながら、図６お
よび図７に示した従来技術では、凹部２を設けるための
加工、すなわち電極部を薄くするための加工が難しく、
電極部の厚みに比較的大きなばらつきが生じてしまい、
また、加工によってＰＴ板１の強度が低くなる、という
問題がある。However, in the prior art shown in FIGS. 6 and 7, it is difficult to perform the processing for forming the concave portion 2, that is, the processing for thinning the electrode portion.
There is a relatively large variation in the thickness of the electrode part,
Further, there is a problem that the strength of the PT plate 1 becomes low due to the processing.
【００１１】たとえば、厚み０．４ｍｍのＰＴ板でエネ
ルギ閉じ込めを実現するには、電極部の厚みを０．３ｍ
ｍ程度にしなければならないが、電極部となる板の中央
部を０．１ｍｍだけ精度よく削り取ることは困難で、ど
うしても、厚みのばらつきが生じ、そのために、特性の
ばらつきを招いてしまう。For example, in order to realize energy confinement with a PT plate having a thickness of 0.4 mm, the thickness of the electrode portion should be 0.3 m.
Although the thickness must be about m, it is difficult to accurately scrape off the central portion of the plate which will be the electrode portion by 0.1 mm, and inevitably the thickness will vary, resulting in variation in characteristics.
【００１２】また、加工によって、ＰＴ板にマイクロク
ラックが生じることもあり、それによって機械的強度が
劣化する。Further, the processing may cause micro cracks in the PT plate, which deteriorates the mechanical strength.
【００１３】それゆえに、この発明の目的は、上述した
ような機械的加工を行なうことなくエネルギ閉じ込めを
可能にした、ＰＴ系磁器板を備える圧電素子およびその
製造方法を提供しようとすることである。Therefore, an object of the present invention is to provide a piezoelectric element having a PT-based porcelain plate and a method for manufacturing the same, which enables energy confinement without performing the above-described mechanical processing. ..
【００１４】[0014]
【課題を解決するための手段】この発明にかかる圧電素
子は、簡単にいえば、電極部の材料特性と無電極部の材
料特性との間に違いを設けたことを特徴としている。Briefly, the piezoelectric element according to the present invention is characterized in that a difference is provided between the material characteristic of the electrode portion and the material characteristic of the electrodeless portion.
【００１５】より詳細には、この発明は、ＰＴ系磁器板
と前記磁器板の対向する面の各一部に形成された１対の
対向する外部電極とを備える、圧電素子に向けられるも
のであって、上述した技術的課題を解決するため、前記
磁器板の、前記対向する外部電極に挟まれた部分とそれ
以外の部分との間で、コンプライアンスおよび密度の少
なくとも一方に関して互いに異ならされていることを特
徴としている。More specifically, the present invention is directed to a piezoelectric element having a PT-based porcelain plate and a pair of opposing external electrodes formed on respective parts of opposing faces of the porcelain plate. Therefore, in order to solve the above-mentioned technical problem, the porcelain plate is made different from each other in at least one of compliance and density between a portion sandwiched between the facing external electrodes and another portion. It is characterized by
【００１６】この発明によれば、また、上述したような
圧電素子を製造するための方法が提供される。この発明
にかかる製造方法は、ＰＴ系磁器板を用意するステップ
と、ＰＴ系磁器のコンプライアンスおよび密度の少なく
とも一方を熱拡散により変化させ得る元素および導電性
金属を含むペーストを用意するステップと、前記磁器板
の対向する面の各一部に前記ペーストを付与するステッ
プと、前記ペーストが付与された前記磁器板を熱処理す
るステップとを備えている。According to the present invention, there is also provided a method for manufacturing the piezoelectric element as described above. The manufacturing method according to the present invention comprises a step of preparing a PT-based ceramic plate, a step of preparing a paste containing an element and a conductive metal capable of changing at least one of compliance and density of the PT-based ceramic by thermal diffusion, The method comprises the steps of applying the paste to each part of the facing surface of the porcelain plate, and heat-treating the porcelain plate to which the paste has been applied.
【００１７】[0017]
【作用】この発明によれば、磁器板の、対向する外部電
極に挟まれた部分とそれ以外の部分との間に、コンプラ
イアンスまたは密度のような材料特性の差を与えること
によって、厚み縦振動基本波のエネルギ閉じ込めが可能
とされる。According to the present invention, a thickness longitudinal vibration is provided by providing a difference in material properties such as compliance or density between a portion of a porcelain plate sandwiched between opposed external electrodes and the other portion. Energy confinement of the fundamental wave is possible.
【００１８】[0018]
【発明の効果】したがって、この発明によれば、ＰＴ系
磁器板に対して機械的加工を施すことなく、エネルギ閉
じ込めが可能となるので、このような機械的加工に伴う
問題点、すなわち、精度および強度に関する問題が解決
され、それゆえに、特性のばらつきがなく、強度の劣化
にも遭遇しない、ＰＴ系磁器板を備える厚み縦振動基本
波のエネルギ閉じ込めが可能な圧電素子を得ることがで
きる。As described above, according to the present invention, energy can be confined without performing mechanical processing on the PT-based porcelain plate. Therefore, there is a problem with such mechanical processing, that is, accuracy. Therefore, it is possible to obtain a piezoelectric element including a PT-based porcelain plate capable of confining energy of a longitudinal longitudinal vibration fundamental wave, in which the problems relating to the strength and the strength are solved, and there is no variation in characteristics and no deterioration in strength is encountered.
【００１９】また、この発明にかかる圧電素子の製造方
法によれば、外部電極を与える導電性金属に加えて、Ｐ
Ｔ系磁器のコンプライアンスおよび密度の少なくとも一
方を熱拡散により変化させ得る元素が含まれたペースト
を用い、このペーストを磁器板に付与して、熱処理する
ので、外部電極の形成と同時に、磁器板の所望の部分に
コンプライアンスおよび密度の少なくとも一方が異なら
された領域を形成することができる。According to the method of manufacturing a piezoelectric element of the present invention, in addition to the conductive metal that provides the external electrode, P
Since a paste containing an element capable of changing at least one of compliance and density of T-based porcelain by thermal diffusion is used and this paste is applied to a porcelain plate and heat-treated, at the same time when the external electrode is formed, Regions of differing compliance and / or density can be formed in desired portions.
【００２０】[0020]
【実施例】図１は、この発明の一実施例による圧電素子
１０を示す断面図であり、図２は、図１に示した圧電素
子１０の平面図である。1 is a sectional view showing a piezoelectric element 10 according to an embodiment of the present invention, and FIG. 2 is a plan view of the piezoelectric element 10 shown in FIG.
【００２１】圧電素子１０は、ＰＴ系磁器板１１を備え
る。磁器板１１の対向する面の各一部には、１対の対向
する外部電極１２および１３が形成される。The piezoelectric element 10 has a PT type porcelain plate 11. A pair of opposing external electrodes 12 and 13 is formed on each part of the opposing surfaces of the porcelain plate 11.
【００２２】磁器板１１の、対向する外部電極１２およ
び１３に挟まれた部分すなわち電極部１４は、それ以外
の部分すなわち無電極部１５に対して、コンプライアン
スおよび密度の少なくとも一方が異ならされている。The portion of the porcelain plate 11 sandwiched between the opposing external electrodes 12 and 13, that is, the electrode portion 14, is different from the other portion, that is, the electrodeless portion 15 in at least one of compliance and density. ..
【００２３】ＰＴ系磁器において、上述したように、コ
ンプライアンスおよび密度の少なくとも一方を異ならせ
ることは、ＰＴ系磁器の組成を変えることによって可能
である。このことを確認するため、ＰＴ系材料にＣａＣ
Ｏ3 を添加したものについて、コンプライアンスおよび
密度を測定してみた。すなわち、０．９９（０．９６Ｐ
ｂＴｉＯ3 ＋０．０４Ｌａ2 / 3 ＯＴｉＯ3 ）＋０．０
１ＭｎＯ2 ＋ＸＣａＣＯ3の組成を有し、上記組成にお
けるＸを０．００、０．０１、０．０３、０．０５とい
うように変えたＰＴ系磁器の各々について、コンプライ
アンスおよび密度を測定した。その結果が、以下の表１
に示されている。In the PT-based porcelain, as described above, it is possible to change at least one of compliance and density by changing the composition of the PT-based porcelain. In order to confirm this, we have added CaC to the PT-based material.
The compliance and the density of the sample to which O 3 was added were measured. That is, 0.99 (0.96P
bTiO 3 + 0.04La 2/3 OTiO 3 ) +0.0
Compliance and density were measured for each of the PT-based porcelains having a composition of 1MnO 2 + XCaCO 3 and changing X in the above composition to 0.00, 0.01, 0.03, 0.05. The results are shown in Table 1 below.
Is shown in.
【００２４】[0024]
【表１】 表１から、ＣａＣＯ3 の添加および添加量の増加に
より、コンプライアンスおよび密度が変わることがわか
る。[Table 1] It can be seen from Table 1 that the compliance and the density are changed by the addition of CaCO 3 and the increase of the addition amount.
【００２５】次に、この発明に従って行なった、図１お
よび図２に示すような圧電素子１０を得るための実験例
について記載する。Next, an experimental example for obtaining the piezoelectric element 10 as shown in FIGS. 1 and 2 according to the present invention will be described.
【００２６】素原料として、Ｐｂ3 Ｏ4 、Ｌａ2 Ｏ3 、
ＴｉＯ2 、およびＭｎＯ2 を用意し、これらが、０．９
９（０．９６ＰｂＴｉＯ3 ＋０．０４Ｌａ2 / 3 ＯＴｉ
Ｏ3 ）＋０．０１ＭｎＯ2 （以下「ＰＴ系」という）の
割合になるように秤量した。As raw materials, Pb 3 O 4 , La 2 O 3 ,
TiO 2 and MnO 2 are prepared, and these are 0.9
9 (0.96PbTiO 3 + 0.04La 2/3 OTi
O 3 ) + 0.01MnO 2 (hereinafter referred to as “PT system”) was weighed so as to have a ratio.
【００２７】次に、この素原料を湿式ボールミルで混合
した後、乾燥し、得られた素原料乾燥粉末を、空気中に
おいて、８００℃で２時間仮焼し、ＰＴ系粉末を得た。Next, this raw material was mixed in a wet ball mill and then dried, and the obtained raw material dried powder was calcined in air at 800 ° C. for 2 hours to obtain a PT-based powder.
【００２８】得られた粉末に、バインダ（ポリ酢酸ビニ
ル系）の固着を行なった後、乾式プレス機を用い、面圧
２ｔ／ｃｍ2 の圧力で、寸法１０×１０×１［ｍｍ3 ］
の成形体を作製した。After the binder (polyvinyl acetate type) is fixed to the obtained powder, a dry press machine is used to measure a surface pressure of 2 t / cm 2 and a size of 10 × 10 × 1 [mm 3 ].
The molded body of was produced.
【００２９】得られた形成体を、空気中において、４０
０℃で熱処理することにより、その有機成分を燃焼させ
た後、空気中において、１１５０℃で２時間焼成し、Ｐ
Ｔ系焼結体を得た。The obtained green body is placed in air at 40
After the organic component is burnt by heat treatment at 0 ° C., it is baked in air at 1150 ° C. for 2 hours, and P
A T-based sintered body was obtained.
【００３０】得られた焼結体を、研磨およびカットする
ことにより、寸法５×５×０．４［ｍｍ3 ］の試料を得
た。The obtained sintered body was polished and cut to obtain a sample having dimensions of 5 × 5 × 0.4 [mm 3 ].
【００３１】他方、ＣａＣＯ3 をＡｇ粉末と混合し、こ
れにワニス、有機溶剤およびガラスフリットを添加する
ことにより、ペーストを得た。On the other hand, CaCO 3 was mixed with Ag powder, and a varnish, an organic solvent and a glass frit were added thereto to obtain a paste.
【００３２】得られたペーストを用いて、図１および図
２に示すように、前述したＰＴ系試料の表裏に外部電極
を印刷により形成した。External electrodes were formed on the front and back surfaces of the above-mentioned PT-based sample by printing using the obtained paste as shown in FIGS. 1 and 2.
【００３３】次いで、この試料を、空気中において、８
５０℃で１時間熱処理することにより、外部電極の焼付
を行ない、同時に、ペースト中のＣａＣＯ3をＰＴ系磁
器中に熱拡散させた。Then, this sample was placed in air for 8 hours.
The external electrode was baked by heat treatment at 50 ° C. for 1 hour, and at the same time, CaCO 3 in the paste was thermally diffused into the PT-based porcelain.
【００３４】この熱拡散の状態を確認するため、得られ
た試料のいくつかについて、研磨によって外部電極を削
り落とし、さらに厚みの半分まで削った試料を作製し、
研磨面での元素分析を行なった。図３に、Ｃａの線分析
結果が示されている。図３から、図１に示した電極部１
４において、Ｃａ濃度が高められていることがわかる。In order to confirm the state of thermal diffusion, some of the obtained samples were shaved to remove the external electrodes, and samples were shaved to half the thickness.
Elemental analysis was performed on the polished surface. The line analysis result of Ca is shown in FIG. From FIG. 3, the electrode unit 1 shown in FIG.
It can be seen that in No. 4, the Ca concentration is increased.
【００３５】他方、上述の元素分析に供しなかった試料
に対して、温度６０℃の絶縁油中で５ｋＶの電圧を印加
することにより、分極処理を行なった。On the other hand, the sample which was not subjected to the above elemental analysis was subjected to polarization treatment by applying a voltage of 5 kV in insulating oil at a temperature of 60 ° C.
【００３６】また、ＣａＣＯ3 を含まないペーストを用
いて外部電極を形成したことを除いて、上述の本発明品
を得たのと同様の操作を行ない、比較品となる試料も用
意した。Further, a sample to be used as a comparative product was prepared by performing the same operation as that for obtaining the above-mentioned product of the present invention, except that the external electrode was formed by using a paste containing no CaCO 3 .
【００３７】本発明品および比較品のそれぞれについ
て、厚み縦振動基本波モードにおけるインピーダンスの
周波数特性を測定し、その結果を図４に示した。図４か
らわかるように、本発明品では、エネルギ閉じ込めが実
現されており、スプリアスのない振動特性が得られてい
る。The frequency characteristics of the impedance in the thickness longitudinal vibration fundamental wave mode were measured for each of the product of the present invention and the comparative product, and the results are shown in FIG. As can be seen from FIG. 4, in the product of the present invention, energy confinement is realized, and vibration characteristics free of spurious are obtained.
【００３８】なお、上述した実験例では、ＰＴ系磁器の
コンプライアンスおよび密度の少なくとも一方を熱拡散
により変化させ得る元素として、Ｃａを用い、その炭酸
塩であるＣａＣＯ3 をペースト中に含有させたが、これ
に代えて、たとえば、ＭｎＯ 2 、Ｌａ2 Ｏ3 、Ｓｉ
Ｏ2 、Ｂｉ2 Ｏ3 等の金属酸化物を用いても、他の金属
の炭酸塩を用いてもよい。In the above-mentioned experimental example, the PT type porcelain
Thermal diffusion of compliance and / or density
Is used as an element that can be changed by
CaCO which is salt3Was included in the paste.
Instead of, for example, MnO 2, La2O3, Si
O2, Bi2O3Even when using metal oxides such as
You may use the carbonate of.
【図１】この発明の一実施例による圧電素子１０を示す
断面図である。FIG. 1 is a sectional view showing a piezoelectric element 10 according to an embodiment of the present invention.
【図２】図１に示した圧電素子１０の平面図である。FIG. 2 is a plan view of the piezoelectric element 10 shown in FIG.
【図３】この発明に従って実施した実験例において得ら
れたＰＴ系磁器中のＣａ濃度の線分析結果を示す図であ
る。FIG. 3 is a diagram showing a line analysis result of Ca concentration in a PT-based porcelain obtained in an experimental example carried out according to the present invention.
【図４】本発明品および比較品の厚み縦振動基本波モー
ドにおけるインピーダンスの周波数特性を示す図であ
る。FIG. 4 is a diagram showing frequency characteristics of impedance in the thickness longitudinal vibration fundamental wave mode of the product of the present invention and the comparative product.
【図５】ＰＴの厚み縦振動基本波の分散曲線を示す図で
ある。FIG. 5 is a diagram showing a dispersion curve of a thickness longitudinal vibration fundamental wave of PT.
【図６】従来のエネルギ閉じ込めが可能とされた圧電素
子に含まれるＰＴ板１を示す斜視図である。FIG. 6 is a perspective view showing a PT plate 1 included in a conventional piezoelectric element capable of trapping energy.
【図７】図６に示したＰＴ板１を用いて構成された圧電
素子の断面図である。7 is a cross-sectional view of a piezoelectric element configured using the PT plate 1 shown in FIG.
１０ 圧電素子 １１ ＰＴ系磁器板 １２，１３ 外部電極 １４ 電極部 １５ 無電極部 10 Piezoelectric element 11 PT type porcelain plate 12, 13 External electrode 14 Electrode part 15 No electrode part
───────────────────────────────────────────────────── フロントページの続き (72)発明者 鷹木 洋 京都府長岡京市天神二丁目26番10号 株式 会社村田製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hiroshi Takagi 2-26-10 Tenjin Tenjin, Nagaokakyo City, Kyoto Prefecture Murata Manufacturing Co., Ltd.
Claims (2)
向する面の各一部に形成された１対の対向する外部電極
とを備える、圧電素子において、 前記磁器板の、前記対向する外部電極に挟まれた部分と
それ以外の部分との間で、コンプライアンスおよび密度
の少なくとも一方に関して互いに異ならされていること
を特徴とする、圧電素子。1. A piezoelectric element, comprising: a lead titanate-based porcelain plate; and a pair of opposing external electrodes formed on each part of opposing faces of the porcelain plate. The piezoelectric element is characterized in that the portion sandwiched by the external electrodes and the other portion are different from each other in at least one of compliance and density.
くとも一方を熱拡散により変化させ得る元素および導電
性金属を含むペーストを用意し、 前記磁器板の対向する面の各一部に前記ペーストを付与
し、 前記ペーストが付与された前記磁器板を熱処理する、 各ステップを備える、圧電素子の製造方法。2. A lead titanate-based porcelain plate is prepared, and a paste containing an element and a conductive metal capable of changing at least one of compliance and density of the lead titanate-based porcelain by thermal diffusion is prepared. A method for manufacturing a piezoelectric element, comprising: applying the paste to a part of each of the facing surfaces and heat-treating the porcelain plate to which the paste is applied.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15362491A JP3639994B2 (en) | 1991-06-26 | 1991-06-26 | Energy confinement type piezoelectric vibrator of thickness longitudinal vibration fundamental wave and manufacturing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15362491A JP3639994B2 (en) | 1991-06-26 | 1991-06-26 | Energy confinement type piezoelectric vibrator of thickness longitudinal vibration fundamental wave and manufacturing method thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0548378A true JPH0548378A (en) | 1993-02-26 |
| JP3639994B2 JP3639994B2 (en) | 2005-04-20 |
Family
ID=15566568
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15362491A Expired - Lifetime JP3639994B2 (en) | 1991-06-26 | 1991-06-26 | Energy confinement type piezoelectric vibrator of thickness longitudinal vibration fundamental wave and manufacturing method thereof |
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| Country | Link |
|---|---|
| JP (1) | JP3639994B2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7999192B2 (en) | 2007-03-14 | 2011-08-16 | Amphenol Corporation | Adjacent plated through holes with staggered couplings for crosstalk reduction in high speed printed circuit boards |
-
1991
- 1991-06-26 JP JP15362491A patent/JP3639994B2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7999192B2 (en) | 2007-03-14 | 2011-08-16 | Amphenol Corporation | Adjacent plated through holes with staggered couplings for crosstalk reduction in high speed printed circuit boards |
| US8481866B2 (en) | 2007-03-14 | 2013-07-09 | Amphenol Corporation | Adjacent plated through holes with staggered couplings for crosstalk reduction in high speed printed circuit boards |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3639994B2 (en) | 2005-04-20 |
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