JPH05228792A - Temperature compensating device for machine tool - Google Patents
Temperature compensating device for machine toolInfo
- Publication number
- JPH05228792A JPH05228792A JP2527892A JP2527892A JPH05228792A JP H05228792 A JPH05228792 A JP H05228792A JP 2527892 A JP2527892 A JP 2527892A JP 2527892 A JP2527892 A JP 2527892A JP H05228792 A JPH05228792 A JP H05228792A
- Authority
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- Prior art keywords
- interruption
- temperature
- time
- machine tool
- working operation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Automatic Control Of Machine Tools (AREA)
Abstract
Description
【0001】[0001]
【産業上の利用分野】本発明は工作機械に関し、特に加
工運転中断による影響を回避する技術に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a machine tool, and more particularly to a technique for avoiding the influence of interruption of machining operation.
【0002】[0002]
【従来の技術】旋盤等の工作機械は、ベッドに主軸台と
工具台とを取り付けており、主軸台の主軸で保持された
ワークに対し、工具台に保持される刃具をボールネジ・
ナット機構等により移送させつつ加工を行っている。と
ころで、このような工作機械においては、ワークの加工
動作中に切粉の除去や刃具の交換のために加工動作を中
断しなければならないことがある。2. Description of the Related Art A machine tool such as a lathe has a headstock and a tool base mounted on a bed, and a tool held by the headstock is mounted on a ball screw and a tool held by the tool base.
Processing is carried out while being transferred by a nut mechanism or the like. By the way, in such a machine tool, the machining operation may have to be interrupted during the machining operation of the workpiece in order to remove chips and replace the cutting tool.
【0003】この場合、作業後にそのまま加工動作を再
開すると、加工動作の中断中に主軸台や工具台が冷却さ
れているため、これら各部の熱変形により加工寸法精度
の誤差が生じる。In this case, if the machining operation is resumed as it is after the work, since the spindle stock and the tool base are cooled during the interruption of the machining operation, the thermal deformation of these parts causes an error in the machining dimensional accuracy.
【0004】[0004]
【発明が解決しようとする課題】このため、運転停止後
に慣らし運転 (非加工状態での運転) を行い、飽和温度
に達してから加工運転を再開することが通常行われる
が、中断時間が長引いた場合には飽和温度に戻すのに時
間がかかる。加工時と同一速度で慣らし運転した場合、
中断時間と略同一の時間慣らし運転をする必要がある。For this reason, it is usual to carry out a running-in operation (operation in a non-processing state) after the operation is stopped, and restart the processing operation after reaching the saturation temperature, but the interruption time is prolonged. If it does, it takes time to return to the saturation temperature. When running in at the same speed as when machining,
It is necessary to run in for approximately the same time as the interruption time.
【0005】ヒーター等の加熱手段を工作機械に内装し
て加熱してから加工運転を再開させる等の方式も考えら
れるが、コスト高につき、また運転時と同様の発熱分布
特性を得ることが難しいので良好に補正することが難し
い。本発明は、このような従来の問題点に鑑みなされた
もので、特別な加熱手段を追加することなく良好な温度
補償機能が得られ、以て、短時間で加工運転を再開でき
るようにした工作機械の温度補償装置を提供することを
目的とする。A method in which a heating means such as a heater is installed in a machine tool to heat the machine tool and then the machining operation is restarted is conceivable, but it is costly and it is difficult to obtain a heat generation distribution characteristic similar to that during operation. Therefore, it is difficult to correct it well. The present invention has been made in view of such conventional problems, and a good temperature compensation function can be obtained without adding a special heating means, so that the machining operation can be restarted in a short time. An object is to provide a temperature compensation device for a machine tool.
【0006】[0006]
【課題を解決するための手段】このため、本発明に係る
工作機械の温度補償装置は、図1に実線で示すように、
工作機械の加工運転の中断を検出する中断検出手段と、
該加工運転の中断時間を計測する計時手段と、中断後に
前記計時手段で検出された中断時間に応じて設定された
時間だけ非加工状態で高速運転させ、発生摩擦熱により
駆動部の温度を加工運転中断前の温度付近まで立ち上げ
た後、加工運転を再開させる制御手段と、を含んで構成
した。Therefore, the temperature compensating device for a machine tool according to the present invention, as shown by the solid line in FIG.
Interruption detecting means for detecting interruption of machining operation of the machine tool,
A time measuring means for measuring the interruption time of the machining operation and a high speed operation in a non-machining state for a time set according to the interruption time detected by the time measuring means after the interruption, and the temperature of the driving part is processed by the generated friction heat. The control means restarts the processing operation after the temperature is raised to near the temperature before the operation was interrupted.
【0007】また、図1に鎖線で示すように、工作機械
周辺の環境温度を検出する手段を含み、前記制御手段で
設定される時間を該環境温度に応じて補正すると、より
好ましい。Further, as shown by a chain line in FIG. 1, it is more preferable to include means for detecting the ambient temperature around the machine tool, and to correct the time set by the control means according to the ambient temperature.
【0008】[0008]
【作用】工作機械の加工運転を中断すると、駆動部は冷
却されて温度が低下し熱収縮する。該中断中の温度の低
下量は中断時間に依存し、一方、中断後の高速慣らし運
転での発熱による温度上昇量も運転時間に依存する。そ
こで、中断後の高速慣らし運転により上昇する駆動部の
温度が中断前の温度付近に達するまでの運転時間を、中
断時間に対応して求めることができる。When the machining operation of the machine tool is interrupted, the drive unit is cooled, its temperature is lowered, and heat shrinks. The amount of temperature decrease during the interruption depends on the interruption time, while the amount of temperature increase due to heat generation in the high-speed break-in operation after the interruption also depends on the operation time. Therefore, the operation time until the temperature of the drive unit, which rises due to the high-speed break-in operation after the interruption, reaches near the temperature before the interruption can be obtained corresponding to the interruption time.
【0009】したがって、中断後計時手段で検出された
中断時間に応じて設定された時間だけ高速で慣らし運転
することにより、駆動部の温度を中断前の温度付近まで
立ち上げることができるので、中断前と同等の平衡した
温度条件で加工運転を再開することができ、寸法精度の
誤差を抑制できる。また、正確には中断中の温度低下量
は、工作機械周辺の環境温度にも多少影響されるので、
該環境温度により補正して高速運転の慣らし運転時間を
設定すれば、寸法精度の誤差をより減少できる。Therefore, the temperature of the drive unit can be raised to near the temperature before the interruption by performing a break-in operation at a high speed for a time set according to the interruption time detected by the time measuring means after the interruption. The machining operation can be restarted under the same equilibrium temperature conditions as before, and the error in dimensional accuracy can be suppressed. Also, to be precise, the amount of temperature decrease during interruption is somewhat affected by the environmental temperature around the machine tool, so
By correcting the environmental temperature and setting the running-in time for high-speed operation, the error in dimensional accuracy can be further reduced.
【0010】[0010]
【実施例】以下に本発明の実施例を説明する。図2にお
いて、工作機械 (旋盤) 1のベッド2上には、一端部に
主軸台3が支持されている。該主軸台3は、先端にワー
クWを保持するチャック4を備えた主軸5と、該主軸5
を回転駆動するモータ6と、チャック4の開閉用の油圧
シリンダ (図示せず) 等を備えて構成されている。EXAMPLES Examples of the present invention will be described below. In FIG. 2, a headstock 3 is supported at one end on a bed 2 of a machine tool (lathe) 1. The spindle headstock 3 includes a spindle 5 having a chuck 4 for holding a work W at its tip, and the spindle 5
And a hydraulic cylinder (not shown) for opening and closing the chuck 4, and the like.
【0011】また、ベッド2上の前記主軸台3と反対側
には、工具台7が支持されている。該工具台7は、ベッ
ド2に対し主軸5の軸線と平行なZ軸方向に摺動自由な
Z軸スライド8と、Z軸スライド8上にZ軸方向と直角
なX軸方向 (紙面の表裏方向) に摺動自由に保持された
X軸スライド9と、X軸スライド9上に支持され、刃物
10を保持する刃物台11等を備えて構成されている。前記
Z軸スライド8は、Z軸サーボモータ12及びZ軸ボール
ネジ・ナット機構13を介してZ軸方向へ駆動され、、該
X軸スライド9もX軸サーボモータ及びX軸ボールネジ
・ナット機構 (いずれも図示せず) を介してX軸方向へ
駆動される。A tool base 7 is supported on the bed 2 on the side opposite to the headstock 3. The tool base 7 includes a Z-axis slide 8 that is slidable in the Z-axis direction parallel to the axis of the main shaft 5 with respect to the bed 2, and an X-axis direction (on the front and back sides of the paper) perpendicular to the Z-axis slide 8 on the Z-axis slide 8. Direction) and an X-axis slide 9 held slidably in
A tool rest 11 for holding 10 is provided. The Z-axis slide 8 is driven in the Z-axis direction via a Z-axis servo motor 12 and a Z-axis ball screw / nut mechanism 13, and the X-axis slide 9 also has an X-axis servo motor and an X-axis ball screw / nut mechanism (any one). (Not shown), and is driven in the X-axis direction.
【0012】前記主軸5、Z軸スライド8、X軸スライ
ド9は夫々制御装置14からのNCプログラムに応じた制
御信号により駆動され、X軸方向及びZ軸方向の位置を
制御しつつ刃物10を移動し、該刃物10でワークWを所定
形状に切削加工するようになっている。また、前記各部
の駆動用モータは、夫々設定範囲内で駆動速度を可変に
制御でき、例えば、刃物10は通常の加工運転時の速度に
対し、非加工時には高速で移動できるようになってい
る。The spindle 5, the Z-axis slide 8 and the X-axis slide 9 are driven by control signals according to NC programs from the control unit 14, respectively, and the blade 10 is controlled while controlling the positions in the X-axis direction and the Z-axis direction. It moves so as to cut the workpiece W into a predetermined shape by the blade 10. Further, the drive motors of the respective parts can control the drive speed variably within a set range, for example, the blade 10 can move at a high speed during non-machining as compared to the speed during normal machining operation. ..
【0013】次に本発明に係る部分を説明する。前記制
御装置14内に、前記NC制御部に加えて加工運転中断に
対処した温度補償制御部が設けられる。図3は該温度補
償制御部の制御ブロック図を示したものである。パワー
スイッチ21からのON,OFF信号がマイクロコンピュ
ータ等で構成される制御回路22に入力され、該制御回路
22は連続加工運転が中断されると該中断時間を計測する
計時手段としてのタイマ23を備えている。一方、工作機
械1の外壁に環境温度を検出する温度検出手段としての
温度センサ24が設けられ、該温度センサ24で検出された
温度信号も前記制御回路22に入力され、後述する温度補
正が行われる。Next, the part according to the present invention will be described. In addition to the NC control unit, a temperature compensation control unit that copes with interruption of machining operation is provided in the control device 14. FIG. 3 is a control block diagram of the temperature compensation controller. The ON and OFF signals from the power switch 21 are input to the control circuit 22 including a microcomputer and the like.
22 is provided with a timer 23 as a time measuring means for measuring the interruption time when the continuous machining operation is interrupted. On the other hand, a temperature sensor 24 as temperature detecting means for detecting the environmental temperature is provided on the outer wall of the machine tool 1, and the temperature signal detected by the temperature sensor 24 is also input to the control circuit 22 to perform the temperature correction described later. Be seen.
【0014】制御回路22には、ROM25等の記憶部に工
作機械1の加工運転の中断時間に対し中断後に行われる
高速慣らし運転時間がマップで記憶されている。ここ
で、中断時間と、それに対応する高速慣らし運転時間と
の関係は、次のようにして設定されている。まず、ワー
クの種類別 (加工別も含む) に、該ワークを連続して加
工した後に中断する場合の主軸5部及び工具台4部の温
度と熱変位の状態を調べ、特性曲線を求めておく (図4
のO−A−B−C) 。ここで、連続加工状態とは加工運
転により発熱して温度上昇し、飽和温度に達して平衡状
態にあるときである。飽和温度はワークの種類により加
工負荷が異なるため異なる。例えば、硬いワークは加工
負荷が大きいため、摩擦による発熱量が大きく、その結
果飽和温度も高くなる。したがって、ワークの種類によ
り中断時間に対する熱変位も相違する。In the control circuit 22, a storage unit such as a ROM 25 stores a map of a high-speed break-in operation time performed after the interruption of the machining operation of the machine tool 1 after the interruption. Here, the relationship between the interruption time and the corresponding high-speed break-in operation time is set as follows. First, for each type of work (including machining), check the temperature and thermal displacement of the spindle 5 and tool rest 4 when the workpiece is continuously machined and then interrupted, and obtain the characteristic curve. Put (Figure 4
O-A-B-C). Here, the continuous processing state is a state in which heat is generated due to the processing operation, the temperature rises, the saturation temperature is reached, and the machine is in an equilibrium state. The saturation temperature differs depending on the type of work because the processing load varies. For example, a hard work has a large processing load, so that the amount of heat generated by friction is large, resulting in a high saturation temperature. Therefore, the thermal displacement with respect to the interruption time also differs depending on the type of work.
【0015】次に、中断後の高速慣らし運転による温度
上昇に伴う熱変位の状態を調べ、特性曲線を求めてお
く。ここで、図5に示すように各中断終了時点C1 〜C
N から高速慣らし運転を開始して中断前の温度付近 (D
1 〜DN ) に戻すときの運転時間と熱変位の特性は、中
断時間の長短に関わらず略直線と見做すことができ、ま
た、その勾配も略一定と考えられる。Next, the state of thermal displacement due to the temperature rise due to the high-speed running-in operation after the interruption is examined to obtain the characteristic curve. Here, as shown in FIG. 5, each interruption end time point C 1 to C
The high-speed break-in operation is started from N and the temperature around
The characteristics of the operating time and the thermal displacement when returning to 1 to DN ) can be regarded as a substantially straight line regardless of the length of the interruption time, and the slope thereof is also considered to be substantially constant.
【0016】したがって、中断終了時の熱変位と、高速
慣らし運転の運転時間との関係を求めておき、中断時間
をパラメータとして高速慣らし運転の運転時間を設定
し、ROM等に記憶しておく。次に、前記温度補償制御
部による温度補償制御を含む加工制御動作を、図6に示
したフローチャートに従って説明する。Therefore, the relationship between the thermal displacement at the end of the interruption and the operating time of the high-speed running-in operation is obtained, and the operating time of the high-speed running-in operation is set using the interruption time as a parameter and stored in the ROM or the like. Next, the processing control operation including the temperature compensation control by the temperature compensation control unit will be described with reference to the flowchart shown in FIG.
【0017】ステップ (図ではSと記す。以下同様) 1
では、工作機械1のパワースイッチ21をONとして慣ら
し運転を行い、工作機械1の各駆動部の温度を飽和温度
まで立ち上げる (図4のO−A間) 。ステップ2では、
慣らし運転が完了したか否かを飽和温度に達したか否か
で判定し、達したと判定された後、ステップ3へ進む。Step (denoted by S in the figure. The same applies hereinafter) 1
Then, the power switch 21 of the machine tool 1 is turned on to perform a break-in operation, and the temperature of each drive unit of the machine tool 1 is raised to the saturation temperature (between OA in FIG. 4). In step 2,
Whether or not the break-in operation has been completed is determined by whether or not the saturation temperature has been reached. After it is determined that the saturation temperature has been reached, the routine proceeds to step 3.
【0018】ステップ3では、NC制御部で設定される
加工プログラムに従って、ワークWの加工運転を開始す
る。ステップ4では、ワークWの加工運転が中断された
か否かをパワースイッチ21がOFFされたか否かにより
判定する。このステップ4の機能が中断検出手段に相当
する。In step 3, the machining operation of the work W is started according to the machining program set by the NC control section. In step 4, it is determined whether or not the machining operation of the work W is interrupted by whether or not the power switch 21 is turned off. The function of step 4 corresponds to the interruption detecting means.
【0019】ステップ4で中断されたと判定されたとき
は、ステップ5で前記タイマ23を起動させ、中断時間の
計測を開始する。ステップ6では中断が終了したか否か
を、パワースイッチ21がONされたか否かにより判定す
る。ステップ6で中断が終了したと判定されたときは、
ステップ7以降へ進み、高速慣らし運転プログラムを開
始する。When it is determined in step 4 that the interruption has been performed, the timer 23 is activated in step 5 to start measuring the interruption time. In step 6, it is determined whether or not the interruption is completed, depending on whether or not the power switch 21 is turned on. If it is determined in step 6 that the interruption has ended,
Proceed to step 7 and subsequent steps to start the high-speed break-in program.
【0020】ステップ7では、タイマ23により計測され
た中断時間t1 と温度センサ24により検出される環境温
度T及びNCプログラムから現在加工中のワークWの種
類を読み込む。ステップ8では、前記中断時間tに基づ
いてROMに記憶されたワークW別の高速慣らし運転時
間の設定マップから、主軸5駆動用モータ6及びZ軸用
サーボモータ12の高速慣らし運転の基本運転時間t02を
検索し、該基本運転時間t02に前記環境温度による温度
補正係数を乗じて最終的な高速慣らし運転時間t2 を設
定する。In step 7, the type of the workpiece W currently being machined is read from the interruption time t 1 measured by the timer 23, the environmental temperature T detected by the temperature sensor 24, and the NC program. In step 8, from the setting map of the high-speed run-in operation time for each work W stored in the ROM based on the interruption time t, the basic operation time of the high-speed run-in operation of the spindle 5 drive motor 6 and the Z-axis servomotor 12 is performed. Then, t 02 is searched for, and the final high-speed running-in time t 2 is set by multiplying the basic operation time t 02 by the temperature correction coefficient based on the ambient temperature.
【0021】ステップ9では、主軸5駆動用モータ及び
Z軸用サーボモータ12を高速で慣らし運転する。尚、Z
軸用サーボモータ12については、Z軸スライド8の移動
範囲が限られているので、所定範囲内で往復動させるよ
うに所定周期で反転駆動させる。ステップ10では、各モ
ータについて、高速慣らし運転の設定時間t2 を経過し
たか否かを判定し、経過した時は夫々モータの駆動を加
工運転時の速度まで落として慣らし運転する。以上ステ
ップ6〜ステップ10の機能が、制御手段に相当する。In step 9, the main shaft 5 drive motor and the Z-axis servomotor 12 are run-in at high speed. Incidentally, Z
Since the Z-axis slide 8 has a limited movement range, the axis servo motor 12 is reversely driven at a predetermined cycle so as to reciprocate within the predetermined range. In step 10, for each motor, it is determined whether or not the set time t 2 for the high-speed run-in operation has elapsed, and when the set time t 2 has passed, the drive of each motor is reduced to the speed during the machining operation and the run-in operation is performed. The functions of steps 6 to 10 described above correspond to the control means.
【0022】ステップ11では、中断後の加工プログラム
を読み込み、加工運転を再開する。かかる構成とすれ
ば、加工運転の中断時間が長引いた場合でも、高速慣ら
し運転により短時間で各駆動部の温度を中断前の温度付
近まで上昇させ、熱変位を安定させた状態で寸法誤差の
発生を抑制しつつ加工運転を再開することができる。
尚、本実施例では主軸回転用とZ軸方向スライド用のモ
ータとを高速慣らし運転するものを示したが、簡易的に
は一方のモータのみを駆動する構成としてもよく、逆
に、その他X軸方向スライド用のモータをも駆動する構
成とすることもできる。In step 11, the machining program after the interruption is read and the machining operation is restarted. With this configuration, even if the interruption time of the machining operation is prolonged, the temperature of each drive section is raised to near the temperature before the interruption in a short time by the high-speed break-in operation, and the dimensional error of the thermal displacement is stabilized. The machining operation can be restarted while suppressing the occurrence.
In this embodiment, the motor for rotating the main shaft and the motor for sliding the Z-axis are acclimated at a high speed. However, for simplicity, only one of the motors may be driven. It may be configured to drive a motor for axial sliding.
【0023】また、高速慣らし運転による温度上昇のオ
ーバーシュートを抑制するため、終了付近で少し速度低
下させるような高精度な制御を行うこともできる。Further, in order to suppress the overshoot of the temperature rise due to the high-speed break-in operation, it is possible to perform a highly accurate control such that the speed is slightly reduced near the end.
【0024】[0024]
【発明の効果】以上説明したように本発明によれば、工
作機械の加工運転中断後、中断時間に応じて設定された
時間高速で慣らし運転を行い、中断前の温度付近まで立
ち上げた後、加工運転を再開する構成としたため、寸法
精度誤差を生じない高精度な加工運転を極めて短時間で
再開できるものであり、作業能率が向上する。As described above, according to the present invention, after the machining operation of the machine tool is interrupted, the break-in operation is performed at a high speed for a time set according to the interruption time, and after the temperature is raised to the temperature before the interruption. Since the processing operation is restarted, it is possible to restart a highly accurate processing operation that does not cause a dimensional accuracy error in an extremely short time, thus improving work efficiency.
【0025】また、環境温度による高速慣らし運転時間
の補正を行うことにより、寸法精度誤差をより解消で
き、加工精度をより高められる。Further, by correcting the high-speed running-in operation time depending on the environmental temperature, the dimensional accuracy error can be further eliminated and the processing accuracy can be further improved.
【図1】本発明に係る工作機械の温度補償装置の構成を
示すブロック図FIG. 1 is a block diagram showing the configuration of a temperature compensation device for a machine tool according to the present invention.
【図2】本発明の一実施例に係る工作機械の構成を示す
側面図FIG. 2 is a side view showing a configuration of a machine tool according to an embodiment of the present invention.
【図3】同上実施例の温度補償制御を示す制御ブロック
図FIG. 3 is a control block diagram showing temperature compensation control according to the embodiment.
【図4】同上実施例の熱変位を変化を示すタイムチャー
トFIG. 4 is a time chart showing changes in thermal displacement in the above-mentioned embodiment.
【図5】同じく中断時間と高速慣らし運転時間との関係
を示すタイムチャートFIG. 5 is a time chart showing the relationship between the interruption time and the high-speed running-in time.
【図6】同じく温度補償制御ルーチンを示すフローチャ
ートFIG. 6 is a flowchart showing a temperature compensation control routine.
1 工作機械 6 主軸駆動用のモータ 12 Z軸サーボモータ 13 Z軸ボール・ナット機構 21 パワースイッチ 22 制御回路 23 タイマ 24 温度センサ 25 ROM 1 Machine tool 6 Motor for spindle drive 12 Z-axis servo motor 13 Z-axis ball and nut mechanism 21 Power switch 22 Control circuit 23 Timer 24 Temperature sensor 25 ROM
Claims (2)
検出手段と、該加工運転の中断時間を計測する計時手段
と、中断後に前記計時手段で検出された中断時間に応じ
て設定された時間だけ非加工状態で高速運転させ、発生
摩擦熱により駆動部の温度を加工運転中断前の温度付近
まで立ち上げた後、加工運転を再開させる制御手段と、
を含んで構成したことを特徴とする工作機械の温度補償
装置。1. An interruption detecting means for detecting interruption of a machining operation of a machine tool, a timing means for measuring an interruption time of the machining operation, and a interruption time detected by the timing means after interruption. Control means for operating at high speed for a non-machining state for a period of time, and restarting the machining operation after raising the temperature of the drive unit to near the temperature before the interruption of the machining operation by the generated friction heat,
A temperature compensation device for machine tools, characterized in that
含み、前記制御手段で設定される時間は、該環境温度に
応じて補正されてなる請求項1に記載の工作機械の温度
補償装置。2. A temperature compensating device for a machine tool according to claim 1, further comprising means for detecting an environmental temperature around the machine tool, wherein the time set by the control means is corrected according to the environmental temperature. ..
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04025278A JP3094178B2 (en) | 1992-02-12 | 1992-02-12 | Machine tool temperature compensation device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP04025278A JP3094178B2 (en) | 1992-02-12 | 1992-02-12 | Machine tool temperature compensation device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH05228792A true JPH05228792A (en) | 1993-09-07 |
JP3094178B2 JP3094178B2 (en) | 2000-10-03 |
Family
ID=12161557
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP04025278A Expired - Lifetime JP3094178B2 (en) | 1992-02-12 | 1992-02-12 | Machine tool temperature compensation device |
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Country | Link |
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JP (1) | JP3094178B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009125905A (en) * | 2007-11-27 | 2009-06-11 | Nakamura Tome Precision Ind Co Ltd | Operation control method of substrate processor |
JP2010029955A (en) * | 2008-07-25 | 2010-02-12 | Shin Etsu Handotai Co Ltd | Method for resuming operation of wire saw and wire saw |
-
1992
- 1992-02-12 JP JP04025278A patent/JP3094178B2/en not_active Expired - Lifetime
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009125905A (en) * | 2007-11-27 | 2009-06-11 | Nakamura Tome Precision Ind Co Ltd | Operation control method of substrate processor |
JP2010029955A (en) * | 2008-07-25 | 2010-02-12 | Shin Etsu Handotai Co Ltd | Method for resuming operation of wire saw and wire saw |
Also Published As
Publication number | Publication date |
---|---|
JP3094178B2 (en) | 2000-10-03 |
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