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JPH05173038A - Connecting mechanism between optical waveguide and optical fiber - Google Patents

Connecting mechanism between optical waveguide and optical fiber

Info

Publication number
JPH05173038A
JPH05173038A JP34488991A JP34488991A JPH05173038A JP H05173038 A JPH05173038 A JP H05173038A JP 34488991 A JP34488991 A JP 34488991A JP 34488991 A JP34488991 A JP 34488991A JP H05173038 A JPH05173038 A JP H05173038A
Authority
JP
Japan
Prior art keywords
core
optical waveguide
optical fiber
optical
tip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP34488991A
Other languages
Japanese (ja)
Inventor
Tatsuhiko Saito
達彦 齋藤
Kazumasa Ozawa
一雅 小沢
Shinji Ishikawa
真二 石川
Masahide Saito
眞秀 齋藤
Hiroshi Suganuma
寛 菅沼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP34488991A priority Critical patent/JPH05173038A/en
Publication of JPH05173038A publication Critical patent/JPH05173038A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • G02B6/30Optical coupling means for use between fibre and thin-film device

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)
  • Mechanical Coupling Of Light Guides (AREA)

Abstract

PURPOSE:To provide a connecting mechanism between an optical waveguide and an optical fiber which can smoothly transmit light by reducing a complicated aligning work and suppressing a connection loss. CONSTITUTION:A core 40 on the abutting part of the optical waveguide 4 is recessed so as to have a cross section with an approximate recessed shape to execute aligning work. On the other hand, a core 100 on the abutting part of the optical fiber 10 is protruded so as to have a cross section with an approximate recessed shape to execute the centering work. After abutting both the cores 40, 100 with pressure from both the ends, the abutting part of a positioned coupling holder is welded by YAG without executing vertically aligning work.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は光導波路と光ファイバの
接続機構に関し、より詳しくは、相互に突き合わされる
光導波路と光ファイバの突き合わせ部の改良に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a mechanism for connecting an optical waveguide and an optical fiber, and more particularly, to an improvement in an abutting portion of an optical waveguide and an optical fiber which are butted to each other.

【0002】[0002]

【従来の技術】従来における光導波路と光ファイバの接
続は、結合用光導波路ホルダーに設けられた光導波路
と、結合用光ファイバホルダーに設けられた光ファイバ
とを一列に並べ、連接して突き合わせ、光導波路先端の
コアと、光ファイバ先端のコアとを上下左右方向に調芯
した後、突き合わせた該複数の結合用ホルダーの突き合
わせ部を溶接することにより、行われている。然して、
接続損失を抑制しつつ光を円滑に伝送するには、光導波
路先端のコアと、光ファイバ先端のコアとを上下左右方
向に調芯する調芯作業が必要不可欠であった。
2. Description of the Related Art In the conventional connection between an optical waveguide and an optical fiber, an optical waveguide provided in a coupling optical waveguide holder and an optical fiber provided in a coupling optical fiber holder are arranged in a line and are joined and abutted. This is done by aligning the core at the tip of the optical waveguide and the core at the tip of the optical fiber in the vertical and horizontal directions, and then welding the abutting portions of the abutting coupling holders. However,
In order to smoothly transmit light while suppressing the connection loss, it is necessary to perform centering work for centering the core at the tip of the optical waveguide and the core at the tip of the optical fiber in the vertical and horizontal directions.

【0003】[0003]

【発明が解決しようとする課題】従来における光導波路
と光ファイバは以上のように接続され、接続損失を抑制
しつつ光を円滑に伝送するには、光導波路先端のコア
と、光ファイバ先端のコアとを上下左右方向に調芯する
煩雑な調芯作業が必要不可欠であるので、調芯作業に多
大の労力と長時間を要さざるを得なかった。
The conventional optical waveguide and optical fiber are connected as described above, and in order to smoothly transmit light while suppressing connection loss, the core of the optical waveguide tip and the optical fiber tip are Since the complicated centering work for centering the core in the vertical and horizontal directions is indispensable, a great deal of labor and a long time have been required for the centering work.

【0004】本発明は上記に鑑みなされたもので、煩雑
な調芯作業を軽減しつつ接続損失を抑制して光を円滑に
伝送することのできる光導波路と光ファイバの接続機構
を提供することを目的としている。
The present invention has been made in view of the above circumstances, and provides a connecting mechanism for an optical waveguide and an optical fiber, which can reduce the complicated alignment work and suppress the connection loss to smoothly transmit light. It is an object.

【0005】[0005]

【課題を解決するための手段】本発明においては上述の
目的を達成するため、相互に連接される光導波路と光フ
ァイバのいずれか一方の突き合わせ部におけるコアを断
面略凹字形に凹設するとともに、他方の突き合わせ部に
おけるコアを断面略凸字形に突設し、該コアの凹凸嵌合
で光導波路と光ファイバを突き合わせ調芯することを特
徴としている。
In the present invention, in order to achieve the above-mentioned object, the core at the abutting portion of either one of the optical waveguide and the optical fiber connected to each other is provided with a concave shape in cross section. It is characterized in that the core at the other butting portion is provided so as to project in a substantially convex shape in cross section, and the optical waveguide and the optical fiber are butted and aligned by the concave and convex fitting of the core.

【0006】[0006]

【作用】本発明によれば、光導波路の突き合わせ部にお
ける凹字形又は凸字形を露呈したコアと、光ファイバの
突き合わせ部における凸字形又は凹字形を露呈したコア
とを両端から加圧して突き合わせ、突き合わせた該コア
を凹凸嵌合すれば、一方向への調芯作業を省略しても、
コアの調芯作用で接続損失を大幅に抑制でき、煩雑な調
芯作業を軽減して光を円滑に伝送することができる。
According to the present invention, a core having a concave shape or a convex shape exposed at the abutting portion of the optical waveguide and a core having a convex shape or a concave shape exposed at the abutting portion of the optical fiber are pressed against each other at both ends and abutted. Even if the core alignment work in one direction is omitted, if the abutted cores are fitted in concavo-convex,
The core alignment function can significantly reduce connection loss, reduce complicated alignment work, and allow light to be transmitted smoothly.

【0007】[0007]

【実施例】以下、図1乃至図6に示す一実施例に基づき
本発明を詳述すると、本発明に係る光導波路と光ファイ
バの接続機構は図1に示す如く、光導波路基板3を内蔵
した単一の結合用光導波路ホルダー1と、テープ状光フ
ァイバ9を備えた複数の結合用光ファイバホルダー6・
6Aとを一列に並べ、連接して突き合わせている。そし
て、光導波路先端のコアと、光ファイバ先端のコアとを
左右方向に調芯した後、突き合わせた複数の結合用ホル
ダー1、6・6Aの各突き合わせ部を順次YAG溶接す
るようにしている。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described in detail below with reference to an embodiment shown in FIGS. 1 to 6. The optical waveguide and optical fiber connection mechanism according to the present invention has an optical waveguide substrate 3 built-in as shown in FIG. A single coupling optical waveguide holder 1 and a plurality of coupling optical fiber holders 6 each including a tape-shaped optical fiber 9;
6A and 6A are arranged in a line and are connected and abutted. Then, after the core at the tip of the optical waveguide and the core at the tip of the optical fiber are aligned in the left-right direction, the abutting portions of the abutting coupling holders 1, 6 and 6A are sequentially YAG welded.

【0008】上記結合用光導波路ホルダー1は図2に示
す如く、上面中央の凹んだ穴に図示しない電気回路を収
納したメタル2と、石英ガラス等から構成され該メタル
2の上面両端間にUV接着剤により水平に架設された光
導波路基板3と、この光導波路基板3の内部長手方向に
直線状又は湾曲線状に並べて埋設された複数(図では4
本)の光導波路4と、該メタル2の上面に冠着され光導
波路基板3を覆う蓋メタル5とを備え、図示しないが、
該電気回路と光導波路基板3の電極(図示せず)とが電
気的に接続されている。
As shown in FIG. 2, the coupling optical waveguide holder 1 is composed of a metal 2 having an electric circuit (not shown) housed in a recessed hole at the center of the upper surface thereof, and quartz glass or the like. An optical waveguide substrate 3 which is horizontally installed by an adhesive, and a plurality of optical waveguide substrates 3 which are embedded side by side in a straight line or a curved line in the longitudinal direction of the inside of the optical waveguide substrate 3 (in FIG.
Main) optical waveguide 4 and a lid metal 5 which is attached to the upper surface of the metal 2 to cover the optical waveguide substrate 3, and is not shown.
The electric circuit and the electrodes (not shown) of the optical waveguide substrate 3 are electrically connected.

【0009】また、結合用光導波路ホルダー1を両端か
ら挟装する上記複数の結合用光ファイバホルダー6・6
Aは、図3に示す如く、メタル7の上面先端に載置され
上面に複数のV溝8a(図6参照)が並べて削設された
シリコン板8と、メタル7の上面後端に挿着されシリコ
ン板8の方向に指向したテープ状光ファイバ9と、この
テープ状光ファイバ9の先端から延出分岐して複数のV
溝8aに同位して配列された複数の光ファイバ10と、
シリコン板8に重合され複数の光ファイバ10を固定す
る押さえ板11と、該メタル7の上面に冠着され光ファ
イバ10を覆う蓋メタル12とを備えている。
Further, the plurality of coupling optical fiber holders 6 and 6 for sandwiching the coupling optical waveguide holder 1 from both ends.
As shown in FIG. 3, A is a silicon plate 8 placed on the tip of the upper surface of the metal 7 and having a plurality of V grooves 8a (see FIG. 6) arranged side by side on the upper surface, and a silicon plate 8 inserted into the rear end of the upper surface of the metal 7. The tape-shaped optical fiber 9 directed toward the silicon plate 8 and a plurality of Vs extending from the tip of the tape-shaped optical fiber 9 and branched.
A plurality of optical fibers 10 arranged in the groove 8a in the same direction,
It is provided with a pressing plate 11 which is superposed on the silicon plate 8 and fixes a plurality of optical fibers 10, and a lid metal 12 which is attached to the upper surface of the metal 7 and covers the optical fibers 10.

【0010】一方、上記光導波路4は図4及び図5に示
す如く、屈折率の大きいコア40と、このコア40より
屈折率の小さいクラッド41とを備え、突き合わせ部で
あるその先端のコア40が調芯作用を営むよう断面略凹
字形に凹設されている。即ち、光導波路4の先端は、コ
ア40以外の表面(クラッド41の表面)がタングステ
ンシリサイトの付着によりマスクされ、コア40がCF
4 のガスによりエッチングされた後、付着したマスクの
剥離により、コア40が長手方向に断面略凹字形を露呈
するよう構成される。これにより、後述する光ファイバ
先端のコア100と相俟って凹凸嵌合により調芯作用を
営む。
On the other hand, as shown in FIGS. 4 and 5, the optical waveguide 4 is provided with a core 40 having a large refractive index and a clad 41 having a refractive index smaller than that of the core 40, and the core 40 at the tip, which is a butt portion. Is recessed in a substantially concave cross section so as to perform the centering action. That is, at the tip of the optical waveguide 4, the surface other than the core 40 (the surface of the clad 41) is masked by the adhesion of tungsten silicite, and the core 40 becomes CF.
After being etched by the gas of No. 4 , the attached mask is peeled off so that the core 40 is exposed to have a substantially concave cross section in the longitudinal direction. As a result, in cooperation with the core 100 at the tip of the optical fiber, which will be described later, the concave-convex fitting causes the centering action.

【0011】他方、上記光ファイバ10は図4及び図6
に示す如く、屈折率の大きいコア100と、このコア1
00より屈折率の小さいクラッド101とを備え、突き
合わせ部であるその先端がV溝8aの先端から50μm
突出して自由動作可能な状態に支承されるとともに、該
先端のコア100が調芯作用を営むよう断面略凸字形に
突設されている。即ち、光ファイバ10の先端は、コア
100の表面がタングステンシリサイトの付着によりマ
スクされ、コア100以外のクラッド101の表面がC
4 のガスによりエッチングされた後、付着したマスク
の剥離により、コア100が長手方向に断面略凸字形を
露呈するよう構成される。これにより、上述した光導波
路先端のコア40と相俟って凹凸嵌合により調芯作用を
営む。
On the other hand, the optical fiber 10 is shown in FIGS.
, The core 100 having a large refractive index and the core 1
And a clad 101 having a refractive index smaller than that of 00, and the tip of the abutting portion is 50 μm from the tip of the V groove 8a.
The core 100 at the distal end is projected and supported in a freely movable state, and the core 100 at the tip is projected in a substantially convex shape in cross section so as to perform an aligning action. That is, at the tip of the optical fiber 10, the surface of the core 100 is masked by the adhesion of tungsten silicite, and the surface of the clad 101 other than the core 100 is C.
After etching with the gas of F 4 , the attached mask is peeled off so that the core 100 is exposed to have a substantially convex cross-section in the longitudinal direction. As a result, in cooperation with the core 40 at the tip of the optical waveguide described above, the centering action is performed by the concavo-convex fitting.

【0012】従って、接続損失を抑制しつつ結合用光導
波路ホルダー1と複数の結合用光ファイバホルダー6・
6Aとを接続するには、先ず、光導波路基板3を備えた
結合用光導波路ホルダー1と、テープ状光ファイバ9を
備えた複数の結合用光ファイバホルダー6・6Aとを図
1のように一列に並べる。次いで、断面略凹字形を露呈
した光導波路先端のコア40と、断面略凸字形を露呈し
た光ファイバ先端のコア100とを図4のように対向さ
せ、これら複数の結合用ホルダー1、6・6Aを長手方
向に連接して該コア40・100を左右方向に調芯す
る。そして、複数の結合用ホルダー1、6・6Aを位置
決めした後、突き合わせた複数の結合用ホルダ−1、6
・6Aの各突き合わせ部を順次YAG溶接すれば良い。
Accordingly, while suppressing the connection loss, the coupling optical waveguide holder 1 and the plurality of coupling optical fiber holders 6
In order to connect with 6A, first, the coupling optical waveguide holder 1 having the optical waveguide substrate 3 and the plurality of coupling optical fiber holders 6 and 6A having the tape-shaped optical fibers 9 are arranged as shown in FIG. Arrange in a line. Next, as shown in FIG. 4, the core 40 at the tip of the optical waveguide having a substantially concave cross section and the core 100 at the tip of the optical fiber having a substantially convex cross section are opposed to each other, and the plurality of coupling holders 1, 6 ,. 6A is connected in the longitudinal direction to align the cores 40 and 100 in the left-right direction. Then, after positioning the plurality of coupling holders 1, 6 and 6A, the plurality of coupling holders-1 and 6 abutted against each other.
-The 6A butt joints may be sequentially YAG welded.

【0013】上記構成によれば、両端から加圧した結合
用ホルダ−1、6・6Aを突き合わせて該コア40・1
00を左右方向に調芯し、結合用ホルダ−1、6・6A
を位置決めすれば、煩雑な上下方向への調芯作業をせず
とも、先端のコア40・100の凹凸調芯作用で当該コ
ア40・100を±2μmの高精度で調芯でき、しか
も、接続損失を0.2dB以下と大幅に抑制することが
可能となる。
According to the above construction, the holders for coupling 1, 6 and 6A which are pressed from both ends are butted against each other and the core 40 and 1
00 is aligned in the left-right direction, and holders for coupling-1, 6.6A
By positioning, the core 40/100 can be aligned with high accuracy of ± 2 μm by the concave-convex aligning action of the tip core 40/100 without complicated centering work in the vertical direction. It is possible to significantly reduce the loss to 0.2 dB or less.

【0014】尚、上記実施例では光導波路4のコア40
を断面略凹字形に、光ファイバ10のコア100を断面
略凸字形に、それぞれ形成したものを示したが、光導波
路4のコア40を断面略凸字形に、光ファイバ10のコ
ア100を断面略凹字形に、それぞれ形成しても良いの
は言うまでもない。
In the above embodiment, the core 40 of the optical waveguide 4 is used.
Shows a cross section having a substantially concave shape and the core 100 of the optical fiber 10 having a substantially convex shape in cross section. The core 40 of the optical waveguide 4 has a substantially convex shape in cross section, and the core 100 of the optical fiber 10 has a cross section. It goes without saying that they may be formed in a substantially concave shape.

【0015】[0015]

【発明の効果】以上のように本発明によれば、光導波路
の突き合わせ部における断面略凹字形の調芯作用を営む
コアと、光ファイバの突き合わせ部における断面略凸字
形の調芯作用を営むコアとを両端から加圧して突き合わ
せた後、位置決めした複数の結合用ホルダ−の各突き合
わせ部を順次YAG溶接すれば、煩雑な上下方向への調
芯作業をせずとも、コアを±2μmの高精度で調芯でき
るという顕著な効果がある。そして、これにより接続損
失を0.2dB以下と大幅に抑制でき、煩雑な調芯作業
を著しく軽減して光の伝送を円滑に行うことができると
いう顕著な効果がある。
As described above, according to the present invention, the core that performs the aligning action of the concave section in the abutting portion of the optical waveguide and the aligning action of the convex section in the abutting portion of the optical fiber are performed. After press-fitting the core from both ends and abutting it, YAG welding of the abutting portions of the plurality of positioned holders for coupling is performed sequentially, and the core can be adjusted to ± 2 μm without complicated centering work in the vertical direction. There is a remarkable effect that the centering can be performed with high accuracy. Then, this has a remarkable effect that the connection loss can be greatly suppressed to 0.2 dB or less, the complicated alignment work can be significantly reduced, and the light transmission can be smoothly performed.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の実施例が適用可能な光導波路と光ファ
イバの接続機構を示す全体斜視図である。
FIG. 1 is an overall perspective view showing a connection mechanism between an optical waveguide and an optical fiber to which an embodiment of the present invention can be applied.

【図2】本発明の実施例が適用可能な結合用光導波路ホ
ルダーを示す拡大斜視図である。
FIG. 2 is an enlarged perspective view showing a coupling optical waveguide holder to which an embodiment of the present invention can be applied.

【図3】本発明の実施例が適用可能な結合用光ファイバ
ホルダーを示す拡大斜視図である。
FIG. 3 is an enlarged perspective view showing a coupling optical fiber holder to which an embodiment of the present invention can be applied.

【図4】本発明に係る光導波路と光ファイバの接続機構
の一実施例を示す要部拡大説明図である。
FIG. 4 is an enlarged explanatory view of a main part showing an embodiment of a connection mechanism between an optical waveguide and an optical fiber according to the present invention.

【図5】本発明の実施例が適用可能な結合用光導波路ホ
ルダーの光導波路先端を示す拡大斜視図である。
FIG. 5 is an enlarged perspective view showing the tip of the optical waveguide of the coupling optical waveguide holder to which the embodiment of the present invention can be applied.

【図6】本発明の実施例が適用可能な結合用光ファイバ
ホルダーの光ファイバ先端を示す拡大斜視図である。
FIG. 6 is an enlarged perspective view showing an optical fiber tip of a coupling optical fiber holder to which an embodiment of the present invention can be applied.

【符号の説明】[Explanation of symbols]

1…結合用光導波路ホルダー、3…光導波路基板、4…
光導波路、6・6A…結合用光ファイバホルダー、9…
テープ状光ファイバ、10…光ファイバ、40…光導波
路のコア、100…光ファイバのコア
1 ... Optical waveguide holder for coupling, 3 ... Optical waveguide substrate, 4 ...
Optical waveguide, 6 ・ 6A ... Coupling optical fiber holder, 9 ...
Tape-shaped optical fiber, 10 ... Optical fiber, 40 ... Optical waveguide core, 100 ... Optical fiber core

───────────────────────────────────────────────────── フロントページの続き (72)発明者 齋藤 眞秀 神奈川県横浜市栄区田谷町1番地 住友電 気工業株式会社横浜製作所内 (72)発明者 菅沼 寛 神奈川県横浜市栄区田谷町1番地 住友電 気工業株式会社横浜製作所内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Masahide Saito 1 Taya-cho, Sakae-ku, Yokohama-shi, Kanagawa Sumitomo Electric Industries, Ltd. Yokohama Works (72) Inventor Hiroshi Suganuma 1 Taya-cho, Sakae-ku, Yokohama, Kanagawa Electric Industry Co., Ltd. Yokohama Works

Claims (1)

【特許請求の範囲】[Claims] 【請求項1】 相互に連接される光導波路と光ファイバ
のいずれか一方の突き合わせ部におけるコアを断面略凹
字形に凹設するとともに、他方の突き合わせ部における
コアを断面略凸字形に突設し、該コアの凹凸嵌合で光導
波路と光ファイバを突き合わせることを特徴とする光導
波路と光ファイバの接続機構。
1. A core at an abutting portion of one of an optical waveguide and an optical fiber connected to each other is provided with a concave shape in cross section, and a core at another abutting portion is provided with a convex shape in cross section. A connection mechanism between an optical waveguide and an optical fiber, characterized in that the optical waveguide and the optical fiber are butted against each other by fitting the concave and convex portions of the core.
JP34488991A 1991-12-26 1991-12-26 Connecting mechanism between optical waveguide and optical fiber Pending JPH05173038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP34488991A JPH05173038A (en) 1991-12-26 1991-12-26 Connecting mechanism between optical waveguide and optical fiber

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP34488991A JPH05173038A (en) 1991-12-26 1991-12-26 Connecting mechanism between optical waveguide and optical fiber

Publications (1)

Publication Number Publication Date
JPH05173038A true JPH05173038A (en) 1993-07-13

Family

ID=18372781

Family Applications (1)

Application Number Title Priority Date Filing Date
JP34488991A Pending JPH05173038A (en) 1991-12-26 1991-12-26 Connecting mechanism between optical waveguide and optical fiber

Country Status (1)

Country Link
JP (1) JPH05173038A (en)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05264846A (en) * 1992-03-16 1993-10-15 Tatsuta Electric Wire & Cable Co Ltd Coupling device and coupling method for optical waveguide and optical fiber
JPH0880805A (en) * 1994-09-14 1996-03-26 Tokai Rika Co Ltd Webbing take-up device
JPH08179147A (en) * 1994-12-27 1996-07-12 Nec Corp Optically coupled circuit and its production
WO2002101434A3 (en) * 2000-12-15 2003-07-31 Intel Corp Alignment of optical fibers to an etched array waveguide
US6886989B2 (en) 2000-12-15 2005-05-03 Intel Corporation Alignment of fiber optic bundle to array waveguide using pins
JP2008216794A (en) * 2007-03-06 2008-09-18 Furukawa Electric Co Ltd:The Optical coupler
US7983519B2 (en) 2008-01-30 2011-07-19 Hewlett-Packard Development Company, L.P. Photonic connection and method for enhancing alignment accuracy thereof
KR20150032735A (en) * 2012-07-06 2015-03-27 마이크론 테크놀로지, 인크 Method of forming a hermetically sealed fiber to chip connection
CN112368617A (en) * 2018-07-12 2021-02-12 华为技术有限公司 Optical coupling device and packaging method thereof, optical module and communication equipment

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05264846A (en) * 1992-03-16 1993-10-15 Tatsuta Electric Wire & Cable Co Ltd Coupling device and coupling method for optical waveguide and optical fiber
JP2668477B2 (en) * 1992-03-16 1997-10-27 タツタ電線株式会社 Method of coupling optical waveguide and optical fiber
JPH0880805A (en) * 1994-09-14 1996-03-26 Tokai Rika Co Ltd Webbing take-up device
JPH08179147A (en) * 1994-12-27 1996-07-12 Nec Corp Optically coupled circuit and its production
WO2002101434A3 (en) * 2000-12-15 2003-07-31 Intel Corp Alignment of optical fibers to an etched array waveguide
US6886989B2 (en) 2000-12-15 2005-05-03 Intel Corporation Alignment of fiber optic bundle to array waveguide using pins
CN100458480C (en) * 2000-12-15 2009-02-04 英特尔公司 Alignment of optical fibers to an etched array waveguide
JP2008216794A (en) * 2007-03-06 2008-09-18 Furukawa Electric Co Ltd:The Optical coupler
US7983519B2 (en) 2008-01-30 2011-07-19 Hewlett-Packard Development Company, L.P. Photonic connection and method for enhancing alignment accuracy thereof
KR20150032735A (en) * 2012-07-06 2015-03-27 마이크론 테크놀로지, 인크 Method of forming a hermetically sealed fiber to chip connection
JP2015522179A (en) * 2012-07-06 2015-08-03 マイクロン テクノロジー, インク. Method for forming hermetically sealed fiber-to-chip connections
US20160216465A1 (en) * 2012-07-06 2016-07-28 Micron Technology, Inc. Method of forming a hermetically sealed fiber to chip connections
US9804350B2 (en) 2012-07-06 2017-10-31 Micron Technology, Inc. Method of forming a hermetically sealed fiber to chip connections
US20180024304A1 (en) * 2012-07-06 2018-01-25 Micron Technology, Inc. Methods and systems for hermetically sealed fiber to chip connections
US10935739B2 (en) * 2012-07-06 2021-03-02 Micron Technology, Inc. Methods and systems for hermetically sealed fiber to chip connections
US11536915B2 (en) * 2012-07-06 2022-12-27 Micron Technology, Inc. Methods and systems for hermetically sealed fiber to chip connections
CN112368617A (en) * 2018-07-12 2021-02-12 华为技术有限公司 Optical coupling device and packaging method thereof, optical module and communication equipment
US11391892B2 (en) 2018-07-12 2022-07-19 Huawei Technologies Co., Ltd. Optical coupling apparatus, method for packaging optical coupling apparatus, optical module, and communications device

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