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JPH05144988A - Production of semiconductor device, semiconductor producing equipment and lead frame - Google Patents

Production of semiconductor device, semiconductor producing equipment and lead frame

Info

Publication number
JPH05144988A
JPH05144988A JP30490991A JP30490991A JPH05144988A JP H05144988 A JPH05144988 A JP H05144988A JP 30490991 A JP30490991 A JP 30490991A JP 30490991 A JP30490991 A JP 30490991A JP H05144988 A JPH05144988 A JP H05144988A
Authority
JP
Japan
Prior art keywords
lead
tip
connecting member
lead frame
cutting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP30490991A
Other languages
Japanese (ja)
Inventor
Hitoshi Kobayashi
均 小林
Yuichi Asano
祐一 浅野
Fumihito Takahashi
文仁 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Miyagi Electronics Ltd
Original Assignee
Fujitsu Miyagi Electronics Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Miyagi Electronics Ltd filed Critical Fujitsu Miyagi Electronics Ltd
Priority to JP30490991A priority Critical patent/JPH05144988A/en
Publication of JPH05144988A publication Critical patent/JPH05144988A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistor
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistor electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • H05K3/3421Leaded components

Landscapes

  • Punching Or Piercing (AREA)
  • Lead Frames For Integrated Circuits (AREA)

Abstract

PURPOSE:To improve the flatness and the solder wettability of a lead and improve the mount ability of a plastic IC by compulsorily pressing the lead tip of a lead frame so as to make it thin at the time of bending and narrowing the lead tip. CONSTITUTION:A semiconductor chip is mounted on the stage of a lead frame to which the tip 21 of a lead 2 is connected by a connecting member 4 to be resin-sealed. When the connecting member 4 is removed by cutting, the tip 21 of the lead 2 is cut narrow and the tip 21 of the lead 2 is pressed to be thin when the lead 2 is being bent. In this manner, the tip 21 of the lead 2 is forcibly pressed to be thin, the flatness of the lead is improved and since the tip 21 becomes thin by the press, the solder wettability of the tip 21 is also improved. Since the lead tip 21 is cut narrow, even when the tip 21 pressed to be wide, solder bridge generation at the time of mounting is prevented.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】本発明は、半導体装置の製造方
法、詳しくは、リードフレームに半導体チップを搭載し
て樹脂封止をなすプラスチックICの製造方法並びにそ
の製造に使用される半導体製造装置及びリードフレーム
に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing a semiconductor device, and more particularly, to a method of manufacturing a plastic IC in which a semiconductor chip is mounted on a lead frame and resin-sealed, and a semiconductor manufacturing apparatus used for manufacturing the same. Regarding lead frame.

【0002】[0002]

【従来の技術】図2(A)に、リードフレームに半導体
チップを搭載して樹脂封止したときの樹脂モールドから
突出しているリード部の平面図を示し、同図(B)にそ
の側面図を示す。図において、1は樹脂モールドであ
り、2はリードであり、3はタイバーであり、4はリー
ド2の先端部21を相互に連結する連結部材である。
2. Description of the Related Art FIG. 2A shows a plan view of a lead portion protruding from a resin mold when a semiconductor chip is mounted on a lead frame and resin-sealed, and FIG. 2B is a side view thereof. Indicates. In the figure, 1 is a resin mold, 2 is a lead, 3 is a tie bar, and 4 is a connecting member for connecting the tip portions 21 of the leads 2 to each other.

【0003】リード部をメッキ処理した後、図5に示す
ように、タイバー3と連結部材4とを切断除去し、次い
で、図6に示すように、リード2を曲げ成形する。な
お、図5と図6とにおいて、(A)は平面図であり、
(B)は側面図である。
After the lead portion is plated, the tie bar 3 and the connecting member 4 are cut and removed as shown in FIG. 5, and then the lead 2 is bent and formed as shown in FIG. 5 and 6, (A) is a plan view,
(B) is a side view.

【0004】[0004]

【発明が解決しようとする課題】リード曲げ成形後のパ
ッケージを平板上に置いたときに一部のリードが平板上
から浮いた状態になることがある。この浮きの量が大き
いと実装したときに半田付け不良が発生するのでこの浮
きの量を小さくすることが必要であるが、現状では0.
1mm以下にすることは困難である。
When the package after lead bending is placed on a flat plate, some of the leads may float above the flat plate. If this amount of floating is large, soldering failure will occur when it is mounted. Therefore, it is necessary to reduce this amount of floating.
It is difficult to reduce the thickness to 1 mm or less.

【0005】また、半田メッキ処理後にリード2の連結
部材4を切断除去するので、リード先端部21の切断面に
は半田がメッキされておらず、半田ぬれ性が悪くなって
実装時に半田付け不良が発生する。この対策として、リ
ードの先端部21を連結する連結部材4のないリードフレ
ームを使用する方法が考えられるが、製造過程において
リードの変形が発生しやすいという欠点がある。
Further, since the connecting member 4 of the lead 2 is cut and removed after the solder plating process, the cut surface of the lead tip portion 21 is not plated with solder, resulting in poor solder wettability and poor soldering during mounting. Occurs. As a countermeasure against this, a method of using a lead frame without the connecting member 4 for connecting the tip portions 21 of the leads is conceivable, but there is a drawback that the lead is likely to be deformed during the manufacturing process.

【0006】本発明の目的は、この欠点を解消すること
にあり、プラスチックICのリードの平坦性と半田ぬれ
性とを向上する製造方法並びにその方法に使用される装
置及びリードフレームを提供することにある。
An object of the present invention is to eliminate this drawback, and to provide a manufacturing method for improving the flatness and solder wettability of leads of a plastic IC, and an apparatus and a lead frame used in the method. It is in.

【0007】[0007]

【課題を解決するための手段】上記の目的のうち半導体
装置の製造方法は、下記のいずれの手段によっても達成
される。第1の手段は、リード(2)の先端部(21)が
連結部材(4)をもって相互に連結されているリードフ
レームのステージ上に半導体チップを搭載して樹脂封止
した後、前記の連結部材(4)を切断除去して前記のリ
ード(2)を曲げ成形する工程を有する半導体装置の製
造方法において、前記の連結部材(4)を切断除去する
際に、前記のリード(2)の先端部(21)を細くカット
し、前記のリード(2)を曲げ成形する際に、前記のリ
ード(2)の先端部(21)をプレスして薄くする工程を
有する半導体装置の製造方法である。第2の手段は、リ
ード(2)の先端部(21)が連結部材(4)をもって相
互に連結されてなるリードフレームのステージ上に半導
体チップを搭載して樹脂封止した後、前記の連結部材
(4)を切断除去して前記のリード(2)を曲げ成形す
る工程を有する半導体装置の製造方法において、前記の
連結部材(4)を切断除去するのに先立って前記のリー
ド(2)の先端部(21)を細くカットしてメッキを施
し、前記のリード(2)を曲げ成形する際に、前記のリ
ード(2)の先端部(21)をプレスして薄くする工程を
有する半導体装置の製造方法である。
Among the above objects, the method for manufacturing a semiconductor device can be achieved by any of the following means. The first means is to mount a semiconductor chip on a stage of a lead frame in which the tip ends (21) of the leads (2) are connected to each other with a connecting member (4) and resin-encapsulate the same, and then perform the above-mentioned connection. In a method of manufacturing a semiconductor device, which includes a step of cutting and removing the member (4) and bending and forming the lead (2), when the connecting member (4) is cut and removed, the lead (2) is removed. A method for manufacturing a semiconductor device, comprising a step of thinly cutting the tip (21) and bending the lead (2) to press and thin the tip (21) of the lead (2). is there. The second means is to mount a semiconductor chip on a stage of a lead frame in which the tip ends (21) of the leads (2) are connected to each other with a connecting member (4) and resin-encapsulate the same, and then the above-mentioned connection. In the method of manufacturing a semiconductor device, which comprises a step of cutting and removing the member (4) and bending the lead (2), the lead (2) is cut before the connecting member (4) is cut and removed. A semiconductor having a step of thinning the tip (21) of the lead (2) by pressing the tip (21) of the lead (2) when the lead (2) is bent It is a method of manufacturing a device.

【0008】上記目的のうち半導体製造装置は、リード
フレームのリード(2)の先端部(21)を相互に連結す
る連結部材(4)を切断除去するリード連結部材切断手
段と前記のリード(2)を曲げ成形するリード成形手段
とを有する半導体製造装置において、前記のリード
(2)の先端部(21)を細くカットするリード先端部カ
ット手段とリード先端部(21)をプレスして薄くするリ
ード先端部プレス手段とが付加されている半導体製造装
置によって達成される。
Among the above-mentioned objects, the semiconductor manufacturing apparatus has a lead connecting member cutting means for cutting and removing the connecting member (4) for connecting the tip portions (21) of the leads (2) of the lead frame to each other and the lead (2). In a semiconductor manufacturing apparatus having a lead forming means for bending and forming a lead), the lead tip cutting means for finely cutting the tip (21) of the lead (2) and the lead tip (21) are pressed to be thin. This is achieved by a semiconductor manufacturing apparatus to which lead tip pressing means is added.

【0009】上記目的のうちリードフレームは、リード
(2)の先端部(21)が連結部材(4)をもって相互に
連結されているリードフレームにおいて、前記のリード
(2)の先端部(21)が細くされているリードフレーム
によって達成される。
Of the above objects, the lead frame is a lead frame in which the tip portions (21) of the leads (2) are connected to each other by a connecting member (4). Is achieved by the lead frame being narrowed.

【0010】[0010]

【作用】リード成形時または成形後にリードの先端を強
制的にプレスしてつぶすことによって、リードの平坦性
が向上するとゝもに、リードの先端がつぶされて薄くな
るので、先端部の半田ぬれ性も向上する。なお、リード
連結部材4を切断除去するときにリード先端部21が細く
カットされているので、先端部21がつぶされて広がって
も実装時の半田ブリッジの発生は防止される。
[Function] When the lead end is forcibly pressed and crushed during or after the lead molding to improve the flatness of the lead, the lead end is crushed and thinned. The property is also improved. Since the lead tip portion 21 is thinly cut when the lead connecting member 4 is cut and removed, even if the tip portion 21 is crushed and spread, the occurrence of a solder bridge at the time of mounting is prevented.

【0011】なお、リード先端部21を細くカットしてメ
ッキ処理をなした後にリード連結部材4を切断除去する
ようにすれば、リード先端部21の細くされた両側面にも
半田メッキが施されるので半田ぬれ性がさらに向上す
る。
If the lead connecting portion 4 is cut and removed after the lead tip portion 21 is thinly cut and plated, the lead tip portion 21 is also plated with solder on both sides. Therefore, the solder wettability is further improved.

【0012】また、リード先端部21が細く形成されてい
るリードフレームを使用すれば、リード先端部を細くカ
ットする工程及びそのための装置が必要なくなる。
If a lead frame having a thin lead tip 21 is used, a step of cutting the lead tip and a device therefor are unnecessary.

【0013】[0013]

【実施例】以下、図面を参照して、本発明に係る半導体
装置の製造方法並びに半導体製造装置及びリードフレー
ムについて説明する。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A method of manufacturing a semiconductor device, a semiconductor manufacturing device and a lead frame according to the present invention will be described below with reference to the drawings.

【0014】第1例 リードフレーム上に半導体チップを搭載して樹脂封止し
た後のリード部の形状を図2に示す。この形状は従来例
と同一であるので説明を省略する。この状態でリード部
をメッキ処理する。
First Example FIG. 2 shows the shape of a lead portion after a semiconductor chip is mounted on a lead frame and sealed with resin. Since this shape is the same as that of the conventional example, description thereof will be omitted. In this state, the lead portion is plated.

【0015】図3に示すように、タイバー3を切断除去
し、次いでリード連結部材4を切断除去するとゝもにリ
ード2の先端部21を細くカットする。なお、同図(A)
は平面図であり、(B)は側面図である。
As shown in FIG. 3, when the tie bar 3 is cut and removed, and then the lead connecting member 4 is cut and removed, the tip portion 21 of the lead 2 is cut very thinly. In addition, the same figure (A)
Is a plan view and (B) is a side view.

【0016】次いで、図1に示すように、リード2を曲
げ成形するとゝもにリード先端部21をプレスして薄くつ
ぶす。なお、同図(A)は平面図であり、(B)は側面
図である。
Next, as shown in FIG. 1, when the lead 2 is bent, the lead tip 21 is pressed and crushed thinly. Note that FIG. 7A is a plan view and FIG. 8B is a side view.

【0017】第2例 図4に示すように、タイバー3を切断除去するとゝもに
リード2の先端部21を細くカットして半田メッキを施
す。なお、同図(A)は平面図であり、(B)は側面図
である。
Second Example As shown in FIG. 4, when the tie bar 3 is cut and removed, the tip portion 21 of the lead 2 is cut into thin pieces and solder plating is performed. Note that FIG. 7A is a plan view and FIG. 8B is a side view.

【0018】次に、図3に示すように、リード連結部材
4を切断除去する。次いで、第1例と同様に、図1に示
すように、リード2を曲げ成形するとゝもにリード先端
部21をプレスして薄くつぶす。
Next, as shown in FIG. 3, the lead connecting member 4 is cut and removed. Then, as in the first example, as shown in FIG. 1, when the lead 2 is bent, the lead tip 21 is pressed and crushed thinly.

【0019】第3例 図7に本発明に係るリードフレームのリード部の形状を
示す。なお、同図(A)は平面図であり、(B)は側面
図である。図において、1は樹脂モールドであり、2は
リードであり先端部21が細く形成されている。3はタイ
バーであり、4はリードの先端部21を相互に連結する連
結部材である。
Third Example FIG. 7 shows the shape of the lead portion of the lead frame according to the present invention. Note that FIG. 7A is a plan view and FIG. 8B is a side view. In the figure, 1 is a resin mold, 2 is a lead, and the tip portion 21 is formed thin. Reference numeral 3 is a tie bar, and 4 is a connecting member for connecting the tip portions 21 of the leads to each other.

【0020】第4例 本発明に係る半導体製造装置は、リードフレームのタイ
バー切断手段とリード連結部切断手段とリード曲げ成形
手段とを有する半導体製造装置に、リード先端部を細く
カットするリード先端部カット手段とリード先端部をプ
レスして薄くつぶすリード先端部プレス手段とを付加し
たものである。
Fourth Embodiment A semiconductor manufacturing apparatus according to the present invention is a semiconductor manufacturing apparatus having a tie bar cutting means for a lead frame, a lead connecting portion cutting means, and a lead bending forming means. A cutting means and a lead tip pressing means for pressing the lead tip to crush it thinly are added.

【0021】[0021]

【発明の効果】以上説明したとおり、本発明に係る半導
体装置の製造方法並びに半導体製造装置及びリードフレ
ームにおいては、リードフレームのリード先端部を細く
してリードを曲げ成形する時にその先端部を強制的につ
ぶして薄くしているので、リードの平坦性と半田ぬれ性
とが共に向上し、プラスチックICの実装性が大幅に改
善される。
As described above, in the method of manufacturing a semiconductor device, the semiconductor manufacturing apparatus and the lead frame according to the present invention, the tip of the lead frame is made thin and the tip is forced when the lead is bent. Since the flatness and the solder wettability are improved, the mountability of the plastic IC is significantly improved.

【図面の簡単な説明】[Brief description of drawings]

【図1】第1実施例に係るプラスチックICのリード加
工工程図(その3)である。
FIG. 1 is a lead processing step diagram (3) of a plastic IC according to a first embodiment.

【図2】第1実施例に係るプラスチックICのリード加
工工程図(その1)である。
FIG. 2 is a lead processing step diagram (1) of a plastic IC according to the first embodiment.

【図3】第1実施例に係るプラスチックICのリード加
工工程図(その2)である。
FIG. 3 is a lead processing step diagram (2) of the plastic IC according to the first embodiment.

【図4】第2実施例に係るプラスチックICのリード加
工工程図である。
FIG. 4 is a lead processing step diagram of a plastic IC according to a second embodiment.

【図5】従来技術に係るプラスチックICのリード加工
工程図(その1)である。
FIG. 5 is a lead processing step diagram (1) of a plastic IC according to the related art.

【図6】従来技術に係るプラスチックICのリード加工
工程図(その2)である。
FIG. 6 is a lead processing step diagram (2) of a plastic IC according to the related art.

【図7】本発明に係るリードフレームの外形図である。FIG. 7 is an external view of a lead frame according to the present invention.

【符号の説明】[Explanation of symbols]

1 樹脂モールド 2 リード 21 リード先端部 3 タイバー 4 連結部材 1 Resin mold 2 Lead 21 Lead tip 3 Tie bar 4 Connecting member

───────────────────────────────────────────────────── フロントページの続き (72)発明者 高橋 文仁 宮城県柴田郡村田町大字村田字西ケ丘1番 地の1 株式会社富士通宮城エレクトロニ クス内 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Fumihito Takahashi 1st in Nishigaoka, Murata-cho, Shibata-gun, Miyagi Prefecture

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 リード(2)の先端部(21)が連結部材
(4)をもって相互に連結されてなるリードフレームの
ステージ上に半導体チップを搭載して樹脂封止した後、
前記連結部材(4)を切断除去して前記リード(2)を
曲げ成形する工程を有する半導体装置の製造方法におい
て、 前記連結部材(4)を切断除去する際に、前記リード
(2)の先端部(21)を細くカットし、前記リード
(2)を曲げ成形する際に、前記リード(2)の先端部
(21)をプレスして薄くする工程を有することを特徴と
する半導体装置の製造方法。
1. A semiconductor chip is mounted on a stage of a lead frame in which the tip portions (21) of the leads (2) are connected to each other by a connecting member (4) and resin-sealed,
A method for manufacturing a semiconductor device, comprising a step of cutting and removing the connecting member (4) to bend and form the lead (2), wherein when the connecting member (4) is cut and removed, the tip of the lead (2) is removed. Manufacturing of a semiconductor device, characterized in that, when the lead (2) is bent and formed by thinly cutting the portion (21), a tip portion (21) of the lead (2) is pressed to be thin. Method.
【請求項2】 リード(2)の先端部(21)が連結部材
(4)をもって相互に連結されてなるリードフレームの
ステージ上に半導体チップを搭載して樹脂封止した後、
前記連結部材(4)を切断除去して前記リード(2)を
曲げ成形する工程を有する半導体装置の製造方法におい
て、 前記連結部材(4)を切断除去するのに先立って前記リ
ード(2)の先端部(21)を細くカットしてメッキを施
し、前記リード(2)を曲げ成形する際に、前記リード
(2)の先端部(21)をプレスして薄くする工程を有す
ることを特徴とする半導体装置の製造方法。
2. A semiconductor chip is mounted on a stage of a lead frame in which the tip end portions (21) of the leads (2) are connected to each other by a connecting member (4) and resin-sealed,
A method of manufacturing a semiconductor device, comprising a step of cutting and removing the connecting member (4) to bend and form the lead (2), wherein the lead (2) is removed before the connecting member (4) is cut and removed. The tip (21) is finely cut and plated, and when the lead (2) is bent, the tip (21) of the lead (2) is pressed and thinned. Method for manufacturing semiconductor device.
【請求項3】 リードフレームのリード(2)の先端部
(21)を相互に連結する連結部材(4)を切断除去する
リード連結部材切断手段と前記リード(2)を曲げ成形
するリード成形手段とを有する半導体製造装置におい
て、 前記リード(2)の先端部(21)を細くカットするリー
ド先端部カット手段とリード先端部(21)をプレスして
薄くするリード先端部プレス手段とが付加されてなるこ
とを特徴とする半導体製造装置。
3. A lead connecting member cutting means for cutting and removing a connecting member (4) for connecting tip portions (21) of leads (2) of a lead frame to each other, and a lead forming means for bending and forming the lead (2). In the semiconductor manufacturing apparatus having: a lead tip portion cutting means for thinly cutting the tip portion (21) of the lead (2) and a lead tip portion pressing means for pressing and thinning the lead tip portion (21). Semiconductor manufacturing equipment characterized by the following.
【請求項4】 リード(2)の先端部(21)が連結部材
(4)をもって相互に連結されてなるリードフレームに
おいて、 前記リード(2)の先端部(21)が細くされてなること
を特徴とするリードフレーム。
4. A lead frame in which the tips (21) of the leads (2) are interconnected by a connecting member (4), wherein the tips (21) of the leads (2) are thinned. Characteristic lead frame.
JP30490991A 1991-11-20 1991-11-20 Production of semiconductor device, semiconductor producing equipment and lead frame Pending JPH05144988A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP30490991A JPH05144988A (en) 1991-11-20 1991-11-20 Production of semiconductor device, semiconductor producing equipment and lead frame

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP30490991A JPH05144988A (en) 1991-11-20 1991-11-20 Production of semiconductor device, semiconductor producing equipment and lead frame

Publications (1)

Publication Number Publication Date
JPH05144988A true JPH05144988A (en) 1993-06-11

Family

ID=17938764

Family Applications (1)

Application Number Title Priority Date Filing Date
JP30490991A Pending JPH05144988A (en) 1991-11-20 1991-11-20 Production of semiconductor device, semiconductor producing equipment and lead frame

Country Status (1)

Country Link
JP (1) JPH05144988A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0969598A (en) * 1995-08-30 1997-03-11 Nec Corp Semiconductor device
JP2006313943A (en) * 2003-02-18 2006-11-16 Sharp Corp Semiconductor light emitting device, manufacturing method thereof, and electronic imaging device
NL1029169C2 (en) * 2005-06-02 2006-12-05 Fico Bv Flat substrate for electronic components, used as lead frame, includes contact parts with reduced width regions separated from component support surfaces by spaces
CN103736812A (en) * 2014-01-09 2014-04-23 青岛钜祥精密模具有限公司 Mold housing and high precision manufacturing method thereof
US8859338B2 (en) 2012-06-25 2014-10-14 Mitsubishi Electric Corporation Method of manufacturing a semiconductor device and semiconductor device

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0969598A (en) * 1995-08-30 1997-03-11 Nec Corp Semiconductor device
JP2006313943A (en) * 2003-02-18 2006-11-16 Sharp Corp Semiconductor light emitting device, manufacturing method thereof, and electronic imaging device
NL1029169C2 (en) * 2005-06-02 2006-12-05 Fico Bv Flat substrate for electronic components, used as lead frame, includes contact parts with reduced width regions separated from component support surfaces by spaces
US8859338B2 (en) 2012-06-25 2014-10-14 Mitsubishi Electric Corporation Method of manufacturing a semiconductor device and semiconductor device
CN103736812A (en) * 2014-01-09 2014-04-23 青岛钜祥精密模具有限公司 Mold housing and high precision manufacturing method thereof

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