JPH05124208A - Liquid jet recording head and production thereof - Google Patents

Abstract

PURPOSE:To obtain the production of a liquid jet recording head by which an ink flow path having a step structure for stably delivering ink can be easily formed into an arbitrary shape. CONSTITUTION:On a substrate 1, a removable layer 5 is laminated so as to positionally correspond to an ink flow path 10 and a delivery port 11 (A). On the surface of the removable layer 5, a masking layer 8 is provided so as not to correspond to a step part 3 (B). A part of the removable layer 5 which is not covered with the masking layer 8 is selectively removed through the masking layer 8, whereby a step corresponding to the form of the masking layer 8 is provided on the surface of the removable layer 5 (C). A curable resin is applied to the surface of the substrate 1 so as to cover the removable layer 5 and the masking layer 8, a glass plate 7 provided with an ink supply port is bonded thereon, and the curable resin is cured to form a coating resin layer 4 (D). The remaining removable layer 5 and masking layer 8 are removed for opening the ink flow path 10 (E).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink flow path communicating with an ejection port, and energy generation for generating energy used for ejecting ink from the ejection port, which is arranged corresponding to the ink flow channel. The present invention relates to a method for manufacturing a liquid jet recording head having an element and a liquid jet recording head manufactured by this manufacturing method.

[0002]

2. Description of the Related Art Generally, a liquid jet recording head used in an ink jet recording method (liquid jet recording method) ejects ink in an ink channel communicating with a fine ejection port for ejecting ink And an energy generating element for generating energy for A piezoelectric element, an electrothermal converter, or the like is used as the energy generating element.

Conventionally, such a liquid jet recording head uses a plate made of, for example, glass or metal, and performs machining such as cutting or etching on the plate to form fine grooves corresponding to ink flow paths. And another plate in which an energy generating element is previously provided at a predetermined position are aligned and bonded together. In this case, the end of the groove corresponding to the ink flow path, which is open to the outside, is the ejection port. However, in this conventional liquid jet recording head, when the groove corresponding to the ink flow path is formed by cutting, the roughness of the inner wall surface of the groove becomes too large, or when the groove is formed by etching, the difference in the etching rate becomes large. As a result, the groove is distorted, which makes it difficult to obtain an ink flow path having a constant flow resistance, and there is a problem in that the recording characteristics tend to vary. In addition, when the groove corresponding to the ink flow path is formed by etching, the number of steps is large, so that the manufacturing cost is likely to increase. Furthermore, it is difficult to accurately align the groove provided on one plate and the energy generating element provided on the other plate when the two plates are bonded together, and this lacks mass productivity. There are also problems.

Therefore, as disclosed in Japanese Unexamined Patent Publication No. 62-154947, a substrate on which ejection energy generating elements are formed in advance is used, and an ink flow path on the substrate is to be formed at a position where By photolithography etc.
A method has been devised in which a layer made of a removable member is provided, a resin layer is provided on the substrate so as to cover the layer, and then the layer made of the removable member is removed. Since the ink flow path is formed by removing the layer made of the removable member, by using this method, there are problems such as difficulty in alignment and variation in flow resistance of the ink flow path with a small number of steps. Can be solved.

[0005]

The factors that greatly affect the characteristics of the liquid jet recording head are the positional relationship between the energy generating element and the ejection port, the internal structure of the ejection port and the ink flow path, and the like. This is the volume of the ejected ink droplet,
This is because the velocity and the ejection direction are determined by the positional relationship, the flow resistance of the ink flow path, the weight of the ink, and the like. Of these, the internal structure of the ejection port and the ink flow path is the most important factor for the flow resistance. Examination of the internal structure of the ejection port and the ink flow path has revealed that the ink ejection speed and the ejection direction can be controlled by providing a step in a part of the ink flow path, and the ink can be ejected stably. ..

However, in the above-mentioned liquid jet recording head in which the ink flow path is formed by cutting or etching, it is difficult to control the internal structure in the ink flow path, and it is impossible to provide a step structure in particular. is there. Also,
Even in the liquid jet recording head described in JP-A-62-253457 mentioned above, since the thickness of the layer made of removable members is usually constant, the internal structure in the ink flow path, especially the step structure, is formed. Is difficult to provide.

An object of the present invention is to provide a method for manufacturing a liquid jet recording head which can easily form an ink flow path having a step structure in a free shape and to stably eject ink, and a method for manufacturing the same. A liquid jet recording head is provided.

[0008]

According to a method of manufacturing a liquid jet recording head of the present invention, a removable layer is laminated on a substrate provided with an energy generating element so as to correspond to a position where an ink flow path is formed. A step of providing a mask layer on a part of the surface of the removable layer, and selectively removing a part of the removable layer at a portion not covered with the mask layer through the mask layer, A selective removal step of providing a step on the surface of the removable layer according to the shape of the layer, and a step of providing a coating layer on the surface of the substrate so as to cover the removable layer and the mask layer, and A removing step of removing the removable layer.

The liquid jet recording head of the present invention is manufactured by the above-described method of manufacturing a liquid jet recording head of the present invention.

[0010]

The removable layer corresponding to the ink flow path is laminated, a mask layer is provided on a part of the surface of the removable layer, and the removable layer in a portion not covered with the mask layer via the mask layer. Is selectively removed, so that a step corresponding to the shape of the mask layer is provided on the surface of the removable layer. After that, if a coating layer is provided on the surface of the substrate so as to cover the removable layer and the mask layer and the remaining removable layer is removed, the step structure on the surface of the removable layer is transferred to the coating layer. An ink flow path having a structure will be formed. In this case, the two-dimensional shape of the step structure can be controlled by controlling the pattern (two-dimensional shape) of the mask layer.
For example, the height of the step structure can be controlled by controlling the removal time or the like.

In order to more strictly regulate the shape of the step formed in the selective removal step, the removable layer is assumed to be a stack of a plurality of layers, and the plurality of layers are removed under the removal conditions used in the selective removal step. The removal rates of the layers may be different from each other. By doing so, even if there are some fluctuations in the removal conditions or variations due to location due to changes in the removal rate at the interface between the plurality of layers, the removal in the selective removal process can be accurately performed at this interface. The height of the stepped structure can be accurately controlled. Also, the mask layer may be removed in the removing step.

[0012]

Embodiments of the present invention will now be described with reference to the drawings. FIG. 1 is a perspective view of an essential part showing the shape of an ejection port and an ink flow path of a liquid jet recording head having a step structure in an ink flow path, and FIGS. 2 (A) to 2 (E) are each an embodiment of the present invention. FIG. 3 is a diagram for explaining the principle of the method of manufacturing the liquid jet recording head of FIG. 3, and FIGS. 3 to 5 are diagrams for explaining the method of manufacturing the liquid jet recording head in Examples 1 to 3, respectively.

As shown in FIG. 1, in this liquid jet recording head, a desired number of energy generating elements 2 are arranged at predetermined positions on the surface of the substrate 1. The substrate 1 constitutes the bottom wall of the ink flow path 10 as described later, and
It can also function as a support for the coating resin layer 4, which is a component in which the ink flow path 10 and the ejection port 11 are integrally formed. The material of the substrate 1 is not particularly limited, and glass, metal, ceramics, etc. are appropriately used. The energy generating element 2 applies energy for ejecting from the ejection port 11 to the ink, and is composed of, for example, an electrothermal converter, a piezoelectric element, or the like. By the way, when an electrothermal converter is used as the energy generating element 2, this element heats the ink in the vicinity so that ejection energy is given to the ink, and the ink foams to eject ink droplets. When a piezoelectric element is used, mechanical energy of this element gives ejection energy to the ink.
Electrodes (not shown) to which drive signals for operating these elements are input are connected to the energy generating element 2. Further, in order to improve the durability of the energy generating element 2, various functional layers such as a protective layer are provided, but in the present invention, provision of such a functional layer is also acceptable.

An ink channel 10 is provided corresponding to the energy generating element 2, and the energy generating element 2 is arranged at the bottom of the ink channel 10. One end of the ink flow path 10 is open to the outside, and this serves as the ejection port 11. In the portion close to the ejection port 11, a part of the upper wall of the ink flow path 10 projects downward to form the step portion 3, and therefore the ejection port 11 has a concave cross section.
On the other hand, on the inner side of the liquid jet recording head, for example, around the location where the energy generating element 2 is provided,
The 0 cross section is rectangular. The other end of the ink flow path 10 communicates with a liquid chamber (not shown) that temporarily stores ink,
This liquid chamber is provided with an ink supply port (not shown) for supplying ink to the liquid chamber from the outside.

A desired number of ejection ports 11 and ink channels 10 communicating therewith can be provided for one liquid jet recording head. For example, 128 or 256 or more with a high density of 16 / mm. It is also possible to form a full line type by forming only the number that covers the entire width of the recording area of the recording medium.

Next, the operation of this ink jet recording head will be described. Ink, which is a recording liquid, is supplied from a liquid storage chamber (not shown) to a liquid chamber (not shown) through an ink supply port (not shown). The ink supplied into the liquid chamber is supplied into the ink flow path 10 due to the capillary phenomenon, and is stably held by forming a meniscus at the ejection port 11 at the tip of the ink flow path 10. By driving the energy generating element 2 by a driving unit (not shown), ejection energy is applied to the ink, and the action of the ejection energy causes the ink to be ejected from the ejection port 11 to perform recording.

Next, an embodiment of manufacturing the liquid jet recording head according to the present invention will be described with reference to FIGS. 2 (A) to 2 (E).

First, as shown in FIG. 2 (A), a substrate 1 on which an energy generating element 2 is formed in advance is used.
At the position that should become the upper ink flow path 10 and the ejection port 11,
A removable layer 5 made of a soluble resin is laminated. The removable layer 5 is patterned according to the shape of the ink flow path 10. The material of the removable layer 5 is not particularly limited as long as it can be removed in the selective removal step and the removal step described later, and in addition to the resin, an inorganic film, a mixed film of the resin and the inorganic material, or the like. Can be used.

Subsequently, as shown in FIG. 2B, a mask layer 8 is laminated on a part of the upper surface of the removable layer 5. The mask layer 8 is not provided on the upper wall of the ink flow path 10 at a position that should be the stepped portion 3, but is provided at a position other than the stepped portion 3. That is, the mask layer 8 is patterned according to the two-dimensional arrangement of the step portion 3. In addition, when the removal method in the selective removal step described later is such that the removable layer 5 is also removed by corrosion in the lateral direction (for example, in the case of isotropic etching), the side surface of the removable layer 5 is removed. Also, it is necessary to provide the mask layer 8 to protect the side surface of the removable layer 5 from being etched.

Next, as shown in FIG. 2C, the mask layer 8
The removable layer 5 is selectively partially removed via (selective removal step). As the removal method used at this time,
For example, plasma etching, ion etching, reactive ion etching, wet etching, or a method of immersing only the removable layer 5 in a solution is available. In order to strictly control the shape of the step portion 3 to be formed in the ink flow path 10 so that the step portion 3 has a rectangular parallelepiped shape as shown in FIG. 1, anisotropy such as reactive ion etching is used. It is desirable to use etching.

Then, as shown in FIG. 2D, a coating resin layer 4 made of a curable resin is applied on the substrate 1 to cover the removable layer 5 and the mask layer 8, and the ink supply port ( (Not shown) is provided, the glass plate 7 is bonded to the coating resin layer 4, and the coating resin layer 4 is cured. At this time, a liquid chamber (not shown) communicating with the ink flow path 10 is simultaneously formed. As a method of forming the liquid chamber, the coating resin layer 4 is not applied to the portion which becomes the liquid chamber, or the coating resin layer 4 is also applied to the portion which becomes the liquid chamber, but only this portion is uncured selectively. The uncured coating resin layer 4 which is left in the state
There is a method such as removing. Of course, the ink supply port provided on the glass plate 7 communicates with the liquid chamber. Since the coating resin layer 4 becomes a constituent member of this liquid jet recording head after curing, it is required to have characteristics such as high mechanical strength, heat resistance, adhesion to the substrate 1, resistance to ink, and no deterioration of ink. .. Also,
Removable layer 5 and mask layer 8 in the step of providing the coating resin layer 4
Since it should not be deformed, it is preferable that the coating resin layer 4 and the removable layer 5 or the mask layer 8 are not compatible with each other. That is, when the removable layer 5 or the mask layer 8 is soluble in a polar solvent, it is desirable to use the coating resin layer 4 having a polarity as small as possible, and conversely, the removable layer 5 or the mask layer 8 may be used. When it is soluble in a non-polar solvent, it is desirable to use a polar resin as the coating resin layer 4.

After the coating resin layer 4 is hardened, as shown in FIG. 2 (E), the removable layer 5 and the mask layer 8 are removed (removing step). As a removal method, for example, a method of removing the removable layer 5 and the mask layer 8 by immersing the removable layer 5 and the mask layer 8 in a liquid that dissolves, swells or peels, and the like can be cited. At this time, if necessary, ultrasonic treatment, spraying, heating, stirring, shaking, pressure circulation or other removal promoting means can be used. Further, instead of removing the removable layer 5 and the mask layer 8 at the same time, it is possible to remove one and then the other. In addition, if there is no problem in the ejection characteristics or durability even if the mask layer 8 remains in the ink flow path 10, the removable layer 5
It is also possible to remove only the mask layer 8 and not the mask layer 8.

As described above, the liquid jet recording head in which the step portion 3 is formed in the ink flow path 10 is manufactured. Of course, the position of the step portion 3 is close to the tip portion of the ink flow path 10, that is, the ejection port 11 here, but the position of the step portion 3 is not necessarily the tip portion of the ink flow path 10.
Further, the shape of the step portion 3 need not be a rectangular parallelepiped. Furthermore, the removable layer 5 may have a structure in which a plurality of layers are laminated. When using a structure in which multiple layers are stacked, when comparing the removal rates under the removal conditions in the selective removal process, the removal rate of the top layer is significantly higher than that of other layers. It is advisable to select the material forming each layer. If each layer is selected in this way, the selective removal of the removable layer 5 in the selective removal step is substantially stopped at the interface between the uppermost layer and the second layer, and fluctuations in removal conditions and locations Therefore, the height of the stepped portion 3 to be formed can be accurately regulated regardless of the variation due to.

Next, an example in which a liquid jet recording head is actually manufactured by the liquid jet recording head manufacturing method of this embodiment will be described. [Example 1] A metal film is used as the mask layer 8, and the removable layer 5 is a first layer (lower layer) 5a and a second layer (upper layer) 5b.
It is an example of a two-layer structure consisting of. A silicon wafer on which an energy generating element was previously formed was used as the substrate 1.

First, as the first layer 5a of the removable layer 5, a positive photoresist A having a thickness of 15 μm manufactured by Hoechst Co., Ltd.
Z4903 is used, and as the second layer 5b, a positive type photoresist OFPR83 manufactured by Tokyo Ohka Kogyo Co., Ltd. having a thickness of 5 μm is used. Pre-baking is performed at 90 ° C. for 10 minutes, and then exposure and development are performed to form the removable layer 5 on the ejection port of the substrate 1 and the ink flow path 1.
It was formed at a position that should be 0 (FIG. 3 (A)).

Next, an aluminum film 6 having a thickness of 50 nm was deposited on the surface of the substrate 1 on which the removable layer 5 was formed by sputtering (FIG. 3 (B)). Instead of sputtering, it may be deposited by a vapor deposition method or the like.
On the surface of the deposited aluminum film 6, a thickness of 0.5 μm
Positive photoresist film (OFPR8 manufactured by Tokyo Ohka Co., Ltd.)
3) is applied to form, exposed, and developed to form the ink flow path 1
The positive photoresist film at the position corresponding to the stepped portion 3 of 0 was removed, and the positive photoresist film corresponding to the portion of the ink flow path 10 that was not the stepped portion 3 remained.
It should be noted that the positive photoresist film is not left in the portion where the ink flow path 10 does not exist, that is, in the portion where the aluminum film 6 is directly laminated on the substrate 1. Then, the aluminum film 6 was etched through the positive photoresist film. A mixed acid solution of phosphoric acid, nitric acid and acetic acid was used for etching. As a result, the removable layer 5
Among them, the aluminum film 6 does not remain in the part corresponding to the step portion 3 of the ink flow path 10, and the aluminum film 6 remains in the part corresponding to the other part of the ink flow path 10, that is, aluminum. The film 6 is patterned to form the mask layer 8 made of the aluminum film 6 (FIG. 3 (C)). The aluminum film 6
A portion of the above that was directly laminated on the substrate 1 is removed.

Of course, the mask layer 8 may be formed of a metal other than aluminum, such as gold, copper, nickel chrome, or tungsten. Here, FIG.
As shown in (C), the mask layer 8 is also formed on the side surface of the removable layer 5.
However, when the removal method in the selective removal step is anisotropic etching, it is not necessary to form the mask layer 8 on the side surface of the removable layer 5.

Next, a selective removal step was performed. In this selective removal step, the substrate 1 on which the mask layer 8 has been formed is mounted in a reactive ion etching apparatus, and the second layer of the removable layer 5 is introduced through the mask layer 8 while introducing oxygen gas. Only 5b is selectively removed by reactive etching (FIG. 3 (D)). The reactive etching is anisotropic etching. Since the mask layer 8 made of an aluminum film is not corroded in the reactive etching in which oxygen is introduced, only the portion where the mask layer 8 is not provided is vertically etched and removed. The feasible layer 5 has a concave cross-section. First removable layer 5
In order to accurately stop the progress of the selective removal process at the interface between the second layer 5a and the second layer 5a, the removal rate of the second layer 5b with respect to the removal rate in the reactive etching >> the first It is necessary to select the materials of the first and second layers 5a and 5b so that the relationship of the removal rate of the layer 5a is established. The above-mentioned positive photoresists satisfy this relationship.

Subsequently, a liquid curable resin is applied by a spinner to a thickness of 100 μm on the surface of the substrate 1 after the selective removal step, and the glass plate 7 provided with an ink supply port is attached to the surface. The coating resin layer 4 was formed by heat curing at 130 ° C. for 10 minutes (FIG. 3 (E)). As the curable resin, a resin containing an epoxy resin as a main component and a photosensitizer added was used. The photosensitizer is added to form a liquid chamber by photolithography.
After being bonded together, the curable resin is exposed and developed to be formed.

Finally, the two types of photoresist constituting the removable layer 5 are removed by ultrasonic cleaning in ethanol for 10 minutes, and further, a solution for etching aluminum is used to form an aluminum film. The mask layer 8 was etched and removed. As a result, the ink flow path 10 in which the step portion 3 is provided close to the ejection port is opened, and the liquid jet recording head is completed (FIG. 3).
(F)). Example 2 This is an example in which a resin layer is used as the mask layer 8 and the removable layer 5 has a two-layer structure as in Example 1.

Using a silicon wafer on which energy generating elements are formed in advance as the substrate 1, and in the same manner as in Example 1, the first layer 5a made of the positive photoresist AZ4903 manufactured by Hoechst Co. having a thickness of 15 μm and the thickness thereof are formed. A removable layer 5 having a two-layer structure with a second layer 5b made of a positive photoresist OFPR83 manufactured by Tokyo Ohka Co., Ltd. having a thickness of 5 μm was formed at a position which should be an ejection port of the substrate 1 and an ink flow path 10 (FIG. 4). (A)). Then, a mask layer 8 made of resin was formed on the surface of the removable layer 5 by screen printing. Of course, the mask layer 8 is not provided in the portion corresponding to the step portion 3 (FIG. 4 (B)). Here, in consideration of printability and the like, a silver paste of c990 manufactured by Amicom having a thickness of 10 μm was used as the mask layer 8. The resin forming the mask layer 8 is not limited to this.

Next, as in Example 1, a selective removal step was performed by reactive ion etching to selectively remove only the second layer 5b through the mask layer 8 (FIG. 4C). ). At this time, in order to prevent the mask layer 8 from being eroded by the reactive ion etching, the removal rate of the second layer 5b under the removal conditions at this time >> the first
Removal rate of the layer 5a >> removal rate of the mask layer 8 must be selected so that the materials of the respective resins forming the first and second layers 5a and 5b and the mask layer 8 are selected. The first and second layers 5a and 5b and the mask layer 8 respectively using the positive photoresist and the silver paste described above are
This relationship is met. As a result of this selective removal process,
Only the portion of the second layer 5b where the mask layer 8 is not provided is vertically etched, and the cross section of the removable layer 5 has a concave shape.

Then, a liquid curable resin is applied to the surface of the substrate 1 after the selective removal step in the same manner as in Example 1, and the glass plate 7 provided with an ink supply port is attached. , The coating resin layer 4 provided with the liquid chamber was formed (FIG.
(D)). Finally, the removable layer 5 made of two types of resist and the mask layer 8 made of resin were removed by ultrasonic cleaning in acetone for 10 minutes. as a result,
The ink flow path 10 provided with the step portion 3 near the ejection port is opened, and the liquid jet recording head is completed (FIG. 4 (E)). In the second embodiment, since the mask layer 8 is formed by printing, the step portion 3 can be provided in the ink flow path 10 more easily. [Example 3] First layer (lower layer) 5a and second layer made of resin
Layer 5b (upper layer) and the first layer 5 made of an inorganic substance
This is an example in which the removable layer 5 having a three-layer structure composed of an inorganic layer 5c sandwiched between a and a second layer 5b is used. A metal film was used as the mask layer 8.

A silicon wafer on which energy generating elements are formed is used as a substrate 1, a positive photoresist AZ4903 manufactured by Hoechst Co., Ltd. having a thickness of 15 μm is coated on the substrate 1 by using a spin coater, and 90 ° C. 10
After pre-baking for 1 minute, exposing and developing, ink channel 1
The first layer 5a of the removable layer 5 was formed by patterning at positions to be 0 and discharge ports. Then, a 500-nm-thick first aluminum film 9a was formed over the entire surface of the substrate 1 on which the first layer 5a was formed (FIG. 5A). Subsequently, this first aluminum film 9
A positive type photoresist OFPR83 manufactured by Tokyo Ohka Kogyo Co., Ltd. having a thickness of 5 μm is applied to the surface of a using a spin coater.
After prebaking at 10 ° C. for 10 minutes, exposure and development were performed to form a pattern so as to match the first layer 5b to form a second layer 5b (FIG. 3 (B)). Further, a second aluminum film 9b having a thickness of 500 nm was formed by sputtering on the entire surface of the substrate 1 on which the second layer 5b was formed (FIG. 5C).

Next, the deposited second aluminum film 9
A positive photoresist film (OFPR83 manufactured by Tokyo Ohka Kogyo Co., Ltd.) having a thickness of 0.5 μm is applied on the surface of b, exposed, and developed to form a positive photoresist at a position corresponding to the step 3 of the ink flow path 10. The photoresist film is removed, and the ink flow path 10
Therefore, the positive photoresist film corresponding to the portion other than the step portion 3 is left. It should be noted that the positive photoresist film is not left in a portion where the ink flow path 10 does not exist, that is, in a portion where the first and second aluminum films 9a and 9b are directly laminated on the substrate 1. Then, the aluminum films 9a and 9b were etched through the positive photoresist film. For etching,
A mixed acid solution of phosphoric acid, nitric acid, and acetic acid was used. As a result, in the removable layer 5, the second aluminum film 9b does not remain in the portion corresponding to the step portion 3 of the ink flow channel 10, and the second aluminum film 9b remains in the portion corresponding to the other portion of the ink flow channel 10. Of the aluminum film 9b is left, that is, the second aluminum film 9b is patterned to form the mask layer 8 made of the second aluminum film 9b (FIG. 4).
(D)). Further, the first aluminum film 9a in the portion sandwiched between the first layer 5a and the second layer 5b remains and becomes the inorganic film 5c of the removable layer 5. The aluminum films 5a and 5b in the portion directly laminated on the substrate 1 are removed. Although the aluminum film is not left on the side surface of the removable layer 5 here, the aluminum film may be left on this side surface.

Next, in the same manner as in Example 1, a selective removal step by reactive ion etching was performed to selectively remove only the second layer 5b of the removable layer 5 through the mask layer 8. (Fig. 5 (E)). At this time, the inorganic layer 5c made of aluminum is provided between the first layer 5a and the second layer 5b of the removable layer 5, and since the inorganic layer 5c is not etched by the reactive ion etching, Second in reactive ion etching
Will be removed only in layer 5b. Therefore, only the portion of the second layer 5b where the mask layer 8 is not provided is vertically removed by etching, and the cross section of the removable layer 5 has a concave shape.

Then, a liquid curable resin is applied to the surface of the substrate 1 after the selective removal step in the same manner as in Example 1, and the glass plate 7 provided with an ink supply port is attached. The coating resin layer 4 provided with the liquid chamber was formed (FIG. 5).
(F)). Finally, the first layer 5a of photoresist
And second layer 5b are removed by performing ultrasonic cleaning in ethanol for 10 minutes, and further, inorganic layer 5c made of aluminum and mask layer 8 are removed by etching using a solution for etching aluminum. did. As a result, the removable layer 5 and the mask layer 8 are removed, and the ink flow path 1 in which the step portion 3 is provided close to the ejection port
0 is opened, and the liquid jet recording head is completed (FIG. 5 (G)). In Example 3, since the layer that is not removed in the selective removal step, that is, the inorganic layer 5c is laminated in the removable layer 5, the progress of the removal in the selective removal step is completely completed in the layer that is not removed. Therefore, the shape of the step portion 3 can be controlled more precisely.

FIG. 6 is an external perspective view showing an example of an ink jet recording apparatus (IJRA) in which the recording head obtained by the present invention is mounted as an ink jet head cartridge (IJC).

In FIG. 6, reference numeral 20 denotes an ink jet head cartridge (IJC) provided with a group of nozzles for ejecting ink so as to face the recording surface of the recording paper fed onto the platen 24. Reference numeral 16 is a carriage HC that holds the IJC 20, and is connected to a part of a drive belt 18 that transmits the driving force of the drive motor 17, and is slidable with two guide shafts 19A and 19B arranged in parallel with each other. By doing so, reciprocating movement over the entire width of the recording paper of the IJC 20 is possible.

Reference numeral 26 denotes a head recovery device, which is an IJC20.
Is arranged at one end of the movement path of, for example, at a position facing the home position. The drive force of the motor 22 via the transmission mechanism 23 causes the head recovery device 26 to operate, and
Cap the JC20. This head recovery device 2
In association with capping of the IJC 20 by the cap portion 26A of No. 6, ink is sucked by an appropriate suction means provided in the head recovery device 26 or ink is pressure-fed by an appropriate pressure means provided in an ink supply path to the IJC 20. The ejection recovery process such as removing the thickened ink in the nozzle by forcibly ejecting the ink from the ejection port is performed. Further, the IJC is protected by capping at the end of recording or the like.

A blade 30 is provided on the side surface of the head recovery device 26 and is made of silicon rubber as a wiping member. The blade 30 is a blade holding member 30.
The head recovery device 26 is held by A in a cantilever form.
Similarly to the above, the motor 22 and the transmission mechanism 23 operate to enable engagement with the ejection surface of the IJC 20. As a result, the blade 30 is projected into the movement path of the IJC 20 at an appropriate timing in the recording operation of the IJC 20 or after the ejection recovery process using the head recovery device 26, and the ejection surface of the IJC 20 is moved along with the movement operation of the IJC 20. It wipes off condensation, wetness, dust, etc.

The present invention brings excellent effects particularly in an ink jet recording type recording head and recording apparatus for recording by forming flying droplets by utilizing thermal energy among the ink jet recording systems.

With regard to its typical structure and principle, see, for example, US Pat. Nos. 4,723,129 and 4740.
No. 796, the present invention is preferably carried out using these basic principles. This recording method can be applied to both so-called on-demand type and continuous type.

This recording method will be briefly described. A sheet (liquid) holding a liquid (ink) or an electrothermal converter arranged corresponding to a liquid path is converted into a liquid (ink) corresponding to recording information. Heat energy is generated by applying at least one driving signal for giving a rapid temperature rise that causes the film boiling phenomenon beyond the nucleate boiling phenomenon, and causes the film boiling on the heat acting surface of the recording head. .. In this way, it is possible to form bubbles that correspond one-to-one to the drive signal applied from the liquid (ink) to the electrothermal converter, which is particularly effective for the on-demand recording method. The liquid (ink) is ejected through the ejection holes by the growth and contraction of the bubbles to form at least one droplet. It is more preferable to make this drive signal into a pulse shape, because the bubble growth and contraction are immediately and appropriately performed, so that the ejection of the liquid (ink) with excellent responsiveness can be achieved. As the pulse-shaped drive signal, U.S. Pat. Nos. 4,463,359 and 43,
Those as described in 45262 are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

The structure of the recording head is a combination of a discharge hole, a liquid flow path, and an electrothermal converter as disclosed in the above-mentioned specifications (straight liquid flow path or right-angled liquid flow path). In addition, as disclosed in U.S. Pat. No. 4,558,333 and U.S. Pat. No. 4,459,600, the present invention includes those having a configuration in which a heat acting portion is arranged in a bending region.

In addition, JP-A-59-123670 discloses a structure in which a common slit is used as a discharge hole of the electrothermal converter for a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective in a configuration based on Japanese Patent Laid-Open No. 138461 of 1984, which discloses a configuration in which the corresponding opening corresponds to the ejection portion.

Further, as a recording head in which the present invention is effectively used, there is a full line type recording head having a length corresponding to the maximum width of the recording medium which can be recorded by the recording apparatus. The full line head may be a full line configuration formed by combining a plurality of print heads as disclosed in the above-mentioned specification, or may be a single full line print head integrally formed.

In addition, by being attached to the apparatus main body, it can be electrically connected to the apparatus main body and can be supplied with ink from the apparatus main body by a replaceable chip type recording head or the recording head itself. The present invention is also effective when a cartridge-type recording head that is specially provided is used.

Further, it is preferable to add recovery means for the recording head, preliminary auxiliary means, etc. to the recording apparatus of the present invention because the recording apparatus of the present invention can be made more stable. Specific examples thereof include capping means, cleaning means, pressure or suction means, an electrothermal converter or a heating element other than this, preheating means for the recording head, recording means for the recording head, and recording means. It is also effective to perform stable recording by adding a means for performing a preliminary ejection mode for performing ejection different from the above.

Further, the recording mode of the recording apparatus is not limited to the mode in which only the mainstream color such as black is recorded, and either the recording head may be integrally formed or a plurality of recording heads may be combined. However, the present invention is also extremely effective for an apparatus provided with at least one of a multicolor of different colors or a full color by color mixing.

In the embodiments of the present invention described above, the liquid ink is used for explanation. However, in the present invention, either an ink which is solid at room temperature or an ink which is in a softened state at room temperature is used. Can be used. In the above-mentioned inkjet device, the temperature of the ink itself is generally adjusted within the range of 30 ° C. or higher and 70 ° C. or lower to control the temperature of the ink so that the viscosity of the ink is within the stable ejection range. Any liquid may be used as long as the ink is liquid.

In addition, the excessive temperature rise of the head or ink due to thermal energy is positively prevented by using it as the energy for the state change of the ink from the solid state to the liquid state, or the evaporation of the ink is prevented. It is also possible to use an ink that solidifies when left as it is. In any case, liquefaction occurs only when heat energy is applied, such as when the ink is liquefied by applying heat energy according to the recording signal and ejected as an ink liquid, or when it begins to solidify when it reaches the recording medium. The use of an ink having the property of applying is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or Japanese Patent Laid-Open No. 60-71260, facing the electrothermal converter in the state of being held as a liquid or solid in the recesses or through holes of the porous sheet. It may be in the form.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0055]

As described above, according to the present invention, a removable layer corresponding to an ink flow path and an ejection port is laminated, a mask layer is provided on a part of the surface of the removable layer, and the mask layer is interposed. Then, a part of the removable layer which is not covered with the mask layer is selectively removed, and then a coating layer is provided to form an ink flow path having a step structure corresponding to the shape of the mask layer. Therefore, in manufacturing the liquid jet recording head, there is an effect that an ink flow path having a step structure for stably ejecting ink can be easily formed in a free shape.

[Brief description of drawings]

FIG. 1 is a perspective view of essential parts showing the shapes of ejection ports and ink flow paths of a liquid jet recording head.

2A to 2E are diagrams illustrating the principle of a method for manufacturing a liquid jet recording head according to an embodiment of the present invention.

3A to 3F are diagrams illustrating a method of manufacturing the liquid jet recording head according to the first embodiment.

4A to 4E are diagrams illustrating a method of manufacturing a liquid jet recording head according to a second embodiment.

5A to 5G are diagrams illustrating a method of manufacturing the liquid jet recording head according to the third embodiment.

FIG. 6 is a perspective view showing an example of a recording apparatus including a liquid jet recording head according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Energy generating element 3 Step portion 4 Covering resin layer 5 Removable layer 5a First layer 5b Second layer 5c Inorganic layer 6, 9a, 9b Aluminum film 7 Glass plate 8 Mask layer 10 Ink flow channel 11 Discharge port

Claims (6)

[Claims] 1. A liquid jet having an ink flow path communicating with an ejection port, and an energy generating element arranged corresponding to the ink flow channel to generate energy used for ejecting ink from the ejection port. In the method for manufacturing a recording head, a step of stacking a removable layer on a substrate provided with the energy generating element so as to correspond to a position where the ink flow path is formed, and a part of the surface of the removable layer. A step of providing a mask layer on the removable layer, and selectively removing a part of the removable layer at a portion not covered with the mask layer through the mask layer, and forming a step corresponding to the shape of the mask layer on the removable layer. A step of selectively removing the surface of the substrate, a step of providing a coating layer on the surface of the substrate so as to cover the removable layer and the mask layer, and a step of removing the remaining removable layer. A method for manufacturing a liquid jet recording head characterized by having a degree. 2. The removable layer is a stack of a plurality of layers, and the removal rates of the plurality of layers are different from each other under the removal conditions used in the selective removal step. Manufacturing method of liquid jet recording head. 3. The method for manufacturing a liquid jet recording head according to claim 1, wherein the mask layer is also removed in the removing step. 4. A liquid jet recording head manufactured by the method for manufacturing a liquid jet recording head according to claim 1. 5. The liquid jet recording head according to claim 4, wherein the energy generating element is an electrothermal converter for generating heat by applying electric energy and causing a change in the state of the ink to cause ejection. 6. The liquid jet recording head according to claim 4, wherein the liquid jet recording head is a full-line type in which a plurality of ejection ports are provided over the entire width of the recording area of the recording medium.