JPH0479253A - Carrier - Google Patents

Abstract

PURPOSE:To prevent a wafer from being contaminated by particle adhesion, etc., and carry both the wafer and a wafer container by providing a shifting means with both a wafer supporting jig and a wafer container holding jig and performing wafer carrying operation and the carrying operation of wafer container. CONSTITUTION:A wafer supporting jig 12 holds the back plane of a wafer 10 to be held in a wafer container 21 at the optional position by the operation of a shifting means 100. The jig 12 also carries the held wafer 10 to the optional position while maintaining the holding condition (e.g. vacuum adsorption). A wafer container holding jig 13 holds the projecting part 22 of the wafer container 21 at the optional position by the operation of the shifting means 100. While maintaining the holding condition, the wafer container 21 is carried to the optional position by the operation of the shifting means 100. The carrying operations of the wafer and the wafer container are carried out by using the same shifting means 100. Thus, wafer contamination such as the adhesion of the particle of the wafer container 21 to the wafer is prevented.

Description

[Detailed description of the invention] [Industrial application field 1 The present invention relates to a transport device in a semiconductor manufacturing process.

[Prior art 1] As shown in FIG. 5, the conventional technology is composed of plate-shaped wafer holding jigs 2 and 01, a moving means 1 that rotates at θ2 and moves linearly in the X direction and the Z direction. It is known that the back side of the wafer 10 is held by the wafer holding jig 2 and the wafer 10 is transported to an arbitrary position by the moving means 1.

[Problems and Objects to be Solved by the Invention] However, although such conventional transport devices are capable of transporting only wafers from a wafer storage container etc. placed at an arbitrary position in advance, they have problems with transporting wafer storage containers. requires manual handling or separate conveyance equipment. In the case of manual work, particles generated by the worker adhere to the wafer. Further, in the case of a separate conveyance device, space and cost are required. There was a problem with this.

Therefore, in order to solve these conventional problems, the present invention prevents contamination such as adhesion of particles to the wafer,
Another object of the present invention is to provide a transport device capable of transporting wafers and transporting wafer storage containers.

[Means for Solving the Problems 1] In order to solve the above problems, the transport device of the present invention includes a wafer storage container holding jig and a wafer storage container holding jig in a transport device that transports wafers in a wafer storage container in a semiconductor manufacturing process. The present invention is characterized in that it has a wafer holding jig, and the wafer storage container holding jig and the wafer holding jig are moved by the same moving means to transport the wafer and the wafer storage container to an arbitrary position.

[Example] Examples of the present invention will be described below based on the drawings. 1st
In the figure, the wafer holding jig 12 that holds the back surface of the wafer and the wafer storage container holding jig 13 that holds the wafer storage container to be held are placed on the rotation shaft 20 of the moving means 1000 at a position that does not interfere with the respective transport operations (for example, in a 180° direction). ), and each is fixed to the rotating shaft 20. At this time, the wafer storage container holding jig 13 is made in advance to match the shape of the wafer storage container to be held. Further, the wafer holding jig 12 and the wafer storage container holding jig 13 follow the movement of the moving means 100 via the rotation shaft 20.
1, θ2, θ3, and arbitrary movement in each of the X and Z directions.

An example of the operation of the present invention is shown in FIGS. 2 and 3.

In FIG. 2, the wafer holding jig 12 is connected to the moving means 100.
By this operation, the back surface of the wafer 10 to be held inside the wafer storage container 21 located at an arbitrary position is held. Further, the held wafer 10 is transported to an arbitrary position by operating the moving means 100 while maintaining the held state (for example, by vacuum suction). At this time, the wafer storage container holding jig 21 is in a position where it does not interfere with the wafer transport operation (for example, interference with the held wafer 10 or interference with the wafer storage container 21).

In FIG. 3, the wafer storage container holding jig 13 holds the protrusion 22 of the wafer storage container 21 at an arbitrary position by the movement of the moving means 100. Further, while maintaining the holding state, the wafer storage container 21 is transported to an arbitrary position by operating the moving means 100. At this time, the wafer holding jig 13 prevents the wafer storage container transport operation (for example,
It is located so that it does not interfere with the wafer storage container.

In the embodiments described above, the wafer transport operation and
The transport operation of the wafer storage container can be carried out using the same moving means 100. This makes it possible to save space and reduce costs for equipment. In addition, by providing a wafer holding jig and a wafer storage container holding jig, the wafer storage container 2
It is possible to prevent wafer contamination such as adhesion of particles of No. 1 to the wafer.

Furthermore, as shown in Fig. 4, the wafer storage container holding jig is
It may be constructed by a book holding arm 31 and a displacement means 30 for displacing the holding arm 31. In this way, the interval W between the two holding arms 31 can be changed arbitrarily, and it becomes possible to hold and transport many types of wafer storage containers. Furthermore, by holding the wafer storage container between the two holding arms 31, it is possible to prevent the wafer storage container from falling.

[Effects of the Invention] As explained above, the transport device of the present invention includes a wafer holding jig and a wafer storage container holding jig in the same moving means, and performs a wafer transport operation and a wafer storage container transport operation. By providing this device, it is possible to save space and reduce costs for transfer equipment, and at the same time, by dividing the roles of the wafer holding jig and the wafer storage container holding jig, and using separate jigs. This has the effect of preventing contamination such as adhesion of particles to the wafer, which can occur with shared jigs.

[Brief explanation of the drawing]

FIG. 1 is an overall view of the transfer device of the present invention. FIG. 3 is an explanatory diagram of the transfer device of the present invention. FIG. 4 is a partial view showing an example of a wafer storage container holding jig in the transfer device of the present invention. FIG. 5 is an overall view of the prior art 1.100...Moving means 2.12...Wafer holding jig 10...Wafer 13...Wafer storage container holding jig 21...Wafer storage container 22 --Convex portion 30 of the wafer storage container...Displacement means 31...Holding arms θ1, θ2, θ3...Rotational operation direction Y of the moving means Distance in the linear movement direction of the moving means or more

Claims (1)

[Claims] A transport device that transports wafers in a wafer storage container in a semiconductor manufacturing process includes a wafer storage container holding jig and a wafer holding jig, and the wafer storage container holding jig and wafer holding jig are moved by the same moving means. A transport device that transports wafers and wafer storage containers to arbitrary positions by moving a jig.