JPH046642A - Magneto-optical disk - Google Patents
Magneto-optical diskInfo
- Publication number
- JPH046642A JPH046642A JP10708990A JP10708990A JPH046642A JP H046642 A JPH046642 A JP H046642A JP 10708990 A JP10708990 A JP 10708990A JP 10708990 A JP10708990 A JP 10708990A JP H046642 A JPH046642 A JP H046642A
- Authority
- JP
- Japan
- Prior art keywords
- magneto
- layer
- film
- thin film
- optical disk
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 claims abstract description 82
- 239000010409 thin film Substances 0.000 claims abstract description 38
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000001681 protective effect Effects 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 abstract description 11
- 230000035945 sensitivity Effects 0.000 abstract description 7
- 230000003247 decreasing effect Effects 0.000 abstract 1
- 238000002310 reflectometry Methods 0.000 abstract 1
- 239000010410 layer Substances 0.000 description 52
- 230000000694 effects Effects 0.000 description 9
- 230000003287 optical effect Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229920000515 polycarbonate Polymers 0.000 description 4
- 239000004417 polycarbonate Substances 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000002834 transmittance Methods 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 229910000808 amorphous metal alloy Inorganic materials 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 230000031700 light absorption Effects 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 239000002356 single layer Substances 0.000 description 2
- 229910052693 Europium Inorganic materials 0.000 description 1
- 229910002546 FeCo Inorganic materials 0.000 description 1
- 229910052688 Gadolinium Inorganic materials 0.000 description 1
- 230000005374 Kerr effect Effects 0.000 description 1
- 206010030924 Optic ischaemic neuropathy Diseases 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 229910004205 SiNX Inorganic materials 0.000 description 1
- 229910052771 Terbium Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 150000002910 rare earth metals Chemical class 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】
[産業上の利用分野]
本発明は垂直磁化膜上にレーザー光を用いて情報を記録
・再生・消去を行なう光磁気ディスクに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a magneto-optical disk in which information is recorded, reproduced and erased on a perpendicularly magnetized film using a laser beam.
[従来の技術]
従来より光磁気記録媒体の磁気カー回転角を増加させる
試みは数多くなされてきた。特に情報記録特性の優れて
いる希土類元素−遷移金属アモルファス合金膜を用いた
光磁気ディスクは、その磁気カー回転角が小さく、かつ
情報再生感度が悪いため、光磁気記録媒体膜の表面上に
透明な無機誘電体薄膜を形成し、この透明な無機誘電体
薄膜層でのエンハンス効果によりその見かけの磁気力回
転角を約2倍近く増大させ、情報再生感度を向上させる
努力がなされてきたことはよく知られた事実である。[Prior Art] Many attempts have been made to increase the magnetic Kerr rotation angle of magneto-optical recording media. In particular, magneto-optical disks using rare earth element-transition metal amorphous alloy films, which have excellent information recording properties, have a small magnetic Kerr rotation angle and poor information reproduction sensitivity. Efforts have been made to improve information reproduction sensitivity by forming a transparent inorganic dielectric thin film and increasing the apparent rotation angle of the magnetic force by about twice through the enhancement effect of this transparent inorganic dielectric thin film layer. This is a well-known fact.
しかしながら、従来のエンハンス効果による磁気カー回
転角の増大には光磁気媒体からの反射率の低下を伴い、
磁気カー回転角の増大にも拘らず、結果として記録感度
の向上はあまり得られなかった。However, the increase in the magnetic Kerr rotation angle due to the conventional enhancement effect is accompanied by a decrease in the reflectance from the magneto-optical medium.
Despite the increase in the magnetic Kerr rotation angle, little improvement in recording sensitivity was obtained as a result.
そこでこの反射率の低、下を改善する方法として、光磁
気記録媒体膜の裏面に反射膜を形成した多層膜構造の光
磁気ディスクの検討がなされてきた。しかしながら、こ
の反射膜を用いた多層膜構造の光磁気ディスクは、カー
回転角増大と反射率の向上により情報再生感度の向上に
はある程度効果を得ることが出来るが、反面光磁気記録
膜から戻ってくる情報再生光のノイズが大きいという欠
点を有している。Therefore, as a method for improving this low or low reflectance, studies have been conducted on magneto-optical disks having a multilayer film structure in which a reflective film is formed on the back surface of the magneto-optical recording medium film. However, although magneto-optical disks with a multilayer structure using this reflective film can improve information reproducing sensitivity to some extent by increasing the Kerr rotation angle and improving reflectance, on the other hand, there is It has the disadvantage that the information reproducing light that comes in has a large amount of noise.
[発明が解決しようとする課題]
本発明は、光磁気ディスクの光磁気記録膜における光線
の各層での界面における反射・透過及び薄膜内での光線
の吸収と多重干渉における光学的原理をふまえて、光磁
気効果を最大限に利用しカー回転角の増大、反射率の増
加かつ光磁気記録膜からの情報再生光に含まれるノイズ
の低減を図り、併せて光磁気ディスクの情報の記録感度
を向上させることを目的としている。[Problems to be Solved by the Invention] The present invention is based on the optical principles of reflection and transmission of light rays at the interfaces of each layer in the magneto-optical recording film of a magneto-optical disk, absorption of light rays within a thin film, and multiple interference. By making full use of the magneto-optical effect, we aim to increase the Kerr rotation angle, increase the reflectance, and reduce the noise contained in the information reproducing light from the magneto-optical recording film, and at the same time improve the information recording sensitivity of the magneto-optical disk. The purpose is to improve.
[課題を解決するための手段]
本発明は、透明基板上に無機誘電体薄膜よりなる第1層
、光磁気記録媒体薄膜よりなる第2層、無機誘電体断熱
兼保護薄膜よりなる第3層を少なくとも有する光磁気デ
ィスクにおいて。[Means for Solving the Problems] The present invention provides a first layer made of an inorganic dielectric thin film on a transparent substrate, a second layer made of a magneto-optical recording medium thin film, and a third layer made of an inorganic dielectric heat-insulating and protective thin film. In a magneto-optical disk having at least
ia) 第1層の無機誘電体薄膜は、屈折率をn +
)膜厚をd 1.光磁気ディスクの記録再生に用いら
れる半導体レーザー光線波長をえとするとき、膜厚d、
が
d、= [え/(4−n、)] ±lO%の範囲内
fb) 第2層の光磁気記録媒体薄膜d2が50Å〜
200人
(cl 第3層の無機誘電体薄膜は、屈折率をn a
、膜厚をd3とするとき、膜厚d3が。ia) The first layer of inorganic dielectric thin film has a refractive index of n +
) film thickness d1. When considering the wavelength of the semiconductor laser beam used for recording and reproducing on magneto-optical disks, the film thickness d,
is d, = [E/(4-n,)] within the range of ±lO% fb) The second layer magneto-optical recording medium thin film d2 is 50 Å ~
200 people (cl) The third layer of inorganic dielectric thin film has a refractive index of n a
, when the film thickness is d3, the film thickness d3 is.
d、=[3,え/(8・rr、) ±10%の範囲内
の条件を満たすことを特徴とする光磁気ディスクである
。The magneto-optical disk is characterized in that it satisfies a condition within the range of d,=[3,e/(8·rr,) ±10%.
透明基板は主としてガラス、ポリカーボネートの如く公
知のもので良い。The transparent substrate may be mainly made of known materials such as glass and polycarbonate.
第1層の膜圧d1は、無機誘電体薄膜の屈折率をn l
)光磁気ディスクの記録再生に用いられる半導体レー
ザー光線波長を丸とすると、d、= [λ/ (4・n
+ ) ]±lO%の範囲内の膜厚にする。第1層が
この条件を満たすときは、光学薄膜の多重反射干渉によ
る反射防止効果を引き起こし、第1層と第2層の界面で
起こるレーザー光線の反射率を抑えかつ第2層の光磁気
記録媒体へ侵入するレーザー光線強度を太き(すること
ができ、第1層と第2層の界面で発生する反射光による
ノイズを減少することができる。The film thickness d1 of the first layer is the refractive index of the inorganic dielectric thin film n l
) If the wavelength of the semiconductor laser beam used for recording and reproducing on magneto-optical disks is round, then d, = [λ/ (4・n
+ )] The film thickness should be within the range of ±1O%. When the first layer satisfies this condition, it causes an antireflection effect due to multiple reflection interference of the optical thin film, suppresses the reflectance of the laser beam that occurs at the interface between the first layer and the second layer, and also suppresses the reflectance of the laser beam that occurs at the interface between the first layer and the second layer. It is possible to increase the intensity of the laser beam that enters the layer, and it is possible to reduce noise due to reflected light generated at the interface between the first layer and the second layer.
第1層の無機誘電体としては限定するわけではないが、
公知であるSiNx、5iAI2ON。Although not limited to the inorganic dielectric material of the first layer,
Well-known SiNx, 5iAI2ON.
SiA、9N、TjO,CrOなどが使用できる。SiA, 9N, TjO, CrO, etc. can be used.
第2層はSm、Eu、Gd、Tb、DyHo、Er等の
希土類元素及びFe、Co、Ni等の遷移金属−アモル
ファス合金、またはMnB1.Cu等からなる光磁気記
録媒体薄膜では、この媒体自身が光線の吸収係数を持っ
ている。The second layer is made of a rare earth element such as Sm, Eu, Gd, Tb, DyHo, Er, etc. and a transition metal-amorphous alloy such as Fe, Co, Ni, or MnB1. In a magneto-optical recording medium thin film made of Cu or the like, the medium itself has a light absorption coefficient.
したがって、第2層と第3層の界面からのレザー光線の
反射光を大きくするには、光磁気記録媒体薄膜の膜厚を
薄くする必要がある。Therefore, in order to increase the reflected light of the laser beam from the interface between the second layer and the third layer, it is necessary to reduce the thickness of the magneto-optical recording medium thin film.
しかし、本発明の光磁気ディスクの磁気カー回転角の向
上には、従来の光磁気記録膜構造のエンハンス効果によ
る見かけの磁気カー回転角の向上させている方法とは異
なり、第2層の光磁気記録媒体薄膜中をレーザー光線が
第2層と第3層の界面まで透過させ、第2層と第3層の
界面での反射光を再び第2層の光磁気記録媒体薄膜中を
透過させて、実質的な光磁気記録媒体中を通過する距離
を増加することにより向上を図っている(反射光のファ
ラデー効果)。However, in order to improve the magnetic Kerr rotation angle of the magneto-optical disk of the present invention, unlike the conventional method of improving the apparent magnetic Kerr rotation angle by the enhancement effect of the magneto-optical recording film structure, the optical The laser beam is transmitted through the magnetic recording medium thin film to the interface between the second layer and the third layer, and the reflected light at the interface between the second layer and the third layer is transmitted again through the second layer magneto-optical recording medium thin film. This is improved by increasing the distance through which the light passes through the magneto-optical recording medium (Faraday effect of reflected light).
したがって、光磁気記録媒体薄膜の膜厚dが、ある程度
必要である。Therefore, the film thickness d of the magneto-optical recording medium thin film is required to a certain extent.
第4図と第5図は、第3図のような膜構造を持つ光磁気
ディスクの光磁気記録媒体薄膜の膜厚による光磁気記録
膜の光線透過率と磁気カー回転角の変化を示したもので
ある。Figures 4 and 5 show changes in the light transmittance of the magneto-optical recording film and the magnetic Kerr rotation angle depending on the thickness of the magneto-optical recording medium thin film of the magneto-optical disk having the film structure shown in Figure 3. It is something.
第4図と第5図から、光磁気記録媒体薄膜の膜厚d2が
50Å〜200人の時、光磁気記録媒体薄膜中を透過す
る光線の強度が大きく、かつ磁気カー回転角も大きいこ
とが確かめられ、光磁気記録媒体の好適な膜厚であるこ
とがわかる6第3層の膜厚d、は、第2層を透過してく
るレーザー−光線を第2層と第3層の界面において起こ
る光線の反射を向上させるために設定される。From FIG. 4 and FIG. 5, it can be seen that when the thickness d2 of the magneto-optical recording medium thin film is 50 Å to 200 nm, the intensity of the light beam transmitted through the magneto-optical recording medium thin film is large and the magnetic Kerr rotation angle is also large. The film thickness d of the third layer, which has been confirmed and found to be a suitable film thickness for a magneto-optical recording medium, is the film thickness d of the third layer, which is the thickness of the laser beam transmitted through the second layer at the interface between the second layer and the third layer. Set to improve the reflection of light that occurs.
この条件として、第3層の無機誘電体膜肋の屈折率をn
8、情報の記録・再生・消去に用いられる半導体レーザ
ー波長なλとすると、膜厚が、d、=[3,え/(8−
n、)] ±10%を満たすようにするとき、反射率が
向上する。As this condition, the refractive index of the inorganic dielectric film rib of the third layer is n
8. Let λ be the wavelength of a semiconductor laser used for recording, reproducing, and erasing information, then the film thickness is d, = [3, e/(8-
n, )] When ±10% is satisfied, the reflectance is improved.
本発明は、光磁気ディスクの記録膜構成から発生する情
報再生光の中に含まれるノイズをできるかぎり減少させ
、磁気カー回転角を向上させながら且つ情報再生光の信
号強度の向上を図ったことで、上記の記録感度の小さい
という光磁気ディスクの問題点を解決した。The present invention aims to reduce the noise contained in the information reproducing light generated from the recording film structure of a magneto-optical disk as much as possible, improve the magnetic Kerr rotation angle, and improve the signal strength of the information reproducing light. This solved the above-mentioned problem of magneto-optical disks, such as low recording sensitivity.
第3層の無機誘電体は断熱性、保護性を持てばよく、第
1層と同−物質又は異なる物質でも前記の条件を満たせ
ば充分使用できる。The inorganic dielectric material of the third layer only needs to have heat insulating properties and protective properties, and the same material as that of the first layer or a different material can be used as long as the above conditions are satisfied.
[作 用]
通常の光磁気ディスクにおいては、第1層の無機誘電体
膜での多重干渉を用いて光磁気現象のカー回転角という
θkを増加させて、C/Nを上げている。[Function] In a normal magneto-optical disk, the C/N is increased by increasing the Kerr rotation angle θk of the magneto-optical phenomenon using multiple interference in the first layer of inorganic dielectric film.
しかし、本発明は
■ 第2層の光磁気記録媒体での吸収は少ないが、第1
層を通過して磁性層中に侵入するレーザー光の増加だけ
を利用する。However, in the present invention, (1) absorption is small in the second layer magneto-optical recording medium, but absorption in the first layer is low;
Only the increase in laser light passing through the layer and penetrating into the magnetic layer is utilized.
■ 光磁気記録媒体層を超薄膜化したことにより、この
膜内を通過するレーザー光の距離が短いため裏面での反
射光が利用できる。(2) By making the magneto-optical recording medium layer ultra-thin, the distance of the laser light passing through this film is short, making it possible to utilize the light reflected from the back surface.
■ 光磁気記録媒体の膜厚が薄いため、第2層の誘電体
層まで光が侵入し、ここでの多重反射を利用して光磁気
記録媒体層界面での信号光を増幅させている。(2) Since the film thickness of the magneto-optical recording medium is thin, light penetrates to the second dielectric layer, and multiple reflections here are used to amplify the signal light at the interface of the magneto-optical recording medium layers.
ことからなり、従来の光磁気ディスクとは原理を異にす
るものである。Therefore, the principle is different from that of conventional magneto-optical disks.
すなわち、第2層の光磁気記録媒体層を超薄膜化したこ
とにより、裏面の反射光を利用できるようになった。こ
れは上記3層のそれぞれの条件を満たすことによりこれ
らの性能が得られる。That is, by making the second magneto-optical recording medium layer ultra-thin, it has become possible to utilize the light reflected from the back surface. These performances can be obtained by satisfying the conditions of each of the three layers mentioned above.
1実施例] 本発明による光磁気ディスクを図面を用いて説明する。1 Example] A magneto-optical disk according to the present invention will be explained using the drawings.
第1図は従来より公知の光磁気ディスク装置の光学系の
構成図であり、1は半導体レーザー発生装置、2はコリ
メーターレンズ、3はプリズム、4はハーフミラ−15
はフォーカスレンズ、6は光磁気記録媒体膜、7はスポ
ットレンズ、8は検光子、9はフォトダイオード、10
は情報記録消去用磁界発生コイルである。FIG. 1 is a block diagram of the optical system of a conventionally known magneto-optical disk device, in which 1 is a semiconductor laser generator, 2 is a collimator lens, 3 is a prism, and 4 is a half mirror 15.
is a focus lens, 6 is a magneto-optical recording medium film, 7 is a spot lens, 8 is an analyzer, 9 is a photodiode, 10
is a magnetic field generating coil for information recording and erasing.
まず、情報記録時あるいは情報消去時には半導体レーザ
ーlから出たレーザー光はコリメーターレンズ2、プリ
ズム3、ハーフミラ−4を透過し、フォーカスレンズ5
により光磁気記録媒体膜6上に約IL1mの径で集光さ
れ、光磁気記録媒体膜6の集光部の温度をキュリー温度
以上に上昇させると共に、その集光部の磁化の向きと逆
向きの磁界を情報記録消去用磁界発生コイル1oにより
印加して情報の記録あるいは消去を行なう。First, when recording or erasing information, the laser beam emitted from the semiconductor laser 1 passes through a collimator lens 2, a prism 3, a half mirror 4, and a focus lens 5.
The light is focused onto the magneto-optical recording medium film 6 with a diameter of approximately IL1m, raising the temperature of the light-concentrating portion of the magneto-optical recording medium film 6 to above the Curie temperature, and at the same time increasing the magnetization direction opposite to the direction of magnetization of the light-concentrating portion. A magnetic field is applied by the information recording/erasing magnetic field generating coil 1o to record or erase information.
また情報の再生時には、半導体レーザーlがら出た情報
記録時あるいは情報消去時のものより低出力のレーザー
光は、コリメーターレンズ2、プリズム3、ハーフミラ
−4を透過してフォーカスレンズ5により光磁気記録媒
体膜6上に約1umの径で集光された後、磁気カー効果
のため偏光面を磁気カー回転分だけ回転させて反射され
た後。In addition, when reproducing information, the laser beam emitted from the semiconductor laser 1, which has a lower power than that used during information recording or erasing, is transmitted through the collimator lens 2, prism 3, and half mirror 4, and then is optically magnetized by the focus lens 5. After the light is focused on the recording medium film 6 to a diameter of about 1 um, the plane of polarization is rotated by the magnetic Kerr rotation due to the magnetic Kerr effect, and then reflected.
再びハーフミラ−4で反射されスポットレンズ7、検光
子8を透過しフォトダイオード9で検出される。The light is reflected by the half mirror 4 again, transmitted through the spot lens 7 and the analyzer 8, and detected by the photodiode 9.
第2図は本発明による光磁気ディスクのl実施例の構成
図であり、IJはポリカーボネート基板、12は膜厚9
00人、屈折率n=23の5iAION膜、13は膜厚
ioo人(7)TbFeCo11i、14は膜厚l35
5人、屈折率n=23のS i A l ON膜である
。FIG. 2 is a configuration diagram of an embodiment of the magneto-optical disk according to the present invention, where IJ is a polycarbonate substrate, 12 is a film thickness of 9
00 people, 5i AION film with refractive index n=23, 13 is film thickness ioo people (7) TbFeCo11i, 14 is film thickness 135
It is a S i Al ON film with 5 people and a refractive index n=23.
第1図で示した光磁気ディスク装置のフォーカスレンズ
5から入射したレーザー光は第2図中の矢印で示されて
いるようにポリカーボネート基板11を透過した後、そ
の1部はTbFeCo膜13の表面で反射され、第1図
で示された光磁気ディスク装置のフォーカスレンズ5に
戻る。残りの大部分は、TbFeCo膜12中を透過し
5iAIONIli14との界面において反射した後、
そのまま直接第1図で示した光磁気ディスク装電のフォ
ーカスレンズ5に戻る。After the laser light incident from the focus lens 5 of the magneto-optical disk device shown in FIG. 1 passes through the polycarbonate substrate 11 as indicated by the arrow in FIG. and returns to the focus lens 5 of the magneto-optical disk device shown in FIG. Most of the remaining part passes through the TbFeCo film 12 and is reflected at the interface with the 5iAIONIli 14.
Directly return to the focus lens 5 of the magneto-optical disk loading shown in FIG.
このようにして構成された光磁気ディスクの磁気カー回
転角を、半導体レーザー(波長λ=830nm)を用い
て測定したところ0.84度あり、TbFeCo11i
単層の場合の磁気カー回転角0.30に比べ約2.8倍
の大きさとなった。The magnetic Kerr rotation angle of the magneto-optical disk constructed in this way was measured using a semiconductor laser (wavelength λ = 830 nm) and was found to be 0.84 degrees.
The magnetic Kerr rotation angle was approximately 2.8 times larger than the magnetic Kerr rotation angle of 0.30 in the case of a single layer.
また、光磁気ディスクからの情報再生光の記録膜による
反射率はR=45%以上であり、TbFeCo膜単層の
場合の反射率R=30%に比べ約1.5倍になる。更に
、情報の再生光の中に含まれるノイズを減少させている
。Further, the reflectance of the information reproducing light from the magneto-optical disk by the recording film is R=45% or more, which is approximately 1.5 times the reflectance R=30% in the case of a single layer TbFeCo film. Furthermore, noise contained in the information reproduction light is reduced.
以上の実施例においては光磁気記録媒体としてTbFe
Co膜、無機誘電体膜を屈折率n=23の5iAION
膜を用いて本発明による光磁気ディスクを作成した場合
の情報を述べたが、本発明による光磁気ディスクはTb
FeCo膜以外の光磁気記録媒体であるGdTbFe膜
、MnB1Cu膜、TbDyFe膜、DyCo膜など使
用した場合また5iAION膜以外の無機誘電体膜であ
るSiO膜、SiN膜、TiO膜など使用した場合も類
似の効果を有することがわかった。In the above embodiments, TbFe is used as the magneto-optical recording medium.
Co film and inorganic dielectric film are 5iAION with refractive index n=23.
Although information has been given regarding the case where the magneto-optical disk according to the present invention is made using a film, the magneto-optical disk according to the present invention has Tb
Similar results apply when magneto-optical recording media other than FeCo film, such as GdTbFe film, MnB1Cu film, TbDyFe film, DyCo film, etc. are used, and when inorganic dielectric films other than 5iAION film, such as SiO film, SiN film, TiO film, etc. are used. It was found that it has the following effect.
[発明の効果]
以上述べたように本発明による光磁気ディスクは、透明
基板上に無機誘電体薄膜なる第1層、光磁気記録媒体よ
りなる第2層、無機誘電体断熱兼保護薄膜よりなる第3
層を構成し、第1層の無機誘電体薄膜の屈折率をn +
を膜厚をd r 、光磁気ディスクの記録再生に用い
られる半導体レーザー光線波長をえとするとき、膜厚d
1が
d 1 = [λ/(4−n、)] ±10%の範囲
内になるように無機誘電体薄膜の膜厚を制御し、第2層
の光磁気記録媒体薄膜d2が50Å〜200人、第3層
の無機誘電体薄膜の屈折率をn ! )膜厚をd s
、情報の記録・再生・消去に用いられる半導体レーザー
光線波長をλとするとき、膜厚d、が、
da=[3,え/ 〔8・n−) ±lO%の範囲内
になるように無機誘電体薄膜の膜厚を制御することによ
って、磁気カー回転角を従来の光磁気ディスクに比べ増
加させ、かつ光磁気ディスクからの情報再生光の反射率
を増加させながらその中に含まれるノイズを低減化させ
た結果、従来の光磁気ディスクに比べ情報再生のC/N
を大きく向上させることが出来るという効果を有してい
る。[Effects of the Invention] As described above, the magneto-optical disk according to the present invention consists of a first layer made of an inorganic dielectric thin film on a transparent substrate, a second layer made of a magneto-optical recording medium, and an inorganic dielectric heat-insulating and protective thin film. Third
The refractive index of the first layer of inorganic dielectric thin film is n +
When the film thickness is d r and the wavelength of the semiconductor laser beam used for recording and reproducing on magneto-optical disks is, the film thickness d is
The thickness of the inorganic dielectric thin film was controlled so that d1 = [λ/(4-n,)] ±10%, and the thickness of the second layer magneto-optical recording medium thin film d2 was 50 Å to 200 Å. The refractive index of the third layer of inorganic dielectric thin film is n! ) film thickness d s
, when the wavelength of the semiconductor laser beam used for recording, reproducing, and erasing information is λ, the film thickness d is within the range of da=[3, er/[8・n−) ±lO%]. By controlling the thickness of the dielectric thin film, the magnetic Kerr rotation angle can be increased compared to conventional magneto-optical disks, and the noise contained therein can be suppressed while increasing the reflectance of information reproducing light from the magneto-optical disk. As a result, the C/N of information reproduction is lower than that of conventional magneto-optical disks.
It has the effect of greatly improving the
第1図は従来より公知の光磁気ディスク装置における光
学系の構成図、第2図は本発明による光磁気ディスクの
1実施例の構成図である。
第3図は光磁気記録媒体膜の膜厚による光線透過率の変
化を測定するために作成した膜構造である。
第4図は第3図の記録膜構成によける光線波長ん=83
0nmでの光磁気記録媒体の膜厚による光線透過率を示
す。
第5図は本発明の光磁気ディスクの記録膜構造における
光磁気記録媒体の膜厚によるカー回転角の変化を示した
グラフである。
第6図は本発明の光磁気ディスクの膜構造において第1
層を膜厚900人の5iAION膜、第2層を膜厚10
0人のTbFeCo膜とし、第3層の5iAIONの膜
厚による情報再生光の反射率の変化を示したグラフであ
る。
l・・・半導体レーザー
2−・・コリメーターレンズ
3・・−プリズム
4・・・ハーフミラ−
5・・−フォーカスレンズ
6・・−光磁気記録媒体膜
7・・・スポットレンズ
8・・−検光子
9−・・フォトダイオード
10・・・情報2訂消去用磁界発生コイル11・・−ポ
リカーボネート基板
12・・−膜厚900人の5iAION3iii13・
・−膜厚100人のTbFeCo11i14・・・膜厚
1355人の5iA1ON膜15・・・ガラス基板
16・・・膜厚900人の5iA1ON膜17・・−膜
厚50人−1000人の’rbpeCo膜FIG. 1 is a block diagram of an optical system in a conventionally known magneto-optical disk device, and FIG. 2 is a block diagram of an embodiment of a magneto-optical disk according to the present invention. FIG. 3 shows a film structure prepared to measure the change in light transmittance depending on the film thickness of a magneto-optical recording medium film. Figure 4 shows the wavelength of the light beam according to the recording film configuration shown in Figure 3 = 83
It shows the light transmittance depending on the film thickness of the magneto-optical recording medium at 0 nm. FIG. 5 is a graph showing the change in the Kerr rotation angle depending on the film thickness of the magneto-optical recording medium in the recording film structure of the magneto-optical disk of the present invention. FIG. 6 shows the first film structure of the magneto-optical disk of the present invention.
The layer is a 5iAION film with a thickness of 900, and the second layer is a 5iAION film with a thickness of 10.
3 is a graph showing changes in the reflectance of information reproducing light depending on the film thickness of the third layer of 5iAION, using a TbFeCo film of 0. l...Semiconductor laser 2...Collimator lens 3...-Prism 4...Half mirror 5...-Focus lens 6...-Magneto-optical recording medium film 7...Spot lens 8...-Detection Photon 9--Photodiode 10--Magnetic field generating coil for information 2 erasing 11--Polycarbonate substrate 12--Film thickness 900 people 5iAION3iii13.
・-TbFeCo11i14 with a thickness of 100 people...5iA1ON film 15 with a thickness of 1355 people...Glass substrate 16...5iA1ON film 17 with a thickness of 900 people...-'rbpeCo film with a thickness of 50 people-1000 people
Claims (1)
磁気記録媒体薄膜よりなる第2層、無機誘電体断熱兼保
護薄膜よりなる第3層を少なくとも有する光磁気ディス
クにおいて、 (a)第1層の無機誘電体薄膜は、屈折率をn_1、膜
厚をd_1、光磁気ディスクの記録再生に用いられる半
導体レーザー光線波長をλとするとき、膜厚d_1が d_1=[λ/(4・n_1)]±10%の範囲内 (b)第2層の光磁気記録媒体薄膜d_2が50Å〜2
00Å (c)第3層の無機誘電体薄膜は、屈折率をn_3、膜
厚をd_3とするとき、膜厚d_3が、 d_3=[3.λ/(8・n_3)]±10%の範囲内 の条件を満たすことを特徴とする光磁気ディスク。(1) In a magneto-optical disk having at least a first layer made of an inorganic dielectric thin film, a second layer made of a magneto-optical recording medium thin film, and a third layer made of an inorganic dielectric heat-insulating and protective thin film on a transparent substrate, (a ) The first layer of inorganic dielectric thin film has a film thickness d_1 of d_1 = [λ/(4・n_1)] within the range of ±10% (b) The second layer magneto-optical recording medium thin film d_2 is 50 Å to 2
00 Å (c) The third layer of inorganic dielectric thin film has a refractive index of n_3 and a film thickness of d_3, and the film thickness d_3 is as follows: d_3=[3. A magneto-optical disk characterized in that it satisfies a condition within the range of λ/(8・n_3)]±10%.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10708990A JPH046642A (en) | 1990-04-23 | 1990-04-23 | Magneto-optical disk |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10708990A JPH046642A (en) | 1990-04-23 | 1990-04-23 | Magneto-optical disk |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH046642A true JPH046642A (en) | 1992-01-10 |
Family
ID=14450189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10708990A Pending JPH046642A (en) | 1990-04-23 | 1990-04-23 | Magneto-optical disk |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH046642A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6514317B2 (en) | 2000-04-20 | 2003-02-04 | Tosoh Corporation | Method for purifying hydrogen-based gas mixture |
-
1990
- 1990-04-23 JP JP10708990A patent/JPH046642A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6514317B2 (en) | 2000-04-20 | 2003-02-04 | Tosoh Corporation | Method for purifying hydrogen-based gas mixture |
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