JPH0452553Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a metal seal joint used in gas equipment such as a shutoff valve or a mass flow meter.

[Prior Art] A high degree of airtightness with no fluid leakage is required for connections between piping and devices that control process gases and high vacuum used in semiconductor manufacturing equipment.

Therefore, a metal seal joint shown in FIG. 3 is used. Reference numeral 1 denotes a device body, and a cylindrical joint 3 is formed in communication with a fluid inlet/outlet hole 2 of the device body. The joint 3 is threadedly connected to a sleeve 4 welded to the pipe P by a cap nut 5, and is kept airtight by a metal gasket G tightened between the connecting ends of the joint 3 and the sleeve 4.

In such a metal seal joint, the joint 3 is integrally molded and processed into the device main body 1, or is fixed to the device main body 1 by welding.

For example, in a mass flow meter, important components such as sensors and filters for changing the flow range are built into the fluid inlet and outlet holes of the device body.
There is a desire to be able to remove the joint 3 from the main body of the device in order to replace these as necessary. In order to meet this demand, a metal seal joint has been proposed in which the joint 3 can be connected and removed by screwing into the main body of the device, as shown in FIG. Reference numeral 10 denotes a cylindrical connecting member, on its outer periphery, there are formed a male thread _S1 which is connected to the mating joint across the hexagonal nut part 11, and a male thread _S2 which is connected to the main body of the device. ing.

Reference numeral 20 denotes a gland that is rotatably fitted into this connecting member 10, and a flange member 21 is fixed to the end on the device side after a bearing 30 is fitted. A large diameter fluid inlet/outlet hole 2a communicating with the fluid passage 2 is formed in the device main body 1, and the connecting member 10 is screwed into the fluid inlet/outlet hole 2a. Reference numeral 40 designates a metal C-ring gasket, and when the hexagonal nut portion 11 of the connecting member 10 is rotated with a spanner or the like and screwed into the device main body 1, the flange member 21 is prevented from rotating due to the bearing 30, and the shaft is fixed. Metal C ring gasket only in direction 4
Since a tightening force is applied to the gasket, the gasket will not be damaged and a high degree of sealing with the main body of the device can be achieved. After the screwing is completed, the gland 20 is fixed to the connecting member 10 with the lock screw 50.

[Problems to be solved by the invention] However, the conventional joint shown in Fig. 2 requires a wrench to be applied to the hexagonal nut part 11 when connecting it to the pipe side joint as shown in Fig. 3 after connecting it to the main body of the device. In order to tighten the cap nut 5 with a screw, the connecting member 10 rotates relative to the device 1, which causes the screw to loosen and cause gas to leak.

Therefore, the technical problem of the present invention is to provide a metal seal joint that can be easily connected to and removed from the main body of the device and that solves all of the above-mentioned conventional problems.

[Means for Solving the Problems] The metal seal joint according to the present invention, as shown in the embodiment of FIG. A flange member 21 is fixed to the other end.

A sealing material 40 is disposed between the flange member 21 and the inner end surface of the fluid inlet/outlet hole of the device main body 1, and the end 22 of the gland 20 and the flange member 21
A joint connecting member 10a in which a male thread _S1 and a hexagonal nut part 11a are formed, and a hexagonal nut part 1
1b and a device connecting member 10b formed with a male screw _S2 .
and a bearing 30 are rotatably fitted into the gland. Also, the device connection member 10
The axial length of is the fluid inlet/outlet hole 2a of the device body 1.
It is formed to have a length that does not extend beyond the end surface of the device main body 1 and almost coincides with the end surface when the device is screwed into the device body 1 and connected.

[Function] When connecting or removing the joint by screwing it into the fluid inlet/outlet hole 2a of the device main body 1, the hexagonal nut portion 11a of the joint connection member 10a and the hexagonal nut portion 11b of the device connection member 10b are connected. Connections and removals can be made by fitting the socket trench at the correct angle and rotating it. Since the tightened device connecting member 10b does not protrude from the end face of the device main body 1, even if a wrench is applied to the hexagonal nut portion of the joint connecting member 10a when connecting it to the mating joint, the device connecting member 10b will not come out. without rotating,
The screws with the device body 1 will not come loose.

[Example] Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view showing the state in which the device is connected to the main body of the device. 10a is male screw S ₁ and hexagonal nut part 11
10b is a joint connecting member having a hexagonal nut portion 11b having the same shape as the hexagonal nut portion 11a of the joint connecting member 10a and a male thread _S2 .

20 is the ground, and one end is the large outer diameter end 2
2 is formed, and is rotatably fitted into the joint connecting member 10a and the device connecting member 10b. A flange member 21 is fixed to the other end of the gland 20 on the equipment side by welding.

30 is the device connecting member 10b and the flange member 21
This is a bearing fitted between the

The thus configured joint is connected by screwing the male screw S ₂ of the device connecting member 10b into the fluid inlet/outlet hole 2a communicating with the fluid passage 2 of the device main body 1.
The inner diameter of the fluid inlet/outlet hole 2a is formed larger than the diameter of the fluid passage 2, and a metal C ring gasket 4 is formed between the inner end surface due to this step and the flange member of the joint.
0 is inserted. Further, the length of the device connecting member 10b is formed to be approximately the same length so that it does not protrude beyond the end surface 1a of the device body 1 when the joint is connected to the device body 1 in the state shown in FIG.

When connecting the metal seal joint configured as described above to the fluid inlet/outlet hole 2a of the device main body 1, the angles of the hexagonal nuts of the joint connecting member 10a and the device connecting member 10b are aligned, and the screws are tightened with a socket trench. When the metal C-ring gasket 40 is tightened between the flange member 21 and the inner end surface of the fluid inlet/outlet hole 2a, the flange member 21 does not rotate due to the bearing 30, and the tightening force is applied only in the axial direction to the metal C-ring gas. Since it acts on the butt 40, a high degree of airtightness can be obtained from the seal between the device body and the joint.

Furthermore, when removing the joint from the device body, it can be easily done using a socket trench in the same way as when connecting it.

In this example, metal C, which is most suitable as a sealing material, is used.
Although a ring gasket is used, other metal gaskets may of course be used.

[Effect of the invention] As described above, according to the invention, the joint connecting member 1
0a and the device connection member 10b are separately connected to the ground 2.
0, and when screwed into the fluid inlet/outlet hole 2a of the device body 1, the device connecting member 10b is in the fluid inlet/outlet hole 2a and does not protrude from the end face of the device body. Therefore, there is no need to worry about accidentally loosening the connection screw with the device main body 1 when connecting with the mating joint.

Further, since the joint connecting member 10a can freely rotate with respect to the gland 20, a wrench can be applied from any direction, and connection and removal operations can be easily performed even in a narrow space.

[Brief explanation of the drawing]

FIG. 1 is a sectional view showing a state in which an embodiment of the metal seal joint according to the present invention is connected to a device body, and FIGS. 2 and 3 show a conventional example. 10a...Joint connection member, S ₁ ...Male thread, 11
a...Hexagonal nut part, 10b...Device connection member,
S ₂ ...Male thread, 11b...Hexagonal nut part, 20...
... Gland, 21 ... Flange member, 22 ... End, 30 ... Bearing, 40 ... Metal seal C-ring gasket.

Claims (1)

[Scope of utility model registration request] This is a joint that is screwed into and connected to a fluid inlet/outlet hole of the device body, and has a flange member 21 fixed to the other end of the cylindrical gland 20 on the device side, which has an end portion 22 with a large outer diameter. A sealing material 40 is disposed between the flange member 21 and the inner end surface of the fluid inlet/outlet hole of the device main body, and the end 22 of the gland
and the flange member 21, in order from the end side of the gland, there is a joint connecting member 10a formed with a male screw _S1 and a hexagonal nut portion 11a, and a hexagonal nut portion having the same shape as the hexagonal nut portion 11a. 11b, a device connecting member 10b formed with a male screw _S2 , and a bearing 30
The joint connecting member 10a and the device connecting member 10b are individually rotatably fitted together, and when the device connecting member is connected to the device main body, the device connecting member 10a and the device connecting member 10b are arranged such that when connected to the device main body, the device connecting member 10a and the device connecting member 10b are connected to the device body. A metal seal joint characterized by being formed to a length that prevents it from coming out.