JPH0434569Y2 - - Google Patents
Info
- Publication number
- JPH0434569Y2 JPH0434569Y2 JP11312187U JP11312187U JPH0434569Y2 JP H0434569 Y2 JPH0434569 Y2 JP H0434569Y2 JP 11312187 U JP11312187 U JP 11312187U JP 11312187 U JP11312187 U JP 11312187U JP H0434569 Y2 JPH0434569 Y2 JP H0434569Y2
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric vibrating
- substrate
- vibrating element
- plate
- piezoelectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 50
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 238000009434 installation Methods 0.000 claims description 12
- 239000000463 material Substances 0.000 claims description 7
- 230000005284 excitation Effects 0.000 claims description 6
- 238000005452 bending Methods 0.000 claims description 5
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 4
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 3
- 230000010355 oscillation Effects 0.000 claims description 3
- 239000004033 plastic Substances 0.000 claims description 3
- 229920001721 polyimide Polymers 0.000 claims description 3
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 2
- 239000004642 Polyimide Substances 0.000 claims description 2
- 229910052802 copper Inorganic materials 0.000 claims description 2
- 239000010949 copper Substances 0.000 claims description 2
- 229910052742 iron Inorganic materials 0.000 claims description 2
- 239000013078 crystal Substances 0.000 description 28
- 230000035882 stress Effects 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000605 extraction Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 238000011900 installation process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Landscapes
- Oscillators With Electromechanical Resonators (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
【考案の詳細な説明】
(産業上の利用分野)
本考案は、電子機器等に組み込まれるマイクロ
コンピユータのクロツク源等に用いられる圧電発
振器に関するものである。[Detailed Description of the Invention] (Field of Industrial Application) The present invention relates to a piezoelectric oscillator used as a clock source of a microcomputer incorporated in an electronic device or the like.
(従来技術とその問題点)
従来技術を気密封止型水晶発振器を例にとり説
明する。水晶発振器は、発振回路を構成する水晶
振動素板とICチツプ等の回路素子とを配線基板
上に設置し、一体的にキヤンにて気密封止して構
成する。この水晶振動素板は基板上の配線と導通
している円柱の金属製支持部材に、導電性接着剤
にて電気的機械的に接続される。ところが経時変
化試験(例えば85℃で数100時間)を行つた場合、
基板(例えばアルミナ基板)と支持部材(金属)
との熱膨張係数が異なるために歪が生じる。これ
は支持部材がソリツドな円柱であるので、その歪
による応力がほとんど緩和されずに支持部材上の
水晶振動素板に伝わるためである。一方導電性接
着剤は経時変化試験中は徐々に硬化が進む。この
ため水晶振動素板は応力負荷した状態で強固に固
定され、その結果水晶振動素板の回路素子として
の電気的特性を変化させ信頼性を著しく害してい
た。上記欠点を解決するために第6図に示すよう
に支持部材を金属板で構成し、熱歪に起因する水
晶振動素板への応力負荷を解消しようとしてい
た。この水晶発振器はリード端子11,12,1
3,14を有するベース1と、このベース1上に
プリント配線された電極パターン(図示せず)を
有するアルミナ製の絶縁基板8と、この絶縁基板
8上の所定の位置に配置されたIC、抵抗、コン
デンサ等の回路素子群44と、圧電振動素板であ
る水晶振動素板3と、これら回路素子群等を気密
封止するキヤン(図示せず)とからなる。水晶振
動素板3はその共振時の振動を他から機械的に阻
害されないよう絶縁基板8上に金属板を折り曲げ
加工した支持部材91,92を介して、絶縁基板
8から浮いた状態で支持されている。この従来例
のように板状支持部材を用いると、その柔軟性に
より歪応力がある程度緩和され、水晶振動素板の
回路素子としての電気的特性もある程度安定して
いた。(Prior art and its problems) The prior art will be explained using a hermetically sealed crystal oscillator as an example. A crystal oscillator is constructed by installing a crystal vibrating element and circuit elements such as IC chips, which make up an oscillation circuit, on a wiring board and integrally hermetically sealing them with a can. This crystal vibrating blank plate is electrically and mechanically connected with a conductive adhesive to a cylindrical metal support member that is electrically connected to the wiring on the board. However, when conducting a time-course test (for example, at 85℃ for several hundred hours),
Substrate (e.g. alumina substrate) and support member (metal)
Distortion occurs because the coefficient of thermal expansion differs between the two. This is because, since the support member is a solid cylinder, the stress due to its distortion is hardly alleviated and is transmitted to the crystal vibrating blank plate on the support member. On the other hand, the conductive adhesive gradually hardens during the aging test. For this reason, the crystal vibrating blank is firmly fixed in a stress-loaded state, and as a result, the electrical characteristics of the crystal vibrating blank as a circuit element are changed, significantly impairing reliability. In order to solve the above-mentioned drawbacks, the supporting member was constructed of a metal plate as shown in FIG. 6 in an attempt to eliminate the stress load on the crystal vibrating blank caused by thermal distortion. This crystal oscillator has lead terminals 11, 12, 1
3 and 14, an alumina insulating substrate 8 having an electrode pattern (not shown) printed on the base 1, and an IC placed at a predetermined position on the insulating substrate 8. It consists of a group of circuit elements 44 such as resistors and capacitors, a crystal vibrating element plate 3 which is a piezoelectric vibrating element, and a can (not shown) for hermetically sealing these circuit elements. The crystal vibrating plate 3 is supported in a floating state from the insulating substrate 8 via support members 91 and 92, which are formed by bending metal plates on the insulating substrate 8, so that the vibration at the time of resonance is not mechanically inhibited by others. ing. When a plate-shaped supporting member is used as in this conventional example, the distortion stress is alleviated to some extent due to its flexibility, and the electrical characteristics of the crystal vibrating element as a circuit element are also stabilized to some extent.
このように水晶振動素板は機械的振動によりそ
の回路素子としての役割を狙つており、しかも極
めてデリケートであるので、如何に支持し設置す
るかは重要な問題である。振動を阻害しないため
にも水晶振動素板と支持部材との機械的接続部分
は小さいほうが好ましく、また支持部材自体も小
さいほうが上記した熱歪による悪影響は少ない。
ところが支持部材全体を小さくすればするほど、
基板上にこの支持部材を設置する作業能率すなわ
ち作業性が低下する欠点を有していた。 In this way, the crystal vibrating blank aims to function as a circuit element through mechanical vibration, and is extremely delicate, so how to support and install it is an important issue. In order not to inhibit vibration, it is preferable that the mechanical connection between the crystal vibrating blank and the support member be small, and the smaller the support member itself, the less the adverse effects of the above-mentioned thermal distortion will occur.
However, the smaller the entire supporting member is, the more
This has the disadvantage that the efficiency of installing the support member on the substrate, that is, the workability is reduced.
また従来の支持部材は基板に設置することが必
要であるので、両者の接続点での接続不良が生じ
ることがあり、また製造面からも設置工程が必要
であるので、水晶発振器としてのコスト高につな
がつていた。 Furthermore, since conventional support members need to be installed on the substrate, connection failures may occur at the connection points between the two, and installation processes are also required from a manufacturing perspective, resulting in high costs for crystal oscillators. It was connected to.
(考案の目的)
本考案は上記欠点を解決するためになされたも
ので、外的影響に極めてデリケートな圧電振動素
板に対し、熱あるいは外部からの衝撃による歪を
ほとんど伝えず、回路素子としての信頼性が高
く、また基板における支持部材設置場所を考慮し
なくても小型化でき、さらに製造工数低減あるい
は作業性向上によるコスト安が可能となる圧電発
振器を提供することを目的とするものである。(Purpose of the invention) The present invention was made to solve the above-mentioned drawbacks. It transmits almost no distortion due to heat or external shock to the piezoelectric vibrating element, which is extremely sensitive to external influences, and can be used as a circuit element. The purpose of the present invention is to provide a piezoelectric oscillator that has high reliability, can be miniaturized without considering the location of supporting members on the board, and can reduce costs by reducing manufacturing man-hours or improving workability. be.
(考案の構成)
本考案による圧電発振器は、下層は折り曲げ自
在で塑性加工性の良好な金属板からなり、上層は
一部あるいは全部を薄い絶縁体からなる基板と、
この基板の一部を斜め上方に折り曲げてなる圧電
振動素板支持部と、圧電振動素板支持部を含む基
板の上面に所定のパターンで形成された印刷配線
のパターン電極と、前記圧電振動素板支持部に支
持され、かつこの支持部に形成されたパターン電
極と電気的に接続される少なくとも一対の励振電
極とを有する圧電振動素板と、前記基板の所定の
位置に配置されるとともに、前記パターン電極に
より電気的に接続されることにより前記圧電振動
素板とともに発振回路を構成する回路素子と、前
記基板並びに基板上の圧電振動素板と回路素子を
気密的に封止するケースとからなることを特徴と
するものである。(Structure of the invention) The piezoelectric oscillator according to the invention includes a lower layer made of a metal plate that is bendable and has good plastic workability, and an upper layer made of a substrate partially or entirely made of a thin insulator.
A piezoelectric vibrating element supporting part formed by bending a part of this substrate diagonally upward, a printed wiring pattern electrode formed in a predetermined pattern on the upper surface of the substrate including the piezoelectric vibrating element supporting part, and the piezoelectric vibrating element a piezoelectric vibrating element plate supported by a plate support part and having at least a pair of excitation electrodes electrically connected to a pattern electrode formed on the support part, and arranged at a predetermined position on the substrate; A circuit element that constitutes an oscillation circuit together with the piezoelectric vibrating element by being electrically connected by the pattern electrode, and a case that airtightly seals the substrate and the piezoelectric vibrating element on the substrate and the circuit element. It is characterized by:
(考案の作用)
本考案によれば、折り曲げ自在で塑性加工し易
い金属を基とした基板を用い、この基板上に必要
なパターン電極を形成し、このパターン電極に従
つて回路素子を配置するとともに、基板の一部を
圧電振動素板の支持部として用いているので、従
来のように新たに支持部材を設ける必要がなくな
り、よつて従来のように基板と支持部材との接続
不良の問題も生じない。また、基板の一部を支持
部としていることにより、例えば従来必要であつ
た支持部材は自立性があり、倒れにくい構造にす
る等、支持部材を基板に取り付ける作業を考慮し
なくてもよく、支持部は細型で、スプリング作用
の充分にとれる構成とすることができる。(Function of the invention) According to the invention, a metal-based substrate that is bendable and easy to be plastically worked is used, a necessary pattern electrode is formed on this substrate, and circuit elements are arranged according to this pattern electrode. At the same time, since a part of the substrate is used as a support part for the piezoelectric vibrating element, there is no need to provide a new support member as in the past, which eliminates the problem of poor connection between the board and the support member as in the past. will not occur. In addition, by using a part of the board as the support part, for example, the support member that was conventionally required is self-supporting, and there is no need to consider the work of attaching the support member to the board, such as having a structure that does not easily fall down. The support portion may be thin and configured to provide sufficient spring action.
(考案の実施例)
第1の実施例
本考案による第1の実施例を水晶発振器を例に
とり図面とともに説明する。第1図は水晶発振器
の内部構造を示す斜視図、第2図は基板構造を示
す部分拡大図である。尚、従来例と同じ構造部分
については同番号にて説明する。(Embodiments of the invention) First embodiment A first embodiment of the invention will be described with reference to the drawings, taking a crystal oscillator as an example. FIG. 1 is a perspective view showing the internal structure of a crystal oscillator, and FIG. 2 is a partially enlarged view showing the substrate structure. Note that the same structural parts as in the conventional example will be described using the same numbers.
この水晶発振器は概略的には、リード端子を植
設したベース1と、このベース1上部に設置され
支持部22,23を一体化した基板2と、基板2
上の所定の位置に設置される水晶振動素板3と、
回路素子41,42と、これら基板を外部より遮
断し気密封止する金属製のキヤン(図示せず)と
からなる。次に各部分を詳しく説明する。ベース
1は全体として直方体で、金属製のシエルからな
り、その4隅にはガラス等の絶縁材を介して各々
電気的に独立したリード端子11〜14を配置し
ている。またベース下部には縁となるフランジ部
が設けられており、前記キヤンのフランジ部との
気密封止部となる。 This crystal oscillator roughly consists of a base 1 on which lead terminals are implanted, a substrate 2 installed on top of the base 1 and integrated with supporting parts 22 and 23, and a substrate 2.
A crystal vibration plate 3 installed at a predetermined position on the top;
It consists of circuit elements 41 and 42, and a metal can (not shown) that shields these boards from the outside and hermetically seals them. Next, each part will be explained in detail. The base 1 has a rectangular parallelepiped shape as a whole and is made of a metal shell, and electrically independent lead terminals 11 to 14 are arranged at the four corners of the base 1 through an insulating material such as glass. Further, a flange portion serving as an edge is provided at the lower part of the base, and serves as an airtight sealing portion with the flange portion of the can.
基板2は第2図に示すように多層構造となつて
いる。すなわち、下層20は例えばアルミニウ
ム、銅、鉄等の折り曲げ自在で、塑性加工性に富
んだ材料で構成されており、その上層21にはポ
リイミド等の下層材料の折り曲げ性を阻害しない
柔軟な材料で薄い絶縁層が形成されている。この
絶縁層は、下層20の少なくとも上面の略全面
と、4本のリード端子11〜14が貫通する貫通
孔内に設けられている。この絶縁層の上部には所
定のパターン電極5が印刷配線技術により配置さ
れ、最終的にはリード端子と接続されるよう構成
されている(但し、細かいところまでは図示して
いない。)。そして図示していないが、このパター
ン電極5と水晶振動素板3と回路素子41,42
との接続点であるターミナル部(図示せず)を除
いてはこのパターン電極5は電極保護のためのい
わゆるグリーンレジストで被覆されている。 The substrate 2 has a multilayer structure as shown in FIG. That is, the lower layer 20 is made of a bendable material such as aluminum, copper, or iron and has high plastic workability, and the upper layer 21 is made of a flexible material such as polyimide that does not inhibit the bendability of the lower layer material. A thin insulating layer is formed. This insulating layer is provided on at least the entire upper surface of the lower layer 20 and in the through holes through which the four lead terminals 11 to 14 pass. A predetermined pattern electrode 5 is arranged on the top of this insulating layer by printed wiring technology, and is configured to be ultimately connected to a lead terminal (however, the details are not shown). Although not shown, the pattern electrode 5, the crystal vibrating element plate 3, and the circuit elements 41, 42
This pattern electrode 5 is covered with a so-called green resist for protecting the electrode, except for a terminal portion (not shown) which is a connection point with the electrode.
支持部22,23はこの基板2の一部を切り込
み、そして斜め上方へ折り曲げることにより構成
する。これら支持部上には図示していないがパタ
ーン電極が印刷配線されている。 The support parts 22 and 23 are constructed by cutting a part of the substrate 2 and bending it obliquely upward. Although not shown, patterned electrodes are printed and wired on these support parts.
水晶振動素板3は円形で、表裏面には各々励振
電極31と引出電極32とが形成(裏面について
は図示せず)されており、前記支持部間に設置さ
れ、導電性接合部材61,62で電気的機械的に
接合される。回路素子41,42はIC、抵抗、
コンデンサー等であり、本実施例では支持部2
2,23にて基板2より浮設された前記水晶振動
素板3の下に設置されている。 The crystal vibrating plate 3 is circular, and has an excitation electrode 31 and an extraction electrode 32 formed on the front and back surfaces (the back surface is not shown), and is installed between the supporting parts, and has a conductive bonding member 61, They are electrically and mechanically joined at 62. The circuit elements 41 and 42 are ICs, resistors,
This is a capacitor, etc., and in this example, the support part 2
It is installed under the crystal vibrating element plate 3 which is floated from the substrate 2 at points 2 and 23.
以上のように基板上に水晶振動素板3、回路素
子41,42を設置した後、不活性ガス雰囲気中
で前記キヤンにて気密封止する。 After the crystal vibrating element plate 3 and the circuit elements 41 and 42 are installed on the substrate as described above, they are hermetically sealed in the can in an inert gas atmosphere.
第2の実施例
本考案による第2の実施例を図面とともに説明
する。第3図は、第2の実施例を示す斜視図、第
4図は、第2の実施例に使用した基板と基板上の
電極パターンを示す平面図である。尚、第1の実
施例と同じ構造部分については同番号にて説明す
る。Second Embodiment A second embodiment of the present invention will be described with reference to the drawings. FIG. 3 is a perspective view showing the second embodiment, and FIG. 4 is a plan view showing the substrate used in the second embodiment and the electrode pattern on the substrate. Note that the same structural parts as in the first embodiment will be described using the same numbers.
ベース上に設置される基板7は、第1の実施例
と同じく下層はアルミニウム板、上層はポリイミ
ド膜の2層構造(図示せず)であり、第4図に示
すように、主として回路素子設置領域7aと、細
長い支持部72,73を有する水晶振動素板設置
領域7bとに分かれている。この基板7上には所
定のパターン電極5が印刷配線されており、もち
ろん支持部72,73にもパターン電極51,5
2が形成されている。この支持部72,73はあ
らかじめ斜め上方に折り曲げられており、このう
ち水晶振動素板設置部721,731は基板(非
折り曲げ部)と略平行になるように加工されてい
る。励振電極31、引出電極32が形成された水
晶振動素板3は前記設置部721,731に設置
され、導電性接合材61,62で電気的機械的に
接合される。尚、前記回路素子設置領域には回路
素子43である1チツプICが設置される。 The substrate 7 installed on the base has a two-layer structure (not shown) with the lower layer being an aluminum plate and the upper layer being a polyimide film, as in the first embodiment, and as shown in FIG. 4, circuit elements are mainly installed. It is divided into a region 7a and a crystal vibration blank plate installation region 7b having elongated support portions 72 and 73. A predetermined pattern electrode 5 is printed and wired on this substrate 7, and of course pattern electrodes 51, 5 are also provided on the support parts 72, 73.
2 is formed. The support portions 72 and 73 are bent diagonally upward in advance, and among these, the crystal vibrating blank plate installation portions 721 and 731 are processed so as to be substantially parallel to the substrate (unbent portion). The crystal vibrating blank plate 3 on which the excitation electrode 31 and the extraction electrode 32 are formed is installed in the installation parts 721 and 731, and is electrically and mechanically joined using conductive joining materials 61 and 62. Note that a 1-chip IC, which is the circuit element 43, is installed in the circuit element installation area.
この構造であると、支持部72,73が基板の
回路素子設置部から細長く斜め上方に延出してい
るので、非常にスプリング作用が大きく、外部か
らの衝撃や従来例で示した熱歪が大きく緩和さ
れ、水晶振動素板3に伝わる多種の応力を極力減
衰させることができる。 With this structure, the support parts 72 and 73 extend diagonally upward from the circuit element installation part of the board, so the spring action is very large, and external shocks and thermal distortion shown in the conventional example are large. It is possible to attenuate various types of stress transmitted to the crystal vibrating blank plate 3 as much as possible.
第3の実施例
本考案による第3並びに第4の実施例を第5図
a,bとともに説明する。第5図aは第3の実施
例による基板構造を示す図であり、第5図bは第
4の実施例による基板構造を示す図である。これ
ら各図は基板の構造のみを示しているのみである
ので、ベース、リード端子貫通孔、パターン電
極、圧電振動素板、回路素子等の図示は省略して
いる。Third Embodiment Third and fourth embodiments of the present invention will be described with reference to FIGS. 5a and 5b. FIG. 5a is a diagram showing a substrate structure according to a third embodiment, and FIG. 5b is a diagram showing a substrate structure according to a fourth embodiment. Since these figures only show the structure of the substrate, illustrations of the base, lead terminal through holes, pattern electrodes, piezoelectric vibrating element, circuit elements, etc. are omitted.
ベースの上面が円形の場合は、円形基板が要求
されるが、このような場合、第5図aに示すよう
に円形基板74の周囲を切り込み斜め上方へ折り
曲げ支持部75,76とすればよい。円形の水晶
振動素板は支持部先端の設置部751,761に
電気的機械的に接続される。第5図bは基板が平
面で見て正方形の場合を示しており、第5図aと
略同じく、基板の周囲近傍を切り込み斜め上方へ
折り曲げ支持部78,79としてもよい。尚、7
81,791は設置部となる。 If the upper surface of the base is circular, a circular substrate is required, but in such a case, the circumference of the circular substrate 74 may be cut and bent diagonally upward to form supporting portions 75 and 76, as shown in FIG. 5a. . The circular crystal vibrating blank plate is electrically and mechanically connected to installation parts 751 and 761 at the tip of the support part. FIG. 5b shows a case in which the substrate is square in plan view, and similar to FIG. 5a, the support portions 78 and 79 may be formed by cutting around the periphery of the substrate and bending it diagonally upward. In addition, 7
81,791 is an installation part.
これら実施例であると基板の周囲を支持部に用
いているので、スペース効率にも優れ、支持部の
スプリング作用も大きい。 In these embodiments, since the periphery of the substrate is used as the support section, space efficiency is excellent, and the spring action of the support section is also large.
以上の実施例では、ケースとして、金属製のベ
ースとキヤンを用いた気密端子を例示している
が、本考案はこれに限定されることはなく、例え
ば、セラミツク製のパツケージあるいは樹脂製の
パツケージを用いてもよい。また、基板の上層の
絶縁体を一部分だけ設けず、例えばいくつかのア
ース電極をこの露出した金属板に接続し、金属板
を共通ラインとして用い、さらにこの金属板をケ
ースに設けられたアース端子に接続してもよい。
なお、基板下層の金属板の下面は、使用するケー
スの引き出し電極、端子等の構成により必要に応
じて絶縁膜を設けてもよい。 In the above embodiments, an airtight terminal using a metal base and a metal can is exemplified as a case, but the present invention is not limited to this. For example, a ceramic package or a resin package can be used as the case. may also be used. In addition, it is possible to omit only a portion of the upper layer of the insulator on the board, for example, connect several ground electrodes to this exposed metal plate, use the metal plate as a common line, and then connect this metal plate to the ground terminal provided on the case. may be connected to.
Note that an insulating film may be provided on the lower surface of the metal plate of the lower layer of the substrate as necessary depending on the structure of the lead electrodes, terminals, etc. of the case to be used.
(考案の効果)
本考案によれば、折り曲げ自在で塑性加工し易
い金属を基とした基板を用い、基板の一部を圧電
振動素板の支持部として用いているので、基板に
回路素子を搭載のするとともに支持部材を介在さ
せることなしに圧電振動素板を搭載できる。よつ
て、従来のように新たに支持部材を設ける必要が
なくなり、基板と支持部材との接続不良の問題も
生じない、また、支持部材を基板に取り付ける作
業性を考慮することなく支持部を構成でき、圧電
振動素板の振動に悪影響を及ぼす各種の応力を吸
収、緩和する細小化された支持部にて圧電振動素
板を支持できるので、製造工数を削減でき、かつ
信頼性の高い圧電発振器を得ることができる。(Effects of the invention) According to the invention, a bendable and easily plastically processable metal-based substrate is used, and a part of the substrate is used as a support for the piezoelectric vibrating element, so that circuit elements can be mounted on the substrate. In addition to mounting, the piezoelectric vibrating element can be mounted without intervening a support member. Therefore, there is no need to provide a new support member as in the past, and there is no problem of poor connection between the board and the support member, and the support part can be configured without considering the workability of attaching the support member to the board. The piezoelectric vibrating plate can be supported by a miniaturized support part that absorbs and alleviates various stresses that adversely affect the vibration of the piezoelectric vibrating plate, reducing manufacturing man-hours and creating a highly reliable piezoelectric oscillator. can be obtained.
第1図,第2図は第1の実施例を示す図、第3
図,第4図は第2の実施例を示す図、第5図aは
第3の実施例を示す図、第5図bは第4の実施例
を示す図、第6図は従来例を示す図である。
2,7,74,77,8……基板、22,2
3,72,73,75,76,78,79……支
持部、5……パターン電極。
Figures 1 and 2 show the first embodiment, and Figure 3 shows the first embodiment.
Fig. 4 shows the second embodiment, Fig. 5a shows the third embodiment, Fig. 5b shows the fourth embodiment, and Fig. 6 shows the conventional example. FIG. 2, 7, 74, 77, 8...Substrate, 22, 2
3, 72, 73, 75, 76, 78, 79...Support part, 5...Pattern electrode.
Claims (1)
属板からなり、上層の一部あるいは全部を薄い
絶縁体からなる基板と、この基板の一部を斜め
上方に折り曲げてなる圧電振動素板支持部と、
圧電振動素板支持部を含む基板の上面に所定の
パターンで形成された印刷配線のパターン電極
と、前記圧電振動素板支持部に支持され、かつ
この支持部に形成されたパターン電極と電気的
に接続される少なくとも一対の励振電極とを有
する圧電振動素板と、前記基板の所定の位置に
配置されるとともに、前記パターン電極により
電気的に接続されることにより前記圧電振動素
板と発振回路を構成する回路素子と、前記基板
並びに素板上の圧電振動素板と回路素子を気密
的に封止するケースとからなる圧電発振器。 (2) 前記基板は下層がアルミニウム、あるいは
鉄、あるいは銅からなり、上面がポリイミドの
絶縁層であることを特徴とする実用新案登録請
求の範囲第1項記載の圧電発振器。 (3) 前記基板は、回路素子設置領域とこの領域か
ら支持部が斜め上方に延出した圧電振動素板設
置領域とからなり、この支持部の先端部近傍の
圧電振動素板設置部に圧電振動素板を設置し、
かつ圧電振動素板に形成された励振電極と圧電
振動素板設置部に形成されたパターン電極とを
電気的接続したことを特徴とする実用新案登録
請求の範囲第1項、第2項記載の圧電発振器。 (4) 前記基板は、その周囲近傍を切り込み、この
周囲に沿つた支持部を形成し、この支持部の先
端部近傍の圧電振動素板設置部に圧電振動素板
を設置し、かつ圧電振動素板に形成された励振
電極と圧電振動素板設置部に形成されたパター
ン電極とを電気的接続したことを特徴とする実
用新案登録請求の範囲第1項、第2項記載の圧
電発振器。[Claims for Utility Model Registration] (1) The lower layer is made of a metal plate that is bendable and has good plastic workability, and the upper layer is partially or entirely made of a substrate made of a thin insulator, and a part of this substrate is placed diagonally upward. A piezoelectric vibrating element support part formed by bending the
A pattern electrode of printed wiring formed in a predetermined pattern on the upper surface of a substrate including a piezoelectric vibrating element support part, and a pattern electrode supported by the piezoelectric vibrating element support part and formed on this support part are electrically connected. a piezoelectric vibrating element having at least a pair of excitation electrodes connected to the substrate; and a piezoelectric vibrating element arranged at a predetermined position on the substrate and electrically connected by the pattern electrode to connect the piezoelectric vibrating element and an oscillation circuit. A piezoelectric oscillator comprising a circuit element that constitutes the circuit element, and a case that airtightly seals the circuit element and the piezoelectric vibrating element plate on the substrate and the base plate. (2) The piezoelectric oscillator according to claim 1, wherein the lower layer of the substrate is made of aluminum, iron, or copper, and the upper surface is an insulating layer of polyimide. (3) The board consists of a circuit element installation area and a piezoelectric vibrating element installation area from which a supporting part extends obliquely upward, and a piezoelectric vibrating element is installed in the piezoelectric vibrating element installation area near the tip of this supporting part. Install a vibrating plate,
and the excitation electrode formed on the piezoelectric vibrating element plate and the pattern electrode formed on the piezoelectric vibrating element installation part are electrically connected, as claimed in claims 1 and 2 of the utility model registration claims. Piezoelectric oscillator. (4) The substrate is cut in the vicinity of its periphery to form a supporting portion along the periphery, and a piezoelectric vibrating material plate is installed in the piezoelectric vibrating material mounting portion near the tip of this supporting portion, and the piezoelectric vibrating material is A piezoelectric oscillator according to claims 1 and 2 of the utility model registration, characterized in that an excitation electrode formed on a blank plate and a pattern electrode formed on a piezoelectric vibrating blank plate installation part are electrically connected.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11312187U JPH0434569Y2 (en) | 1987-07-22 | 1987-07-22 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11312187U JPH0434569Y2 (en) | 1987-07-22 | 1987-07-22 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6418824U JPS6418824U (en) | 1989-01-30 |
JPH0434569Y2 true JPH0434569Y2 (en) | 1992-08-18 |
Family
ID=31352681
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11312187U Expired JPH0434569Y2 (en) | 1987-07-22 | 1987-07-22 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0434569Y2 (en) |
-
1987
- 1987-07-22 JP JP11312187U patent/JPH0434569Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPS6418824U (en) | 1989-01-30 |
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