JPH04323370A - Disk holder for sputtering system - Google Patents

Abstract

PURPOSE:To prevent a disk from being distorted even if the disk fixed to a disk holder is thermally expanded larger than the holder in the heating and sputtering chambers of a sputtering system. CONSTITUTION:A round hole 1a slightly larger than a disk D is bored through a plate having a specified thickness and constituting the disk holder 1 of a sputtering system, three disk holding pieces 1c1, 1c2 and 1c3 having a disk engaging hole 1b for holding the three positions of the lower periphery of the disk D are formed on the lower inner periphery of the round hole 1a, the pieces 1c1 and 1c3 on both sides are moved when the disk D is thermally expanded in its radial direction, and the intermediate piece 1c2 is displaced when heated in the direction of the disk D.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a disk holder for a sputtering apparatus for manufacturing magnetic disks constituting a magnetic disk device used as an external storage device for a computer system.

0002

2. Description of the Related Art FIG. 6 schematically shows a conventional sputtering apparatus for manufacturing magnetic disks, in which (A) is a plan view thereof, (B) is a front view thereof, and 11 is a disk unloading/loading chamber. Here, a plurality of magnetic disks coated with a magnetic film, which are attached to a disk holder 13 fixed on a cart 12 and temporarily removed from the in-line flow of the sputtering device, are removed from the disk holder 13 (not shown). The disk is removed by a robot hand, and the robot hand attaches the uncoated disk to the disk holder 13 and places it in an in-line flow. The cart 12 and disk holder 13 placed on this inline flow enter the vacuum heating chamber 14, and the cart 12
The disk attached to the upper disk holder 13 is heated.

Next, the cart 12 and the disc holder 1
3 enters the sputtering chamber 15 and sequentially Cr target 16
, CoNiCr target 17, C target 18, C
By passing in front of the target 19, a Cr coating and a CoNiC coating are sequentially applied to the surface of a disk made of aluminum (Al) with a NiP alloy coating formed on the surface as shown in FIG.
The R coating and the C coating are formed to produce the magnetic disk MD, and the magnetic disk MD is delivered to the unloading chamber 20. And (B) in Figure 6
As shown in FIG. 2, the trolley 12 and the disk holder 13 are lifted upward by an elevator device (not shown) and moved to the left as shown by the arrow to return to the disk unloading/loading chamber 11 again, where: The robot hand removes the magnetic disk on which the magnetic coating is formed from the disk holder 13, and attaches the disk on which no coating is formed to the disk holder 13.

FIG. 8 is a front view of the disc holder 13. In the example of this disc holder 13, a round hole 13a slightly larger than the outer diameter of the disc D is bored in a plate having a predetermined thickness. Three disk holding pieces 13b1, which have disk fitting grooves on the lower inner circumference of the hole 13a to hold three points on the lower outer circumference of the disk D so as not to fall;
13b2 and 13b3 are formed.

[0005]

[Problems to be Solved by the Invention] In order to improve the magnetic properties of the magnetic coating formed on the disk D as described above using a sputtering device, and to improve the adhesion between the disk D and the magnetic coating. , the disk D held in the disk holder 13 is heated in a heating chamber 14 before being coated with a sputtering device, and then enters a sputtering chamber 15 where it is sequentially coated with a Cr target 16, a Cr target 16, and a Cr target 16.
A magnetic film is formed by passing in front of the oNiCr target 17, C target 18, and C target 19. That is, the disk holder 13 and the disk D are heated in the heating chamber 14 and the sputtering chamber 15.

Conventional disk holder 13 as described above
is very thick compared to the thickness of the disk D. That is, the disc holder 13 is made of an aluminum plate with a thickness of about 10 mm, and the disc D is made of an aluminum plate with a thickness of about 2 mm with a NiP alloy coating formed on the surface. Therefore, the heat capacity of the disc holder 13 is For example, since the heat capacity of disk D is larger than
When the disc holder 13 is heated to about 300°C,
is approximately 100°C, and a temperature difference occurs due to the difference in mass. Therefore, as shown in FIG. 9, the thermal expansion of the disk D exceeds that of the disk holder 13, and this disk D' is held up by the three disk holding pieces 1 provided on the disk holder 13.
3b1, 13b2, and 13b3, there was a risk that distortion would occur on the disk D' surface.

As a measure to prevent the occurrence of this distortion, taking into account the thermal expansion of the disk D, the disk holder 13 is provided with three disk holding pieces 13b1, 13b2, and 13b3 whose groove spacing between disk fitting grooves is increased. Or, as shown in FIG. 10, the three disk holding pieces 13b1, 13b2, 13b3 are positioned so that the outer periphery of the disk D does not fit into the disk holding pieces 13b1, 13b3 at both ends of the three disk holding pieces at the same time. If these three disc holding pieces 13b1, 13b2, 13
This has caused a handling error during so-called handling, in which the disk D is attached or removed by a robot hand. The object of the present invention is to provide a disk holder for a sputtering apparatus that eliminates the above-mentioned problems.

[0008]

[Means for Solving the Problems] In order to solve the above-mentioned problems, the present invention, as shown in FIGS. 2 and 4, provides a system in which a disk holder to which a large number of disks are attached is connected to a coating material disposed in a sputtering chamber. In a sputtering device that forms a film by passing in front of a target that emits Three disk holding pieces 1c1, 1c2, 1c3 having disk fitting grooves 1b for holding the three points on the lower outer circumference of the disk D so as not to fall down are formed at the lower part of the inner circumference of the hole 1a. Holding piece 1c1, 1c
3 is a disk holder of a sputtering apparatus which is movable in the expansion direction when the disk D thermally expands in the radial direction.

Further, a round hole 1a slightly larger than the outer diameter of the disc D is bored in a plate having a predetermined thickness constituting the disc holder 1, and a lower part of the outer periphery of the disc D is inserted into the lower part of the inner periphery of the round hole 1a. three disk holding pieces 1c1 having disk fitting grooves 1b that hold the three points so as not to fall;
1c2 and 1c3 are formed, and the middle disk holding piece 1c2 is used as a disk holder of a sputtering device, which is disposed so as to be displaced in the direction of the held disk D when its temperature rises.

0010

[Operation] As described above, the present invention provides the disk fitting groove 1
Three disk holding pieces 1c1, 1c2,
Disc holding pieces 1c1 and 1c at both ends of 1c3
3 is provided so that it can move in the expansion direction when the disk D thermally expands in the radial direction, so even if the thermal expansion of the disk D is larger than the thermal expansion of the disk holder 1, the disk holders at both ends that hold the disk D Piece 1c1, 1c3
is movable in the radial direction of the disk D, so the disk D will not be distorted.

Furthermore, the middle disk holding piece 1c2 among the three disk holding pieces 1c1, 1c2, and 1c3 having the disk fitting groove 1b is arranged so that it is displaced in the direction of the held disk D when its temperature rises. Therefore, even if the disk holder 1 is heated and the disk D attached to it expands greatly, the intermediate disk holding piece 1c2 that holds the disk D will be displaced in the direction of the disk D, and this intermediate disk The disk D is held between the holding piece 1c2 and the holding piece 1c1 at one end, or between the middle disk holding piece 1c2 and the disk holding piece 1c3 at the other end, and the disk D is held between the disk holding pieces 1c1 and 1c at both ends.
Since the disk D is held in a fixed state between 3 and 3 and the thermal expansion of the disk D is not suppressed, the disk D will not be distorted.

0012

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the disk holder of the sputtering apparatus of the first invention will be described in detail with reference to FIGS. 1 and 2. In the figure, reference numeral 1 denotes a disk holder fixed on a cart (not shown).A large number of disks D are attached to this disk holder, and the disk holder 1 is passed in front of a target for discharging coating material arranged in a sputtering chamber of a sputtering device. A magnetic disk is manufactured by forming a magnetic coating on the surface of a disk D.

The disc holder 1 of the first invention has the following features:
As shown in FIGS. 1 and 2, a circular hole 1a slightly larger than the outer diameter of the disk D is bored in a plate having a predetermined thickness constituting the disk holder 1. Three disk holding pieces 1 having disk fitting grooves 1b that hold three points on the lower outer periphery of D so as not to fall down.
c1, 1c2, 1c3 are formed, among which the disk holding pieces 1c1, 1c3 at both ends hold the disk D
It is provided so that it can move in the radial direction when thermally expands in that direction.

FIG. 2 shows these three disk holding pieces 1c1.
, 1c2 , 1c3 , and Figure 3 is a detailed view of A-A in Figure 2.
It is a sectional view taken along the line, and shows the disk holding pieces 1c1 at both ends.
, 1c3 are provided with a hollow hole 1d in the disk holder 1 on the opposite side to the disk D, and by imparting elasticity to the disk holding pieces 1c1 and 1c3 at both ends, the holding pieces 1c1 and 1c3 at both ends can hold the disk D. When thermally expands in the radial direction, it becomes movable in that direction. The means for imparting elasticity to the disk holding pieces 1c1 and 1c3 at both ends is not limited to the above-mentioned embodiment, and various means can be considered.
For example, an inverted C-shaped branch piece may be formed from both sides of the intermediate disk holding piece 1c2, and holding pieces 1c1 and 1c3 at both ends may be provided on this inverted C-shaped branch piece.

FIGS. 4 and 5 show an embodiment of a disk holder according to the second invention, in which three disk holding pieces 1c1, 1c2, 1c3 each have a disk fitting groove 1b.
The middle disk holding piece 1c2 is provided so as to be displaced in the direction of the held disk D when its temperature rises. As a specific example of this, as shown in FIG. 5A, the middle disk holding piece 1c2 is connected to a coil spring made of a shape memory material that expands when heated and returns to its original state when cooled. 1e. In another specific example, as shown in FIG. 5B, the intermediate disk holding piece 1c2 is made of a U-shaped shape memory material that expands when heated and returns to its original state when cooled. The U-shaped lower piece is fixed to the inner periphery of a circular hole 1a drilled in the disc holder 1, and the U-shaped upper piece is provided with a disc fitting groove 1b for holding the disc. be.

[0016]

Effects of the Invention As explained above, the present invention provides a sputtering apparatus in which a disk holder with a large number of disks attached passes in front of a target disposed in a sputtering chamber and discharges a coating substance to form a coating. In this process, a round hole slightly larger than the outer diameter of the disk is bored in a plate with a predetermined thickness that constitutes the disk holder, and three points at the bottom of the outer circumference of the disk are placed at the bottom of the inner circumference of the hole to prevent it from falling. Three disk holding pieces with disk fitting grooves are formed, and the disk holding pieces at both ends are movable in the expansion direction when the disk thermally expands in the radial direction. Even if the expansion is larger than the thermal expansion of the disk holder, the disk holding pieces at both ends that hold the disk are movable in the radial direction of the disk, so the disk will not be distorted.

[0017] Furthermore, a round hole slightly larger than the outer diameter of the disc is bored in a plate having a predetermined thickness constituting the disc holder, and three points on the lower outer periphery of the disc are placed at the lower part of the inner periphery of the round hole. Three disk holding pieces are formed with disk fitting grooves to hold the disk in place, and the middle disk holding piece is disposed so that it is displaced in the direction of the held disk when its temperature rises. Even if the holder is heated and the disk attached to it expands greatly, the intermediate disk holding piece that holds the disk will be displaced in the direction of the disk, causing the intermediate disk holding piece and the disk holding piece at one end, or The disk is held between the middle disk holding piece and the other end disk holding piece,
Since the disk is fixed between the disk holding pieces at both ends and the thermal expansion of the disk is not suppressed, no distortion occurs in the disk.

[Brief explanation of drawings]

FIG. 1 is a front view of a disk holder of a sputtering apparatus according to a first invention.

FIG. 2 is a detailed view of the disk mounting portion of the disk holder of the first invention.

FIG. 3 is a sectional view taken along line AA in FIG. 2;

FIG. 4 is a front view of the disk holder of the sputtering apparatus of the second invention.

FIG. 5 is a detailed view of the disk mounting portion of the disk holder of the second invention.

FIG. 6 is a schematic diagram of a conventional sputtering apparatus.

FIG. 7 is a diagram showing the structure of a film on a magnetic disk.

FIG. 8 is a front view of a conventional disc holder.

FIG. 9 is an explanatory diagram of problems with a conventional disk holder.

FIG. 10 is an explanatory diagram of problems with a conventional disk holder.

[Explanation of symbols]

1 Disc holder 1a Round hole 1b Disk fitting groove 1c1 Disk holding piece 1c2 Disk holding piece 1c3 Disc holding piece 1c Disk fitting groove 1d Hollow hole 1e Coil spring 11 Unload/Load room 12 Trolley 13 Disc holder 13a Round hole 13b Holding piece 14 Heating chamber 15 Sputtering chamber 16 Cr target 17 CoNiCr target 18 C target 19 C target 20 Removal room D Disc MD magnetic disk

Claims (2)

[Claims] Claim 1: A disk holder (1) is configured in a sputtering apparatus in which a disk holder to which a large number of disks are attached passes in front of a target disposed in a sputtering chamber and discharges a coating material to form a coating. A round hole (1a) slightly larger than the outer diameter of the disc (D) is bored in a plate with a predetermined thickness, and three points are placed at the lower part of the inner periphery of the round hole (1a) at the lower part of the outer periphery of the disc (D). Three disk holding pieces (1c1, 1c2, 1c3) are formed, each having a disk fitting groove (1b) for holding the disk so that it does not fall down.
c3) is a disk holder for a sputtering apparatus, characterized in that the disk (D) is movable in the expansion direction when the disk (D) thermally expands in the radial direction. 2. A disk holder (1) in a sputtering apparatus in which a disk holder to which a large number of disks are attached passes in front of a target disposed in a sputtering chamber and discharges a coating substance to form a coating. A round hole (1a) slightly larger than the outer diameter of the disc (D) is bored in a plate with a predetermined thickness, and three points are placed at the lower part of the inner periphery of the round hole (1a) at the lower part of the outer periphery of the disc (D). Three disk holding pieces (1c1, 1c2, 1c3) are formed which have disk fitting grooves (1b) to hold the disk so that it does not fall down, and the middle disk holding piece (1c2) among them is A disk holder for a sputtering apparatus, characterized in that it is disposed to be displaced in the direction of the held disk (D).