JPH04305238A - Production of gas permeable composite film - Google Patents
Production of gas permeable composite filmInfo
- Publication number
- JPH04305238A JPH04305238A JP15420291A JP15420291A JPH04305238A JP H04305238 A JPH04305238 A JP H04305238A JP 15420291 A JP15420291 A JP 15420291A JP 15420291 A JP15420291 A JP 15420291A JP H04305238 A JPH04305238 A JP H04305238A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- film
- plasma treatment
- polymer
- gas permeable
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 3
- 239000002131 composite material Substances 0.000 title abstract description 4
- 239000007789 gas Substances 0.000 claims abstract description 31
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims abstract description 16
- 239000001301 oxygen Substances 0.000 claims abstract description 16
- 229910052760 oxygen Inorganic materials 0.000 claims abstract description 16
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 claims abstract description 10
- 238000009832 plasma treatment Methods 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 239000012528 membrane Substances 0.000 claims description 12
- 229920006254 polymer film Polymers 0.000 abstract description 18
- 230000035699 permeability Effects 0.000 abstract description 16
- 239000010408 film Substances 0.000 abstract description 7
- 230000008859 change Effects 0.000 abstract description 2
- 238000004132 cross linking Methods 0.000 abstract description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 abstract 2
- 125000000217 alkyl group Chemical group 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 230000001105 regulatory effect Effects 0.000 abstract 1
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 18
- 229920000642 polymer Polymers 0.000 description 10
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 239000000243 solution Substances 0.000 description 6
- 239000002904 solvent Substances 0.000 description 6
- 229920005597 polymer membrane Polymers 0.000 description 5
- 238000000926 separation method Methods 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- VZGDMQKNWNREIO-UHFFFAOYSA-N tetrachloromethane Chemical compound ClC(Cl)(Cl)Cl VZGDMQKNWNREIO-UHFFFAOYSA-N 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- 239000004809 Teflon Substances 0.000 description 3
- 229920006362 Teflon® Polymers 0.000 description 3
- 238000005266 casting Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000001704 evaporation Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- -1 polydimethylsiloxane Polymers 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 2
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 2
- XSTXAVWGXDQKEL-UHFFFAOYSA-N Trichloroethylene Chemical group ClC=C(Cl)Cl XSTXAVWGXDQKEL-UHFFFAOYSA-N 0.000 description 2
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 2
- 230000000052 comparative effect Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 150000008282 halocarbons Chemical class 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 239000007788 liquid Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- UBOXGVDOUJQMTN-UHFFFAOYSA-N trichloroethylene Natural products ClCC(Cl)Cl UBOXGVDOUJQMTN-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000008096 xylene Substances 0.000 description 2
- 241001465754 Metazoa Species 0.000 description 1
- LNSPFAOULBTYBI-UHFFFAOYSA-N [O].C#C Chemical class [O].C#C LNSPFAOULBTYBI-UHFFFAOYSA-N 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000004205 dimethyl polysiloxane Substances 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000011261 inert gas Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000012299 nitrogen atmosphere Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 1
- 230000000379 polymerizing effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000746 purification Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 230000001568 sexual effect Effects 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- DCGLONGLPGISNX-UHFFFAOYSA-N trimethyl(prop-1-ynyl)silane Chemical compound CC#C[Si](C)(C)C DCGLONGLPGISNX-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Abstract
Description
【0001】0001
【産業上の利用分野】本発明は気体透過性膜の製造方法
に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing gas permeable membranes.
【0002】0002
【従来の技術】気体の分離、精製において、省エネルギ
ー化などを理由に、気体透過性高分子膜を用いる方法が
注目されている。この種高分子膜を用いて空気から分離
、製造された酸素富化空気は、その燃焼効率向上性によ
る省エネルギー化、完全燃焼性による排出有害物質の低
減、動植物育成への利用などに期待されている。2. Description of the Related Art In the separation and purification of gases, methods using gas-permeable polymer membranes are attracting attention for reasons such as energy saving. Oxygen-enriched air separated from air and produced using this type of polymer membrane is expected to save energy by improving combustion efficiency, reduce harmful substances emitted due to its complete combustibility, and be used for raising animals and plants. There is.
【0003】このような用途からみて、この種高分子膜
が具備すべき性能として、■気体透過性が高いこと、■
気体分離性(分離しようとする気体と分離が不必要な気
体との透過性の比)が高いこと、があげられる。特に用
途などを考慮した場合、気体透過性が高いことが強く要
望される。このような性能を最も充足する素材として化
2によって示される構造式で表されるポリ置換アセチレ
ンがあげられる。[0003] From the viewpoint of such uses, the performances that this type of polymer membrane should have are: (1) high gas permeability; (2) high gas permeability;
One example is that it has a high gas separation property (ratio of permeability between the gas to be separated and the gas that does not require separation). Especially when considering the intended use, high gas permeability is strongly desired. A polysubstituted acetylene represented by the structural formula shown by Chemical Formula 2 is cited as a material that most satisfies such performance.
【0004】0004
【化2】[Case 2]
【0005】この素材は特定の有機溶剤に可溶で、溶液
からキャスト法によって容易に薄膜化できる。このよう
にして作られた膜は、通常の高分子フィルム(たとえば
ポリジメチルシロキサン)に比較して気体透過性が格段
に優れており、気体透過係数にすると、1桁以上も大き
い。[0005] This material is soluble in a specific organic solvent, and can be easily formed into a thin film from a solution by a casting method. The membrane produced in this manner has much better gas permeability than ordinary polymer films (eg, polydimethylsiloxane), and its gas permeability coefficient is more than an order of magnitude higher.
【0006】しかしこの高分子膜は、気体透過性が経時
的に低下する性質があり、長時間が経過したときの気体
透過性は、通常の高分子フィルムと同等あるいはそれ以
下にまで低下してしまう。However, the gas permeability of this polymer film decreases over time, and after a long period of time, the gas permeability decreases to the same level or lower than that of a normal polymer film. Put it away.
【0007】[0007]
【発明が解決しようとする課題】本発明は、ポリ置換ア
セチレンからなる高分子膜を用いる気体透過性膜におい
て、経時変化に優れた気体透過性、および気体分離性を
呈する膜を製造することを目的とする。[Problems to be Solved by the Invention] The present invention aims to produce a gas permeable membrane using a polymer membrane made of polysubstituted acetylene that exhibits excellent gas permeability and gas separation performance over time. purpose.
【0008】[0008]
【課題を解決するための手段】本発明は、ポリ置換アセ
チレンからなる薄膜の表面を酸素プラズマ処理すること
を特徴とする。[Means for Solving the Problems] The present invention is characterized in that the surface of a thin film made of polysubstituted acetylene is subjected to oxygen plasma treatment.
【0009】[0009]
【作用】ポリ置換アセチレンは、構造式が下記の化3で
表される二置換アセチレンを重合したものである。[Operation] Polysubstituted acetylene is a product obtained by polymerizing disubstituted acetylene whose structural formula is represented by the following chemical formula 3.
【0010】0010
【化3】[Chemical formula 3]
【0011】重合体は、TaC15,NbC15,Ta
Br5,NbBr5などのV族遷移金属触媒と、芳香族
炭化水素(ベンゼン、トルエン、キシレンなど)、脂環
式炭化水素(シクロヘキサンなど)、ハロゲン系炭化水
素(四塩化炭素、トリクロロエチレンなど)などの溶剤
を用い、不活性気体中で30〜100℃で加熱すること
によって得られる。[0011] The polymer is TaC15, NbC15, Ta
Group V transition metal catalysts such as Br5 and NbBr5 and solvents such as aromatic hydrocarbons (benzene, toluene, xylene, etc.), alicyclic hydrocarbons (cyclohexane, etc.), halogenated hydrocarbons (carbon tetrachloride, trichloroethylene, etc.) is obtained by heating at 30 to 100°C in an inert gas.
【0012】得られた重合体は、通常の方法で薄膜化す
ることができる。すなわち芳香族炭化水素(ベンゼン、
トルエン、キシレンなど)、脂環式炭化水素(シクロヘ
キサンなど)、ハロゲン系炭化水素(四塩化炭素、トリ
クロロエチレンなど)などの溶剤に溶解させ、この溶液
をキャストすることによつて薄膜化できる。The obtained polymer can be made into a thin film by a conventional method. i.e. aromatic hydrocarbons (benzene,
It can be made into a thin film by dissolving it in a solvent such as toluene, xylene, etc.), alicyclic hydrocarbons (cyclohexane, etc.), or halogenated hydrocarbons (carbon tetrachloride, trichloroethylene, etc.) and casting this solution.
【0013】このときキャストする下地としては、表面
が平滑なガラス板、金属板、溶剤に不溶な高分子板(テ
フロンなど)または液体平面(水、適当な水溶液、溶剤
かつ重合体が不溶である有機液体など)などが用いられ
る。その下地の上に溶液を延展し、蒸発させた後、形成
したフィルムを剥離することによって、この種重合体膜
が得られる。The substrate for casting at this time may be a glass plate with a smooth surface, a metal plate, a polymer plate insoluble in solvents (Teflon, etc.), or a liquid plane (water, an appropriate aqueous solution, a substrate in which the solvent and polymer are insoluble). (organic liquids, etc.) are used. This type of polymer film is obtained by spreading the solution on the substrate, evaporating it, and then peeling off the formed film.
【0014】この場合使用される下地の種類、溶液の濃
度、或は積層(重ね塗り)の回数によって、膜厚を調整
することができる。また機械的強度の補強のため、既製
の多孔質フィルムを支持体として使用することもできる
。In this case, the film thickness can be adjusted by the type of base used, the concentration of the solution, or the number of layers (overcoating). In addition, ready-made porous films can also be used as supports for mechanical strength reinforcement.
【0015】このようにして形成された重合体フィルム
は、プラズマ処理装置によってその表面をプラズマ処理
する。プラズマ処理装置としては、たとえば図1に示す
ようなものが利用できる。図1において、1は真空チャ
ンバー、2はガスが一定流量で導入されるガス導入口、
3はプラズマ発生用の電極、4はホルダー、5は真空排
気口である。ホルダー4の表面に重合体フィルム5が装
着され、支持される。The surface of the polymer film thus formed is subjected to plasma treatment using a plasma treatment apparatus. As the plasma processing apparatus, for example, one shown in FIG. 1 can be used. In FIG. 1, 1 is a vacuum chamber, 2 is a gas inlet through which gas is introduced at a constant flow rate,
3 is an electrode for plasma generation, 4 is a holder, and 5 is a vacuum exhaust port. A polymer film 5 is attached to and supported on the surface of the holder 4.
【0016】前記のように重合体フィルムをホルダー4
に装着した後、いったん内部を高真空(10−6〜10
−5torr程度)に減圧し、続いて処理ガス(酸素、
空気、二酸化炭素等)を導入し、任意の一定圧力に調節
する。その後電極3によってプラズマを発生させ、重合
体フィルム5の表面を酸素プラズマ処理する。As described above, the polymer film is placed in the holder 4.
After attaching it to the
-5 torr), then process gas (oxygen,
(air, carbon dioxide, etc.) is introduced and adjusted to an arbitrary constant pressure. Thereafter, plasma is generated by the electrode 3, and the surface of the polymer film 5 is treated with oxygen plasma.
【0017】このプラズマ処理時間によって表面の酸化
および架橋化の程度を調節することができる。ところが
あまり長時間にわたると、重合体フィルムが破壊される
恐れがあり、あまり好ましくない。したがって5分以内
が適当である。[0017] The degree of surface oxidation and crosslinking can be controlled by the plasma treatment time. However, if it lasts too long, the polymer film may be destroyed, which is not very preferable. Therefore, within 5 minutes is appropriate.
【0018】以上のようにして、ポリ置換アセチレン酸
素プラズマ処理膜が形成されるようになる。In the manner described above, a polysubstituted acetylene oxygen plasma treated film is formed.
【0019】[0019]
【実施例】実施例1 1−(トリメチルシリル)−1
−プロピン(アルドリッチ)1g、TaC15 0.
06g、トルエン10ccを用い、80℃にて24時間
、窒素雰囲気中で反応させることにより、粘調な重合体
ゲルを得た。この重合体ゲルをトルエンにて希釈した後
、多量のメタノール中に滴下して重合体を析出沈殿させ
た。
得られた重合体を濾過および乾燥し、そのあとトルエン
100ccに再溶解し、重合体溶液とした。得られた溶
液をテフロン板上に延展し、室温で溶剤を蒸発させた後
、テフロン板より剥離し、厚さ20μmの重合体膜を得
た。[Example] Example 1 1-(trimethylsilyl)-1
-Propyne (Aldrich) 1g, TaC15 0.
A viscous polymer gel was obtained by reacting at 80° C. for 24 hours in a nitrogen atmosphere using 06 g of toluene and 10 cc of toluene. This polymer gel was diluted with toluene and then dropped into a large amount of methanol to precipitate the polymer. The obtained polymer was filtered and dried, and then redissolved in 100 cc of toluene to obtain a polymer solution. The obtained solution was spread on a Teflon plate, and after evaporating the solvent at room temperature, it was peeled off from the Teflon plate to obtain a 20 μm thick polymer film.
【0020】得られた重合体膜を図1に示すプラズマ処
理装置に設置し、1×10−6torrまで減圧した後
、酸素を導入し、0.1torrに調節した。続いてプ
ラズマ発生用の電極間に13.56MHz,30Wの高
周波を導入しプラズマを発生させた。1分間プラズマを
発生させた後、重合体膜を取だした。The obtained polymer film was placed in a plasma processing apparatus shown in FIG. 1, and after the pressure was reduced to 1×10 −6 torr, oxygen was introduced and the pressure was adjusted to 0.1 torr. Subsequently, a high frequency of 13.56 MHz and 30 W was introduced between the electrodes for plasma generation to generate plasma. After generating plasma for 1 minute, the polymer film was taken out.
【0021】実施例2 実施例1と同様に調製した重
合体膜を水面上に延展し、室温で溶剤を蒸発させた後多
孔質支持体(ジュラガード#2400,ポリプラスチッ
クス)によってすくい上げ複合膜とした。以上の操作を
繰返し、表面膜厚が0.2μmの重合体膜を得た。続い
て実施例1と同様の条件で、表面重合体膜上を酸素プラ
ズマ処理した。Example 2 A polymer membrane prepared in the same manner as in Example 1 was spread on the water surface, and after evaporating the solvent at room temperature, it was scooped up with a porous support (Duraguard #2400, Polyplastics) to form a composite membrane. And so. The above operation was repeated to obtain a polymer film having a surface thickness of 0.2 μm. Subsequently, the surface polymer film was subjected to oxygen plasma treatment under the same conditions as in Example 1.
【0022】比較例 実施例1と同様に調製した厚さ
20μmの重合体膜を、その後の処理をすることなしに
そのまま用いた。Comparative Example A 20 μm thick polymer film prepared in the same manner as in Example 1 was used as it was without any further treatment.
【0023】以上の各例の膜について、ガス透過率測定
器を用いて、真空法、35℃において酸素および窒素の
透過量を測定した。各例の酸素透過係数(Po2),酸
素/窒素透過係数比(分離性能α)の初期値と、100
日経過後の値を下記の表1に、また経過時間特性を図2
に示す。[0023] Regarding the membranes of each of the above examples, the permeation amount of oxygen and nitrogen was measured using a gas permeability measuring device using a vacuum method at 35°C. Initial values of oxygen permeability coefficient (Po2), oxygen/nitrogen permeability coefficient ratio (separation performance α) of each example, and 100
The values after the passage of days are shown in Table 1 below, and the characteristics over time are shown in Figure 2.
Shown below.
【0024】なお酸素透過係数(Po2)の単位は、c
m3(STP)・cm/cm2・sec・cmHgであ
る。[0024] The unit of oxygen permeability coefficient (Po2) is c
m3(STP)・cm/cm2・sec・cmHg.
【0025】[0025]
【表1】[Table 1]
【0026】表1および図2に示す結果から明らかなよ
うに、実施例1,2による高分子複合膜は、比較例によ
るポリ置換アセチレン膜に比較して、気体透過性能(初
期性能)は低下するものの、長時間にわたって安定した
特性を維持し続けるため、時間経過後には従来方法によ
るものよりも、良い特性を呈することが判明する。As is clear from the results shown in Table 1 and FIG. 2, the gas permeation performance (initial performance) of the polymer composite membranes according to Examples 1 and 2 was lower than that of the polysubstituted acetylene membrane according to the comparative example. However, since it continues to maintain stable characteristics over a long period of time, it has been found that it exhibits better characteristics over time than those obtained by conventional methods.
【0027】[0027]
【発明の効果】以上詳述したように本発明によれば、ポ
リ置換アセチレンを素材として気体透過性膜を得るにあ
たり、従来法によるものよりも長期にわたって安定した
気体透過性能を呈するこの種気体透過性膜を製造するこ
とができる効果を奏する。Effects of the Invention As detailed above, according to the present invention, in obtaining a gas permeable membrane using polysubstituted acetylene as a material, this type of gas permeable membrane exhibits a more stable gas permeation performance over a long period of time than that obtained by conventional methods. This has the effect of making it possible to produce a sexual membrane.
【図面の簡単な説明】[Brief explanation of drawings]
【図1】本発明の実施例方法に使用する酸素プラズマ処
理装置の断面図である。FIG. 1 is a sectional view of an oxygen plasma processing apparatus used in an embodiment method of the present invention.
【図2】本発明によって得られた膜の、経過日数に対す
る酸素透過係数の変化を示す特性図である。FIG. 2 is a characteristic diagram showing the change in oxygen permeability coefficient with respect to the number of days elapsed for the membrane obtained according to the present invention.
1 真空チャンバー 2 ガス導入口 3 プラズマ発生用の電極 4 基板ホルダー 5 基板(高分子フィルム) 1 Vacuum chamber 2 Gas inlet 3. Electrode for plasma generation 4 Board holder 5 Substrate (polymer film)
Claims (1)
酸素プラズマ処理してなることを特徴とする気体透過性
膜の製造方法。[Claim 1] The surface of a thin film made of polysubstituted acetylene whose structural formula is represented by [Claim 1]
A method for producing a gas permeable membrane, characterized in that it is produced by oxygen plasma treatment.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15420291A JPH04305238A (en) | 1991-04-03 | 1991-04-03 | Production of gas permeable composite film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15420291A JPH04305238A (en) | 1991-04-03 | 1991-04-03 | Production of gas permeable composite film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH04305238A true JPH04305238A (en) | 1992-10-28 |
Family
ID=15579077
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15420291A Pending JPH04305238A (en) | 1991-04-03 | 1991-04-03 | Production of gas permeable composite film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH04305238A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2016052075A1 (en) * | 2014-09-30 | 2016-04-07 | 富士フイルム株式会社 | Gas separation membrane, method for producing gas separation membrane, gas separation membrane module and gas separator |
JP2016163872A (en) * | 2014-09-30 | 2016-09-08 | 富士フイルム株式会社 | Gas separation membrane, method for producing gas separation membrane, gas separation membrane module, and gas separator |
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1991
- 1991-04-03 JP JP15420291A patent/JPH04305238A/en active Pending
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JP2016163872A (en) * | 2014-09-30 | 2016-09-08 | 富士フイルム株式会社 | Gas separation membrane, method for producing gas separation membrane, gas separation membrane module, and gas separator |
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US11071953B2 (en) | 2014-09-30 | 2021-07-27 | Fujifilm Corporation | Gas separation membrane, method of producing gas separation membrane, gas separation membrane module, and gas separator |
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