JPH04244977A - Contactor apparatus - Google Patents

Abstract

PURPOSE:To lower AC noises in a test of an AC signal by providing a transformer to check current when an alternating current flowing through a pair of contactors, the one for signal lines and the other for the earth line is in the same direction. CONSTITUTION:A transformer 15i (i=1, 2) does not affect a secondary winding when the direction of current of the secondary winding is opposite to that of current of the primary winding but it affects as inductor to check the current flowing through the secondary winding when it is the same as the direction of the current of the secondary winding. The transformer and a pair of a contactor 1ai for signal lines and a contactor 1bi for the earth line are used to make it possible that an alternating current passing through a line (primary side) of signals of the transformer 15i can pass through the earth line (secondary side) of the same transformer 15i. This enables the lowering of a cross talk among input/output signals on a test substrate 75 as connected with the contactors thereby realizing highly accurate measurement of an AC signal.

Description

[Detailed description of the invention]

0001

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a contactor device, particularly for use in semiconductor test equipment.

0002

2. Description of the Related Art A semiconductor test device using a contactor device is shown in FIG. This semiconductor test device includes a test head 70 and a tester body 78. This test head 70 has a contactor device 7 as shown in FIG.
1 is incorporated, and a test board 75 is removably attached. An IC socket 76 is installed on this test board 75, and a device to be tested, that is, a DUT (device
under test) is incorporated. When this DUT is assembled into the IC socket 76 and the test board 75 is attached to the test head 70, the pins of the DUT and the contactors of the contactor device 71 are connected via the IC socket 76. In this state, a test signal is sent from the tester main body 78 to test the DUT.

A conventional contactor device 71 is shown in FIG. This contactor device 71 has a plurality of extendable contactors. These contactors include contactors 1a1 and 1a2 for signal lines through which signals pass, and contactors 1b1 and 1b2 for earth lines that provide zero potential. These contactors 1a1, 1a2, 1b1, 1
b2 is attached to the test head 70. The output end of the output amplifier 7 is connected to the contactor 1a1, and the resistor 101 is connected to the input end of the output amplifier 7. Further, the input terminal of the input amplifier 8 and the resistor 102 are connected to the contactor 1a2. Contactor 1b1,1
b2 is grounded. Contactor receivers 75a1, 75a2, 75b provided on the back side of the test board 75
1 and 75b2 respectively, contactors 1a1 and 1a2
, 1b1, 1b2, the test board 75 and the test head 70 are electrically connected. In addition, contactor receivers 75a1 and 75b1 and contactor receivers 75a2 and 75b2 have I
The DUT is electrically connected via the C socket,
This DUT is represented as load 5 and signal source 6 on FIG.

0004

An equivalent circuit diagram of the above-mentioned conventional contactor device 71 is shown in FIG. In this equivalent circuit diagram, when a load 5 is driven by an output amplifier 7, a signal from a signal source 6 is output, and this signal is captured by an input amplifier 8. During the AC signal test, the output amplifier 7
The current that comes out of the test board 75 and drives the load 5 passes through the ground on the test board 75 as indicated by the broken arrow 13, and then passes through a plurality of ground line contactors 1b1 and 1b2. Then, the current passing through the ground line contactor changes the AC voltage of the signal source 6 as seen from the input amplifier 8 due to the relationship of the contact resistance 9 and the like. This causes problems such as crosstalk between input and output. The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a contactor device that can reduce AC noise such as crosstalk during an AC signal test.

[0005]

[Means for Solving the Problems] The contactor device of the present invention includes a contactor for a signal line, a contactor for a ground line, and a transformer that suppresses the alternating current when the alternating currents flowing through the pair of contactors are in the same direction. It is characterized by having the following.

[0006]

[Operation] According to the contactor device constructed in this manner, when the alternating currents flowing through a pair of contactors are in the same direction, the alternating currents are suppressed by the transformer. This results in
AC noise such as crosstalk during AC signal testing can be reduced.

[0007]

DESCRIPTION OF THE PREFERRED EMBODIMENTS FIG. 1 shows the structure of an embodiment of a contactor device according to the present invention. The contactor device of this embodiment is different from the contactors 1a1 and 1b1 in the conventional contactor device.
and the output amplifier, and contactors 1a2 and 1b2
and the input amplifier, respectively, a toroidal transformer 151
, 152. The toroidal transformers 151 and 152 are constructed by winding an enameled wire around a toroidal core made of a magnetic material such as ferrite. This winding method is as shown in Figure 3, and as shown by the solid line, the direction of the current flowing through the secondary winding is 1.
If the current flows in the opposite direction to the secondary winding, it will not affect the secondary winding, but if the current flows in the same direction as shown by the broken line,
It works as an inductor to suppress the current flowing to the secondary winding side. An equivalent circuit diagram of this embodiment is shown in FIG. In this way, by using the transformer 15i (i=1, 2) and the pair of signal line contactor 1ai and ground line contactor 1bi, the alternating current passing through the signal line (primary side) of the transformer 15i is It can be made to pass through the ground line (secondary side) of the same transformer 15i. This reduces crosstalk between each input and output signal on the test board 75 connected by the contactor, making it possible to achieve highly accurate alternating current signal measurement.

In the above embodiment, a toroidal core was used as the core of the transformer, but an EI core as shown in FIG.
A similar effect can be obtained by using the core 12. Further, as shown in FIGS. 5 and 6, a pair of contactors 1a
, 1b and the ferrite core 16 of the transformer 15 may be formed integrally. In addition, the symbols 1c and 1d in FIG. 6 indicate the contacts of the contactors 1a and 1c, respectively, and the symbol 20 indicates a nonmagnetic insulator.

[0009]

According to the present invention, noise such as crosstalk during alternating current signal testing can be reduced, making it possible to measure analog ICs with high accuracy.

[Brief explanation of the drawing]

FIG. 1 is a connection diagram showing the configuration of an embodiment of a contactor device of the present invention.

FIG. 2 is an equivalent circuit diagram of the embodiment shown in FIG. 1.

FIG. 3 is an explanatory diagram illustrating the effect of a toroidal transformer.

FIG. 4 is a perspective view showing a contactor device using an EI core as the core of a transformer.

FIG. 5 is a perspective view showing a contactor device formed by integrating a core and a contactor.

FIG. 6 is a perspective view showing a contactor device formed by integrating a core and a contactor.

FIG. 7 is a perspective view showing a semiconductor test device.

FIG. 8 is a perspective view showing the configuration of a test head.

FIG. 9 is a connection diagram showing a conventional contactor device.

FIG. 10 is an equivalent circuit diagram of the contactor device shown in FIG. 9.

[Explanation of symbols]

1ai (i=1,2) Signal line contactor 1
bi (i=1,2) Ground line contactor 5
Load 6 Signal source 7 Output amplifier 8 Input amplifier 15i (i=1,2) Transformer 70 Test head 71 Contactor device 75 Test board

Claims (1)

[Claims] 1. A contactor for a signal line, a contactor for an earth line, and a transformer that suppresses the alternating current when the alternating currents flowing through the pair of contactors are in the same direction. Contactor device.