JPH04235246A - Alloy for metalizing for ceramics and metalizing method - Google Patents
Alloy for metalizing for ceramics and metalizing methodInfo
- Publication number
- JPH04235246A JPH04235246A JP41886390A JP41886390A JPH04235246A JP H04235246 A JPH04235246 A JP H04235246A JP 41886390 A JP41886390 A JP 41886390A JP 41886390 A JP41886390 A JP 41886390A JP H04235246 A JPH04235246 A JP H04235246A
- Authority
- JP
- Japan
- Prior art keywords
- ceramics
- alloy
- metalizing
- weight
- aluminum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims abstract description 35
- 238000000034 method Methods 0.000 title claims abstract description 17
- 229910045601 alloy Inorganic materials 0.000 title abstract description 13
- 239000000956 alloy Substances 0.000 title abstract description 13
- 229910000838 Al alloy Inorganic materials 0.000 claims abstract description 18
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 13
- 239000010936 titanium Substances 0.000 claims abstract description 13
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 13
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 12
- 239000010703 silicon Substances 0.000 claims abstract description 12
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 239000000203 mixture Substances 0.000 claims abstract description 9
- 238000007750 plasma spraying Methods 0.000 claims description 4
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 4
- -1 sialon Chemical compound 0.000 abstract description 4
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 4
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 4
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 4
- 230000001590 oxidative effect Effects 0.000 abstract description 3
- 230000005389 magnetism Effects 0.000 abstract description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 6
- 238000005219 brazing Methods 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000001465 metallisation Methods 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000010949 copper Substances 0.000 description 3
- 239000011104 metalized film Substances 0.000 description 3
- 229910052759 nickel Inorganic materials 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 238000007792 addition Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000002378 acidificating effect Effects 0.000 description 1
- 238000000637 aluminium metallisation Methods 0.000 description 1
- 229910002110 ceramic alloy Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000005496 eutectics Effects 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
- C04B41/50—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
- C04B41/51—Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
- C04B41/515—Other specific metals
- C04B41/5155—Aluminium
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
- C04B41/80—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone of only ceramics
- C04B41/81—Coating or impregnation
- C04B41/85—Coating or impregnation with inorganic materials
- C04B41/88—Metals
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2111/00—Mortars, concrete or artificial stone or mixtures to prepare them, characterised by specific function, property or use
- C04B2111/00474—Uses not provided for elsewhere in C04B2111/00
- C04B2111/00862—Uses not provided for elsewhere in C04B2111/00 for nuclear applications, e.g. ray-absorbing concrete
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Structural Engineering (AREA)
- Organic Chemistry (AREA)
- Ceramic Products (AREA)
- Coating By Spraying Or Casting (AREA)
Abstract
Description
【０００１】0001
【産業上の利用分野】本発明は、強度的に優れたセラミ
ックスのメタライズ用アルミニュウム合金及びセラミッ
クスのメタライズ方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an aluminum alloy for metallizing ceramics having excellent strength and a method for metallizing ceramics.
【０００２】0002
【従来の技術】従来、セラミックス面にアルミニュウム
合金をメタライズするためには、（１）セラミックス表
面を高融点金属法で金属化し、次いで、ニッケルを付着
した後アルミニュウム合金をロウ付けする方法、（２）
セラミックス表面を銅を含む活性金属で金属化し、次い
で、アルミニュウム合金をロウ付けする方法及び（３）
セラミックス表面をパラジウム等で活性化した後銅また
はニッケルなどで金属化し、次いで、アルミニュウム合
金をロウ付けする方法が知られている。[Prior Art] Conventionally, in order to metallize an aluminum alloy on a ceramic surface, there have been two methods: (1) metallizing the ceramic surface using a high melting point metal method, then adhering nickel, and then brazing an aluminum alloy; )
A method of metallizing a ceramic surface with an active metal containing copper and then brazing an aluminum alloy, and (3)
A known method is to activate the ceramic surface with palladium or the like, metallize it with copper or nickel, and then braze it with an aluminum alloy.
【０００３】0003
【発明が解決しょうとする課題】しかし、従来の上記（
１）〜（３）の方法では、セラミックスとアルミニュウ
ム合金との中間層として、磁性材料であるニッケル又は
酸化に対し腐食しやすい銅を介在させるため、磁場がか
かる場所では使用できない、とか、高温下又は酸性雰囲
気等の場所では使用できない、といった制限が存在する
。[Problem to be solved by the invention] However, the above-mentioned conventional method (
In methods 1) to (3), nickel, which is a magnetic material, or copper, which is easily corroded by oxidation, is interposed as an intermediate layer between the ceramic and aluminum alloy, so it cannot be used in a place where a magnetic field is applied, or it cannot be used at high temperatures. There are also restrictions such as not being able to be used in locations such as acidic atmospheres.
【０００４】そこで、磁場がかかる場所又は酸化雰囲気
中でも使用できるアルミニュウムメタライズ法の開発が
、今日強く要望されている。本発明は、上述した従来の
問題点に着目してなされたものであって、上記要望に沿
うセラミックスのメタライズ用アルミニュウム合金及び
セラミックスのメタライズ法を提供するにあり、詳細に
は、セラミックス表面に直接アルミニュウム合金をメタ
ライズするメタライズ用合金の組成と接合方法を提供す
ることを目的とする。[0004]Therefore, there is a strong demand today for the development of an aluminum metallization method that can be used in places where a magnetic field is applied or in an oxidizing atmosphere. The present invention has been made in view of the above-mentioned conventional problems, and aims to provide an aluminum alloy for metallizing ceramics and a method for metallizing ceramics that meet the above-mentioned demands. The purpose of the present invention is to provide a composition and a joining method for a metallizing alloy for metallizing aluminum alloys.
【０００５】[0005]
【課題を解決するための手段】そして、本発明は、上記
目的を達成するため、アルミニュウム７６．０〜８３．
２重量％、シリコン１１．０〜１２．０重量％及びチタ
ン上４．８〜１３．０重量％の組成から成るメタライズ
用合金を提供するものであり、また、このメタライズ用
合金をセラミックス表面にプラズマ溶射し、セラミック
ス表面をメタライズするセラミックスのメタライズ方法
を提供するものである。[Means for Solving the Problems] In order to achieve the above object, the present invention provides aluminum 76.0 to 83.
2% by weight of silicon, 11.0 to 12.0% by weight of silicon, and 4.8 to 13.0% by weight of titanium. The present invention provides a method for metallizing ceramics by plasma spraying to metalize the surface of ceramics.
【０００６】本発明で使用できるセラミックスとしては
、アルミナ、窒化珪素、サイアロン及び炭化珪素が挙げ
られる。また、これらのセラミックスは、通常の方法に
おいて焼成した焼結体が使用でき、その形状等によって
限定されるものではない。Ceramics that can be used in the present invention include alumina, silicon nitride, sialon, and silicon carbide. Moreover, these ceramics can be used as sintered bodies fired by a normal method, and are not limited by their shape or the like.
【０００７】重量でアルミニュウム８７．４％、シリコ
ン１２．６％の合金は、共晶であり、ロウ付け用アルミ
ニュウム合金として知られているが、これは、通常のロ
ウ付け雰囲気である真空状態や窒素状態において、金属
には濡れるが、セラミックスには濡れず、そのため、セ
ラミックス表面のメタライズ化には利用できないもので
ある。[0007] An alloy of 87.4% aluminum and 12.6% silicon by weight is eutectic and is known as an aluminum alloy for brazing, but it cannot be used in a vacuum state, which is a normal brazing atmosphere. In the nitrogen state, it wets metals but not ceramics, and therefore cannot be used for metallizing ceramic surfaces.
【０００８】本発明者等は、プラズマ溶射法を適用し、
上記アルミニュウム合金を溶射することにより、セラミ
ックス表面にアルミニュウム合金をメタライズすること
ができる、との知見を得た。更に、アルミニュウム８７
．４％、シリコン１２．６％の合金に、チタンを外割重
量で５％〜１５％加えることにより、実用上使用できる
、付着強度が５ｋｇ／ｍｍ２以上のメタライズ膜を得る
ことができる、という知見を得た。[0008] The present inventors applied a plasma spraying method,
It has been found that by thermal spraying the above aluminum alloy, the aluminum alloy can be metallized on the ceramic surface. Furthermore, aluminum 87
．． Knowledge that by adding 5% to 15% of titanium by weight to an alloy of 4% silicon and 12.6% silicon, it is possible to obtain a metallized film with an adhesion strength of 5 kg/mm2 or more that can be used for practical purposes. I got it.
【０００９】重量でアルミニュウム８７．４％、シリコ
ン１２．６％の合金に、チタンを外割の重量で５％添加
したもの、即ち、重量でアルミニュウムが８３．２％、
シリコンが１２．０％、チタンが４．８％の組成の場合
、メタライズ強度は、実用強度の５ｋｇ／ｍｍ２を上ま
る。しかし、チタン量がそれ以下では、活性金属として
作用する効果が小さいので、メタライズ膜の強度が低く
、実用要求強度を満足することができない。[0009] An alloy containing 87.4% aluminum and 12.6% silicon by weight, with the addition of 5% titanium by weight, that is, 83.2% aluminum by weight,
In the case of a composition of 12.0% silicon and 4.8% titanium, the metallization strength exceeds the practical strength of 5 kg/mm2. However, if the amount of titanium is less than that, the effect of acting as an active metal will be small, so the strength of the metallized film will be low, and the strength required for practical use cannot be satisfied.
【００１０】また、チタン量を外側の重量で１５％添加
したもの、即ち、重量でアルミニュウムが７６．０％、
シリコンが１１．０％、チタンが１３．０％の組成の場
合、メタライズ強度は、実用強度の５ｋｇ／ｍｍ２を上
まる。しかし、チタンがそれ以上であると、メタライズ
膜とセラミックスとの接合強度は低下する。[0010] In addition, the titanium content is added at 15% by weight on the outside, that is, the aluminum content is 76.0% by weight,
In the case of a composition of 11.0% silicon and 13.0% titanium, the metallization strength exceeds the practical strength of 5 kg/mm2. However, if the amount of titanium is more than that, the bonding strength between the metallized film and the ceramic will decrease.
【００１１】本発明のメタライズ法において、セラミッ
クスにアルミニュウム合金をプラズマ溶射する際、この
セラミックスを予め５０〜２００℃に加熱することが好
ましい。これにより、付着強度の強いメタライズが得ら
れるが、５０℃より低い場合及び２００℃より高い場合
、プラズマ化したアルミニュウム合金の粒子は、セラミ
ックス表面に強固に補足されないため、付着強度は低下
する。[0011] In the metallization method of the present invention, when plasma spraying an aluminum alloy onto ceramics, it is preferable to heat the ceramics to 50 to 200°C in advance. As a result, metallization with strong adhesion strength can be obtained, but when the temperature is lower than 50° C. or higher than 200° C., the plasma-turned aluminum alloy particles are not firmly captured on the ceramic surface, so that the adhesion strength decreases.
【００１２】0012
【実施例】本発明を実施例に従って、詳細に説明する。
重量でアルミニュウムが８７．４％、シリコンが１２．
６％から成る合金の基本成分に、チタン外割で５〜１５
％及びその前後の量を添加した種々の合金を作製した。
その組成を表１に示す。EXAMPLES The present invention will be explained in detail according to examples. By weight, aluminum is 87.4% and silicon is 12%.
The basic component of the alloy consists of 6% titanium, and the outer percentage of titanium is 5 to 15%.
% and various other alloys were prepared with additions of around 10%. Its composition is shown in Table 1.
【００１３】[0013]
【表１】[Table 1]
【００１４】表１に示す組成の合金を、種々の温度に加
熱した２０ｍｍ角で、厚さが３ｍｍのアルミナ、窒化珪
素、サイアロン及び炭素化珪素の表面に、表２に記す条
件でプラズマ溶射した場合の接合強度を表３に示す。[0014] The alloys having the compositions shown in Table 1 were plasma sprayed on the surfaces of alumina, silicon nitride, sialon, and silicon carbide with a thickness of 3 mm in 20 mm squares heated to various temperatures under the conditions shown in Table 2. Table 3 shows the bonding strength in this case.
【００１５】[0015]
【表２】[Table 2]
【００１６】[0016]
【表３】[Table 3]
【００１７】表３から明らかなように、本発明の接合用
合金を用いてプラズマ溶射すると、付着強度が極めて大
きく、一方、その組成前後のものでは、付着強度が極端
に小さいことが理解できる。また、本発明の合金を用い
ても、セラミックスの加熱温度が５０℃以下及び２００
℃以上になると、同じく、付着強度が極端に小さくなる
ことが理解できる（表３中のＮｏ．７及びＮｏ．１０参
照）。As is clear from Table 3, when the bonding alloy of the present invention is plasma sprayed, the adhesion strength is extremely high, whereas when the composition of the bonding alloy is used, the adhesion strength is extremely low. Furthermore, even when using the alloy of the present invention, the heating temperature of ceramics is 50°C or lower and 200°C or lower.
It can also be seen that when the temperature exceeds .degree. C., the adhesion strength becomes extremely low (see No. 7 and No. 10 in Table 3).
【００１８】[0018]
【発明の効果】本発明は、以上詳記したとおり、アルミ
ナ、窒化珪素、サイアロン及び炭化珪素などのセラミッ
クスを、高強度で接合でき、そして、磁性や酸化雰囲気
に影響しないという顕著な効果が生じ、そして、原子炉
関連に供することができるという有用性を有するもので
ある。[Effects of the Invention] As detailed above, the present invention has the remarkable effect of being able to bond ceramics such as alumina, silicon nitride, sialon, and silicon carbide with high strength, and not affecting magnetism or oxidizing atmosphere. , and is useful in that it can be used in relation to nuclear reactors.
Claims (3)
量％、シリコン１１．０〜１２．０重量％及びチタン４
．８〜１３．０重量％の組成からなることを特徴とする
セラミックスのメタライズ用アルミニュウム合金。Claim 1: 76.0-83.2% by weight of aluminum, 11.0-12.0% by weight of silicon, and 4% by weight of titanium.
．． An aluminum alloy for metallizing ceramics, characterized by having a composition of 8 to 13.0% by weight.
．０〜８３．２重量％、シリコン１１．０〜１２．０重
量％及びチタン４．８〜１３．０重量％の組成からなる
アルミニュウム合金をプラズマ溶射し、セラミックス表
面をメタライズすることを特徴とするセラミックスのメ
タライズ方法。[Claim 2] Aluminum 76 in ceramics
．． The ceramic surface is metallized by plasma spraying an aluminum alloy having a composition of 0 to 83.2% by weight, 11.0 to 12.0% by weight of silicon, and 4.8 to 13.0% by weight of titanium. How to metalize ceramics.
セラミックスを、予め５０〜２００℃に加熱する請求項
２記載のセラミックスのメタライズ方法。3. The method of metallizing ceramics according to claim 2, wherein the ceramics to which the aluminum alloy is plasma sprayed is heated in advance to 50 to 200°C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02418863A JP3081256B2 (en) | 1990-12-28 | 1990-12-28 | Alloy for metallizing ceramics and metallizing method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP02418863A JP3081256B2 (en) | 1990-12-28 | 1990-12-28 | Alloy for metallizing ceramics and metallizing method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH04235246A true JPH04235246A (en) | 1992-08-24 |
| JP3081256B2 JP3081256B2 (en) | 2000-08-28 |
Family
ID=18526620
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP02418863A Expired - Fee Related JP3081256B2 (en) | 1990-12-28 | 1990-12-28 | Alloy for metallizing ceramics and metallizing method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3081256B2 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1304396A1 (en) * | 2001-10-19 | 2003-04-23 | Bayerische Motoren Werke Aktiengesellschaft | Alloy powder for coating and coating process |
| CN104404426A (en) * | 2014-11-17 | 2015-03-11 | 苏州大学 | Ti3SiC2-based composite-material coating on surface of large-sized workpiece and method for preparing coating through plasma surfacing |
| CN111733357A (en) * | 2020-05-21 | 2020-10-02 | 范语楠 | Preparation method of high-volume-fraction ceramic-reinforced aluminum-based composite material |
-
1990
- 1990-12-28 JP JP02418863A patent/JP3081256B2/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP1304396A1 (en) * | 2001-10-19 | 2003-04-23 | Bayerische Motoren Werke Aktiengesellschaft | Alloy powder for coating and coating process |
| CN104404426A (en) * | 2014-11-17 | 2015-03-11 | 苏州大学 | Ti3SiC2-based composite-material coating on surface of large-sized workpiece and method for preparing coating through plasma surfacing |
| CN111733357A (en) * | 2020-05-21 | 2020-10-02 | 范语楠 | Preparation method of high-volume-fraction ceramic-reinforced aluminum-based composite material |
Also Published As
| Publication number | Publication date |
|---|---|
| JP3081256B2 (en) | 2000-08-28 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0367985B2 (en) | ||
| JP3095490B2 (en) | Ceramic-metal joint | |
| JP3495051B2 (en) | Ceramic-metal joint | |
| JPS6077186A (en) | Ceramic sintered body with metallized surface | |
| JPS59137373A (en) | Ceramic bonding method | |
| JPS61132580A (en) | Metallization of nitride ceramic body | |
| JPS62289396A (en) | Joining method for ceramics | |
| JPH04235246A (en) | Alloy for metalizing for ceramics and metalizing method | |
| JPH0597533A (en) | Composition for bonding ceramic-metal and bonded product of ceramic-metal | |
| JPH05201777A (en) | Ceramic-metal joined body | |
| JPH02199075A (en) | Joined product of ceramic and metal | |
| JP2729751B2 (en) | Joining method of alumina ceramics and aluminum | |
| JPH0292872A (en) | Bonding between ceramic material and copper material | |
| JP2001048670A (en) | Ceramics-metal joined body | |
| JPS62179893A (en) | Brazing filler metal for joining metal and ceramics | |
| JPS59223280A (en) | Method of bonding ceramic and metal | |
| JPH0240028B2 (en) | SERAMITSUKUSUTOKINZOKU * DOSHUSERAMITSUKUSUDOSHIMATAHAISHUSERAMITSUKUSUKANNOSETSUGOHOHO | |
| JPS62151581A (en) | Treating material for metallic surface | |
| JPH0292875A (en) | Formation of thermal stress relaxing layer in bonding between ceramic and metal | |
| JPH07187839A (en) | Nitride ceramics-metal joined body and its production | |
| JPH0369866B2 (en) | ||
| KR0180485B1 (en) | Method of manufacturing si3n4 sintered body and metal conjugate | |
| JPH04342479A (en) | Bonding of ceramic and metal | |
| JPH0369864B2 (en) | ||
| JPH0362674B2 (en) |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |