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JPH04195903A - Magnetic head - Google Patents

Magnetic head

Info

Publication number
JPH04195903A
JPH04195903A JP33230090A JP33230090A JPH04195903A JP H04195903 A JPH04195903 A JP H04195903A JP 33230090 A JP33230090 A JP 33230090A JP 33230090 A JP33230090 A JP 33230090A JP H04195903 A JPH04195903 A JP H04195903A
Authority
JP
Japan
Prior art keywords
magnetic head
magnetic
metal
thin film
film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP33230090A
Other languages
Japanese (ja)
Other versions
JP2989259B2 (en
Inventor
Takashi Yanai
柳井 孝
Hiroyuki Okuda
裕之 奥田
Takao Yamano
山野 孝雄
Tsukasa Shimizu
司 清水
Takashi Ogura
隆 小倉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP2332300A priority Critical patent/JP2989259B2/en
Publication of JPH04195903A publication Critical patent/JPH04195903A/en
Application granted granted Critical
Publication of JP2989259B2 publication Critical patent/JP2989259B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Magnetic Heads (AREA)

Abstract

PURPOSE:To prevent noise from mixing with a reproduced signal due to discharge of built-up electric charge by exposing one part of a thin metal magnetic film on a side surface of its magnetic head core and electrically connecting it with a metal base body for supporting the magnetic head core. CONSTITUTION:One part 1b of the thin metal magnetic film 1 of a magnetic head 10 is exposed on a magnetic head fitting surface 2b, and the fitting surface 2b is brought into contact with the head supporting base body 5 made of metal. That is, the thin metal magnetic film 1 exposed on the fitting surface 2b of the magnetic head 10 is electrically connected with the magnetic head supporting body 5 made of metal. Consequently, electric charge generated on a contact part between the magnetic head 10 and a tape is discharged via the magnetic head supporting body 5 to a ground of a device, etc., and by this action, the occurrence of noise due to an electric discharge phenomenon between the mag netic head and the tape is suppressed, and an adverse effect upon a reproduced output is eliminated. By this method, electric charge can not be built up on the metal magnetic film part 1, and a reproduced output in good quality can thus be obtained.

Description

【発明の詳細な説明】 (イ)産業上の利用分野 磁気記録再生装置、持に5−VH8〜TR18ミリビデ
オ、 DAT用等の高保磁力の磁性媒体に電気信号を記
録し、成るいは記録媒体から信号を再生するための磁気
ヘッドに関する。
[Detailed Description of the Invention] (a) Industrial application field Magnetic recording and reproducing devices, particularly recording electrical signals on high coercive force magnetic media such as 5-VH8 to TR18 mm video, DAT, etc. The present invention relates to a magnetic head for reproducing signals from a medium.

(ロ)従来の技術 近年、5−iH5,8ミリビデオ、成るいはDAT等の
高記録密度磁気記録再生装置用の磁気へソドとして、第
6図に示すような構造の磁気ヘッドが実用化さh、使用
されている。
(b) Conventional technology In recent years, a magnetic head with the structure shown in Figure 6 has been put into practical use as a magnetic head for high-density magnetic recording and reproducing devices such as 5-iH 5.8 mm video or DAT. Yes, it is used.

同図において、(1)はスパッタリング、真空蒸着、成
るいはイオンブレーティフグ等の真空薄膜形成技術を用
いて作成する金属磁性薄膜で、−般に高周波にまで対応
するように、Sin、等の非磁性酸化膜を絶縁層として
介在させ複数層積層して形成し、渦電流損失を低減する
工夫が成されている。(2)はこの金属磁性膜(1)を
支持するための基板で、結晶化ガラス、成るいはセラミ
ック等の非磁性材である。(3)は磁気的ギャップ、(
4)はこの磁気ヘッドに起磁力を発生させたり、成るい
は記録媒体からの磁気信号を電気信号に変えて読み取る
ための線材を巻くための巻線用穴である。
In the same figure, (1) is a metal magnetic thin film created using vacuum thin film forming technology such as sputtering, vacuum evaporation, or ion blasting. An attempt has been made to reduce eddy current loss by stacking a plurality of layers with a non-magnetic oxide film interposed as an insulating layer. (2) is a substrate for supporting this metal magnetic film (1), and is made of a non-magnetic material such as crystallized glass or ceramic. (3) is the magnetic gap, (
4) is a winding hole for winding a wire for generating a magnetomotive force in this magnetic head or for converting a magnetic signal from a recording medium into an electric signal and reading it.

この種磁気ヘッドは、特開昭64−37705号公報(
611B 5/127)に開示されているように、従来
のメタルテープ、成るいは高保磁力の酸化物テープ対応
型として一般に用いられている金属磁性膜とフェライト
基板とからなる、いわゆるMIG(Met−at in
Gap)Ill造型複会ヘノドに比べ、ヘッドコア材に
フェライトを用いていないため摺動ノイズの発生がなく
、高Sハで、且つ低インダクタンスのヘッドとしての特
徴を持つ。
This kind of magnetic head is disclosed in Japanese Unexamined Patent Publication No. 64-37705 (
611B 5/127), the so-called MIG (Met- at in
Compared to Gap) Ill molded composite hemlock, it does not use ferrite for the head core material, so there is no sliding noise, and it has the characteristics of a head with high S and low inductance.

(ハ)発明が解決しようとする課題 しかじ、第6図に示すような磁気へ7ドは、その金属磁
性膜部(1)が、該磁気ヘッドのコア部を支える金属製
の磁気ヘッド支持基体(5)と電気的に接続されていな
い。
(c) Problems to be Solved by the Invention However, in a magnetic head as shown in FIG. It is not electrically connected to the base (5).

従って、実際に該磁気ヘッドをシリンダーに搭載しVT
R等に実装して用いた場合、使用環境条件、成るいは使
用テープの種類等により金属磁性膜部(1)に電荷が蓄
積され、該電荷がある一定量を超えた時にテープとの間
で放電が発生し、この電圧変化により、〜“TRの場合
モニター画面上に白いノイズが走ったり、DATの場合
には再生音にノイズが発生したりする。
Therefore, the magnetic head is actually mounted on the cylinder and the VT
When mounted and used in R, etc., electric charge is accumulated in the metal magnetic film part (1) due to the usage environmental conditions or the type of tape used, and when the electric charge exceeds a certain amount, the gap between the metal magnetic film part (1) and the tape is removed. A discharge occurs, and this voltage change causes white noise to appear on the monitor screen in the case of a TR, and noise in the reproduced sound in the case of a DAT.

そのため、例えば第6図に示すように、該磁気へラドコ
アの金属磁性膜部(1)と該磁気ヘッド支持基体(5)
との間に導電性の塗料(6)を塗り、この両者の間を電
気的に接続することにより、蓄積された電荷を逃がすと
いうような方法が取られる。
Therefore, as shown in FIG. 6, for example, the metal magnetic film part (1) of the magnetic head core and the magnetic head support base (5)
A method is adopted in which a conductive paint (6) is applied between the two and electrically connected between the two to release the accumulated charge.

しかし、この方法j=ニーラド造工程において工数が増
える上に、導電性の良否の点でその信頼性に間開がある
。つまり、導電性の塗料を塗る場所が非常に狭いという
こと、更にこの導電性塗料を塗る前に該磁気ヘッドの製
造工程として、磁気へ・7ド(コアチップ)(冬)と該
磁気ヘッド支持基体(5)を瞬間接着剤(7)で接着す
る工程があり、その際接着剤(7)が金属磁性膜部(1
)を覆ってしまい、後で導電性塗料(6)を塗ったとし
ても、その接着剤(7)の介在により磁気ヘッド(コア
チップ)(8)と磁気ヘッド支持基体(5)とが電気的
に接続されないことがある。また、この導電性塗料(6
)により金属磁性膜部(1)と磁気へ・ノド支持基体(
5)が導通しているかどうかを1iIiffする作業は
、繁雑で面倒である。
However, this method increases the number of man-hours in the kneaded manufacturing process, and its reliability varies in terms of conductivity. In other words, the area where the conductive paint is applied is very small, and in addition, as part of the manufacturing process of the magnetic head, before applying the conductive paint, the magnetic head (core chip) (winter) and the support base for the magnetic head must be coated. There is a step of bonding (5) with an instant adhesive (7), at which time the adhesive (7) is attached to the metal magnetic film part (1).
) and later apply a conductive paint (6), the adhesive (7) will prevent the magnetic head (core chip) (8) from electrically connecting the magnetic head support base (5). Sometimes it won't connect. In addition, this conductive paint (6
) to the metal magnetic film part (1) and the magnetic throat support base (
5) is complicated and troublesome.

本発明は上述の間組点に鑑み、この磁気−\ラド(旦)
の構造を一部変更することによって金属磁性膜部(1)
に電荷がたまることを防止し、良質な再生出力を得るこ
とを目的としている。
In view of the above-mentioned interlacing points, the present invention is directed to this magnetic field.
By partially changing the structure of the metal magnetic film part (1)
The purpose of this is to prevent charge from accumulating on the disc and obtain high-quality playback output.

(ニ)課題を解決するための手段 金属磁性薄膜を非磁性基板で挟持する構造の磁気ヘッド
において、該磁気ヘッドの金属磁性薄膜(1)の一部(
]b)を磁気ヘッド取付は面(2b)に露出させ、該取
付は面(2b)を金属製のへ・ノド支持基体(5)と接
触させることにより、電気的にその部分から電荷を逃が
す磁気ヘッド構造にする。
(d) Means for solving the problem In a magnetic head having a structure in which a metal magnetic thin film is sandwiched between non-magnetic substrates, a part of the metal magnetic thin film (1) of the magnetic head (
]b) is exposed on the surface (2b) for mounting the magnetic head, and the mounting electrically releases the charge from that part by bringing the surface (2b) into contact with the metal head/nod support base (5). Create a magnetic head structure.

(ホ)作 用 本発明の磁気ヘッドをVTR,D、’tT等の高保磁力
記録媒体を使用する磁気記録装置に使用すると、該磁気
ヘッドの取付は面に露出した金属磁性薄膜が金属製の磁
気へ・ノド支持体と電気的に接続され、磁気ヘッドとテ
ープの接触部分に発生する電荷を前記磁気ヘッド支持体
を介して機器等のアース(図示せず)へ放電し、その作
用により磁気ヘッドとテープ間の放tq象によるノイズ
の発生が抑制され、再生出力に悪影響を与えない。
(E) Function When the magnetic head of the present invention is used in a magnetic recording device using a high coercive force recording medium such as a VTR, D, or 'tT, the magnetic head is attached so that the metal magnetic thin film exposed on the surface is It is electrically connected to the magnetic throat support, and discharges the electric charge generated at the contact area between the magnetic head and the tape to the ground (not shown) of the equipment etc. through the magnetic head support, and due to this action, the magnetic The generation of noise due to the radiated tq phenomenon between the head and the tape is suppressed, and the playback output is not adversely affected.

(へ)実施例 以下、本発明の磁気ヘッドの具体的な一実施例について
詳細に説明する。
(f) Example Hereinafter, a specific example of the magnetic head of the present invention will be described in detail.

第1図は本発明の磁気ヘッドの外観斜視図、第2図(a
)〜(h)::本発明の磁気ヘッド製造過程を示す外観
斜視図、第3図は本発明の磁気ヘッド単体の外観斜視図
である。
FIG. 1 is an external perspective view of the magnetic head of the present invention, and FIG.
) to (h):: External perspective view showing the manufacturing process of the magnetic head of the present invention. FIG. 3 is an external perspective view of the single magnetic head of the present invention.

図において、従来例と同一部分には同一符号を付しその
説明を省略する。第1図は本発明の磁気ヘッド(10)
を金属製の磁気ヘッド支持基体(5)に固着した状態を
示すもので、従来例の磁気ヘッド(旦)と異なる点は、
金属磁性薄膜(1)が磁気ヘッド(10)の側面(2a
)で傾斜延長して、該磁気へラド(10)の取り付は面
(2b)に露出している点である(第3図参照)。従っ
て、本発明の磁気ヘッド(10)を前記磁気ヘッド支持
基体(5)に固着すhは、露出している金属磁性薄膜(
1b)部は磁気ヘッド支持基体(5)に電気的に接続さ
れる。
In the figures, parts that are the same as those of the conventional example are given the same reference numerals and their explanations will be omitted. Figure 1 shows a magnetic head (10) of the present invention.
This figure shows the state in which the magnetic head is fixed to the metal magnetic head support base (5).The difference from the conventional magnetic head (dan) is that
The metal magnetic thin film (1) is attached to the side surface (2a) of the magnetic head (10).
), the attachment of the magnetic helad (10) is at a point exposed on the surface (2b) (see FIG. 3). Therefore, the time required for fixing the magnetic head (10) of the present invention to the magnetic head support base (5) is the exposed metal magnetic thin film (
The portion 1b) is electrically connected to the magnetic head support base (5).

次に、本発明の磁気ヘッド(功)の製造方法について説
明する。第2図(a)に示すように、まず結晶化プラス
、成るいはセラミlり等の非磁性基板(11)の上下面
(lla)、 (llb)を所望の平行度、平面度、表
面粗さに仕上げた後、本発明のポイントである導通用溝
(12)を研削砥石により加工する。
Next, a method for manufacturing the magnetic head of the present invention will be described. As shown in FIG. 2(a), first, the upper and lower surfaces (lla) and (llb) of a non-magnetic substrate (11) made of crystallized plastic, ceramic or the like are adjusted to the desired parallelism, flatness, and surface. After finishing the roughness, the conductive grooves (12), which are the key point of the present invention, are processed using a grinding wheel.

尚、この導通用溝(12)の加工方向jヨ、後述するが
接合完了インゴットから接合ウェハーを切り出す方向と
略直交する方向である。又、この溝(12)の断面形状
も、後述するが磁性膜(1)の連続性、及び該磁性膜(
1)と磁気ヘッド支持基体(5)との接触を確実なもの
にするために台形形状か、成るいは三角形形状にするの
が好ましい。
Note that the direction in which the conductive grooves (12) are processed is a direction substantially perpendicular to the direction in which the bonded wafer is cut out from the bonded ingot, which will be described later. The cross-sectional shape of this groove (12) also depends on the continuity of the magnetic film (1) and the magnetic film (1), which will be described later.
1) and the magnetic head support base (5), it is preferable to have a trapezoidal shape or a triangular shape.

更に、この導通用溝(12)の溝深さ(ho)は、これ
も後述するが、後でスライシング加工(第2図(h))
を行った際、第3図に示すように側面に到達する深さ(
hl)より大、即ち、h o > h +でなければな
らない。
Furthermore, the groove depth (ho) of this conduction groove (12) will be determined later by slicing processing (Fig. 2 (h)), which will also be described later.
As shown in Figure 3, when performing
hl), that is, h o > h +.

以上のことを考慮した場合、導通用溝(12)の断面の
台形あるいは三角形状の斜面角度a(第2図(a)参照
)は、30°〜60゛が好ましい。
Considering the above, the trapezoidal or triangular slope angle a (see FIG. 2(a)) of the cross section of the conduction groove (12) is preferably 30° to 60°.

この溝(12)の断面形状は、本発明の効果を発揮させ
るものであれば、それ以外の形状であっても差し支えな
い。
The cross-sectional shape of this groove (12) may be any other shape as long as it exhibits the effects of the present invention.

次に、第2図(b)に示すように導通用溝(12)の加
工を施−た面(lla)にセンダスト、アモルファス等
の磁性材料(図示せず)とS+O+等の非磁性膜を交互
にスライシング、真空蒸着、又はイオンアレーティング
等の真空成膜技術を用いて所望の厚み分積層して金属磁
性薄膜(1)を形成する。前記金属磁性薄膜(1)の厚
み(1)は、磁気ヘッド(1,0)のトランク幅になる
Next, as shown in FIG. 2(b), a magnetic material (not shown) such as sendust or amorphous and a non-magnetic film such as S+O+ are applied to the surface (lla) on which the conductive groove (12) has been processed. A metal magnetic thin film (1) is formed by alternately stacking the metal magnetic thin film (1) to a desired thickness using a vacuum film forming technique such as slicing, vacuum evaporation, or ion alating. The thickness (1) of the metal magnetic thin film (1) corresponds to the trunk width of the magnetic head (1,0).

尚、この金属磁性薄膜(1)の成膜の際、導通用溝(1
2)の断面形状を台形あるいは三角形にしておけば、こ
の台形あるいは三角形形状の斜面と成膜面(lla)と
の交線部分(角部)で膜の連続性が良く、磁気ヘッド(
籾)は、導通不良を起こしにくくなり、品質が安定する
In addition, when forming this metal magnetic thin film (1), conduction grooves (1) are formed.
If the cross-sectional shape of 2) is trapezoidal or triangular, the film will have good continuity at the intersection (corner) of the slope of the trapezoidal or triangular shape and the film forming surface (lla), and the magnetic head (
(paddy) is less likely to cause conduction defects and its quality is stable.

次に、前記薄膜(1)の成膜面(lla)と反対側の面
(llb)に積層接合用のガラス薄膜(13)をスパフ
タリング、スクリーン印刷技術等を用いて厚さ1〜5に
程度付着する。
Next, a glass thin film (13) for lamination bonding is applied to the surface (llb) opposite to the film-forming surface (lla) of the thin film (1) to a thickness of 1 to 5 mm using sputtering or screen printing technology. It adheres to a certain extent.

次に、箔2図(C)に示すように前述第2図(b)の加
工を完了した基板(14)を数十枚重ね、図中Fで示す
上下方向のプレス圧力をかけた状態で真空中、成るいは
窒素ガス、アルゴンガス等の不活性ガス中で熱処理を施
して前記積層基板(14)をガラス膜(13)により接
合し、接合インテ・ノド(長)を作成する。
Next, as shown in Figure 2 (C), several dozen substrates (14) that have been processed as shown in Figure 2 (B) are stacked one on top of the other, and press pressure is applied in the vertical direction as indicated by F in the figure. Heat treatment is performed in a vacuum or in an inert gas such as nitrogen gas or argon gas to bond the laminated substrate (14) with the glass film (13) to create a bonded inte node (long).

次に、この接合インゴット(長)を第2図(d)の破線
に沿って研削加工、成るいはバンドソー、ワイヤーソー
等の遊離砥粒加工により切断し、接合ウェハー半休(1
6)を切り出す、この場合、最終完成品となる磁気ヘッ
ド(10)がアジマス角θもっている場合、切断角度β
を90’±θに設定することにより磁気ヘッド(功)の
金属磁性薄膜(1)が磁気ヘッド(]O)の取付は面(
llb)と平行になり磁気特性面で有利になる。
Next, this bonded ingot (long) is cut along the broken line in FIG.
6). In this case, if the magnetic head (10) that is the final finished product has an azimuth angle θ, the cutting angle β
By setting 90'±θ, the metal magnetic thin film (1) of the magnetic head (O) is attached to the surface (
llb), which is advantageous in terms of magnetic properties.

第2図(e)は、接合インゴット(長)より切り出した
接合ウェハー半体(16)を、2枚−組として研削砥石
等で外形を所望の寸法精度に仕上げた状態の該接合ウェ
ハー半休(16)を示す。
FIG. 2(e) shows the bonded wafer halves (16) cut out from the bonded ingot (long) as a set of two, and the outer shape of the bonded wafers (16) has been finished to the desired dimensional accuracy using a grinding wheel or the like. 16) is shown.

次に、第2図(f)に示すように切り出し前に互いに向
き合っていた面(16a)、 (16a’)をギヤノブ
突き合わせ面にするために以下の加工を施す。即ち、一
方のウェハー半休(16)には前記積層磁性薄膜(1)
に平行に、2枚−組の接合ウェハー半休をガラス溶着す
るためのガラス浸透溝(17)・・を研削加工で形成す
る。他方のウェハー半休(16’)には巻線用溝(18
)とガラス捧載置用の面取り加工による切り欠き(19
)を研削砥石により施す。尚、二の巻線用溝(18)及
び面取り切り欠き(19)の方向は、本発明の電気的導
通用の金属磁性薄膜部(1)の露出金属磁性薄膜部(l
b)(第3図参照)が、磁気ヘッド(籾)の組立て工程
において、磁気へ、ド支持基体(5)側になることを考
慮して加工しなければならない。
Next, as shown in FIG. 2(f), the following processing is performed to make the surfaces (16a) and (16a') that were facing each other before cutting out into gear knob abutting surfaces. That is, one half of the wafer (16) is covered with the laminated magnetic thin film (1).
Glass penetration grooves (17) for glass welding the two half sets of bonded wafers are formed by grinding parallel to the wafers. The other half of the wafer (16') has a winding groove (18').
) and a chamfered cutout (19
) is applied using a grinding wheel. The direction of the second winding groove (18) and the chamfered notch (19) is the direction of the exposed metal magnetic thin film portion (l) of the metal magnetic thin film portion (1) for electrical conduction of the present invention.
b) (See Figure 3) must be processed in consideration of the fact that it will be on the side of the magnetic head support base (5) in the process of assembling the magnetic head (rice grain).

その後、前記ウェハー接合面(16a)、 (16a’
)を所望の平面度、表面粗さに仕上げる。次に、前記接
合面(16a)、 (16a’)の一方が、成るいは両
方の面にその合計膜厚が、磁気ヘッド(川)の所望のギ
ャップ長と等しい厚みになるように非磁性膜、例えば、
S+0+膜等(図示せず)をスパッタリング等の薄膜形
成技術を用いて付着させる。
After that, the wafer bonding surface (16a), (16a'
) to the desired flatness and surface roughness. Next, one or both of the bonding surfaces (16a) and (16a') is coated with non-magnetic material so that the total film thickness is equal to the desired gap length of the magnetic head (river). Membranes, e.g.
A S+0+ film or the like (not shown) is deposited using a thin film formation technique such as sputtering.

次に、第2図(g)に示すようにウニ/・−接1面(1
6a)、 (16a゛)を突き合わせ、巻線用溝(18
)とガラス棒載置用切り欠き(]9)に力゛ラス捧(2
0)を置き、図中Fで示す力で保持した状態で窒素ガス
、成るいはアルゴンガス等の不活性ガス中で熱処理を施
すことにより、ガラス溶着を行うと同時に磁気ギャップ
(3)を形成する。
Next, as shown in Fig. 2(g), sea urchin/・-1 plane (1
6a) and (16a゛) and insert the winding groove (18
) and the notch for placing the glass rod (]9).
0) and heat-treated in an inert gas such as nitrogen gas or argon gas while holding it with the force indicated by F in the figure to form a magnetic gap (3) at the same time as glass welding. do.

その後、接合ブロフク(21)を破線に沿って上下の不
要部分を研削、研摩して除去する。更に、研削加工によ
り接合ブロック(21)のテープ対接面をR付は加工す
ると同時にギヤ・/プデプスdを所望の値にする。
Thereafter, the upper and lower unnecessary portions of the joining block (21) are removed by grinding and polishing along the broken lines. Furthermore, the tape-contacting surface of the joint block (21) is rounded by grinding, and at the same time, the gear depth d is set to a desired value.

次に、第2図(h)に示すように、前記接合ブロック(
21)の加工後のブロック(21’)を更に、研削加工
、成るいはワイヤー・ソー等の装置により、一定ピツチ
で破線に沿って切断し、個々のコアチンア、即ち磁気ヘ
ッド(10)を切り出す。
Next, as shown in FIG. 2(h), the joining block (
The processed block (21') in step 21) is further cut along broken lines at a certain pitch by grinding or using a device such as a wire saw to cut out individual core chiners, that is, magnetic heads (10). .

切り出した磁気へッドコアチノプ(耳)の外観斜視図を
第3図に示す。同図は、磁気へ・ドニアチノブ(10)
をヘッド支持基体(5)に取りつける側の取付面(2b
)の方向から見ている。金属磁性薄膜部(1)の露出金
属薄膜部(1b)が金属製の磁気へ、・上支持基体(5
)に接続さt′L、を荷がこの部分を通って放電される
。尚、露出−でいる金属磁性薄膜部(1b)の幅jシ、
導通用溝(12)の断面形状を台形あるいは三角形形状
にしているため、成膜−た金属磁性薄膜部(1)の厚み
よりも広くなっており、金属性の磁気ヘッド支持基体(
5)に確実に電気的に接続される。
FIG. 3 shows a perspective view of the external appearance of the cut out magnetic head core tinop (ear). The same figure shows Magnetism Donyachinobu (10)
The mounting surface (2b) on the side where the is attached to the head support base (5)
) is viewed from the direction of The exposed metal thin film part (1b) of the metal magnetic thin film part (1) is connected to the metal magnetism, and the upper support base (5
) connected to t′L, the load is discharged through this part. Note that the width j of the exposed metal magnetic thin film portion (1b) is
Since the cross-sectional shape of the conduction groove (12) is trapezoidal or triangular, it is wider than the thickness of the metal magnetic thin film portion (1) formed into a film, and the thickness of the metal magnetic head support substrate (
5) be securely electrically connected to the

又、この磁気ヘッド(匹)のテープ対接面は、テープと
の当りを良くし、スペーシングロスを軽減するために図
に示すようにその断面形状を凸状にしている。この加工
は第2図(h)の段階でR付は加工後、研削砥石で加工
する。
Further, the tape contact surface of the magnetic head has a convex cross-sectional shape as shown in the figure in order to improve contact with the tape and reduce spacing loss. This process is performed at the stage shown in FIG. 2(h), and after the R is processed, it is processed using a grinding wheel.

その後、第1図に示すようにこの磁気へ・ノドコアチン
プ(1,0)を磁気ヘッド支持基体(5)に貼り付け、
巻線(図示せず)を行うことにより磁気へ、・ドを完成
させる。
Thereafter, as shown in FIG. 1, this magnetic node core chimp (1,0) is attached to the magnetic head support base (5),
Complete the magnetic field by winding (not shown).

次に池の実施例について説明する。第4図にかロ工方法
の概略を示す。
Next, an example of a pond will be described. Figure 4 shows an outline of the potting method.

第4図(a)に示すようにまず、第2図(2)と同様に
結晶化ガラス、成るいは、セラミック等の非磁性基板(
11)の上下面(11a )、 (11b)を所望の平
行度、平面度、表面粗さに仕上げた後、本発明の導通用
溝(12’)を所定個所研削加工により施す。
As shown in FIG. 4(a), first, similarly to FIG. 2(2), a non-magnetic substrate made of crystallized glass, or ceramic, etc.
After finishing the upper and lower surfaces (11a) and (11b) of 11) to desired parallelism, flatness, and surface roughness, the conductive grooves (12') of the present invention are provided by grinding at predetermined locations.

尚、第4図の実施例では、この導通用溝(12°)の加
工方向は、基板接合後の接合インゴットを切り出す方向
と略平行の方向である。
In the embodiment shown in FIG. 4, the direction in which the conductive groove (12°) is processed is substantially parallel to the direction in which the bonded ingot is cut out after the substrates are bonded.

従って、この溝(12″)の断面形状では、傾斜面(1
2a’)上に付着された導通用金属薄膜(1゛)の一部
(lc’)がテープ対接面上に露出する(第5図参照)
。従って、この金属薄膜部(lc’)と非磁性基板(2
′)のテープ対接面(2c’)との境界部が疑似磁気ギ
ヤング(3′)として作用するのを防ぐために、この溝
(]2’)の断面形状は第4図(a)に示すように三角
形形状、成るいは台形形状にして、境界部が本来の磁気
ギャップ(3)と非平行にするのが好ましい。又、第2
図の実施例と同様に金属磁性薄膜(1゛)の連続性、及
び露出金属薄膜部IIthl(ld’)と磁気ヘッド支
持基体(5)との接触面積をふやすためにも三角形状、
成るいは台形形状が好まLい。
Therefore, in the cross-sectional shape of this groove (12″), the inclined surface (1
A part (lc') of the conductive metal thin film (1') attached on the tape 2a') is exposed on the tape contact surface (see Figure 5).
. Therefore, this metal thin film part (lc') and the nonmagnetic substrate (2
In order to prevent the boundary between the tape contact surface (2c') and the tape contacting surface (2c') from acting as a pseudo-magnetic gigang (3'), the cross-sectional shape of this groove (2') is shown in Figure 4 (a). It is preferable to have a triangular or trapezoidal shape such that the boundary portion is non-parallel to the original magnetic gap (3). Also, the second
Similar to the embodiment shown in the figure, in order to increase the continuity of the metal magnetic thin film (1゛) and the contact area between the exposed metal thin film portion IIthl (ld') and the magnetic head support base (5), the triangular shape is used.
Alternatively, a trapezoidal shape is preferable.

更に、二の導通用溝(12′)のijt深さは、第2図
の場合と同様、後でスラインング加工を打つ一二際、第
5図に示すように側面に到達する深さでなければならな
い。
Furthermore, as in the case of Fig. 2, the depth of the second conductive groove (12') must be such that it reaches the side surface when the slining process is performed later, as shown in Fig. 5. Must be.

熱論、この溝(]2’)の断面形状は、本発明の効果を
発揮させるものであればそれJ′J外の形状であっても
差し支えない。
Thermally, the cross-sectional shape of this groove (]2') may be a shape other than J'J as long as it exhibits the effects of the present invention.

次に、第4図(b)に示すように導通用溝(12°)の
加工を施した面(lla)の側に磁性材料をスペーシン
グ、真空蒸着、又はイオンブレーティング等の真空成膜
技術を用いて所望の厚みに付着させて金属磁性薄膜(]
)を形成する。
Next, as shown in Figure 4(b), a magnetic material is deposited on the side of the surface (lla) on which the conductive groove (12°) has been processed, by vacuum deposition, such as spacing, vacuum evaporation, or ion blating. The metal magnetic thin film is deposited to the desired thickness using technology.
) to form.

次に、その面ど反対側の面(llb>に積層接合用のガ
ラス薄膜(13)をスパッタリング、スクリーン印刷技
術等で形成する。
Next, a glass thin film (13) for lamination and bonding is formed on the opposite surface (llb>) by sputtering, screen printing, or the like.

次に、第2図(b)と同様の加工を完了した基板(14
’)を数十枚重ね、プレス圧力をかけた状態で真空中、
成るいは不活性ガス中で熱処理を施して該基板(14’
)のガラスl1l(13)を溶融接合し、接合インゴー
7 ト(15’)を作成する(第3図(c)参照)。
Next, a substrate (14
') in a vacuum with press pressure applied.
Alternatively, the substrate (14'
) glass l1l (13) is melted and bonded to create a bonded ingot (15') (see FIG. 3(c)).

次に、この接合インゴット(15’)を同図(C)の破
線に沿って研削加工、成るいは遊離砥粒加工により切断
−1接合ウェハー半体(16°)・を切り出す。
Next, this bonded ingot (15') is cut into half bonded wafers (16°) by grinding or free abrasive processing along the broken line in FIG.

その後も第2図と同様に、接合ウエノ\−半体(16°
)を2枚−組として、研削砥石等で外形を所望の寸法精
度に仕上げた後、切り出し前に互いに向き合っていた面
を磁気ギヤシブ突き合わせ面とするべく接合ウェハー半
休(16°)の一方には、積層磁性膜と平行にガラス浸
透溝(図示せず)を研削加工により施し、他方の接合ウ
エノ)−半体(16’)の面には、巻線用溝とガラス捧
載置用の面取り加工(図示せず)を研削砥石により施す
After that, as in Fig. 2, the bonded Ueno\-half body (16°
) are made into a set of two, and after finishing the external shape to the desired dimensional accuracy using a grinding wheel, etc., one side of the bonded wafer half (16°) is placed so that the surfaces that were facing each other before cutting will be the magnetic gear butting surfaces. A glass permeation groove (not shown) is formed by grinding in parallel with the laminated magnetic film, and a groove for winding and a chamfer for placing the glass plate are formed on the surface of the other bonded wafer half (16'). Processing (not shown) is performed using a grinding wheel.

その後1磁気ギヤツプ突き合わせ面を所望の平面度、表
面粗さに仕上げ、膜厚が完成品磁気ヘッドの所望のギャ
ンブ長と等しい厚みになるよう非磁性膜(例えば、5i
0+膜等)をスパッタリング等の薄膜形成技術を用いて
付着させる。
After that, the abutting surfaces of the first magnetic gap are finished to the desired flatness and surface roughness, and a non-magnetic film (for example, 5i
0+ film) is deposited using a thin film formation technique such as sputtering.

次に、ガラス溶着を行い同時に磁気ギヤノブを形成する
Next, glass welding is performed and at the same time a magnetic gear knob is formed.

その後、不要部分を研削、研李等により除去し、さらに
、研削加工により磁気へッドブロノクのテープ対接面を
R付は加工すると同時に磁気ギャップデプスを所望の値
にする。
Thereafter, unnecessary portions are removed by grinding, grinding, etc., and the tape contact surface of the magnetic head block is rounded and at the same time the magnetic gap depth is set to a desired value.

第4図(d)は、以上の加工までを終了した接合ブロン
ク(22)の状態を示す。
FIG. 4(d) shows the state of the welded bronc (22) after the above processing has been completed.

次に、研削加工、あるいはワイヤー・ソー等の装置によ
り一部ピッチで破線に沿って切断し、個々の磁気ヘッド
コアチップ(10’)を切り出す。
Next, each magnetic head core chip (10') is cut out by grinding or cutting along broken lines at partial pitches using a device such as a wire saw.

第5図は、その磁気ヘッドコアチップ(川′)の外観斜
視図を示す。前記磁気ヘントコアチップ(耗°)を磁気
ヘッド支持基体(5)に取りつける側の面の方向より見
ている。露出した金属磁性薄膜部(ld’)が磁気ヘッ
ド支持基体(5)側に接続され、電荷がこの部分を通っ
て放電される。
FIG. 5 shows an external perspective view of the magnetic head core chip (river'). The magnetic hent core chip (wear) is viewed from the direction of the surface on which it is attached to the magnetic head support base (5). The exposed metal magnetic thin film portion (ld') is connected to the magnetic head support base (5) side, and charges are discharged through this portion.

尚、前記露出金属磁性薄膜部(ld’)の幅は、導通用
溝(12’)の断面形状を三角形状、成るいは台形形状
に巳でいるため、膜厚よりら広くなっており、金属性の
磁気ヘッド支持基体(5)と確実に電気的に接続される
The width of the exposed metal magnetic thin film portion (ld') is wider than the film thickness because the conductive groove (12') has a triangular or trapezoidal cross-sectional shape. It is electrically connected reliably to the metallic magnetic head support base (5).

後;よ、前述の実施例と同様に、第1図に示すように5
Fk気ヘントコアチツプ(籾′)を磁気ヘッド支持基体
(5)に貼り付は巻線を行い磁気ヘッドを完成させる。
After that, as in the previous embodiment, as shown in FIG.
The Fk-type hentoko chips (rice grains) are attached to the magnetic head support base (5), and winding is performed to complete the magnetic head.

(ト)発明の効果 本発明は、金属磁性薄膜を非磁性基板で挟持した構造の
磁気へ・ノドにおいて、金属磁性薄膜の一部がこの磁気
ヘッドコアの側面に露出し、磁気ヘッドコアを支持する
金属製の基体と電気的に接続されるようにしたので、従
来の磁気ヘッドでは、使用環境条件、成るいは使用テー
プの種類等により発生りでいた蓄積電荷の放電による再
生信号へのノイズ混入を、有効に除去する効果がある。
(G) Effects of the Invention The present invention provides a magnetic head having a structure in which a metal magnetic thin film is sandwiched between non-magnetic substrates, in which a part of the metal magnetic thin film is exposed on the side surface of the magnetic head core, and a metal Since the magnetic head is electrically connected to the base made of aluminum, it is possible to prevent noise from being mixed into the reproduced signal due to the discharge of accumulated charge, which occurs in conventional magnetic heads due to usage environmental conditions or the type of tape used. , has an effective removal effect.

また、この放電ノイズを防止するのために、金属磁性膜
とヘッド支持基体との間に導電性の塗料を塗ると云った
余分な工数が不要になると共に、磁気ヘッドの品質・性
能が向上する。
Additionally, in order to prevent this discharge noise, the extra man-hours of applying conductive paint between the metal magnetic film and the head support substrate are no longer required, and the quality and performance of the magnetic head is improved. .

【図面の簡単な説明】[Brief explanation of the drawing]

第1図:ま本発明の磁気ヘッドの具体的な一実施例を示
す外観斜視図、第2図(a)〜(h):よその磁気ヘッ
ド製造工程を説明するための図、第3図は第2図の製造
方法により作製した磁気ヘソドコアチ・/プの外観斜視
図、第4図(a)〜(d)は本発明の磁気ヘッドの製造
工程の他の実施例の説明図、第5図は第4図の製造方j
去により作製した磁気ヘッドコアチップの外観斜視図、
第6図は従来例を示す外観斜視図である。 (1)・・・金属磁性薄膜、(lb)、 (ld)・・
・露出金属磁性薄膜部、(2)、(11)・・・非磁性
基板、(5)・・・磁気ヘッド支持基体、(10)・・
・磁気−・ノド(コアチップ)e
Fig. 1: An external perspective view showing a specific embodiment of the magnetic head of the present invention, Fig. 2 (a) to (h): Diagrams for explaining another magnetic head manufacturing process, Fig. 3 2 is a perspective view of the external appearance of a magnetic head core chip manufactured by the manufacturing method shown in FIG. 2, FIGS. The figure shows the manufacturing method shown in Figure 4.
A perspective view of the external appearance of the magnetic head core chip manufactured by
FIG. 6 is an external perspective view showing a conventional example. (1)...Metal magnetic thin film, (lb), (ld)...
・Exposed metal magnetic thin film portion, (2), (11)...Nonmagnetic substrate, (5)...Magnetic head support base, (10)...
・Magnetic-・Nod (core chip) e

Claims (2)

【特許請求の範囲】[Claims] (1)金属磁性薄膜を非磁性基板にて挟持した構造の磁
気ヘッドにおいて、前記金属磁性薄膜の一部が前記磁気
ヘッドの取付け面に露出していることを特徴とする磁気
ヘッド。
(1) A magnetic head having a structure in which a metal magnetic thin film is sandwiched between nonmagnetic substrates, wherein a part of the metal magnetic thin film is exposed on a mounting surface of the magnetic head.
(2)前記磁気ヘッドの取付け面に露出した金属磁性薄
膜が金属製の磁気ヘッド支持基体と電気的に接続されて
いることを特徴とする請求項(1)記載の磁気ヘッド。
(2) The magnetic head according to claim 1, wherein the metal magnetic thin film exposed on the mounting surface of the magnetic head is electrically connected to a metal magnetic head support base.
JP2332300A 1990-11-28 1990-11-28 Magnetic head Expired - Lifetime JP2989259B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2332300A JP2989259B2 (en) 1990-11-28 1990-11-28 Magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2332300A JP2989259B2 (en) 1990-11-28 1990-11-28 Magnetic head

Publications (2)

Publication Number Publication Date
JPH04195903A true JPH04195903A (en) 1992-07-15
JP2989259B2 JP2989259B2 (en) 1999-12-13

Family

ID=18253422

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2332300A Expired - Lifetime JP2989259B2 (en) 1990-11-28 1990-11-28 Magnetic head

Country Status (1)

Country Link
JP (1) JP2989259B2 (en)

Also Published As

Publication number Publication date
JP2989259B2 (en) 1999-12-13

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