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JPH0411793A - Gas laser - Google Patents

Gas laser

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Publication number
JPH0411793A
JPH0411793A JP11479990A JP11479990A JPH0411793A JP H0411793 A JPH0411793 A JP H0411793A JP 11479990 A JP11479990 A JP 11479990A JP 11479990 A JP11479990 A JP 11479990A JP H0411793 A JPH0411793 A JP H0411793A
Authority
JP
Japan
Prior art keywords
laser
gas
reservoir
particles
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11479990A
Other languages
Japanese (ja)
Inventor
Junichi Goto
後東 純一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP11479990A priority Critical patent/JPH0411793A/en
Publication of JPH0411793A publication Critical patent/JPH0411793A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To suppress consumption of laser gas by mounting a gas reservoir at a laser vessel side of an optical window replacing valve, and partitioning the reservoir into partition chambers. CONSTITUTION:A cylindrical gas reservoir 12 in which a laser light 7 can be passed is disposed coaxially with the propagating direction of the light 7. The reservoir 12 is partitioned therein by a partition wall composed to cross the propagating direction of the light 7 and to pass the light 7. Here, laser gas is forcibly circulated in a laser vessel 1. Thus, since reactive particles generated upon oscillation are floated together with the laser gas, the particles act as a resistor against the winding in a direction of a gate valve 10 due to vortex, etc., to sink the particles in the partition chamber and to prevent electrophoresis of the particles to the vicinity of the valve 10. Thus, the closing operation of the valve can be effectively performed to suppress consumption of expensive laser gas and to replace an optical window.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、エキシマレーザなどのように、レーザガスを
励起してレーザ光を得るためのレーザ容器を少くとも具
備するガスレーザ装置に関するものである。
DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to a gas laser device, such as an excimer laser, which includes at least a laser container for exciting laser gas to obtain laser light.

〔従来の技術〕[Conventional technology]

第2図は例えは特開昭52−122289号公報に示さ
れた従来のガスレーザ装置の光学素子取付部を示す断面
図である0図において、(1)はレーザ容器、(2)は
陽極電極、(3)は陰極電極、(4)はレーザガス、(
5)はレーザガスの給排気口、(6)はレーザ共振器を
形成する反射鏡やレーザ光透過室などの光学素子(以下
、光学窓と称する)、(7)はレーザ光、(8)i光学
室ホルタ−1(91ぼレーザガスあるいはパージガスの
給排気口、ttoiまゲートパルプ、Iは上記レーザ容
器内のレーザガスの流れを示す矢印で、図示していない
ファンにより電極間にレーザガスが供給される。
FIG. 2 is a sectional view showing the optical element mounting part of a conventional gas laser device disclosed in, for example, JP-A-52-122289. In FIG. 0, (1) is a laser container, and (2) is an anode electrode. , (3) is the cathode electrode, (4) is the laser gas, (
5) is a laser gas supply/exhaust port, (6) is an optical element such as a reflecting mirror or a laser beam transmission chamber that forms a laser resonator (hereinafter referred to as an optical window), (7) is a laser beam, and (8) i Optical chamber Holter 1 (91) Laser gas or purge gas supply/exhaust port, ttoima gate pulp, I is an arrow indicating the flow of laser gas in the laser container, and laser gas is supplied between the electrodes by a fan (not shown). .

次に1作について説明する。レーザガス(4)を充填し
た、レーザ容器(1)の中で、陽l!IA電極(2)と
陰極電極(3)の間にレーザガスを流し、陽極電極(2
)と陰極電極(3)の間でグロー放電を行なう0グロー
放電が生じると、レーザ共振器によりレーザ光(7)が
光学窓を介して取り出される。ゲートパルプ頭ハレーザ
発撮時には開の状態であり、レーザ光(7)は通過し、
レーザガスの給排気口(5)および、レーザガス、ある
いはパージガスの給排気口(9)は閉の状態である0 エキシマレーザ装置では、発振を続けるとレーザガスの
中のハロゲンガスと、レーザ容器および電極部材と反応
がおこり、反応粒子の生成が現われ、反応粒子が光学室
に付着したり、レーザOvDが光学室上で行なわれてレ
ーザ光の透過が妨げられたり、発振の効率が落ちてしま
い、レーザ8力が低下してしまうという現象が生じる。
Next, I will explain one work. In the laser container (1) filled with laser gas (4), positive l! Laser gas is flowed between the IA electrode (2) and the cathode electrode (3), and the anode electrode (2)
) and the cathode electrode (3), when a zero glow discharge occurs, a laser beam (7) is extracted by the laser resonator through the optical window. The gate is open when the pulp head laser is fired, and the laser light (7) passes through.
The laser gas supply/exhaust port (5) and the laser gas or purge gas supply/exhaust port (9) are in a closed state.0 In an excimer laser device, when oscillation continues, halogen gas in the laser gas, laser container, and electrode members are released. A reaction occurs, and reaction particles are generated, which may adhere to the optical chamber, or laser OvD may be performed on the optical chamber, obstructing the transmission of laser light, or reducing the efficiency of oscillation, resulting in 8 A phenomenon occurs in which the power decreases.

従って、時々、光学室を清浄にするか、新しい光学窓に
取換える必要がある〇一方、エキシマレーザガスに含ま
れるハロゲンガスは毒性を有し、機微でも刺激臭があり
、取扱いには注意を有する0活性も高く、−度大気にさ
らすと、レーザ容祷壁や電極等の表面にH2Oや02が
付着したり、腐食が進行する恐れがある。レーザ容器内
を一旦、真空排気してパージガスを大気圧近傍まで充填
し、光学窓を取p外し、新たに光学窓を取りつける方式
や、ノく一ジガスを流しながら光学窓を取り替える方式
が用いられているが、レーザガスが高価なことと、大気
の混入が依然として存在することから、ゲートパルプを
具備してレーザ容器と光学窓部を一旦遮断し、さらに遮
断された部分の真空排気を行ない、パージをすることに
より、レーザガスの消費を押さえ、かつ大気の混入を極
力低減する方式が用いられている。
Therefore, it is necessary to clean the optical room from time to time or replace it with a new optical window.On the other hand, the halogen gas contained in excimer laser gas is toxic and has a pungent odor even if it is subtle, so be careful when handling it. It also has a high 0 activity, and when exposed to the atmosphere, H2O and 02 may adhere to the surfaces of the laser wall, electrodes, etc., and corrosion may progress. There are two methods used: first evacuating the inside of the laser container, filling it with purge gas to near atmospheric pressure, then removing the optical window and installing a new one, or replacing the optical window while flowing gas. However, since the laser gas is expensive and atmospheric contamination still exists, a gate pulp is installed to temporarily isolate the laser container and the optical window, and then the blocked area is evacuated and purged. By doing this, a method is used to suppress the consumption of laser gas and to reduce the incorporation of air as much as possible.

〔発明が解決しようとする課題〕[Problem to be solved by the invention]

従来のエキシマレーザ装置は以上のように構成され、光
学室の取り外し、取り付けを行なっているが、ゲートパ
ルプのシール部にレーザ容器内で発生した反応生成粒子
が付着堆積し、密封性が保持できなくなり、高価なエキ
シマガスが洩れるという問題点があった。
Conventional excimer laser devices are constructed as described above, and the optical chamber is removed and installed, but particles generated in the reaction inside the laser container adhere to and accumulate on the gate pulp seal, making it impossible to maintain sealing. There was a problem in that the expensive excimer gas leaked out.

この発明は上記のような問題点を解消するためになされ
たもので、高価なエキシマガスを消費することなく、光
学窓を交換できるガスレーザ装置を得ることを目的とす
る。
This invention was made to solve the above-mentioned problems, and aims to provide a gas laser device in which the optical window can be replaced without consuming expensive excimer gas.

〔課題を解決するための手段〕[Means to solve the problem]

この発明に係るガスレーザ装置は光学窓取付部において
、光学部とレーザ容器を仕切るためのパルプと、レーザ
容器内のガスとの導通部にレーザガスの滞溜器を設け、
かつ滞溜器には隔室を設は中央部には、レーザ光が通過
するに要する開孔部を設けたものである。
In the gas laser device according to the present invention, in the optical window mounting part, a laser gas reservoir is provided in the pulp for partitioning the optical part and the laser container and the gas in the laser container at the communication part,
The reservoir is provided with a compartment and an opening in the center thereof through which the laser beam passes.

〔作用〕[Effect]

この発明におけるレーザガスの滞溜器の設置は、レーザ
容器においてはレーザガスを強制的に循環させられてい
る0このため、発振と共に生成した反応粒子がレーザガ
スと共に浮遊しているので、渦流等により反応粒子がゲ
ートパルプの方向への巻き込みに対し、抵抗体としてw
Jキ、かつ隔室に反応粒子を沈降せしめ、パルプ近傍へ
の反応粒子の泳動を阻止する0 〔発明の冥施例〕 以下、この発明の一実施例について説明する0第1図に
おいて、(1)はレーザ容器、(2)は陽極電極、(3
)は陰極電極、(4)はレーザガス、(5)はレーザガ
スの供給および真空排気を行なうための給・排気口、(
6)は光学窓、(7)はレーザ光の方向を示す。(8)
は光学窓をシールを保ちつつ、レーザ容器に取付けるた
めのホルタ−1(9)は光学窓を取り外す際に真空排気
あるいはパージするための給排気口であり、GOはレー
ザ容器と光学室とのガスの導通を遮断するためのパルプ
である。Uはレーザ容器内でのレーザガスの流れの方向
を示しており、図示していないが、レーザ容器内のファ
ンにより強制循環させられており、絶えずレーザガスを
電極間に流しつづけている。■はパルプαOの設置個所
より、レーザ容器(1)側に突出しており、tlM(2
)(31設置側に設け、レーザ光の進む方向と同一軸に
設けられたガス滞溜仝で、レーザ光の通過する部分が開
口した隔壁(12a)で隔室(11)が構成されている
0レ一ザ発撮甲はレーザは電極間のグロー放電により放
出され、レーザ共振器により、レーザ光(7)として光
学窓(6)、パルプαO(発揚中は開の状態)ガス滞溜
器叫を経由する0レーザガス(4)をレーザ容器(1)
に充填し陽極電極(2)、陰極電極(3)の間でグロー
放電させるが、レーザガスの劣下と共に、レーザパワー
が低下するので、新しいガスと入れ換える0通常、−旦
真空排気を行ない、改めてレーザガスを充填している。
In the installation of the laser gas reservoir in this invention, the laser gas is forcibly circulated in the laser container. Therefore, the reaction particles generated during oscillation are suspended together with the laser gas, so the reaction particles are w acts as a resistor against the entrainment of the gate pulp in the direction
In the following, an embodiment of the present invention will be described.In Fig. 1, ( 1) is a laser container, (2) is an anode electrode, (3
) is the cathode electrode, (4) is the laser gas, (5) is the supply/exhaust port for supplying the laser gas and evacuation, (
6) indicates the optical window, and (7) indicates the direction of the laser beam. (8)
Holter 1 (9) is used to attach the optical window to the laser chamber while keeping the seal. GO is the air supply/exhaust port for evacuation or purging when removing the optical window. This pulp is used to cut off gas flow. U indicates the direction of the flow of laser gas within the laser container, and although not shown, the laser gas is forced to circulate by a fan within the laser container, and the laser gas continues to flow between the electrodes. ■ is protruding from the installation location of pulp αO to the laser container (1) side, and tlM (2
) (31 is a gas reservoir provided on the installation side and coaxial with the direction in which the laser beam travels, and the compartment (11) is composed of a partition wall (12a) with an opening through which the laser beam passes. 0 Laser firing A laser is emitted by glow discharge between electrodes, and a laser resonator emits laser light (7) through an optical window (6), pulp αO (open during firing), and a gas reservoir. 0 laser gas (4) via the laser container (1)
However, as the laser gas deteriorates, the laser power decreases, so replace it with new gas.Normally, the gas is evacuated once and then the gas is evacuated again. Filled with laser gas.

レーザガスを新しいものに換えても、レーザパワーが復
帰しなくなると、光学窓の清掃もしくは交換が必要とな
る。バμプ頭を閉の状態にすることにより、レーザ容器
側と光学窓部を遮断し、その後、19)の給排気口を介
してレーザガスを排気し、不活性ガスのH@やN2を大
気圧近傍まで充填し、(8)の光学室を取り外し、新規
のものや清掃したものを再度取りつけ、もう−度(9)
の給排気口を介して真空排気を行ない、真空の状態に保
ち、その後、パルプαOを開にしてレーザガスを充満す
る。この時レーザ容器内のガス圧が大きく変化する場合
には(5)、の給排気口を介して新しいレーザガスを補
充する。
Even if the laser gas is replaced with a new one, if the laser power does not return, the optical window will need to be cleaned or replaced. By closing the vapor head, the laser container side and the optical window are isolated, and then the laser gas is exhausted through the supply and exhaust port in 19), and the inert gases H@ and N2 are Fill to near atmospheric pressure, remove the optical chamber (8), reinstall a new or cleaned one, and refill the chamber (9).
The chamber is evacuated through the air supply and exhaust port to maintain a vacuum state, and then the pulp αO is opened and filled with laser gas. At this time, if the gas pressure inside the laser container changes significantly, new laser gas is replenished through the supply/exhaust port (5).

レーザ発振と共に、レーザ容器内にはレーザガス中に含
まれるハロゲンガスと容器や電極と反応が進み、反応生
成粒子が発生し、レーザガス中に浮遊した状態で強制的
に循環されている0レーザ容器内では、レーザガスの強
制循環により、電極部以外では乱流や渦流が発生し、四
部の所に反応生成粒子が泳動してゆくが、ガス滞溜器叩
を設けたことにより、乱流や渦流による反応生成粒子の
泳動を抑制し、さらに隔室を設けているので、このガス
滞溜器に入った粒子の多くは隔室内に沈降してゆく。し
たがって、パルプへの反応生成粒子の泳動は抑止され、
パルプのシール面に反応生成粒子が付着するのを防ぐこ
とが可能となる。
Along with laser oscillation, the halogen gas contained in the laser gas reacts with the container and electrodes, generating reaction product particles, which are forcibly circulated in a suspended state in the laser gas. In this case, due to the forced circulation of the laser gas, turbulence and vortices are generated in areas other than the electrode area, and reaction generated particles migrate to the four parts.However, by providing a gas accumulator, turbulence and eddies are generated in areas other than the electrode area. Since migration of reaction product particles is suppressed and a compartment is provided, most of the particles that enter the gas reservoir settle into the compartment. Therefore, the migration of reaction product particles into the pulp is inhibited,
It becomes possible to prevent reaction product particles from adhering to the sealing surface of the pulp.

なお、上記51!施例ではパルプを示したが、回転式の
パルプを設けてもよい。
In addition, above 51! Although pulp is shown in the embodiment, a rotary pulp may also be provided.

〔発明の効果〕〔Effect of the invention〕

以上のように、この発明によれば、光学室交換用のパル
プのレーザ容器側にガスの滞溜部を設置し、かつ滞溜部
を隔室に仕切ることにより、レーザ容器内のレーザガス
強制循環流に伴う乱流や渦流による反応生成粒子のパル
プへの泳動を抑止するように構成したので、パルプの閉
止操作を確実に行なうことにより、高価なレーザガスの
消費を抑えて光学窓の交換を行なうことができる。
As described above, according to the present invention, by installing a gas retention part on the laser container side of the pulp for replacing the optical chamber and partitioning the retention part into compartments, the laser gas inside the laser container is forcedly circulated. The structure is designed to prevent reaction product particles from migrating into the pulp due to turbulence and vortices associated with the flow, so by reliably closing the pulp, the consumption of expensive laser gas can be reduced and the optical window can be replaced. be able to.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明の実施例によるガスレーザ装置の要部
を示す断面図、第2図は従来のガスレーザ装置の要部を
示す断面図である。 図において、(1)はレーザ容器、(2)は陽極電極、
(3)は陰極電極、(7)はレーザ光、σGはパルプ、
似は滞溜器である。 なお、図中、同一符号は同一、又は相当部分を示す。 第1図 尤掌系テ レープ“尤 パルプ !帯留器
FIG. 1 is a sectional view showing the main parts of a gas laser device according to an embodiment of the present invention, and FIG. 2 is a sectional view showing the main parts of a conventional gas laser device. In the figure, (1) is a laser container, (2) is an anode electrode,
(3) is the cathode electrode, (7) is the laser beam, σG is the pulp,
Similar is the accumulator. In addition, in the figures, the same reference numerals indicate the same or equivalent parts. Figure 1: Palm type telepe “Yuri pulp! Bandage device”

Claims (1)

【特許請求の範囲】[Claims] (1)レーザガスが封入された容器内に一対の電極を設
けて、共振用の光学素子を通してレーザ光を取り出し、
上記レーザ光が通過するときに開状態にあるバルブを上
記容器と上記光学素子との間に配置したガスレーザ装置
において、上記レーザ光の進行方向と同軸状に上記レー
ザ光が通過できる筒状のガス滞留器を配置し、上記レー
ザ光の進行方向と交差し、上記レーザ光が通過できるよ
うに構成した隔壁で上記滞留器の内部に仕切りを設けた
ことを特徴とするガスレーザ装置。
(1) A pair of electrodes is provided in a container filled with laser gas, and the laser beam is extracted through a resonant optical element.
In a gas laser device in which a valve that is open when the laser beam passes is disposed between the container and the optical element, a cylindrical gas through which the laser beam can pass coaxially with the traveling direction of the laser beam. A gas laser device characterized in that a retainer is disposed and a partition is provided inside the retainer by a partition wall configured to intersect with the traveling direction of the laser beam and allow the laser beam to pass through.
JP11479990A 1990-04-28 1990-04-28 Gas laser Pending JPH0411793A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11479990A JPH0411793A (en) 1990-04-28 1990-04-28 Gas laser

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11479990A JPH0411793A (en) 1990-04-28 1990-04-28 Gas laser

Publications (1)

Publication Number Publication Date
JPH0411793A true JPH0411793A (en) 1992-01-16

Family

ID=14646979

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11479990A Pending JPH0411793A (en) 1990-04-28 1990-04-28 Gas laser

Country Status (1)

Country Link
JP (1) JPH0411793A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115693355A (en) * 2022-11-02 2023-02-03 中山普宏光电科技有限公司 An Excimer Laser Optical Path Adjustment Module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN115693355A (en) * 2022-11-02 2023-02-03 中山普宏光电科技有限公司 An Excimer Laser Optical Path Adjustment Module

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