JP7005092B2 - 埋め込み型透明電極基板およびその製造方法 - Google Patents
埋め込み型透明電極基板およびその製造方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 81
- 238000004519 manufacturing process Methods 0.000 title claims description 29
- 229910052751 metal Inorganic materials 0.000 claims description 98
- 239000002184 metal Substances 0.000 claims description 98
- 239000012790 adhesive layer Substances 0.000 claims description 84
- 239000011888 foil Substances 0.000 claims description 68
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 27
- 238000000034 method Methods 0.000 claims description 27
- 239000000463 material Substances 0.000 claims description 26
- 239000011889 copper foil Substances 0.000 claims description 23
- 239000000853 adhesive Substances 0.000 claims description 14
- 230000001070 adhesive effect Effects 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 12
- 238000001723 curing Methods 0.000 claims description 8
- 239000000203 mixture Substances 0.000 claims description 7
- 238000000059 patterning Methods 0.000 claims description 5
- IISBACLAFKSPIT-UHFFFAOYSA-N bisphenol A Chemical compound C=1C=C(O)C=CC=1C(C)(C)C1=CC=C(O)C=C1 IISBACLAFKSPIT-UHFFFAOYSA-N 0.000 claims description 4
- 239000003822 epoxy resin Substances 0.000 claims description 4
- 229920000647 polyepoxide Polymers 0.000 claims description 4
- 239000006087 Silane Coupling Agent Substances 0.000 claims description 3
- 239000003999 initiator Substances 0.000 claims description 3
- 239000013034 phenoxy resin Substances 0.000 claims description 3
- 229920006287 phenoxy resin Polymers 0.000 claims description 3
- 229920001187 thermosetting polymer Polymers 0.000 claims description 3
- 229930185605 Bisphenol Natural products 0.000 claims description 2
- 229910052782 aluminium Inorganic materials 0.000 claims description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 2
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000000206 photolithography Methods 0.000 claims description 2
- 238000003848 UV Light-Curing Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 8
- 239000007772 electrode material Substances 0.000 description 6
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- -1 polyethylene Polymers 0.000 description 5
- 230000003746 surface roughness Effects 0.000 description 5
- 229920002799 BoPET Polymers 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 229920005989 resin Polymers 0.000 description 4
- 239000011347 resin Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- 238000002834 transmittance Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- 230000000052 comparative effect Effects 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- QEDQZYNGDXULGO-UHFFFAOYSA-N 3-methyl-2-(3-methylphenyl)morpholine Chemical compound CC1NCCOC1C1=CC=CC(C)=C1 QEDQZYNGDXULGO-UHFFFAOYSA-N 0.000 description 2
- 229920000089 Cyclic olefin copolymer Polymers 0.000 description 2
- 229910021578 Iron(III) chloride Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000002041 carbon nanotube Substances 0.000 description 2
- 229910021393 carbon nanotube Inorganic materials 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 2
- RBTARNINKXHZNM-UHFFFAOYSA-K iron trichloride Chemical compound Cl[Fe](Cl)Cl RBTARNINKXHZNM-UHFFFAOYSA-K 0.000 description 2
- 229920003207 poly(ethylene-2,6-naphthalate) Polymers 0.000 description 2
- 229920000515 polycarbonate Polymers 0.000 description 2
- 239000004417 polycarbonate Substances 0.000 description 2
- 239000011112 polyethylene naphthalate Substances 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 229920012266 Poly(ether sulfone) PES Polymers 0.000 description 1
- 239000004695 Polyether sulfone Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 150000001768 cations Chemical class 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229920001940 conductive polymer Polymers 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000003912 environmental pollution Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000004744 fabric Substances 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 229910021389 graphene Inorganic materials 0.000 description 1
- 238000013007 heat curing Methods 0.000 description 1
- AMGQUBHHOARCQH-UHFFFAOYSA-N indium;oxotin Chemical compound [In].[Sn]=O AMGQUBHHOARCQH-UHFFFAOYSA-N 0.000 description 1
- 239000002070 nanowire Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920001225 polyester resin Polymers 0.000 description 1
- 239000004645 polyester resin Substances 0.000 description 1
- 229920006393 polyether sulfone Polymers 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000009719 polyimide resin Substances 0.000 description 1
- 239000002952 polymeric resin Substances 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000007764 slot die coating Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 229920002803 thermoplastic polyurethane Polymers 0.000 description 1
- BPSIOYPQMFLKFR-UHFFFAOYSA-N trimethoxy-[3-(oxiran-2-ylmethoxy)propyl]silane Chemical compound CO[Si](OC)(OC)CCCOCC1CO1 BPSIOYPQMFLKFR-UHFFFAOYSA-N 0.000 description 1
- 238000009281 ultraviolet germicidal irradiation Methods 0.000 description 1
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Description
本出願は、埋め込み型透明電極基板およびその製造方法に関する。
透明基材、前記透明基材上に備えられた接着層、および前記接着層上に備えられた金属箔(metal foil)を含む構造体を形成するステップと、
前記金属箔をパターニングして金属箔パターンを形成するステップと、
前記金属箔パターンを含む構造体を70℃~100℃の温度で熱処理するステップと、
前記接着層を完全硬化させるステップと、
を含む埋め込み型透明電極基板の製造方法を提供する。
透明基材;前記透明基材上に備えられた接着層;および前記接着層の内部に埋め込まれた金属箔パターンを含む埋め込み型透明電極基板であり、
前記接着層の一面と前記金属箔パターンの一面とは互いに同一平面上に備えられ、
前記透明基材に対向する前記金属箔パターンの面の十点平均粗さ(Rz)は0.5μm超過であり、
前記埋め込み型透明電極基板の金属箔パターンが備えられていない領域のヘイズが3%以下である埋め込み型透明電極基板を提供する。
本出願において、「透明」とは、可視光線領域(400nm~700nm)において約80%以上の透過率特性を有することを意味する。
前記構造体を形成するステップは、金属箔上に接着層を形成し、前記接着層上に透明基材を形成するステップ、または透明基材上に接着層を形成し、前記接着層上に金属箔を形成するステップを含むことができる。
さらに、本出願の一実施態様に係る埋め込み型透明電極基板を下記の図1に概略的に示した。
前記電子素子は、発熱フィルム、透明LEDディスプレイ、タッチパネル、太陽電池、またはトランジスタであってもよい。前記発熱フィルム、透明LEDディスプレイ、タッチパネル、太陽電池、またはトランジスタは、当業界で一般的に知られているものでもよいし、電極を本出願の一実施態様に係る透明電極基板として用いたものでもよい。
<実施例1>
250μmの厚さのPETフィルム上に、コンマコーターを用いてUV硬化型接着剤を塗布した後、100℃で5分間熱風乾燥して15μmの厚さの接着層を形成した。この時、前記UV硬化型接着剤は、シラン変性エポキシ樹脂KSR-277HMC70(Kukdo Chemical)33重量%、シラン変性エポキシ樹脂KSR-177(Kukdo Chemical)35重量%、ビスフェノールA型フェノキシ樹脂YP-50E(Kukdo Chemical)30重量%、陽イオン開始剤Igacure290(BASF)1重量%、およびシランカップリング剤KBM-403(Shinetsu)1重量%を含んでいる。
250μmの厚さのPETフィルム上に、コンマコーターを用いてCCL(Copper Clad Laminate)用接着剤を塗布した後、100℃で5分間熱風乾燥して15μmの厚さの接着層を形成した。
前記銅箔貼り合わせフィルムの銅箔面にDFR(Dry Film Resist)を貼り合わせた後、露光および現像工程により20μm線幅の六角形(Hexagonal)形態のDFRパターンを形成した。
前記結果のように、本出願の一実施態様によれば、安価な金属箔を用いて金属箔パターンを形成するので、透明電極基板の製造時、原材料費が節減できる特徴がある。特に、本出願の一実施態様によれば、接着層上に金属箔パターンを形成した後、70℃~100℃の温度で熱処理することにより、別途の圧力を印加する工程がなくても、前記接着層の内部に前記金属箔パターンが埋め込まれる埋め込み型透明電極基板を製造することができる。
20:接着層
30:金属箔
40:金属箔パターン
Claims (12)
- 透明基材、前記透明基材上に備えられた接着層、および前記接着層上に備えられた金属箔(metal foil)を含む構造体を形成するステップと、
前記金属箔をパターニングして金属箔パターンを形成するステップと、
前記金属箔パターンを含む構造体を70℃~100℃の温度で熱処理するステップと、
前記接着層を完全硬化させるステップと、
を含み、
前記熱処理するステップの前の前記接着層の表面の十点平均粗さ(Rz)は0.5μm超過であり、
前記熱処理するステップの後の前記接着層の表面の十点平均粗さ(Rz)は0.1μm以下である、埋め込み型透明電極基板の製造方法。 - 前記構造体を形成するステップは、
金属箔上に接着層を形成し、前記接着層上に透明基材を形成するステップ、または
透明基材上に接着層を形成し、前記接着層上に金属箔を形成するステップを含むものである、請求項1に記載の埋め込み型透明電極基板の製造方法。 - 前記70℃~100℃の温度で熱処理するステップにより、前記接着層の内部に前記金属箔パターンが埋め込まれるものである、請求項1または2に記載の埋め込み型透明電極基板の製造方法。
- 前記接着層は、70℃以上の温度で流動性を有するものである、請求項1から3のいずれか一項に記載の埋め込み型透明電極基板の製造方法。
- 前記接着層は、熱硬化型接着剤組成物またはUV硬化型接着剤組成物を含み、
前記接着層を完全硬化させるステップは、接着層を120℃以上の温度で熱硬化させるか、UV硬化させるステップを含むものである、請求項1から4のいずれか一項に記載の埋め込み型透明電極基板の製造方法。 - 前記接着層は、シラン変性エポキシ樹脂、ビスフェノールA型フェノキシ樹脂、開始剤、およびシランカップリング剤を含むものである、請求項1から5のいずれか一項に記載の埋め込み型透明電極基板の製造方法。
- 前記金属箔の厚さは2μm~20μmである、請求項1から6のいずれか一項に記載の埋め込み型透明電極基板の製造方法。
- 前記金属箔は、銅箔またはアルミニウム箔を含むものである、請求項1から7のいずれか一項に記載の埋め込み型透明電極基板の製造方法。
- 前記金属箔パターンの形成は、フォトリソグラフィ工程を利用するものである、請求項1から8のいずれか一項に記載の透明電極基板の製造方法。
- 透明基材と、前記透明基材上に備えられた接着層と、前記接着層の内部に埋め込まれた金属箔パターンとを含む埋め込み型透明電極基板であり、
前記接着層の一面と前記金属箔パターンの一面とは互いに同一平面上に備えられ、
前記透明基材に対向する前記金属箔パターンの面の十点平均粗さ(Rz)は0.5μm超過であり、
前記接着層の表面の十点平均粗さ(Rz)は0.1μm以下であり、
前記埋め込み型透明電極基板の金属箔パターンが備えられていない領域のヘイズが3%以下である埋め込み型透明電極基板。 - 前記同一平面上に備えられる接着層の一面と金属箔パターンの一面との間の段差は0~20μmである、請求項10に記載の埋め込み型透明電極基板。
- 前記接着層の屈折率は1.45~1.55である、請求項10または11に記載の埋め込み型透明電極基板。
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