JP7049754B2 - Motor control device - Google Patents

Description

The present invention relates to a motor control device in which a plurality of motors jointly drive one movable portion to position the movable portion at high speed and with high accuracy.

In a component mounting machine such as a mounter device, the number of component mountings per unit time can be increased by driving a moving part at high speed with a motor and positioning it with high accuracy. As a result, the manufacturing cost due to the component mounting work can be reduced.
Then, for example, in a large mounter device using a large movable portion capable of mounting a large number of printed circuit boards at the same time, it is conceivable to drive the one movable portion with a plurality of motors at high speed.

For example, in the motor control device of Patent Document 1, one moving part is driven by two motors. Each of the two motors is controlled by a corresponding motor control model and servo controller. The servo controller actually controls the movement of the motor based on the external position command. The motor control model has element models corresponding to each element of the servo controller and generates model torque, model speed, and model position based on external position commands. Further, the difference between these model information and the control torque, control speed, and control position in the actual control fed back from the servo controller is calculated, and the difference is returned to the servo controller at a constant rate. By calculating the control error of the servo controller in the motor control model and returning the control error to the servo controller in this way, the servo controller follows the model torque, model speed, and model position generated by the motor control model. It can control the movement of the motor.
As described above, the motor control device of Patent Document 1 regards the error between the motor control model and the servo controller as a disturbance and compensates for the phase to suppress the deviation between the model and the control of the servo controller. By using the same model for the control system of the motor, it is considered that the deviation (synchronization error) between the axes can be suppressed.
Further, unlike Patent Document 1, when one movable part is driven by one motor, the movable part may be yawed so as to be tilted with respect to the driving direction of the motor, as in Patent Document 1. It can be expected that this yawing can be suppressed by driving one moving part with two motors.

Japanese Patent Application Laid-Open No. 2003-345442

However, in an actual mechanical system, for example, a ball screw or the like that drives a movable part may vibrate with respect to a plurality of motors, or a machine base to which a plurality of motors and the movable part may be attached may vibrate. Moving parts may vibrate.
Further, since the method of Patent Document 1 does not have a function of suppressing these torsional vibrations or suppressing the machine base vibrations, for example, when the rigidity of the mechanical system is low, these vibrations are sufficiently suppressed. There is a problem that it cannot be suppressed.
Further, when the machine base vibration or the torsional vibration can actually occur, the control response of the servo controller of each axis cannot be sufficiently high as a result of controlling so that the vibration does not occur. If the control response of the servo controller of each axis is not high, the error suppression between the model and the servo controller cannot be sufficiently performed. If the error between the model and the servo controller cannot be sufficiently suppressed, the synchronization accuracy between the axes cannot be improved.

The present invention has been made to solve such a problem, and an object thereof is to suppress the influence of vibration on a moving part in a machine in which one moving part is driven by a plurality of motors, and to achieve high synchronization. It is an object of the present invention to provide a motor control device capable of achieving accuracy and, as a result, achieving high-speed and high-precision positioning.

The motor control device of the present invention is a motor control device that jointly moves one movable part by N (N: 2 or more natural numbers) motors driven based on a common external position command. A model control system that feeds back the state so as to suppress the influence of vibration on moving parts, and generates model commands including model position commands from external position commands, and a one-to-one correspondence with N motors. It is provided with N feedback control systems that feedback control each motor based on a model command, and (N-1) feedback control systems control errors when controlling each motor. , Compensate by the difference from the control error in the remaining one feedback control system.

In the present invention, each of the N feedback control systems feedback-controls each motor based on the model command including the model position, not the external position command. Moreover, since the model control system that generates the model command including the model position command from the external position command feeds back the state so as to suppress the influence of the vibration on the moving part, the N feedback control systems follow the model. Feedback control that suppresses the influence of vibration is executed independently of each other, and the N motors can be controlled to follow the external position command in the same manner. The N feedback control systems can control the N motors to synchronize with each other based on a common external position command. For example, when the machine base to which the movable part is attached vibrates or the movable part vibrates with respect to the motor and the movable part may be affected by the vibration, the influence is suppressed to N pieces. The motors can be synchronized with each other.
Moreover, in the present invention, each of the (N-1) feedback control systems compensates for the control error by the difference from the control error in the remaining one feedback control system. The (N-1) feedback control systems execute each feedback control while synchronizing each control error with respect to the control error of one feedback control system so as not to cause a deviation. That is, while controlling the N motors independently of each other by the feedback control systems independent of each other, the deviation of the control error that can occur between one feedback control system and the (N-1) feedback control system. Can be compensated. The deviation of the control error that may occur between these N feedback control systems can be compensated between one feedback control system and (N-1) feedback control systems.
As described above, in the present invention, the same model that feeds back the state so as to suppress the influence of vibration on the movable part by using a common external position command for a plurality of motors that jointly move one movable part. By performing model follow-up control with, the torque command given to the feedback control system can be made the same for all axes, which causes, for example, machine base vibration or vibration of moving parts with respect to the motor. Even in this case, the influence of vibration on the moving parts caused by these is suppressed to improve the followability to the command, and the control is executed so that the deviation between the control errors of a plurality of feedback control systems is unlikely to occur. Nevertheless, it still compensates for minute deviations in control error between the N feedback control systems that may occur between the N feedback control systems due to other causes. Therefore, the control system of N motors has a plurality of one movable part by the control in which the control that suppresses the influence of vibration on the movable part and the synchronization deviation is unlikely to occur and the control that suppresses the synchronization deviation are duplicated. It is possible to improve the synchronization accuracy of a plurality of motors when controlled by the motors. As a result, high-speed and high-precision positioning can be realized.

FIG. 1 is a block diagram of a motor control device according to the first embodiment of the present invention. FIG. 2 is a block diagram of the motor control device according to the second embodiment of the present invention. FIG. 3 is a block diagram of the motor control device according to the third embodiment of the present invention. FIG. 4 is a block diagram of the motor control device according to the fourth embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
FIG. 1 is a block diagram of a motor control device 1 according to the first embodiment of the present invention.
In the motor control device 1 of FIG. 1, two motors, a first motor 2 and a second motor 3, jointly drive one movable portion and can position the movable portion at high speed and with high accuracy.

The motor control device 1 of FIG. 1 includes a first model control system 10 to which an external position command indicating a control position of a table 4 as a movable portion is input to generate various first model commands, and a first motor 2. The first feedback control system 30 which has a feedback loop and actually controls the first motor 2 based on the first model command, and various second models to which the same external position command as the first model control system 10 is input. It has a second model control system 50 that supplies commands, and a second feedback control system 70 that has a feedback loop including a second motor 3 and actually controls the second motor 3 based on the second model command. ..
Then, in the present embodiment, the first model command is a first model position command, a first model speed command, and a first model torque command. The second model command is a second model position command, a second model speed command, and a second model torque command.

The first feedback control system 30 includes a first control position error generator 31, a first synchronous position error generator 32, a first position synchronous compensator 33, a first synchronous compensation position error generator 34, and a first position controller 35. , 1st detection speed generator 36, 1st control speed error generator 37, 1st speed controller 38, 1st control torque generator 39, 1st torque command low pass filter 40, 1st torque controller 41. ..
Then, the first control position error generator 31, the first synchronous compensation position error generator 34, the first position controller 35, the first control speed error generator 37, the first speed controller 38, and the first control torque generator 39, the first torque command low pass filter 40, the first torque controller 41, the first motor 2, and the first sensor 42 form a feedback loop that actually controls the first motor 2.

The first motor 2 is, for example, a synchronous motor.
The first sensor 42 detects the rotational position of the first motor 2. The first sensor 42 is, for example, a rotary encoder attached to the rotor shaft of the first motor 2. The rotary encoder outputs a pulse signal according to the position of the rotor shaft of the motor. The pulse signal can be converted into the rotation position of the first motor 2.

The first control position error generator 31 is based on the first model position command supplied from the first model control system 10 and the first detection position of the first motor 2 obtained from the first sensor 42. Generates a first control position error that indicates the error. The first control position error may be, for example, a value obtained by subtracting the first detection position from the first model position command.
The first synchronous position error generator 32 has a difference (difference between these control position errors) based on its own first control position error and the second control position error generated by the second control position error generator 71 described later. Generates a first sync position error that indicates (sync error). The first synchronous position error may be, for example, a value obtained by subtracting another second control position error from its own first control position error. In this case, a synchronization error of the first feedback control system 30 with respect to the second feedback control system 70 can be obtained.
The first position synchronization compensator 33 generates the first position synchronization error compensation amount from the first synchronization position error. In the present embodiment, for example, a proportional controller or a proportional integral controller may be used as the first position synchronization compensator 33.
The first synchronous compensation position error generator 34 compensates for the first control position error, which is the control position error in the first feedback control system 30, and the first position synchronization error, which is the synchronous position error between the two feedback control systems. A first control position error after synchronous compensation processing is generated based on the quantity. The first control position error after the synchronization compensation process may be, for example, the total value obtained by adding the first control position error and the first position synchronization error compensation amount.
The first position controller 35 generates the first control speed from the first control position error after the synchronization compensation process. The first position controller 35 determines the first control speed according to the control position error in the first feedback control system 30 and the synchronous position error of the first feedback control system 30 with reference to the second feedback control system 70. Generate. Then, when the control position of the first feedback control system 30 is delayed as compared with the control position of the second feedback control system 70, the first control speed increases.

The first detection speed generator 36 generates the first detection speed of the first motor 2 from the rotation position detected by the first sensor 42.
The first control speed error generator 37 generates the first control speed error based on the first control speed, the first detection speed, and the first model speed command. The first control speed error may be obtained by adding the first model speed command to the control speed error obtained by subtracting the first detection speed from the first control speed, for example.
The first speed controller 38 generates the first control torque from the first control speed error. The first speed controller 38 generates a first control torque according to the control speed error in the first feedback control system 30 and the first model speed command. Then, when at least one of the control speed error and the first model speed command becomes large, the first control torque becomes large.

The first control torque generator 39 generates the first total control torque based on the first control torque and the first model torque command. The first total control torque may be, for example, the sum of the first control torque and the first model torque command.
The first torque command low-pass filter 40 processes the first total control torque by a low-pass filter. By this low-pass filter processing, the high frequency component can be removed from the first total control torque. As such a high frequency component, for example, there is a quantized ripple component at a position by the first sensor 42.
The first torque controller 41 controls the first motor 2 based on the first total control torque after the low-pass filter processing.

Due to such feedback control in the first feedback control system 30, the first feedback control system 30 has a first model position command, a first model speed command, and a first model torque command output from the first model control system 10. The first motor 2 is rotationally driven according to the above. The table 4 is driven according to the rotation of the first motor 2.
Then, when an error occurs in the control position or the control speed in the first feedback control system 30, or when the control position of the first feedback control system 30 deviates from the control position of the second feedback control system 70, these errors and The drive torque of the first motor 2 increases or decreases so as to suppress the deviation.
As a result, the first motor 2 is controlled to the position of the first model position command by the movement according to the first model torque command and the first model speed command.

The first model control system 10 receives an external position command as an input, calculates a virtual operation of the first feedback control system 30 using a model corresponding to the first feedback control system 30, and causes the first feedback control system 30 to calculate a virtual operation. Generate the first model command to give.
The first model position command is a command indicating the control position of the first motor 2.
The first model speed command is a command indicating the control speed of the first motor 2 being driven.
The first model torque command is a command indicating the control torque of the first motor 2 being driven.
Then, in the first model control system 10 of the present embodiment, in order to calculate the operation of the first feedback control system 30, the first model position error calculator 11, the first model position controller 12, and the first model speed calculation are performed. Instrument 13, 1st model speed error calculator 14, 1st model speed controller 15, 1st model torque error calculator 16, 1st model torque command low pass filter 17, 1st moving part model 18, 1st machine model It has 19, a first model position adder 20, and a first state feedback amount calculator 21.
Further, the first state feedback amount calculator 21 includes a first machine unit feedback quantity calculator 22, a first filter feedback quantity calculator 23, and a first total feedback quantity calculator 24. As a result, the first state feedback amount calculator 21 calculates the total feedback amount for suppressing the vibration of the table 4 with respect to the machine base when the table 4 vibrates on the machine base due to the vibration of the machine base. ..
Then, the first model position error calculator 11, the first model position controller 12, the first model speed error calculator 14, the first model speed controller 15, the first model torque error calculator 16, the first model torque command. The low-pass filter 17, the first movable unit model 18, the first machine stand model 19, and the first model position adder 20 form a main feedback loop of the first model control system 10. The main feedback loop of the first model control system 10 corresponds to the feedback loop of the first feedback control system 30.

The first model position error calculator 11 calculates the first model position error by the model corresponding to the first control position error generator 31. The first model position error calculator 11 calculates the first model position error by subtracting the first model position output from the first model position adder 20 from the external position command.
The first model position controller 12 calculates the first model speed by the model corresponding to the first position controller 35. The first model position controller 12 calculates the first model speed from the first model position error.
The first model speed calculator 13 calculates the first model detection speed by the model corresponding to the first detection speed generator 36. The first model speed calculator 13 calculates the first model detection speed from the first model position. The first model detection speed is output to the first feedback control system 30 as a first model speed command.
The first model speed error calculator 14 calculates the first model speed error by the model corresponding to the first control speed error generator 37. The first model speed error calculator 14 calculates the first model speed error by subtracting the first model detection speed from the first model speed.
The first model speed controller 15 calculates the first model torque by the model corresponding to the first speed controller 38. The first model speed controller 15 calculates the first model torque from the first model speed error.
The first model torque error calculator 16 calculates the first model torque after the state feedback compensation by subtracting the total feedback amount calculated by the first state feedback amount calculator 21 from the first model torque. The first model torque after the state feedback compensation is output to the first feedback control system 30 as a first model torque command.
The first model torque command low-pass filter 17 performs the filter calculation by the model corresponding to the first torque command low-pass filter 40. The first model torque command low-pass filter 17 performs low-pass filter processing on the first model torque after the state feedback compensation.
The first movable portion model 18 calculates the position of the movable portion model by the model of the movable portion corresponding to the movement of the mechanical system from the first motor 2 to the table 4. Here, as a movable part model corresponding to the mechanical system from the first motor 2 and the first ball screw 5 to the table 4, a rigid body model in which no deviation occurs between them is used. The first movable portion model 18 calculates the position of the first movable portion model 18 from the first model torque after the state feedback compensation processing and the low-pass filter processing.
The first machine stand model 19 calculates the position of the machine stand model by the machine base model corresponding to the movement of the machine base to which the first motor 2 and the table 4 are attached. The machine base is mounted on the floor, for example, with leveling bolts. Then, when the table 4 is moved at high speed, the machine base vibrates, and as a result, the relative position of the table 4 on the machine base may deviate from the position when the machine base does not vibrate. The model of the chassis may be, for example, a model of the vibration of the chassis. The first machine model 19 calculates the position of the first machine model 19 from the first model torque after the state feedback compensation processing and the low-pass filter processing.
The first model position adder 20 adds the position of the first movable portion model 18 and the position of the first machine stand model 19 to calculate the position of the first model. The first model position calculated by the first model position adder 20 is output to the first feedback control system 30 as a first model position command.
The first machine unit feedback amount calculator 22 calculates the feedback amount for the vibrating position. Specifically, for example, as the first machine unit feedback amount, the machine base position feedback gain K _PB , the machine body speed feedback gain K _VBS , and the machine base acceleration feedback gain K _AB are located at the position of the first machine machine model 19. Calculate the product obtained by multiplying the total gain (K _PB + K _VB S + K _AB S ² ) obtained by adding S ² and the sum. Here, S indicates a differential operator.
The first filter feedback amount calculator 23 calculates the feedback amount for the filter processing of the first model torque command low-pass filter 17. Specifically, for example, the filter processing feedback amount is calculated by multiplying the first model torque after the state feedback compensation processing and the low-pass filter processing by the filter processing feedback gain _KLP .
The first total feedback amount calculator 24 adds various feedback amounts calculated by the first state feedback amount calculator 21. Here, the total feedback amount is calculated by adding the first unit feedback amount and the filtered feedback amount. The calculated total feedback amount is output to the first model torque error calculator 16.

By the feedback control corresponding to the first feedback control system 30, the first model control system 10 can suppress the vibration between the machine base and the table 4, the first model position command, the first model speed command, and the first model speed command. Generates a first model torque command.
Further, control parameters may be set in each element of the first model control system 10 so that the control on the table 4 becomes a desired positioning control.
For example, the parameters are calculated and set so that the characteristic equation for the state equation of the first model control system 10 has a quintuple root. By setting a parameter having five roots, the first model control system 10 can generate a model command that does not cause vibration between the table 4 and the machine base. Then, by driving the first feedback control system 30 by the model command from the first model control system 10 that does not generate vibration between the table 4 and the machine base, the first feedback control system 30 is actually driven. The table 4 will also be driven without causing vibration.
Further, by increasing the gains of the first model control system 10 and the first feedback control system 30 within the range where the stability of the first feedback control system 30 is acceptable, between the table 4 actually driven and the machine stand. It can be driven at high speed without causing vibration.

The second feedback control system 70 includes a second control position error generator 71, a second position controller 75, a second detection speed generator 76, a second control speed error generator 77, a second speed controller 78, and a second. It has a control torque generator 79, a second torque command low pass filter 80, and a second torque controller 81.
Then, the second control position error generator 71, the second position controller 75, the second control speed error generator 77, the second speed controller 78, the second control torque generator 79, the second torque command low pass filter 80, The second torque controller 81, the second motor 3, and the second sensor 82 form a feedback loop that actually controls the second motor 3.
Each component of the second feedback control system 70 is the same as the component having the same name but different numbers in the first feedback control system 30, and detailed description thereof will be omitted.
However, the second position controller 75 generates the second control speed from the second control position error generated by the second control position error generator 71. That is, unlike the first feedback control system 30, the second control speed is generated based on the second control position error without the synchronous compensation processing.

The second model control system 50 has a second model position error calculator 51, a second model position controller 52, a second model speed calculator 53, and a second model in order to calculate the operation of the second feedback control system 70. Speed error calculator 54, 2nd model speed controller 55, 2nd model torque error calculator 56, 2nd model torque command low pass filter 57, 2nd moving part model 58, 2nd machine stand model 59, 2nd model position It has an adder 60 and a second state feedback amount calculator 61.
Further, the second state feedback amount calculator 61 includes a second machine unit feedback quantity calculator 62, a second filter feedback quantity calculator 63, and a second total feedback quantity calculator 64. As a result, the second state feedback amount calculator 61 calculates the total feedback amount for suppressing the vibration of the table 4 with respect to the machine base when the table 4 vibrates on the machine base due to the vibration of the machine base. ..
Then, the second model position error calculator 51, the second model position controller 52, the second model speed error calculator 54, the second model speed controller 55, the second model torque error calculator 56, and the second model torque command. The low-pass filter 57, the second movable unit model 58, the second machine stand model 59, and the second model position adder 60 form a main feedback loop of the second model control system 50. The main feedback loop of the second model control system 50 corresponds to the feedback loop of the second feedback control system 70.
Each component of the second model control system 50 is the same as the component having the same name but different numbers in the first model control system 10, and detailed description thereof will be omitted. The same values as those of the first model control system 10 are set in the parameters of each part of the second model control system 50.
In the following description, the various signal names in the second feedback control system 70 and the second model control system 50 include various signal names in the corresponding first feedback control system 30 and the first model control system 10. The number of is changed from the first to the second.
By using the parameters of the same value in the control system of the axis 1 and the control system of the axis 2 in this way, the commands from the first model control system 10 and the second model control system 50 are output with the same value at the same time for each axis. Will be done. As a result, torque is applied between the shafts at the same time.

In the motor control device 1 of FIG. 1, the first sensor 42 may be integrally configured with the first motor 2. Then, the components of the first feedback control system 30 other than the first motor 2 and the first sensor 42 and the first model control system 10 are connected to the first motor 2 and the first sensor 42 by a first cable. It may be realized in the first computer device in one motor control device. In this case, each component of the first feedback control system 30 executes each process by arithmetic processing, and can suitably correspond to the arithmetic processing of each part of the first model control system 10.
Similarly, the second sensor 82 may be integrally configured with the second motor 3. Then, the components of the second feedback control system 70 other than the second motor 3 and the second sensor 82 and the second model control system 50 are connected to the second motor 3 and the second sensor 82 by a second cable. It may be realized in the second computer device in the two-motor control device. In this case, each component of the second feedback control system 70 executes each process by arithmetic processing, and can suitably correspond to the arithmetic processing of each part of the second model control system 50.
Further, when the first motor control device and the second motor control device are used in this way, the first motor control device and the second motor control device are connected by a communication cable, and the second motor control device controls the first motor. It is necessary to transmit the second control position error to the device.
In addition to this, for example, the first computer device and the second computer device may be provided in a single motor control device.
Further, components other than the first motor 2, the first sensor 42, the second motor 3 and the second sensor 82 in FIG. 1 may be realized in a single computer device in a single motor control device. .. In this case, the second control position error may be transmitted, for example, by interprogram communication.
Further, the first model control system 10 and the second model control system 50 are regarded as one model control system, and a model common to the first feedback control system 30 and the second feedback control system 70 from this one model control system. The command may be supplied.

Next, the operation of the motor control device 1 of FIG. 1 will be described.

In order to control the position of the table 4, a common external position command is simultaneously supplied to the first model control system 10 and the second model control system 50 from the upper controller.

The first model control system 10 to which the external position command is supplied subtracts the first model position from the external position command and calculates the first model speed from the first model position error. Further, the first model detection speed is calculated from the first model position, the first model detection speed is subtracted from the first model speed, the first model torque is calculated from the first model speed error, and the total is calculated from the first model torque. The feedback amount is subtracted, and the first model torque after the state feedback compensation is low-pass filtered. Further, the position of the first movable part model 18 and the position of the first machine stand model 19 are calculated from the first model torque after the state feedback compensation processing and the low-pass filter processing, and these are added to obtain the first model position. Calculate. In addition, the feedback amount for the vibrating position and the feedback amount for the filtering process are calculated, and these are totaled to calculate the total feedback amount.
Through this series of arithmetic processing, the first model control system 10 generates a first model position command, a first model speed command, and a first model torque command as first model commands and outputs them to the first feedback control system 30. ..

The first feedback control system 30 to which the first model command is supplied generates a first control position error indicating a position error between the first model position command and the first detection position obtained from the first sensor 42.
Further, the first feedback control system 30 shows a difference in position error (synchronization error) between its own first control position error and the second control position error generated by the second control position error generator 71. A position error is generated, and a first position synchronization error compensation amount is generated. Further, the first control position error after the synchronization compensation process is generated from the first control position error and the first position synchronization error compensation amount, and the first control speed is generated.
Further, the first feedback control system 30 generates a first control speed error from the first control speed, the first detection speed, and the first model speed command, and generates the first control torque.
Further, the first feedback control system 30 generates a first total control torque from the first control torque and the first model torque command, and performs low-pass filter processing. Then, the first torque controller 41 controls the first motor 2 based on the first total control torque after the low-pass filter processing. The first sensor 42 detects the rotational position of the first motor 2. Further, the first detection speed generator 36 generates the first detection speed from the rotation position detected by the first sensor 42.

Further, the second model control system 50 to which the same external position command is supplied at the same time as the first model control system 10 executes the same feedback control as the first model control system 10 described above. The second feedback control system 70 to which the second model command is supplied from the second model control system 50 also executes the same feedback control as the first feedback control system 30 described above.
However, the second feedback control system 70 includes components corresponding to the first synchronous position error generator 32, the first position synchronous compensator 33, and the first synchronous compensation position error generator 34 of the first feedback control system 30. Since it is not provided, the second position controller 75 generates the second control speed from the second control position error generated by the second control position error generator 71. The second control speed is generated based on the second control position error without the synchronous compensation processing.

Then, in the present embodiment, each of the two feedback control systems feedback-controls each motor based on the model command instead of the external position command. Moreover, the two model control systems that generate model commands from external position commands are the movable part model that corresponds to the movement of the movable part driven by the two motors, and the machine base to which the motor and the movable part are attached. The machine stand and the table 4 include the machine machine model that supports movement, and by feeding back the state of the machine machine model and suppressing the vibration between the machine machine and the table 4 caused by the vibration of the machine table. Suppresses and stabilizes the relative vibration with. As a result, the two feedback control systems follow the model and execute stable feedback control independently of each other so that relative vibration between the machine base and the table 4 does not occur, and the two motors issue external position commands. On the other hand, it can be controlled to follow in the same way. The two feedback control systems can control the two motors to synchronize with each other based on a common external position command input at the same time. Then, even when the machine base on which the table 4 is attached vibrates, the vibration of the table 4 can be suppressed and the two motors can be synchronized with each other.
Moreover, in the present embodiment, the first feedback control system 30 compensates for its own control error by the difference from the control error of the second feedback control system 70. The first feedback control system 30 executes its own feedback control while synchronizing the control error with respect to the control error of the second feedback control system 70 so as not to cause a deviation. That is, while controlling the two motors independently of each other by the feedback control system independent of each other, it is possible to compensate for the deviation of the control error that may occur between the first feedback control system 30 and the second feedback control system 70. Can be done. That is, the deviation of the control error that may occur between these two feedback control systems can be compensated by the two feedback control systems.
As described above, in the present embodiment, the two motors that jointly move one movable portion are in a state of being controlled by a common external position command and suppressing vibration between the machine base and the table 4. By performing model follow-up control with the same model that feeds back, the torque commands given to the two feedback control systems can be made the same for all axes. As a result, even if the machine base vibration may occur, the vibration between the machine base and the table 4 is suppressed and the control is executed so that the deviation between the control errors of the two feedback control systems is unlikely to occur. be able to.
Moreover, even so, a minute deviation in control error that may occur between the two feedback control systems due to other causes is compensated between the two feedback control systems. Therefore, in the control system of two motors, one movable part is controlled by two motors by a dual control of a control that is unlikely to cause a synchronization shift due to vibration and a control that suppresses the synchronization shift. The synchronization accuracy of the two motors can be improved.
As a result, in the present embodiment, in a machine in which one movable part is driven by two motors, vibration between the machine base and the table 4 is suppressed even when the machine base vibration may occur. Therefore, the followability to the command can be improved, and the synchronization accuracy between the two motors can be ensured, and as a result, high-speed and high-precision positioning can be realized.

The above embodiment is an example in which two sets of model control system and feedback control system are used to drive the movable portion by two motors. Further, it is an example in which the synchronization position error generator, the position synchronization compensation device, and the synchronization compensation position error generator are applied to the first feedback control system.
In addition, the synchronization position error generator, the position synchronization compensation device, and the synchronization compensation position error generator may be applied to the second feedback control system.
Furthermore, the movable portion may be driven by three or more motors. In this case, the model control system and the feedback control system may be provided in basically the same number of sets as the motor. Further, when N (N is a natural number of 2 or more) motors are used, the synchronous position error generator, the position synchronization compensator, and the synchronous compensation position error generator are combined with (N-1) feedback control systems. It may be provided. In this (N-1) feedback control system, the (N-1) synchronization position error generator may generate a position synchronization error with the control position error of the remaining one feedback control system. ..

[Second Embodiment]
FIG. 2 is a block diagram of the motor control device 1 according to the second embodiment of the present invention.
In the motor control device 1 of FIG. 2, as compared with that of FIG. 1, the second feedback control system 70 has a second synchronous position error generator 72, a second position synchronous compensator 73, and a second synchronous compensation position error generator. It differs in that it has 74.
The second synchronization position error generator 72, the second position synchronization compensation device 73, and the second synchronization compensation position error generator 74 are the first synchronization position error generator 32, the first position synchronization compensation device 33, and the first synchronization. Corresponds to the compensation position error generator 34.
The second synchronous position error generator 72 is based on its own second control position error and the first control position error generated by the first control position error generator 31, and the difference between these control position errors (synchronization error). ) Is generated. The second synchronous position error may be, for example, a value obtained by subtracting another first control position error from its own second control position error. In this case, a synchronization error of the second feedback control system 70 with respect to the first feedback control system 30 can be obtained.
The second position synchronization compensator 73 generates a second position synchronization error compensation amount from the second synchronization position error. In the present embodiment, since the first feedback control system 30 and the second feedback control system 70 are mutually compensated, the first position synchronization compensator 33 and the second position synchronization compensator 73 are proportionally controlled. It is good to use a vessel.
The second synchronous compensation position error generator 74 has a second control position error which is a control position error in the second feedback control system 70 and a second position synchronization error compensation which is a synchronous position error between two feedback control systems. A second control position error after synchronous compensation processing is generated based on the quantity. The second control position error after the synchronization compensation process may be, for example, the total value obtained by adding the second control position error and the second position synchronization error compensation amount.
The second position controller 75 generates the second control speed from the second control position error after the synchronization compensation process. The second position controller 75 determines the second control speed according to the control position error in the second feedback control system 70 and the synchronous position error of the second feedback control system 70 with reference to the first feedback control system 30. Generate. Then, when the control position of the second feedback control system 70 is delayed as compared with the control position of the first feedback control system 30, the second control speed increases.
Other than this, the configuration and operation of the motor control device 1 of FIG. 2 are the same as those of FIG. 1, and the description thereof will be omitted.

Then, in the present embodiment, the first feedback control system 30 and the second feedback control system 70 can compensate each other for the positional error between the two axes. As a result, even if the control response of each feedback control system is not high, the positional error between the axes can be reduced and the synchronization accuracy can be improved. Even higher synchronization accuracy can be expected than in the first embodiment.
Therefore, for example, by making the first feedback control system 30 and the second feedback control system 70 follow the same vibration model, synchronization error is less likely to occur, but synchronization error between axes still occurs due to other causes. Can be more effectively suppressed than in the first embodiment.
As described above, in the present embodiment, an individual model control system is configured by using the same model in a machine in which one moving part is driven by a plurality of (here, two) motors, and the model is actually followed. By letting the feedback control system of the above perform control, even if the machine base vibration may occur, the vibration between the machine machine and the table 4 is suppressed and the synchronization accuracy between the two motors is accurate. As a result, high-speed and high-precision positioning can be realized.

[Third Embodiment]
FIG. 3 is a block diagram of the motor control device 1 according to the third embodiment of the present invention.
The motor control device 1 of FIG. 3 has a first model control system 10, a first feedback control system 30, a second model control system 50, and a second feedback control system 70, and is the same as the motor control device 1 of FIG. In addition, two motors, the first motor 2 and the second motor 3, jointly drive one movable portion so that the movable portion can be positioned at high speed and with high accuracy.
Hereinafter, the differences from the motor control device 1 of FIG. 1 will be mainly described. Further, the same components as those of the motor control device 1 of FIG. 1 are designated by the same reference numerals as those of FIG. 1, and the description thereof will be omitted.

The first feedback control system 30 includes a first control position error generator 31, a first synchronous position error generator 32, a first position synchronous compensator 33, a first synchronous compensation position error generator 34, and a first position controller 35. , A first detection speed generator 36, a first control speed error generator 37, a first speed controller 38, a first control torque generator 39, and a first torque controller 41.
Then, the first control position error generator 31, the first synchronous compensation position error generator 34, the first position controller 35, the first control speed error generator 37, the first speed controller 38, and the first control torque generator 39, the first torque controller 41, the first motor 2, and the first sensor 42 form a feedback loop that actually controls the first motor 2.
The first torque controller 41 controls the first motor 2 based on the first total control torque output from the first control torque generator 39.

The first model control system 10 receives an external position command as an input, calculates a virtual operation of the first feedback control system 30 using a model corresponding to the first feedback control system 30, and causes the first feedback control system 30 to calculate a virtual operation. Generate the first model command to give.
The first model control system 10 of the present embodiment has the first model position error calculator 11, the first model position controller 12, and the first front stage state compensation model speed in order to calculate the operation of the first feedback control system 30. Error calculator 91, 1st rear stage state compensation model speed error calculator 92, 1st model speed controller 15, 1st front stage state compensation model torque error calculator 93, 1st rear stage state compensation model torque error calculator 94, 1st (1) It has a two-inertia model 95, a first torque feedback amount calculator 106, and a first speed feedback amount calculator 107.
Then, the first model position error calculator 11, the first model position controller 12, the first front stage state compensation model speed error calculator 91, the first rear stage state compensation model speed error calculator 92, and the first model speed controller 15 The first front stage state compensation model torque error calculator 93, the first rear stage state compensation model torque error calculator 94, and the first second inertia model 95 form a main feedback loop of the first model control system 10. The main feedback loop of the first model control system 10 corresponds to the feedback loop of the first feedback control system 30.

The first second inertia model 95 calculates the operation of the table 4 vibrating as the operation of the mechanical system from the first motor 2 to the table 4.
In the two-inertia model, the mechanical system is represented by two models, a motor-side model corresponding to the first motor 2 side and a load-side model corresponding to the table 4 side, and the torsional vibration component between them is taken into consideration. It is a model.
The first second inertia model 95 of the present embodiment includes a first motor side model 96, a first front stage motor side integrator 97, a first rear stage motor side integrator 98, a first torsional torque calculator 99, and a first load side model. 100, 1st front load side integrator 101, 1st rear load side integrator 102, 1st model in-model acceleration error integrator 103, 1st model in-speed error integrator 104, 1st model in-model position error integrator 105, Have.
The first motor side model 96 is obtained by multiplying the first model torque after state compensation, which will be described later, input to the first second inertia model 95 by a gain of 1 / _JM in consideration of the motor side inertia, and the first motor side. Calculate the model acceleration.
The first front stage motor side integrator 97 integrates the first motor side model acceleration to calculate the first motor side model speed. The first motor side model speed can be used as the model speed generated by the first second inertia model 95, and is output as the first model speed command.
The first rear stage motor side integrator 98 integrates the first motor side model speed to calculate the first motor side model position. The first motor side model position can be used as a model position generated by the first second inertia model 95, and is output as a first model position command.
The first load side model 100 calculates the first load side model acceleration by multiplying the first torsion torque calculated by the first torsion torque calculator 99 by a gain of 1 / J _L in consideration of the load side inertia.
The first first stage load side integrator 101 integrates the first load side model acceleration to calculate the first load side model speed.
The first second-stage load-side integrator 102 integrates the first load-side model speed to calculate the first load-side model position.
The first model in-model acceleration error calculator 103 calculates the first in-model acceleration error by subtracting the first load side model acceleration from the first motor side model acceleration.
The speed error calculator 104 in the first model calculates the speed error in the first model by subtracting the model speed on the first load side from the model speed on the first motor side.
The position error calculator 105 in the first model calculates the position error in the first model by subtracting the model position on the first load side from the model position on the first motor side.
The first torsional torque calculator 99 generates the first torsional torque by multiplying the position error in the first model by the gain KB corresponding to the torsional rigidity.
With such a vibration model, the bi-inertia model can calculate the motion that causes torsional vibration between the motor-side model and the load-side model.

The first torque feedback amount calculator 106 and the first speed feedback amount calculator 107 calculate the feedback amount which is the feedback amount of the state of the bi-inertia model.
The first torque feedback amount calculator 106 calculates the first torque feedback amount by multiplying the acceleration error in the first model by the feedback gain KAB.
The first speed feedback amount calculator 107 calculates the first speed feedback amount by multiplying the speed error in the first model by the feedback gain KVB.

The first first stage state compensation model speed error calculator 91 subtracts the first speed feedback amount from the first model speed calculated by the first model position controller 12.
The first rear stage state compensation model speed error calculator 92 subtracts the first motor side model speed from the calculation result of the first front stage state compensation model speed error calculator 91.
As a result, the first after state compensation is compensated by subtracting the state feedback amount related to the speed calculated by the first second inertia model 95 from the first model speed error between the first model speed and the first motor side model speed. The model velocity error is obtained. The first model speed controller 15 calculates the first model torque from the first model speed error after the state compensation.

The first first stage state compensation model torque error calculator 93 subtracts the first torque feedback amount from the first model torque.
The first rear stage state compensation model torque error calculator 94 subtracts the first torsional torque from the calculation result of the first front stage state compensation model torque error calculator 93.
As a result, the first model torque after state compensation is compensated by subtracting the state feedback amount related to the acceleration calculated by the first second inertia model 95 from the first model torque error between the first model torque and the first torsional torque. An error is obtained. The first model torque error after this state compensation is output to the first motor side model 96 of the first second inertia model 95. Further, the first model torque error after the state compensation is the model torque given to the first second inertia model 95, and is output as the first model torque command.

By the feedback control corresponding to the first feedback control system 30, the first model control system 10 generates the first model position command, the first model speed command, and the first model torque command.
Further, control parameters for enabling desired positioning control may be set in the table 4 for each element of the first model control system 10.
As in this embodiment, the state feedback of the acceleration difference (acceleration error in the model) and the speed difference (speed error in the model) between the motor side model and the load side model is performed by using the mechanical model of the bi-inertia system. In this case, by applying the modern control theory, it is possible to calculate the parameters that stabilize the table 4 so as not to cause vibration. By calculating and setting the parameters so that the characteristic equation for the equation of state of the model control system has quadruple roots, the table 4 is stabilized so as not to cause vibration.

The second feedback control system 70 includes a second control position error generator 71, a second position controller 75, a second detection speed generator 76, a second control speed error generator 77, a second speed controller 78, and a second. It has a control torque generator 79 and a second torque controller 81.
Then, the second control position error generator 71, the second position controller 75, the second detection speed generator 76, the second control speed error generator 77, the second speed controller 78, the second control torque generator 79, The second torque controller 81, the second motor 3, and the second sensor 82 form a feedback loop that actually controls the second motor 3.
Each component of the second feedback control system 70 is the same as the component having the same name but different numbers in the first feedback control system 30, and detailed description thereof will be omitted.
However, the second position controller 75 generates the second control speed from the second control position error generated by the second control position error generator 71. That is, unlike the first feedback control system 30, the second control speed is generated based on the second control position error without the synchronous compensation processing.

The second model control system 50 has a second model position error calculator 51, a second model position controller 52, and a second front stage state compensation model speed error calculator 111 in order to calculate the operation of the second feedback control system 70. , 2nd stage state compensation model speed error calculator 112, 2nd model speed controller 55, 2nd front stage state compensation model torque error calculator 113, 2nd stage state compensation model torque error calculator 114, 2nd second inertia model It has 115, a second torque feedback amount calculator 126, and a second speed feedback amount calculator 127.
The second second inertia model 115 includes a second motor side model 116, a second front stage motor side integrator 117, a second rear stage motor side integrator 118, a second torsional torque calculator 119, and a second load side model 120. It has a second front-stage load-side integrator 121, a second-stage load-side integrator 122, a second in-model acceleration error integrator 123, a second in-model in-speed error integrator 124, and a second in-model position error integrator 125. ..
Then, the second model position error calculator 51, the second model position controller 52, the second front stage state compensation model speed error calculator 111, the second rear stage state compensation model speed error calculator 112, and the second model speed controller 55. , The second front stage state compensation model torque error calculator 113, the second rear stage state compensation model torque error calculator 114, and the second second inertia model 115 form the main feedback loop of the second model control system 50. The main feedback loop of the second model control system 50 corresponds to the feedback loop of the second feedback control system 70.
Each component of the second model control system 50 is the same as the component having the same name but different numbers in the first model control system 10, and detailed description thereof will be omitted. The same values as those of the first model control system 10 are set in the parameters of each part of the second model control system 50.
In the following description, the various signal names in the second feedback control system 70 and the second model control system 50 include various signal names in the corresponding first feedback control system 30 and the first model control system 10. The number of is changed from the first to the second.
Further, by using the parameters of the same value in the control system of the axis 1 and the control system of the axis 2, the commands from the first model control system 10 and the second model control system 50 are output with the same value at the same time for each axis. To. As a result, torque is applied between the shafts at the same time.

Next, the operation of the motor control device 1 of FIG. 3 will be described.

In order to control the position of the table 4, a common external position command is simultaneously supplied to the first model control system 10 and the second model control system 50 from the upper controller.

The first model control system 10 to which the external position command is supplied subtracts the first model position from the external position command and calculates the first model speed from the first model position error. Further, the first speed feedback amount is subtracted from the first model speed, and the model speed on the first motor side is further subtracted to calculate the first model speed error after state compensation. Further, the first model torque is calculated from the first model speed error after the state compensation, the first torque feedback amount is subtracted from the first model torque, and the first torsion torque is further subtracted to obtain the first after the state compensation. Calculate the model torque error.
In the first second inertia model 95, first, the first motor side model acceleration is calculated from the first model torque error after the state compensation, and further, the first motor side model speed and the first motor side model position are calculated. Further, the first load side model acceleration is calculated from the first torsion torque, and further, the first load side model speed and the first load side model position are calculated. Further, the acceleration error in the first model, the velocity error in the first model, and the position error in the first model, which are the differences between the motor side and the load side, are calculated. In addition, the first torsion torque, the first torque feedback amount, and the first speed feedback amount are calculated.
Through this series of arithmetic processing, the first model control system 10 generates a first model position command, a first model speed command, and a first model torque command as first model commands and outputs them to the first feedback control system 30. do.

The first feedback control system 30 to which the first model command is supplied generates a first control position error indicating a position error between the first model position command and the first detection position obtained from the first sensor 42.
Further, the first feedback control system 30 shows a difference in position error (synchronization error) between its own first control position error and the second control position error generated by the second control position error generator 71. A position error is generated, and a first position synchronization error compensation amount is generated. Further, the first control position error after the synchronization compensation process is generated from the first control position error and the first position synchronization error compensation amount, and the first control speed is generated.
Further, the first feedback control system 30 generates a first control speed error from the first control speed, the first detection speed, and the first model speed command, and generates the first control torque.
Further, the first feedback control system 30 generates the first total control torque from the first control torque and the first model torque command. Then, the first torque controller 41 controls the first motor 2 based on the first total control torque. The first sensor 42 detects the rotational position of the first motor 2. Further, the first detection speed generator 36 generates the first detection speed from the rotation position detected by the first sensor 42.

Further, the second model control system 50 to which the same external position command is supplied at the same time as the first model control system 10 executes the same feedback control as the first model control system 10 described above. The second feedback control system 70 to which the second model command is supplied from the second model control system 50 also executes the same feedback control as the first feedback control system 30 described above.

Then, in the present embodiment, each of the two feedback control systems feedback-controls each motor based on the model command instead of the external position command. Moreover, the two model control systems that generate model commands from external position commands are bi-inertia models that correspond to the movement of the mechanical system from the motor to the movable part when the movable part is driven by the two motors. In addition, by feeding back the state of the bi-inertia model and suppressing the vibration of the table 4 caused by the vibration of the mechanical system from the motor to the moving part, the vibration of the table 4 is suppressed and stabilized. As a result, the two feedback control systems follow the model and execute feedback control stabilized so as not to cause vibration of the table 4, independently of each other, and the two motors similarly perform the same for the external position command. Can be controlled to follow. The two feedback control systems can control the two motors to synchronize with each other based on a common external position command input at the same time. Further, even when vibration is generated in the mechanical system from the motor to the movable portion, the vibration of the table 4 can be suppressed and the two motors can be synchronized with each other.
Moreover, in the present embodiment, the first feedback control system 30 compensates for its own control error by the difference from the control error of the second feedback control system 70. The first feedback control system 30 executes its own feedback control while synchronizing the control error with respect to the control error of the second feedback control system 70 so as not to cause a deviation. That is, while controlling the two motors independently of each other by the feedback control system independent of each other, it is possible to compensate for the deviation of the control error that may occur between the first feedback control system 30 and the second feedback control system 70. Can be done. The deviation of the control error that may occur between these two feedback control systems can be compensated between the two feedback control systems.
As described above, in the present embodiment, the two motors that jointly move one movable portion are in a state of compensating for the vibration of the mechanical system from the motor to the table 4 by a common external position command. By performing model follow-up control with the same two-inertia model that feeds back, the torque commands given to the two feedback control systems can be made the same for all axes. As a result, even if vibration occurs in the mechanical system from the motor to the table 4, the vibration of the table 4 is suppressed and the control is executed so that the deviation between the control errors of the two feedback control systems is unlikely to occur. be able to.
Moreover, even so, a minute deviation in control error that may occur between the two feedback control systems due to other causes is compensated between the two feedback control systems. Therefore, in the control system of two motors, one movable part is controlled by two motors by a dual control of a control that is unlikely to cause a synchronization shift due to vibration and a control that suppresses the synchronization shift. The synchronization accuracy of the two motors can be improved.
As a result, in the present embodiment, in a machine in which one moving portion is driven by two motors, vibration of the table 4 is suppressed even when vibration may occur between the motor and the table 4. Therefore, the followability to the command can be improved, and the synchronization accuracy between the two motors can be ensured, and as a result, high-speed and high-precision positioning can be realized.

The above embodiment is an example in which two sets of model control system and feedback control system are used to drive the movable portion by two motors. Further, it is an example in which the synchronization position error generator, the position synchronization compensation device, and the synchronization compensation position error generator are applied to the first feedback control system.
In addition, the synchronization position error generator, the position synchronization compensation device, and the synchronization compensation position error generator may be applied to the second feedback control system.
Furthermore, the movable portion may be driven by three or more motors. In this case, the model control system and the feedback control system may be provided in basically the same number of sets as the motor. Further, when N (N is a natural number of 2 or more) motors are used, the synchronous position error generator, the position synchronization compensator, and the synchronous compensation position error generator are combined with (N-1) feedback control systems. It may be provided. In this (N-1) feedback control system, the (N-1) synchronization position error generator may generate a position synchronization error with the control position error of the remaining one feedback control system. ..

[Fourth Embodiment]
FIG. 4 is a block diagram of the motor control device 1 according to the fourth embodiment of the present invention.
In the motor control device 1 of FIG. 4, as compared with that of FIG. 3, the second feedback control system 70 has a second synchronous position error generator 72, a second position synchronous compensator 73, and a second synchronous compensation position error generator. It differs in that it has 74.
The second synchronization position error generator 72, the second position synchronization compensation device 73, and the second synchronization compensation position error generator 74 are the first synchronization position error generator 32, the first position synchronization compensation device 33, and the first synchronization. Corresponds to the compensation position error generator 34.
The second synchronous position error generator 72 is based on its own second control position error and the first control position error generated by the first control position error generator 31, and the difference between these control position errors (synchronization error). ) Is generated. The second synchronous position error may be, for example, a value obtained by subtracting another first control position error from its own second control position error. In this case, a synchronization error of the second feedback control system 70 with respect to the first feedback control system 30 can be obtained.
The second position synchronization compensator 73 generates a second position synchronization error compensation amount from the second synchronization position error. In the present embodiment, since the first feedback control system 30 and the second feedback control system 70 are mutually compensated, the first position synchronization compensator 33 and the second position synchronization compensator 73 are proportionally controlled. It is good to use a vessel.
The second synchronous compensation position error generator 74 has a second control position error which is a control position error in the second feedback control system 70 and a second position synchronization error compensation which is a synchronous position error between two feedback control systems. A second control position error after synchronous compensation processing is generated based on the quantity. The second control position error after the synchronization compensation process may be, for example, the total value obtained by adding the second control position error and the second position synchronization error compensation amount.
The second position controller 75 generates the second control speed from the second control position error after the synchronization compensation process. The second position controller 75 determines the second control speed according to the control position error in the second feedback control system 70 and the synchronous position error of the second feedback control system 70 with reference to the first feedback control system 30. Generate. Then, when the control position of the second feedback control system 70 is delayed as compared with the control position of the first feedback control system 30, the second control speed increases.
Other than this, the configuration and operation of the motor control device 1 of FIG. 4 are the same as those of FIG. 3, and the description thereof will be omitted.

Then, in the present embodiment, the first feedback control system 30 and the second feedback control system 70 can compensate each other for the positional error between the two axes. As a result, even if the control response of each feedback control system is not high, the positional error between the axes can be reduced and the synchronization accuracy can be improved. Even higher synchronization accuracy can be expected than in the third embodiment.
Therefore, for example, by making the first feedback control system 30 and the second feedback control system 70 follow the same vibration model, synchronization error is less likely to occur, but synchronization error between axes still occurs due to other causes. Can be more effectively suppressed than in the third embodiment.
As described above, in the present embodiment, in a machine in which one moving part is driven by a plurality of (here, two) motors, the same bi-intention model is used to configure each model control system and to follow the model. By having the actual feedback control system execute the control, even if vibration may occur between the motor and the table 4, the vibration between the table 4 is suppressed and the vibration between the two motors is suppressed. The synchronization accuracy can be ensured, and as a result, high-speed and high-precision positioning can be realized.

1 Motor control device 2 1st motor 3 2nd motor 4 Table 5 1st ball screw 6 2nd ball screw 10 1st model control system 11 1st model position error calculator 12 1st model position controller 13 1st model speed calculator 14 1st model speed error calculator 15 1st model speed controller 16 1st model torque error calculator 17 1st model torque command low pass filter (model low pass filter)
18 1st moving part model 19 1st machine model 20 1st model position adder 21 1st state feedback amount calculator 22 1st machine feedback amount calculator 23 1st filter feedback amount calculator 24 1st total feedback amount Computer 30 1st feedback control system 31 1st control position error generator 32 1st synchronous position error generator 33 1st position synchronous compensator 34 1st synchronous compensation position error generator 35 1st position controller 36 1st detection Speed generator 37 1st control speed error generator 38 1st speed controller 39 1st control torque generator 40 1st torque command low pass filter (control low pass filter)
41 1st torque controller 42 1st sensor 50 2nd model control system 51 2nd model position error calculator 52 2nd model position controller 53 2nd model speed calculator 54 2nd model speed error calculator 55 2nd model Speed controller 56 2nd model torque error calculator 57 2nd model torque command low pass filter (model low pass filter)
58 2nd moving part model 59 2nd machine model 60 2nd model position adder 61 2nd state feedback amount calculator 62 2nd machine feedback amount calculator 63 2nd filter feedback amount calculator 64 2nd total feedback amount Computer 70 Second feedback control system 71 Second control position error generator 72 Second synchronous position error generator 73 Second position synchronous compensator 74 Second synchronous compensation position error generator 75 Second position controller 76 Second detection Speed generator 77 Second control speed error generator 78 Second speed controller 79 Second control torque generator 80 Second torque command low pass filter (control low pass filter)
81 Second torque controller 82 Second sensor 91 First front stage state compensation model Speed error calculator 92 First rear stage state compensation model Speed error calculator 93 First front stage state compensation model Torque error calculator 94 First rear stage state compensation model Torque error calculator 95 1st second inertia model (multi-inertia model)
96 1st motor side model 97 1st front stage motor side integrator 98 1st rear stage motor side integrator 99 1st torsion torque calculator 100 1st load side model 101 1st front stage load side integrator 102 1st rear stage load side integral Instrument 103 1st model internal acceleration error calculator 104 1st model internal speed error calculator 105 1st model internal position error calculator 106 1st torque feedback amount calculator 107 1st speed feedback amount calculator 111 2nd previous stage state compensation Model Speed Error Calculator 112 2nd Rear State Compensation Model Speed Error Calculator 113 2nd Front State Compensation Model Torque Error Calculator 114 2nd Rear State Compensation Model Torque Error Calculator 115 2nd Integral Model (Multi-Integral Model)
116 2nd motor side model 117 2nd front stage motor side integral 118 2nd rear stage motor side integrator 119 2nd torsion torque calculator 120 2nd load side model 121 2nd front stage load side integrator 122 2nd rear stage load side integral Instrument 123 2nd model internal acceleration error calculator 124 2nd model internal speed error calculator 125 2nd model internal position error calculator 126 2nd torque feedback amount calculator 127 2nd speed feedback amount calculator

Claims (11)

It is a motor control device that jointly moves one movable part by N (N: 2 or more natural numbers) motors driven based on a common external position command.
A model control system that feeds back the state so as to suppress the influence of vibration on the movable part, and generates a model command including a model position command from the external position command, and a model control system.
N feedback control systems provided in a one-to-one correspondence with the N motors and feedback-controlling each of the motors based on the model command.
Have,
The (N-1) feedback control system compensates for the control position error when controlling each of the motors by the difference from the control position error in the remaining one feedback control system.
The model control system is
The state of the machine base model including the movable part model corresponding to the movement of the movable part driven by the motor and the machine machine model corresponding to the movement of the machine machine to which the motor and the movable part are attached. Is fed back to suppress the vibration between the machine stand and the moving part caused by the vibration of the machine base.
It has a model position adder that calculates a position obtained by adding the position of the movable part model and the position of the machine base model as a model position output as the model position command.
Motor control device. The model control system is
It has a model position error calculator that calculates a model position error by subtracting the model position output from the model position adder from the external position command.
Each of the N feedback control systems
The motor control device according to claim 1, further comprising a control position error generator that generates a control position error indicating these position errors based on the model position command and the position detected by the sensor that detects the position of each of the motors. .. Each of the (N-1) feedback control systems
It has a synchronous position error generator that produces a difference between each of the control position errors and the control position error in the remaining one feedback control system.
The control position error in controlling each of the motors is compensated by the difference from the control position error in the remaining one feedback control system.
The motor control device according to claim 2. The model control system is
A model position controller that calculates the model speed from the model position error,
A model speed calculator that calculates the model detection speed as a model speed command, which is one of the model commands, from the model position output from the model position adder.
A model speed error calculator that calculates the model speed error by subtracting the model detection speed from the model speed, and
A model speed controller that calculates model torque from the model speed error,
A model torque error calculator that calculates the model torque after state compensation as a model torque command, which is one of the model commands, by subtracting the state feedback amount from the model torque.
A model low-pass filter that processes the model torque after state compensation with a low-pass filter and outputs it to the moving part model and the machine base model.
It has a state feedback amount calculator that calculates the state feedback amount according to the state of the machine stand model.
Each of the (N-1) feedback control systems
A position controller that generates a control speed from the control position error after compensation processing, a detection speed generator that generates a detection speed from a position detected by the sensor that detects the position of each of the motors, and a detection speed generator.
A control speed error generator that generates a control speed error by adding the model speed command to the speed error between the control speed and the detection speed based on the control speed, the detection speed, and the model speed command.
A speed controller that generates control torque from the control speed error,
A control torque generator that generates a total control torque indicating the sum of the control torque and the model torque command.
A control low-pass filter that processes the total control torque with a low-pass filter,
It has a torque controller that controls each of the motors based on the total control torque after low-pass filtering.
The motor control device according to claim 3. It is a motor control device that jointly moves one movable part by N (N: 2 or more natural numbers) motors driven based on a common external position command.
A model control system that feeds back the state so as to suppress the influence of vibration on the movable part, and generates a model command including a model position command from the external position command, and a model control system.
N feedback control systems provided in a one-to-one correspondence with the N motors and feedback-controlling each of the motors based on the model command.
Have,
The (N-1) feedback control system compensates for the control position error when controlling each of the motors by the difference from the control position error in the remaining one feedback control system.
The model control system is
It includes a bi-inertia model corresponding to the movement of the mechanical system from the motor to the movable part, and feeds back the state of the bi-inertia model to suppress the vibration of the movable part caused by the vibration of the mechanical system. And
The bi-inertia model calculates the model position output as the model position command.
Motor control device. The model control system is
It has a model position error calculator that calculates a model position error by subtracting the model position output from the bi-inertia model from the external position command.
Each of the N feedback control systems
The motor control device according to claim 5, further comprising a control position error generator that generates a control position error indicating these position errors based on the model position command and the position detected by the sensor that detects the position of each of the motors. .. Each of the (N-1) feedback control systems
It has a synchronous position error generator that produces a difference between each of the control position errors and the control position error in the remaining one feedback control system.
The control position error in controlling each of the motors is compensated by the difference from the control position error in the remaining one feedback control system.
The motor control device according to claim 6. The model commands from the respective model control systems to which the common external position commands are simultaneously input are input to the N feedback control systems.
The motor control device according to any one of claims 1 to 7. The model control system is provided with N pieces corresponding to one-to-one with the N pieces of the feedback control system.
The N model control systems generate the same model command from the common external position command with the same feedback loop configuration.
The motor control device according to any one of claims 1 to 8. The feedback control system is two.
The two feedback control systems compensate each other for the control position error for controlling the motor in each by the difference from the control position error in the other feedback control system.
The motor control device according to any one of claims 1 to 9. The characteristic equation for the equation of state of the model control system has multiple roots.
The motor control device according to any one of claims 1 to 10.

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