JP6914610B2 - Runout measurement jig and measuring device using this - Google Patents

Description

The present invention relates to a runout measuring jig and a measuring device using a runout measuring jig using the same.

A contact type measuring device is used as a measuring device for measuring the distance and displacement to the object to be measured. In the contact-type measuring device, an instrument for measuring displacement, such as a dial gauge, comes into contact with a measurement object via a measuring jig to measure a distance. For example, Cited Document 1 describes a shape measuring instrument having a spherical measuring jig and a moving amount detecting means at the tip. With the measuring jig in contact with the surface of the object to be measured, the surface of the object to be measured and the measuring jig are relatively moved, and the displacement of the measuring jig at that time is measured by the movement amount detecting means. The change due to the position of the surface of the object to be measured can be measured.

As another measuring device, there is an optical distance measuring device that measures a distance using measurement light. For example, the measurement light (pulse laser) is output toward the object to be measured, the reflected light reflected on the surface of the object to be measured is condensed by a condenser lens, and the condensed reflected light is received by a light receiving element. , There are laser distance meters that analyze the received light and calculate the distance to the object to be measured.

Japanese Unexamined Patent Publication No. 2005-315781

Here, the distance between the tubular surface of the rotating body and the rotation axis may be measured as an object for measuring the position. For example, the misalignment of the rotating body is measured by fixing the measuring terminal of the measuring device, rotating the rotating body, and measuring the fluctuation of the position of the tubular surface.

When measuring the position of the surface of the rotating body by using the measuring device described in Patent Document 1.
The probe at the tip of the measuring jig may not be in proper contact with the object to be measured, and the misalignment of the object to be measured may not be accurately measured. Further, the same problem occurs when the distance to the object to be measured is measured by using an optical distance measuring device such as a laser range finder.

The present invention solves the above-mentioned problems, and is a runout measuring jig capable of appropriately contacting a probe with a measurement object by an easy operation and performing various measurements with high accuracy and efficiency. It is an object of the present invention to provide a measuring device using.

The present invention for solving the above-mentioned problems is a runout measuring jig supported by a measuring instrument and in contact with an object to be measured, at one end of a rod connected to the measuring instrument and the other end of the rod. It has a probe that is supported in a rotatable state and comes into contact with the measurement object, and the probe is characterized by having a probe contact surface in which a portion that comes into contact with the measurement object is flat. And.

Further, in the probe, the rod has a spherical recess on one end on the probe side, and the probe is provided with a hemispherical recess substantially the same as the spherical one end of the rod, and the recess is the rod. It is preferable that the rod comes into contact with the sphere and is rotatable along the surface of the sphere.

It is preferable that the runout measuring jig has an opening having a diameter smaller than the spherical diameter of the rod and a liner fixed to the end face on which the recess of the probe is formed.

It is preferable that the rod has a smoothed contact surface with the probe, and the probe has a smoothed contact surface with the rod.

The probe is preferably characterized in that a chamfer is provided around the probe contact surface.

Further, it is preferable that the probe contact surface is made of a material having a hardness higher than that of the object to be measured.

Further, the present invention for solving the above-mentioned problems is a measuring device, which supports the runout measuring jig and the runout measuring jig according to any one of the above, and displaces the runout measuring jig. It is characterized by having a measuring instrument for detecting the above and a fixing instrument for fixing the measuring instrument.

According to the present invention, since the probe is movable with respect to the rod and the probe contact surface of the probe is flat, it follows and adheres to the object to be measured while changing the angle of the probe contact surface. Can be done. As a result, it is possible to efficiently measure the misalignment of the measurement object with high accuracy by a simple operation even for the measurement object having unevenness or runout on the surface.

FIG. 1 is a front view showing a schematic configuration of a measuring device. FIG. 2 is an enlarged front view showing the runout measuring jig of the first embodiment. FIG. 3 is an enlarged plan view showing the probe according to the first embodiment shown in FIG. FIG. 4 is an enlarged cross-sectional view showing the probe according to the first embodiment shown in FIG. FIG. 5 is an enlarged plan view showing the liner according to the first embodiment shown in FIG. FIG. 6 is an enlarged front view showing the runout measuring jig of the second embodiment.

Hereinafter, the present invention will be described in detail with reference to the drawings. The present invention is not limited to the contents described in the following embodiments. In addition, the components in the following embodiments include those that can be easily assumed by those skilled in the art, or those that are substantially the same, that is, those having a so-called equal range. Further, the components disclosed in the following embodiments can be appropriately combined without departing from the gist of the present invention.

A measuring device 14 having a runout measuring jig 10a according to the present embodiment will be described with reference to FIG. FIG. 1 is a schematic view showing a schematic configuration of a measuring device. The object to be measured 16 is assumed to be an impeller screw seal portion of a multi-stage pump having a square groove 18, but is not limited thereto. For example, the present invention can be applied even when a rotating body such as a turbine rotor is used as a measurement object. The object 16 to be measured rotates about the rotation shaft 19.

The measuring device 14 includes a fixing instrument 5, a measuring instrument 8, and a runout measuring jig 10a. The fixing instrument 5 is, for example, a stand having a magnet base or a dial gauge stand having a vacuum base, and fixes the measuring instrument 8. The fixing device 5 is fixed to a member that does not move with respect to a base or the like that supports the measurement object 16. Specifically, it is fixed to a member (base, casing) on the fixed side that supports the rotating measurement object 16.

The measuring instrument 8 is fixed to the fixing instrument 5 and connected to the runout measuring jig 10a. The measuring instrument 8 is, for example, a dial gauge. The measuring instrument may be another instrument or device that measures distance or displacement. The measuring instrument 8 supports the connected runout measuring jig 10a in a movable state with respect to the fixing instrument 5. The measuring instrument 8 detects the movement of the runout measuring jig 10a.

Next, the runout measuring jig 10a according to the first embodiment of the present invention will be described with reference to FIGS. 2 to 5 in addition to FIG. The runout measuring jig 10a comes into contact with the measurement object 16 and moves as a whole according to the shape of the measurement object 16 at the contact position. That is, the runout measuring jig 10a is a jig capable of keeping the distance between the connection position with the measuring instrument 8 and the contact position with the measuring object 16 constant. The runout measuring jig 10a includes a rod 22a, a probe 24a, a screw 30, and a liner 40.

The rod 22a is a rod-shaped member, and has a connecting portion 20a and a rod tip 23a. The connecting portion 20a is formed at one end of the rod 22a and connects to the measuring instrument 8. The connecting portion 20a is, for example, a male screw, and is fastened to the female screw portion formed on the measuring instrument 8. The method of connecting the measuring instrument 8 and the rod 22a is not limited to fastening with screws. For example, it may be connected by a clamp or a bolt and nut. The rod tip 23a is formed at an end opposite to the connecting portion 20a. The rod tip 23a is a sphere having a diameter larger than that of the rod-shaped portion of the rod 22a. The rod tip 23a is spherical except for the connection portion with the rod-shaped portion of the rod 22a. The rod tip 23a is a sphere larger than a hemisphere. It is preferable that the center point of the sphere of the rod tip 23a is on an extension of the central axis of the rod-shaped portion of the rod 22a.

The probe 24a is arranged so as to face the rod tip 23a of the rod 22a. The probe 24a has a substantially rectangular parallelepiped shape, and has a probe contact surface (probe contact surface) 25a, a chamfered portion 27a, a screw hole 28, and a recess 31. The probe contact surface 25a is the surface farthest from the rod 22a and is a surface that intersects the extension line of the shaft of the rod-shaped member of the rod 22a. The probe contact surface 25a is a flat surface. The probe contact surface 25a is a surface in contact with the object to be measured 16.

The chamfered portion 27a is formed on the outer edge of the probe contact surface 25a. That is, the chamfered portion 27a is formed by chamfering the corner portion where the probe contact surface 25a and the surface intersecting the probe contact surface 25a are in contact with each other. Although the chamfered portion 27a is shown in FIGS. 2 and 3 in a shape having a straight cross section, the chamfered portion 27a may have a curved cross section.

The recess 31 is formed on the surface of the probe 24a on the side of the spherical rod tip 23a. The recess 31 is recessed with respect to the surface of the probe 24a on the side of the spherical rod tip 23a, and the rod tip 23a is inserted. The recess 31 has a curved surface portion 32 and a straight line portion 33. The curved surface portion 32 has a substantially hemispherical shape having a size equal to or larger than the outer diameter of the rod tip 23a. The straight portion 33 is a portion extending in the vertical direction with respect to the probe contact surface 25a from the end portion of the curved surface portion 32. The rod tip 23a is inserted into the recess 31 in a movable state, and comes into contact with the rod tip 23a during measurement.

The screw hole 28 is formed on the surface of the probe 24a on which the recess 31 is formed, that is, the surface on the side where the rod 22a is inserted. A fixing jig (screw) for fixing the liner 40 is screwed into the screw hole 28.

The liner 40 is provided around the recess 31 of the probe 24a, as shown in FIGS. 2 and 5. The liner 40 is a retaining component that prevents the rod tip 23a inserted into the recess 31 from coming out of the recess 31. The liner 40 has a shape in which a perforated disk is divided into upper and lower parts. The liner 40 has a hole having a diameter smaller than the outer diameter of the rod tip 23a, and the surface on which the recess 31 of the probe 24a is formed when the rod tip 23a is abutted at the deepest position of the recess 31. It is larger than the diameter of the upper rod tip 23a. The liner 40 has a hole 42 formed at a position corresponding to the screw hole 28. The shape of the liner 40 is not limited to the shape of the perforated disk divided into upper and lower parts. For example, there is no problem even if the shape is divided into four in the vertical and horizontal directions, or the ring-shaped plate is used as it is as the liner 40 without being divided.

The screw 30 is inserted into the hole 42 and screwed into the screw hole 28 to fix the liner 40 to the probe 24a.

The runout measuring jig 10a has the above configuration. Each part of the runout measuring jig 10a is manufactured, and the rod tip 23a of the rod 22a is inserted into the recess 31. Next, the liner 40 is arranged in a state where the curved surface portion 32 and the rod tip 23a are in contact with each other, and the liner 40 is fixed to the probe 24a with a screw 30. As a result, the probe 24a cannot be pulled out with respect to the rod 22a, and the probe 24a can be moved with respect to the rod 22a.

Next, a measurement operation (measurement method) using the measurement device 14 having the runout measurement jig 10a will be described. As shown in FIGS. 1 and 2, the probe contact surface 25a is brought into contact with the surface of the measurement object 16. Further, the runout measuring jig 10a is fixed to the measuring instrument 8. Further, the measuring instrument 8 is fixed to the fixing instrument 5. The order of fixing the runout measuring jig 10a, the measuring instrument 8 and the fixing instrument 5 is not particularly limited, and the measuring instrument 8 is fixed to the fixing instrument 5 and the runout measuring jig 10a is fixed to the measuring instrument 8. , The runout measuring jig 10a may be brought into contact with the measurement object 16. The runout measuring jig 10a is in a state where the curved surface portion 32 and the rod tip 23a are in contact with each other. Specifically, the position of each part is fixed in a state where the displacement is measured by the measuring instrument 8. By setting the displacement to be measured by the measuring instrument 8, the probe contact surface 25a and the object to be measured 16 come into contact with each other, the curved surface portion 32 and the rod tip 23a come into contact with each other, and the end of the runout measuring jig 10a. When the distance from the portion to the end becomes constant and the surface of the object to be measured 16 is displaced, the displacement reaches the measuring instrument 8, and the surface of the object 16 to be measured can be displaced by the measuring instrument 8.

After the installation of the measuring device 14 is completed, the measuring object 16 is rotated, the measuring object 16 at the position where it comes into contact with the touch measuring jig 10a is moved, and the measuring instrument 8 is located at the position where it comes into contact with the touch measuring jig 10a. Measure the displacement. As a result, the misalignment of the object 16 to be measured can be measured.

The runout measuring jig 10a of the present embodiment is in a state in which the rod tip 23a is sandwiched between the probe 24a and the liner 40, and the probe 24a is rotatably supported by the rod tip 23a. .. As a result, the probe 24a can be rotated with respect to the rod 22a. Further, since the rod tip 23a and the recess 31 are spherical, even if the probe contact surface 25a of the probe 24a is tilted with respect to the axis of the rod 22a, the probe contact surface 25a and the spherical center of the rod tip 23a are held. The total of the tied distance and the distance between the spherical center of the rod tip 23a and the connecting portion 20a of the rod 22a can be made constant. Further, by making the probe contact surface 25a a flat surface, it is possible to make surface contact with the measurement object 16.

From the above, in the runout measurement jig 10a, even if the measurement object 16 has irregularities in the direction parallel to the rotation axis, the probe contact surface 25a has the same direction parallel to the rotation axis of the measurement object 16. The state of contact with the position can be maintained. That is, as shown in FIG. 2, even if the measurement object 16 has a shape in which a square groove 18 extending in the circumferential direction is formed, it is possible to prevent a part of the probe 24a from entering the square groove 18. can. Further, even if the object to be measured is misaligned and the object to be measured is shaken, it can be prevented from falling into the square groove 18 by being in surface contact. Further, since the probe 24a can rotate with respect to the rod 22a, it can be easily brought into surface contact with the object to be measured. Further, by making the rod tip 23a spherical and the concave portion 31 the curved surface portion 32, the probe contact surface 25a can be moved in various directions around the spherical center of the rod tip 23a.

Since the probe 24a is movable with respect to the rod 22a and the probe contact surface 25a of the probe 24a is a flat surface, the runout measuring jig 10a measures while changing the angle of the probe contact surface 25a. It can follow and adhere to the object, and can be brought into surface contact with the object to be measured. As a result, it is possible to efficiently measure the misalignment of the measurement target with high accuracy by a simple operation even for the measurement target having irregularities or runouts on the surface of the measurement target.

Further, by providing a straight portion 33 in the recess 31 and using the liner 40 so that the rod tip 23a does not come off from the probe 24a, a gap is formed between the rod tip 23a and the liner 40, and the probe 24a is formed. Can be easily rotated with respect to the rod 22a. As a result, even when the measurement object 16 having irregularities such as the square groove 18 is measured, the movement in the state where the probe contact surface 25a and the measurement object 16 are in contact with each other becomes smooth, and the measurement becomes easy.

Further, in the probe 24a, it is preferable that the probe contact surface 25a and the chamfered portion 27a are made of a material having a hardness higher than that of the object 16 to be measured. As a method of making a material having a hardness higher than that of the object 16 to be measured, there are a method of processing the base material of the probe 24a to increase the hardness and a supplementary method of installing a material having a hardness higher than that of the base material. be. Here, the treatment for increasing the hardness is, for example, a hard chrome plating treatment. By using the probe contact surface 25a and the chamfered portion 27a as materials having a hardness higher than that of the object 16 to be measured, the coefficient of friction between the probe contact surface 25a and the object 16 to be measured becomes small, and the measurement becomes easy. .. Further, this makes it possible to suppress the wear of the probe contact surface 25a and improve the durability of the runout measuring jig 10a.

Further, the thickness of the thinnest portion sandwiched between the probe contact surface 25a and the recess 31 is preferably 1000 μm or less and 50 μm or more.

The runout measuring jig 10a preferably has a concave portion 31 and a smoothed surface of the rod tip 23a. As a result, the slidability of the probe 24a and the rod tip 23a is improved, and the probe 24a is more easily rotated with respect to the rod tip 23a. Here, the smoothing process is, for example, a lapping process or a polishing process.

Next, the runout measuring jig 10b according to the second embodiment of the present invention will be described with reference to FIG. FIG. 6 is an enlarged front view showing the runout measuring jig of the second embodiment. The runout measuring jig 10b of the second embodiment can be applied to the measuring device 14 in place of the runout measuring jig 10a of the first embodiment described above.

The runout measuring jig 10b shown in FIG. 6 has a rod 22b and a probe 24b. The rod 22b has a connecting portion 20b formed on the measuring instrument 8 side and a rod tip 23b formed on the probe 24b side. A male screw is formed in the connecting portion 20b, and the connecting portion 20b is fastened to the female screw portion formed in the measuring instrument 8. A rotary shaft hole 50 is opened in the rod tip 23b and the probe 24b described later. The method of connecting the measuring instrument 8 and the rod 22b is not limited to fastening with screws. For example, it may be connected by a clamp or a bolt and nut. The probe 24b has a probe contact surface 25b, a chamfered portion 27b, and a rotary shaft hole 50. The chamfered portion 27b is a portion where the end portion of the probe contact surface 25b is chamfered. The rotary shaft hole 50 is an opening made in the probe 24b and the rod tip 23b. The probe 24b and the rotary shaft hole 50 of the rod tip 23b are rotatably connected in one direction via a rotary shaft (not shown).

In the runout measuring jig 10b, the probe 24b is rotatably supported in one direction about the rotation axis with respect to the rod tip 23b. In this way, even if the probe 24b is rotatable with respect to the rod tip 23b in only one direction, it is easier to bring the probe 24b into surface contact with the measurement object 16 than when the probe 24b is fixed to the rod tip 23b. can do. Thereby, workability can be improved.

5 Fixing instrument 8 Measuring instrument 10a, 10b Runout measuring jig 14 Measuring device 16 Measuring object 18 Square groove 19 Rotating shaft 20a, 20b Connection 22a, 22b Rod 23a, 23b Rod tip 24a, 24b Explorer 25a, 25b Contact surface 27a, 27b Chamfered part 28 Thread hole 30 Thread 31 Recessed part 32 Curved part 33 Straight part 40 Liner 42 hole 50 Rotating shaft hole

Claims (5)

A runout measurement jig that is supported by a measuring instrument and comes into contact with the object to be measured.
A rod whose one end is connected to the measuring instrument,
It has a probe that is rotatably supported by the other end of the rod and comes into contact with the object to be measured.
The probe has a probe contact surface having a flat portion in contact with the object to be measured.
The rod has a spherical shape having one end on the probe side having a diameter larger than that of the rod-shaped portion of the rod.
The probe is provided with a hemispherical recess substantially identical to one end of the sphere of the rod, the recess is in contact with the sphere of the rod and is rotatable along the surface of the sphere.
The recess includes a hemispherical curved surface having a diameter larger than the outer diameter of the rod.
The rod has an opening with a diameter smaller than the spherical diameter and further has a liner fixed to the end face on which the recess of the probe is formed.
In the probe, when the probe contact surface comes into contact with the measurement object, the curved surface portion comes into contact with the spherical shape of the rod.
The liner is a runout measuring jig characterized by having a plate-like structure divided into a plurality of parts. The rod has a smoothed contact surface with the probe.
The runout measuring jig according to claim 1, wherein the probe is a surface whose contact surface with the rod is smoothed. The runout measuring jig according to claim 1 or 2, wherein the probe is provided with a chamfer around the probe contact surface. The runout measuring jig according to any one of claims 1 to 3, wherein the probe is made of a material having a hardness higher than that of the object to be measured. The runout measuring jig according to any one of claims 1 to 4, and the runout measuring jig.
A measuring instrument that supports the runout measuring jig and detects the displacement of the runout measuring jig, and a fixing instrument that fixes the measuring instrument.
A measuring device characterized by having.

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