JP6900658B2 - Imaging device, image projection device and stage device - Google Patents

Description

The present invention relates to an image pickup device, an image projection device, and a stage device capable of movement control with 6 degrees of freedom.

Conventionally, in a single-lens reflex camera, in order to perform camera shake correction, an image is taken using a drive means using a bale-shaped planar drive coil and a permanent magnet as an in-body camera shake correction device that drives an image sensor in the camera body. Image stabilization that drives the element in the X direction (X-axis direction) and Y direction (Y-axis direction) orthogonal to the optical axis, and further drives the image sensor in the Z direction (Z-axis direction), which is the optical axis direction, by a piezoelectric actuator. The device is known (Patent Document 1). Patent Document 2 discloses an image pickup device that adjusts the focus by moving the image pickup device forward and backward in the optical axis direction. In Patent Document 3, the image pickup element is movably supported in the X direction, the Y direction, and the Z direction by coil springs stretched in the X direction, the Y direction, and the Z direction, and the image pickup element is rotated in the X direction (X axis) and Y. An imaging device including a vibration reducing device that is driven to rotate (tilt) in a direction (Y-axis) and a Z-direction is disclosed. Patent Document 4 discloses an image pickup device that enables tilt photography by rotating an image pickup device in the X direction and the Y direction.

In recent years, the so-called five axes that rotate (tilt) the image pickup element in the X direction, rotate in the Y direction (tilt), move in the X direction, move in the Y direction, and rotate (tilt) in the Z direction (optical axis). Cameras equipped with an image stabilizer are known.

Japanese Unexamined Patent Publication No. 2012-226205 JP-A-59-11071 Japanese Unexamined Patent Publication No. 08-265612 Japanese Unexamined Patent Publication No. 2008-35308

However, in these conventional image pickup devices, when driving the image pickup element, the movable stage supporting the image pickup element is in contact with some support base (base member), and the generation of sliding (movement) resistance can be avoided. There wasn't. In addition, since sliding resistance is generated, the degree of freedom for moving the image sensor is limited.

The present invention has been made based on the above awareness of the problem, and is an imaging device capable of increasing the degree of freedom of movement of the movable member without generating sliding resistance when driving the movable member. The purpose is to obtain an image projection device and a stage device.

The imaging device of the present invention has a movable member to which an imaging element on which a subject image is projected by an imaging optical system is fixed, a base member that holds the movable member so as to be relatively movable, and a plurality of directions acting on the movable member. The thrust generating means includes a thrust generating means for generating the thrust of the above, and the thrust generating means holds the movable member in a floating state with respect to the base member by the interaction of the thrusts in the plurality of directions, and in this floating state, Due to the interaction of thrust in one direction or thrust in multiple directions, the movable member is relative to the base member, and the first and first directions are different from each other, including the first direction parallel to the optical axis of the photographing optical system. To generate a thrust that translates in the second and third directions and a thrust that tilts in the first, second and third directions, the second and third directions are orthogonal to the first direction. and it is a direction orthogonal to each other, the upper Symbol thrust generating means, said a first thrust generating means for generating a thrust in the first direction, the second thrust generating means for generating the thrust of the second direction And a third thrust generating means for generating thrust in the third direction, and at least one of the second and third thrust generating means is separated in the third direction or the second direction. The movable member is moved in the second direction or by the interaction of a pair of thrusts in a second direction or a third direction generated by one of the second or third pair of thrust generating means. The translation and tilting in the first direction in the third direction, and the other of the second and third thrust generating means are composed of a pair arranged at symmetrical positions with the optical axis in between, and the first. 2. The movable member is translated in the second direction or the third direction by the interaction of the pair of thrusts in the second direction or the pair of thrusts in the third direction generated by the third pair of thrust generating means. It is characterized by letting it.

The other of the second and third thrust generating means is composed of a pair separated in the second direction or the third direction, and the other of the second and third thrust generating means is generated. The movable member may be translated in a second direction or a third direction by the interaction of a pair of thrusts in a direction or a pair of thrusts in a third direction.

A plurality of the first thrust generating means are arranged at different positions about the optical axis, and the movable member is first generated by the interaction of a plurality of thrusts generated by the thrust generating means in the first direction. It can be translated in one direction, tilted in a second direction, and tilted in a third direction.

At least one thrust generating means for generating thrust in the first direction is arranged between the second or third pair of thrust generating means.

It is preferable that the center of gravity of the first thrust generating means coincides with the center of gravity of the movable member.

When viewed from the optical axis direction, the first thrust generating means has a line connecting any two of them parallel to the second or third direction, and a line connecting the two. It is preferable that the perpendicular line drawn from the other one to the line connecting the two is arranged so as to be parallel to the third direction or the second direction.

The thrust generating means can include a driving coil fixed to one of the base member and the movable member, and a permanent magnet fixed to the other.

The thrust generating means can hold the movable member in a floating state with respect to the front and rear fixed yokes by the interaction of thrusts in the plurality of directions.

The second thrust generating means and the third thrust generating means have permanent magnets fixed to the front and rear fixed yokes, and the permanent magnets fixed to the front and rear fixed yokes have different magnetic poles facing each other. Is preferable.

The first thrust generating means has a permanent magnet fixed to the front and rear fixed yokes and a driving coil fixed to a movable member, and the permanent magnets fixed to the front and rear fixed yokes have the same magnetic pole. It is preferable that they face each other.

The first thrust generating means is a piezoelectric element provided at a plurality of positions between the movable member and the image pickup element, which expands and contracts in the first direction in which the image pickup element comes into contact with and separates from the movable member. Can include.

Based on the detection results of the plurality of position detecting means for detecting the relative position of the movable member with respect to the base member at a plurality of different positions of the movable member and the detection results of the plurality of position detecting means, the movable member has a second position with respect to the base member. The translational position in the first, second and third directions and the calculation means for calculating the tilt position in the first, second and third directions are further provided , and the position detection means is the first drive. A magnetic sensor is provided in the air core region of the drive coil, the air core region of the second drive coil, and the air core region of the third drive coil, and the calculation means detects each of the magnetic sensors. By the signal, it is possible to calculate the translation position of the movable member in the first, second and third directions with respect to the base member and the tilt position in the first, second and third directions.

The position detecting means includes magnetic sensors provided in the air core region of the first drive coil, the air core region of the second drive coil, and the air core region of the third drive coil. The calculation means uses the detection signals of the magnetic sensors to translate the movable members in the first, second and third directions with respect to the base member, and to rotate the movable members in the first, second and third directions. The tilt position can be calculated.

The plurality of position detecting means include a plurality of sets of light emitting elements and light receiving elements provided on either one of the movable member and the fixed yoke, and the calculation means emits light from the light emitting means and the fixed yoke or the movable member. The translation position of the movable member in the first, second, and third directions with respect to the base member and the rotation of the first, second, and third directions by the detection signal of the light receiving element that receives the detection light reflected by the above. The tilt position of can be calculated.

The present invention embodiments of the stage apparatus is provided with relatively movable movable member relative to the base member, a thrust generating means for generating a plurality of directions of thrust acting on the movable member, the thrust The generating means is based on the interaction between the thrust that holds the movable member in a floating state with respect to the base member by the interaction of the thrusts in the plurality of directions and the thrust in one direction or the thrusts in the plurality of directions in the floating state. A thrust that translates the movable member into different first, second, and third directions, including a first direction parallel to the optical axis of the photographing optical system, relative to the base member, and the above. The movable member generates a thrust that tilts in the first, second, and third directions, and the movable member acts on the base member by the interaction of the thrust in one direction or the thrust in a plurality of directions of the thrust generating means. It is characterized in that it can be translated, tilted, or translated and tilted relatively in the ascended state.

It is practical that the movable member is held in a non-contact state with respect to the base member by the interaction of thrusts in a plurality of directions of the thrust generating means.

The thrust generating means includes first, second, and third thrust generating means that cause thrusts in different first, second, and third directions to act on the movable member, and the first to third thrust generating means. Due to the interaction of thrusts in the first to third directions generated by the thrust generating means 3, the movable member translates in the first to third directions relative to the base member in a floating state. It can be tilted in the first to third directions, translated during tilting, and translated after tilting.

The movable member is held in a non-contact state with respect to the base member by the interaction of thrusts in a plurality of directions of the thrust generating means.

In the stage device of the present invention, based on the detection results of the plurality of position detecting means for detecting the relative positions of the movable member with respect to the base member at a plurality of different positions of the movable member, and the detection results of the plurality of position detecting means. Further, the movable member may further include a relative position in the first, second, and third directions with respect to the base member, and a calculation means for calculating the tilt position in the first, second, and third directions. it can.

A driven member can be mounted on the movable member.

The driven member can be an image forming element or a projection optical system that forms a projected image by receiving light from a light source.

The image forming element is a liquid crystal panel that transmits a light beam emitted from the light source toward the projection optical system, and the first direction is set parallel to the optical axis of the projection optical system.

The image forming element is a DMD panel that reflects light flux emitted from a direction different from the first direction toward the projection optical system, and the first direction is the optical axis of the projection optical system. Set in parallel.

The stage device of the present invention according to another aspect includes a base member, a movable member that is relatively movable with respect to the base member, and a thrust generating means that generates thrust in a plurality of directions acting on the movable member. The thrust generating means includes a thrust that holds the movable member in a floating state with respect to the base member by the interaction of the thrusts in the plurality of directions, and a thrust in one direction or a plurality of the movable members in the floating state. Due to the interaction of the thrusts in the directions, the movable member is relatively different from the base member, and the first and second directions are different from each other, including the first direction parallel to the direction in which the movable member and the base member are separated / approached. To generate a thrust that translates in the second and third directions and a thrust that tilts in the first, second, and third directions, and the movable member is a one-way thrust or a plurality of the thrust generating means. It is possible to translate, tilt, or translate and tilt relative to the base member in a floating state by the interaction of directional thrusts, and the thrust generating means are different from each other with respect to the movable member. The first, second, and third thrust generating means for acting the thrusts in the second and third directions are provided, and the thrusts in the first to third directions generated by the first to third thrust generating means are provided. The movable member translates in the first to third directions, tilts in the first to third directions, and translates during tilting, relative to the base member in a floating state. It is characterized in that it can be translated after tilting.

The image pickup apparatus of the present invention can translate and tilt the image pickup element in different first, second, and third directions including the first direction parallel to the optical axis of the photographing optical system, and thus can tilt in each direction. It is possible to correct camera shake in all directions and take special shots.
Since the image projection device of the present invention can move the image forming element in all directions with 6 degrees of freedom, various adjustments such as projection direction adjustment, image tilt, and rotation adjustment are easy.
Since the stage device of the present invention can translate and tilt a movable member in all directions of 6 degrees of freedom, translate during tilting, translate after tilting, and tilt after translation, an image projection device such as a camera or an image projection of a projector or the like can be performed. It is useful not only for devices but also for various optical devices such as laser scanners and electronic devices.

It is a block diagram which shows the main component of the digital camera which carries the image pickup apparatus equipped with the stage apparatus of this invention. FIG. 2A is a rear view showing a first embodiment of an imaging device provided with a stage device having 6 degrees of freedom of the present invention, the right half is a view showing excluding the rear yoke and the movable stage, and FIG. 2B is a view. It is sectional drawing along the IIB-IIB cutting line of 2A. It is a rear view which shows the movable stage in the 1st Embodiment. FIG. 2 is an enlarged cross-sectional view showing an X drive unit on one side (left side) of FIG. 2B. FIG. 2 is an enlarged cross-sectional view taken along the VV cutting line of FIG. 2A. FIG. 6A is a rear view showing a second embodiment of the stage apparatus, the right half is a view showing excluding the rear yoke and the movable stage, and FIG. 6B is a cross-sectional view taken along the VIB-VIB cutting line of FIG. 6A. is there. FIG. 6B is an enlarged cross-sectional view showing an X-direction drive unit on one side (left side) of FIG. 6B. It is an enlarged cross-sectional view along the VIII-VIII cutting line of FIG. 6A. FIG. 9 is a front view showing a third embodiment of the stage device. FIG. 5 is an enlarged cross-sectional view taken along the XX cutting line of FIG. FIG. 11A is a rear view showing a fourth embodiment of the stage apparatus, the left half is a view showing the rear yoke and a part of the movable stage, and FIG. 11B is along the XIB-XIB cutting line of FIG. 11A. It is a cross-sectional view. 12A and 12B are cross-sectional views showing an example of different operation modes of the Z-direction drive unit in the fourth embodiment cut at the same cutting position as in FIG. 11B. It is a rear view which shows another embodiment of the stage apparatus of this invention. FIG. 5 is an enlarged cross-sectional view showing one X-direction drive unit of still another embodiment of the stage device of the present invention. It is an enlarged cross-sectional view which shows the Z direction drive part of the same other embodiment. It is sectional drawing corresponding to FIG. 2B which shows the embodiment of the aspect of the image projection apparatus of this invention. It is sectional drawing corresponding to FIG. 2B which shows the embodiment which applied this invention to the camera shake correction apparatus of a photographing lens.

Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1 to 15. FIG. 1 is a conceptual diagram showing the main components and main circuit elements of a digital camera equipped with an image pickup device equipped with the stage device of the present invention in blocks. In the figure, in the present embodiment, one direction (one direction) parallel to the optical axis O of the photographing optical system is the first direction (Z direction, Z axis direction), and one direction orthogonal to the first direction. (One direction) is the second direction (X direction, X axis direction), and one direction (one direction) orthogonal to both the first direction and the second direction is the third direction (Y direction, Y axis). Direction). For example, assuming that the X-axis, Y-axis, and Z-axis are the coordinate axes of a three-dimensional Cartesian coordinate system, when the optical axis O is the Z-axis, the axes in two directions orthogonal to the Z-axis and orthogonal to each other are the X-axis. And Y-axis. When the camera is in the normal position (horizontal position), the first direction (Z direction, Z axis, optical axis O) and the second direction (X direction, X axis) are horizontal and the third direction (Y). The direction (Y-axis) shall be vertical, and the subject direction shall be front and front. Further, in the present specification, tilting or rotating in the first direction means tilting or rotating around a virtual axis parallel to the first direction. Similarly, tilting or rotating in the second direction means tilting or rotating around a virtual axis parallel to the second direction, and tilting or rotating in the third direction means tilting or rotating in the third direction. It means tilting or rotating around a virtual axis parallel to the direction of.

The digital camera 10 includes a camera body 11 and a photographing lens 101 as a photographing optical system. The camera body 11 includes a body CPU 20 that controls, calculates, and drives the functions of the entire camera, and an image pickup block 30 having an image pickup element 31 that captures a subject image projected by the photographing lens 101. The body CPU 20 drives and controls the image sensor 31, processes the captured image signal in the image processing unit 32, displays the captured subject image on the image display unit (monitor) 33, and stores the image data of the captured subject image in a memory. Write to card 34.

The digital camera 10 includes a contrast detection unit 35 that detects the contrast of a subject from an image signal processed by the image processing unit 32, a camera operation unit 21 that has a switch for the photographer to operate all the functions of the camera, and a photographing lens 101. The AF unit 22, the aperture, the shutter, etc., which adjust the focus by driving the focus adjustment optical system (not shown) in the optical axis direction, are opened and closed to adjust the amount of incident light on the image pickup element 31 and drive the image pickup element 31. It is provided with an exposure control unit 23 that controls imaging and a lens communication unit 24 that communicates with the photographing lens 101 and inputs the focal distance of the photographing lens 101 and the like.

The digital camera 10 has roll (tilt (rotation) in the Z direction) detection unit GSα, pitch (tilt (rotation) in the X direction) detection unit GSβ, as detection means for detecting camera shake (vibration) of the camera body 11. Yaw (tilt (rotation) in the Y direction) detection unit GSγ, X direction acceleration detection unit GSX, Y direction acceleration detection unit GSY, and Z direction acceleration detection unit GSZ are provided, and these are connected to the camera shake detection circuit 44. .. Each of these detection means is formed by, for example, a 6-axis sensor, or a 3-axis gyro sensor and a 3-axis acceleration sensor.

The image pickup block 30 includes an image pickup element 31 and a stage device 60 that supports the image pickup element 31. The stage device 60 includes a movable stage 61 on which the image sensor 31 is mounted, a front fixed yoke 62 and a rear fixed yoke 63 located in front of and behind the movable stage 61, and at least when energized, the movable stage 61 is mounted on the front and rear fixed yokes. With respect to 62 and 63, it is possible to levitate (float against gravity and hold it in a stationary state (floating stationary state)). The image sensor 31 constitutes a thin driven member having a flat front surface. The stage device 60 translates the floating movable stage 61 in the Z direction (first direction), in the X direction (second direction) orthogonal to the Z direction, and in the Y direction orthogonal to both the Z direction and the X direction. (Third direction) Translation, tilt (rotation) around the X direction (second direction), tilt (rotation) around the Y direction (third direction), and tilt around the Z direction (first direction). (Rotation) (movement of 6 degrees of freedom, movement of 6 axes) is possible. The Z direction (first direction) is a direction in which the movable stage 61 is separated from and approaches the front and rear fixed yokes 62 and 63. Further, the movable stage 61 of the stage device 60 is capable of moving by combining a plurality of translations and tilts of these six degrees of freedom, translation during tilting, translation after tilting, and tilting after translation (see FIGS. 2 to 5). ). "Translation" means moving straight ahead without changing the orientation and tilt of the image plane (imaging plane of the image sensor 31) with respect to the camera body, and "tilt" means the orientation or tilt of the image plane with respect to the camera body. It is a movement that changes the inclination, and includes rotating the image plane in the Z direction (the optical axis O or the virtual axis parallel to the optical axis O). “Floating” means holding the movable stage 61 between the front fixed yoke 62 and the rear fixed yoke 63 in a non-contact manner, and the movable stage 61 is held at the center position where the center of the imaging surface of the image sensor 31 intersects the optical axis O ( This is a concept including a case where the front fixed yoke 62 and the rear fixed yoke 63 are held in non-contact at the initial position of imaging).

The body CPU 20 inputs focal distance f information from the photographing lens 101 via, for example, the lens communication unit 24, and pitch (tilt (rotation) in the X direction) detection unit GSβ, yaw (tilt (rotation) in the Y direction). ) Digital camera 10 based on the detection signals of the detection unit GSγ, the roll (tilt (rotation) in the Z direction) detection unit GSα, the X direction acceleration detection unit GSX, the Y direction acceleration detection unit GSY, and the Z direction acceleration detection unit GSZ. The blurring direction, blurring speed, etc. are calculated, and the driving direction, driving speed, driving amount, etc. of the imaging element 31 are calculated so that the subject image projected on the imaging element 31 does not move relative to the imaging element 31. Based on the calculation result, the stage device 60 is translated, tilted, translated during tilting, translated after tilting, and tilted after translation. The order of these operations does not matter.

The stage device 60 functions as a support member for holding the movable stage 61 to which the image sensor 31 is fixed with respect to the front fixed yoke 62 and the rear fixed yoke 63 in translation, tilting, translation during tilting, and translational freedom after tilting. To do. The movable stage 61 is a rectangular plate (frame) -shaped member larger than the image sensor 31 when viewed from the front. The front fixed yoke 62 and the rear fixed yoke 63 are composed of rectangular plate (frame) -shaped members having the same shape whose outer shape is slightly larger than that of the movable stage 61 in a plan view, and are respectively in the central portion in a front view (viewed from the Z direction). ), Rectangular openings 62a and 63a larger than the outer shape of the image sensor 31 are formed. The front fixed yoke 62 and the rear fixed yoke 63 are connected by a plurality of connecting columns (not shown) at positions where the movable stage 61 does not interfere with each other even if the movable stage 61 moves (translates, tilts, rotates) within a predetermined range, and is parallel and at a predetermined interval. It is being held.

The rear surface of the front fixed yoke 62 (the surface opposite to the subject side) is located at least on the left and right (X direction) of the opening 62a with the Y axis as the center line and on both sides of the left and right sides in the illustrated embodiment. In the embodiment, an X-direction magnet MX composed of a pair of left and right permanent magnets having the same specifications is fixed. Each of these left and right X-direction magnets MX is composed of a pair of plate-shaped magnets that are long in the Y direction and thin in the Z direction, and each pair of magnets is arranged parallel to the Y axis and separated in the X direction. There is. As for the pair of left and right X-direction magnets MX, one (left side) magnet in FIG. 2B has an S pole on the front surface (the surface on the front fixed yoke 62 side) and an N pole on the rear surface, and the other (right side) magnet is the front surface. Is the north pole and the rear surface is the south pole. Then, the front fixing yoke 62 and the rear fixing yoke 63 pass the magnetic fluxes of the left and right X direction magnets MX, so that the X direction (second) is between the left and right X direction magnets MX and the facing portion of the rear fixing yoke 63. It constitutes a part of a magnetic circuit (thrust generating means, thrust controlling means) that generates a thrust in a direction (direction) (see FIG. 4). The X-direction magnet MX serves as a levitation means for holding the movable stage 61 in the central position (initial position) regardless of the posture of the camera body 11, for example, even in vertical position shooting in which the grip of the camera body 11 is held up or down. It works (functions).

A pair of Y-direction magnets MYA consisting of a pair of permanent magnets of the same specifications and a pair of magnets of the same specifications are located on the rear surface of the front fixing yoke 62 below the opening 62a with the Y-axis as the center line and away from the Z-axis. The Y-direction magnet MYB is fixed. The left and right Y-direction magnets MYA and MYB are each composed of a pair of plate-shaped magnets that are long in the X direction and thin in the Z direction, and each pair of magnets is arranged parallel to the X-axis and separated in the Y-direction. ing. In both the pair of Y-direction magnets MYA and the pair of Y-direction magnets MYB, the upper magnet in FIG. 2A has an S pole on one front and rear surface (front surface) and an N pole on the other surface (rear surface), and the lower side. One surface (front surface) of the magnet on the side is the north pole, and the other surface (rear surface) is the south pole. Then, the front fixing yoke 62 and the rear fixing yoke 63 pass the magnetic fluxes of the Y direction magnet MYA and the Y direction magnet MYB, so that between the Y direction magnet MYA and the Y direction magnet MYB and the rear fixing yoke 63. , Consists of a part of a magnetic circuit (thrust generating means, thrust controlling means) that generates a thrust in the Y direction (third direction). The Y-direction magnet MYA and the Y-direction magnet MYB act as levitation means for holding the movable stage 61 in the central position (initial position), particularly in lateral position (normal position) shooting, regardless of the posture of the camera body 11. Function.

Further, on the rear surface of the front fixing yoke 62, Z-direction magnets MZA, MZB, and MZC made of permanent magnets having the same specifications are fixed at three places different from the X-direction magnets MX and the Y-direction magnets MYA and MYB. (See FIGS. 2A and 5). The Z-direction magnets MZA, MZB, and MZC have a rectangular plate shape in front view, and the front surface (fixed yoke 62 contact surface) has an S pole and the rear surface has an N pole. The three Z-direction magnets MZA, MZB, and MZC are arranged at substantially equal intervals in a plane orthogonal to the Z axis with the Z axis as the center. The front fixing yoke 62 and the rear fixing yoke 63 pass the magnetic fluxes of the Z direction magnets MZA, MZB and MZC, so that the Z direction magnets MZA, MZB, MZC and the rear fixing yoke 63 are separated from each other in the Z direction (first). It constitutes a part of a plurality of magnetic circuits (thrust generating means, thrust controlling means) that generate thrust in the direction of).

The movable stage 61 located between the front fixing yoke 62 and the rear fixing yoke 63 is a non-magnetic member integrally molded from a non-magnetic material by press molding. A front-view rectangular image sensor mounting hole 61a is bored in the central portion of the movable stage 61, and the image sensor 31 is fitted and fixed in the image sensor mounting hole 61a. The image sensor 31 projects forward from the image sensor mounting hole 61a in the optical axis O direction of the movable stage 61.

The image sensor 31 is arranged so that the long side is parallel to the X direction and the short side is parallel to the Y direction when the movable stage 61 is located at the initial position (initial position where the magnetic levitation is performed). And. When the movable stage 61 is in the initial position, the center of the image pickup surface of the image pickup element 31 is located on the optical axis O of the photographing lens 101, and the optical axes O and the Z axis coincide with each other. The Z direction (first direction), the X direction (second direction), and the Y direction (third direction) are relative to the camera body 11 and the photographing lens 101 whose Z direction coincides with or is parallel to the optical axis O. Although the direction will be described below as a constant direction, the direction may be constant with respect to the image pickup element 31.

A pair of X drive coils (X drive units) CX are fixed to the movable stage 61 so as to be located on the outer sides of both left and right sides (short sides) of the image sensor 31, and one side (short side) below the image sensor 31 is fixed. A pair of Y drive coil (YA drive unit) CYA and Y drive coil (YB drive unit) CYB are fixed to each other at a position below the long side (long side) and separated from each other to the left and right. The pair of X drive coils CX are vertically long in the Y direction, and are arranged at symmetrical positions (equal distances) across the Y axis so that the longitudinal direction is parallel to the Y direction, and overlaps with the X axis. The pair of Y drive coils CYA and CYB are horizontally long in the X direction and are arranged at symmetrical positions (equal distance from the Y axis) with the Y axis in between so that the longitudinal direction is parallel to the X direction. ing. This arrangement facilitates manufacturing, adjustment and control.

A circular Z drive coil (ZA drive unit) CZA is further fixed to the movable stage 61 so as to be located between the pair of Y drive coils CYA and CYB (intermediate position), and the pair of X drive coils CX A pair of circular Z drive coils (ZB drive unit) CZB and Z drive coil (ZC drive unit) CZC are fixed so as to be positioned above. The Z drive coil CZA is arranged on the Y axis, and the Z drive coils CZB and CZC are arranged symmetrically with respect to the Y axis (equidistant distance from the Y axis). The center of gravity of the Z drive coils CZA, CZB, and CZC (the center of gravity of the whole) substantially coincides with the center of gravity of the movable stage 61. Two of the Z drive coils CZA, CZB and CZC, in the illustrated embodiment, the line connecting the Z drive coils CZB and CZC and the perpendicular line drawn from the other one to the above line are parallel to the Y axis. (Or coincide with the Y axis). The arrangement of the Z drive coils CZA, CZB, and CZC is arbitrary, but the line connecting any two of them becomes parallel to the X-axis or the Y-axis, and the other one is lowered to the line connecting the two. It is preferable to arrange the vertical line so as to be parallel to the Y-axis or the X-axis. This arrangement facilitates manufacturing, adjustment and control.

In the pair of X drive coils CX and the pair of Y drive coils CYA, CYB and the three Z drive coils CZA, CZB, CZC, the coil wires are spirally wound a plurality of times in the XY plane, and the movable stage 61 It is a planar (thin) coil that is laminated a plurality of times in the plate thickness direction (Z direction) and is parallel to the optical axis orthogonal plane (XY plane).

The pair of X drive coils CX are arranged so that their longitudinal portions are parallel to the Y axis and face the corresponding X direction magnet MX, and the pair of Y drive coils CYA and CYB have their longitudinal portions parallel to the X axis. Each of the corresponding magnets is arranged so as to face the pair of Y-direction magnets MYA and MYB.

The above X drive coil (X drive unit) CX, Y drive coil (YA drive unit) CYA and Y drive coil (YB drive unit) CYB, Z drive coil (ZA drive unit) CZA, Z drive coil The (ZB drive unit) CZB and the Z drive coil (ZC drive unit) CZC are connected to the actuator drive circuit 42 and are energized and controlled via the actuator drive circuit 42.

The X drive coil CX and the pair of X direction magnets MX form a second thrust generation means (thrust control means) that generates thrust in the X direction (second direction). The movable stage 61 can be translated in the X direction by the thrust in the X direction generated by the current control flowing through the X drive coil CX.

One Y-driving coil CYA and a pair of Y-direction magnets MYA, and the other Y-driving coil CYB and a pair of Y-direction magnets MYB are a pair of thirds that generate thrust in the Y direction (third direction). It constitutes the thrust generating means (thrust controlling means) of 3. The movable stage 61 is translated in the Y direction and tilted (rotated) in the Z direction by the interaction of a pair of thrusts in the Y direction separated in the X direction generated by controlling the current flowing through the Y drive coil CYA and CYB. be able to.

The three Z drive coils CZA, CZB, CZC and the three Z direction magnets MZA, MZB, and MZC have three first thrust generating means (three first thrust generating means) that generate thrust in the Z direction (first direction). Thrust control means). The three Z drive coils CZA, CZB, and CZC and the three Z direction magnets MZA, MZB, and MZC, which are separated from each other in the XY plane, are controlled by the current flowing through the three Z drive coils CZA, CZB, and CZC. By the interaction of the three Z-direction thrusts generated, the movable stage 61 is levitated with respect to the front and rear fixed yokes 62 and 63 (three Z-direction magnets MZA, MZB, MZC), and in the levitated state, Z It can be translated in the direction, tilted in the X direction, and tilted in the Y direction.

Further, the movable stage 61 is levitated (neutral) to the initial position (center position) by the interaction of the thrusts in the X and Y directions generated by the current control of the X drive coil CX and the Y drive coil CYA and CYB. can do.

The movable stage 61 includes a Hall element (X position detection unit) HX for the X direction located in the air core region of the X drive coil CX, and a Y direction Hall element (X position detection unit) HX located in the air core region of the Y drive coils CYA and CYB, respectively. Hall element (Y position detection unit) HYA, Y direction Hall element (YB position detection unit) HYB, and Z direction Hall element (ZA position) located in the air core region of each Z drive coil CZA, CZB, CZC. Detection unit) HZA, Z-direction Hall element (ZB position detection unit) HZB, Z-direction Hall element (ZC position detection unit) HZC are fixed. Hall element for X direction (X position detection unit) HX, Hall element for Y direction (YA position detection unit) HYA and Hall element for Y direction (YB position detection unit) HYB, Hall element for Z direction (ZA position detection unit) The HZA, Z-direction Hall element (ZB position detection unit) HZB, and the Z-direction Hall element (ZC position detection unit) HZC are connected to the position detection circuit 43.

The X-direction Hall element HX constitutes a position detecting means for detecting the magnetic force (magnetic flux of the X-direction magnetic circuit) of the corresponding X-direction magnet MX. Then, the position detection circuit 43 detects the position of the movable stage 61 in the X direction by a predetermined calculation from the detection signal of the Hall element HX for the X direction. The translation position in the X direction can be detected by the detection signal of the Hall element HX for the X direction.

The Y-direction Hall element HYA constitutes a position detecting means for detecting the magnetic force (magnetic flux of the Y-direction magnetic circuit) of the corresponding Y-direction magnet MYA, and the Y-direction Hall element HYB is a Y-direction magnet MYB. It constitutes a position detecting means for detecting a magnetic force (magnetic flux of a Y-direction magnetic circuit). Then, the position detection circuit 43 detects the Y direction position and the tilt position around the Z direction by a predetermined calculation using the detection signals of both the Y direction Hall elements HYA and HYB. The translation position in the Y direction and the tilt position in the Z direction can be detected by the detection signals of the Hall elements HYA and HYB for the Y direction.

Each Z-direction Hall element HZA, HZB, HZC constitutes a position detecting means for detecting the magnetic force (magnetic flux of the Z-direction magnetic circuit) of the corresponding Z-direction magnets MZA, MZB, and MZC. Then, the position detection circuit 43 performs a translation position in the Z direction, a tilt position in the X direction, and a tilt position in the Y direction by a predetermined calculation using the detection signals of the Hall elements HZA, HZB, and HZC for each Z direction. Is detected. From the detection signals of the Hall elements HZA, HZB, and HZC for each Z direction, the translation position in the Z direction, the tilt position in the X direction, and the tilt position in the Y direction can be detected.

The position detection circuit 43 uses a plurality of detection signals of the hole elements HX for the X direction, the hole elements HYA, HYB for the Y direction, and the hole elements HZA, HZB, and HZC for the Z direction to generate the movable stage 61 in the Z direction (first direction). ), X direction (second direction) and Y direction (third direction) translation position, Z direction (first direction), X direction (second direction) and Y direction (third direction) It constitutes a calculation means for calculating the tilt position around.

The above X drive coil CX, Y drive coil CYA and CYB, Z drive coil CZA, CZB, CZC, X direction hole element HX, Y direction hole element HYA, HYB, and Z direction hole element. HZA, HZB, and HZC are mounted on a flexible printed circuit FPC (not shown), and an actuator drive circuit 42, a position detection circuit 43, and the like built in the camera body 11 via a flexible printed circuit FPC extending from the movable stage 61. It is electrically connected to each circuit of (see FIG. 1).

The pair of X drive coils CX, the pair of Y drive coils CYA and CYB, and the three Z drive coils CZA, CZB and CZC are energized and controlled by the actuator drive circuit 42. The actuator drive circuit 42 is controlled by the body CPU 20 via the vibration isolation control circuit 41.

The position detection circuit 43 is the X-direction position and the Y-direction position of the movable stage 61 based on the detection signals output by the X-direction Hall elements HX, the Y-direction Hall elements HYA, HYB, and the Z-direction Hall elements HZA, HZB, and HZC. , Z direction position, tilt position around X direction (tilt (rotation) angle around X direction, pitch angle), tilt position around Y direction (tilt (rotation) angle around Y direction, yaw angle), and Z direction The rotation tilt position (tilt (rotation) angle around the Z direction, roll angle) is detected.

The above digital camera 10 can perform the following operations when performing a shooting operation. First, under the control of the body CPU 20, the movable stage 61 is moved forward by energizing a pair of X drive coils CX, a pair of Y drive coils CYA, CYB, and three Z drive coils CZA, CZB, and CZC. It is held (floated) in an initial position that is not in contact with other members such as the fixed yoke 62 and the rear fixed yoke 63.

After that, the digital camera 10 can perform the following drive control based on each position calculated by the body CPU 20 (position detection circuit 43) with the movable stage 61 levitated.

The movable stage 61 is held at a predetermined position in the optical axis direction by the interaction of three equivalent thrusts in the Z direction generated by equally energizing and controlling the Z drive coils CZA, CZB, and CZC, and translated in the Z direction. The movable stage 61 is tilted (rotated) in the X direction and tilted in the Y direction (rotation) due to the interaction of three different thrusts in the Z direction generated by individually energizing and controlling the Z drive coils CZA, CZB, and CZC. It can be rotated) and held in a tilted state.

The movable stage 61 can be held at a predetermined position in the X direction and translated in the X direction by the thrust in the X direction generated by controlling the energization of each X drive coil CX.

The movable stage 61 is held at a fixed position in the Y direction by the interaction of two equivalent thrusts in the Y direction generated by equally energizing and controlling the Y drive coils CYA and CYB, translated in the Y direction, and driven in Y. The movable stage 61 is tilted (rotated) in the Z direction by the interaction of two different thrusts in the Y direction generated by individually energizing the coils CYA and CYB, and the movable stage 61 is brought into a predetermined tilted (rotated) state. Can be retained.

Further, a plurality of thrusts in the Z direction generated by energization control of the above Z drive coils CZA, CZB, CZC, X drive coils CX, Y drive coils CYA, and CYB, and (plural) thrusts in the X direction. The movable stage 61 is levitated by the interaction of a plurality of thrusts in the Y direction, and in the levitated state, it is translated and tilted in all directions of 6 degrees of freedom (6 axes). Can be tilted.

The digital camera 10 (body CPU 20) operates the camera shake correction (shake reduction) by synchronizing the drive control of the movable stage 61 with the camera shake (vibration) of the camera body 11 detected by the camera shake detection circuit 44. be able to.

[Second Embodiment]
In the first embodiment, the permanent magnet is provided only on the front fixing yoke 62. On the other hand, FIGS. 6 to 8 show a second embodiment in which the permanent magnets are provided on both the front fixing yoke 62 and the rear fixing yoke 63. Members having the same functions as those of the first embodiment are designated by the same reference numerals, and the description thereof will be omitted. X-direction magnets MX, Y-direction magnets MYA, MYB, Z-direction magnets MZA, MZB, and MZC fixed to the front fixing yoke 62 and having the same specifications as the X-direction magnets MX1 and Y-direction magnets MYA1. , MYB1, Z-direction magnets MZA1, MZB1, and MZC1 are fixed to the rear fixing yoke 63. The X-direction magnets MX1, Y-direction magnets MYA1, and MYB1 of the rear-fixing yoke 63 have different magnetic poles from the X-direction magnets MX, Y-direction magnets MYA, and MYB of the front fixed yoke 62 that face each other. (Fig. 6B, Fig. 7). On the other hand, the Z-direction magnets MZA1, MZB1, and MZC1 of the rear fixing yoke 63 are arranged so that the same magnetic poles as the Z-direction magnets MZA, MZB, and MZC of the front fixed yoke 62 facing each other face each other (FIG. 8). X-direction magnet MX1, Y-direction magnets MYA1, MYB1, Z-direction magnets MZA1, MZB1, MZC1, X-direction magnets MX, Y-direction magnets MYA, MYB, and Z-direction magnets MZA, MZB, MZC The spacing between the X-direction magnets MX, the Y-direction magnets MYA, MYB, and the Z-direction magnets MZA, MZB, and MZC of the first embodiment is set to be substantially the same as the spacing between the rear fixing yokes 63.

According to this second embodiment, the X-direction magnets MX, Y-direction magnets MYA, and MYB of the front fixing yoke 62 and the X-direction magnets MX1, Y-direction magnets MYA1, and MYB1 of the rear fixing yoke 63 are movable. Since different magnetic poles face each other across the longitudinal direction portions of the X drive coil CX, Y drive coil CYA, and CYB of the stage 61, it is possible to generate magnetic lines of force substantially perpendicular to the optical axis O (Z axis) direction. Therefore, even if the movable stage 61 moves in the Z direction, the fluctuation of the thrust (driving force) in the X and Y directions is small.

The Z-direction magnets MZA, MZB, and MZC of the front fixed yoke 62 and the Z-direction magnets MZA1, MZB1, and MZC1 of the rear fixed yoke 63 sandwich the annular Z drive coils CZA, CZB, and CZC of the movable stage 61. Since the same magnetic poles face each other, the thrust (driving force) in the Z direction fluctuates even if the Z driving coils CZA, CZB, and CZC (movable stage 61) move in the Z direction as compared with the first embodiment. Is small.

[Third Embodiment]
In the first and second embodiments, the Z-direction position, the X-direction tilting position, and the Y-direction tilting position of the movable stage 61 are detected by the Z-direction Hall elements HZA, HZB, and HZC. 9 and 10 show the photoreflectors PZA, PZB, and PZC instead of the Hall elements HZA, HZB, and HZC as the Z-direction position detecting means, the X-direction tilting position detecting means, and the Y-direction tilting position detecting means. A third embodiment using the above is shown. The same members as those in the first and second embodiments are designated by the same reference numerals, and the description thereof will be omitted.

The photoreflectors PZA, PZB, and PZC include a light emitting element and a light receiving element, and the light emitting element emits light, and the light receiving element receives the detection light reflected in the reflection region 61b of the movable stage 61. , PZB, PZC and the Z-direction distance between the movable stage 61 (reflection region 61b) are detected.

In the third embodiment, the photoreflectors PZA, PZB, and PZC are used to move the movable stage 61 in the Z direction regardless of the X-direction position, the Y-direction position, or the Z-direction tilt position of the movable stage 61 with respect to the front fixed yoke 62. The position can be detected accurately.

[Fourth Embodiment]
In the first, second and third embodiments described above, the image sensor 31 is fixed to the movable stage 61, the movable stage 61 is levitated and supported with respect to the front and rear fixed yokes 62 and 63, and has 6 degrees of freedom. (6-axis drive). On the other hand, in the fourth embodiment shown in FIGS. 11 and 12, the piezoelectric element 71a, which translates the image pickup element 31 in the Z direction, tilts in the X direction, and tilts in the Y direction on the movable stage 61, 71b and 71c are provided. The same members as those in the first to third embodiments are designated by the same reference numerals, and the description thereof will be omitted.

The three piezoelectric elements 71a, 71b, 71c connect the rear surface (back surface) of the image pickup element 31 and the front surface of the movable stage 61 via the telescopic variable members 72a, 72b, 72c. The piezoelectric element 71a is arranged substantially in the center of the lower edge portion of the image pickup element 31 in the X direction, and the piezoelectric elements 71b and 71c are arranged near both left and right ends of the upper edge portion of the image pickup element 31. The three piezoelectric elements 71a, 71b, and 71c are preferably arranged at equal intervals from the optical axis O (Z axis).

The piezoelectric elements 71a, 71b, and 71c are single or laminated piezoelectric elements that expand and contract in the Z direction (generate thrust) according to their strength (height) and polarity when a voltage is applied. The piezoelectric elements 71a, 71b, and 71c are driven and controlled by a piezoelectric element drive circuit (not shown). The stretchable variable members 72a, 72b, 72c are formed of an elastic body such as rubber. The piezoelectric elements 71a, 71b, 71c and the telescopic variable members 72a, 72b, 72c form a first thrust generating means for generating thrust in the first direction.

FIG. 12A shows a case where substantially the same voltage is applied so that the piezoelectric elements 71a, 71b, and 71c extend to substantially the same length. The piezoelectric elements 71a, 71b, and 71c extend substantially the same amount from the initial state of FIG. 11B to separate (translate) the image pickup element 31 from the movable stage 61. When the voltage applied to the piezoelectric elements 71a, 71b, 71c is inverted, the piezoelectric elements 71a, 71b, 71c contract and the image sensor 31 translates in the direction approaching the movable stage 61.

When the polarity and voltage of the voltage applied to each of the piezoelectric elements 71a, 71b, and 71c are adjusted independently, thrust in the Z direction is generated by expansion and contraction in the Z direction, and the image pickup element 31 is moved to the movable stage 61 by the interaction of the three thrusts. It translates in the Z direction, tilts in the X direction, or tilts in the Y direction. FIG. 12B shows a state in which the piezoelectric element 71c and the piezoelectric element 71a are contracted, the piezoelectric element 71b is extended, and the image pickup element 31 is tilted in the Y direction with respect to the movable stage 61. As the piezoelectric elements 71a, 71b, and 71c expand and contract differently, the expansion and contraction variable members 72a, 72b, and 72c that connect the piezoelectric elements 71a, 71b, and 71c to the image sensor 31 expand and contract, allowing the image sensor 31 to tilt. ing.

As the mechanism for ascending the movable stage 61 and tilting it in the Z direction and translating it in the X direction and the Y direction in the floating state, the same mechanism as in the first to third embodiments can be used.

In the above embodiment, the movable stage 61 has three Z directions (first) at intermediate positions between the pair of Y drive coils CYA and CYB constituting the two Y direction (third) thrust generating means. Since the Z drive coil (ZA drive unit) CZA, which is one of the thrust generating means, is arranged, the thrust generating means can be compactly configured in a narrow area.

In the present embodiment, the centers of gravity of the Z drive coils (ZA, ZB, ZC drive units) CZA, CZB, and CZC constituting a plurality (three) thrust generating means in the Z direction are substantially one with the center of gravity of the movable stage 61. Therefore, the thrust (driving force) of the thrust generating means in each Z direction can be made equal, and the thrust can be set small.

There are two Z drive coils (ZA, ZB, ZC drive units) CZA, CZB, and CZC that form a plurality of thrust generating means in the Z direction. In this embodiment, a line connecting the Z drive coils CZB and CZC. Is parallel to the X-axis or Y-axis, and the perpendicular line drawn from the other one to the line connecting these two is arranged so as to be parallel to the Y-axis. The detection axis by the sensor and the control axis can be matched, and the configuration of the control system can be simplified. For example, the tilt in the Y direction can be controlled by the difference between the ZC drive unit and the ZB drive unit, and the tilt in the X direction can be controlled by the ZA drive unit.

In the above embodiment, a pair of X drive coils CX having the same specifications are provided on the left and right sides of the image sensor 31 of the movable stage 61, and a pair of X-direction magnets MX having the same specifications are fixed yokes in front and behind. Although the openings 62a and 63a of 62 and 63 are provided on both the left and right sides, the X drive coil CX and the X direction magnet MX or MX1 may be provided on only one of the left and right sides. FIG. 13 shows an embodiment (fifth embodiment) in which the X drive coil CX and the X direction magnet MX are provided on one of the left and right sides. FIG. 13 is a rear view of the movable stage 61. The same members and members having the same functions as those in the embodiments of FIGS. 2 to 12 are designated by the same reference numerals, and the description thereof will be omitted.

A pair of X drive coils CXA and CXB having the same specifications are separated from each other in the Y direction at the vertical position of the X axis so that the longitudinal direction is parallel to the Y axis orthogonal to the optical axis O on the right side of the image sensor 31. It is arranged. A Hall element HX for the X direction is arranged in the air core region of the upper X drive coil CXA. Although not shown, a pair of magnets for the X direction having the same specifications are arranged on the front fixed yoke and the rear fixed yoke at the opposite portions of the X drive coils CXA and CXB, and a magnetic circuit for the X direction (thrust generation). Means). In this embodiment, by controlling the same energization of the X driving coils CXA and CXB, two thrusts in the X direction are generated, and the interaction of these thrusts generates the thrust (driving force) in the X direction. , The movable stage 61 can be translated in the X direction.

Further, only one X drive coil CX may be used. In that case, it is preferable that the X drive coil CX is arranged at a position overlapping the X axis when viewed in the Z direction.

In the above embodiment, the driving coil is provided on the movable stage (movable member), and the permanent magnet is provided on the fixed yoke (fixed base member). In the stage device of the present invention, a driving coil may be provided on a fixed yoke (fixed base member), and a permanent magnet may be provided on a movable stage (movable member).

14 and 15 are the sixth embodiments in which the driving coil is provided on the fixed yoke (fixed base member) and the permanent magnet is provided on the movable stage (movable member), and are shown in FIGS. 7 and 8. The cross-sectional view cut at the same position as the above-described embodiment is shown. The same members and members having the same functions as those of the embodiments shown in FIGS. 1 to 13 are designated by the same reference numerals, and the description thereof will be omitted.

The X drive coil CXA1'and the Z drive coil CZA1' are fixed to the front fixed yoke 62, and the X drive coil CXA1'and the Z drive coil CZA1' are opposed to the rear fixed yoke 63. The coil CXA'and the Z drive coil CZA' are fixed. On the movable stage 61, the X-direction magnet MX'is fixed between the X-drive coils CXA1'and CXA', and the Z-direction magnet MZA'is fixed between the Z-drive coils CZA1' and CZA'. ing. At least one of the front and rear fixed yokes 62 and 63, in the illustrated embodiment, the Hall element HX'for the X direction is fixed to the air core region of the X drive coil CXA1'of the rear fixed yoke 63, and the Z of the front fixed yoke 62. The Hall element HZA'for the Z direction is fixed in the air core region of the drive coil CZA'. Although not shown, each pair of Y drive coils are fixed to the front and rear fixed yokes 62 and 63 so as to face each other, and Y is placed in one air core region of one Y drive coil facing in the front-rear direction. A directional Hall element is fixed, and a Y-direction magnet is fixed between the opposing Y-driving coils on the movable stage 61.

By controlling the energization of the X drive coil CXA1', CXA', the Z drive coil CZA1', CZA'and the Y drive coil (not shown), the movable stage 61 floats, translates and tilts in the floating state. Then, it tilts while translating, and after further tilting, it translates in the tilted state.

In the sixth embodiment, all the driving coils and Hall elements are fixed to the front and rear fixing yokes 62 and 63, which are the fixed base members, and the driving magnets are fixed to the movable stage 61, which is the movable member. Since the number of FPCs drawn from the movable stage 61 is reduced and the load on the movable stage 61 by the FPC is reduced, the responsiveness of the movable stage 61 is improved and the movable stage 61 can be driven with high accuracy. The embodiment in which the driving coil and the Hall element are fixed to the front and rear fixing yokes 62 and 63 and the driving magnet is fixed to the movable stage 61 can be applied to all the embodiments.

In the above embodiments, the first direction is the Z direction (Z axis) parallel to the optical axis O, and the second and third directions are the X direction (X axis) orthogonal to the Z direction (Z axis). Although the Y direction (Y axis) is used, in the present invention, the first direction does not have to be parallel to the optical axis O, and the first, second, and third directions do not have to be orthogonal to each other. It can be in any direction. The thrust generating means (thrust controlling means) may generate thrust in only one direction.

In the above first to fourth embodiments, Hall elements are provided in the air core regions of the left and right X drive coils CX as the X direction position detecting means, respectively, but the present invention describes the X drive coil CX of one of them. It may be provided only in the air core region. Further, although the Hall element is provided in the air core region of the drive coil, it may be provided outside the drive coil, and the Hall element detects the magnetic force of the drive magnet, but the magnetic force is separate from the drive magnet. A permanent magnet for detection may be provided to detect the magnetic force of the magnet for magnetic force detection. Other magnetic sensors may be used instead of the Hall element.

In the digital camera 10 equipped with the stage device 60 of the present embodiment, as an automatic focus adjustment function, the subject contrast detection unit 35 drives the focus adjustment optical system of the photographing lens 101 in the optical axis direction by the AF unit 22. It has an automatic focus adjustment function of the contrast detection method that detects and adjusts the focus by detecting the in-focus state where the contrast peaks. In the digital camera 10 of the present invention, in addition to camera shake correction, the stage device 60 also wobbles the image sensor 31 by slightly advancing and retreating (translating) in the optical axis direction to finely adjust the focus in the automatic focus adjustment operation. It is also possible to detect the peak of the contrast. Further, the digital camera 10 of the present invention can easily perform special shooting such as tilting shooting in which the image sensor 31 is tilted by the stage device 60, and composition adjustment for tilting, panning, and rolling.

The present invention can be applied to various optical devices such as so-called mirrorless digital cameras, single-lens digital cameras, compact digital cameras, digital video cameras, interchangeable lens barrels, and camera-integrated lenses.
The present invention can also be applied to a projector, a laser scanner, or the like that projects images, data, or the like, in addition to an imaging device. In the case of a projector, projected light is incident on the substantially center of the movable stage 61 of the stage device from one side (rear) of the thickness direction (first direction, Z direction) of the movable stage 61, and the other side (rear). The first projection light beam incident on the image forming element (liquid crystal panel) emitted toward the projection optical system (front) or substantially the center of the movable stage 61 from a direction different from the first direction (Z direction). A DMD (Digital Mirror Device, Digital Micromirror Device) panel that reflects in the direction of (projection optical system direction) can be mounted. The movable stage 61 may be equipped with a projection optical system instead of the image forming element.

FIG. 16 shows an outline of an embodiment of an image projection device (projector) including a stage device 60 having a movable stage 61. This embodiment includes a light source 81, an illumination optical system 82 that homogenizes the light emitted from the light source 81, an image forming element 83 that forms an image by receiving illumination light emitted from the illumination optical system 82, and the image. It includes a movable stage 61 in which the forming element 83 is fixed in the opening 61c, and a projection optical system 84 that projects an image formed by the image forming element 83. The image forming element 83 is specifically a liquid crystal panel or a DMD panel. The image forming element 83 is provided in the housing of the projector or the projection optical system 84 via the movable stage 61, and the image forming element 83 is in a state where the movable stage 61 is not driven (held in the initial position). The plane on which the image is formed is arranged in the projector so as to be perpendicular to the optical axis O of the projection optical system 84 or the optical axis of any lens in the projection optical system 84. .. The image forming element 83 is caused by translating the movable stage 61 in the optical axis O direction (first direction), the second or third direction, or tilting the movable stage 61 in the first, second or third direction. The projection direction and position can be adjusted or projected by changing the direction of the projected light beam transmitted through the (liquid crystal panel) toward the projection optical system 84 or the direction of the projected light reflected by the DMD panel and directed toward the projection optical system 84. The tilt of the image can be adjusted, and the distance between the liquid crystal panel or DMD panel and the projection optical system can be adjusted to adjust the focus.

The present invention can also be applied to a lens barrel (Japanese Patent Laid-Open No. 2015-4769, etc.) provided with a correction optical system that drives one of the optical elements of the photographing optical system as a correction optical element. For example, in the photographing lens 101, one or a plurality of optical elements constituting the photographing optical system can be used as an adaptive optics element (driven member). In this embodiment, the lens between the first lens group 91 and the second lens group 93 is a driven member (correction optical element) 92 (FIG. 17). In the case of this embodiment, the correction optical element 92 is mounted in the opening 61c formed at substantially the center of the movable stage 61. According to this embodiment, the movable stage (correction optical element 92) 61 is translated in the optical axis O direction (first direction), the second or third direction, or the first, second or third direction. By tilting it around, special shooting such as image stabilization and tilt shooting is possible. Further, in this embodiment, the focusing can be finely adjusted by slightly translating the movable stage (correction optical element 92) 61 in the optical axis O direction (first direction).

Further, the digital camera 10 of the present invention can also perform a camera shake correction operation or a special shooting operation by cooperating the camera shake correction device mounted on the photographing lens and the camera shake correction device on the camera body 11 side.

10 Digital camera 11 Camera body 20 Body CPU (calculation means, position detection means, thrust control means)
21 Camera operation unit 22 AF unit 23 Exposure control unit 24 Lens communication unit 30 Image sensor 31 Image sensor (driven member)
32 Image processing unit 33 Image display unit (monitor)
34 Memory card 35 Contrast detection unit 41 Anti-vibration control circuit 42 Actuator drive circuit 43 Position detection circuit 44 Camera shake detection circuit 60 Stage device 61 Movable stage (movable member)
61a Image sensor mounting hole 61b Reflection region 62 Front fixed yoke (base member)
62a Opening 63 Rear fixed yoke (base member)
63a Aperture 71a 71b 71c Piezoelectric element (thrust generating means, first thrust generating means, thrust controlling means)
72a 72b 72c Telescopic variable member 101 Shooting lens CX CXA CXB CXA'CXA1' X Drive coil (drive coil, thrust generation means, second thrust generation means, thrust control means)
CYA CYBY drive coil (drive coil, thrust generating means, third thrust generating means, thrust controlling means)
CZA CZB CZC CZA'CZA1' Z drive coil (drive coil, thrust generating means, first thrust generating means, thrust controlling means)
HX HX'X direction Hall element (position detection means)
Hall element for HYA HYBY direction (position detecting means)
HZA HZB HZC HZA'Z direction Hall element (position detecting means)
MX MX1 X direction magnet (thrust generating means, second thrust generating means)
MYA MYB MYA1 MYB1 Y direction magnet (thrust generating means, third thrust generating means)
MZA, MZB, MZC MZA1, MZB1, MZC1 MZA'Z direction magnet (thrust generating means, first thrust generating means)
PZA PZB PZC photo reflector (position detection means)

Claims (20)

A movable member to which the image sensor on which the subject image is projected by the photographing optical system is fixed,
A base member for holding the movable member so as to be relatively movable, and a thrust generating means for generating thrust in a plurality of directions acting on the movable member are provided.
The thrust generating means has a thrust that holds the movable member in a floating state with respect to the base member by the interaction of thrusts in a plurality of directions, and a thrust in one direction or a thrust in a plurality of directions in the floating state. By action, a thrust that translates the movable member relative to the base member in different first, second, and third directions, including a first direction parallel to the optical axis of the imaging optical system. , To generate thrust that tilts in the first, second and third directions,
The second and third directions are orthogonal to the first direction and orthogonal to each other.
The thrust generating means uses the first thrust generating means for generating the thrust in the first direction, the second thrust generating means for generating the thrust in the second direction, and the thrust in the third direction. To provide a third thrust generating means to be generated,
At least one of the second and third thrust generating means is composed of at least a pair separated in the third direction or the second direction, and one of the second or third pair of thrust generating means is generated. By the interaction of a pair of thrusts in the second or third direction, the movable member is translated in the second or third direction and tilted in the first direction, and the second, The other of the third thrust generating means is composed of a pair arranged symmetrically with respect to the optical axis, and the pair of thrusts in the second direction in which the second and third pair of thrust generating means are generated or The interaction of a pair of thrusts in a third direction causes the movable member to translate in a second or third direction.
An imaging device characterized by. In the imaging device according to claim 1,
The other of the second and third thrust generating means is composed of a pair separated in the second direction or the third direction, and the other of the second and third thrust generating means is generated. An imaging device that translates the movable member in a second direction or a third direction by the interaction of a pair of thrusts in a direction or a pair of thrusts in a third direction. In the imaging device according to claim 1 or 2,
A plurality of the first thrust generating means are arranged at different positions about the optical axis, and the first thrust generating means can be moved by the interaction of the plurality of thrusts generated in the first direction. An imaging device that translates a member in a first direction, tilts it in a second direction, and tilts it in a third direction. In the imaging device according to claim 3,
The thrust generating means for generating the thrust in the first direction is an imaging device in which at least one is arranged between the second or third pair of thrust generating means. In the imaging device according to claim 3 or 4,
The center of gravity of the first thrust generating means coincides with the center of gravity of the movable member. In the imaging apparatus according to any one of claims 3 to 5,
When viewed from the optical axis direction, the first thrust generating means has a line connecting any two of them parallel to the second or third direction, and a line connecting the two. An imaging device in which a perpendicular line drawn from the other one to a line connecting the two is arranged so as to be parallel to the third direction or the second direction. In the imaging device according to any one of claims 1 to 6,
The base member includes a front fixing yoke and a rear fixing yoke facing the movable member from the front and the rear in the first direction, respectively.
Each of the above thrust generating means includes a driving coil and a permanent magnet.
The driving coil is fixed to the movable member or at least one of the front fixing yoke and the rear fixing yoke, and the permanent magnet is fixed to at least one of the front fixing yoke and the rear fixing yoke or the movable member. Imaging device. In the imaging device according to claim 7,
Each thrust generating means is an imaging device that holds the movable member in a floating state with respect to the front and rear fixed yokes by the interaction of thrusts in the plurality of directions. In the imaging device according to claim 7 or 8.
The second thrust generating means and the third thrust generating means have permanent magnets fixed to the front and rear fixed yokes, and the permanent magnets fixed to the front and rear fixed yokes have different magnetic poles facing each other. Imaging device. In the imaging device according to any one of claims 7 to 9.
The first thrust generating means has a permanent magnet fixed to the front and rear fixed yokes and a driving coil fixed to a movable member, and the permanent magnets fixed to the front and rear fixed yokes have the same magnetic pole. Opposing imaging devices. In the imaging device according to any one of claims 7 to 9.
The first thrust generating means is a piezoelectric element provided at a plurality of positions between the movable member and the image pickup element, which expands and contracts in the first direction in which the image pickup element comes into contact with and separates from the movable member. Image sensor including. In the imaging device according to any one of claims 7 to 11.
Based on the plurality of position detecting means for detecting the relative position of the movable member with respect to the base member at a plurality of different positions of the movable member and the detection results of the plurality of position detecting means, the movable member has a second position with respect to the base member. Further provided with translational positions in the first, second and third directions and calculation means for calculating tilt positions in the first, second and third directions.
The position detecting means obtains the air core region of the drive coil that generates the thrust in the first direction, the air core region of the drive coil that generates the thrust in the second direction, and the thrust in the third direction. A magnetic sensor provided in the air-core region of the driving coil to be generated is provided, and the calculation means uses the detection signals of the respective magnetic sensors to make the first, second and third directions of the movable member with respect to the base member. An imaging device that calculates the translational position of the above and the tilting position in the first, second, and third directions. The imaging apparatus according to claim 1 wherein,
The plurality of position detecting means include a plurality of sets of light emitting elements and light receiving elements provided on either one of the movable member and the fixed yoke, and the calculation means emits light from the light emitting means and the fixed yoke or the movable member. The translation position of the movable member in the first, second, and third directions with respect to the base member and the rotation of the first, second, and third directions by the detection signal of the light receiving element that receives the detection light reflected by the above. An image pickup device that calculates the tilt position of. With the base member
A movable member that can move relative to the base member,
A thrust generating means for generating thrust in a plurality of directions acting on the movable member is provided.
The thrust generating means has a thrust that holds the movable member in a floating state with respect to the base member by the interaction of thrusts in a plurality of directions, and a thrust in one direction or a thrust in a plurality of directions in the floating state. By action, the movable member is relative to the base member, and the movable member and the base member are different from each other, including the first direction parallel to the direction in which the movable member and the base member are separated / approached. To generate a thrust that translates in a direction and a thrust that tilts in the first, second, and third directions.
The movable member can be translated, tilted, or translated and tilted relative to the base member in a floating state by the interaction of thrusts in one direction or thrusts in a plurality of directions of the thrust generating means. The thrust generating means includes first, second, and third thrust generating means that exert different thrusts in the first, second, and third directions on the movable member, and the first to third thrust generating means. Due to the interaction of thrusts in the first to third directions generated by the thrust generating means 3, the movable member translates in the first to third directions relative to the base member in a floating state. A stage device characterized in that it tilts in the first to third directions, translates during tilt, and can be translated after tilting. In the stage apparatus according to claim 14,
The movable member is a stage device that is held in a non-contact state with respect to the base member by the interaction of thrusts in a plurality of directions of the thrust generating means. In the stage apparatus according to claim 14 or 15.
Based on the detection results of the plurality of position detecting means for detecting the relative positions of the movable member with respect to the base member at a plurality of different positions of the movable member and the detection results of the plurality of position detecting means, the movable member has a second position with respect to the base member. A stage device further including a relative position in the first, second and third directions, and a calculation means for calculating a tilt position in the first, second and third directions. In the stage apparatus according to any one of claims 14 to 16.
A stage device in which a driven member is mounted on the movable member. In the stage apparatus according to claim 17.
The driven member is an image forming element or a stage device that is a projection optical system that forms a projected image by receiving light from a light source. In the stage apparatus according to claim 18,
The image forming element is a liquid crystal panel that transmits a light beam emitted from the light source toward the projection optical system, and the first direction is parallel to the optical axis of the projection optical system. In the stage apparatus according to claim 18,
The image forming element is a DMD panel that reflects light flux emitted from a direction different from the first direction toward the projection optical system, and the first direction is the optical axis of the projection optical system. Stage equipment that is parallel.

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