JP6882530B2 - センサ装置 - Google Patents
センサ装置 Download PDFInfo
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- JP6882530B2 JP6882530B2 JP2019564587A JP2019564587A JP6882530B2 JP 6882530 B2 JP6882530 B2 JP 6882530B2 JP 2019564587 A JP2019564587 A JP 2019564587A JP 2019564587 A JP2019564587 A JP 2019564587A JP 6882530 B2 JP6882530 B2 JP 6882530B2
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- 230000000712 assembly Effects 0.000 claims description 17
- 238000000429 assembly Methods 0.000 claims description 17
- 238000005259 measurement Methods 0.000 claims description 7
- 239000000758 substrate Substances 0.000 description 4
- 239000000696 magnetic material Substances 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 2
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
- G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
- G01D5/2451—Incremental encoders
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/145—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the relative movement between the Hall device and magnetic fields
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/142—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices
- G01D5/147—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage using Hall-effect devices influenced by the movement of a third element, the position of Hall device and the source of magnetic field being fixed in respect to each other
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/14—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Transmission And Conversion Of Sensor Element Output (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Description
従来技術からは、冒頭に述べたような形式のセンサ装置が既に公知である。それにより、例えば独国特許発明第19937206号明細書(DE19937206C2)には、それらのN極とS極とが異なる方向に配向され、それによって磁石アセンブリに沿って異なる方向に配向された磁場が生じる、複数の磁石からなる磁石アセンブリを備えたセンサ装置が開示されている。2つの磁場感応型のセンサにより、磁場が検出され、この場合、センサに対する磁石アセンブリの位置を特定することができる総和信号及び/又は差分信号を得るために、センサの出力信号は、相互に関連して設定される。類似のセンサ装置は、独国特許出願公開第102009055104号明細書(DE102009055104A1)及び欧州特許第0997706号明細書(EP0997706B1)からも既に明らかである。
請求項1の特徴を備える本発明に係るセンサ装置は、外部の均一な漂遊磁場に依存することなく、発信器素子の位置が一義的に検出可能であるという利点を有する。本発明に係るセンサ装置の実施形態により、長い測定経路を達成することができ、また、いわゆるクランプ領域での一定の出力信号が可能になる。この目的のために、本発明によれば、発信器素子は、発信器素子の運動方向に沿って異なる方向に配向された磁場を有する第2の磁石アセンブリを有することが想定されている。従って、ここでは、発信器素子の運動方向に沿って異なる方向の磁場配向を有する2つの磁石アセンブリが存在している。この場合、これらの磁石アセンブリは、発信器素子に沿って異なる方向の磁場配向を有することが想定されている。この場合、センサの対応する位置決めによって、シフトの際に、特に運動方向での発信器素子の運動の際に、発信器素子の一義的な位置を推定し得る、2つの磁石アセンブリの磁場変化又は磁場配向の変化を確定することができる。従って、特に差動センサとしての実施形態においては、例えばその位置が監視されるべきアクチュエータのアクチュエータ素子に機械的に接続されている発信器素子の一義的な位置検出が保証されている。
Claims (8)
- 1つの運動方向に変位可能な発信器素子(2)と、前記発信器素子(2)の位置及び/又は運動量を決定するための少なくとも2つのハウジング固定された磁場感応型のセンサ(3)と、前記センサ(3)の出力信号を監視し、これらの出力信号を差分信号に結びつけるために構成された制御機器とを備えたセンサ装置(1)であって、
前記発信器素子(2)は、当該発信器素子(2)の運動方向に沿って異なる方向に配向された磁場を有する第1の磁石アセンブリ(6)を有する、センサ装置(1)において、
前記発信器素子(2)は、当該発信器素子(2)の運動方向に沿って異なる方向に配向された磁場を有する第2の磁石アセンブリ(7)を有し、
前記センサ(3)は、前記磁石アセンブリ(6,7)のうちのそれぞれ1つに割り当てられており、
前記第1の磁石アセンブリ(6)の磁場の配向と前記第2の磁石アセンブリ(7)の磁場の配向とは、前記発信器素子(2)の運動方向に沿って相互に異なっている、
ことを特徴とするセンサ装置(1)。 - 前記磁石アセンブリ(6,7)は、前記発信器素子(2)に配置された磁気線路として形成されている、請求項1に記載のセンサ装置。
- 前記第1の磁石アセンブリ(6)と前記第2の磁石アセンブリ(7)とは、前記発信器素子(2)の同じ側に相互に隣接して配置されている、請求項1又は2に記載のセンサ装置。
- 前記センサ(3)は、前記発信器素子(2)の運動方向で見て、相互に隣接して当該運動方向で相互にずらされて配置されている又は測定方向に対して所定の角度で配置されている、請求項1乃至3のいずれか一項に記載のセンサ装置。
- 前記磁場の配向は、段階的に変化する又は連続的に変化する、請求項1乃至4のいずれか一項に記載のセンサ装置。
- 前記各磁石アセンブリ(6,7)は、複数の磁石要素(6_1〜7_4)から形成されている、請求項1乃至5のいずれか一項に記載のセンサ装置。
- 前記各磁石アセンブリ(6,7)は、異なる方向に磁化された本体から形成されている、請求項1乃至6のいずれか一項に記載のセンサ装置。
- 前記各磁石アセンブリ(6,7)は、磁化された単一の本体から形成されている、請求項1乃至7のいずれか一項に記載のセンサ装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102017202365.1A DE102017202365A1 (de) | 2017-02-15 | 2017-02-15 | Sensoreinrichtung |
DE102017202365.1 | 2017-02-15 | ||
PCT/EP2018/053060 WO2018149712A1 (de) | 2017-02-15 | 2018-02-07 | Sensoreinrichtung |
Publications (2)
Publication Number | Publication Date |
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JP2020506408A JP2020506408A (ja) | 2020-02-27 |
JP6882530B2 true JP6882530B2 (ja) | 2021-06-02 |
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ID=61198839
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2019564587A Active JP6882530B2 (ja) | 2017-02-15 | 2018-02-07 | センサ装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US11085796B2 (ja) |
EP (1) | EP3583388B1 (ja) |
JP (1) | JP6882530B2 (ja) |
CN (1) | CN110291364B (ja) |
DE (1) | DE102017202365A1 (ja) |
WO (1) | WO2018149712A1 (ja) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US10620014B2 (en) * | 2018-05-30 | 2020-04-14 | Rockwell Automation Technologies, Inc. | Encoder system for position determination with varying scale |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2688060B1 (fr) * | 1992-02-28 | 1994-04-15 | Snr Roulements | Structure a aimants pour capteur de deplacement. |
JPH1061664A (ja) * | 1996-08-15 | 1998-03-06 | Nippon Thompson Co Ltd | 直動転がり案内ユニット |
DE19836599A1 (de) * | 1998-08-13 | 2000-02-17 | Windhorst Beteiligungsgesellsc | Verfahren zur berührungslosen magnetischen Erfassung linearer Relativbewegungen zwischen Dauermagneten und elektronischen Sensoren |
DE19849613A1 (de) | 1998-10-28 | 2000-05-04 | Philips Corp Intellectual Pty | Anordnung zur Messung einer relativen linearen Position |
DE19937206C2 (de) | 1999-06-11 | 2003-05-08 | Siemens Ag | Positionsbestimmungseinrichtung sowie Verwendung einer Positionsbestimmungseinrichtung und Verfahren zum Herstellen eines Maßstabes für eine solche Einrichtung |
DE10041095B4 (de) * | 1999-12-06 | 2015-11-12 | Robert Bosch Gmbh | Vorrichtung zur Messung eines Winkels und/oder eines Drehmomentes eines drehbaren Körpers |
AU775247B2 (en) | 1999-12-06 | 2004-07-22 | Robert Bosch Gmbh | Device for measuring the angle and/or the angular velocity of a rotatable body and/or the torque acting upon said body |
TWI258914B (en) * | 2000-12-27 | 2006-07-21 | Koninkl Philips Electronics Nv | Displacement device |
WO2005064302A2 (en) * | 2003-12-30 | 2005-07-14 | Nctengineering Gmbh | Methods and apparatuses for magnetizing an object and for calibrating a sensor device |
EP1910780B1 (de) * | 2005-08-01 | 2009-06-17 | Continental Teves AG & Co. oHG | Anordnung zur raddrehzahlerfassung mit erhöhter eigensicherheit |
WO2007084349A1 (en) * | 2006-01-12 | 2007-07-26 | Timken Us Corporation | Magnetic sensor with high and low resolution tracks |
FR2898189B1 (fr) * | 2006-03-02 | 2008-10-17 | Moving Magnet Tech | Capteur de position a direction d'aimantation variable et procede de realisation |
US7932684B2 (en) * | 2008-03-25 | 2011-04-26 | Bose Corporation | Absolute position sensing |
DE102009055104A1 (de) * | 2009-12-21 | 2011-06-22 | Robert Bosch GmbH, 70469 | Magnetfeldsensoranordnung zur Wegerfassung an beweglichen Bauteilen |
US9062989B2 (en) * | 2010-12-15 | 2015-06-23 | Nxp B.V. | Magnetic field sensor for sensing rotation a reference component about the axis of rotation that is independent of alignment between the axis of rotation and the sensors |
DE102011083948A1 (de) * | 2011-10-04 | 2013-04-04 | Robert Bosch Gmbh | Sensoranordnung |
DE102013000430A1 (de) * | 2013-01-14 | 2014-07-17 | Micronas Gmbh | Messsystem |
DE102014008173B4 (de) * | 2014-06-10 | 2022-08-11 | Tdk-Micronas Gmbh | Magnetfeldmessvorrichtung |
CN108700431A (zh) * | 2015-12-15 | 2018-10-23 | Mts传感器科技股份两合公司 | 位置传感系统 |
-
2017
- 2017-02-15 DE DE102017202365.1A patent/DE102017202365A1/de active Pending
-
2018
- 2018-02-07 CN CN201880011766.6A patent/CN110291364B/zh active Active
- 2018-02-07 JP JP2019564587A patent/JP6882530B2/ja active Active
- 2018-02-07 EP EP18704948.1A patent/EP3583388B1/de active Active
- 2018-02-07 WO PCT/EP2018/053060 patent/WO2018149712A1/de unknown
- 2018-02-07 US US16/482,841 patent/US11085796B2/en active Active
Also Published As
Publication number | Publication date |
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JP2020506408A (ja) | 2020-02-27 |
DE102017202365A1 (de) | 2018-08-16 |
EP3583388A1 (de) | 2019-12-25 |
CN110291364B (zh) | 2022-08-12 |
WO2018149712A1 (de) | 2018-08-23 |
EP3583388B1 (de) | 2023-05-24 |
US11085796B2 (en) | 2021-08-10 |
US20190346290A1 (en) | 2019-11-14 |
CN110291364A (zh) | 2019-09-27 |
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