JP6864375B2 - 光ファイバセンサ - Google Patents
光ファイバセンサ Download PDFInfo
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- JP6864375B2 JP6864375B2 JP2018503308A JP2018503308A JP6864375B2 JP 6864375 B2 JP6864375 B2 JP 6864375B2 JP 2018503308 A JP2018503308 A JP 2018503308A JP 2018503308 A JP2018503308 A JP 2018503308A JP 6864375 B2 JP6864375 B2 JP 6864375B2
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- Prior art keywords
- fbg
- optical fiber
- base member
- bragg wavelength
- fbg portion
- Prior art date
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- 239000000835 fiber Substances 0.000 title claims 2
- 239000013307 optical fiber Substances 0.000 claims description 220
- 230000008859 change Effects 0.000 claims description 69
- 238000001514 detection method Methods 0.000 claims description 6
- 238000005259 measurement Methods 0.000 description 37
- 238000010586 diagram Methods 0.000 description 24
- 238000000034 method Methods 0.000 description 22
- 238000001228 spectrum Methods 0.000 description 17
- 239000000853 adhesive Substances 0.000 description 10
- 230000001070 adhesive effect Effects 0.000 description 10
- 238000009530 blood pressure measurement Methods 0.000 description 8
- 238000009434 installation Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 125000006850 spacer group Chemical group 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 230000006835 compression Effects 0.000 description 3
- 238000007906 compression Methods 0.000 description 3
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- 238000005452 bending Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 230000000737 periodic effect Effects 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
- G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
- G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
- G01D5/353—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre
- G01D5/35306—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement
- G01D5/35309—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer
- G01D5/35316—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells influencing the transmission properties of an optical fibre using an interferometer arrangement using multiple waves interferometer using a Bragg gratings
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/161—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge by interferometric means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/16—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge
- G01B11/18—Measuring arrangements characterised by the use of optical techniques for measuring the deformation in a solid, e.g. optical strain gauge using photoelastic elements
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
- G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
- G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
- G01L11/025—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means using a pressure-sensitive optical fibre
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optical Transform (AREA)
- Measuring Fluid Pressure (AREA)
- Length Measuring Devices By Optical Means (AREA)
Description
3 圧力センサ(光ファイバセンサ)
4、5 歪みセンサ(光ファイバセンサ)
10 光ファイバ
11 FBG部
11a 第1のFBG部
11b 第2のFBG部
20、21、25、26 ベース部材
25a、26a 第1のベース部材
25b、26b 第2のベース部材
30 固定位置
31 第1の固定部材
32 第2の固定部材
33 第3の固定部材
Claims (6)
- 1本の光ファイバと、前記光ファイバを支持するベース部材とを備える光ファイバセンサであって、
前記ベース部材の光ファイバ配置面に設けられた固定位置において、当該固定位置の一方側の前記光ファイバと、当該固定位置の他方側の前記光ファイバとのそれぞれにFBG(Fiber Bragg Grating)部が配置される状態で前記光ファイバを前記ベース部材に固定する第1の固定部材と、
前記固定位置の一方側で、当該一方側の前記光ファイバのFBG部である第1のFBG部に張力が付与された状態で前記光ファイバを前記ベース部材に固定する第2の固定部材と、
前記固定位置の他方側で、当該他方側の前記光ファイバのFBG部である第2のFBG部に前記第1のFBG部における張力とは異なる張力が付与された状態、かつ当該第2のFBG部のブラッグ波長が前記第1のFBG部のブラッグ波長と異なる状態で前記光ファイバを前記ベース部材に固定する第3の固定部材と、
を備える光ファイバセンサ。 - 前記光ファイバは、単一のブラッグ波長を有する1つのFBG部を備え、当該FBG部の一部分が前記第1のFBG部を構成し、他の一部分が前記第2のFBG部を構成する請求項1に記載の光ファイバセンサ。
- 前記光ファイバは、同一のブラッグ波長を有するFBG部を2つ備え、一方のFBG部が前記第1のFBG部を構成し、他方のFBG部が前記第2のFBG部を構成する請求項1に記載の光ファイバセンサ。
- 予め取得された前記第1のFBG部のブラッグ波長の温度依存性と予め取得された前記第2のFBG部のブラッグ波長の温度依存性とに基づいて、いずれか一方のFBG部のブラッグ波長の変化に対する温度補正を行う請求項1から請求項3のいずれか1項に記載の光ファイバセンサ。
- 前記ベース部材が圧力検知用のダイヤフラムを備え、
前記第1のFBG部と前記第2のFBG部との一方が前記ダイヤフラムに当接して配置され、他方がダイヤフラム上とは異なる位置に配置される請求項1から請求項4のいずれか1項に記載の光ファイバセンサ。 - 前記ベース部材が互いに独立して移動可能な第1のベース部材と第2のベース部材とを備え、
前記第1のFBG部と前記第2のFBG部との一方が前記第1のベース部材に配置され、他方のFBG部の少なくとも一部が前記第1のベース部材と前記第2のベース部材との間に配置される請求項1から請求項4のいずれか1項に記載の光ファイバセンサ。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016039481 | 2016-03-01 | ||
JP2016039481 | 2016-03-01 | ||
PCT/JP2017/007582 WO2017150476A1 (ja) | 2016-03-01 | 2017-02-27 | 光ファイバセンサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2017150476A1 JPWO2017150476A1 (ja) | 2018-12-20 |
JP6864375B2 true JP6864375B2 (ja) | 2021-04-28 |
Family
ID=59743917
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018503308A Active JP6864375B2 (ja) | 2016-03-01 | 2017-02-27 | 光ファイバセンサ |
Country Status (4)
Country | Link |
---|---|
US (1) | US10663324B2 (ja) |
EP (1) | EP3425343A4 (ja) |
JP (1) | JP6864375B2 (ja) |
WO (1) | WO2017150476A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP3789737B1 (en) * | 2018-05-04 | 2022-10-12 | Cmiws Co., Ltd. | Open/close detection sensor |
US11506520B2 (en) * | 2019-10-30 | 2022-11-22 | Raytheon Company | Systems and methods for real-time, nondestructive monitoring of energetic materials |
CN114905549B (zh) * | 2022-04-14 | 2024-01-16 | 上海交通大学 | 用于绳驱柔性机器人末端三维力感知方法及系统 |
CN115164729B (zh) * | 2022-06-10 | 2023-05-30 | 澳门大学 | 正负双向测量的、不受振动影响的光纤光栅位移传感器 |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5721802A (en) * | 1996-06-13 | 1998-02-24 | Corning Incorporated | Optical device and fusion seal |
US5892860A (en) * | 1997-01-21 | 1999-04-06 | Cidra Corporation | Multi-parameter fiber optic sensor for use in harsh environments |
DE19808222A1 (de) * | 1998-02-27 | 1999-09-02 | Abb Research Ltd | Faser-Bragg-Gitter Drucksensor mit integrierbarem Faser-Bragg-Gitter Temperatursensor |
JP2000097786A (ja) | 1998-09-25 | 2000-04-07 | Furukawa Electric Co Ltd:The | 力学的力センサ |
JP3736156B2 (ja) | 1998-11-27 | 2006-01-18 | 富士電機システムズ株式会社 | ブラッググレーティング圧力センサ |
JP2000346722A (ja) | 1999-06-07 | 2000-12-15 | Furukawa Electric Co Ltd:The | 力学センサ |
JP2005091151A (ja) * | 2003-09-17 | 2005-04-07 | Hitachi Cable Ltd | Fbgひずみゲージ |
BRPI0501790B1 (pt) * | 2005-05-17 | 2019-02-12 | Petroleo Brasileiro S.A. - Petrobras | Sistemas com transdutor de posição a fibra óptica e de leitura remota e método de calibração da posição |
JP4897445B2 (ja) | 2006-11-28 | 2012-03-14 | 株式会社共和電業 | 光ファイバ式ひずみゲージ |
JP5155702B2 (ja) * | 2008-03-13 | 2013-03-06 | アンリツ株式会社 | 歪計測装置 |
US9476294B2 (en) * | 2010-01-29 | 2016-10-25 | Baker Hughes Incorporated | Device and method for discrete distributed optical fiber pressure sensing |
JP2012202684A (ja) | 2011-03-23 | 2012-10-22 | Toyota Industries Corp | Fbgひずみセンサ |
JP2012225729A (ja) * | 2011-04-19 | 2012-11-15 | Toyota Industries Corp | Fbgひずみセンサ |
-
2017
- 2017-02-27 EP EP17759942.0A patent/EP3425343A4/en active Pending
- 2017-02-27 WO PCT/JP2017/007582 patent/WO2017150476A1/ja active Application Filing
- 2017-02-27 JP JP2018503308A patent/JP6864375B2/ja active Active
- 2017-02-27 US US15/577,613 patent/US10663324B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
JPWO2017150476A1 (ja) | 2018-12-20 |
US20180156641A1 (en) | 2018-06-07 |
EP3425343A1 (en) | 2019-01-09 |
EP3425343A4 (en) | 2019-04-17 |
WO2017150476A1 (ja) | 2017-09-08 |
US10663324B2 (en) | 2020-05-26 |
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