JP6851874B2 - Linear motor drive moving device - Google Patents

Description

The present invention relates to a linear motor drive moving device that moves a moving body with respect to a substrate by a linear motor.

The following Patent Document 1 includes a substrate, a moving body that can move with respect to the base, a guide rail that is fixed to the base and guides the movement of the moving body with respect to the base, and a linear motor as a drive source. Described is a linear motor drive moving device that is configured to move a moving body with respect to a substrate by the linear motor. Such a linear motor drive moving device is used in a device that requires precise work, such as a processing machine as described in Patent Document 1 or a component mounting machine for mounting an electronic component on a substrate. ..

Japanese Unexamined Patent Publication No. 2005-33912

When the linear motor drive moving device as described above is adopted in a device that performs precise work such as a component mounting machine, it is desired to maintain good precision of the precise work. By improving the linear motor drive moving device as described above so that the precision of precise work in the device on which the linear motor drive moving device is mounted can be maintained well, the linear motor drive can be maintained. It is possible to enhance the practicality of the mobile device. The present invention has been made from such a viewpoint, and an object of the present invention is to provide a highly practical linear motor drive moving device.

In order to solve the above problems, the linear motor drive moving device of the present invention includes a base, a moving body that can move with respect to the base, and a guide rail that is fixed to the base and guides the movement of the moving body with respect to the base. , A linear motor as a drive source is included, and it is premised that the moving body is moved with respect to the substrate by the linear motor.
And the first linear motor drive moving device is
The linear motor
And a coil wound around the core and that core, and a mover which is fixed to the movable body,
Each, and a plurality of permanent magnets (A), (B) is fixed to the base body, and a magnet holder for holding extending in the moving direction of the movable element in a state of being arranged a plurality of permanent magnets in the moving direction thereof Yes, and a pair of stators facing each other with a spacing,
Each is provided with a pair of rolling elements that are rotatably held by the mover and roll over the magnet holder when the mover moves.
The mover is configured to be movable between the pair of stators.
Each of the pair of rolling elements
Each of the pair of stators is configured to roll on the opposing surfaces of the magnet holders and
(i) One end side of the magnet holder in the width direction of the plurality of permanent magnets and (ii) The other end side of the magnet holder in the width direction of the magnet holder and the other end side of the plurality of permanent magnets. It is characterized in that it is configured to roll a rolling portion set on one side.
The second linear motor drive moving device is
The linear motor
A mover having a core and a coil wound around the core and fixed to the moving body,
It has (A) a plurality of permanent magnets and (B) a magnet holder that is fixed to the substrate and extends in the moving direction of the mover to hold the plurality of permanent magnets in a state of being arranged in the moving direction. With a stator,
With a rolling element that is rotatably held by the mover and rolls on the magnet holder when the mover moves.
With
The magnet holder of the stator
It is fixed to the substrate at one end in the width direction and is erected, and holds the plurality of permanent magnets on its own side surface.
When the mover moves, the rolling element rolls a rolled portion set on the other end side of the side surface of the magnet holder in the width direction with respect to the other end side of the plurality of permanent magnets. It is characterized in that it is configured as follows .

In the linear motor drive moving device of the present invention, since a rolling element is arranged between the mover and the stator, the magnetic attraction force acting between the mover and the stator is applied by the rolling element. You can receive it. Therefore, in this linear motor drive moving device, the distance between the mover and the stator can be kept constant, and the moving body can be stably moved with respect to the substrate. In addition, since the rolling element receives magnetic attraction, it is not necessary to firmly fix the stator to the substrate, and by reducing the number of members required for fixing the stator, the weight of the device on which the linear motor drive moving device is mounted. Can be reduced. As a result, it is possible to suppress the displacement at the time of resonance by suppressing the decrease in the natural frequency of the device itself on which the linear motor drive moving device is mounted. Therefore, a linear motor drive moving device capable of obtaining such an effect is highly practical.

It is a perspective view of the component mounting machine equipped with the linear motor drive moving device which is an Example of this invention. FIG. 5 is an enlarged perspective view showing a head moving device shown in FIG. 1 including a linear motor drive moving device according to an embodiment of the present invention. It is a front view (partial sectional view) of the Y direction moving device which is a linear motor drive moving device which is an Example of this invention. It is a front view (partial sectional view) of the linear motor drive moving device of a modification.

Hereinafter, an embodiment of the linear motor drive moving device of the present invention will be described in detail with reference to the drawings. In addition to the following examples, the present invention can be carried out in a mode in which various modifications are made based on the knowledge of those skilled in the art.

The linear motor drive moving device according to the embodiment of the present invention is mounted on the component mounting machine 10 shown in FIG. In the work of mounting the components on the board, a plurality of component mounting machines 10 are arranged in order to mount the plurality of types of components on the board. FIG. 1 shows two of the plurality of component mounting machines 10, and one of them shows the component mounting machine 10 with the exterior panel removed. The component mounting machine 10 can be replaced with a base 20, a beam 22 mounted on the base 20, a substrate conveyor device 24 arranged on the base 20, and a base 20 on the front side of the component mounting machine 10. A plurality of mounted component feeders 26, a component mounting head 28 for holding components supplied from any of the plurality of component feeders 26 and mounting the components on the substrate S, and a beam 22 are arranged. It is provided with a head moving device 30 for moving the component mounting head 28. In the following description, the direction in which the substrate is conveyed by the substrate conveyor device 14 is the left-right direction (X direction), the direction perpendicular to the left-right direction on the horizontal plane is the front-rear direction (Y direction), and the left-right directions and the directions. The direction perpendicular to the front-back direction may be referred to as the up-down direction (Z direction).

Each of the plurality of component feeders 26 is set with a reel on which a component holding tape (a plurality of components are held on the tape and is also called "part taping") is wound, and a plurality of components are set. Each of the feeders 26 sequentially supplies the parts one by one at a predetermined part supply portion by intermittently feeding out the parts holding tape.

The component mounting head 28 is a so-called index type mounting head. Each of the component mounting heads 28 has a plurality of suction nozzles 40 that suck and hold the component at the lower end portion by supplying a negative pressure, and these are held by the revolver 42. The revolver 42 rotates intermittently, and the suction nozzle 40 located at a specific position can be raised and lowered by a nozzle raising and lowering device. The suction nozzle 40 located at a specific position holds the parts supplied from the component feeder 26 by supplying negative pressure when lowered, and sucks by cutting off the supply of negative pressure. Mount the held parts on the board. By the way, each of the plurality of suction nozzles 40 can be rotated around its own axis, and the component mounting head 28 changes / adjusts the rotation position of the component held by each suction nozzle 40. It is possible to do.

The head moving device 30 is a so-called XY type moving device. The head moving device 30 is supported by a head mounting body 50 to which a component mounting head 28 is detachably attached, an X direction moving device 52 that moves the head mounting body 50 in the X direction, and a beam 22 in the X direction. It is configured to include a Y-direction moving device 54 that moves the component mounting head 28 across the component feeder 26 and the substrate by moving the moving device 52. The Y-direction moving device 54 is the linear driving moving device of the present embodiment, and the Y-axis slide 62 holding the X-direction moving device 52 is moved to an arbitrary position in the Y-axis direction using the linear motor 60 as a drive source. It is a thing. The Y-direction moving device 54 will be described in detail later.

The X-direction moving device 52 is a head mounting body 50 as an X-axis slide that is held by the Y-axis slide 62 and moved in the X direction with respect to the Y-axis slide 62, and the X-axis slide 70 in the X-axis direction. It is configured to include a pair of guides 70 for guiding movement, a ball screw mechanism 72 provided between the head mounting body 50 and the Y-axis slide 62, and a rotary motor (not shown) as a drive source. To. The X-direction moving device 52 rotates the male screw attached to the Y-axis slide 62 so as to be rotatable and axially immovable by a motor, whereby the head mounting body 50 to which the nut is fixed is moved in the X direction. It has become like.

Next, the Y-direction moving device 54, which is the linear motor driving moving device of this embodiment, will be described in detail with reference to FIG. The Y-direction moving device 54 moves the Y-axis slide 62 as a moving body with respect to the beam 22 as a substrate by a linear motor 60 as a driving source. The Y-direction moving device 54 includes a guide 80 that guides the movement of the Y-axis slide 62 in the Y direction. The guide 80 includes two guide rails 82 and two sliders 84 slidably engaged with each of the two guide rails 82. As shown in FIG. 3, two guide rails 82 are fixed in parallel to the lower surface of the beam 22 in a state extending in the Y direction, and all four sliders 84 are fixed to the upper surface of the Y-axis slide 62. Is engaged with the guide rail 82. With such a configuration, the guide 80 guides the movement of the Y-axis slide 62 in the Y direction.

The linear motor 60 is a so-called T-type linear motor with a core, and moves between a pair of stators 100a and 100b provided so as to face each other at intervals and a pair of stators 100a and 100b. It is provided with a mover 102 that can be made to move. Each of the pair of stators 100a and 100b holds a plurality of permanent magnets 110, a yoke 112 to which the plurality of permanent magnets 110 are fixed, and a plurality of permanent magnets 110 by fixing the yoke 112. It is configured to include a base plate 114 as a magnet holder. The pair of stators 100a and 100b are fixed to the fixing blocks 116a and 116b so as to sandwich the fixing blocks 116a and 116b at both ends in the longitudinal direction. Then, the fixed block 116a is fixed to the front side of the beam 22, and the fixed block 116b is fixed to the rear side of the beam 22, so that the pair of stators 100a and 100b extend in the Y direction to the substrate. It is fixed to the beam 22 as. A plurality of permanent magnets 110 are alternately arranged in the Y direction on the inner side surfaces of the pair of stators 100a and 100b so that the magnetic poles are different. Further, the permanent magnets 110 facing each other have different magnetic poles.

On the other hand, the movable element 102 is mainly composed of the armature 120. Although not shown, the armature 120 has a three-phase core and a coil, and the three-phase core and the coil are assembled side by side in the Y direction. Further, the mover 102 includes a cooling mechanism 122 for cooling the generated coil. Although detailed description thereof will be omitted, the cooling mechanism 122 cools the refrigerant sealed in the heat pipe extending into the armature 120 by the heat radiation fins 124 and the air cooling fan 126 provided on the upper part of the armature 120. , Is configured to cool the coil.

The mover 120 is provided with a pair of guide mechanisms 130 on each of the front end side and the rear end side in the Y direction in order to guide the movement of the mover 102 with respect to the stator 100. As shown in FIG. 3, each of the pair of guide mechanisms 130 is mainly composed of a guide roller 132 which is a rolling element. Each guide mechanism 130 has an I-shaped roller holding member 134, and a pair of guide rollers 132a and 132b on the upper flange 136 of the roller holding member 134 and a pair of guide rollers on the lower flange 138. 132c and 132d are rotatably held around an axis extending in the vertical direction.

The guide rollers 132a, 132b, 132c, 132d are in contact with the inner side surfaces of the pair of stators 100a, 100b, and when the mover 102 moves, the inside of the pair of stators 100a, 100b. It is designed to roll on the sides. Specifically, each of the pair of guide rollers 132a and 132b rolls on the inner side surface of the base plate 114 above the yoke 112, and each of the pair of guide rollers 132c and 132d rolls on the inner side surface of the base plate 114. The portion below the yoke 112 is rolled. That is, the upper portion and the lower portion of the yoke 112 on the inner side surface of the base plate 114 function as rolling portions, and a plurality of Y-direction moving devices 54 are provided on one end side in the width direction of the base plate 114 as a magnet holder. The rolling portion set on one end side of the permanent magnet 110 and the rolling portion set on the other end side of the plurality of permanent magnets 110 on the other end side in the width direction of the base plate 114 are rolled. It includes a first rolling element and a second rolling element.

Normally, in a linear motor with a core, a large magnetic attraction force acts between the mover and the stator. Therefore, the stator needs to be firmly fixed to the substrate. For example, in a component mounting machine, if the stator 100 is firmly fixed to the beam 22 which is a substrate, the weight of the component mounting machine increases. As a result, the natural frequency of the component mounting machine itself decreases and the displacement at resonance increases, which may adversely affect the accuracy of the component mounting work. Further, when a part of the mover or the stator is deformed by the magnetic attraction force, even a slight deformation can be sufficiently processed in a device such as the component mounting machine 10 that handles precision equipment. It may not be possible to secure it.

In the Y-direction moving device 54, which is the linear motor drive moving device of the present embodiment configured as described above, the first rolling element and the guide roller 132 as the second rolling element are the mover 102 and the stator 100. It will receive the magnetic attraction that acts between and. That is, in the Y-direction moving device 54, the guide roller 132 makes it difficult for the stator 100 to tilt or deform. Therefore, as described above, the stator 100 is fixed to the beam 22 only at both ends in the longitudinal direction, and is relatively simply fixed. Further, in the Y-direction moving device 54, the distance between the mover 102 and the stator 100 is kept substantially constant by the guide roller 132. As a result, the motor efficiency of the linear motor 60 is improved, and stable movement of the mover 102 and, by extension, stable movement of the component mounting head 28 are ensured.

The Y-direction moving device 54, which is the linear motor driving moving device of the present embodiment, includes a T-type linear motor with a core having a pair of stators 100a and 100b, and a pair of stator 100 and a mover 102. A pair of guide rollers 132, which are a pair of rolling elements, were provided between the two. For example, the linear motor drive moving device includes an F-type linear motor with a core having a single stator, and a rolling element is provided between the single stator and the mover. You can also do it.

Further, in the Y-direction moving device 54, which is the linear motor driving moving device of the present embodiment, a pair of rolling elements, guide rollers 132, are provided on both the upper end side and the lower end side of the stator 100. However, only one of them may be used. FIG. 4 shows a modified linear motor drive moving device 150. The linear motor 152 included in the linear motor drive device 150 of the modified example is a T-type linear motor with a core as in the above embodiment, but each of the pair of stators 154a and 154b is a substrate at the lower end portion. It is fixed to a certain beam 22. Therefore, when a magnetic attraction force acts between the pair of stators 154a and 154b and the mover 156, the upper end side of the pair of stators 154a and 154b is likely to be attracted to the mover 156.

In the linear motor drive moving device 150 of this modified example, similarly to the linear motor 60 of the above embodiment, the mover 156 has a pair of guide mechanisms 160 for each of the front end side and the rear end side in the Y direction. Is provided. However, each of the pair of guide mechanisms 160 holds only one pair of guide rollers 162a and 162b. Each of the pair of guide rollers 162a and 162b rolls on the upper end side of the stators 154a and 154b. Therefore, in the linear motor drive moving device 150 of the modified example, the guide roller 162 also receives the magnetic attraction force acting between the mover 156 and the stator 154, and the stator 154 is less likely to tilt or deform. It has become.

10: Parts mounting machine 22: Beam [base] 28: Parts mounting head 30: Head moving device 50: Head mounting body 52: X direction moving device 54: Y direction moving device [Linear motor drive moving device] 60: Linear motor 62 : Y-axis slide [moving body] 80: guide 82: guide rail 84: slider 100a, 100b: stator 102: mover 110: permanent magnet 112: yoke 114: base plate [magnet holder] 120: armature 122: cooling Mechanism 130: Guide mechanism 132: Guide roller [Rolling body] 150: Linear motor drive moving device (modification example) 152: Linear motor 154: Stator 156: Movable element 160: Guide mechanism 162: Guide roller [Rolling body]

Claims (4)

It is configured to include a substrate, a moving body movable with respect to the substrate, a guide rail fixed to the substrate to guide the movement of the moving body with respect to the substrate, and a linear motor as a drive source. A linear motor drive moving device that moves the moving body with respect to the substrate by a linear motor.
The linear motor
A mover having a core and a coil wound around the core and fixed to the moving body,
Each is (A) a plurality of permanent magnets and (B) a magnet holder fixed to the substrate and extending in the moving direction of the mover to hold the plurality of permanent magnets arranged in the moving direction. DOO have a, and a pair of stators facing each other with a spacing,
Each is provided with a pair of rolling elements that are rotatably held by the mover and roll over the magnet holder when the mover moves.
The mover is configured to be movable between the pair of stators.
Each of the pair of rolling elements
Each of the pair of stators is configured to roll on the opposing surfaces of the magnet holders and
(i) One end side of the magnet holder in the width direction of the plurality of permanent magnets and (ii) The other end side of the magnet holder in the width direction of the magnet holder and the other end side of the plurality of permanent magnets. A linear motor drive moving device configured to roll a rolling part set on one side. When the rolling element is defined as the first rolling element,
The linear motor
Separately from the first rolling element, it is rotatably held by the mover, and (i) one end side of the magnet holder in the width direction of the plurality of permanent magnets and (ii) the magnet holder. The linear motor drive moving device according to claim 1 , further comprising a second rolling element that rolls a rolled portion set on the other end side of the other end side of the plurality of permanent magnets on the other end side in the width direction. .. The linear motor drive moving device according to claim 1 or 2 , wherein the magnet holders of each of the pair of stators are fixed to the substrate at both ends in the longitudinal direction. It is configured to include a substrate, a moving body movable with respect to the substrate, a guide rail fixed to the substrate to guide the movement of the moving body with respect to the substrate, and a linear motor as a drive source. A linear motor drive moving device that moves the moving body with respect to the substrate by a linear motor.
The linear motor
A mover having a core and a coil wound around the core and fixed to the moving body,
It has (A) a plurality of permanent magnets and (B) a magnet holder that is fixed to the substrate and extends in the moving direction of the mover to hold the plurality of permanent magnets in a state of being arranged in the moving direction. With a stator,
With a rolling element that is rotatably held by the mover and rolls on the magnet holder when the mover moves.
With
The magnet holder of the stator
It is fixed to the substrate at one end in the width direction and is erected, and holds the plurality of permanent magnets on its own side surface.
When the mover moves, the rolling element rolls a rolled portion set on the other end side of the side surface of the magnet holder in the width direction with respect to the other end side of the plurality of permanent magnets. configured re linear motors driving the moving unit so.

Images