JP6575629B2 - Exposure apparatus, exposure method, and device manufacturing method - Google Patents

Description

  The present invention relates to a technical field of an exposure apparatus, an exposure method, and a device manufacturing method.

  As an exposure apparatus used in a photolithography process, an immersion exposure apparatus that exposes a substrate using exposure light projected through a liquid between an emission surface of an optical member and the substrate is known (for example, a patent) Reference 1).

U.S. Patent No. 7,864,292

  In the immersion exposure apparatus, for example, if a liquid flows out of a predetermined space or remains on an object such as a substrate, an exposure failure may occur. As a result, a defective device may occur.

  An object of the present invention is to provide an exposure apparatus, an exposure method, and a device manufacturing method capable of suppressing the occurrence of exposure failure.

  An exposure apparatus according to a first aspect is an exposure apparatus that exposes a substrate using exposure light emitted from an optical member through an immersion space, and forms the immersion space through which the exposure light passes. A liquid immersion member that is a movable member that is movable at least in part, and a moving device that moves the movable member, wherein at least a part of the movable member is movable below the optical member. The moving device is configured to move in a first period in which the first object moves along a direction including a direction component perpendicular to the optical axis of the optical member below at least a portion of the movable member. The movable member is moved along a direction including a direction component perpendicular to the optical axis.

  An exposure apparatus according to a second aspect is an exposure apparatus that exposes a substrate using exposure light irradiated through a liquid immersion space, and forms the liquid immersion space through which the exposure light passes. A liquid immersion member that is a movable member whose portion is movable, and a moving device that moves the movable member. The movable member includes a first liquid recovery port, and the liquid is recovered by the first liquid recovery port. Based on this, the movable member is moved.

  An exposure apparatus according to a third aspect is an exposure apparatus that exposes a substrate using exposure light irradiated through the immersion space, and forms at least one immersion space through which the exposure light passes. A liquid immersion member that is a movable member whose portion is movable, and a moving device that moves the movable member, the movable member includes a first liquid recovery port, and at least a part of an interface of the liquid immersion space A movement timing for moving the movable member is determined based on a positional relationship with at least a part of the first liquid recovery port.

  An exposure apparatus according to a fourth aspect is an exposure apparatus that exposes a substrate using exposure light emitted from an optical member through an immersion space, and forms the immersion space through which the exposure light passes. A liquid immersion member that is a movable member at least a part of which is movable, and a moving device that moves the movable member, the moving device on the first object movable below the optical member or the In at least a part of the fourth period determined according to a positional relationship between a predetermined location between the first object and the second object movable below the optical member and at least a part of the liquid immersion member, The movement mode of the movable member is adjusted.

  An exposure apparatus according to a fifth aspect is an exposure apparatus that exposes a substrate using exposure light irradiated through a liquid immersion space, and forms at least one immersion space through which the exposure light passes. A liquid immersion member that is a movable member whose portion is movable, and a moving device that moves the movable member, wherein the moving device is on or under the first object that is movable below the optical member. And at least part of the period during which at least a portion of the liquid immersion member passes above a predetermined location between the second object movable below the optical member and the liquid immersion member above the predetermined location. The movable member is moved so that the relative speed of the movable member with respect to the first object is smaller than that before at least a part of the movable member passes.

  An exposure apparatus according to a sixth aspect is an exposure apparatus that exposes a substrate using exposure light irradiated through a liquid immersion space, and forms at least one immersion space through which the exposure light passes. A liquid immersion member that is a movable member whose part is movable, and a moving device that moves the movable member, the moving device being the same as the moving direction of the first object with respect to the first object, or The movable member is moved so that the movable member relatively moves in a different or opposite direction.

  An exposure method according to a first aspect is an exposure method for exposing a substrate using exposure light irradiated from an optical member through an immersion space, and at least a part of the immersion member is a movable member that is movable. Forming the immersion space through which the exposure light passes, and moving the movable member, wherein at least a part of the movable member is movable under the optical member. Moving the movable member so as to face at least a part of one object is along a direction in which the first object includes a directional component perpendicular to the optical axis of the optical member below at least a part of the movable member. In at least a part of the first period of movement, the movable member is moved along a direction including a direction component perpendicular to the optical axis.

  An exposure method according to a second aspect is an exposure method in which a substrate is exposed using exposure light irradiated through an immersion space, and at least a part of the exposure method is a movable member that is movable. Forming the immersion space through which the exposure light passes, and moving the movable member, the movable member including a first liquid recovery port, and the exposure method including the first liquid recovery The movement timing for moving the movable member is determined based on the manner of liquid recovery by the mouth.

  An exposure method according to a third aspect is an exposure method for exposing a substrate using exposure light irradiated through an immersion space, and using an immersion member that is a movable member at least a part of which is movable. Forming the immersion space through which the exposure light passes, and moving the movable member, the movable member including a first liquid recovery port, and the exposure method comprising: A movement timing for moving the movable member is determined based on a positional relationship between at least a part of the interface and at least a part of the first liquid recovery port.

  An exposure method according to a fourth aspect is an exposure method of exposing a substrate using exposure light irradiated from an optical member through an immersion space, and at least a part of the immersion member is a movable member that is movable. Forming the immersion space through which the exposure light passes, and moving the movable member, wherein the movable member is moved under the optical member. A fourth period determined according to a positional relationship between a predetermined location on one object or between the first object and a second object movable below the optical member and at least a part of the liquid immersion member The movement mode of the movable member is adjusted at least in part.

  An exposure method according to a fifth aspect is an exposure method that exposes a substrate using exposure light irradiated through an immersion space, and uses an immersion member that is a movable member at least a part of which is movable. Forming the immersion space through which the exposure light passes, and moving the movable member, the moving the movable member on the first object movable below the optical member Or at least part of a period during which at least a part of the liquid immersion member passes above a predetermined part between the first object and a second object movable below the optical member. The movable member is moved so that a relative speed of the movable member with respect to the first object is smaller than before at least a part of the liquid immersion member passes above.

  An exposure method according to a sixth aspect is an exposure method for exposing a substrate using exposure light irradiated through an immersion space, and using an immersion member that is a movable member at least a part of which is movable. Forming the immersion space through which the exposure light passes, and moving the movable member, the moving the movable member being relative to the first object. The movable member is moved so that the movable member relatively moves in a direction that is the same as, different from, or opposite to the moving direction.

  The device manufacturing method according to the first aspect includes exposing the substrate using any one of the exposure apparatus according to the first aspect to the exposure apparatus according to the sixth aspect, and developing the exposed substrate. Is provided.

  The device manufacturing method according to the second aspect includes exposing the substrate using any one of the exposure method according to the first aspect to the exposure method according to the sixth aspect, and developing the exposed substrate. Is provided.

It is a schematic block diagram which shows an example of a structure of the exposure apparatus of 1st Embodiment. FIG. 3 is a cross-sectional view (cross-sectional view parallel to the XZ plane) of the liquid immersion member according to the first embodiment. An explanation showing the plan view of the liquid immersion member of the first embodiment viewed from below (the −Z-axis direction side) and the cross-sectional view of the liquid immersion member of the first embodiment (cross-sectional view parallel to the XZ plane) FIG. It is explanatory drawing which shows the state of an interface in case the 2nd member moves toward + Y-axis direction on the top view which observed the liquid immersion member from the lower side (-Z-axis direction side). It is sectional drawing which shows the 1st specific example of movement operation | movement of a 2nd member. It is sectional drawing which shows the 2nd specific example of movement operation | movement of a 2nd member. It is a top view which shows an example of the board | substrate currently hold | maintained at the substrate stage. It is a top view which shows a specific example of the movement locus | trajectory of a projection area, and the movement locus | trajectory of a 2nd member. It is a top view which shows the movement operation | movement of a 2nd member when a board | substrate and a 2nd member move in the aspect shown in FIG. It is a top view which shows the movement operation | movement of a 2nd member when a board | substrate and a 2nd member move in the aspect shown in FIG. It is a top view which shows the movement operation | movement of a 2nd member when a board | substrate and a 2nd member move in the aspect shown in FIG. It is a graph which shows each moving speed of a board | substrate and a 2nd member when a board | substrate and a 2nd member move in the aspect shown in FIG. It is a top view explaining the timing which a 2nd member begins to move along a Y-axis direction during a scanning movement period based on the positional relationship of the interface of a liquid immersion space, and the porous member arrange | positioned at a fluid recovery port. It is a top view which shows the upper surface of a substrate stage and a measurement stage. It is a top view which shows the positional relationship of a predetermined part and a back interface. It is a top view which shows an example of the residual water resulting from a predetermined part. It is a top view which shows an example of the movement operation | movement of the 2nd member which avoids a coincidence with 1st timing and 2nd timing with the interface of immersion space. It is sectional drawing (sectional drawing parallel to a XZ plane) of the liquid immersion member of 2nd Embodiment. It is sectional drawing (cross-sectional view parallel to XZ plane) of the liquid immersion member of 3rd Embodiment. It is sectional drawing (sectional drawing parallel to a XZ plane) of the liquid immersion member of 4th Embodiment. It is sectional drawing (cross-sectional view parallel to XZ plane) of the liquid immersion member of 5th Embodiment. It is sectional drawing (sectional drawing parallel to a XZ plane) of the liquid immersion member of 6th Embodiment. It is a top view which shows an example of a substrate stage. It is a flowchart for demonstrating an example of the manufacturing method of a device.

  Embodiments of the present invention will be described below with reference to the drawings. However, the present invention is not limited to the embodiments described below.

In the following description, the positional relationship between various components constituting the exposure apparatus will be described using an XYZ orthogonal coordinate system defined by mutually orthogonal X, Y, and Z axes. In the following description, each of the X-axis direction and the Y-axis direction is a horizontal direction (that is, a predetermined direction in the horizontal plane), and the Z-axis direction is a vertical direction (that is, a direction orthogonal to the horizontal plane). In the vertical direction). In addition, the rotation directions (in other words, the tilt direction) around the X axis, the Y axis, and the Z axis are referred to as a θX direction, a θY direction, and a θZ direction, respectively.
(1) First Embodiment First , an exposure apparatus EX1 of the first embodiment will be described with reference to FIGS.
(1-1) Configuration of Exposure Apparatus EX1 of First Embodiment First, an example of the configuration of the exposure apparatus EX1 of the first embodiment will be described with reference to FIG. FIG. 1 is a block diagram showing an example of the configuration of the exposure apparatus EX1 of the first embodiment.

  As shown in FIG. 1, the exposure apparatus EX1 includes a mask stage 1, an illumination system 2, a projection optical system 3, a liquid immersion member 4A, a substrate stage 5, a measurement stage 6, a measurement system 7, and a chamber. A device 8 and a control device 9 are provided.

  The mask stage 1 can hold the mask 11. The mask stage 1 can release the held mask 11.

  The mask 11 includes a reticle on which a device pattern projected onto the substrate 51 held by the substrate stage 5 is formed. The mask 11 may be a transmissive mask including a transparent plate such as a glass plate and a device pattern formed on the transparent plate using a light shielding material such as chrome. However, the mask 11 may be a so-called reflective mask.

  The mask stage 1 moves along a plane (for example, an XY plane) including an area irradiated with the exposure light EL emitted from the illumination system 2 (that is, an illumination area IR described later) while holding the mask 11. Is possible.

  For example, the mask stage 1 may be moved by the operation of the drive system 12 including a planar motor. An example of the drive system 12 including a planar motor is disclosed in, for example, US Pat. No. 6,452,292. However, the drive system 12 may include another motor (for example, a linear motor) in addition to or instead of the planar motor. In the first embodiment, the mask stage 1 moves along at least one of the X-axis direction, the Y-axis direction, and the Z-axis direction, and the θX direction, the θY direction, and the θZ direction by the operation of the drive system 12. Is possible. Note that “the movement of the mask stage 1 along a predetermined direction” means “the movement of the mask stage 1 only along a predetermined direction” and “the movement of the mask stage 1 along an arbitrary direction including a direction component along the predetermined direction”. And / or “movement”.

  The illumination system 2 emits exposure light EL. The exposure light EL from the illumination system 2 is irradiated to the illumination area IR. The exposure light EL from the illumination system 2 is irradiated to a part of the mask 11 arranged in the illumination area IR.

The exposure light EL is, for example, a bright line (eg, g-line, h-line or i-line) emitted from a mercury lamp, or far ultraviolet light (DUV light: Deep Ultra Violet light) such as KrF excimer laser light (wavelength 248 nm). It may be. The exposure light EL may be vacuum ultraviolet light (VUV light: Vacuum Ultra Violet light) such as ArF excimer laser light (wavelength 193 nm) or F ₂ laser light (wavelength 157 nm), for example.

  The projection optical system 3 projects the exposure light EL from the mask 11 (that is, the image of the device pattern formed on the mask 11) onto the substrate 51. Specifically, the projection optical system 3 projects the exposure light EL onto the projection region PR. The projection optical system 3 projects the device pattern image onto a part of the substrate 51 arranged in the projection area PR (for example, at least a part of the shot area S described later).

  In the first embodiment, the projection optical system 3 is a reduction system. For example, the projection magnification of the projection optical system may be 1/4, 1/5, 1/8, or any other value. . However, the projection optical system 3 may be an equal magnification system or an enlargement system.

  The projection optical system 3 may be a refractive system that does not include a reflective optical element. The projection optical system 3 may be a reflection system that does not include a refractive optical element. The projection optical system 3 may be a catadioptric system including both a reflective optical element and a refractive optical element. The projection optical system 3 may project the device pattern image as an inverted image. The projection optical system 3 may project the device pattern image as an erect image.

  The projection optical system 3 includes a terminal optical element 31 including an emission surface 32 from which the exposure light EL is emitted. The exit surface 32 emits the exposure light EL toward the image plane of the projection optical system 3. The terminal optical element 31 is an optical element closest to the image plane of the projection optical system 3 among the plurality of optical elements included in the projection optical system 3.

  The optical axis AX of the last optical element 31 is parallel to the Z axis. In this case, focusing on the direction parallel to the optical axis AX of the terminal optical element 31, the direction from the incident surface of the projection optical element 31 toward the exit surface 32 is the −Z-axis direction, and the end optical from the exit surface 32 is the end optical. The direction toward the incident surface of the element 31 is the + Z-axis direction. However, the optical axis AX of the last optical element 31 may not be parallel to the Z axis.

  Note that at least a part of the optical axis of the projection optical system 3 may coincide with the optical axis AX of the terminal optical element 31 and be parallel to the Z axis. In this case, focusing on the Z-axis direction, the direction from the projection optical system 3 toward the image plane of the projection optical system 3 is the −Z-axis direction, and the object plane of the projection optical system 3 from the projection optical system 3 The direction toward is the + Z-axis direction.

  Further, the center of the projection region PR described above may or may not coincide with the optical axis AX. Further, the projection region PR may not be located on the optical axis AX.

  The exit surface 32 faces the −Z axis direction. Therefore, the exposure light EL emitted from the emission surface 32 travels in the −Z axis direction. The exit surface 32 is a plane parallel to the XY plane (that is, the horizontal plane). However, at least a part of the emission surface 32 may be inclined with respect to the XY plane. At least a part of the emission surface 32 may be a curved surface (for example, a concave surface or a convex surface).

  The last optical element 31 includes an outer surface 33 disposed around the emission surface 32 in addition to the emission surface 32 facing the −Z-axis direction. The exposure light EL is emitted from the emission surface 32, but may not be emitted from the outer surface 33. The outer surface 33 has a shape that gradually moves away from the optical axis AX toward the + Z-axis direction side (that is, a shape that is inclined with respect to the optical axis AX). However, at least a part of the outer surface 33 may have other shapes.

  The projection optical system 3 is supported by a reference frame 37. The reference frame 37 is supported by an apparatus frame 38 that is disposed below the reference frame 37 (that is, on the −Z axis direction side). An anti-vibration device 39 is disposed between the reference frame 37 and the device frame 38. The vibration isolator 39 suppresses vibration transmission from the apparatus frame 38 to the reference frame 37. The vibration isolator 39 may include, for example, a spring device. Examples of the spring device include a spring including an elastic member such as metal or rubber, or a spring including a gas such as air (so-called air mount).

  The liquid immersion member 4A forms a liquid immersion space LS. The immersion space LS means a space (in other words, a part or a region) filled with the liquid LQ that is pure water, for example. The detailed configuration of the liquid immersion member 4A will be described in detail later with reference to FIGS.

  The substrate stage 5 includes a holding unit that releasably holds the substrate 51 and an upper surface 52 that is disposed around the holding unit. The upper surface 52 is a plane parallel to the upper surface of the substrate 51. The upper surface 52 is disposed in the same plane as the upper surface of the substrate 51. However, at least a part of the upper surface 52 may be inclined with respect to the upper surface of the substrate 51 or may include a curved surface. At least a part of the upper surface 52 may not be arranged in the same plane as the upper surface of the substrate 51. An example of the substrate stage 5 is disclosed in, for example, US Patent Application Publication No. 2007/0177125 and US Patent Application Publication No. 2008/0049209.

  The substrate stage 5 is movable along a plane (for example, an XY plane) including the projection region PR while holding the substrate 51. The substrate stage 5 is movable on the guide surface 811 of the base member 81. The guide surface 811 and the plane including the projection region PR (for example, the XY plane) may be substantially parallel.

  For example, the substrate stage 5 may be moved by the operation of the drive system 82 including a planar motor. An example of a drive system 82 including a planar motor is disclosed in, for example, US Pat. No. 6,452,292. The planar motor included in the drive system 82 may include a mover 825 disposed on the substrate stage 5 and a stator 828 disposed on the base member 81. However, the drive system 82 may include another motor (for example, a linear motor) in addition to or instead of the planar motor. In the first embodiment, the substrate stage 5 moves along at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, and the θX direction, the θY direction, and the θZ direction by the operation of the drive system 82. Is possible. Note that “the movement of the substrate stage 5 along a predetermined direction” includes “the movement of the substrate stage 5 along only a predetermined direction” and “the movement of the substrate stage 5 along an arbitrary direction including a direction component along the predetermined direction”. And / or “movement”.

  The substrate 51 is a substrate for manufacturing a device. The substrate 51 includes, for example, a base material such as a semiconductor wafer and a photosensitive film formed on the base material. The photosensitive film is, for example, a film of a photosensitive material (for example, a photoresist). In addition to the photosensitive film, the substrate 51 includes other films (for example, both an antireflection film that prevents unintentional reflection of the exposure light EL on the surface of the substrate 51 and a protective film that protects the surface of the substrate 51. Or one or the like).

  While the measurement stage 6 does not hold the substrate 51, it can hold a measurement member (in other words, a measuring instrument) 61 that measures the exposure light EL. That is, the exposure apparatus EX1 of the first embodiment is an exposure apparatus that includes the substrate stage 5 and the measurement stage 6. An example of such an exposure apparatus is disclosed in, for example, US Pat. No. 6,897,963 and European Patent Application No. 1713113.

  The measurement stage 6 is movable along a plane (for example, an XY plane) including the projection region PR while holding the measurement member 61. The measurement stage 6 can move on the guide surface 811 of the base member 81 in the same manner as the substrate stage 5.

  For example, the measurement stage 6 may move by the operation of the drive system 82 including a planar motor, similarly to the substrate stage 5. The planar motor included in the drive system 82 may include a mover 826 disposed on the measurement stage 6 and a stator 828 disposed on the base member 81. However, the drive system 82 may include another motor (for example, a linear motor) in addition to or instead of the planar motor. In the first embodiment, the measurement stage 6 is moved along at least one of the X-axis direction, the Y-axis direction, the Z-axis direction, and the θX direction, the θY direction, and the θZ direction by the operation of the drive system 82. Is possible. Note that “movement of the measurement stage 6 along a predetermined direction” includes “movement of the measurement stage 6 along only a predetermined direction” and “movement of the measurement stage 6 along an arbitrary direction including a direction component along the predetermined direction”. And / or “movement”.

  The measurement system 7 measures the positions of the substrate stage 5 and the measurement stage 6. In order to measure the positions of the substrate stage 5 and the measurement stage 6, the measurement system 7 may include an interferometer system. The interferometer system irradiates measurement light on each of the measurement mirror disposed on the substrate stage 5 and the measurement mirror disposed on the measurement stage 6 and detects the reflected light of the measurement light to detect the substrate stage 5. In addition, the position of the measurement stage 6 may be measured. However, the measurement system 7 may include an encoder system that measures the positions of the substrate stage 5 and the measurement stage 6 in addition to or instead of the interferometer system. An example of the encoder system is disclosed in, for example, US Patent Application Publication No. 2007/0288121.

  The chamber apparatus 8 adjusts the environment of the space CS (for example, at least one of temperature, humidity, pressure, and cleanliness). In the space CS, at least the last optical element 31, the liquid immersion member 4, the substrate stage 5, and the measurement stage 6 are arranged. However, at least a part of the mask stage 1 and the illumination system 2 may be arranged in the space CS.

  The control device 9 controls the overall operation of the exposure apparatus EX1. The control device 9 includes a controller 91 that controls the operation of the entire exposure apparatus EX1, and a memory 92 that is connected to the controller 91 and stores various information used for the operation of the exposure apparatus EX1.

  The controller 91 controls the position of the substrate stage 5 based on the measurement result of the measurement system 7 when the exposure apparatus EX1 exposes the substrate 51 using the exposure light EL. That is, the controller 91 controls the drive system 82 so as to move the substrate stage 5. The controller 91 controls the position of the mask stage 1 when the exposure apparatus EX1 exposes the substrate 51 using the exposure light EL. That is, the controller 91 controls the drive system 12 to move the mask stage 1. The controller 91 controls the position of the measurement stage 6 based on the measurement result of the measurement system 7 when the exposure apparatus EX1 uses the measurement stage 6 to measure the exposure light EL. That is, the controller 91 controls the drive system 82 to move the measurement stage 6.

As will be described in detail later, the controller 91 controls the position of at least a part of the liquid immersion member 4A (for example, the second member 42 described in detail with reference to FIG. 2). Incidentally, the movement mode of at least a part of the liquid immersion member 4A will be described in detail later with reference to FIGS.
(1-2) Liquid immersion member 4A of the first embodiment
Next, the liquid immersion member 4A of the first embodiment will be described with reference to FIGS.
(1-2-1) Configuration of Liquid Immersion Member 4A of First Embodiment First, the configuration of the liquid immersion member 4A of the first embodiment will be described with reference to FIGS. FIG. 2 is a cross-sectional view (cross-sectional view parallel to the XZ plane) of the liquid immersion member 4A of the first embodiment. FIG. 3 is a plan view of the liquid immersion member 4A according to the first embodiment observed from the lower side (−Z axis direction side) and a cross-sectional view of the liquid immersion member 4A according to the first embodiment (cross-sectional view parallel to the XZ plane). FIG.

  In the following description, unless otherwise specified, “upper side (upper side)” means the + Z-axis direction side. “Lower side (lower side)” means the −Z-axis direction side. “Inner side” means the inner side in the radial direction of the optical axis AX and the side closer to the optical axis AX. “Outside” means the outside in the radial direction of the optical axis AX and the side away from the optical axis AX.

  As shown in FIG. 2, the liquid immersion member 4A forms a liquid immersion space LS on at least a part of an object that can move below the injection surface 32 and the liquid immersion member 4A. Therefore, the object can face both the emission surface 32 and the liquid immersion member 4A while facing the liquid immersion space LS.

  The object may be the substrate stage 5. In this case, the liquid immersion member 4 </ b> A forms the liquid immersion space LS on at least a part of the substrate stage 5. The object may be the substrate 51 held by the substrate stage 5. In this case, the liquid immersion member 4 </ b> A forms the liquid immersion space LS on at least a part of the substrate 51. The object may be the measurement stage 6 or the measurement member 61 held by the measurement stage 6. In this case, the liquid immersion member 4A forms the liquid immersion space LS on at least a part of the measurement stage 6 or on at least a part of the measurement member 61.

  The liquid immersion member 4A may form an immersion space LS straddling two different objects. For example, the immersion member 4 </ b> A may form an immersion space LS straddling the upper surface 52 and the substrate 51. For example, the immersion member 4 </ b> A may form an immersion space LS straddling the substrate stage 5 and the measurement stage 6.

  In the following description, it is assumed that the object is the substrate 51 from the viewpoint of simplifying the description.

  The liquid immersion member 4A forms the liquid immersion space LS so that the optical path AT of the exposure light EL is filled with the liquid LQ. For example, the liquid immersion member 4A may form the liquid immersion space LS so that the optical path ATL between the emission surface 32 and the substrate 51 in the optical path AT is filled with the liquid LQ. The liquid immersion member 4A may form the liquid immersion space LS so that at least a part of the upper surface of the substrate 51 including the projection region PR is covered with the liquid LQ. The exposure light EL from the emission surface 32 is projected onto the substrate 51 through the liquid LQ. That is, the exposure apparatus EX1 of the first embodiment is an immersion exposure apparatus that exposes the substrate 51 using the exposure light EL projected through the liquid LQ.

  The liquid immersion member 4 </ b> A forms a part of the liquid immersion space LS in the space between the terminal optical element 31 and the substrate 51. The liquid immersion member 4A forms at least a part of the liquid immersion space LS in a space between the liquid immersion member 4A and the substrate 51.

  In order to form such a liquid immersion space LS, as shown in FIGS. 2 and 3, the liquid immersion member 4A includes a first member 41A and a second member 42A. Hereinafter, the first member 41A and the second member 42A will be described in order.

  First, the first member 41A will be described.

  The first member 41A is disposed around the optical path AT. The first member 41A has a shape that can surround the optical path AT. The “optical path AT” referred to here may include both or one of the optical path ATL and the optical path ATO of the exposure light EL in the terminal optical element 31 described above. In the example shown in FIG. 3, the first member 41 </ b> A has an annular or closed loop shape that is an example of a shape that can surround the optical path AT. As another example of the shape that can surround the optical path AT, for example, a frame shape (for example, a shape that forms a non-circular shape, a polygonal shape, an elliptical shape, or the like) is exemplified.

  The first member 41A is arranged such that a gap (specifically, the space SP2) is formed between the first member 41A and the last optical element 31. The first member 41A is disposed so as not to contact the last optical element 31.

  The first member 41 </ b> A is disposed around the last optical element 31. The first member 41 has a shape that can surround the terminal optical element 31. In this case, the first member 41A may function as a protective member that protects the terminal optical element 31. For example, the first member 41A may function as a protective member that prevents contact between the second member 42A and the last optical element 31.

  A part of the first member 41 </ b> A (for example, a part of an upper surface 414 described later and an inner side surface 415) is disposed below the emission surface 32. However, the first member 41 </ b> A may not be disposed below the emission surface 32. A part of the first member 41 </ b> A (for example, a part of a lower surface 413 described later) faces a part of the substrate 51.

  The first member 41A is disposed at a position farther from the substrate 51 than the second member 42A. For this reason, a part of the first member 41A is disposed on the upper side of the second member 42A. That is, at least a part of the second member 42 </ b> A is disposed between a part of the first member 41 </ b> A and the substrate 51.

  The first member 41A does not substantially move. That is, the first member 41A is substantially fixed. For example, the first member 41A may be fixed to the device frame 38 via a support member (not shown). Note that both or one of the projection optical system 3 and the last optical element 31 does not substantially move (that is, is substantially fixed).

  The first member 41 includes an inner surface 411, an outer surface 412, a lower surface 413, an upper surface 414, and an inner surface 415.

  The first member 41A includes an opening 416 through which the exposure light EL from the emission surface 32 can pass. Opening 416 is defined at the lower end of inner surface 415. A lower surface 413 is disposed around the opening 416 (the lower end portion of the inner surface 415). The lower end of the inner side surface 415 coincides with the inner end of the lower surface 413. The center of the opening 416 coincides with the optical axis AX. The diameter and area of the opening 416 along the XY plane are smaller than the diameter and area of the emission surface 32. The shape of the opening 416 on the XY plane is, for example, a rectangular shape (see FIG. 3).

  The inner side surface 415 is a plane facing inward. The inner side surface 415 is parallel to the optical axis AX. The inner side surface 415 is disposed outside the optical path AT. An upper surface 414 is disposed around the upper end of the inner surface 415. The upper end portion of the inner surface 415 coincides with the inner end portion of the upper surface 414. The inner side surface 415 connects the inner end of the upper surface 414 and the inner end of the lower surface 413 (in other words, connects or connects).

  The upper surface 414 is a plane that faces upward. The upper surface 414 is parallel to the XY plane. The upper surface 414 is parallel to the lower surface 413. The upper surface 414 is disposed above the lower surface 413. The upper surface 414 is disposed below the emission surface 32. A part of the upper surface 414 faces the emission surface 32.

  The inner side surface 411 is a plane that faces inward. The inner side surface 411 extends upward from the outer end portion of the upper surface 414. The lower end of the inner side surface 411 coincides with the outer end of the upper surface 414. A part of the inner surface 411 faces the outer surface 33 through the space SP2. A part of the inner surface 4121 is parallel to the outer surface 33. A part of the inner side surface 4121 is inclined with respect to the XY plane. A part of the inner side surface 411 is parallel to the XY plane. The inner side surface 411 includes a first surface extending upward and outward from the outer end portion of the upper surface 414, and a second surface extending parallel to the XY plane from the upper end portion of the first surface toward the outer side. And a third surface extending upward and outward from the outer end of the second surface.

  The lower surface 413 is a plane that faces downward. The lower surface 413 is parallel to the XY plane. The lower surface 413 is disposed below the inner side surface 411, the outer side surface 412, the upper surface 414, and the inner side surface 415. A part of the lower surface 413 faces the substrate 51 through a gap (specifically, the space SP1). A part of the lower surface 413 faces the second member 42A via a gap (specifically, the space SP3). The lower surface 413 is disposed below the emission surface 32. The lower surface 413 is lyophilic with respect to the liquid LQ. For example, at least a part of the lower surface 413 that may face the immersion space LS may be lyophilic with respect to the liquid LQ.

  The outer side surface 412 is a plane facing outward. The outer side surface 412 is parallel to the optical axis AX (that is, perpendicular to the XY plane). The outer side surface 412 is disposed outside the inner side surface 411, the lower surface 413, the upper surface 414, and the inner side surface 415. The outer side surface 412 extends upward from the outer end portion of the lower surface 413. Accordingly, the lower end of the outer surface 412 coincides with the outer end of the lower surface 413.

  Next, the second member 42A will be described.

  The second member 42A is disposed around the optical path AT. The second member 42A has a shape that can surround the optical path AT. In the example illustrated in FIG. 3, the second member 42 </ b> A has an annular or closed loop shape that is an example of a shape that can surround the optical path AT.

  The second member 42A is disposed closer to the substrate 51 than the first member 41A. In other words, at least a part of the second member 42A is disposed below the first member 41A. A part of the second member 42 </ b> A (for example, a lower surface 422 described later) faces the substrate 51. The second member 42A is not disposed below the emission surface 32. The second member 42A is disposed so as not to contact the first member 41A. That is, the second member 42A is disposed so that a gap is formed between the second member 42A and the first member 41A.

  The second member 42A is a movable member. For example, the second member 42 </ b> A may be movable by the operation of the driving device 451 controlled by the controller 91. The driving device 451 may be fixed to the device frame 38 via a support member 453. However, the support member 453 may not be provided. The drive device 451 may include, for example, a motor. For example, a mover (not shown) of the driving device 451 may be connected to the support member 452 and the stator may be connected to the device frame 38. At least a part of the reaction force generated by the movement of the second member 42 </ b> A by the driving device 451 may be transmitted to the device frame 38. Even if the apparatus frame 38 vibrates due to the reaction force accompanying the movement of the second member 42A, the projection optical system 3 is not substantially affected by the vibration isolator 39. The driving device 451 may have a mechanism for canceling at least a part of the reaction force accompanying the movement of the second member 42A. For example, a mechanism similar to a countermass type reaction force cancellation mechanism mounted on the drive system 82 of the substrate stage 5 can be applied to the drive device 451.

  The drive device 451 moves a support member 452 having one end connected to the second member 42A and the other end connected to the drive device 451, and is connected to the support member 452 as the support member 452 moves. The second member 42A may move.

  The second member 42A moves along each of the X-axis direction and the Y-axis direction. That is, the second member 42A moves along a direction perpendicular to the optical axis AX (that is, an arbitrary direction in the XY plane). Note that “the movement of the second member 42A along the predetermined direction” includes “the movement of the second member 42A along only the predetermined direction” and “the second movement along an arbitrary direction including a direction component along the predetermined direction”. And / or “movement of the member 42A”.

  The second member 42A is movable outside the optical path AT. Even when the second member 42A moves, a movable range of the second member 42A may be set such that the second member 42A is positioned outside the optical path AT.

  The second member 42A may be movable with respect to the terminal optical element 31 that is substantially fixed. As the second member 42A moves, the relative position between the last optical element 31 and the second member 42A changes.

  The second member 42A moves relative to the first member 41A. As the second member 42A moves, the relative position between the first member 41A and the second member 42A changes.

  A part of the second member 42 </ b> A is movable below the first member 41. The second member 42A is movable on the upper side of the substrate 51.

  The second member 42A may move in a state where the immersion space LS is formed. For example, the second member 42A may move in a state where the space between the emission surface 32 and the substrate 51 is filled with the liquid LQ. However, the second member 42A may move in a state where the immersion space LS is not formed.

  The second member 42A includes an upper surface 421, a lower surface 422, an inner side surface 423, and an inner side surface 424.

  The upper surface 421 is a plane that faces upward. The upper surface 421 is parallel to the XY plane. A part of the upper surface 421 faces the lower surface 413 through a gap (specifically, the space SP3). The upper surface 421 is disposed below both or one of the first member 41A and the emission surface 32. The upper surface 421 does not face the emission surface 32 along a direction parallel to the optical axis AX. Note that the second member 42 </ b> A may be movable so that the upper surface 421 faces the emission surface 32.

  At least a part of the upper surface 421 has liquid repellency with respect to the liquid LQ. Since the upper surface 421 has liquid repellency, for example, at least a part of the upper surface 421 may include a surface of a resin film containing fluorine. Examples of such a resin include, for example, PFA (tetrafluoroethyl-perfluoroalkylene ether copolymer) and PTFE (PolyTetra Fluoro Ethylene).

  The lower surface 422 is a plane that faces the lower side. The lower surface 422 is parallel to the XY plane. The lower surface 422 is parallel to the upper surface 421. The lower surface 422 faces the substrate 51 through a gap (specifically, the space SP1). The lower surface 422 is disposed below the upper surface 421, the inner side surface 423, and the inner side surface 424. The lower surface 422 is disposed below both or one of the first member 41A and the emission surface 32. The height of the lower surface 422 from the substrate 51 is smaller than the height of the lower surface 413 from the substrate 51. The lower surface 422 is lyophilic with respect to the liquid LQ.

  The inner side surface 423 is a plane facing inward. The inner side surface 423 is parallel to the optical axis AX. The inner side surface 423 faces the outer side surface 412 through a gap. The inner side surface 423 is disposed outside the upper surface 421, the lower surface 422, and the inner side surface 424. The inner side surface 423 extends upward from the outer end portion of the upper surface 421. Accordingly, the lower end portion of the inner surface 423 coincides with the outer end portion of the upper surface 421.

  The inner side surface 424 is a plane facing inward. The inner side surface 424 is parallel to the optical axis AX. The inner side surface 424 is disposed inside the upper surface 421, the lower surface 422, and the inner side surface 423. The inner side surface 424 extends downward from the inner end of the upper surface 421. Therefore, the upper end portion of the inner surface 424 coincides with the inner end portion of the upper surface 421. The inner surface 424 extends upward from the inner end of the lower surface 422. Accordingly, the lower end portion of the inner side surface 424 coincides with the inner end portion of the lower surface 422.

  The inner side surface 424 is disposed outside the inner side surface 415. That is, the inner surface 424 is disposed below the lower surface 413, but is not disposed below the emission surface 32. The second member 42A moves so that the inner side surface 424 continues to be arranged outside the inner side surface 415 even when the second member 42A moves to the limit of the movable range. However, even if the second member 42A moves so that a period in which at least a part of the inner side surface 424 is not disposed outside the inner side surface 415 occurs when the second member 42A moves to the limit of the movable range. Good. That is, the second member 42A may be movable so that a part of the second member 42A is located in the optical path AT.

  The second member 42A further includes an opening 426 through which the exposure light EL from the emission surface 32 can pass. Opening 426 is defined at the lower end of inner surface 424. A lower surface 422 is disposed around the lower end portion of the opening 426. That is, the diameter and area of the opening 426 along the XY plane are larger than that of the opening 416. The shape of the opening 426 on the XY plane is, for example, a circular shape (see FIG. 3). The opening 426 has a size that can realize a state in which the opening 416 is disposed on the inner side of the opening 426 even when the second member 42A moves to the limit of the movable range.

  The liquid immersion member 4A further includes a liquid supply port 431, a fluid recovery port 441, and a fluid recovery port 442. Hereinafter, the liquid supply port 431, the fluid recovery port 441, and the fluid recovery port 442 will be described in order.

  First, the liquid supply port 431 will be described.

  The liquid supply port 431 supplies the liquid LQ for forming the immersion space LS to the immersion space LS. The liquid supply port 431 includes a liquid supply port 431a formed on the lower surface 413 and a liquid supply port 431b formed on the inner side surface 411. The liquid supply port 431a is formed so as to face the space SP1, and the liquid supply port 431b is formed so as to face the space SP2.

  As shown in FIG. 2, the supply flow path formed inside the first member 41A is branched halfway to supply the liquid LQ to the liquid supply port 431a and the liquid supply port 431b. However, the supply flow path for supplying the liquid LQ to the liquid supply port 431a and the supply flow for supplying the liquid LQ to the liquid supply port 431b without branching the supply flow path formed inside the first member 41A. You may provide a path | route inside the 1st member 41A separately.

  The liquid supply ports 431a and 431b are formed so as to be intermittently distributed around the terminal optical element 31 (in other words, around the optical path AT). For example, as shown in FIG. 3, the liquid supply ports 431a are arranged at regular intervals or randomly along a virtual circle defined on the lower surface 413 (for example, a virtual circle centered on the optical axis AX). A plurality of them may be formed. For example, a plurality of liquid supply ports 431b may be formed at equal intervals or randomly along the XY plane.

  The liquid supply port 431a is formed on the lower surface 413 so that all of the liquid supply ports 431a formed on the lower surface 413 are disposed inside the opening 426 in a state where the center of the opening 426 coincides with the optical axis AX. Is formed. In a state where the center of the opening 426 coincides with the optical axis AX, the liquid supply port 431a is formed along or adjacent to the inner side surface 424 (opening 426) along a direction parallel to the XY plane.

  The liquid LQ is supplied from the liquid supply ports 431a and 431b under the control of the controller 91. Clean and temperature-adjusted liquid LQ is supplied from liquid supply ports 431a and 431b. The liquid LQ supplied from the liquid supply port 431b is supplied to the space SP2. At least a part of the liquid LQ supplied from the liquid supply ports 431a and 431b is supplied to the space SP1. At least a part of the liquid LQ supplied to the liquid supply ports 431a and 431b is supplied to the optical path space SPK including the optical path ATL, and the optical path ATL is filled with the liquid LQ.

  At least part of the liquid LQ supplied from the liquid supply ports 431a and 431b to the space SP1 may be supplied to the space SP3 between the lower surface 413 and the upper surface 421.

  Next, the fluid recovery port 441 will be described.

  The fluid recovery port 441 recovers the liquid LQ from the immersion space LS (particularly, the space SP1). The fluid recovery port 441 is formed outside the lower surface 422. The fluid recovery port 441 is formed around the lower surface 422. The fluid recovery port 441 is formed so as to face the space SP1. The fluid recovery port 441 is formed to face the substrate 51 through the space SP1.

  The fluid recovery ports 441 are formed so as to be continuously distributed around the last optical element 31 (in other words, around the optical path AT). For example, the fluid recovery ports 441 may be formed so as to be continuously distributed along a virtual circle defined on the lower surface 422 (for example, a virtual circle around the center of the opening 426).

  A porous member 4411 such as a mesh plate is disposed in the fluid recovery port 441. The porous member 4411 includes a lower surface facing the upper surface of the substrate 51, an upper surface facing the fluid recovery path, and a plurality of holes connecting the upper surface and the lower surface. The liquid recovery port 441 recovers the liquid LQ from the immersion space LS (particularly, the space SP1) via the porous member 4411. One of the plurality of holes of the porous member 4411 may be referred to as a fluid recovery port 441.

  From the fluid recovery port 441, the liquid LQ is recovered through the porous member 4411 disposed in the fluid recovery port 441 under the control of the controller 91. For example, the liquid LQ may be recovered from the fluid recovery port 441 by adjusting the difference between the pressure on the upper surface side of the porous member 4411 and the pressure on the lower surface side of the porous member 4411 under the control of the controller 91. .

  Next, the fluid recovery port 442 will be described.

  The fluid recovery port 442 recovers the liquid LQ from the immersion space LS (particularly, the space SP3). The fluid recovery port 442 is formed outside the lower surface 413. The fluid recovery port 442 is formed so as to face the space SP3. The fluid recovery port 442 is formed to face the upper surface 421 through the space SP3. The fluid recovery port 442 is formed outside the liquid supply port 431.

  The second member 42A moves so that the fluid recovery port 442 continues to face the space SP3. The second member 42 </ b> A moves so that the fluid recovery port 442 continues to face the upper surface 421.

  The fluid recovery ports 442 are formed so as to be continuously distributed around the last optical element 31 (in other words, around the optical path AT of the exposure light EL). For example, the fluid recovery ports 442 may be formed so as to be continuously distributed along a virtual circle defined on the lower surface 413 (for example, a virtual circle centered on the optical axis AX). .

  A porous member 4421 such as a mesh plate is disposed at the fluid recovery port 442. One of the plurality of holes of the porous member 4421 may be referred to as a fluid recovery port 442. The porous member 4421 disposed in the fluid recovery port 442 may be the same as the porous member 4411 disposed in the fluid recovery port 441. Therefore, detailed description of the porous member 4421 is omitted for the sake of simplicity.

  From the fluid recovery port 442, the liquid LQ is recovered through the porous member 4421 disposed in the fluid recovery port 442 under the control of the controller 91. For example, the liquid LQ may be recovered from the fluid recovery port 442 by adjusting the difference between the pressure on the upper surface side of the porous member 4421 and the pressure on the lower surface side of the porous member 4421 under the control of the controller 91. .

  In the liquid immersion member 4A of the first embodiment described above, a part of the second member 42A moves in the liquid LQ in the liquid immersion space LS as the second member 42A moves. As a result, the movement of the second member 42A can cause a fluctuation in the pressure of the liquid LQ in the immersion space LS. Such fluctuations in the pressure of the liquid LQ in the immersion space LS can cause fluctuations in the last optical element 31. However, in the first embodiment, since the opening 426 is larger than the opening 416 and the second member 42A does not face the last optical element 31, the pressure of the liquid LQ in the immersion space LS due to the movement of the second member 42 is reduced. The fluctuation is not easily transmitted to the last optical element 31. As a result, the fluctuation of the last optical element 31 is suitably suppressed.

  In the liquid immersion member 4A of the first embodiment, a part of the interface LG of the liquid LQ in the liquid immersion space LS is formed between the second member 42A and the substrate 51. Hereinafter, the interface LG formed between the second member 42A and the substrate 51 is appropriately referred to as “interface LG1”.

  Further, a part of the interface LG of the liquid LQ in the immersion space LS is formed between the terminal optical element 31 and the first member 41A. Hereinafter, the interface LG formed between the terminal optical element 31 and the first member 41A is appropriately referred to as “interface LG2”.

  A part of the interface LG of the liquid LQ in the immersion space LS is formed between the first member 41A and the second member 42A. Hereinafter, the interface LG formed between the first member 41A and the second member 42A is appropriately referred to as “interface LG3”. Since the liquid LQ in the space SP3 is recovered from the fluid recovery port 442, the interface LG3 is a space outside the liquid recovery port 442 (for example, a space between the outer surface 412 and the inner surface 423). It is suppressed that it moves to. Accordingly, there is little or no liquid LQ in the space between the outer surface 412 and the inner surface 423. As a result, the space between the outer side surface 412 and the inner side surface 423 becomes a gas space corresponding to a part of the space CS. For this reason, the second member 42A can move relatively smoothly.

  In the first embodiment, as described above, since the liquid supply port 431a is formed on the lower surface 422 of the first member 41A, the movement of the interface LG1 to the region inside the opening 426 is suppressed. Therefore, formation of a gas portion in the optical path AT is prevented, and the optical path AT can be continuously filled with the liquid LQ.

  Hereinafter, suppression of the movement of the interface LG1 to the region inside the opening 426 will be described with reference to FIG. FIG. 4 is an explanatory diagram showing an example of the state of the interface LG1 when the second member 42A moves in the + Y-axis direction on a plan view of the liquid immersion member 4A observed from the lower side (−Z-axis direction side). FIG.

  As shown in FIG. 4A, a state where the center of the opening 426 coincides with the center of the opening 416 (that is, the optical axis AX) is illustrated as an initial state of the liquid immersion member 4A. In the liquid immersion member 4A in the initial state, the distance between the opening 426 and the interface LG1 indicated by the alternate long and short dash line is relatively large.

  In the state shown in FIG. 4B, the distance between a part of the interface LG1 and the opening 426 is relatively small on the + Y-axis direction side of the opening 416 in the state shown in FIG. 4B. (Refer to a portion surrounded by a dotted-line ellipse in FIG. 4B). If at least a part of the interface LG1 moves to the inside of the opening 426, bubbles may be mixed into at least one of the space SP2, the space SP3, and the optical path space SPK.

  However, as shown in FIG. 4B, in the first embodiment, even when the second member 42A moves, the liquid supply port 431a supplies the liquid LQ to the space SP1, At least a part of the interface LG1 can be pushed outward. As a result, even when the second member 42A moves, the distance between the interface LG1 and the opening 426 becomes relatively large. Or the movement of the interface LG1 to the area | region inside the opening 426 is suppressed because the liquid supply port 431a supplies the liquid LQ with respect to space SP1. For this reason, the occurrence of bubbles mixed into at least one of the space SP2 and the space SP3 and the optical path space SPK is suppressed, and the optical path AT can be continuously filled with the liquid LQ.

  In addition, suppression of the movement of the interface LG1 to the region inside the opening 426 is realized by at least a part of the liquid supply port 431a supplying the liquid LQ to the space SP1 (that is, facing the space SP1). Is as described above. In consideration of this, the liquid supply port 431a is at a position where all of the liquid supply ports 431a can face the space SP1 even when the second member 42A moves to the limit of the movable range. It may be formed. For example, the inner side surface 415 (opening 416) is such that all of the liquid supply ports 431a are located inside the opening 426 regardless of which direction the second member 42A moves to the limit of the movable range. The liquid supply port 431a may be formed on the lower surface 413 along or adjacent to the lower surface 413.

  The liquid immersion member 4A described with reference to FIGS. 2 and 3 is an example. Therefore, the configuration of the liquid immersion member 4A is not limited to the configuration using FIG. 2 and FIG. Hereinafter, an example of modification of a part of the configuration of the liquid immersion member 4A will be described.

  The first member 41 </ b> A may not have a shape that can surround both or one of the optical path AT and the terminal optical element 31. For example, the first member 41 </ b> A is disposed in a part of the periphery of both or one of the optical path AT and the terminal optical element 31, while the other part of the periphery of both or one of the optical path AT and the terminal optical element 31. It may have a shape (for example, an open loop shape in which a part thereof is opened) that is not arranged in the shape.

  In addition to the support member described above, the first member 41A may be supported by the device frame 38 via a vibration isolator disposed between the support member and the device frame 38. In this case, the vibration isolator may include a spring device, similar to the above-described vibration isolator 39.

  At least a part of the first member 41 </ b> A may be a movable member that can be moved by an operation of a driving device (for example, an actuator) controlled by the controller 91. The drive device may move at least a part of the first member 41A by moving the support member that supports the first member 41A. The drive device may be disposed between the support member that supports the first member 41 </ b> A and the device frame 38. In addition, a vibration isolator may be disposed between the support member that supports the first member 41A and the apparatus frame 38, and a drive mechanism may be mounted on the vibration isolator.

  The entire inner surface 411 may be a plane parallel to the outer surface 33. The entire inner surface 411 may be inclined with respect to the outer surface 33. The entire inner side surface 411 may be inclined to the XY plane. At least a part of the inner side surface 411 may be a curved surface.

  A part of the outer side surface 412 may be disposed inside at least one of the inner side surface 411, the lower surface 413, the upper surface 414, and the inner side surface 415. At least a part of the outer side surface 412 may be inclined with respect to the optical axis AX. At least a part of the outer side surface 412 may be a curved surface.

  A part of the lower surface 413 may be disposed above at least one of the inner surface 411, the outer surface 412, the upper surface 414, and the inner surface 415. At least a part of the lower surface 413 may be disposed above the emission surface 32. At least a part of the lower surface 413 may be inclined with respect to the XY plane. At least a part of the lower surface 413 may be a curved surface. At least a part of the lower surface 413 may have liquid repellency with respect to the liquid LQ.

  A part of the upper surface 414 may be disposed below the lower surface 413. A part of the upper surface 414 may be disposed outside the inner side surface 411. At least a portion of the upper surface 414 may be disposed above the emission surface 32. The upper surface 414 may not face the emission surface 32 along a direction parallel to the optical axis AX. At least a part of the upper surface 414 may not be disposed below the emission surface 32. At least a part of the upper surface 414 may be inclined with respect to the XY plane. At least a part of the upper surface 414 may be inclined with respect to the lower surface 413. At least a part of the upper surface 414 may be a curved surface.

  A part of the inner surface 415 may be disposed outside at least one of the inner surface 411, the outer surface 412, the lower surface 413, and the upper surface 414. At least a part of the inner side surface 415 may be inclined with respect to the optical axis AX. For example, the inner surface 415 may be an inclined surface that extends upward and outward from the inner end of the lower surface 413 toward the inner end of the upper surface 414. At least a part of the inner side surface 415 may be a curved surface.

  The center of the opening 416 may not coincide with the optical axis AX. At least one of the diameter and the area of the opening 416 in the XY plane may be larger than that of the emission surface 32 or may be the same.

  The shape of the opening 416 on the XY plane is an arbitrary shape different from the rectangular shape (for example, a polygon, a circle, an ellipse, or an arbitrary shape that hardly or at all prevents smooth passage of the exposure light EL). ). Each surface (for example, the inner surface 411, the outer surface 412, the lower surface 413, the upper surface 414, and the inner surface 415) of the first member 41A on the XY plane, or each end portion (for example, the outer end portion and the inner end portion) of each surface. In addition, the shape of the upper end portion and the lower end portion) may also be a rectangular shape or an arbitrary shape different from the rectangular shape.

  The second member 42A may not have a shape that can surround the optical path AT. For example, the second member 42A is disposed in a part of the periphery of the optical path AT, but has a shape that is not disposed in the other part of the periphery of the optical path AT (for example, an open loop with a part opened). The shape may be

  In addition to or instead of moving along each of the X-axis direction and the Y-axis direction, the second member 42A is in the X-axis direction, the Y-axis direction, and the Z-axis direction, and the θX direction, the θY direction, and the θZ direction. You may move along at least one of them.

  At least a part of the upper surface 421 may be disposed above both or one of the first member 41A and the emission surface 32. At least a part of the upper surface 421 may face the emission surface 32 along a direction parallel to the optical axis AX. At least a part of the upper surface 421 may be inclined with respect to the XY plane. At least a part of the upper surface 421 may be a curved surface. At least a part of the upper surface 421 may be lyophilic with respect to the liquid LQ.

  A part of the lower surface 422 may be disposed above at least one of the upper surface 421, the inner side surface 423, and the inner side surface 424. At least a part of the lower surface 422 may be disposed above both or one of the first member 41A and the emission surface 32. The height of at least a part of the lower surface 422 from the substrate 51 may be the same as the height of the lower surface 413 from the substrate 51. The height of at least a part of the lower surface 422 from the substrate 51 may be smaller than the height of the lower surface 413 from the substrate 51. At least a part of the lower surface 422 may be inclined with respect to the XY plane. At least a part of the lower surface 422 may be inclined with respect to the upper surface 421. At least a part of the lower surface 422 may be a curved surface. At least a part of the lower surface 422 may have liquid repellency with respect to the liquid LQ.

  The size of the space SP3 between the upper surface 421 and the lower surface 413 in the Z-axis direction (that is, the distance between the upper surface 421 and the lower surface 413 along the Z-axis direction) is the optical path of the exposure light EL from the emission surface 32. It may be equal to or smaller than the size of the optical path space SPK including the ATL in the Z-axis direction (that is, the distance between the emission surface 32 and the upper surface of the substrate 51 along the Z-axis direction). The size of the space SP1 between the lower surface 422 and the substrate 51 in the Z-axis direction may be smaller than the size of the optical path space SPK in the Z-axis direction. However, the size of the space SP1 between the lower surface 422 and the substrate 51 in the Z-axis direction may be greater than or equal to the size of the optical path space SPK in the Z-axis direction. Furthermore, the size of the space SP1 between the lower surface 422 and the substrate 51 in the Z-axis direction is larger than the size of the space SP3 in the Z-axis direction. However, the size of the space SP1 between the lower surface 422 and the substrate 51 in the Z-axis direction may be equal to or smaller than the size of the space SP3 in the Z-axis direction.

  A part of the inner side surface 423 may be disposed inside at least one of the upper surface 421, the lower surface 422, and the inner side surface 424. At least a part of the inner surface 423 may be inclined with respect to the optical axis AX. At least a part of the inner surface 423 may be a curved surface.

  A part of the inner surface 424 may be disposed outside at least one of the upper surface 421, the lower surface 422, and the inner surface 423. At least a part of the inner surface 424 may be inclined with respect to the optical axis AX. For example, the inner surface 424 may be an inclined surface that extends upward and outward from the inner end of the lower surface 422 toward the inner end of the upper surface 421. At least a part of the inner surface 424 may be a curved surface.

  At least one of the diameter and area of the opening 426 in the XY plane may be smaller than or the same as that of the opening 416.

  The shape of the opening 426 on the XY plane is an arbitrary shape different from the circular shape (for example, a polygon, an ellipse, or an arbitrary shape that hardly or at all prevents smooth passage of the exposure light EL). There may be. Each surface (for example, the upper surface 421, the lower surface 422, the inner side surface 423 and the inner side surface 424) of the second member 42A on the XY plane, or each end portion (for example, the outer end portion and the inner end portion, and the upper side) The shape of the end portion and the lower end portion may also be a circular shape or an arbitrary shape different from the circular shape.

  Even if the opening 426 moves to the limit of the movable range of the second member 42 </ b> A, the opening 426 may not have a size that can realize a state in which the opening 426 is arranged outside the opening 416. For example, when the second member 42A moves to the limit of the movable range, the opening 416 and the opening 426 are configured such that a part of the lower end portion of the inner surface 424 that defines the opening 426 is the inner surface that defines the opening 416. You may have the size which can implement | achieve the state arrange | positioned inside 415 lower side edge part. For example, the opening 426 may have a size that can realize a state in which a part of the second member 42A is disposed on the optical path AT when the second member 42A moves to the limit of the movable range. .

  The liquid supply port 431b may be formed so as to face the optical path space SPK. The liquid supply port 431b may be formed on any surface of the first member 41A that may face the immersion space LS in addition to or instead of the inner surface 411.

  In addition to or instead of the first member 41A, a liquid supply port for supplying the liquid LQ may be formed on any surface of the second member 42A that may face the immersion space LS. Such a liquid supply port may be provided on one or both of the upper surface 421 and the lower surface 422, for example.

  Both or one of the liquid supply ports 431a and 431b may be formed so as to be continuously distributed around the terminal optical element 31. Both or one of the liquid supply ports 431a and 431b may be a single liquid supply port.

  In a state where the center of the opening 426 coincides with the optical axis AX, at least a part of the liquid supply port 431a may be formed in a region outside the inner side surface 424 (opening 426). For example, at least a part of the liquid supply port 431a may be formed at an arbitrary position that is not related to or lightly related to the position of the inner side surface 424 (opening 426).

  At least a part of the lower surface of the porous member 4411 may be disposed above the lower surface 422. At least a part of the lower surface of the porous member 4411 may be disposed below the lower surface 422. At least a part of the lower surface of the porous member 4411 may be disposed at the same height as the lower surface 422.

  The lower surface of the porous member 4411 may be parallel to the lower surface 422. However, at least a part of the lower surface of the porous member 4411 may be inclined with respect to the lower surface 422. For example, the lower surface of the porous member 4411 may be an inclined surface extending upward from the inner end portion and outward. The lower surface of the porous member 4411 may be a flat surface. However, at least a part of the lower surface of the porous member 4411 may be a curved surface.

  The second member 42A may move such that a period in which the fluid recovery port 442 does not face the space SP3 occurs. The second member 42A may move so that a period in which the fluid recovery port 442 does not face the upper surface 421 occurs.

  The porous member 4411 may not be disposed in the fluid recovery port 441. The porous member 4421 may not be disposed in the fluid recovery port 442.

  Both or one of the fluid recovery port 441 and the fluid recovery port 442 may be formed so as to be intermittently distributed around the terminal optical element 31. For example, a plurality of fluid recovery ports 441 may be formed at equal intervals or randomly along a virtual circle defined on the lower surface 422 (for example, a virtual circle centered on the optical axis AX). Good. For example, a plurality of fluid recovery ports 442 may be formed at equal intervals or randomly along a virtual circle defined on the lower surface 413 (for example, a virtual circle around the center of the opening 426). . Instead of a plurality of fluid recovery ports 441, a single fluid recovery port 441 may be formed. Instead of the plurality of fluid recovery ports 442, a single fluid recovery port 442 may be formed.

  From both or one of the fluid recovery port 441 and the fluid recovery port 442, the gas may not be recovered while the liquid LQ is recovered. An example of a technique for recovering liquid through a fluid recovery port in which a porous member is disposed but not recovering gas is disclosed in, for example, US Pat. No. 7,292,313. However, both the liquid LQ and the gas may be recovered from both or one of the fluid recovery port 441 and the fluid recovery port 442.

  The supply of the liquid LQ from both or one of the liquid supply ports 431a and 431b and the recovery of the liquid LQ from both or one of the fluid recovery port 441 and the fluid recovery port 442 may be performed in parallel. However, the supply of the liquid LQ from both or one of the liquid supply ports 431a and 431b, the recovery of the liquid LQ from the fluid recovery port 441, and the recovery of the liquid LQ from the fluid recovery port 442 are not performed in parallel. May be.

  The second member 42A may move during at least a part of the period in which the liquid LQ is supplied from both or one of the liquid supply ports 431a and 431b. The second member 42A may move during at least a part of the period in which the liquid LQ is not supplied from both or one of the liquid supply ports 431a and 431b. The second member 42A may move during at least a part of the period in which the liquid LQ is recovered from the fluid recovery port 441. However, the second member 42A may move during at least a part of the period in which the liquid LQ is not recovered from the fluid recovery port 441. The second member 42A may move during at least a part of the period in which the liquid LQ is recovered from the fluid recovery port 442. However, the second member 42A may move during at least a part of the period in which the liquid LQ is not recovered from the fluid recovery port 442.

  The lower surface 422 of the second member 42A does not collect the liquid LQ. Accordingly, the lower surface 422 holds the liquid LQ with the substrate 51. The upper surface 421, the inner side surface 423, and the inner side surface 424 of the second member 42A also do not collect the liquid LQ.

  The lower surface 413 of the first member 41A does not collect the liquid LQ. Accordingly, the lower surface 413 holds the liquid LQ between the upper surface 421 and the substrate 51. The inner surface 411, the outer surface 412, the upper surface 414, and the inner surface 415 of the first member 41A also do not collect the liquid LQ.

(1-2-2) Specific Example of Movement Operation of Second Member 42A Next, a specific example of the movement operation of the second member 42A will be described with reference to FIGS. FIG. 5 is a cross-sectional view showing a first specific example of the moving operation of the second member 42A. FIG. 6 is a cross-sectional view showing a second specific example of the moving operation of the second member 42A. 5 and 6, some of the constituent requirements of the liquid immersion member 4A shown in FIG. 2 are omitted for simplification of the drawing.

  In the first embodiment, the second member 42 </ b> A moves based on the movement mode of the substrate 51. In other words, the second member 42 </ b> A moves in a movement manner that is determined based on the movement manner (for example, at least one of the movement direction, the movement speed, the acceleration, and the movement distance) of the substrate 51. However, the second member 42 </ b> A may move independently of the movement of the substrate 51.

  For example, the second member 42A may move so that the absolute value of the relative speed of the substrate 51 with respect to the second member 42A becomes small. The second member 42A may move so that the absolute value of the relative speed of the substrate 51 with respect to the second member 42A is smaller than when the second member 42A does not move.

  For example, the second member 42A may move so that the absolute value of the relative acceleration of the substrate 51 with respect to the second member 42A is small. The second member 42A may move so that the absolute value of the relative acceleration of the substrate 51 with respect to the second member 42A is smaller than when the second member 42A does not move.

  As described above, the second member 42A moves by the operation of the driving device 451 controlled by the controller 91. Therefore, the movement of the second member 42 </ b> A described below is realized by the control of the controller 91.

  The relative speed of the substrate 51 with respect to the second member 42A when the second member 42A does not move substantially matches the relative speed of the substrate 51 with respect to the first member 41A. Accordingly, the second member 42A may move so that the absolute value of the relative speed of the substrate 51 with respect to the second member 42A is smaller than the absolute value of the relative speed of the substrate 51 with respect to the first member 41A. Similarly for the relative acceleration, the second member 42A moves so that the absolute value of the relative acceleration of the substrate 51 relative to the second member 42A is smaller than the absolute value of the relative acceleration of the substrate 51 relative to the first member 41A. Also good.

  In order to reduce the absolute value of the relative velocity and / or relative acceleration of the substrate 51 with respect to the second member 42A, the second member 42A may move in the same direction as the direction in which the substrate 51 moves. .

  For example, as shown in FIG. 5, when the substrate 51 moves in the + X axis direction, the second member 42A may move in the + X axis direction. Here, it is assumed that the moving speed of the substrate 51 along the X-axis direction is + V51, and the moving speed of the second member 42A along the X-axis direction is + V42. The absolute value of the relative speed of the substrate 51 with respect to the second member 42A when the second member 42A does not move is | V51 |. On the other hand, the relative speed of the substrate 51 with respect to the second member 42A when the second member 42A moves is | V51−V42 | (<| V51 |). Therefore, when the second member 42A moves, the relative speed of the substrate 51 with respect to the second member 42A becomes smaller than when the second member 42A does not move. The relative acceleration of the substrate 51 with respect to the second member 42A is the same as the relative speed of the substrate 51 with respect to the second member 42A.

  For example, as illustrated in FIG. 6, when the substrate 51A moves in the −X axis direction, the second member 42A may move in the −X axis direction. Here, it is assumed that the moving speed along the X-axis direction of the substrate 51 is −V51, and the moving speed along the X-axis direction of the second member 42A is −V42. When the second member 42 does not move, the absolute value of the relative speed of the substrate 51 with respect to the second member 42 is | −V51 |. On the other hand, the relative speed of the substrate 51 with respect to the second member 42 when the second member 42A moves is | −V51 + V42 | (<| −V51 |). Therefore, when the second member 42A moves, the relative speed of the substrate 51 with respect to the second member 42A becomes smaller than when the second member 42A does not move. The relative acceleration of the substrate 51 with respect to the second member 42A is the same as the relative speed of the substrate 51 with respect to the second member 42A.

  When the substrate 51 moves in the + Y axis direction, the second member 42A may move in the + Y axis direction. When the substrate 51 moves in the −Y axis direction, the second member 42A may move in the −Y axis direction. When the substrate 51 moves in a predetermined direction in the XY plane, the second member 42A may move in the predetermined direction.

  The second member 42A may move so that the absolute value of the velocity component along the moving direction of the substrate 51 out of the relative velocity of the substrate 51 with respect to the second member 42A becomes small. The second member 42A moves so that the absolute value of the velocity component along the moving direction of the substrate 51 out of the relative velocity of the substrate 51 with respect to the second member 42A is smaller than when the second member 42A does not move. May be.

  The second member 42A may move so that the absolute value of the acceleration component along the moving direction of the substrate 51 in the relative acceleration of the substrate 51 with respect to the second member 42A becomes smaller. The second member 42A moves so that the absolute value of the acceleration component along the moving direction of the substrate 51 out of the relative acceleration of the substrate 51 with respect to the second member 42A is smaller than when the second member 42A does not move. May be.

  The second member 42A may move further in the direction intersecting or orthogonal to the direction in which the substrate 51 moves while moving in the same direction as the direction in which the substrate 51 moves. In other words, when the second member 42A reduces the absolute value of either or both of the relative speed and relative acceleration of the substrate 51 with respect to the second member 42A, the second member 42A includes any component in the XY plane that includes a component in the direction in which the substrate 51 moves. You may move in the direction. For example, when the substrate 51 moves in the + X axis direction, the second member 42A may move in the + Y axis direction or the −Y axis direction while moving in the + X axis direction.

As described above, in the first embodiment, the second member 42A is movable so as to decrease the absolute value of both or one of the relative velocity and relative acceleration of the substrate 51 with respect to the second member 42A. Therefore, even if the substrate 51 moves at a relatively high speed in the state where the immersion space LS is formed, a part of the liquid LQ forming the immersion space LS is separated on the substrate 51 and the separation is performed. The liquid LQ (droplet or the like) left on the substrate 51 is suppressed. Further, even when the substrate 51 moves at a relatively high speed in the state where the immersion space LS is formed, the generation of bubbles in the immersion space LS is suppressed. Therefore, the occurrence of defective exposure and the occurrence of defective devices are suppressed.
(1-3) Exposure Method of Substrate 51 by Exposure Apparatus EX1 Subsequently, an exposure method of the substrate 51 by the exposure apparatus EX1 will be described with reference to FIGS.

  Prior to the exposure process in which the exposure apparatus EX1 exposes the substrate 51, first, the controller 91 controls the drive system 82 so that the substrate stage 5 moves to the substrate exchange position away from the liquid immersion member 4A. Thereafter, the controller 91 carries in the substrate 51 before exposure to the substrate stage 5 located at the substrate exchange position (that is, controls a substrate carry-in device (not shown) to carry in).

  While the substrate stage 5 is located at the substrate replacement position away from the liquid immersion member 4A, the controller 91 is positioned so that the measurement stage 6 faces the terminal optical element 31 and the liquid immersion member 4A along the Z-axis direction. The drive system 82 is controlled to move. In the period in which the measurement stage 6 is disposed at a position facing the terminal optical element 31 and the liquid immersion member 4A along the Z-axis direction, exposure is performed via the liquid LQ by the measurement member 61 held by the measurement stage 6. Measurement for receiving the light EL may be performed.

  After the substrate 51 before the exposure is held by the substrate stage 5, the controller 91 has the substrate stage in which the substrate 51 before the exposure is loaded at a position facing the terminal optical element 31 and the liquid immersion member 4 </ b> A along the Z-axis direction. 5 is moved.

  Note that the immersion space LS continues to be formed between the substrate stage 5 or the measurement stage 6 and the last optical element 31 while the above operation is performed.

  Next, the controller 91 starts an exposure process for the substrate 51. Specifically, the illumination system 2 irradiates the mask 11 with the exposure light EL under the control of the controller 91. The exposure light EL from the mask 11 is projected onto the substrate 51 through the projection optical system 3 and the immersion space LS. As a result, the image of the device pattern formed on the mask 11 is projected onto the substrate 51, and the substrate 51 is exposed.

  In the first embodiment, the exposure apparatus EX1 is a scanning exposure apparatus (so-called scanning stepper) that moves both the mask 11 and the substrate 51 along a predetermined scanning direction (scanning direction) during exposure. In the first embodiment, it is assumed that the scanning direction of the mask 11 and the scanning direction of the substrate 51 are both in the Y-axis direction. Accordingly, the controller 91 moves the substrate 51 along the Y-axis direction with respect to the projection region PR on which the exposure light EL is projected. The controller 91 moves the mask 11 along the Y-axis direction with respect to the illumination region IR irradiated with the exposure light EL.

  Here, the manner of movement of the substrate 51 will be described with reference to FIG. FIG. 7 is a plan view showing an example of the substrate 51 held on the substrate stage 5.

  For example, when performing an exposure process on a certain shot area S1, the controller 91 projects the projection area PR on which the exposure light EL is projected in a state where the immersion space LS is formed above the shot area S1. The substrate 51 is moved along the Y-axis direction. Further, the controller 91 moves the mask 11 along the Y-axis direction with respect to the illumination region IR irradiated with the exposure light EL. In parallel with the movement of the substrate 51 and the mask 11, the illumination system 2 irradiates the mask 11 with the exposure light EL. As a result, the shot area S1 is exposed by the exposure light EL projected through the projection optical system 3 and the immersion space LS.

  When the shot area S1 reaches the exposure end position, the exposure process for the shot area S1 ends. After the exposure process for the shot area S1 is completed, in order to start the exposure process for the next shot area S2 (for example, the shot area S2 adjacent to the shot area S1 on the + X axis direction side), the next shot area S2 is An operation of moving to the exposure start position is performed. Specifically, in the state where the immersion space LS is formed, the controller 91 is inclined with respect to a direction intersecting with the Y-axis direction (for example, the X-axis direction or each of the X-axis direction and the Y-axis direction). The substrate 51 is moved along the direction). While the operation of moving the next shot area S2 to the exposure start position is being performed, the illumination system 2 does not irradiate the mask 11 with the exposure light EL. When the next shot area S2 reaches the exposure start position, the exposure light EL exposure process for the shot area S2 starts in the same manner as the exposure light EL exposure process for the shot area S1. Thereafter, the same operation is performed on a plurality of shot areas on the substrate 51.

  In the following description, in order to perform the exposure process on the shot area S, an operation of moving the substrate 51 along the Y axis direction so that the shot area S moves along the Y axis direction with respect to the projection area PR. This is referred to as “scan movement operation” as appropriate. The scan movement operation includes an operation of moving the substrate 51 along the Y-axis direction from the state where the shot area S is located at the exposure start position to the state where the shot area S is located at the exposure end position. You may go out. The scan movement operation mainly includes an operation of moving the substrate 51 at a constant speed along the Y-axis direction. However, the scan movement operation may include an operation of accelerating / decelerating the substrate 51 along the Y-axis direction. As described above, the illumination system 2 irradiates the mask 11 with the exposure light EL while the scan movement operation is performed. While the scan movement operation is performed, the immersion space LS may be formed or may continue to be formed.

  On the other hand, in order to start the exposure process for the next shot area S after the exposure process for a certain shot area S is completed, the substrate 51 is crossed in the Y-axis direction so that the next shot area S moves to the exposure start position. The operation of moving along the direction is appropriately referred to as “step movement operation”. The step movement operation is performed along the direction in which the substrate 51 is crossed in the Y-axis direction from the state where the shot area S is located at the exposure end position to the state where the next shot area S is located at the exposure start position. The movement may be included. The step movement operation mainly includes an operation of accelerating / decelerating the substrate 51 along the direction intersecting the Y-axis direction. For example, the step movement operation may include both or one of the operation of accelerating / decelerating the substrate 51 along the X-axis direction and the operation of accelerating / decelerating the substrate 51 along the Y-axis direction. However, the step movement operation may include an operation of moving the substrate 51 at a constant speed along the direction intersecting the Y-axis direction. As described above, the illumination system 2 does not irradiate the mask 11 with the exposure light EL while the step movement operation is performed. While the step movement operation is performed, the immersion space LS may be formed or may continue to be formed.

  The exposure start position passes through one end of the shot area S along the Y-axis direction (for example, the rear end along the movement direction of the projection area PR) and the front end of the projection area RP passes through. The position of the certain shot region S at the time (in other words, the position of the substrate 51) may be included. As for the exposure end position, the rear end of the projection area RP passes through the other end (for example, the front end along the movement direction of the projection area PR) of the certain shot area S. The position of the certain shot region S at the time (in other words, the position of the substrate 51) may be included.

  In the following description, a period during which the scan movement operation is performed in order to perform an exposure process on a certain shot area S is appropriately referred to as a “scan movement period”. On the other hand, a period in which the step movement operation is performed in order to start the exposure process for the next shot area S after the exposure process for a certain shot area S is appropriately referred to as a “step movement period”.

  The controller 91 repeatedly performs the scan movement operation and the step movement operation alternately. As a result, exposure processing for a plurality of shot regions S on the substrate 51 is sequentially performed.

  When performing the exposure process for the plurality of shot regions S, the controller 91 may move the substrate 51 based on the exposure conditions for the plurality of shot regions S. For example, the controller 91 determines at least one of the movement conditions (for example, movement speed, acceleration, movement distance, movement direction, and movement locus in the XY plane) based on the exposure conditions of the plurality of shot regions S. ) May be adjusted. For example, as illustrated in FIG. 7, the controller 91 may move the substrate 51 based on the exposure conditions so that the projection region PR moves relative to the substrate 51 along the movement locus Sr. .

  The exposure conditions for the plurality of shot areas S are defined in, for example, exposure control information called an exposure recipe. The exposure control information is stored in the memory 92, for example. The exposure conditions specified by the exposure control information may include, for example, arrangement information of a plurality of shot areas S (for example, respective positions of the plurality of shot areas S). The exposure conditions specified by the exposure control information may include, for example, the sizes of the plurality of shot areas S (for example, the lengths of the plurality of shot areas S in the Y-axis direction).

  As shown in FIG. 6, at least a part of the immersion space LS may be formed on the upper surface 52 during at least a part of the scan movement period and the step movement period. The liquid immersion space LS may be formed so as to straddle the substrate 51 and the upper surface 52 during at least a part of the scan movement period and the step movement period. When the exposure process for the substrate 51 is performed in a state where the measurement stage 6 is adjacent to or in contact with the substrate stage 5, at least part of the immersion space LS during the scan movement period and the step movement period. A part may be formed so as to straddle the substrate stage 5 and the measurement stage 6.

  The second member 42A may move during at least a part of the step movement period. Even if the second member 42A moves during at least a part of the period in which the illumination system 2 does not irradiate the exposure light EL (that is, the exposure light EL is not emitted from the last optical element 31). Good. The second member 42A may move during at least a part of the period in which the substrate 51 moves along the X-axis direction. However, the second member 42A may not move during the step movement period. The second member 42A may not move during a period in which the illumination system 2 is not irradiating the exposure light EL. The second member 42A may not move during the period in which the substrate 51 moves along the X-axis direction.

  The second member 42A may move during at least a part of the scan movement period. Even if the second member 42A moves during at least a part of the period in which the illumination system 2 irradiates the exposure light EL (that is, the exposure light EL is emitted from the last optical element 31). Good. The second member 42A may move during at least a part of the period in which the substrate 51 moves along the Y-axis direction. However, the second member 42A may not move during the scan movement period. The second member 42A may not move during the period in which the illumination system 2 irradiates the exposure light EL. The second member 42A may not move during the period in which the substrate 51 moves along the Y-axis direction.

  Based on such a movement operation of the second member 42A, with reference to FIGS. 8 to 12, an example of a specific movement operation of the substrate 51 and an example of a specific movement operation of the second member 42A The relationship will be described. FIG. 8 is a plan view showing a specific example of the movement locus Sr of the projection region PR and the movement locus Sr ′ of the second member 42A. 9 to 11 are plan views showing the moving operation of the second member 42A when the substrate 51 and the second member 42A move in the manner shown in FIG. FIG. 12 is a graph showing the moving speeds of the substrate 51 and the second member 42A when the substrate 51 and the second member 42A move in the manner shown in FIG.

  As shown in FIG. 8A, an example in which exposure processing is performed on two shot regions S adjacent to each other along the X-axis direction (that is, the shot region Sa and the shot region Sb) will be described. In this case, the controller 91 moves the substrate 51 so that the projection region PR moves relative to the substrate 51 along the movement locus Sr indicated by the solid line.

  Specifically, the controller 91 moves the projection region PR along the path Tp1 from the + Y-axis direction end portion d1 on the shot region Sa to the −Y-axis direction end portion d2 on the shot region Sa. The substrate 51 is moved so as to move relative to the substrate 51. That is, when the projection region PR moves relative to the substrate 51 along the path Tp1, the controller 91 moves the substrate 51 along the Y-axis direction (for example, toward the + Y-axis direction). Perform scan movement. Accordingly, the shot area Sa is exposed while the projection area PR moves relative to the substrate 51 along the path Tp1.

  Thereafter, the controller 91 causes the projection region PR to be relatively relative to the substrate 51 along a path Tp2 from the end position d2 on the shot area Sa to the end position d3 on the −Y axis direction side on the shot area Sb. The substrate 51 is moved so as to move. That is, when the projection region PR moves relative to the substrate 51 along the path Tp2, the controller 91 performs a step movement operation for moving the substrate 51 along the direction intersecting the Y-axis direction. While the projection region PR moves relative to the substrate 51 along the path Tp2, the substrate 51 is not exposed. For example, during the period in which the projection region PR moves from the end position d2 to the intermediate position d2.5 in FIG. 8A, the controller 91 moves the substrate 51 in the −X-axis direction and the + Y-axis. Move in the direction. Further, during the period in which the projection region PR moves from the intermediate position d2.5 to the end position d3 in FIG. 8A, the controller 91 moves the substrate 51 in the −X axis direction and −Y Move in the axial direction.

  Thereafter, the controller 91 moves the projection area PR relative to the substrate 51 along a path Tp3 from the end position d3 on the shot area Sb to the end position d4 on the + Y-axis direction side on the shot area Sb. Then, the substrate 51 is moved. That is, when the projection region PR moves relative to the substrate 51 along the path Tp3, the controller 91 moves the substrate 51 along the Y-axis direction (for example, toward the −Y-axis direction). A scan movement operation is performed. Therefore, the shot area Sb is exposed while the projection area PR moves relative to the substrate 51 along the path Tp3.

  Thereafter, the controller 91 moves the projection area PR relative to the substrate 51 along a path Tp4 from the end position d4 on the shot area Sb to the end position d5 on the + Y-axis direction side on the shot area Sc. Then, the substrate 51 is moved. That is, when the projection region PR moves relative to the substrate 51 along the path Tp4, the controller 91 performs a step movement operation for moving the substrate 51 along the direction intersecting the Y-axis direction. Accordingly, the substrate 51 is not exposed while the projection region PR moves relative to the substrate 51 along the path Tp4. For example, during the period in which the projection region PR moves from the end position d4 to the intermediate position d4.5 in FIG. 8A, the controller 91 moves the substrate 51 in the −X axis direction and −Y Move in the axial direction. Further, during the period in which the projection region PR moves from the intermediate position d4.5 to the end position d5 in FIG. 8A, the controller 91 moves the substrate 51 in the −X-axis direction and the + Y-axis. Move in the direction.

  After the projection area PR is positioned at the end position d5 on the shot area Sc, the same operation as that performed until the projection area PR reaches the end position d5 from the end position d1 is repeated.

  8A, when the substrate 51 sequentially moves along the path Tp1, the path Tp2, the path Tp3, and the path Tp4, the second member 42A has a path Tp1 ′, The route Tp2 ′, the route Tp3 ′, and the route Tp4 ′ are sequentially moved. Hereinafter, the route Tp1 ', the route Tp2', the route Tp3 ', and the route Tp4' will be described in order.

  First, when the scan movement operation in which the projection region PR moves along the path Tp1 is performed, the second member 42A moves along the path Tp1 'from the position d1' to the position d2 '.

  The position d1 'indicates the relative position of the center of the second member 42A (for example, the center of the opening 426) with respect to the projection region PR when the projection region PR is located at the end position d1. For example, the position d1 'is a position shifted from the projection region PR in the -X axis direction and the -Y axis direction as shown in FIG.

  The position d2 'indicates the relative position of the center of the second member 42A with respect to the projection region PR when the projection region PR is located at the end position d2. For example, the position d2 ′ is a position shifted from the projection region PR in the + X axis direction and the + Y axis direction as shown in FIG. 9C.

  The path Tp1 'includes a path Tp1_1' from the position d1 'to the position d1.5'. The path Tp1_1 'is a path that includes a component toward the + X-axis direction but does not include a component that moves along the Y-axis direction. The path Tp1_1 ′ is a path that includes a component that moves in the direction opposite to the movement direction of the substrate 51 during the step movement operation, but does not include a component that moves along the movement direction of the substrate 51 during the scan movement operation.

  The path Tp1 'further includes a path Tp1_2' from the position d1.5 'to the position d2'. The path Tp1_2 'is a path including a component toward the + X axis direction and a component toward the + Y axis direction. The path Tp1_2 'is a path that includes a component that travels in the direction of movement of the substrate 51 during the scan movement operation and a component that travels in the direction opposite to the movement direction of the substrate 51 during the step movement operation.

  The position d1.5 ′ is the start point of the path Tp1_2 ′, the position d1.5 ′ is a position between the position d1 ′ and the position d2 ′, and the second member 42A is Y during the scan movement period. This is the relative position of the center of the second member 42A with respect to the projection region PR at the time of starting to move along the axial direction.

  As described above, when the projection region PR moves along the path Tp1, the second member 42A first moves along the path Tp1_1 '. For example, as shown in FIG. 9A, the second member 42A first moves in the + X-axis direction without moving along the Y-axis direction. After moving along the path Tp1_1 ', the second member 42A moves along the path Tp1_2'. For example, as shown in FIG. 9B, the second member 42A moves toward each of the + X axis direction and the + Y axis direction. That is, the second member 42A moves in the direction obtained by combining the component toward the + X-axis direction and the component toward the + Y-axis direction. 9 to 11, the moving direction of the substrate 51 is indicated by a dotted arrow, while the moving direction of the second member 42A is indicated by a solid arrow. 9 to 11, the movement of the substrate 51 including the component in the X-axis direction and the component in the Y-axis direction is indicated by a dotted arrow pointing in a direction inclined by 45 degrees with respect to the X-axis and the Y-axis. The movement of the second member 42A including the component in the X-axis direction and the component in the Y-axis direction is indicated by solid arrows pointing in a direction inclined 45 degrees with respect to the X-axis and Y-axis.

  Paying attention to the movement of the second member 42A during the scan movement period described above, the second member 42A starts to move along the Y-axis direction after the first predetermined time has elapsed since the start of the scan movement period. . The second member 42A moves along the Y-axis direction during the latter half of the scan movement period. The second member 42A may not move along the Y-axis direction before the first predetermined time has elapsed since the start of the scan movement period. The second member 42A may not move along the Y-axis direction during the first half of the scan movement period. The second member 42A may start moving along the Y-axis direction during the first half of the scan movement period.

  A specific example of the timing at which the second member 42A starts to move along the Y-axis direction during the scan movement period will be described in detail later, and detailed description thereof will be omitted here (see FIG. 13 and the like). ).

  Thereafter, when the step movement operation in which the projection region PR moves along the path Tp2 is performed, the second member 42A moves from the position d2 ′ to the position d3 ′ via the position d2.5 ′. 'Move along.

  The position d2.5 'indicates the relative position of the center of the second member 42A with respect to the projection region PR when the projection region PR is located at the intermediate position d2.5. For example, the position d2.5 ′ is a position shifted in the + Y-axis direction from the projection region PR, as shown in FIG.

  The position d3 'indicates the relative position of the center of the second member 42A with respect to the projection region PR when the projection region PR is located at the end position d3. For example, the position d3 ′ is a position shifted from the projection region PR in the −X axis direction and the + Y axis direction as shown in FIG.

  The path Tp <b> 2 ′ is a path that includes a component toward the −X axis direction but does not include a component that moves along the Y axis direction. The path Tp <b> 2 ′ is a path that includes a component that moves in the same direction as the movement direction of the substrate 51 during the step movement operation, but does not include a component that moves along the movement direction of the substrate 51 during the scan movement operation.

  As described above, when the projection region PR moves along the path Tp2, the second member 42A moves along the path Tp2 '. For example, as illustrated in FIG. 9C, the second member 42 </ b> A moves toward the −X axis direction without moving along the Y axis direction. Thereafter, as shown in FIG. 9D, the second member 42A does not move along the Y-axis direction even after the movement direction of the substrate 51 along the Y-axis direction is reversed. Continue to move in the X-axis direction.

  Thereafter, when the scan movement operation in which the projection region PR moves along the path Tp3 is performed, the second member 42A moves along the path Tp3 'from the position d3' to the position d4 '.

  The position d4 'indicates the relative position of the center of the second member 42A with respect to the projection region PR when the projection region PR is located at the end position d4. For example, the position d4 'is a position shifted from the projection region PR in the + X axis direction and the -Y axis direction as shown in FIG.

  The path Tp3 'includes a path Tp3_1' from the position d3 'to the position d3.5'. The path Tp3_1 'is a path that includes a component toward the + X-axis direction but does not include a component that moves along the Y-axis direction. The path Tp3_1 'is a path that includes a component that moves in the direction opposite to the moving direction of the substrate 51 during the step moving operation, but does not include a component that moves along the moving direction of the substrate 51 during the scan moving operation.

  The path Tp3 'further includes a path Tp3_2' from the position d3.5 'to the position d4'. The path Tp3_2 'is a path including a component toward the + X axis direction and a component toward the -Y axis direction. The path Tp3_2 'is a path that includes a component that travels in the direction of movement of the substrate 51 during the scan movement operation and a component that travels in the direction opposite to the movement direction of the substrate 51 during the step movement operation.

  The position d3.5 ′ is the starting point of the path Tp3_2 ′, the position d3.5 ′ is a position between the position d3 ′ and the position d4 ′, and the second member 42A is Y during the scan movement period. This is the relative position of the second member 42A with respect to the projection region PR at the time of starting to move along the axial direction.

  Thus, when the projection region PR moves along the path Tp3, the second member 42A first moves along the path Tp3_1 '. For example, as shown in FIG. 10A, the second member 42A first moves in the + X-axis direction without moving along the Y-axis direction. After moving along the path Tp3_1 ', the second member 42A moves along the path Tp3_2'. For example, as illustrated in FIG. 10B, the second member 42A moves toward each of the + X axis direction and the −Y axis direction. That is, the second member 42A moves in the direction obtained by combining the component toward the + X axis direction and the component toward the -Y axis direction.

  Thereafter, when the step movement operation in which the projection region PR moves along the path Tp4 is performed, the second member 42A moves from the position d4 ′ to the position d5 ′ via the position d4.5 ′. 'Move along.

  The position d4.5 ′ indicates the relative position of the center of the second member 42A with respect to the projection region PR at the time when the projection region PR is located at the intermediate position d4.5. For example, the position d4.5 ′ is a position shifted from the region PR in the −Y axis direction as shown in FIG.

  The position d5 'indicates the relative position of the center of the second member 42A with respect to the projection region PR when the projection region PR is located at the end position d5. For example, the position d5 'is a position shifted from the projection region PR in the -X axis direction and the -Y axis direction as shown in FIG.

  The path Tp4 'is a path that includes a component that travels in the -X-axis direction but does not include a component that moves along the Y-axis direction. The path Tp4 'includes a component that travels in the same direction as the movement direction of the substrate 51 during the step movement operation, but does not include a component that moves along the movement direction of the substrate 51 during the scan movement operation.

  Thus, when the projection region PR moves along the path Tp4, the second member 42A moves along the path Tp4 '. For example, as illustrated in FIG. 10C, the second member 42 </ b> A moves toward the −X axis direction without moving along the Y axis direction. After that, as shown in FIG. 10D, even after the moving direction of the substrate 51 along the Y-axis direction is reversed, the second member 42A does not move along the Y-axis direction. Move in the X-axis direction.

  When the substrate 51 moves so that the projection region PR moves along the movement locus Sr shown in FIG. 8A and the second member 42A moves along the movement locus Sr ′ shown in FIG. The movement speeds of the substrate 51 and the second member 42A change in the manner shown in FIG. The first graph in FIG. 12 indicates the moving speed of the substrate 51 along the X-axis direction. The second graph in FIG. 12 shows the moving speed of the substrate 51 along the Y-axis direction. The third graph in FIG. 12 shows the moving speed of the second member 42 along the X-axis direction. The fourth graph in FIG. 12 shows the moving speed of the second member 42 along the Y-axis direction.

  Note that the movement locus Sr of the projection region PR in FIG. 8A is an example, and is changed as appropriate. 8B is also an example, and is optimized according to the movement mode of the substrate 51 and the like.

  Note that the start timing of the scan movement period corresponds to the end timing of the step movement period. Accordingly, the second member 42A may start to move along the Y-axis direction after the first predetermined time has elapsed since the end of the step movement period. The second member 42A may not move along the Y-axis direction before the first predetermined time elapses after the step movement period ends.

  Further, during at least a part of the scanning movement period, the illumination system 2 emits the exposure light EL (that is, the exposure light EL is emitted from the terminal optical element 31). Therefore, the second member 42A moves along the Y-axis direction after the first predetermined time has elapsed since the illumination system 2 started to irradiate the exposure light EL in order to expose the target shot area (for example, the shot area Sa). You may start moving. The second member 42A moves in the Y-axis direction after a first predetermined time has elapsed since the substrate 51 (substrate stage 5) has passed a predetermined position in order to expose a target shot area (for example, the shot area Sa). You may start moving along. The second member 42A does not have to move along the Y-axis direction before the first predetermined time has elapsed after the illumination system 2 starts irradiating the exposure light EL. The second member 42A moves in the Y-axis direction before the first predetermined time elapses from the time when the substrate 51 (substrate stage 5) passes a predetermined position in order to expose the target shot area (for example, the shot area Sa). It is not necessary to move along.

  Further, the substrate 51 does not move along the X-axis direction during at least a part of the scan movement period, while the substrate 51 does not move during at least a part of the step movement period. , Moving along the X-axis direction. Therefore, the second member 42A may start to move along the Y-axis direction after the first predetermined time has elapsed since the movement of the substrate 51 along the X-axis direction has stopped. The second member 42A may not move along the Y-axis direction before the first predetermined time elapses after the movement of the substrate 51 along the X-axis direction stops.

  The start of movement of the second member 42A in the Y-axis direction may be controlled based on the position of the substrate 51 (substrate stage 5). For example, the controller 91 may start moving the second member 42A in the Y-axis direction when the substrate 51 (substrate stage 5) passes a predetermined position based on the measurement result of the measurement system 7. For example, the movement of the second member 42A in the + Y-axis direction may be started when the substrate 51 (substrate stage 5) reaches a position corresponding to the state where the projection region PR is at the position d1.5.

  In the example shown in FIG. 8A, the substrate 51 moves along the Y-axis direction even during the step movement period. Specifically, when the step movement operation in which the projection region PR moves along the path Tp2 is performed, the substrate 51 includes both the component toward the + Y axis direction and the component toward the −X axis direction. After moving along the path, it moves along the path including both the component toward the −Y axis direction and the component toward the −X axis direction. For this reason, the path Tp2 ′ of the second member 42A is similar to the path Tp2 of the substrate 51. The path including the component toward the + Y axis direction and the component toward the −X axis direction, the component toward the −Y axis direction, and A route including a route including a component toward the X-axis direction in this order may be used. The path Tp <b> 2 ′ may be a path including a component that moves in the moving direction of the substrate 51 during the step moving operation and a component along the moving direction of the substrate 51 during the scanning moving operation. The same applies to the path Tp4 'of the second member 42A during the step movement period.

  In the above description, in one scan movement period, the period in which the second member 42A does not move along the Y-axis direction and the period in which the second member 42A moves along the Y-axis direction are once in this order. The explanation is made using examples that appear one by one. However, during the scan movement period, a period during which the second member 42A moves along the Y-axis direction and a period during which the second member 42A does not move along the Y-axis direction may appear once in this order. During one scan movement period, a period not moving along the Y-axis direction and a period moving along the Y-axis direction may appear a plurality of times in an arbitrary order.

  Next, a timing at which the second member 42A starts to move along the Y-axis direction during the scan movement period (hereinafter, referred to as “movement start timing” as appropriate) will be described with reference to FIG. FIG. 13 is a plan view illustrating the movement start timing based on the positional relationship between the interface (particularly, interface LG1) of the immersion space LS and the fluid recovery port 441 (porous member 4411).

  The movement start timing of the second member 42A may be determined according to the position of the interface LG1. For example, the movement start timing of the second member 42A may be determined according to the positional relationship between the interface LG1 and the fluid recovery port 441. However, the position of the interface LG1 can be influenced by the movement mode (for example, position, movement speed, movement direction, etc.) of the substrate 51. Therefore, the movement of the interface LG1 according to the movement mode of the substrate 51 (position change of the interface LG1) may be obtained in advance, and the movement start timing of the second member 42A may be determined according to the movement mode of the substrate 51.

  Hereinafter, the description will be made using an example in which the start timing of the second member 42A is determined according to the positional relationship between the interface LG1 and the fluid recovery port 441.

  For example, the second member 42A may begin to move along the Y-axis direction when the interface LG1 reaches or is assumed to have reached the fluid recovery port 441. When the interface LG1 does not reach the fluid recovery port 441, the second member 42A may not move along the Y-axis direction. The state “the interface LG1 reaches the fluid recovery port 441” here means a state “at least a part of the interface LG1 reaches at least a part of the fluid recovery port 441”. Hereinafter, an example of a state in which the interface LG1 reaches the fluid recovery port 441 will be described.

  When the interface LG1 reaches the fluid recovery port 441, a part of the interface LG1 located on the front side along the moving direction of the substrate 51 (for example, the interface LG1 * in FIG. 13A) moves the substrate 51. It may mean a state of reaching a part of the fluid recovery port 441 (for example, the fluid recovery port 441 * in FIG. 13A) located on the front side along the direction. For example, the state of FIG. 13A corresponds to the state of FIG. In this case, as shown in FIG. 13A, the second member 42A moves along the Y-axis direction when the interface LG1 * reaches or is assumed to reach the fluid recovery port 441 * ( For example, it may begin to move (along the same direction as the movement direction of the substrate 51). As shown in FIG. 13 (b), the second member 42A moves along the Y-axis direction when the interface LG1 * does not reach or is not reached the fluid recovery port 441 *. It is not necessary to start moving. For example, the state of FIG. 13B corresponds to the state of FIG.

  For example, when the moving direction of the substrate 51 is the + Y-axis direction, the second member 42A has a part of the fluid recovery port 441 in which a part of the interface LG1 located on the + Y-axis direction side is located on the + Y-axis direction side. At the time of reaching or assumed to have reached, may start moving along the + Y-axis direction. For example, when the movement direction of the substrate 51 is the −Y axis direction, the second member 42 </ b> A has a fluid recovery port 441 in which a part of the interface LG <b> 1 located on the −Y axis direction side is located on the −Y axis direction side. The movement may start along the −Y-axis direction at the time when it reaches or is assumed to have reached a part of.

  As described above, in the first embodiment, the second member 42A starts moving along the Y-axis direction at such timing during the scan movement period, so that the interface LG1 is thinned on the substrate 51. It can be suppressed that a part is separated and remains on the substrate 51.

  Further, the state where the interface LG1 reaches the fluid recovery port 441 may mean a state where the liquid LQ is recovered via the fluid recovery port 441 *. In this case, the second member 42A may start to move along the Y-axis direction when the liquid LQ starts to be recovered through the fluid recovery port 441 * or when it is assumed that the liquid LQ starts to be recovered. The second member 42A may not move along the Y-axis direction when the liquid LQ is not recovered through the fluid recovery port 441 *.

  Further, the second member 42A may start to move along the Y-axis direction after the second predetermined time has elapsed since the interface LG1 reached or reached the fluid recovery port 441. Further, the second member 42A may start to move along the Y-axis direction when the time required for the interface LG1 to reach the fluid recovery port 441 is less than the third predetermined time.

  The second member 42A has a timing determined according to the positional relationship between the interface LG1 and the fluid recovery port 441 in addition to or instead of starting the movement along the Y-axis direction during the scan movement period. The movement along the Y-axis direction may be stopped. Note that the timing at which the movement of the second member 42A along the Y-axis direction (hereinafter referred to as “movement stop timing” as appropriate) may be determined by the logic opposite to the movement start timing. For example, in the above description, the timing when the interface LG1 reaches the fluid recovery port 441 is illustrated as an example of the movement start timing. Therefore, as an example of the movement stop timing, a timing at which the interface LG1 is separated from the fluid recovery port 441 may be used. The same applies to other examples of the movement start timing.

  Further, the second member 42A may move along the X-axis direction in accordance with the positional relationship between the interface LG1 and the fluid recovery port 441.

  Further, the second member 42A may move according to the positional relationship between the interface LG1 and the fluid recovery port 441 even during the step movement period. For example, the second member 42 </ b> A is reached or reached when a part of the interface LG <b> 1 located on the −X axis direction side reaches a part of the fluid recovery port 441 located on the −X axis direction side during the step movement period. At an assumed time, the movement may start along the −X axis direction.

  The movement start timing described above may be determined by, for example, the controller 91 that is an example of a control unit. In the first embodiment, the controller 91 determines the movement start timing based on information that directly or indirectly indicates the positional relationship between at least a part of the interface LG1 and at least a part of the fluid recovery port 441. To do. For example, the controller 91 determines the movement start timing based on both information indicating the movement mode of the substrate 51 directly or indirectly and information indicating the recovery mode at the fluid recovery port 441 directly or indirectly. To do.

  When the exposure apparatus EX1 exposes the substrate 51, the substrate 51 may move regularly. Furthermore, considering that the second member 42A moves based on the movement mode of the substrate 51, the second member 42A may also move regularly. Considering that there is a possibility that both the substrate 51 and the second member 42A move regularly, the controller 91 determines the position of the interface LG1 based on both or one of the movement modes of the substrate 51 and the second member 42A. Can be estimated.

  Further, when the interface LG1 reaches the fluid recovery port 441, the recovery mode at the fluid recovery port 441 may change compared to before the interface LG1 reaches the fluid recovery port 441. For example, when the interface LG1 reaches the fluid recovery port 441, both or one of the recovery pressure and the recovery amount at the fluid recovery port 441 may change compared to before the interface LG1 reaches the fluid recovery port 441. Therefore, the controller 91 can estimate the position of the interface LG1 based on the recovery mode at the fluid recovery port 441. In other words, the controller 91 can estimate the positional relationship between at least a part of the interface LG1 and at least a part of the fluid recovery port 441 based on the recovery mode at the fluid recovery port 441.

  Therefore, in the first embodiment, the controller 91 may determine the movement start timing based on the movement mode of the substrate 51 and the recovery mode at the fluid recovery port 441 during the scan movement period.

  Note that the controller 91 is not based on the information indicating the recovery mode at the fluid recovery port 441 directly or indirectly, but based on the information indicating the movement mode of the substrate 51 directly or indirectly. May be determined. The controller 91 determines the movement start timing based on the information indicating the recovery mode at the fluid recovery port 441 directly or indirectly without based on the information indicating the movement mode of the substrate 51 directly or indirectly. May be.

  The controller 91 may be in addition to or in place of the information indicating the movement mode of the substrate 51 directly or indirectly and the information indicating the recovery mode at the fluid recovery port 441 directly or indirectly. The movement start timing may be determined based on other information.

  The controller 91 may acquire the position of the interface LG1 directly by simulation. In this case, the controller 91 is based on, for example, both or one of the information directly or indirectly indicating the movement mode of the substrate 51 and the information directly or indirectly indicating the recovery mode at the fluid recovery port 441. Thus, the position of the interface LG1 may be directly simulated. The controller 91 may be in addition to or in place of the information indicating the movement mode of the substrate 51 directly or indirectly and the information indicating the recovery mode at the fluid recovery port 441 directly or indirectly. Based on other information, the position of the interface LG1 may be directly simulated.

  When the position of the interface LG1 is directly acquired by simulation, the controller 91 determines the movement start timing by analyzing the positional relationship between the acquired position of the interface LG1 and the fluid recovery port 441. Also good. The controller 91 can recognize the position of the fluid recovery port 441 relatively easily based on the position of the second member 42A.

  The controller 91 may directly acquire the position of the interface LG1 using a sensor that detects the position of the interface LG1. Also in this case, the controller 91 may determine the movement start timing by analyzing the positional relationship between the acquired position of the interface LG1 and the fluid recovery port 441.

  In the above description, an example in which one scanning movement period includes a period in which the second member 42A moves along the Y-axis direction and a period in which the second member 42A does not move along the Y-axis direction. Explained. However, there may not be a period during which the second member 42A moves along the Y-axis direction in one scan movement period. For example, if it is not assumed that the interface LG1 reaches the fluid recovery port 441 on the front side along the movement direction of the substrate 51 in one scan movement period, the second member 42A is moved by one scan. It is not necessary to move along the Y-axis direction during the period. Further, the second member 42A may continue to move along the Y-axis direction during one scan movement period. For example, immediately after the start of one scan movement period, when it is assumed that the interface LG1 reaches the fluid recovery port 441 on the front side along the movement direction of the substrate 51, the one scan movement period The second member 42A may continue to move along the Y-axis direction simultaneously with the start.

  Note that the movement of the second member 42A may not be similarly controlled in each of the scan movement periods of all the shot areas of the substrate 51. For example, as described above, the scan movement period of a certain shot region includes a period in which the second member 42A moves along the Y-axis direction and a period in which the second member 42A does not move along the Y-axis direction. As described above, the movement of the second member 42A is controlled, and the second member 42A does not have to move along the Y-axis direction in the scan movement period of the other one shot region.

(1-4) Modified Example of Moving Operation of Second Member 42A Next , modified examples of the moving operation of the second member 42A will be described with reference to FIGS.

  The second member 42A moves based on the positional relationship between the predetermined portion 55 located on the substrate stage 5 or the measurement stage 6 or between the substrate stage 5 and the measurement stage 6 and at least a part of the interface LG1. . Hereinafter, an example of the predetermined unit 55 located on the substrate stage 5 or the measurement stage 6 or between the substrate stage 5 and the measurement stage 6 will be described with reference to FIG. FIG. 14 is a plan view showing the upper surfaces of the substrate stage 5 and the measurement stage 6.

  As shown in FIG. 14, the substrate stage 5 includes a holding unit that releasably holds the substrate 51 and an upper surface 52 that is disposed around the holding unit.

  The predetermined portion 55 may include a water-repellent film removing portion 55 a disposed on at least a part of the upper surface 52.

  The water repellent film removal portion 55a means a portion of the upper surface 52 from which the water repellent film has been removed. The water repellent film removal portion 55a may mean a portion of the upper surface 52 where the water repellent film is not formed. A portion of the upper surface 52 where the water repellent film removing portion 55a is not disposed (a peripheral portion of the water repellent film removing portion 55a) is a fluororesin material, a fluororesin material such as polytetrafluoroethylene, or an acrylic resin. The surface of the water-repellent film containing a material or a silicon-based resin material may be included. A single water repellent film removal portion 55 a may be disposed on the upper surface 52. A plurality of water repellent film removal portions 55 a may be disposed on the upper surface 52. The water repellent film removal portion 55 a may be disposed on the substrate 51 in addition to or instead of being disposed on the upper surface 52. The water repellent film removal unit 55 a may be disposed on the measurement stage 6 in addition to or instead of being disposed on the substrate stage 5.

  The water repellent film removal portion 55a may be a light incident portion of a sensor. For example, the exposure light EL from the projection optical system 3 enters the light incident part (water repellent film removing part 55a) of the sensor as the measurement light via the liquid LQ.

  The predetermined portion 55 may include at least a part of the measurement member 61 held on the measurement stage 6.

  The predetermined portion 55 may include a convex portion 55 c on the upper surface 52. The convex portion 55 c may be a convex portion that constitutes a part of the upper surface 52 or is integrated with the upper surface 52. The convex portion 55 c may be a convex portion that is independent of the upper surface 52 or separable from the upper surface 52. The predetermined portion 55 may be a convex portion on the upper surface of the measurement stage 6 in addition to or instead of the convex portion 55 c on the upper surface 52 of the substrate stage 5.

  The predetermined portion 55 may include a concave portion 55 e on the upper surface of the measurement stage 6. The recess 55e may be a recess that constitutes a part of the measurement stage 6 or is integrated with the measurement stage 6. The recess 55e may be a recess that is independent of the measurement stage 6 or that can be separated from the measurement stage 6. The predetermined portion 55 may be a recess on the upper surface 52 of the substrate stage 5 in addition to or instead of the recess 55 e on the upper surface of the measurement stage 6.

  The predetermined portion 55 may include a gap 55 f between the substrate 51 and the upper surface 52. The predetermined portion 55 may include a gap 55g between the substrate stage 5 and the measurement stage 6.

  Both or one of the gap 55f and the gap 55g is a gap along a direction parallel to the XY plane. Both or one of the gap 55f and the gap 55g may be a gap through which at least a part of the liquid LQ in the immersion space LS can enter. Both or one of the gap 55f and the gap 55g may be a gap through which the liquid LQ can enter the entire gap. Both or one of the gap 55f and the gap 55g may be a gap through which the liquid LQ can enter a part of the gap.

  Although not shown in FIG. 14 for simplification of the drawing, the predetermined portion 55 may include a gap between arbitrary different structures in addition to or instead of the gap 55f and the gap 55g. Good. The predetermined portion 55 may include a gap between arbitrary structures adjacent to each other in addition to or instead of the gap 55f and the gap 55g described above.

  When the immersion space LS is formed on the predetermined portion 55 as described above, for example, a drop of liquid LQ, a film, or the like may remain in at least one of the predetermined portion 55 and the peripheral portion of the predetermined portion 55. . Further, when the immersion space LS is formed on the predetermined portion 55 as described above, for example, bubbles may be generated in the liquid LQ that forms the immersion space LS.

  In the first embodiment, the second member 42A may be moved so as to suppress one or both of the remaining liquid LQ and the generation of bubbles due to the predetermined portion 55.

  The second member 42A moves based on both or one of the positional relationship between the predetermined portion 55 and the front interface LG1 and the positional relationship between the predetermined portion 55 and the rear interface LG1. Here, the “front interface LG1” means at least a part of the interface LG1 located on the front side along the relative movement direction of the immersion space LS with respect to the predetermined portion 55 or the substrate stage 5 or the measurement stage 6. . The “rear interface LG1” means at least a part of the interface LG1 located on the rear side along the relative movement direction of the immersion space LS with respect to the predetermined portion 55 or the substrate stage 5 or the measurement stage 6. In addition, for convenience of explanation, in the following, the term “front and rear interface LG1” is used as appropriate as the term meaning “both or one of the front interface LG1 and the rear interface LG1”. The relative movement direction of the immersion space LS with respect to the predetermined portion 55 is the relative movement direction of the predetermined portion 55 or the substrate stage 5 or the measurement stage 6 with respect to the immersion space LS or the liquid immersion member 4A or the second member 42A. Is substantially synonymous with the opposite direction. Further, the relative movement direction of the immersion space LS with respect to the predetermined portion 55 is substantially synonymous with the relative movement direction of the immersion member 4A or the second member 42A with respect to the substrate stage 5 or the measurement stage 6.

  The second member 42A is an interface located on a side (for example, a side) different from the front side and the rear side along the relative movement direction of the liquid immersion space LS with respect to the predetermined portion 55 and the predetermined portion 55. You may move based on the positional relationship between at least part of LG1.

  Further, the positional relationship between the predetermined portion 55 and the front / rear interface LG <b> 1 may vary depending on the movement mode of the substrate stage 5 or the measurement stage 6. Therefore, the second member 42 </ b> A may move based on the movement mode of the substrate stage 5 or the measurement stage 6. The second member 42A may move based on the relative movement of the liquid immersion space LS, the liquid immersion member 4A or the predetermined portion 55 with respect to the second member 42A, or the substrate stage 5 or the measurement stage 6.

  Hereinafter, as a modification example of the movement operation of the second member 42A based on the positional relationship between the predetermined portion 55 and the front / rear interface LG1, a description will be given in more detail using a first modification example and a second modification example.

  In the first modified example, the relative speed of the rear interface LG1 with respect to the predetermined portion 55 moves so as to decrease. Specifically, the second member 42A moves during a period in which the rear interface LG1 passes above the predetermined portion 55. For example, the second member 42 </ b> A moves in the same direction as the movement direction of the predetermined portion 55 during the period when the rear interface LG <b> 1 passes over the predetermined portion 55. Thereby, compared with the case where the 2nd member 42A is not moved to the same direction as the moving direction of the predetermined part 55, the relative speed of the back interface LG1 with respect to the predetermined part 55 can be made small.

  Here, the reason why the second member 42A moves so that the relative speed of the rear interface LG1 with respect to the predetermined portion 55 becomes small will be described with reference to FIG. FIG. 15 is a plan view showing the positional relationship between the predetermined portion 55 and the rear interface LG1. In FIG. 15, the description will be given using an example in which the predetermined portion 55 is the water repellent film removing portion 55a. However, the same applies to the case where the predetermined portion 55 is not the water repellent film removing portion 55a.

  As shown in FIG. 15A, the substrate stage 5 is directed toward the + Y-axis direction relative to the second member 42A in a state where the water-repellent film removal portion 55a is covered with the immersion space LS. Assume that it is moving. That is, it is assumed that the water-repellent film removal portion 55a is moved in the + Y-axis direction relative to the second member 42A. In this case, the immersion space LS moves relative to the water repellent film removal portion 55a in the −Y axis direction.

  Thereafter, at a certain moment, the rear interface LG1 passes above the water-repellent film removal portion 55a. In this case, as shown in FIG. 15 (b), a part of the liquid LQ constituting the immersion space LS is made relative to the water repellent film removal portion 55a by the water repellent film removal portion 55a. It is pulled in the direction opposite to the moving direction.

  When the relative speed of the rear interface LG1 with respect to the water-repellent film removal unit 55a in the situation shown in FIG. 15B is relatively large, as shown in FIG. 15C, the liquid LQ constituting the immersion space LS is formed. May be parted by the water repellent film removal portion 55a. As a result, as shown in FIG. 15C, a part of the liquid LQ constituting the immersion space LS may remain as residual water LQ ′ on the substrate stage 5.

  Therefore, in the first modified example, the second member 42A moves so that the relative speed of the rear interface LG1 with respect to the water repellent film removal portion 55a becomes small. For this reason, compared with the case where the 2nd member 42A does not move, a part of liquid LQ which comprises the immersion space LS becomes difficult to be parted by the water-repellent film removal part 55a. As a result, part of the liquid LQ constituting the immersion space LS is suppressed from remaining as residual water LQ ′ on the substrate stage 5.

  Note that the position of the rear interface LG1 may vary depending on the movement mode of the rear fluid recovery port 441. Therefore, in addition to or instead of moving the second member 42A so that the relative speed of the rear interface LG1 with respect to the predetermined portion 55 decreases, the relative speed of the rear fluid recovery port 441 with respect to the predetermined portion 55 decreases. You may move.

  The second member 42A may move so that the relative speed of the front interface LG1 with respect to the predetermined portion 55 becomes small. The second member 42A has other interfaces LG1 different from the front interface LG1 and the rear interface LG1 with respect to the predetermined portion 55 (for example, the front side and the rear side along the relative movement direction of the immersion space LS with respect to the predetermined portion 55). May move so that the relative velocity of the interface LG1) located on a different side (for example, the side) is reduced.

  Subsequently, in the second modification, the second member 42 </ b> A moves so as to avoid the generation of the residual water LQ ′ due to the predetermined portion 55. Specifically, the second member 42 </ b> A changes the movement mode so as to avoid the generation of the residual water LQ ′ due to the predetermined portion 55. Here, an example of the remaining water LQ ′ caused by the predetermined unit 55 will be described with reference to FIG. In FIG. 16, the description will be made using an example in which the predetermined portion 55 is the gap 55f. However, since FIG. 16 is a simplified diagram, the gap 55f does not have an arc shape but extends linearly in the X-axis direction. The same applies when the predetermined portion 55 is not the gap 55f.

  As shown in FIG. 16A, it is assumed that the immersion space LS is moving in the + Y-axis direction with respect to the substrate stage 5 in a situation where the gap 55f is not covered by the immersion space LS. To do. That is, it is assumed that the immersion space LS is moving in the + Y axis direction with respect to the gap 55f. Such a situation may occur, for example, when the substrate stage 5 is moving in the −Y axis direction with respect to the second member 42A. In the situation shown in FIG. 16A, the front interface LG1 of the front and rear interfaces LG1 is located on the −Y axis direction side of the gap 55f.

  In the state shown in FIG. 16A, when the substrate stage 5 further moves in the −Y-axis direction with respect to the second member 42A, as shown in FIG. 16B, at a certain timing, the upper side of the gap 55f. Thus, the front interface LG1 is located.

  Here, it is assumed that the relative movement direction of the substrate stage 5 with respect to the second member 42A is switched from the −Y axis direction to the + Y axis direction at the timing when the front interface LG1 is positioned above the gap 55f. In this case, as shown in FIG. 16C, at least a part of the liquid LQ constituting the front interface LG1 is moved toward the movement direction of the substrate stage 5 relative to the second member 42A by the gap 55f (that is, There is a risk of being pulled (in the direction opposite to the moving direction of the immersion space LS with respect to the substrate stage 5).

  Thereafter, when the substrate stage 5 further moves in the + Y-axis direction with respect to the second member 42A, as shown in FIG. 16 (d), a part of the liquid LQ constituting the immersion space LS is separated by the gap 55f. , Can be divided. As a result, as shown in FIG. 16D, a part of the liquid LQ constituting the immersion space LS may remain as residual water LQ ′ on the substrate stage 5.

  In order to avoid the generation of residual water due to the predetermined portion 55 including the gap 55f, the second member 42A moves the relative direction of the predetermined portion 55 relative to the immersion space LS (that is, the substrate stage 5 and the measurement stage 6). The first timing at which both or one of the relative movement directions is reversed may be moved so that the second timing at which the front / rear interface LG1 is positioned above the predetermined portion 55 does not match. That is, the second member 42A may move so as to avoid the coincidence between the first timing and the second timing.

  The second timing at which the front / rear interface LG1 is positioned above the predetermined portion 55 may be a timing at which both or one of the front / rear fluid recovery ports 441 is positioned above the predetermined portion 55.

  An example of the moving operation of the second member 42A that avoids the coincidence between the first timing and the second timing will be described in more detail with reference to FIG. FIG. 17 is a plan view showing an example of the movement operation of the second member 42A that avoids the coincidence between the first timing and the second timing, together with the interface LG1 of the immersion space LS. In FIG. 17 as well, as in FIG. 16, the description will be made using an example in which the predetermined portion 55 is the gap 55f. Since FIG. 17 is also a simplified diagram, the gap 55f does not have an arc shape but extends linearly in the X-axis direction. The same applies when the predetermined portion 55 is not the gap 55f.

  As shown in FIG. 17A, it is assumed that the substrate stage 5 is moved toward the −Y axis direction with respect to the second member 42A (that is, with respect to the liquid immersion space LS). Further, if the second member 42A does not move, the first timing at which the relative movement direction of the gap 55f with respect to the immersion space LS is reversed, and the front / rear interface LG1 (from FIG. 17A) to the upper side of the gap 55f. In the example shown in FIG. 17C, it is assumed that the second timing at which the front interface LG1) is located coincides.

  In the situation shown in FIG. 17A, in order to avoid the coincidence between the first timing and the second timing, as shown in FIG. 17B, the second member 42A is in contact with the immersion space LS. Before the relative movement direction of the gap 55f is reversed, the direction is opposite to the relative movement direction of the gap 55f with respect to the second member 42A (in the example shown in FIG. 17B, in the + Y-axis direction). Moving. That is, the second member 42A moves in the direction opposite to the relative movement direction of the gap 55f with respect to the second member 42A before the front / rear interface LG1 is positioned above the gap 55f. Specifically, for example, the second member 42A is opposite to the relative movement direction of the gap 55f with respect to the second member 42A when the positional relationship between the gap 55f and the front / rear interface LG1 becomes a predetermined relationship. You may move toward this direction. For example, when the distance between the gap 55f and the front / rear interface LG1 is equal to or less than the second predetermined distance, the second member 42A is in a direction opposite to the relative movement direction of the predetermined portion 55 with respect to the second member 42A. You may move towards.

  17 (a) and 17 (b) show the first timing and the second timing when the second member 42A does not move in a situation where the second member 42A does not move. The movement operation of the second member 42A when the timing coincides will be described. On the other hand, the movement mode of the second member 42A may be changed so that the first timing and the second timing do not coincide with each other under the situation in which the second member 42A is moving.

  When the second member 42A moves in the direction opposite to the relative movement direction of the gap 55f with respect to the second member 42A, as shown in FIG. 17B, the relative distance of the gap 55f with respect to the immersion space LS. At the first timing when the moving direction is reversed, the front / rear interface LG1 is not positioned above the gap 55f. For example, at the first timing at which the relative movement direction of the gap 55f with respect to the immersion space LS is reversed, one side of the gap 55f (the direction opposite to the relative movement direction of the gap 55f with respect to the second member 42A). In the example shown in FIG. 17B, the front / rear interface LG1 is located on the outer side corresponding to the + Y-axis direction.

  On the other hand, in order to avoid the coincidence between the first timing and the second timing under the situation shown in FIG. 17A, as shown in FIG. Before the relative movement direction of the gap 55f with respect to the space LS is reversed, the same direction as the relative movement direction of the gap 55f with respect to the second member 42A (in the example shown in FIG. 17C, in the −Y axis direction). Move towards. That is, the second member 42A moves in the same direction as the relative movement direction of the gap 55f with respect to the second member 42A before the front / rear interface LG1 is positioned above the gap 55f. Specifically, for example, the second member 42A has the same moving direction as the relative movement of the gap 55f with respect to the second member 42A when the positional relationship between the gap 55f and the front / rear interface LG1 becomes a predetermined relationship. You may move in the direction. For example, the second member 42A moves toward the same direction as the relative movement direction of the gap 55f with respect to the second member 42A when the distance between the gap 55f and the front / rear interface LG1 is equal to or smaller than the third predetermined distance. You may move.

  FIGS. 17 (a) and 17 (c) show the first timing and the second timing when the second member 42A does not move in a situation where the second member 42A does not move. The movement operation of the second member 42A when the timing coincides will be described. On the other hand, the movement mode of the second member 42A may be changed so that the first timing and the second timing do not coincide with each other under the situation in which the second member 42A is moving.

  When the second member 42A moves in the same direction as the relative movement direction of the gap 55f with respect to the second member 42A, as shown in FIG. 17C, the relative movement of the gap 55f with respect to the liquid immersion space LS. At the first timing when the direction is reversed, the front / rear interface LG1 is not positioned above the gap 55f. For example, at the first timing when the relative movement direction of the gap 55f with respect to the immersion space LS is reversed, the other side of the gap 55f (the same direction side as the relative movement direction of the substrate stage 5 with respect to the second member 42A). In the example shown in FIG. 17C, the front / rear interface LG1 is located on the inner side corresponding to the side toward the -Y-axis direction.

  As shown in FIGS. 17B and 17C, the position of the immersion space LS (front / rear interface LG1) can be changed by moving the second member 42A. By moving the second member 42A as shown in FIGS. 17B and 17C, for example, the first timing at which the relative movement direction of the gap 55f with respect to the liquid immersion space LS is reversed, and the gap The coincidence with the second timing at which the front / rear interface LG1 is located above 55f is avoided. Therefore, the generation of residual water due to the gap 55f is avoided.

  The movement operation of the second member 42A described above is controlled by the controller 91 which is an example of a control unit. Therefore, the controller 91 controls the movement mode of the second member 42A based on information indicating the positional relationship between the predetermined portion 55 and the front / rear interface LG1 directly or indirectly.

  Here, as described above, the positional relationship between the predetermined portion 55 and the front-rear interface LG1 may vary depending on the movement mode of the substrate stage 5 or the measurement stage 6. For this reason, the controller 91 can estimate the positional relationship between the predetermined portion 55 and the front / rear interface LG1 based on the movement mode of the substrate stage 5 or the measurement stage 6.

  Similarly, as described above, the positional relationship between the predetermined portion 55 and the front / rear interface LG1 may vary depending on the movement mode of the front / rear fluid recovery port 441. Therefore, the controller 91 can estimate the positional relationship between the predetermined portion 55 and the front / rear interface LG1 based on the movement mode of the front / rear fluid recovery port 441.

  Therefore, the controller 91 includes information that directly or indirectly indicates the movement mode of the substrate stage 5 or the measurement stage 6 and / or information that directly or indirectly indicates the movement mode of the front and rear fluid recovery port 441. Based on this, the movement mode of the second member 42A is controlled. As a result, the controller 91 can suitably move the second member 42A based on the positional relationship between the predetermined portion 55 and the front / rear interface LG1.

  The controller 91 adds to the information indicating the movement mode of the substrate stage 5 or the measurement stage 6 directly or indirectly and the information indicating the movement mode of the front and rear fluid recovery port 441 directly or indirectly. Alternatively, the movement mode of the second member 42A may be controlled based on other information.

  The controller 91 may acquire the position of the interface LG1 directly by simulation. In this case, for example, the controller 91 may directly simulate the position of the interface LG1 based on information indicating the movement mode of the front-rear fluid recovery port 441 directly or indirectly. For example, the controller 91 may directly simulate the position of the interface LG1 based on information that directly or indirectly indicates the movement mode of the substrate stage 5 or the measurement stage 6. For example, the controller 91 may directly simulate the position of the interface LG1 based on other information.

  When the position of the interface LG1 is directly acquired by simulation, the controller 91 analyzes the positional relationship between the acquired position of the interface LG1 and the predetermined portion 55, thereby changing the movement mode of the second member 42A. You may control. The controller 91 can acquire the position of the predetermined portion 55 relatively easily based on the position of the substrate stage 5 or the measurement stage 6.

  The controller 91 may directly acquire the position of the interface LG1 using a sensor that detects the position of the interface LG1. Also in this case, the controller 91 may control the movement mode of the second member 42A by analyzing the positional relationship between the acquired position of the interface LG1 and the predetermined portion 55.

(2) Various Embodiments of Liquid Immersion Member 4 In the above description, the description is made using the exposure apparatus EX1 including the liquid immersion member 4A of the first embodiment. However, the exposure apparatus EX1 may include an arbitrary liquid immersion member 4 including a first member 41 and a second member 42 movable with respect to the first member 41, instead of the liquid immersion member 4A. The second member 42 included in such an arbitrary liquid immersion member 4 may move in the same manner as the second member 42A included in the liquid immersion member 4A of the first embodiment. Even when the second member 42 included in the arbitrary liquid immersion member 4 moves in the same manner as the second member 42A included in the liquid immersion member 4A of the first embodiment, the various effects described above can be enjoyed accordingly. Is done.

  Hereinafter, as an example of the optional liquid immersion member 4, the liquid immersion member 4B of the second embodiment, the liquid immersion member 4C of the third embodiment, the liquid immersion member 4D of the fourth embodiment, and the liquid immersion member of the fifth embodiment Each of 4E and the liquid immersion member 4F of 6th Embodiment is demonstrated easily in order. In addition, about the component same as the component with which liquid immersion member 4A of 1st Embodiment is provided, the same reference number is attached | subjected and the detailed description is abbreviate | omitted.

(2-1) Liquid immersion member 4B of the second embodiment
The liquid immersion member 4B of the second embodiment will be described with reference to FIG. FIG. 18 is a cross-sectional view (cross-sectional view parallel to the XZ plane) of the liquid immersion member 4B of the second embodiment.

  As shown in FIG. 18, in the second embodiment, at least a part of the inner side surface 424 of the second member 42B is disposed on the inner side of the inner side surface 415 of the first member 41B. The diameter of the opening 426 of the second member 42B is smaller than the diameter of the opening 416 of the first member 41B.

  Also in the exposure apparatus including the liquid immersion member 4B of the second embodiment, various effects that can be enjoyed by the exposure apparatus EX1 including the liquid immersion member 4A described above are preferably enjoyed. For example, the liquid LQ is suppressed from remaining in a region outside the interface LG1.

(2-2) Liquid immersion member 4C of the third embodiment
The liquid immersion member 4C of the third embodiment will be described with reference to FIG. FIG. 19 is a cross-sectional view (cross-sectional view parallel to the XZ plane) of the liquid immersion member 4C of the third embodiment.

  As shown in FIG. 19, in the third embodiment, the second member 42C suppresses the liquid LQ from entering the at least part of the space SP3 between the first member 41C and the second member 42C. 461C is provided. The suppressing part 461C suppresses the liquid from entering a space outside the suppressing part 461C in the space SP3 between the first member 41C and the second member 42C.

  The suppressing portion 461C may be disposed on the surface of the second member 42C facing the space SP3. For example, the suppressing portion 461C may be formed on at least a part of the upper surface 421 of the second member 42C. However, the suppressing portion 461C may be disposed on the surface of the first member 41C facing the space SP3.

  The suppressing unit 461C may include an air supply port that supplies gas to at least a part of the space SP3 between the first member 41C and the second member 42C. The air supply port may supply a gas for forming an air curtain that prevents the liquid LQ from jumping out of the air supply port. In the case where the suppression unit 461C includes an air supply port, the suppression unit 461C may further include an exhaust port that collects the gas supplied from the air supply port.

  The suppression unit 461C may include an arbitrary component that can suppress the entry of the liquid LQ into the space SP3 in addition to or instead of including both or one of the intake port and the exhaust port. For example, the suppressing portion 461C may include a water repellent film that can be at least one or both of at least part of the lower surface 413 and at least part of the upper surface 421.

  When both or one of the first member 41C and the second member 42C includes the suppressing portion 461C, the first member 41C may not include the fluid recovery port 442. However, the first member 41C may include a fluid recovery port 442.

  At least a part of the components (for example, the driving device 451, the support member 452, and the support member 453) for moving the second member 42C is through a through hole that penetrates the first member 41C along the Z-axis direction. It is connected to the second member 42C. In this case, the liquid LQ may or may not enter at least a part of the through hole.

  Also in the exposure apparatus including the liquid immersion member 4C of the third embodiment, various effects that can be enjoyed by the exposure apparatus EX1 including the liquid immersion member 4A described above are favorably received. For example, the liquid LQ is suppressed from remaining in a region outside the interface LG1.

(2-3) Liquid immersion member 4D of the fourth embodiment
The liquid immersion member 4D of the fourth embodiment will be described with reference to FIG. FIG. 20 is a cross-sectional view (cross-sectional view parallel to the XZ plane) of the liquid immersion member 4D of the fourth embodiment.

  As shown in FIG. 20, in the fourth embodiment, in the liquid immersion member 4 </ b> D, the fluid recovery port 442 is opposed to the substrate 51 in addition to the upper surface 421. Furthermore, at least a part of the fluid recovery port 442 is disposed outside the outer end portion of the second member 42D. Therefore, the fluid recovery port 442 recovers the liquid LQ from the space SP3 and also recovers the liquid LQ from the space SP1. In this case, the second member 42D may not include the fluid recovery port 441.

  At least a part of the components (for example, the drive device 451, the support member 452, and the support member 453) for moving the second member 42D is through a through hole that penetrates the first member 41D along the Z-axis direction. It is connected to the second member 42D. In this case, the liquid LQ may or may not enter at least a part of the through hole.

  Also in the exposure apparatus including the liquid immersion member 4D of the fourth embodiment, various effects that can be enjoyed by the exposure apparatus EX1 including the liquid immersion member 4A described above are favorably received. For example, the liquid LQ is suppressed from remaining in a region outside the interface LG1.

(2-4) Liquid immersion member 4E of the fifth embodiment
The liquid immersion member 4E of the fifth embodiment will be described with reference to FIG. FIG. 21 is a cross-sectional view (cross-sectional view parallel to the XZ plane) of the liquid immersion member 4E of the fifth embodiment.

  As shown in FIG. 21, in the fifth embodiment, the first member 41E includes a fluid recovery port 443E facing the space SP2 in addition to the fluid recovery port 442 facing the space SP3. The fluid recovery port 443E may have the same characteristics as the fluid recovery port 442 except at least that it is formed on the inner surface 411 so as to face the space SP2. Therefore, detailed description of the fluid recovery port 443E is omitted for simplification of description.

  The second member 42E includes a liquid supply port 432E that faces the space SP1. The liquid supply port 432E may have the same characteristics as the liquid supply port 431 except that at least the liquid supply port 432E is formed on the lower surface 422. Therefore, detailed description of the liquid supply port 432E is omitted for the sake of simplicity.

  Also in the exposure apparatus provided with the liquid immersion member 4E of the fifth embodiment, various effects that can be enjoyed by the exposure apparatus EX1 provided with the liquid immersion member 4A described above are preferably enjoyed. For example, the liquid LQ is suppressed from remaining in a region outside the interface LG1.

(2-5) Liquid immersion member 4F of the sixth embodiment
The liquid immersion member 4F of the sixth embodiment will be described with reference to FIG. FIG. 22 is a cross-sectional view (cross-sectional view parallel to the XZ plane) of the liquid immersion member 4F of the sixth embodiment.

  As shown in FIG. 22, in the sixth embodiment, the lower surface 413 of the first member 41F faces the substrate 51 through the space SP1. In addition, a part of the first member 41F is disposed below a part of the lower surface 422 of the second member 42F. Specifically, a part of the plate-like portion 417F formed by the lower surface 413 of the first member 41F is disposed below the inner lower surface 4222F that is a part of the lower surface 422. The outer lower surface 4221F, which is another part of the lower surface 422, is disposed on the same plane as the lower surface 413 and outside the inner lower surface 4222F and the lower surface 413.

  The second member 42F further includes a liquid supply port 432F. The liquid supply port 432F may have the same characteristics as the liquid supply port 431 except that the liquid supply port 432F is formed on the lower surface 422 (outer lower surface 4221F). Therefore, detailed description of the liquid supply port 432F is omitted for simplification of description.

  The fluid recovery port 442 is formed on the inner lower surface 4222F instead of the lower surface 413.

  Also in the exposure apparatus including the liquid immersion member 4f according to the sixth embodiment, various effects that can be enjoyed by the exposure apparatus EX1 including the liquid immersion member 4A described above are favorably received. For example, the liquid LQ is suppressed from remaining in a region outside the interface LG1.

  In the first to sixth embodiments described above, the controller 91 may include a computer system including a CPU and the like. The controller 91 may include an interface for causing communication between the computer system and an external device. An input device that can input an input signal may be connected to the controller 91. The input device may include, for example, an input device including at least one of a keyboard, a mouse, a touch panel, and the like. The input device may include, for example, a communication device that can input data from an external device. A display device such as a liquid crystal display may be connected to the controller 91.

  The memory 92 may include a storage medium including at least one of a RAM (Random Access Memory), a hard disk, and a CD-ROM, for example. The memory 92 may be installed with an OS (operating system) for controlling the computer system. The memory 92 may store a program for controlling the exposure apparatus EX1 (EX2, hereinafter the same). The memory 92 may store a program for controlling the exposure apparatus EX1 so that the substrate 51 is exposed using the exposure light EL projected through the liquid LQ filled in the optical path AT.

  The program stored in the memory 92 may be read and executed by the controller 91. As a result, exposure is performed to expose the substrate 51 in a state in which the immersion space LS is formed by cooperation of various components included in the exposure apparatus EX1 such as the immersion member 4A (4B), the substrate stage 5, and the measurement stage 6. Various processes such as processes are performed.

  In the above description, the projection optical system 3 in which the optical path AT on the exit surface 32 side (that is, the image surface side) of the last optical element 31 is filled with the liquid LQ is illustrated. However, a projection optical system in which the optical path AT on the incident side (that is, the object plane side) of the last optical element 31 is filled with the liquid LQ may be used. An example of a projection optical system in which the optical path on the incident side of the last optical element 31 is filled with the liquid LQ is disclosed in, for example, International Publication No. 2004/019128.

  In the above description, an example in which the liquid LQ is water (for example, pure water) is illustrated. However, the liquid LQ may be a liquid other than water. The liquid LQ may be transmissive to the exposure light EL. The liquid LQ may have a high refractive index with respect to the exposure light EL. The liquid LQ may have a characteristic that it is stable with respect to the projection optical system 3 or the photosensitive material (that is, photoresist) that forms the surface of the substrate 51. As an example of such a liquid LQ, for example, a fluorine-based liquid (for example, hydrofluoroether (HFE), perfluorinated polyether (PFPE), fomblin oil, or the like) can be given. The liquid LQ may be various fluids (for example, a supercritical fluid).

  In the above description, an example in which the substrate 51 includes a semiconductor wafer for manufacturing a semiconductor device is illustrated. However, the substrate 51 may include a glass substrate for a display device. The substrate 51 may include a ceramic wafer for a thin film magnetic head. The substrate 51 may include a mask or reticle master (for example, synthetic quartz or silicon wafer) used in the exposure apparatus.

  In the above description, the exposure apparatus EX1 is a step-and-scan type scanning exposure apparatus (so-called scanning stepper) that scans and exposes a device pattern formed on the mask 11 by moving the mask 11 and the substrate 51. An example is given. However, the exposure apparatus EX1 performs step-and-step movement of the device pattern formed on the mask 11 in a state where the mask 11 and the substrate 51 are stationary and step-moving the substrate 51 every time the batch exposure is completed. A repeat type projection exposure apparatus (so-called stepper) may be used. The step-and-repeat projection exposure apparatus exposes the substrate 51 with a reduced image of the first device pattern formed on the first mask 11 in a state where the first mask 11 and the substrate 51 are substantially stationary. An exposure apparatus that exposes the reduced image of the second device pattern formed on the second mask 11 with the second mask 11 and the substrate 51 substantially stationary on the substrate 51 so as to overlap the reduced image of the first device pattern. A so-called stitch type exposure apparatus) may also be used. The stitch type exposure apparatus may be a step-and-stitch type exposure apparatus in which two or more device patterns are partially overlapped and exposed on the substrate 51 and the substrate 51 is sequentially moved.

  The exposure apparatus EX1 synthesizes the device patterns of the two masks 11 on the substrate 51 via the projection optical system 3, and simultaneously double-exposes the shot area S on the substrate 51 by one scanning exposure. It may be. An example of such an exposure apparatus is disclosed in, for example, US Pat. No. 6,611,316. The exposure apparatus EX1 may be a proximity type exposure apparatus. The exposure apparatus EX1 may be a mirror projection aligner or the like.

  The exposure apparatus EX1 may be a twin stage type or multi-stage exposure apparatus including a plurality of substrate stages 5. Examples of the twin stage type exposure apparatus are disclosed in, for example, US Pat. No. 6,341,007, US Pat. No. 6,208,407 and US Pat. No. 6,262,796. For example, as shown in FIG. 23, when the exposure apparatus EX1 includes two substrate stages 5A and 5B, the object disposed so as to face the exit surface 32 of the last optical element 31 is one substrate. It may be at least one of the stage 5A, the substrate 51A held on the one substrate stage 5A, the other substrate stage 5B, and the substrate 51B held on the other substrate stage 5B.

  The exposure apparatus EX1 may be a twin stage type or multistage type exposure apparatus that includes a plurality of substrate stages 5 and measurement stages 6.

  The exposure apparatus EX1 may be an exposure apparatus for manufacturing a semiconductor element that exposes a semiconductor element pattern onto the substrate 51. The exposure apparatus EX1 may be an exposure apparatus for manufacturing a liquid crystal display element or for manufacturing a display. The exposure apparatus EX1 may be an exposure apparatus for manufacturing at least one of a thin film magnetic head, an imaging device (for example, CCD), a micromachine, a MEMS, a DNA chip, and a mask 11 (or a reticle).

  In the above description, an example in which the mask 11 is a transmissive mask in which a predetermined light-shielding pattern (or a moving pattern or a dimming pattern) is formed on a light transmissive transparent plate is illustrated. However, the mask 11 may be a variable shaping mask (so-called electronic mask, active mask or image generator) that forms a transmission pattern, a reflection pattern, or a light emission pattern based on electronic data of a device pattern to be exposed. An example of a variable shaped mask is disclosed in US Pat. No. 6,778,257. The mask 11 may be a pattern forming apparatus including a self-luminous image display element instead of a variable shaping mask including a non-luminous image display element.

  In the above description, the exposure apparatus EX1 including the projection optical system 3 is illustrated. However, the various embodiments described above may be applied to an exposure apparatus and an exposure method that do not include the projection optical system 3. For example, the above-described various embodiments are provided for an exposure apparatus and an exposure method that form an immersion space between an optical member such as a lens and a substrate and expose the substrate with exposure light projected through the optical member. May be applied.

  The exposure apparatus EX1 may be an exposure apparatus (so-called lithography system) that exposes a line-and-space pattern on the substrate 51 by forming interference fringes on the substrate 51. An example of such an exposure apparatus is disclosed in, for example, International Publication No. 2001/035168 pamphlet.

  The above-described exposure apparatus EX1 may be manufactured by combining various subsystems including the above-described various components so as to maintain predetermined mechanical accuracy, electrical accuracy, and optical accuracy. In order to maintain mechanical accuracy, adjustment processing for achieving mechanical accuracy may be performed on various mechanical systems before and after the combination. In order to maintain electrical accuracy, adjustment processing for achieving electrical accuracy may be performed on various electrical systems before and after the combination. In order to maintain optical accuracy, adjustment processing for achieving optical accuracy may be performed on various optical systems before and after assembly. The step of combining the various subsystems may include a step of making a mechanical connection between the various subsystems. The step of combining various subsystems may include a step of wiring connection of electric circuits between the various subsystems. The step of combining various subsystems may include a step of connecting the piping of the atmospheric pressure circuit between the various subsystems. In addition, the process of assembling each of the various subsystems is performed before the process of combining the various subsystems. After the process of combining the various subsystems is completed, the overall adjustment of the exposure apparatus EX1 ensures various accuracies by performing comprehensive adjustment. The exposure apparatus EX1 may be manufactured in a clean room in which temperature, cleanliness, etc. are controlled.

  A microdevice such as a semiconductor device may be manufactured through the steps shown in FIG. The steps for manufacturing the microdevice include: step S201 for performing the function and performance design of the microdevice; step S202 for manufacturing the mask (reticle) 11 based on the function and performance design; and manufacturing the substrate 51 as the base material of the device. Step S203, in accordance with the above-described embodiment, Step S204 for exposing the substrate 51 with the exposure light EL from the device pattern of the mask 11 and developing the exposed substrate 51, device assembly processing (dicing processing, bonding processing, package processing) Step S205 including inspection processing) and inspection step S206 may be included.

The requirements of the above embodiments can be combined as appropriate. Some of the requirements of the above-described embodiments may not be used. In addition, as long as it is permitted by law, the disclosure of all published publications and US patents related to the exposure apparatus and the like cited in each of the above-described embodiments is incorporated as part of the description of the text.
As mentioned above, the following additional remarks are further described about embodiment described in this specification.
[Appendix 1]
An exposure apparatus that exposes a substrate using exposure light irradiated from an optical member through an immersion space,
An immersion member that is a movable member that forms the immersion space through which the exposure light passes and at least a part of which is movable;
A moving device for moving the movable member;
With
At least a part of the movable member is opposed to at least a part of the first object movable below the optical member;
The moving device may include the light in at least a part of a first period in which the first object moves along a direction including a directional component perpendicular to the optical axis of the optical member below at least a part of the movable member. An exposure apparatus that moves the movable member along a direction including a direction component perpendicular to an axis.
[Appendix 2]
The movable member includes a lower surface at least a part of which is opposed to at least a part of the first object.
In the moving device, the first object moves along a direction including a direction component perpendicular to the optical axis while at least a part of an upper surface of the first object faces at least a part of the lower surface. The exposure apparatus according to appendix 1, wherein the movable member is moved along a direction including a direction component perpendicular to the optical axis in at least a part of the period.
[Appendix 3]
The exposure apparatus according to appendix 1 or 2, wherein the first object includes the substrate.
[Appendix 4]
At least a part of the upper surface of the substrate includes a plurality of exposure regions each exposed by the exposure light,
The plurality of exposure areas include a first area exposed by the exposure light in at least a part of a period in which the substrate moves toward a first direction including a first direction component perpendicular to the optical axis. ,
The exposure apparatus according to appendix 3, wherein the first period includes at least a part of a second period in which the first region is exposed by the exposure light.
[Appendix 5]
The exposure apparatus according to appendix 4, wherein the moving apparatus moves the moving member in a period after the first time has elapsed since the exposure of the first area in the second period.
[Appendix 6]
6. The exposure apparatus according to appendix 5, wherein the moving device starts moving the moving member after the first time has elapsed since the exposure of the first region was started.
[Appendix 7]
The exposure apparatus according to appendix 5 or 6, wherein the moving apparatus does not move the moving member until the first time has elapsed after the exposure to the first region is started.
[Appendix 8]
The exposure apparatus according to appendix 4, wherein the moving device moves the movable member in a second direction including the first direction component.
[Appendix 9]
Item 8. The supplementary note 8 wherein the moving device moves the moving member toward the second direction in a period after the first time has elapsed since the exposure of the first region in the second period. Exposure equipment.
[Appendix 10]
The exposure apparatus according to appendix 9, wherein the moving device starts moving the moving member toward the second direction after the first time has elapsed since the exposure to the first region was started.
[Appendix 11]
The exposure apparatus according to appendix 9 or 10, wherein the moving apparatus does not move the moving member in the second direction until the first time has elapsed after the exposure to the first area is started.
[Appendix 12]
The plurality of exposure areas is a period after the exposure to the first area is completed, and includes a second direction component perpendicular to the optical axis that is opposite to the first direction component. A second region exposed by the exposure light in at least part of a period in which the substrate moves in a direction,
The first period according to any one of appendices 4 to 11, including at least part of a third period from the end of exposure to the first region to the start of exposure to the second region. The exposure apparatus described.
[Appendix 13]
The moving device moves the movable member in a fourth direction including a third direction component perpendicular to each of the optical axis, the first direction component, and the second direction component in at least a part of the third period. The exposure apparatus according to appendix 12, wherein the exposure apparatus is moved.
[Appendix 14]
The moving device moves the movable member in a fifth direction including a fourth direction component perpendicular to the optical axis that is opposite to the third direction component in at least a part of the second period. The exposure apparatus according to appendix 13.
[Appendix 15]
The exposure apparatus according to any one of appendices 1 to 14, wherein a movement timing for moving the movable member is determined based on a movement mode of the first object.
[Appendix 16]
The exposure apparatus according to appendix 15, wherein the movement timing is determined so that the movement of the movable member is started when the first object moves in a predetermined manner.
[Appendix 17]
The exposure apparatus according to appendix 15 or 16, wherein the movement timing is determined so that the movement of the movable member is started when the first object reaches a predetermined position.
[Appendix 18]
The exposure apparatus according to any one of appendices 1 to 17, wherein the movable member includes a first liquid recovery port.
[Appendix 19]
The exposure apparatus according to appendix 18, wherein a movement timing for moving the movable member is determined based on a mode of liquid recovery by the first liquid recovery port.
[Appendix 20]
The exposure apparatus according to appendix 19, wherein the movement timing is determined so that the movement of the movable member is started when both or one of the collection amount and the collection pressure in the liquid collection satisfy a predetermined condition.
[Appendix 21]
Additional remark 18 to 20 for determining a moving timing for moving the movable member based on a positional relationship between at least a part of the interface of the immersion space and at least a part of the first liquid recovery port. The exposure apparatus according to item.
[Appendix 22]
Between at least a part of the interface located on the front side along the moving direction of the first object and at least a part of the first liquid recovery port located on the front side along the moving direction of the first object The exposure apparatus according to appendix 21, wherein the movement timing is determined based on the positional relationship of
[Appendix 23]
The movement timing is determined so that the movement of the movable member is started when it is estimated that a positional relationship between at least a part of the interface and at least a part of the first liquid recovery port becomes a predetermined relationship. The exposure apparatus according to appendix 21 or 22.
[Appendix 24]
It is estimated that at least a part of the interface reaches at least a part of the first liquid recovery port. A second time after at least a part of the interface reaches at least a part of the first liquid recovery port. The movable member is moved at a time when it is estimated that a period of time has passed or at least a part of the interface reaches at least a part of the first liquid recovery port is less than a third time. The exposure apparatus according to any one of appendices 21 to 23, wherein the movement timing is determined so as to start.
[Appendix 25]
In any one of appendices 21 to 24, a position between at least a part of the interface is estimated based on both or one of a movement mode of the first object and a liquid recovery mode by the first liquid recovery port. The exposure apparatus described.
[Appendix 26]
A positional relationship between at least a part of the interface and at least a part of the first liquid recovery port based on both or one of the movement mode of the first object and the mode of liquid recovery by the first liquid recovery port. The exposure apparatus according to any one of appendices 21 to 25, wherein
[Appendix 27]
Any one of appendixes 18 to 26, wherein the moving device moves the movable member so that the interface of the immersion space is located inside the outer peripheral end of the first liquid recovery port with respect to the optical axis. The exposure apparatus according to item.
[Appendix 28]
The moving device is located on the front side along the moving direction of the first object, inside the outer peripheral end of the first liquid recovery port positioned on the front side along the moving direction of the first object. 28. The exposure apparatus according to appendix 27, wherein the movable member is moved so that at least a part of the interface is located.
[Appendix 29]
The exposure apparatus according to any one of appendices 1 to 28, wherein the moving device moves the movable member in the same direction as the moving direction of the first object.
[Appendix 30]
The moving device has a positional relationship between a predetermined location on the first object or between the first object and a second object movable below the optical member and at least a part of the liquid immersion member. 30. The exposure apparatus according to any one of appendices 1 to 29, wherein the movement mode of the movable member is adjusted in at least a part of a fourth period determined accordingly.
[Appendix 31]
The exposure apparatus according to appendix 30, wherein the fourth period includes a period in which a distance between the predetermined portion and at least a part of the liquid immersion member is equal to or less than a first distance.
[Appendix 32]
The exposure apparatus according to appendix 30 or 31, wherein the fourth period includes a period in which at least a part of the liquid immersion member passes above the predetermined portion.
[Appendix 33]
The moving device adjusts the moving mode so that the relative speed of the movable member with respect to the first object is smaller than when the moving mode is assumed not to be adjusted. 33. The exposure apparatus according to any one of appendices 30 to 32, which adjusts the movement mode.
[Appendix 34]
In the case of adjusting the movement mode, the moving device is set in a direction different from or opposite to the moving direction of the first object, based on the position of the movable member when it is assumed that the movement mode is not adjusted. 34. The exposure apparatus according to any one of appendices 30 to 33, wherein a movement mode of the movable member is adjusted so that the movable member additionally moves toward the surface.
[Appendix 35]
The moving device adjusts a moving mode of the movable member so that the movable member moves relative to the first object in a direction different from or opposite to the moving direction of the first object. The exposure apparatus according to any one of supplementary notes 30 to 34.
[Appendix 36]
When the movement mode is adjusted, the moving device moves in the same direction as the moving direction of the first object with reference to the position of the movable member when the movement mode is not adjusted. 36. The exposure apparatus according to any one of appendices 30 to 35, wherein a movement mode of the movable member is adjusted so that the member additionally moves.
[Appendix 37]
(Supplementary note 30) The moving device adjusts the moving mode of the movable member so that the movable member moves relative to the first object in the same direction as the moving direction of the first object. 37. The exposure apparatus according to any one of items 36 to 36.
[Appendix 38]
The exposure apparatus according to any one of appendices 30 to 37, wherein the movable member includes a second liquid recovery port.
[Appendix 39]
39. The exposure apparatus according to appendix 38, wherein the fourth period includes a period determined according to a positional relationship between the predetermined location and at least a part of the second liquid recovery port.
[Appendix 40]
40. The exposure apparatus according to appendix 38 or 39, wherein the fourth period includes a period in which a distance between the predetermined location and at least a part of the second liquid recovery port is equal to or less than a second distance.
[Appendix 41]
41. The exposure apparatus according to any one of appendices 38 to 40, wherein the fourth period includes a period in which at least a part of the second liquid recovery port passes above the predetermined portion.
[Appendix 42]
The fourth period includes a period during which at least a part of the second liquid recovery port located on the front side or the rear side along the moving direction of the first object passes above the predetermined portion. The exposure apparatus according to any one of the above.
[Appendix 43]
When the movement device adjusts the movement mode, the movement direction of the first object is based on the position of at least a part of the second liquid recovery port when it is assumed that the movement mode is not adjusted. 43. The exposure according to any one of appendices 38 to 42, wherein a movement mode of the movable member is adjusted such that at least a part of the second liquid recovery port is additionally moved in a different or opposite direction. apparatus.
[Appendix 44]
The moving device is configured so that at least part of the second liquid recovery port moves relative to the first object in a direction different from or opposite to the moving direction of the first object. 44. The exposure apparatus according to any one of appendices 38 to 43, which adjusts the movement mode of the movable member.
[Appendix 45]
When the movement device adjusts the movement mode, the movement direction of the first object is based on the position of at least a part of the second liquid recovery port when it is assumed that the movement mode is not adjusted. 45. The exposure apparatus according to any one of appendices 38 to 44, wherein a movement mode of the movable member is adjusted so that at least a part of the second liquid recovery port is additionally moved in the same direction.
[Appendix 46]
The moving device moves the movable member so that at least a part of the second liquid recovery port moves relative to the first object in the same direction as the moving direction of the first object. 46. The exposure apparatus according to any one of appendices 38 to 45, which adjusts the movement mode.
[Appendix 47]
47. The exposure apparatus according to any one of appendices 30 to 46, wherein the fourth period includes a period determined according to a positional relationship between the predetermined location and at least a part of the interface of the immersion space.
[Appendix 48]
48. The exposure apparatus according to any one of appendices 30 to 47, wherein the fourth period includes a period in which a distance between the predetermined portion and at least a part of the interface of the immersion space is a third distance or less.
[Appendix 49]
49. The exposure apparatus according to any one of appendices 30 to 48, wherein the fourth period includes a period in which at least a part of the interface of the immersion space passes above the predetermined portion.
[Appendix 50]
The predetermined period includes a period in which at least a part of the interface of the immersion space located on the front side or the rear side along the moving direction of the first object passes above the predetermined part. The exposure apparatus according to any one of the above.
[Appendix 51]
When the movement device adjusts the movement mode, the movement direction of the first object is based on the position of at least a part of the interface of the immersion space when it is assumed that the movement mode is not adjusted. 51. The exposure apparatus according to any one of appendices 30 to 50, wherein a movement mode of the movable member is adjusted such that at least a part of the interface additionally moves in a different or opposite direction.
[Appendix 52]
The moving device is configured so that at least a part of the interface of the immersion space moves relative to the first object in a direction different from or opposite to the moving direction of the first object. 52. The exposure apparatus according to any one of appendices 30 to 51, which adjusts the movement mode of the movable member.
[Appendix 53]
When the movement mode is adjusted, the movement device is the same as the movement direction of the first object on the basis of the position of at least a part of the interface of the immersion space when the movement mode is not adjusted. 53. The exposure apparatus according to any one of supplementary notes 30 to 52, wherein a movement mode of the movable member is adjusted so that at least a part of the interface is additionally moved toward the direction of.
[Appendix 54]
The moving device is configured so that at least a part of the interface of the immersion space moves relative to the first object in the same direction as the moving direction of the first object. 54. The exposure apparatus according to any one of appendices 30 to 53, which adjusts the movement mode.
[Appendix 55]
In the case of adjusting the movement mode, the moving device adjusts the interface with respect to the optical axis with reference to the position of at least a part of the interface of the immersion space when the movement mode is not adjusted. 55. The exposure apparatus according to any one of supplementary notes 30 to 54, wherein the movement mode of the movable member is adjusted so that at least a part of the movable member is positioned inside or outside.
[Appendix 56]
Any one of Supplementary Notes 30 to 55, wherein the moving device adjusts a moving mode of the movable member so that at least a part of the interface is located inside or outside the predetermined position with respect to the optical axis. The exposure apparatus described in 1.
[Appendix 57]
An exposure apparatus that exposes a substrate using exposure light irradiated through an immersion space,
An immersion member that is a movable member that forms the immersion space through which the exposure light passes and at least a part of which is movable;
A moving device for moving the movable member;
With
The movable member includes a first liquid recovery port;
An exposure apparatus that determines a moving timing for moving the movable member based on a mode of liquid recovery by the first liquid recovery port.
[Appendix 58]
An exposure apparatus that exposes a substrate using exposure light irradiated through an immersion space,
An immersion member that is a movable member that forms the immersion space through which the exposure light passes and at least a part of which is movable;
A moving device for moving the movable member;
With
The movable member includes a first liquid recovery port;
An exposure apparatus that determines a moving timing for moving the movable member based on a positional relationship between at least a part of the interface of the immersion space and at least a part of the first liquid recovery port.
[Appendix 59]
An exposure apparatus that exposes a substrate using exposure light irradiated from an optical member through an immersion space,
An immersion member that is a movable member that forms the immersion space through which the exposure light passes and at least a part of which is movable;
A moving device for moving the movable member;
With
The moving device includes at least a predetermined portion on the first object movable below the optical member or between the first object and the second object movable below the optical member, and at least the liquid immersion member. An exposure apparatus that adjusts a movement mode of the movable member in at least a part of a fourth period that is determined according to a positional relationship with the part.
[Appendix 60]
An exposure apparatus that exposes a substrate using exposure light irradiated through an immersion space,
An immersion member that is a movable member that forms the immersion space through which the exposure light passes and at least a part of which is movable;
A moving device for moving the movable member;
With
The moving device may be configured such that the liquid immersion member is located above a predetermined position on the first object movable below the optical member or between the first object and a second object movable below the optical member. In at least a part of a period during which at least a part of the liquid immersion member passes, the relative speed of the movable member with respect to the first object is smaller than before the at least part of the liquid immersion member passes above the predetermined portion. An exposure apparatus for moving the movable member.
[Appendix 61]
An exposure apparatus that exposes a substrate using exposure light irradiated through an immersion space,
An immersion member that is a movable member that forms the immersion space through which the exposure light passes and at least a part of which is movable;
A moving device for moving the movable member;
With
The moving device moves the movable member relative to the first object such that the movable member moves relative to a direction that is the same as, different from, or opposite to the moving direction of the first object. Exposure device.
[Appendix 62]
An exposure method for exposing a substrate using exposure light irradiated from an optical member through an immersion space,
Forming the immersion space through which the exposure light passes, using an immersion member that is a movable member at least a part of which is movable;
Moving the movable member;
With
At least a part of the movable member is opposed to at least a part of the first object movable below the optical member;
Moving the movable member means at least part of a first period in which the first object moves along a direction including a direction component perpendicular to the optical axis of the optical member below at least part of the movable member. In the exposure method, the movable member is moved along a direction including a direction component perpendicular to the optical axis.
[Appendix 63]
An exposure method for exposing a substrate using exposure light irradiated through an immersion space,
Forming the immersion space through which the exposure light passes, using an immersion member that is a movable member at least a part of which is movable;
Moving the movable member;
With
The movable member includes a first liquid recovery port;
The exposure method includes determining a moving timing for moving the movable member based on a mode of liquid recovery by the first liquid recovery port.
[Appendix 64]
An exposure method for exposing a substrate using exposure light irradiated through an immersion space,
Forming the immersion space through which the exposure light passes, using an immersion member that is a movable member at least a part of which is movable;
Moving the movable member;
With
The movable member includes a first liquid recovery port;
The exposure method includes determining a moving timing for moving the movable member based on a positional relationship between at least a part of the interface of the immersion space and at least a part of the first liquid recovery port. Exposure method.
[Appendix 65]
An exposure method for exposing a substrate using exposure light irradiated from an optical member through an immersion space,
Forming the immersion space through which the exposure light passes, using an immersion member that is a movable member at least a part of which is movable;
Moving the movable member;
With
Moving the movable member means that the liquid on the first object movable below the optical member or between the first object and the second object movable below the optical member and the liquid An exposure method comprising adjusting a movement mode of the movable member in at least a part of a fourth period determined according to a positional relationship with at least a part of the immersion member.
[Appendix 66]
An exposure method for exposing a substrate using exposure light irradiated through an immersion space,
Forming the immersion space through which the exposure light passes, using an immersion member that is a movable member at least a part of which is movable;
Moving the movable member;
With
The movable member is moved on a first object movable below the optical member or above a predetermined portion between the first object and a second object movable below the optical member. In at least a part of a period during which at least a part of the liquid immersion member passes, the movable member relative to the first object is compared to before the at least part of the liquid immersion member passes above the predetermined portion. An exposure method including moving the movable member so that a relative speed is reduced.
[Appendix 67]
An exposure method for exposing a substrate using exposure light irradiated through an immersion space,
Forming the immersion space through which the exposure light passes, using an immersion member that is a movable member at least a part of which is movable;
Moving the movable member;
With
Moving the movable member means that the movable member moves relative to the first object in a direction that is the same as, different from, or opposite to the moving direction of the first object. An exposure method including moving a member.
[Appendix 68]
Exposing the substrate using the exposure apparatus according to any one of appendices 1 to 61;
Developing the exposed substrate;
A device manufacturing method comprising:
[Appendix 69]
Exposing the substrate using the exposure method according to any one of appendices 62 to 67;
Developing the exposed substrate;
A device manufacturing method comprising:

  Further, the present invention can be appropriately changed without departing from the gist or concept of the invention that can be read from the claims and the entire specification, and an exposure apparatus, an exposure method, and a device manufacturing method involving such a change are also included. It is included in the technical idea of the present invention.

DESCRIPTION OF SYMBOLS 1 Mask stage 2 Illumination system 3 Projection optical system 31 Terminal optical element 32 Exit surface 33 Outer surface 4A Liquid immersion member 41A 1st member 42A 2nd member 431 Liquid supply port 441,442 Fluid recovery port 5 Substrate stage 51 Substrate 6 Measurement stage 7 Measurement system 8 Chamber device 9 Control device 91 Controller AT, ATO, ATL Optical path AX Optical axis EL Exposure light EX1 Exposure device LQ Liquid LS Immersion space

Claims (4)

An exposure apparatus that exposes a substrate using exposure light irradiated from an optical member through an immersion space,
An immersion member that is a movable member that forms the immersion space through which the exposure light passes and at least a part of which is movable;
A moving device for moving the movable member,
At least a part of the movable member is opposed to at least a part of the first object movable below the optical member;
The moving device may include the light in at least a part of a first period in which the first object moves along a direction including a directional component perpendicular to the optical axis of the optical member below at least a part of the movable member. Moving the movable member along a direction including a direction component perpendicular to the axis ;
The mobile device, you adjust the movement mode of the moving member based on the positional relationship between at least a portion of the predetermined portion and the liquid immersion member on said first object exposure apparatus. The moving device includes: a positional relationship between a predetermined location on the second object movable below the optical member and at least a part of the liquid immersion member; and a predetermined relationship between the first object and the second object. The exposure apparatus according to claim 1 , wherein the movement mode of the movable member is adjusted based on one or both of the positional relationship between the location and at least a part of the liquid immersion member.   The first object includes a substrate stage that is movable while holding the substrate;
  The exposure apparatus according to claim 1, wherein the movement mode of the movable member based on the positional relationship includes adjustment of the movement mode of the movable member based on the movement mode of the substrate stage. Exposing the substrate using the exposure apparatus according to any one of claims 1 to 3 ,
Developing the exposed substrate. A device manufacturing method.

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