JP6430342B2 - Resin molding apparatus, resin molding method, and mold - Google Patents

Description

  The present invention relates to a resin molding apparatus, a resin molding method, and a molding die used when a chip-shaped electronic device (hereinafter, referred to as “chip” as appropriate) is resin-sealed.

  Conventionally, a chip mounted on a circuit board (hereinafter referred to as “substrate” as appropriate) is resin-sealed with a cured resin using a resin molding technique. The chip includes a semiconductor chip such as a transistor, an integrated circuit (IC), and a light emitting diode (LED). Examples of the circuit board include a lead frame, a printed circuit board (PCB), and a ceramics substrate. Examples of the resin molding technique include a transfer molding method, a compression molding method (compression molding method), and an injection molding method (injection molding method). In recent years, the need for resin sealing using a compression molding method has increased due to the trend of increasing the size and thickness of circuit boards and further laminating circuit boards by three-dimensional mounting.

  Resin sealing by the compression molding method is performed as follows. In the resin molding apparatus, first, a release film is coated on the lower mold. A release film is adsorbed on the upper surface of the peripheral surface member (frame member) constituting the lower mold and the mold surface of the cavity. Next, a resin material made of a thermosetting resin is supplied to the cavity. A fluid resin is produced by heating and melting the resin material. Next, the upper mold and the lower mold are clamped, and the chip mounted on the substrate is immersed in the fluid resin. A predetermined resin pressure is applied to the fluid resin by the bottom member to cure the fluid resin to form a cured resin. Thus, the chip mounted on the substrate is resin-sealed with a cured resin.

  When covering and adsorbing the release film on the lower mold, an appropriate tensile force (tension, tension) is applied to the release film so that wrinkles and sagging do not occur. However, depending on the depth of the cavity and the flexibility of the release film, wrinkles and sagging may occur in the release film, and may not be completely adhered to the lower mold surface. When resin sealing is performed in a state where wrinkles are generated in the release film, the wrinkles are transferred to a molded product sealed with resin. When wrinkles are transferred to the molded product, it may be difficult to release the molded product. Furthermore, there is a risk of causing a quality defect of the molded product. Therefore, it is important to optimize the shape and depth of the suction groove that adsorbs the release film in accordance with the depth of the cavity and the flexibility of the release film so that wrinkles and sagging do not occur. .

  As a small resin-sealed mold that does not cause wrinkles or tarmi on the release film and has a good yield of the molded product, `` a lower mold in which film suction holes are arranged on the joint surface provided around the opening cavity, A pressing member that covers the cavity and has a pressing surface that is disposed opposite to the bonding surface of the lower mold, and a release film that is adsorbed and held at the outer peripheral edge of the film suction hole. A resin-sealed mold capable of pressing the outer peripheral edge of the release film against the bonding surface of the lower mold, and an annular protrusion that is one step higher than the bonding surface between the cavity and the bonding surface An “provided” resin-sealed mold has been proposed (see, for example, paragraph [0006] of FIG. 4 and FIG. 15 of Patent Document 1).

JP2015-82607A

  However, according to the resin-sealed mold disclosed in Patent Document 1, the following problems occur. If the release film to be used is a material having a certain degree of softness, tension is applied to the release film by the annular protrusions, so that wrinkles and sagging can be prevented. When the release film is made of a material having a certain degree of hardness, the presence of this annular protrusion can create a gap between the release film and the cavity, thereby allowing the release film to adhere to the cavity. There is a risk of disappearing.

  SUMMARY OF THE INVENTION An object of the present invention is to provide a resin molding apparatus, a resin molding method, and a mold that can be sealed with resin without causing wrinkles or sagging in a release film. To do.

  In order to solve the above-described problems, a resin molding apparatus according to the present invention includes a molding die having at least a first die and a second die facing the first die, a first die, and a second die. A cavity provided on a top surface of at least one of the molds, a material supply mechanism for supplying a resin material to the cavity, and a mold clamping mechanism for opening and clamping the mold, A functional film is adsorbed along the surface, and a molded product containing a cured resin formed by curing a fluid resin generated from a resin material and existing inside a cavity in a state where the mold is clamped is manufactured. A resin molding apparatus used for performing an annular outer peripheral suction groove provided on the top surface of the outer peripheral portion formed of an outer portion of the cavity, and a plurality of outer peripherals connected to the outer peripheral suction groove and penetrating one mold Through passage and outer periphery On the top surface, a plurality of main recesses provided inside the outer peripheral adsorption groove so as to surround the cavity, a plurality of main members fitted so as to be attachable to and detachable from each of the plurality of main recesses, and a plurality of A plurality of main suction grooves respectively provided on the top surface of the main member; a plurality of main through passages that respectively communicate with the plurality of main suction grooves and pass through one mold; and an opening formed in the mold surface of the cavity; A cavity through-passage connected to the opening and penetrating through one mold, and the functional film is adsorbed on the inner surface of the outer-periphery adsorption groove via the outer-periphery adsorption groove and the plurality of outer-periphery passages, and a plurality of main adsorption grooves The functional film is adsorbed on the inner surface of the plurality of main adsorption grooves through the main through-passage and the plurality of main through-passages, and the functional film is adsorbed along the mold surface of the cavity through the opening and the through-passage for the cavity. That And butterflies.

  The resin molding device according to the present invention can be attached to and detached from each of the plurality of sub-recesses provided between the plurality of main recesses on the top surface of the outer peripheral portion and the plurality of sub-recesses in the above-described resin molding device. The plurality of sub-members fitted in this way, the plurality of sub-adsorption grooves respectively provided on the top surfaces of the plurality of sub-members, and the plurality of sub-admissions respectively communicating with the plurality of sub-adsorption grooves and passing through one mold The functional film is adsorbed on the inner surfaces of the plurality of sub adsorption grooves through the plurality of sub adsorption grooves and the plurality of sub through passages.

  The resin molding apparatus according to the present invention is characterized in that, in the above-described resin molding apparatus, the plurality of auxiliary suction grooves have a line-shaped shape or a curved shape in plan view.

  The resin molding apparatus according to the present invention is the above-described resin molding apparatus, wherein the cavity has a rectangular planar shape, and the plurality of main suction grooves are the first side of the cavity and the second side adjacent to the first side. Are provided in parallel with each other.

  The resin molding apparatus according to the present invention is characterized in that, in the above-described resin molding apparatus, an element having a functional surface in contact with the fluid resin in the functional film is transferred to the surface of the cured resin.

The resin molding apparatus according to the present invention is characterized in that in the above-described resin molding apparatus, at least one of the following invention specific matters is provided.
-The plurality of main suction grooves have a cross-sectional shape in which the sides of the plurality of main through passages are narrowed.
-The plurality of sub-adsorption grooves have a cross-sectional shape that narrows the side of the plurality of sub-through passages.

The resin molding apparatus according to the present invention is characterized in that in the above-described resin molding apparatus, at least one of the following invention specific matters is provided.
-The plurality of main suction grooves have different inclinations on the inner surface near the cavity and the inner surface far from the cavity.
-The sub-adsorption grooves should have different inclinations on the inner surface near the cavity and the inner surface far from the cavity.

  The resin molding device according to the present invention is the above-described resin molding device, wherein at least a plurality of main recesses, a plate-like member having a hole is interposed between the opposite surface of the top surface of the plurality of main members and the plurality of main recesses, respectively. The positions of the top surfaces of the plurality of main members in the height direction are adjusted by arranging and communicating the main suction grooves and the holes.

  The resin molding apparatus according to the present invention is characterized in that, in the above-described resin molding apparatus, the functional film has a strip shape, a circular shape, or a long shape.

  The resin molding apparatus according to the present invention includes the material supply module for supplying at least a functional film to the cavity and at least one molding module having at least a molding die and a clamping mechanism in the resin molding apparatus described above. One molding module can be attached to and detached from the supply module, and one molding module can be attached to and detached from other molding modules.

In order to solve the above-described problems, a resin molding method according to the present invention includes a first mold and a top surface of at least one mold out of molds having at least a second mold opposite to the first mold. Supplying the functional film to the cavity provided in the mold, adsorbing the functional film to the top surface of one mold, supplying the resin material to the cavity, and generating the resin material in the cavity Resin molding comprising a step of curing an existing fluid resin in a state where the mold is clamped to form a cured resin, a step of opening the mold, and a step of taking out a molded product containing the cured resin. It is a method, Comprising: The process of adsorb | sucking a functional film has the following process, It is characterized by the above-mentioned.
A step of preparing an annular outer peripheral suction groove provided on the top surface of the outer peripheral portion composed of an outer portion of the cavity and a plurality of outer peripheral through passages connected to the outer peripheral suction groove and penetrating one mold.
A plurality of main recesses provided inside the outer periphery adsorption groove so as to surround the cavity on the top surface of the outer periphery, and a plurality of main members fitted so as to be detachable from each of the plurality of main recesses Preparing the process.
A step of preparing a plurality of main suction grooves provided on the top surfaces of the plurality of main members, respectively.
A step of preparing a plurality of main through passages that respectively communicate with the plurality of main suction grooves and penetrate one mold.
A step of preparing an opening formed in the mold surface of the cavity and a cavity through-passage connected to the opening and penetrating through one mold;
-The process of softening a functional film by heating the functional film supplied to the top surface of one type | mold.
A step of adsorbing a functional film on the inner surface of the outer periphery adsorption groove using an annular outer periphery adsorption groove and a plurality of outer peripheral through passages.
A step of adsorbing the functional film on the inner surfaces of the plurality of main adsorption grooves using the plurality of main adsorption grooves and the plurality of main through passages.
A process of adsorbing a functional film on the mold surface of the cavity using the opening and the through-hole for the cavity.
-The process of clamping the mold.

The resin molding method according to the present invention is characterized in that, in the above-described resin molding method, the step of adsorbing the functional film further includes the following steps.
A step of preparing a plurality of sub-recesses provided between the plurality of main recesses on the top surface of the outer peripheral portion and a plurality of sub-members fitted so as to be detachable from each of the plurality of sub-recesses. .
A step of preparing a plurality of sub suction grooves provided on the top surfaces of the plurality of sub members, respectively.
A step of preparing a plurality of sub through passages that respectively communicate with the plurality of sub adsorption grooves and penetrate one mold.
A step of adsorbing the functional film on the inner surfaces of the plurality of sub suction grooves using the plurality of sub suction grooves and the plurality of sub through passages.

  The resin molding method according to the present invention is characterized in that, in the above-mentioned resin molding method, the plurality of sub-adsorption grooves have a line-shaped shape or a curved shape in plan view.

  The resin molding method according to the present invention is the above-described resin molding method, wherein the cavity has a rectangular planar shape, and the plurality of main suction grooves are the first side of the cavity and the second side adjacent to the first side. Are provided in parallel with each other.

  The resin molding method according to the present invention is characterized in that, in the above-described resin molding method, in the step of forming the cured resin, an element having a functional surface in contact with the fluid resin in the functional film is transferred to the surface of the cured resin. And

The resin molding method according to the present invention is characterized in that in the above-mentioned resin molding method, at least one of the following invention specific matters is provided.
-The plurality of main suction grooves have a cross-sectional shape in which the sides of the plurality of main through passages are narrowed.
-The plurality of sub-adsorption grooves have a cross-sectional shape that narrows the side of the plurality of sub-through passages.

The resin molding method according to the present invention is characterized in that in the above-mentioned resin molding method, at least one of the following invention specific matters is provided.
-The plurality of main suction grooves have different inclinations on the inner surface near the cavity and the inner surface far from the cavity.
-The sub-adsorption grooves should have different inclinations on the inner surface near the cavity and the inner surface far from the cavity.

  The resin molding method according to the present invention is the above-described resin molding method, wherein at least a plurality of main recesses, a plate-like member having a hole is interposed between the opposite surface of the top surface of the plurality of main members and the plurality of main recesses, respectively. A step of adjusting the positions of the top surfaces of the plurality of main members in the height direction by arranging the main suction grooves and the holes to communicate with each other is provided.

  The resin molding method according to the present invention is characterized in that, in the above-described resin molding method, the functional film has a strip shape, a circular shape, or a long shape.

  The resin molding method according to the present invention includes, in the above-described resin molding method, a step of preparing a material supply module that supplies at least a functional film to a cavity, and at least one molding module having at least a molding die and a clamping mechanism. And a step of preparing, wherein one molding module can be attached to and detached from the material supply module, and one molding module can be attached to and detached from other molding modules.

  In order to solve the above problems, a molding die according to the present invention includes at least a first die and a second die opposite to the first die, the first die and the second die. A cavity provided on the top surface of at least one of the molds to which the resin material is supplied, and the functional film is adsorbed along the mold surface of the cavity to be generated from the resin material and exist in the cavity. A mold used for manufacturing a molded article containing a cured resin formed by curing a resin in a state where the mold is clamped, and a top surface of an outer peripheral portion composed of an outer portion of a cavity An annular outer peripheral suction groove provided in the outer peripheral suction groove, a plurality of outer peripheral through passages connected to the outer peripheral suction groove and penetrating one mold, and a top surface of the outer peripheral portion, provided inside the outer peripheral suction groove so as to surround the cavity. Multiple main recesses A plurality of main members fitted so as to be attachable to and detachable from each of the plurality of main recesses, a plurality of main suction grooves provided on the top surfaces of the plurality of main members, and a plurality of main suction grooves, respectively. A plurality of main through passages each penetrating through one mold, an opening formed in the mold surface of the cavity, and a cavity through passage connected to the opening and penetrating through the one mold; The functional film is adsorbed on the inner surface of the outer peripheral suction groove through the outer peripheral through passage, and the functional film is adsorbed on the inner surface of the plurality of main adsorption grooves through the plural main adsorption grooves and the plurality of main through passages. The functional film is adsorbed along the mold surface of the cavity through the opening and the through-hole for the cavity.

  The mold according to the present invention can be attached to and detached from each of the plurality of sub-recesses and the plurality of sub-recesses provided between the plurality of main recesses on the top surface of the outer peripheral portion. A plurality of sub-members fitted, a plurality of sub-adsorption grooves respectively provided on top surfaces of the plurality of sub-members, and a plurality of sub-through passages that respectively communicate with the plurality of sub-adsorption grooves and penetrate one mold The functional film is adsorbed on the inner surfaces of the plurality of sub adsorption grooves through the plurality of sub adsorption grooves and the plurality of sub through passages.

  According to the present invention, the annular outer peripheral suction groove is provided on the top surface of the outer peripheral portion formed of the outer portion of the cavity, and the plurality of main concave portions are provided inside the outer peripheral suction groove so as to surround the cavity. The main member is fitted so as to be detachable from the main recess, and a main suction groove is provided on the top surface of the main member. In a state where the functional film is adsorbed on the inner surface of the annular outer periphery adsorption groove, the functional film is adsorbed on the inner surfaces of the plurality of main adsorption grooves provided inside the annular outer periphery adsorption groove. In a state where the functional film is adsorbed on the inner surfaces of the plurality of main adsorption grooves, the functional film is adsorbed along the mold surface of the cavity. Since uniform tension is applied to the functional film, generation of wrinkles and sagging in the functional film is suppressed.

(A) is a front view which shows the structure of a shaping | molding module in the resin molding apparatus which concerns on Example 1 of this invention, (b) is a general | schematic fragmentary sectional view which shows the shaping | molding die in a shaping | molding module. (A) is a top view which shows the structure of the lower mold | type used in the resin molding apparatus which concerns on Example 1 of this invention, (b) is the sectional view on the AA line of (a). (A) is a top view which shows the structure of the lower mold | type used in the resin molding apparatus which concerns on Example 2 of this invention, (b) is the BB sectional drawing of (a). (A)-(c) is a top view which respectively shows the corner groove | channel provided in a corner part in the lower mold | type shown by FIG. In the resin molding method according to Example 3 of the present invention, (a) is a schematic partial cross-sectional view showing a state in which the mold is opened, and (b) is a substrate mounted on the upper mold and the lower mold is covered with a release film. It is a schematic fragmentary sectional view which shows the state which adsorb | sucked the release film to the outer periphery adsorption groove. In the resin molding method which concerns on Example 3 of this invention, (a) is a schematic fragmentary sectional view which shows the state which adsorb | sucked the release film to the inner peripheral groove, (b) adsorbed the release film to the mold surface of the cavity. It is a general | schematic fragmentary sectional view which shows a state. In the resin molding method which concerns on Example 3 of this invention, (a) is a schematic fragmentary sectional view which shows the state which supplied granule resin to the cavity, (b) is a schematic which shows the state clamped, after fuse | melting granule resin. It is a fragmentary sectional view. In the resin molding method according to Example 3 of the present invention, (a) is a schematic partial cross-sectional view showing a state in which a cured resin is generated by raising and pressurizing a bottom member, and (b) is a mold opening and releasing. It is a general | schematic fragmentary sectional view which shows the state which took out the type | mold film and the molded article. It is a top view which shows the outline | summary of the resin molding apparatus which concerns on Example 4 of this invention.

  As shown in FIG. 2, the lower mold 11 includes a peripheral surface member 9 and a bottom surface member 10. An outer peripheral suction groove 16 is provided along the outer periphery of the peripheral surface member 9. The release film 15 covered with the lower mold 11 is adsorbed to the outer peripheral adsorption groove 16 to fix the release film 15 to the lower mold 11. A plurality of main recesses 18 are formed inside the outer periphery suction groove 16. A main member 21 for installation having a main suction groove 20 is attached to the plurality of main recesses 18. The cross section of the main suction groove 20 is formed so that the opening is wide and V-shaped. In a state where the release film 15 is adsorbed on the inner surface of the annular outer periphery adsorption groove 16, the release film 15 is adsorbed to the main adsorption groove 20. Thereby, a uniform tension is applied to the release film 15. In a state where the release film 15 is adsorbed on the inner surfaces of the plurality of main adsorption grooves 20, the release film 15 is adsorbed along the mold surface of the cavity 13. Accordingly, it is possible to prevent the release film 15 from wrinkling or sagging. In addition, the main suction groove 20 having a cross-sectional shape and a depth corresponding to the characteristics of the release film 15 can be applied by replacing the main member 21 in which the main suction groove 20 is formed.

  The structure of the molding module 2 provided in the resin molding apparatus 1 according to Embodiment 1 of the present invention will be described with reference to FIG. Any figure in the present application document is schematically omitted or exaggerated as appropriate for easy understanding. About the same component, the same code | symbol is attached | subjected and description is abbreviate | omitted suitably.

  As shown in FIG. 1A, in the resin molding apparatus 1, the molding module 2 has a lower base 3. Four tie bars 4 as support members are fixed to the four corners of the lower base 3. An upper base 5 opposite to the lower base 3 is fixed to the upper part of the four tie bars 4 extending upward. Between the lower base 3 and the upper base 5, an elevator board 6 facing the lower base 3 and the upper base 5 is fitted into the four tie bars 4. A mold clamping mechanism 7 is fixed on the lower base 3. The mold clamping mechanism 7 is a mechanism that raises and lowers the elevator board 6 in order to perform mold clamping and mold opening. The elevator board 6 is raised or lowered by the mold clamping mechanism 7.

  An upper mold 8 is fixed to the lower surface of the upper base 5. A frame-shaped peripheral surface member 9 is provided directly below the upper die 8 so as to face the upper die 8. The upper surface of the circumferential member 9 faces the lower surface of the upper mold 8. A rectangular through hole is provided in the center of the peripheral surface member 9 in plan view. A bottom surface member 10 having a rectangular planar shape is provided to be fitted into the through hole of the peripheral surface member 9. In the through hole of the circumferential member 9, the bottom member 10 can be raised and lowered relative to the circumferential member 9. The peripheral surface member 9 and the bottom surface member are collectively driven up and down by a mold clamping mechanism 7 (specifically, an elevator board 6).

  The peripheral surface member 9 and the bottom surface member 10 together constitute a lower mold 11. The upper mold 8 and the lower mold 11 together constitute a set of molds 12 (hereinafter simply referred to as “molding mold 12”). The upper mold 8 and the lower mold 11 are provided with heaters (not shown).

  As shown in FIG. 1 (b), a cavity 13 is formed on the upper surface of the lower mold 11. The cavity 13 is a space to which a resin material is supplied. The cavity 13 has a rectangular planar shape having a long side and a short side. A portion surrounding the cavity 13 is referred to as “side surface of the cavity”, and a portion constituting the bottom of the cavity 13 is referred to as “inner bottom surface of the cavity”. The side surface of the cavity 13 is constituted by the inner peripheral surface of the peripheral surface member 9. The inner bottom surface of the cavity 13 is constituted by the top surface (upper surface in the figure) of the bottom surface member 10. The cavity 13 is a space surrounded by the inner peripheral surface of the peripheral surface member 9 and the top surface of the bottom surface member 10.

  As shown in FIG. 1A, a bottom member 10 and a plurality of elastic bodies (coil springs, disk springs, etc.) 14 are fixed to the upper surface of the elevator board 6. The circumferential member 9 is placed on the plurality of elastic bodies 14. The lower plate 11 (the peripheral surface member 9 and the bottom surface member 10) is moved up and down as the lifting plate 6 is moved up and down by the mold clamping mechanism 7. A plurality of elastic bodies (not shown) may be provided between the bottom member 10 and the elevator board 6.

  With reference to FIG. 2, the structure of the lower mold | type 11 used in the resin molding apparatus 1 which concerns on Example 1 of this invention is demonstrated. The lower mold 11 is constituted by a circumferential member 9 and a bottom member 10. The bottom member 10 is fitted into the through hole of the peripheral member 9. A space surrounded by the inner circumferential surface of the circumferential member 9 and the inner bottom surface of the bottom member 10 becomes a cavity 13. A release film 15 which is a kind of functional film is supplied above the lower mold 11, and the lower mold 11 is covered with the release film 15. The functional surface FS which is a surface in contact with the fluid resin in the release film 15 has low adhesion to the cured resin molded in the cavity 13. When the release film 15 is heated by a heater (not shown), the release film 15 is softened and stretched. In other words, characteristics such as flexibility and extensibility of the release film 15 change when heated.

  As the release film 15, a resin material having characteristics such as heat resistance, release properties, flexibility, and extensibility is used. For example, PTFE, ETFE, PET, FEP, polypropylene, polystyrene, polyvinylidene chloride and the like are used depending on the application. The characteristics of the release film 15 vary depending on the material. As the release film 15, either a release film cut into a strip shape or a long (roll-shaped) release film continuously supplied from the film supply reel to the film take-up reel is used. Is done.

  As shown in FIG. 2A, an outer peripheral suction groove 16 having an annular planar shape closed in plan view is provided so as to surround the cavity 13 along the outer periphery of the peripheral surface member 9. The outer periphery adsorption groove 16 is an adsorption groove for adsorbing the release film 15 and fixing it to the upper surface (top surface) of the circumferential member 9. The outer peripheral adsorption grooves 16 having an annular planar shape may be connected or may be interrupted at one place or a plurality of places.

  The outer periphery adsorption groove 16 has a predetermined width, a predetermined depth, and a predetermined cross-sectional shape. In FIG. 2, for example, the inner surface of the outer peripheral suction groove 16 is formed to be vertical. In the outer periphery suction groove 16, a plurality of outer peripheral through passages 17 for sucking and fixing the release film 15 are formed at regular intervals. The outer peripheral through passage 17 penetrates the peripheral surface member 9 from the surface of the outer peripheral suction groove 16.

  As shown in FIG. 2B, in the peripheral surface member 9, a plurality of divided main concave portions 18 are formed inside the outer peripheral suction groove 16. A plurality of main through passages 19 penetrating the peripheral surface member 9 from the bottom surfaces of the plurality of main recesses 18 are formed. The plurality of main recesses 18 are fitted with mounting main members 21 each having a main suction groove 20. Each main adsorption groove 20 is an adsorption groove for adsorbing the release film 15 adsorbed by the outer periphery adsorption groove 16 and applying tension to the release film 15.

  In each main member 21, a plurality of main suction paths 22 are formed at regular intervals through the main member 21 from the surface of the main suction groove 20 to suck the release film 15 and apply tension. The In a state where each main member 21 is mounted in each main recess 18, the plurality of main suction paths 22 communicate with respective main through paths 19 formed in the circumferential member 9. The inner diameter of the main through passage 19 formed in the peripheral surface member 9 is formed larger than the inner diameter of the main suction passage 22 formed in the main member 21. In the peripheral surface member 9, a suction passage is formed from the surface of the main suction groove 20 via the main suction path 22 and the main through path 19. In other words, each main suction path 22 formed in the main member 21 communicates with each main through path 19 formed in the circumferential member 9 and functions as a suction passage in the circumferential member 9.

  Each main suction groove 20 is formed in advance in a main member 21 for incorporation. Each main member 21 is fitted into and attached to a plurality of main recesses 18 formed on the peripheral surface member 9, thereby forming an assembly of main suction grooves 20 surrounding the cavity 13. The number of main recesses 18 divided in the peripheral member 9 (in other words, the number of main members 21 for incorporation or the number of main suction grooves 20) is the size of the lower mold 11 and the characteristics of the release film 15 to be used. It is set arbitrarily according to the above.

  For example, in the peripheral surface member 9, the main recess 18 for the long side is formed adjacent to and parallel to the long side of the cavity 13. The main recesses 18 for long sides are shown as two opposing main recesses 18 extending in the vertical direction in FIG. The main member 21 for the long side is mounted in the main recess 18 for these long sides. A main suction groove 20 extending in the long side direction is formed in the main member 21 for the long side in advance. Similarly, a main recess 18 for the short side is formed adjacent to and parallel to the short side of the cavity 13. The main recess 18 for the short side is shown as two opposing main recesses 18 extending in the left-right direction in FIG. A main member 21 for a short side is mounted in the main concave portion 18 for the short side. In the main member 21 for the short side, a main suction groove 20 is formed in advance along the short side direction.

  The main suction groove 20 has a predetermined width, a predetermined depth, and a predetermined cross-sectional shape. In FIG. 2, the cross section of the main suction groove 20 is formed in a V shape so that the respective inner side surfaces are inclined. By forming the opening of the main suction groove 20 wide, the release film 15 can be stably sucked into the main suction groove 20. About the inner surface of the main adsorption | suction groove | channel 20, you may form so that at least any one inner surface may become diagonal. The shape of the main suction groove 20 may be formed so that the main suction groove 20 is directly connected to the main through passage 19. In this case, it is not necessary to provide the main suction path 22. The main suction groove 20 and the main through passage 19 communicate with each other in the main suction groove 20 and the main through passage 19 in direct communication with the main suction groove 20 and the main through passage 19 through the main suction passage 22. Both of the aspects communicating with each other are included.

  As shown in FIG. 2B, the bottom member 10 is fitted into the through hole 23 of the peripheral member 9. A slight gap is formed between the inner peripheral surface of the peripheral surface member 9 and the side surface of the bottom surface member 10. By forming this gap, the bottom member 10 can be raised and lowered in the through hole 23 of the peripheral member 9. The bottom surface member 10 is formed with a plurality of cavity through passages 24 for adsorbing the release film 15 along the mold surface of the cavity 13. The plurality of cavity through passages 24 are formed from the side surface of the bottom surface member 10 toward the bottom surface. The plurality of cavity through passages 24 each form an opening A on the side surface of the bottom surface member 10. Therefore, the cavity 13 communicates with the space outside the lower mold 11 via the opening A and the cavity through-passage 24 connected to the opening A. In FIG. 2, a plurality of cavity through passages 24 are formed in the bottom surface member 10. Not limited to this, a plurality of cavity through passages 24 may be formed in the peripheral surface member 9.

  The process of adsorbing the release film 15 to the mold surface of the lower mold 11 will be described. First, the vicinity of the outer peripheral portion of the release film 15 that has started to soften when heated is adsorbed to the inner surface of the outer peripheral adsorption groove 16. Next, the release film 15 that is adsorbed in the vicinity of the outer periphery and subsequently softened and stretched is adsorbed to the inner surface of the main adsorption groove 20 on the inner side of the vicinity of the outer periphery. Next, the vicinity of the central portion of the release film 15 which is adsorbed in the vicinity of the outer peripheral portion and the inner portion of the outer peripheral portion and subsequently softened and extended is adsorbed to the mold surface of the cavity 13 by the opening A. The release film 15 is adsorbed on the mold surface of the cavity 13 through the steps so far.

  Hereinafter, resin sealing is performed by the following steps. First, a resin material is supplied to the cavity 13 (more precisely, to a space surrounded by the release film 15 adsorbed on the mold surface of the cavity 13). Next, after the resin material is heated and melted to produce a molten resin (flowable resin), the upper mold 8 and the lower mold 11 are clamped. As a result, the chip mounted on the substrate previously adsorbed on the lower surface of the upper mold 8 is immersed in the molten resin. Next, the molten resin is cured to produce a cured resin. Next, the upper mold 8 and the lower mold 11 are opened, and a molded product having a substrate, a chip, and a cured resin is taken out.

  According to the present embodiment, first, the release film 15 is formed in the main suction groove 20 by forming the cross section of the main suction groove 20 in a V shape so that the opening of the main suction groove 20 is wide. Can be stably adsorbed on the inner surface of the substrate. By this, uniform tension can be applied to the release film 15, so that the release film 15 can be prevented from wrinkling or sagging.

  Secondly, each main suction groove 20 is formed in each main member 21, and each main member 21 is mounted on the circumferential member 9 as one structural unit. The cross-sectional shape and depth of the main suction groove 20 can be changed by replacing each main member 21. Accordingly, the cross-sectional shape and depth of the main suction groove 20 can be optimized in accordance with the characteristics of the release film 15, for example, the flexibility and extensibility of the release film 15. If the release film 15 is a soft material, the deep main suction groove 20 can be applied. If the release film 15 is a hard material, the shallow main adsorption groove 20 can be applied. By replacing each main member 21 provided with each main suction groove 20, the main suction groove 20 corresponding to the release film 15 having various characteristics can be applied. Therefore, it is not necessary to prepare a new peripheral member 9 so as to correspond to the characteristics of the release film 15, so that the lower mold 11 can be used efficiently. In addition, the cost for producing the lower mold 11 can be reduced.

The term “mold surface of the cavity 13” means a surface constituting the cavity 13 which is a space in which the fluid resin exists, and is not limited to the mold surface of the mold 12. The term “mold surface of the cavity 13” includes a surface in which a gap between members constituting the mold 12 is in contact with the cavity 13 as a space.

  In the present embodiment, the depth of the main recess 18 and the height of the main member 21 are set to the same size so that the upper surface of the main member 21 for assembly and the upper surface of the peripheral surface member 9 coincide. Not only this but the depth of the main recessed part 18 can be made larger than the height of the main member 21, and the upper surface of the main member 21 can be made lower than the upper surface of the surrounding surface member 9. FIG. A thin member having a through hole corresponding to the main through path 19 may be disposed as a spacer between the inner bottom surface of the main recess 18 and the lower surface of the main member 21. Thereby, the height positions of the upper surface of the main member 21 and the upper surface of the circumferential member 9 can be adjusted. By making the upper surface of the main member 21 lower than the upper surface of the peripheral surface member 9, the release film 15 can be more stably adsorbed to the main adsorption groove 20. Therefore, a more uniform tension can be applied to the release film 15.

  In the present embodiment, a plurality of main recesses 18 are formed in the peripheral surface member 9, and a main member 21 for incorporation is mounted in each main recess 18. Not limited to this, a plurality of through holes may be formed in the peripheral surface member 9 instead of the plurality of main recesses 18, and the main members 21 for incorporation may be fitted into the respective through holes. In this case, it is not necessary to form the plurality of main through passages 19 in the peripheral member 9, and the plurality of main suction passages 22 themselves formed in the main suction groove 20 function as suction passages in the peripheral member 9. To do.

  With reference to FIG. 3, the structure of the lower mold | type 11 used in the resin molding apparatus 1 which concerns on Example 2 of this invention is demonstrated. The difference from the lower mold 11 shown in FIG. 2 is that a corner groove (sub-adsorption groove) is further provided in addition to the main adsorption groove 20. The other configuration is the same as that of the lower mold 11 shown in FIG.

  As shown in FIG. 3A, sub-recesses 25 that are recesses for corners (corner portions) of the cavity 13 are formed at the four corners of the circumferential member 9. Each sub-recess 25 is fitted with a built-in sub-member 27 having a corner groove (sub-adsorption groove) 26. In FIG. 3, a corner groove 26 having a linear shape is provided in advance in a sub member 27 that is a member for a corner. The corner groove 26 is an adsorption groove for applying tension to the release film 15. The corner groove 26 has a predetermined planar shape, a predetermined width, a predetermined depth, and a predetermined cross-sectional shape. Similar to the main suction groove 20, the corner groove 26 is formed in a V shape so that the inner surface is inclined. In the corner groove 26, one or a plurality of suction holes (sub through passages) 28 for sucking the release film 15 and applying tension are formed. The suction holes (sub through passages) 28 formed in the corner groove 26 communicate with the respective main through passages 19 formed in the circumferential member 9 and function as suction passages in the circumferential member 9. By providing the corner groove 26 in addition to the main suction groove 20, a more uniform tension is applied to the release film 15 in the vicinity of the four sides of the cavity 13 in the release film 15, and in addition, in the vicinity of the four corners. be able to. Therefore, it is possible to further prevent the release film 15 from wrinkling or sagging.

  According to the present embodiment, the peripheral member 9 is provided with a plurality of main suction grooves 20 and a plurality of corner grooves 26 to apply tension to the release film 15. This can prevent the release film 15 from wrinkling or sagging. Similar to the main suction groove 20, the corner groove 26 can change the planar shape, cross-sectional shape, depth, and the like of the corner groove 26 by replacing the corner sub-member 27. Therefore, the planar shape, cross-sectional shape, depth, and the like of the corner groove 26 can be optimized in accordance with the flexibility and extensibility of the release film 15. If the release film 15 is a soft material, the deep corner groove 26 can be applied. If the release film 15 is a hard material, a shallow corner groove 26 can be applied. By replacing each sub member 27 provided with each corner groove 26, the corner grooves 26 corresponding to various release films 15 can be applied. Therefore, it is not necessary to produce a new peripheral member 9 corresponding to the characteristics of the release film 15, so that the lower mold 11 can be used efficiently. In addition, the cost for producing the lower mold 11 can be reduced.

  4A to 4C show the planar shapes of the corner grooves 26 provided in the peripheral surface member 9, respectively. FIG. 4A shows the straight (segmented) corner groove 26 shown in FIG. The corner groove 26 is formed in a V shape so that the inner surface is inclined. As shown in FIG. 3, the linear corner groove 26 has an inclination of 45 degrees with respect to the long side and the short side of the cavity 13. The straight corner grooves 26 are provided at the four corners of the peripheral surface member 9 so that the perpendicular bisector thereof is directed toward the corner (corner) of the cavity 13. In the corner groove 26, one or a plurality of suction holes 28 are formed. By providing the corner groove 26 on the peripheral surface member 9, uniform tension can be applied to the release film 15 along the direction perpendicular to the corner groove 26 through each corner of the cavity 13. The phrase “the perpendicular bisector of the straight corner groove 26 goes to the corner (corner) of the cavity 13” includes the case where the perpendicular bisector goes to the vicinity of the corner of the cavity 13.

  FIG. 4B shows an arc-shaped corner groove 29 in which the center of the circle including the arc is located on the corner side of the cavity 13 and the midpoint of the arc and the center of the circle including the arc are shown. The case where the connecting line is formed so as to pass through the corner of the cavity 13 or the vicinity of the corner is shown. The corner groove 29 is formed in a V shape so that the inner surface is inclined. One or a plurality of suction holes 30 are formed in the corner groove 29. Due to the positional relationship between the arc-shaped corner grooves 29 and the corners of the cavities 13, a uniform tension is applied to the release film 15 along the direction from the corners of the cavities 13 toward the midpoints of the corner grooves 29. Can be added.

  FIG. 4C shows a case where a plurality of arc-shaped corner grooves 31 and 32 are formed such that the corner groove 31 is on the far side and the corner groove 32 is on the near side with respect to the corner of the cavity 13. Show. The corner grooves 31, 32 are such that the center of the circle including the arc is located on the corner side of the cavity 13, and the line connecting the midpoint of the arc and the center of the circle including the arc is the cavity 13. It is formed so as to pass through or near the corner. The corner grooves 31 and 32 are formed in a V shape so that the inner side surfaces thereof are inclined. One or a plurality of suction holes 33 are formed in the corner grooves 31 and 32, respectively. Due to the positional relationship between the plurality of arc-shaped corner grooves 31, 32 and the corners of the cavity 13, the release film passes through the corners of the cavity 13 toward the midpoint of the corner grooves 31, 32. 15 can be applied with a more uniform tension. Each of the suction holes 28, 30, 33 shown in FIGS. 4A to 4C communicates with the respective main through passages 19 formed in the peripheral member 9 shown in FIG. It functions as a suction passage in the surface member 9.

  With reference to FIGS. 5-8, the process of resin-sealing a board | substrate in the resin molding method which concerns on Example 3 of this invention is demonstrated. As the lower mold 11, the lower mold 11 having the corner grooves 26 shown in FIG. 3 is used. As shown in FIG. 5A, first, the upper mold 8 and the lower mold 11 are opened. The upper mold 8 is provided with a substrate mounting portion 34 for mounting a substrate. Next, using a substrate transport mechanism (not shown), for example, the substrate 36 on which the semiconductor chip 35 is mounted is transported to a predetermined position between the upper mold 8 and the lower mold 11. Next, the substrate 36 is raised, and the substrate 36 is fixed to the substrate mounting portion 34 provided on the upper mold 8 by suction or clamping. The substrate 36 is fixed to the lower surface of the upper mold 8 so that the main surface on which the semiconductor chip 35 is mounted faces downward.

  In the lower mold 11, the outer peripheral through passage 17 formed in the outer peripheral suction groove 16, the main suction passage 22 and the main through passage 19 formed in the main suction groove 20, the suction hole 28 and the main through passage formed in the corner groove 26. 19 (see FIG. 3B), the through hole 23 and the cavity through passage 24 formed in the bottom member 10 are connected to, for example, a vacuum pump 38 which is a suction mechanism via a suction pipe 37, respectively. . On / off valves (not shown) are respectively provided in the three lines of suction pipes 37. A vacuum tank connected to a vacuum pump may be used as the suction mechanism.

  Next, as shown in FIG. 5B, a release film 15 is supplied to the lower mold 11 using a release film supply mechanism (not shown). As the release film 15, either a release film previously cut into a strip shape or a long release film is used. FIG. 5B shows the case where the release film 15 cut into a strip shape is supplied to the lower mold 11.

  Next, on the peripheral surface member 9, an on-off valve (not shown) provided in the suction pipe 37 a that connects the respective outer peripheral through passages 17 formed in the outer peripheral suction groove 16 and the vacuum pump 38 is opened. Thereby, the release film 15 is adsorbed on the inner surface of the outer periphery adsorption groove 16. The release film 15 covered with the lower mold 11 is drawn into the outer peripheral adsorption groove 16 of the lower mold 11, and the outer peripheral portion of the release film 15 is adsorbed along the inner surface of the outer peripheral adsorption groove 16. Thus, the release film 15 is fixed to the upper surface of the lower mold 11.

  Next, as shown in FIG. 6A, each main suction path 22 and corner groove formed in the main suction groove 20 via each main penetration path 19 formed in the peripheral member 9. Open / close valves (not shown) provided in the suction pipes 37b connecting the respective suction holes 28 (see FIG. 3B) formed in the nozzle 26 and the vacuum pump 38 are opened. Thereby, the release film 15 is adsorbed to the inner surface of the main adsorption groove 20 and the inner surface of the corner groove 26. The cross section of the main suction groove 20 and the cross section of the corner groove 26 are formed in a V shape with a wide opening. By these things, the release film 15 can be stably adsorbed to the inner surface of each main adsorption groove 20 and the inner surface of the corner groove 26. As a result, a uniform tension is applied to the release film 15, so that the release film 15 can be prevented from being wrinkled or slack. Since the corner groove 26 is provided in addition to the main suction groove 20, a more uniform tension can be applied to the release film 15.

  Next, as shown in FIG. 6B, an open / close valve (not shown) provided in the suction pipe 37c connecting the through hole 23 and the cavity through passage 24 formed in the bottom member 10 and the vacuum pump 38. ). Thereby, the release film 15 is adsorbed along the mold surface of the cavity 13. In the through hole 23, the release film 15 is cavityd through a gap formed between the inner peripheral surface of the peripheral surface member 9 and the side surface of the bottom surface member 10 and a cavity through passage 24 formed in the bottom surface member 10. Adsorbed along 13 mold surfaces. Since uniform tension is applied to the release film 15 by the main suction grooves 20 and the corner grooves 26, the release film 15 can be brought into close contact with the mold surface of the cavity 13 according to the shape of the cavity 13.

  Next, as shown in FIG. 7A, a predetermined amount of the resin material 39 is supplied to the cavity 13 provided in the lower mold 11 using a resin material supply mechanism (not shown). As the resin material 39, resins such as granules, powders, granules, pastes, and jelly, or resins that are liquid at room temperature (liquid resins) can be used. In this embodiment, a case where a granular resin (granular resin) is used as the resin material 39 will be described. 7 and 8, the illustration of the suction pipe 37 and the vacuum pump 38 is omitted.

Next, as shown in FIG. 7B, the granule resin 39 is heated by heating means (not shown) provided in the upper mold 8 and the lower mold 11. By heating, the granular resin 39 is melted to produce a fluid resin 40. When the liquid resin is supplied to the cavity 13 as the resin material 39, the liquid resin itself corresponds to the fluid resin 40. Next, the lifting plate 6 is raised using the mold clamping mechanism 7 (see FIG. 1A). By raising the elevator 6, the peripheral member 9 and the bottom member 10 constituting the lower mold 11 are simultaneously raised. As the elevator board 6 moves up, the upper surface of the peripheral member 9 comes into contact with the peripheral edge portion of the main surface (lower surface in the drawing) of the substrate 36 to clamp the substrate 36. As a result, the upper mold 8 and the lower mold 11 are clamped. Therefore, the cavity 13 is sealed by the upper mold 8 and the lower mold 11. In this state, the semiconductor chip 35 is immersed in the fluid resin 40.

  In the process of clamping the upper mold 8 and the lower mold 11, it is preferable to reduce the pressure by sucking the inside of the cavity 13 using a vacuuming mechanism (not shown). Thus, air remaining in the cavity 13 or bubbles contained in the fluid resin 40 can be discharged to the outside of the mold 12 (upper mold 8 and lower mold 11).

  Next, as shown in FIG. 8A, the lifting plate 6 is further raised using the mold clamping mechanism 7 (see FIG. 1A). Since the upper surface of the circumferential member 9 is already in close contact with the lower surface of the upper mold 8, only the bottom member 10 rises in the through hole 23 of the circumferential member 9. In this state, the bottom member 10 pressurizes the fluid resin 40 with a predetermined pressure. The fluid resin 40 is cured by pressurizing at a predetermined temperature for a predetermined time to form a cured resin 41. Thus, the semiconductor chip 35 mounted on the substrate 36 in the cavity 13 and the main surface (lower surface in the drawing) of the substrate 36 are resin-sealed by the cured resin 41.

  Next, as shown in FIG. 8B, after forming a molded product 42 having a substrate 36, a semiconductor chip 35, and a cured resin 41, the mold clamping mechanism 7 (see FIG. 1A) is used. The lower mold 11 is lowered. In this state, the upper mold 8 and the lower mold 11 are opened. Next, after releasing the adsorption or clamping to the resin-sealed molded product 42, the molded product 42 is taken out from the upper mold 8. The taken out molded product 42 is stored in the substrate storage portion by a substrate transport mechanism (not shown). The release film 15 taken out from the lower mold 11 is discarded. The resin sealing is completed by the steps so far.

  Next, the molded product 42 in which the semiconductor chip 35 is resin-sealed with the cured resin 41 is singulated in units of regions corresponding to the final product. For example, one semiconductor chip 35 is included in the region. Through the steps up to here, an individual electronic component as a final product is completed.

  According to the present embodiment, first, the release film 15 is fixed to the upper surface of the lower mold 11 along the outer peripheral adsorption groove 16. Next, a uniform tension is applied to the release film 15 by adsorbing the release film 15 to the main suction grooves 20 and the corner grooves 26. Next, the release film 15 is sucked into the mold surface of the cavity 13 through the gap in the through hole 23 and the cavity through passage 24 formed in the bottom member 10. Accordingly, the release film 15 can be brought into close contact with the mold surface of the cavity 13 without generating wrinkles or sagging in the release film 15.

  Second, by changing the main member 21 provided with the main suction groove 20 and the sub member 27 provided with the corner groove 26, respectively, the cross-sectional shape and depth of the main suction groove 20 and the corner groove 26 are changed. be able to. Therefore, the cross-sectional shape and depth of the main suction groove 20 and the corner groove 26 can be optimized in accordance with the flexibility and extensibility of the release film 15.

  With reference to FIG. 9, the resin molding apparatus 1 which concerns on Example 4 of this invention is demonstrated. The resin molding apparatus 1 shown in FIG. 9 includes a substrate supply / storage module 43, three molding modules 44A, 44B, and 44C, and a material supply module 45 as components. The substrate supply / storage module 43, the forming modules 44A, 44B, and 44C, and the material supply module 45, which are constituent elements, can be attached to and detached from each other and exchanged with each other. be able to. For example, in a state where the substrate supply / storage module 43 and the molding module 44A are mounted, the molding module 44B can be mounted on the molding module 44A, and the material supply module 45 can be mounted on the molding module 44B.

  The substrate supply / storage module 43 includes a pre-sealing substrate supply unit 47 that supplies the pre-sealing substrate 46, a sealed substrate storage unit 49 that stores the sealed substrate 48, the pre-sealing substrate 46, and the sealing. A substrate platform 50 for delivering the stopped substrate 48 and a substrate transport mechanism 51 for transporting the pre-sealing substrate 46 and the sealed substrate 48 are provided. The substrate platform 50 moves in the Y direction within the substrate supply / storage module 43. The substrate transport mechanism 51 moves in the X direction and the Y direction within the substrate supply / storage module 43 and the respective molding modules 44A, 44B, 44C. The predetermined position S1 is a position to stand by when the substrate transport mechanism 51 does not operate.

  Each molding module 44A, 44B, 44C is provided with a molding module 2, respectively. The molding module 2 is provided with a lower mold 11 that can be raised and lowered, and an upper mold 8 (see FIG. 1) that is disposed opposite to the lower mold 11. Each molding module 2 includes a mold clamping mechanism 7 (a circular portion indicated by a two-dot chain line) for clamping and opening the upper mold 8 and the lower mold 11. A cavity 13 to which the release film 15 and the resin material 39 (see FIG. 7A) are supplied is provided in the lower mold 11. The lower mold | type 11 and the upper mold | type 8 should just move relatively and can clamp and open a mold | type.

  The material supply module 45 includes an XY table 52, a release film supply mechanism 53 that supplies the release film 15 (see FIG. 2B) onto the XY table 52, and a predetermined amount of resin material 39. A resin material storage mechanism 54 for storing the resin material, a resin material input mechanism 55 for supplying the resin material 39 to the resin material storage mechanism 54, and a material transport mechanism 56 for transporting the release film 15 and the resin material storage mechanism 54. . The XY table 52 moves in the X direction and the Y direction within the material supply module 45. The material transport mechanism 56 moves in the X direction and the Y direction in the material supply module 45 and the respective molding modules 44A, 44B, 44C. The predetermined position T1 is a position to stand by when the XY table 52 is not operating. The predetermined position M1 is a position to stand by in a state where the material transport mechanism 56 does not operate.

  With reference to FIG. 9, the process of resin sealing using the resin molding apparatus 1 is demonstrated. First, in the substrate supply / storage module 43, the unsealed substrate 46 is sent from the unsealed substrate supply unit 47 to the substrate mounting unit 50. Next, the substrate transport mechanism 51 is moved in the −Y direction from the predetermined position S <b> 1 to receive the pre-sealing substrate 46 from the substrate platform 50. The substrate transport mechanism 51 is returned to the predetermined position S1. Next, for example, the substrate transport mechanism 51 is moved in the + X direction to a predetermined position P1 of the molding module 44B. Next, in the forming module 44 </ b> B, the substrate transport mechanism 51 is moved in the −Y direction and stopped at a predetermined position C <b> 1 on the lower mold 11. Next, the substrate transport mechanism 51 is raised to fix the pre-sealing substrate 46 to the upper mold 8 (see FIG. 5B). The substrate transport mechanism 51 is returned to the predetermined position S1 of the substrate supply / storage module 43.

  Next, in the material supply module 45, the release film 15 placed on the XY table 52 is cut into a predetermined size from the release film supply mechanism 53. Next, the material transport mechanism 56 is moved from the predetermined position M <b> 1 in the −Y direction, and the release film 15 is received from the XY table 52. The material transport mechanism 56 is returned to the predetermined position M1. Next, the material transport mechanism 56 is moved in the −X direction to the predetermined position P1 of the molding module 44B. Next, in the molding module 44 </ b> B, the material transport mechanism 56 is moved in the −Y direction and stopped at a predetermined position C <b> 1 on the lower mold 11. Next, the material transport mechanism 56 is lowered to place the release film 15 on the lower mold 11 (see FIG. 5B). The material transport mechanism 56 is returned to the predetermined position M1 of the material supply module 45.

  Next, the XY table 52 is moved from the predetermined position T <b> 1 in the −Y direction, and the XY table 52 is stopped at a predetermined position below the resin material accommodation mechanism 54. A resin material accommodation mechanism 54 is placed on the XY table 52. The XY table 52 on which the resin material accommodation mechanism 54 is placed is moved in the + X direction, and the resin material accommodation mechanism 54 is stopped at a predetermined position below the resin material charging mechanism 55. By moving the XY table 52 in the X direction and the Y direction, a predetermined amount of the resin material 39 (see FIG. 7A) is supplied from the resin material charging mechanism 55 to the resin material accommodation mechanism 54. The XY table 52 on which the resin material accommodation mechanism 54 is placed is returned to the predetermined position T1.

  Next, the material transport mechanism 56 is moved from the predetermined position M1 in the −Y direction, and the resin material accommodation mechanism 54 placed on the XY table 52 is received. The material transport mechanism 56 is returned to the predetermined position M1. Next, the material transport mechanism 56 is moved in the −X direction to a predetermined position P1 of the molding module 44B. Next, in the molding module 44 </ b> B, the material transport mechanism 56 is moved in the −Y direction and stopped at a predetermined position C <b> 1 on the lower mold 11. The material transport mechanism 56 is lowered to supply the resin material 39 to the cavity 13 (see FIG. 7A). The material transport mechanism 56 is returned to the predetermined position M1.

  Next, in the molding module 2, the lower mold 11 is raised by the mold clamping mechanism 7, and the upper mold 8 and the lower mold 11 are clamped (see FIG. 7B). After a predetermined time has elapsed, the upper mold 8 and the lower mold 11 are opened (see FIG. 8B). Next, the substrate transport mechanism 51 is moved from the predetermined position S1 of the substrate supply / storage module 43 to the predetermined position C1 on the lower mold 11 to receive the sealed substrate 48. Next, the substrate transport mechanism 51 is moved, and the sealed substrate 48 is delivered to the substrate platform 50. The sealed substrate 48 is stored in the sealed substrate storage unit 49 from the substrate mounting unit 50. At this stage, resin sealing is completed.

  In this embodiment, three molding modules 44A, 44B, and 44C are mounted side by side in the X direction between the substrate supply / storage module 43 and the material supply module 45. The substrate supply / storage module 43 and the material supply module 45 may be combined into one module, and one molding module 44A may be mounted side by side in the X direction. Thereby, molding module 44A, 44B, ... can be increased / decreased. Therefore, the configuration of the resin molding apparatus 1 can be optimized in accordance with the production form and the production amount, so that the productivity can be improved.

  In this embodiment, a release film supply mechanism 53 that supplies the release film 15 is provided in the material supply module 45. Not only this but the release film supply mechanism 53 which supplies the release film 15 can be newly provided not as the material supply module 45 but as a release film supply module. In this case, the release film supply module is mounted between the molding module 44C and the material supply module 45. If it does in this way, the resin molding apparatus 1 can be comprised only by adding a release film supply module to the conventional apparatus.

  In this example, the release film 15 and the resin material 39 were separately conveyed to the cavity 13 using the material conveyance mechanism 56. In addition to this, in the material supply module 45, the resin material accommodation mechanism 54 can be placed on the release film 15, and the resin material 39 can be directly accommodated on the release film 15. In this case, the release film 15 and the resin material 39 can be collectively transported to the cavity 13 using the material transport mechanism 56.

  In each of the above-described embodiments, the resin molding apparatus and the resin molding method used when resin-sealing a semiconductor chip have been described. An object to be resin-sealed may be a semiconductor chip such as an IC chip, a transistor chip, or an LED chip. The target of resin sealing may be a chip of a passive element such as a capacitor or an inductor, or a chip group in which a semiconductor chip and a chip of a passive element are mixed. The target to be resin-sealed may include a sensor, an oscillator, an actuator, and the like. The present invention can be applied when one or a plurality of chips mounted on a substrate such as a lead frame, a printed circuit board, or a ceramic substrate is resin-sealed with a cured resin. Therefore, the present invention can also be applied when manufacturing multichip packages, multichip modules, hybrid ICs, and the like. Electronic components manufactured in each embodiment include a high-frequency signal module, a power control module, a device control module, an LED package, and the like.

  In the description so far, the example in which the semiconductor chip 35 mounted on the substrate 36 is resin-sealed has been described (see FIGS. 5 to 8). The substrate 36 includes a printed circuit board, a ceramic substrate, a lead frame, a semiconductor wafer, and the like. The shape of the substrate 36 may be a rectangle having the long side and the short side shown in FIG. The shape of the substrate 36 may be a substantially circular shape such as a semiconductor wafer having a notch, an orientation flat, or the like.

  FIG. 2 (a) corresponds to a rectangular substrate 36 having a long side and a short side, and two main recesses 18 formed along the long side and two pieces formed along the short side. The main recessed part 18 is shown. However, the present invention is not limited thereto, and one L-shaped concave portion and one inverted L-shaped concave portion corresponding to the long side and the short side adjacent thereto may be formed. In this case, one L-shaped concave portion (formed at the lower left of FIG. 2A) and one inverted L-shaped concave portion (formed at the upper right of FIG. 2A) each surrounding the cavity. Formed). The main recess 18 shown in FIG. 2A may be further divided.

  Corresponding to the substrate having a substantially circular shape, two semicircular recesses each surrounding the cavity may be formed. You may form three circular-arc-shaped recessed parts which divided the circle | round | yen surrounding a cavity into 3 each. You may form four circular-arc-shaped recessed parts which divided the circle | round | yen surrounding a cavity into 4 each.

  The present invention is also applied to a resin molding apparatus or a resin molding method for molding a general resin molded product. In other words, the present invention is not limited to the case where the chip is sealed with resin, but is also applied to the case where optical products such as lenses, optical modules, and light guide plates, and other resin molded products (resin products) are manufactured by the resin molding technology. Is done. In other words, the present invention is also applied when manufacturing a resin molded product. The present invention is particularly effective when there are severe requirements regarding the quality of the resin product to be manufactured (for example, wrinkles of functional films, appearance quality such as the presence or absence of scratches due to sagging, surface smoothness, etc.). .

  In each example, a resin material made of a thermosetting resin was used. For example, an epoxy resin or a silicone resin can be used. A resin material made of a thermoplastic resin may be used.

  As the molding die 12 to which the present invention is applied, the example in which the cavity 13 is formed in the lower die 11 having the peripheral surface member 9 and the bottom surface member 10 has been described. However, the present invention is not limited to this, and the cavity 13 may be formed in an integrally configured lower mold. In addition, the cavity 13 may be formed in the upper mold 8, and the cavity 13 may be formed in both the upper mold 8 and the lower mold 11. An intermediate mold may be provided between the upper mold 8 and the lower mold 11. The mold surface of the intermediate mold may constitute the mold surface of the cavity 13.

  As the mold 12, the example in which the upper mold 8 and the lower mold 11 face each other along the vertical direction has been described. Not only this but the upper mold | type 8 and the lower mold | type 11 may be the shaping | molding die 12 which mutually opposes along a horizontal direction. The upper mold 8 and the lower mold 11 may be the mold 12 facing each other along a direction that is neither vertical nor horizontal.

  The compression molding has been described as a resin molding method to which the present invention is applied. The resin molding method is not limited to compression molding, and injection molding and transfer molding can be employed. In the case of adopting transfer molding, a configuration in which a gate (flowing resin injection port) is provided on the inner bottom surface of the cavity can be employed.

  The release film 15 was adsorbed to the mold surface of the lower mold 11 using the outer peripheral adsorption groove 16, the main adsorption groove 20, and the opening A (in addition, the corner groove 26 was used in some embodiments). The opening A may be formed in any part of the mold surface constituting the cavity 13. The opening A is formed so that the release film 15 is softened and stretched by heating, and the softened and stretched release film 15 is in close contact with and adsorbed to the mold surface constituting the cavity 13.

  After the cured resin 41 is formed and the mold 12 is opened, the outer peripheral suction groove 16, the main suction groove 20 and the opening A are sequentially used (in addition, in some embodiments, the corner groove 26 is used) A high-pressure gas (such as compressed air) may be sprayed onto the release film 15 on the mold surface of the lower mold 11. Thereby, the release film 15 can be reliably pulled away from the mold surface of the lower mold 11. Two piping systems, a suction system and an injection system, are connected to the piping system on the cavity side connected to the outer peripheral suction groove 16, the main suction groove 20, the opening A, and the like. If necessary, any one of the two piping systems may be connected to the piping system on the cavity side using a switching valve.

  The release film 15 has been described as an example of the functional film. As shown in FIG. 8B, the release film 15 has a function of easily releasing the cured resin 41 from the mold surface side of the cavity 13. Examples of the functional film other than the release film 15 include a transfer film. The transfer film has a function of transferring an element having a functional surface composed of a surface in contact with the fluid resin to the surface of the cured resin. The element which the functional surface of a transfer film has is the shape formed in the functional surface first. The shape includes a shape corresponding to a mirror surface, an uneven shape corresponding to a satin finish, an uneven shape corresponding to a microlens array, and an uneven shape corresponding to a Fresnel lens. Secondly, elements of the functional surface of the transfer film are layers, films, and the like formed on the functional surface. Examples of the layer and the film include a layer including a pattern / pattern, a conductive layer, a metal foil, and the like.

  The present invention is not limited to the above-described embodiments, and can be arbitrarily combined, modified, or selected and adopted as necessary within the scope not departing from the gist of the present invention. It is.

DESCRIPTION OF SYMBOLS 1 Resin molding apparatus 2 Molding module 3 Lower base 4 Tie bar 5 Upper base 6 Lifting board 7 Clamping mechanism 8 Upper mold (1st mold, 2nd mold)
9 Peripheral surface member 10 Bottom surface member 11 Lower die (second die, first die, one die)
12 Mold 13 Cavity 14 Elastic body 15 Release film (functional film)
16 outer peripheral suction groove 17 outer peripheral through path 18 main recess 19 main through path 20 main suction groove 21 main member 22 main suction path 23 through hole 24 cavity through path 25 sub recess 26, 29, 31, 32 corner groove (sub suction groove) )
27 Sub member 28, 30, 33 Suction hole (sub through passage)
34 Substrate mounting portion 35 Semiconductor chip 36 Substrate 37, 37a, 37b, 38c Suction piping 38 Vacuum pump 39 Resin material 40 Fluid resin 41 Cured resin 42 Molded product 43 Substrate supply / storage module 44A, 44B, 44C Molding module 45 Material Supply module 46 Pre-sealing substrate 47 Pre-sealing substrate supply portion 48 Sealed substrate 49 Sealed substrate storage portion 50 Substrate placement portion 51 Substrate transport mechanism 52 XY table 53 Release film supply mechanism 54 Resin material storage Mechanism 55 Resin material loading mechanism 56 Material transport mechanism A Aperture C1, M1, P1, S1, T1 Predetermined position FS Functional surface

Claims (22)

A mold having at least a first mold and a second mold opposed to the first mold; and provided on a top surface of at least one of the first mold and the second mold. A cavity, a material supply mechanism for supplying a resin material to the cavity, and a mold clamping mechanism for opening and clamping the mold, and a functional film is adsorbed along the mold surface of the cavity, A resin molding apparatus used when manufacturing a molded product containing a cured resin formed by curing a fluid resin generated from a resin material and existing inside the cavity in a state where the mold is clamped Because
An annular outer peripheral adsorption groove provided on the top surface of the outer peripheral portion comprising the outer portion of the cavity;
A plurality of outer peripheral through passages connected to the outer peripheral adsorption groove and penetrating the one mold;
On the top surface of the outer peripheral portion, a plurality of main concave portions provided inside the outer peripheral adsorption groove so as to surround the cavity,
A plurality of main members fitted so as to be detachable with respect to each of the plurality of main recesses;
A plurality of main suction grooves respectively provided on top surfaces of the plurality of main members;
A plurality of main through passages that respectively communicate with the plurality of main suction grooves and pass through the one mold;
An opening formed in the mold surface of the cavity;
A cavity through path connected to the opening and penetrating the one mold,
The functional film is adsorbed on the inner surface of the outer peripheral adsorption groove through the outer peripheral adsorption groove and the plurality of outer peripheral through passages,
The functional film is adsorbed on the inner surfaces of the plurality of main adsorption grooves via the plurality of main adsorption grooves and the plurality of main through passages,
The resin molding apparatus, wherein the functional film is adsorbed along the mold surface of the cavity via the opening and the cavity penetration path. In the resin molding apparatus described in claim 1,
A plurality of sub-recesses provided between the plurality of main recesses on the top surface of the outer peripheral portion;
A plurality of sub-members fitted so as to be detachable from each of the plurality of sub-recesses;
A plurality of sub-adsorption grooves respectively provided on the top surfaces of the plurality of sub-members;
A plurality of sub through passages respectively communicating with the plurality of sub suction grooves and penetrating through the one mold;
The resin molding apparatus, wherein the functional film is adsorbed on the inner surfaces of the plurality of sub adsorption grooves through the plurality of sub adsorption grooves and the plurality of sub through passages. In the resin molding apparatus described in claim 2,
The plurality of auxiliary suction grooves have a line-shaped shape or a curved shape in plan view. In the resin molding apparatus according to claim 1 or 2,
The planar shape of the cavity is rectangular,
The plurality of main suction grooves are provided in parallel to a first side of the cavity and a second side adjacent to the first side, respectively. In the resin molding apparatus according to claim 1 or 2,
In the functional film, an element having a functional surface in contact with the flowable resin is transferred to the surface of the cured resin. In the resin molding apparatus described in claim 2 ,
A resin molding apparatus having at least one of the following invention specific matters.
(6-1) The plurality of main suction grooves have a cross-sectional shape in which the sides of the plurality of main through passages are narrowed.
(6-2) The plurality of sub suction grooves have a cross-sectional shape in which the side of the plurality of sub through passages is narrowed. In the resin molding apparatus described in claim 2 ,
A resin molding apparatus having at least one of the following invention specific matters.
(7-1) In the plurality of main suction grooves, the inner surface on the side close to the cavity and the inner surface on the side far from the cavity have different inclinations.
(7-2) In the plurality of sub-adsorption grooves, the inner surface near the cavity and the inner surface far from the cavity have different inclinations. In the resin molding apparatus according to claim 1 or 2,
At least in the plurality of main recesses, plate-like members having holes are arranged between the opposite surfaces of the top surfaces of the plurality of main members and the plurality of main recesses so as to communicate the main suction grooves and the holes. By adjusting the position, the position of the top surfaces of the plurality of main members in the height direction is adjusted. In the resin molding apparatus according to claim 1 or 2,
The functional film has a strip shape, a circular shape, or a long shape. In the resin molding apparatus according to claim 1 or 2,
A material supply module for supplying at least the functional film to the cavity;
Comprising at least one molding module having at least the molding die and the clamping mechanism;
The one molding module can be attached to and detached from the material supply module;
A resin molding apparatus, wherein the one molding module can be attached to and detached from another molding module. Supplying a functional film to a cavity provided on the top surface of at least one of the molds having at least a first mold and a second mold opposite to the first mold; Adsorbing the functional film to the top surfaces of two molds; supplying a resin material to the cavity; and clamping the mold by a mold clamping mechanism after supplying the resin material to the cavity; and forming a cured resin by curing the fluid resin in a state in which the mold is clamping present inside the cavity is generated from the resin material, the steps of mold opening said mold, wherein A resin molding method comprising a step of taking out a molded product containing a cured resin,
The step of adsorbing the functional film includes the following steps.
(11-1) Preparing an annular outer peripheral suction groove provided on the top surface of the outer peripheral portion composed of the outer portion of the cavity and a plurality of outer peripheral through passages connected to the outer peripheral suction groove and penetrating the one mold Process.
(11-2) A plurality of main recesses provided inside the outer periphery adsorption groove so as to surround the cavity on the top surface of the outer periphery, and being attachable to and detachable from each of the plurality of main recesses A step of preparing a plurality of main members fitted therein.
(11-3) A step of preparing a plurality of main suction grooves respectively provided on the top surfaces of the plurality of main members.
(11-4) A step of preparing a plurality of main through passages that respectively communicate with the plurality of main adsorption grooves and penetrate the one mold.
(11-5) A step of preparing an opening formed on the mold surface of the cavity and a cavity through path connected to the opening and penetrating the one mold.
(11-6) A step of softening the functional film by heating the functional film supplied to the top surface of the one mold.
(11-7) A step of adsorbing the functional film to the inner surface of the outer peripheral adsorption groove using the annular outer peripheral adsorption groove and the plurality of outer peripheral through passages.
(11-8) A step of adsorbing the functional film to the inner surfaces of the plurality of main adsorption grooves using the plurality of main adsorption grooves and the plurality of main through passages.
(11-9) A step of adsorbing the functional film to the mold surface of the cavity using the opening and the through-hole for the cavity . In the resin molding method according to claim 11,
The step of adsorbing the functional film further comprises the following steps.
(12-1) A plurality of sub-recesses provided between the plurality of main recesses on the top surface of the outer peripheral portion, and a plurality of sub-recesses fitted to each of the plurality of sub-recesses. The step of preparing the sub member.
(12-2) A step of preparing a plurality of sub suction grooves respectively provided on the top surfaces of the plurality of sub members.
(12-3) A step of preparing a plurality of sub through passages respectively communicating with the plurality of sub suction grooves and penetrating the one mold.
(12-4) A step of adsorbing the functional film to the inner surfaces of the plurality of sub adsorption grooves using the plurality of sub adsorption grooves and the plurality of sub through passages. In the resin molding method according to claim 12,
The resin molding method, wherein the plurality of sub-adsorption grooves have a line-shaped shape or a curved shape in plan view. In the resin molding method according to claim 11 or 12,
The planar shape of the cavity is rectangular,
The plurality of main suction grooves are provided in parallel to a first side of the cavity and a second side adjacent to the first side, respectively. In the resin molding method according to claim 11 or 12,
In the step of forming the cured resin, the element having a functional surface that contacts the fluid resin in the functional film is transferred to the surface of the cured resin. In the resin molding method according to claim 12 ,
A resin molding method comprising at least one of the following invention specific matters.
(16-1) The plurality of main suction grooves have a cross-sectional shape in which a side of the plurality of main through passages is narrowed.
(16-2) The plurality of sub suction grooves have a cross-sectional shape in which the side of the plurality of sub through passages is narrowed. In the resin molding method according to claim 12 ,
A resin molding method comprising at least one of the following invention specific matters.
(17-1) In the plurality of main suction grooves, the inner side surface close to the cavity and the inner side surface far from the cavity have different inclinations.
(17-2) In the plurality of sub-adsorption grooves, the inner surface on the side close to the cavity and the inner surface on the side far from the cavity have different inclinations. In the resin molding method according to claim 11 or 12,
At least in the plurality of main recesses, plate-like members having holes are arranged between the opposite surfaces of the top surfaces of the plurality of main members and the plurality of main recesses so as to communicate the main suction grooves and the holes. The resin molding method characterized by including the process of adjusting the position in the height direction of the top surface of the said several main member by doing. In the resin molding method according to claim 11 or 12,
The functional film has a strip shape, a circular shape, or a long shape. In the resin molding method according to claim 11 or 12,
Preparing a material supply module for supplying at least the functional film to the cavity;
Preparing at least one molding module having at least the molding die and the clamping mechanism,
The one molding module can be attached to and detached from the material supply module,
A resin molding method, wherein the one molding module can be attached to and detached from another molding module. A functional film is adsorbed using an outer peripheral adsorption groove and a main adsorption groove. At least a first mold and a second mold opposite to the first mold are provided, and the first mold and the second mold are provided. A cavity provided on a top surface of at least one of the molds to which a resin material is supplied, and a functional film is adsorbed along the mold surface of the cavity to be generated from the resin material and A mold used for producing a molded article containing a cured resin formed by curing a fluid resin present inside in a state where the mold is clamped,
An annular outer peripheral adsorption groove provided on the top surface of the outer peripheral portion comprising the outer portion of the cavity;
A plurality of outer peripheral through passages connected to the outer peripheral adsorption groove and penetrating the one mold;
On the top surface of the outer peripheral portion, a plurality of main concave portions provided inside the outer peripheral adsorption groove so as to surround the cavity,
A plurality of main members fitted so as to be detachable with respect to each of the plurality of main recesses;
A plurality of main suction grooves respectively provided on top surfaces of the plurality of main members;
A plurality of main through passages that respectively communicate with the plurality of main suction grooves and pass through the one mold;
An opening formed in the mold surface of the cavity;
A cavity through path connected to the opening and penetrating the one mold,
The functional film is adsorbed on the inner surface of the outer peripheral adsorption groove through the outer peripheral adsorption groove and the plurality of outer peripheral through passages,
The functional film is adsorbed on the inner surfaces of the plurality of main adsorption grooves via the plurality of main adsorption grooves and the plurality of main through passages,
The mold according to claim 1, wherein the functional film is adsorbed along a mold surface of the cavity through the opening and the through-hole for the cavity. The mold according to claim 21, wherein
A plurality of sub-recesses provided between the plurality of main recesses on the top surface of the outer peripheral portion;
A plurality of sub-members fitted so as to be detachable from each of the plurality of sub-recesses;
A plurality of sub-adsorption grooves respectively provided on the top surfaces of the plurality of sub-members;
A plurality of sub through passages respectively communicating with the plurality of sub suction grooves and penetrating through the one mold;
The molding die, wherein the functional film is adsorbed on the inner surfaces of the plurality of sub adsorption grooves through the plurality of sub adsorption grooves and the plurality of sub through passages.

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