JP6228471B2 - To-be-treated water processing apparatus, pure water production apparatus and to-be-treated water processing method - Google Patents

Description

  The present invention relates to an apparatus for treating water to be treated, and more particularly to an apparatus for treating water to be treated for treating water to be treated containing boron through an ion exchange resin.

For example, in the manufacturing process of semiconductor devices, pure water is used for uses such as cleaning during the manufacturing process. In addition to the generally required items such as equipment cost, production cost reduction, and equipment installation area reduction, this equipment for producing pure water reduces the amount of wastewater generated when producing pure water. May be required.
When a regenerative ion exchange device is used as a desalination device used when producing pure water, a chemical is used when regenerating the ion exchange resin, and thus a lot of waste water is likely to be generated. Therefore, instead, for example, it has been proposed to use a reverse osmosis membrane device, an electric regeneration type desalination device and the like in combination with a non-regenerative ion exchange device.

  In recent years, attention has been paid to the fact that the produced pure water may contain boron. If boron is contained in the pure water, the product is liable to have a problem, so it must be removed. However, the reverse osmosis membrane device and the electric regenerative desalination device are difficult to remove due to the characteristics of the device. For this reason, in a non-regenerative ion exchange apparatus, it is necessary to remove boron contained in pure water so as to have a predetermined concentration or less. A boron selective ion exchange resin capable of selectively removing boron may be used as the ion exchange resin.

Patent Document 1 discloses a primary pure water treatment system that includes membrane treatment means and the like and obtains pure water from treated water of a pretreatment apparatus, a tank that stores the primary pure water, ion exchange means, and membrane treatment means. A secondary pure water treatment system that obtains ultrapure water from the primary pure water that has passed through the tank with a boron selective ion exchange resin as a two-bed, three-column ion in the primary pure water treatment system. An apparatus for producing pure water is disclosed in which a stack is provided so as to be positioned upstream of a strongly acidic cation exchange resin in a tower of an exchange apparatus.
Patent Document 2 includes a two-stage RO device as a desalination device for an ultrapure water production device having a pretreatment device, a desalting device, and a nonionic substance removing device. An ultrapure water production apparatus that is not provided is provided with a boron removal apparatus that brings the water to be treated that has passed through the two-stage RO apparatus into contact with the boron-selective ion exchange resin.

JP-A-8-84986 JP-A-9-192661

  However, since the non-regenerative ion exchange apparatus does not regenerate the boron selective ion exchange resin, it is necessary to sequentially exchange the boron selective ion exchange resin. Further, in order to remove boron so as to be less than a concentration necessary for use in a semiconductor device manufacturing process or the like, a high-level treatment is required in which the concentration of boron is very low. In this case, if an anion that is more easily adsorbed to the boron-selective ion exchange resin than boron is contained, the anion is preferentially adsorbed to the boron-selective ion exchange resin, thereby inhibiting the adsorption of boron to the boron-selective ion exchange resin. There is a case. Therefore, there is not enough boron selective ion exchange resin for adsorbing boron, and boron leaks easily. Therefore, it is necessary to frequently replace the boron-selective ion exchange resin, and problems are likely to occur in terms of stable operation of the apparatus and production cost of pure water.

  The present invention has been made in view of the above-described problems of the prior art, and even when a boron-selective ion exchange resin is used in a treatment apparatus for treating treatment water containing boron, An object of the present invention is to provide a treatment apparatus for treated water that can easily extend the service life of a boron-selective ion exchange resin.

  Thus, according to the present invention, there is provided a water treatment apparatus for treating the water to be treated containing boron, the outer shell part having a space for filling the ion exchange resin therein, and the outer shell part. An ion exchange resin is provided with an introduction part for introducing the water to be treated and a discharge part for discharging the water to be treated from the outer shell part. An apparatus for treating water to be treated comprising a boron-selective ion exchange resin filled on the discharge unit side is provided.

Here, the strong base anion exchange resin and the boron selective ion exchange resin are preferably stacked and filled.
The strongly basic anion exchange resin preferably has a layer height of 200 mm to 400 mm, the boron selective ion exchange resin preferably has a layer height of 800 mm to 1000 mm, and the water to be treated passes through the outer shell. It is preferable that water is passed at 15 m / h to 20 m / h.

  Further, according to the present invention, a primary pure water system including a turbidity removing device that removes turbidity contained in raw water and a desalting device that performs a desalting treatment on the raw water, and water that is treated with the primary pure water system and contains boron. A secondary pure water system including a non-regenerative ion exchange device to be treated, and the non-regenerative ion exchange device included in the secondary pure water system includes an outer shell portion having a space for filling with an ion exchange resin therein And an introduction part for introducing the treated water into the outer shell part, and a discharge part for discharging the treated water from the outer shell part, and the ion exchange resin is strongly filled on the introduction part side. An apparatus for producing pure water is provided, which comprises a basic anion exchange resin and a boron selective ion exchange resin filled on the discharge side.

  Furthermore, according to this invention, it is the processing method of the to-be-processed water for processing the to-be-processed water containing a boron, Comprising: The 1st process process of passing a to-be-processed water through a strongly basic anion exchange resin, and processing it And a second treatment step for treating the treated water treated in the first treatment step by passing it through a boron-selective ion exchange resin, and the treated water is a strong base in a stacked state. There is provided a method for treating water to be treated, characterized in that water is sequentially passed through a functional anion exchange resin and a boron selective ion exchange resin.

  ADVANTAGE OF THE INVENTION According to this invention, even when using a boron selective ion exchange resin in the processing apparatus of the to-be-processed water which processes the to-be-processed water containing boron, the to-be-processed water which is easy to lengthen the lifetime of a boron selective ion exchange resin Can be provided.

It is the figure explaining the manufacturing apparatus of the pure water to which this Embodiment is applied. It is a figure explaining the composition of the 1st ion exchange resin tower.

  Hereinafter, embodiments for carrying out the present invention will be described in detail. The present invention is not limited to the following embodiments, and various modifications can be made within the scope of the invention. The drawings used are for explaining the present embodiment and do not represent the actual size.

(Pure water)
The pure water produced in the present embodiment is used for applications such as cleaning in the semiconductor device production process and the like as described above. In this case, the concentration of boron contained in the pure water needs to be, for example, less than 1 ppt and less than 10 ppt. In this case, the pure water is sometimes referred to as ultrapure water.
However, the pure water manufactured in the present embodiment is not limited to being used in the semiconductor device manufacturing process, and can be used in, for example, a chemical manufacturing process and a food manufacturing process.

(Treated water)
In the present embodiment, the water to be treated is not particularly limited. For example, well water, river water, tap water, or the like is used as raw water, and is generated after being treated in a primary pure water system described later. It is water. In this case, the treated water often contains about several tens of ppb of boron. Further, boron is treated with boron ions in the water to be treated, and specific examples thereof include BO ₃ ⁻ , BO ₂ ⁻ , B ₄ O ₇ ^{2−, and the} like.

(Strongly basic anion exchange resin)
The strongly basic anion exchange resin used in the present embodiment is not particularly limited. For example, those having a quaternary ammonium group as an exchange group can be used. Moreover, when using an ion exchange apparatus in a secondary pure water system like the 1st ion exchange resin tower 23 and the 2nd ion exchange resin tower 26 mentioned later, organic carbon (TOC) and a metal elute from an anion exchange resin. It is preferable that it is the thing of the low elution grade which suppressed this.
In the present embodiment, Diaion SAT20L manufactured by Mitsubishi Chemical Corporation or the like can be used as the strongly basic anion exchange resin.

(Boron selective ion exchange resin)
The boron selective ion exchange resin used in the present embodiment is a chelate resin having an N-methylglucamine group as an exchange group. The boron selective ion exchange resin has a property of more easily adsorbing boron ions, but may adsorb not only boron ions but also other anions.
In the present embodiment, Diaion CRBT03 manufactured by Mitsubishi Chemical Corporation or the like can be used as the boron selective ion exchange resin.

  Next, an apparatus for producing pure water to which the present embodiment is applied will be described with reference to the drawings.

<Description of the entire pure water production system>
FIG. 1 is a diagram illustrating a pure water manufacturing apparatus to which the present embodiment is applied.
The pure water production unit 1 shown in the figure is an example of this pure water production apparatus. The pure water production unit 1 is roughly divided into a primary pure water system 10 and a secondary pure water system 20.

  The primary pure water system is generally a turbidity removal device such as a coagulation filtration device or a turbidity membrane device for removing turbidity of raw water, a reverse osmosis membrane device (RO) for desalting dissolved ion components, and electric regeneration. This is a facility in which a desalting apparatus that performs desalting treatment on raw water, such as a water-type desalting apparatus and a regenerative ion exchange apparatus (for example, a two-bed / three-column ion exchange apparatus or a mixed bed ion exchange apparatus). In addition, there may be a decarbonation device for removing the carbonic acid component.

  In addition, secondary pure water systems are generally non-regenerative ions that remove the trace amount of ion components and ultraviolet oxidizers for decomposing TOC (total organic carbon) from water treated with primary pure water systems. It is an equipment for processing with an exchange device, a deaeration device for removing dissolved oxygen, and an ultrafiltration membrane device for removing fine particles. In the present embodiment, the non-regenerative ion exchange apparatus is used to treat boron-containing water that is treated with a primary pure water system.

  The primary pure water system 10 of the present embodiment includes a raw water tank 11, a turbidity removal membrane device 12, a filtration water tank 13, an activated carbon filtration device (CF) 14, a reverse osmosis membrane device (RO) 15, and a deaeration device. 16, an electric regenerative desalination apparatus (EDI: Electrodeionization) 17, and a primary pure water tank 18.

The raw water tank 11 is a water tank that temporarily stores well water, well water, river water, tap water, and the like.
The turbidity removal device 12 includes an ultrafiltration membrane (UF membrane) inside, and removes turbidity contained in the raw water by passing the raw water through the ultrafiltration membrane. In this case, the turbidity is dirt contained in the raw water, and is composed of impurities such as mud and silt and aquatic organisms such as plankton.

The filtered water tank 13 is a water tank that temporarily stores the raw water treated by the turbidity removal membrane device 12.
The activated carbon filtration device 14 is a device having activated carbon inside. And the raw | natural water processed by the turbidity-elimination membrane apparatus 12 is made to pass through this activated carbon, and the salt and organic substance contained in raw | natural water are made to adsorb | suck to activated carbon. In the present embodiment, for example, granular activated carbon is used, and filtration is performed by allowing the raw water after treatment by the turbidity removing membrane device 12 to pass therethrough.

  The reverse osmosis membrane device 15 is a device having a reverse osmosis membrane (RO membrane) inside. The reverse osmosis membrane is, for example, a polyamide membrane provided with a large number of pores having a size of 1 nm to 2 nm, and salts such as ions contained in the raw water can be removed by passing through this membrane.

The deaeration device 16 includes a hollow fiber gas separation membrane, and the raw water treated by the reverse osmosis membrane device 15 is passed through the hollow fiber to remove the gas in the raw water. That is, the outside of the hollow fiber is in a vacuum, and therefore when raw water is passed through the hollow fiber, the gas contained therein passes through the hollow fiber-shaped gas separation membrane and is discharged to the outside. On the other hand, the raw water passes through the hollow fiber as it is, so that the gas in the raw water can be removed. The gas removed here is mainly carbon dioxide (CO ₂ ) gas.

  The electric regeneration type desalination apparatus 17 has a structure in which a cation exchange resin and an anion exchange resin are filled between a cation exchange membrane that allows a cation to pass therethrough and an anion exchange membrane that allows an anion to pass. Uses a configuration in which multiple units are arranged. Then, a positive electrode and a negative electrode are provided on both sides in the direction in which they are arranged, and a DC voltage is applied between these electrodes.

  In this case, when the raw water treated by the deaeration device 16 is passed through a portion (demineralization chamber) filled with the cation exchange resin and the anion exchange resin, the cation and the anion contained therein are respectively It is removed by cation exchange resin and anion exchange resin. Furthermore, the cation removed by the cation exchange resin is attracted to the negative electrode side by the action of the direct current voltage, passes through the cation exchange membrane, and seeps into the space (concentration chamber) between the units. Similarly, the anion is attracted to the positive electrode side by the action of the DC voltage, passes through the anion exchange membrane, and oozes out to the concentration chamber. As a result, purified water from which cations and anions have been removed from the raw water treated by the deaeration device 16 is obtained from the desalting chamber. On the other hand, from the concentration chamber, water containing a large amount of cations and anions is discharged out of the apparatus as waste water.

Thereby, pure water in the primary pure water system is generated.
The primary pure water tank 18 is a water tank that temporarily stores the pure water that has been processed by the electric regenerative desalinator 17.

  Further, the secondary pure water system 20 of the present embodiment includes a first deaerator 21, a first ultraviolet oxidizer (TOC-UV) 22, a first ion exchange resin tower 23, and a first cartridge polisher (CP). 24, a second ultraviolet oxidation device 25, a second ion exchange resin tower 26, a second deaeration device 27, a second cartridge polisher (CP) 28, and an ultrafiltration device (UF) 29.

The first degassing device 21 and the second degassing device 27 are devices having the same structure as the degassing device 16 described above. However, the gas to be removed is mainly oxygen (O ₂ ) gas, and dissolved oxygen in pure water is removed by the first degassing device 21 and the second degassing device 27.

  The first ultraviolet oxidizer 22 and the second ultraviolet oxidizer 25 include a low-pressure ultraviolet lamp inside, and decompose and remove organic substances in pure water by the ultraviolet rays irradiated by the ultraviolet lamp. This ultraviolet light has a wavelength of, for example, 185 nm. A trace amount of organic substances in pure water is oxidatively decomposed by hydroxyl radicals (OH.) Generated by the irradiation of ultraviolet rays.

  The first ion exchange resin tower 23 and the second ion exchange resin tower 26 are non-regenerative ion exchange apparatuses. The first ion exchange resin tower 23 and the second ion exchange resin tower 26 include an ion exchange resin inside, and the ion exchange resin is processed by the first ultraviolet oxidation device 22 and the second ultraviolet oxidation device 25. By passing pure water, salt contained in pure water is adsorbed. In the present embodiment, the first ion exchange resin tower 23 and the second ion exchange resin tower 26 are used to remove boron ions in particular from the salts. Therefore, in this Embodiment, it functions as a to-be-processed water processing apparatus for processing the to-be-processed water containing a boron. Detailed configurations of the first ion exchange resin tower 23 and the second ion exchange resin tower 26 will be described later.

  The first cartridge polisher 24 and the second cartridge polisher 28 are filled with a mixture of a cation exchange resin and an anion exchange resin. Then, by passing pure water after being treated by the first ion exchange resin tower 23 and the second ion exchange resin tower 26 in the apparatus, a trace amount of cations and anions contained in the pure water is further removed. can do.

  The ultrafiltration device 29 is provided to remove fine solids contained in pure water. For this purpose, an ultrafiltration membrane (UF membrane) is provided inside the ultrafiltration device 29. The ultrafiltration membrane is, for example, a membrane made of polyamide or polysulfone having a large number of pores having a size of 2 nm to 200 nm, and solids such as fine particles can be removed by passing through this membrane.

Thus, the purity of the pure water produced in the primary pure water system is further increased in the secondary pure water system (polishing). The pure water produced in the secondary pure water system is sent to a use point and used for cleaning or the like in a predetermined process.
Note that the second ultraviolet oxidation device 25, the second ion exchange resin tower 26, the second degassing device 27, and the second cartridge polisher (CP) 28 depend on the level of purity of pure water required at the point of use. It may not be installed.

<Description of First Ion Exchange Resin Tower 23 and Second Ion Exchange Resin Tower 26>
Next, the first ion exchange resin tower 23 and the second ion exchange resin tower 26 will be described in more detail. In the following description, the first ion exchange resin tower 23 is taken as an example, but the apparatus configuration of the second ion exchange resin tower 26 is the same.
FIG. 2 is a diagram illustrating the configuration of the first ion exchange resin tower 23.
As shown in the figure, the first ion exchange resin tower 23 includes an outer shell portion 231 having a space K for filling the ion exchange resin therein, and an introduction portion 232 for introducing treated water into the outer shell portion 231. And a discharge part 233 for discharging the water to be treated from the outer shell part 231.

  The outer shell portion 231 is filled with the ion exchange resin I and passes the water to be treated through the ion exchange resin I, thereby adsorbing boron ions contained in the water to be treated. The outer shell 231 is made of, for example, stainless steel as a material, but is not limited thereto, and is not particularly limited as long as it has durability against the water to be treated. Further, the shape of the outer shell portion 231 is not particularly limited, but in the present embodiment, for example, a substantially cylindrical shape is used.

  Here, the water to be treated is pure water after being treated by the first ultraviolet oxidation device 22 as described with reference to FIG. This treated water is sent from the first ultraviolet oxidation device 22 and introduced from the introduction unit 232. Then, after boron is removed by the ion exchange resin inside the outer shell portion 231, the boron is discharged from the discharge portion 233 and sent to the first cartridge polisher 24. In this case, the water flow direction is the downward direction.

  There are two types of ion exchange resins I filled in the outer shell portion 231 in the present embodiment: strong basic anion exchange resin A and boron selective ion exchange resin B. The strongly basic anion exchange resin A is filled on the introduction part 232 side, and the boron selective ion exchange resin B is filled on the discharge part 233 side. More specifically, the strong base anion exchange resin A and the boron selective ion exchange resin B are stacked and filled, and at this time, the strong base anion exchange resin A is arranged upstream with respect to the water flow direction. The boron-selective ion exchange resin B is disposed on the downstream side with respect to the water flow direction. And by making the water flow direction downward, the ion exchange resin I is less likely to be stirred by the water to be treated, and the laminated structure of the strongly basic anion exchange resin A and the boron selective ion exchange resin B can be easily maintained. .

In this case the layer height _{H A} strong base anion exchange resin A was 200Mm～400mm, the bed height _{H B} of the boron-selective ion exchange resin B is preferably a 800Mm～1000mm. If the layer height of the strongly basic anion exchange resin A or the boron selective ion exchange resin B is smaller than this range, it is difficult to sufficiently remove boron. On the other hand, if the layer height of the strongly basic anion exchange resin A or the boron selective ion exchange resin B is larger than this range, the size of the first ion exchange resin tower 23 tends to become excessively large.

  Further, at this time, the flow rate of the water to be treated is preferably 15 m / h to 20 m / h. If the water line speed of the water to be treated is less than 15 m / h, the treatment speed of the water to be treated by the first ion exchange resin tower 23 becomes too slow, and the water line speed of the water to be treated is 20 m / h. If it exceeds, it tends to be difficult to sufficiently remove boron.

As described above, by filling the two types of ion exchange resins, the water to be treated first comes into contact with the strongly basic anion exchange resin A and then comes into contact with the boron selective ion exchange resin B. Therefore, most of the anion contained in the water to be treated is first contacted with the strongly basic anion exchange resin A to be removed. Then, in contact with the boron selective ion exchange resin B, in particular boron ions are selectively removed. That is, some anions are more easily adsorbed to the boron-selective ion exchange resin B than boron ions (particularly carbonate ions (CO ²⁻ )), which inhibits the adsorption of boron ions to the boron-selective ion exchange resin B. There is a case. However, in the present embodiment, at the stage where the water to be treated reaches the boron selective ion exchange resin B, most of the other anions that inhibit the adsorption of boron ions are removed, so that the boron ions can be more efficiently removed. Can be adsorbed.

  As a result, the service life of the boron selective ion exchange resin B becomes longer. And the necessity for frequently replacing the boron selective ion exchange resin B is reduced, the apparatus can be stably operated, and the production cost of pure water is reduced.

  When this is a mixture of strong basic anion exchange resin A and boron selective ion exchange resin B, or when boron selective ion exchange resin B comes into contact with the water to be treated prior to strong basic anion exchange resin A, This effect cannot be obtained. Further, even when the strongly basic anion exchange resin A or the boron selective ion exchange resin B is used alone, this effect cannot be obtained.

  In the above-described example, the case where two layers of the strongly basic anion exchange resin A and the boron selective ion exchange resin B are described. However, after the water to be treated is in contact with the strongly basic anion exchange resin A, If it comes to the form which contacts boron selective ion exchange resin B, it will not be restricted to this. For example, a strong basic anion exchange resin A may be further provided on the discharge part 233 side of the boron selective ion exchange resin B to form a three-layer structure. Further, a strong basic anion exchange resin A or a boron selective ion exchange resin B may be provided. Four or more layers may be stacked.

  Further, a partition plate having a structure in which the water to be treated can pass but the strong base anion exchange resin A and the boron selective ion exchange resin B cannot pass is provided inside the outer shell portion 231, and the introduction portion 232 is provided from this partition plate. Alternatively, the strong base anion exchange resin A may be filled on the side, and the boron selective ion exchange resin B may be filled on the discharge portion 233 side. That is, it is not limited to the form of laminating these.

  Furthermore, in the above-described example, the first ion exchange resin tower 23 and the second ion exchange resin tower 26 are installed in the secondary pure water system 20, but the present invention is not limited to this. That is, it does not prevent installation in the primary pure water system 10 and may be used for purposes other than that used in the pure water production unit 1.

  In the above-described example, the first ion exchange resin tower 23 and the second ion exchange resin tower 26 are both described as having the structure shown in FIG. 2, but either one has the structure shown in FIG. Just make it.

  In addition, the method of processing to-be-processed water in the 1st ion exchange resin tower | column 23 mentioned above is the 1st process process and the 1st process process of passing a to-be-processed water through the strong basic anion exchange resin A, and processing. A second treatment step in which the treated water treated by the step of passing through the boron-selective ion exchange resin B is treated with the strongly basic anion exchange resin A in a layered state. It can also be understood that this is a treatment method of water to be treated, characterized by being sequentially passed through the boron selective ion exchange resin B.

  EXAMPLES Hereinafter, although this invention is demonstrated in detail using an Example, this invention is not limited by these Examples, unless the summary is exceeded.

Example 1
In this example, the first ion exchange resin tower 23 shown in FIG. 2 was used. At this time, as the outer shell portion 231, one having a diameter of 20 mmφ and a height of 1000 mm was used.
Then, the strong base anion exchange resin A and the boron selective ion exchange resin B were filled in the outer shell portion 231 of the first ion exchange resin tower 23 as shown in FIG. At this time, Diaion SAT20L manufactured by Mitsubishi Chemical Corporation was used as the strongly basic anion exchange resin A, and the layer height _HA was set to 300 mm. As boron-selective ion exchange resin B, using Diaion CRBT03 of Mitsubishi Chemical Corporation, a layer height _{H B} was set to be 870 mm.
Then, water having a boron concentration of 1 ppb as water to be treated was passed at a water flow rate of 6.28 L / h and a water flow rate of 20 m / h.

(Comparative Example 1)
In this comparative example, the same first ion exchange resin tower 23 as in Example 1 was used.
Then, inside the outer shell portion 231 of the first ion exchange resin tower 23 was filled with Diaion SAT20L manufactured by Mitsubishi Chemical Corporation as in Example 1 as the strongly basic anion exchange resin A. At this time, the layer height _HA was set to 468 mm. Further, the boron selective ion exchange resin B was not filled.
Then, water having a boron concentration of 1 ppb as the water to be treated was passed at a water flow rate of 14.1 L / h and a water flow rate of 20 m / h.

(Evaluation)
About the water after the process discharged | emitted from the discharge part 233 of the 1st ion exchange resin tower 23, the density | concentration of boron was measured using the on-line type | mold boron meter and ICP-MS analyzer (inductively coupled plasma mass spectrometer). And we continued the water flow and investigated the service life (life).

  In addition, the equilibrium adsorption amount was calculated as the boron adsorption amount per liter of the ion exchange resin. This was performed by acid-decomposing the treated ion exchange resin with a microwave, measuring the amount of adsorbed boron using an ICP-MS analyzer, and calculating from this. A larger value of the equilibrium adsorption amount indicates that more boron can be adsorbed, which can be said to be a good result.

  The results are shown in Table 1.

  As shown in Table 1, the concentration of boron contained in the water discharged from the discharge portion 233 was less than 1 ppt in both the case of Example 1 and the case of Comparative Example 1. However, with regard to the useful life (life), in the case of Example 1, no leakage of boron of 1 ppt or more was observed even after 425 days. On the other hand, in the case of the comparative example 1, the leakage of boron increased after 39 days and became 1 ppt or more.

  Furthermore, the equilibrium adsorption amount was better in Example 1 than in Comparative Example 1.

DESCRIPTION OF SYMBOLS 1 ... Pure water manufacturing unit, 10 ... Primary pure water system, 11 ... Raw water tank, 12 ... Turbidity membrane apparatus, 13 ... Filtration water tank, 14 ... Activated carbon filtration apparatus, 15 ... Reverse osmosis membrane apparatus, 16 ... Deaeration apparatus, 17 DESCRIPTION OF SYMBOLS ... Electric regeneration type desalinator, 18 ... Primary pure water tank, 20 ... Secondary pure water system, 21 ... First deaeration device, 22 ... First ultraviolet oxidation device, 23 ... First ion exchange resin tower, 24 ... First Cartridge polisher, 25 ... second ultraviolet oxidation device, 26 ... second ion exchange resin tower, 27 ... second degassing device, 28 ... second cartridge polisher, 29 ... ultrafiltration device, 231 ... outer shell portion, 232 ... Introduction part, 233 ... discharge part

Claims (5)

A treatment apparatus for treated water for treating treated water containing boron,
An outer shell portion having a space for filling the ion exchange resin therein;
An introduction part for introducing the water to be treated into the outer shell part;
A discharge part for discharging the treated water from the outer shell part;
With
The ion exchange resin is a strongly basic anion exchange resin to be filled into the inlet side, Ri Do and a boron-selective ion-exchange resin filled in the discharge side,
An apparatus for treating water to be treated, wherein the strong base anion exchange resin has a layer height of 200 mm to 400 mm, and the boron selective ion exchange resin has a layer height of 800 mm to 1000 mm .   The treatment apparatus for water to be treated according to claim 1, wherein the strongly basic anion exchange resin and the boron selective ion exchange resin are stacked and filled. The apparatus for treating water to be treated according to claim 1 or 2 , wherein the water to be treated is passed through the outer shell portion at a water linear velocity of 15 m / h to 20 m / h. A primary pure water system including a turbidity removing device for removing turbidity contained in the raw water and a desalting device for performing a desalting treatment on the raw water;
A secondary pure water system including a non-regenerative ion exchange apparatus that is treated by the primary pure water system and treats water containing boron;
With
The non-regenerative ion exchange device included in the secondary pure water system is:
An outer shell portion having a space for filling the ion exchange resin therein;
An introduction part for introducing treated water into the outer shell part;
A discharge part for discharging the treated water from the outer shell part;
With
The ion exchange resin is a strongly basic anion exchange resin to be filled into the inlet side, Ri Do and a boron-selective ion-exchange resin filled in the discharge side,
The strong base anion exchange resin has a layer height of 200 mm to 400 mm, and the boron selective ion exchange resin has a layer height of 800 mm to 1000 mm . A treatment method of treated water for treating treated water containing boron,
A first treatment step of treating the treated water by passing it through a strongly basic anion exchange resin having a layer height of 200 mm to 400 mm ;
A second treatment step of treating the treated water treated in the first treatment step by passing it through a boron selective ion exchange resin having a layer height of 800 mm to 1000 mm ;
Including
The water to be treated is passed through the strongly basic anion exchange resin and the boron selective ion exchange resin in a stacked state in order.

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