JP6208515B2 - Coating apparatus and coating method - Google Patents

Description

  The present invention relates to a technique for applying a flowable material to a substrate.

  In recent years, organic EL display devices using organic EL (Electro Luminescence) materials have been developed. For example, in the manufacture of an active matrix driving type organic EL display device using a polymer organic EL material, a TFT (Thin Film Transistor) circuit is formed on a glass substrate (hereinafter simply referred to as “substrate”), an anode Formation of ITO (Indium Tin Oxide) electrode, formation of partition walls, application of fluid material containing hole transport material (hereinafter referred to as “hole transport liquid”), formation of hole transport layer by heat treatment, Application of a fluid material containing an organic EL material (hereinafter referred to as “organic EL liquid”), formation of an organic EL layer by heat treatment, formation of a cathode, and sealing by formation of an insulating film are sequentially performed.

  In manufacturing an organic EL display device, a device disclosed in Patent Document 1 is known as a device for applying a hole transport liquid or an organic EL liquid to a substrate. In this type of coating apparatus, a plurality of nozzles that continuously discharge a flowable material are moved relative to the substrate in the main scanning direction and the sub-scanning direction to apply the flowable material on the substrate in stripes. To do.

  By the way, on the surface of the substrate for the organic EL display device, a driver circuit is incorporated around a coating region (that is, a light emitting region) where a fluid material such as a hole transport liquid or an organic EL liquid is to be applied. A region necessary for sealing with a region or an insulating film is provided. In the production of an organic EL display device, there is a possibility that a fluid material may adhere to a region around these application regions (hereinafter referred to as “non-application region”) in the process of forming a hole transport layer or an organic EL layer. When the post-process is performed in a state where the fluid material is attached, there is a possibility that the electrode characteristic deterioration or sealing failure may occur. Therefore, several techniques for preventing the flowable material from adhering to the non-application area on the substrate have been proposed.

  For example, Patent Document 2 discloses a technique in which a masking tape is attached to a portion corresponding to a non-application area of a substrate. After the flowable material is applied to the substrate to which the masking tape is applied, the masking tape is peeled off to form a non-application region on the substrate.

  Patent Document 3 discloses a technique of directly removing a fluid material from a portion corresponding to a non-application region by plasma treatment after the fluid material is applied to the entire surface of the substrate.

JP 2004-111073 A JP 2008-277212 A JP 2011-210531 A

  However, in the case of the technique described in Patent Document 2, it is inefficient because the step of attaching the masking tape to the substrate and the step of removing the masking tape from the substrate need to be performed outside the coating apparatus. Further, when the masking tape is peeled off, the masking tape adhesive may adhere to the substrate, resulting in a residue. In the case of the technique described in Patent Document 3, there is a possibility that the plasma treatment may adversely affect the substrate serving as a base. For this reason, there was room for improvement in the prior art.

  The present invention has been made in view of the above problems, and an object thereof is to provide a technique for efficiently and effectively forming a non-application region on a substrate.

In order to solve the above-described problem, a first aspect is a coating apparatus that forms a non-coating region where the fluid material is not applied while applying the fluid material to the substrate, and holds the substrate. A holding unit, a discharge unit that discharges a flowable material toward the main surface of the substrate held by the holding unit, and the discharge unit are moved relative to the substrate held by the holding unit. A magnetic mask portion is disposed so as to oppose a portion corresponding to the non-application area of the main surface of the substrate held by the holding mechanism and the holding portion, and the mask portion is disposed on the substrate. A mask mechanism that moves in accordance with the movement; and a magnetic field generation unit that attracts the mask unit to the substrate by generating a magnetic field , and the movement mechanism holds the discharge unit in the holding unit. Parallel to the main surface of the substrate An ejection unit moving mechanism that moves in a scanning direction; and a holding unit moving mechanism that moves the holding unit that holds the substrate in a sub-scanning direction that intersects the main scanning direction. The substrate by the holding unit moving mechanism, comprising: a masking tape that is the belt-shaped mask part, a sending part that sends out the masking tape, and a winding part that winds up the masking tape sent from the sending part The sending unit sends out the masking tape in the sub-scanning direction in accordance with the movement in the sub-scanning direction .

According to a second aspect, in the coating apparatus according to the first aspect, the delivery unit is configured so that the moving direction and the moving amount of the masking tape coincide with the moving direction and the moving amount of the substrate. Send out.

Further, a third aspect is the coating apparatus according to the first or second aspect, wherein the moving mechanism moves the substrate in the sub-scanning direction by moving the holding part, and the sending part is The masking tape is sent out in the sub-scanning direction, and the holding unit includes a stage having a plane for holding the substrate, and a plurality of the magnetic field generating units are arranged along the sub-scanning direction in the stage. Including magnetic materials.

According to a fourth aspect, in the coating apparatus according to any one of the first to third aspects, the mask mechanism includes a plurality of the mask portions.

The fifth aspect further includes a cleaning mechanism for cleaning the mask portion in the coating apparatus according to any one of the first to fourth aspects.

According to a sixth aspect, in the coating apparatus according to any one of the first to fifth aspects, the fluid material is an organic EL liquid or a hole transport liquid.

In addition, according to a seventh aspect, in the coating apparatus according to any one of the first to sixth aspects, the main surface of the substrate is ejected from the ejection unit in an area excluding an effective area used as a device. And a photographing unit for photographing the applied pattern of the fluid material.

According to an eighth aspect, in the coating apparatus according to the seventh aspect, the photographing unit photographs the application pattern of the fluid material ejected on the mask portion.

According to a ninth aspect, in the coating apparatus according to the eighth aspect, a covering portion for holding the coating pattern is formed on the surface of the mask portion.

Further, the tenth aspect is an application method for forming a non-application region where the flowable material is not applied while applying the flowable material to the substrate, and (a) a step of holding the substrate; (b) a step of disposing a magnetic mask portion above a portion corresponding to the non-coating region of the main surface of the substrate held in the step (a), and (c) a discharge portion on the substrate. A step of discharging a flowable material from the discharge portion toward the substrate on which the mask portion is disposed in the step (b), and (d) in the step (c) A step of moving the mask portion arranged on the main surface of the substrate in the step (b) in accordance with the movement of the substrate in the sub-scanning direction intersecting the main scanning direction parallel to the main surface; (e) the said mask portion arranged at the step (b) by a magnetic force, seen including a step of adsorbing the main surface of the front Stories substrate, The step (c) includes (c1) a step of moving the ejection unit in a main scanning direction parallel to the main surface of the substrate, and (c2) a step of moving the substrate in a sub-scanning direction intersecting the main scanning direction. The step (b) is a step of disposing a strip-shaped masking tape as the mask portion so as to face a portion corresponding to the non-application region, and the step (d) includes ( d1) sending the masking tape from the sending unit in accordance with the movement of the substrate in the sub-scanning direction in the step (c2), and (d2) the sending from the sending unit in the step (d1). a step of winding up the masking tape at the take-up unit, and including.

  According to the coating apparatus which concerns on a 1st aspect, the mask part which has magnetism can be adsorb | sucked to a board | substrate by magnetic force. For this reason, the part corresponding to the non-application | coating area | region in a board | substrate can be covered easily.

Moreover, according to the coating apparatus which concerns on a 1st aspect, a fluid material can be efficiently apply | coated to a board | substrate by moving a discharge part relatively to a main scanning direction and a subscanning direction with respect to a board | substrate.

Moreover, according to the coating device which concerns on a 1st aspect, a flowable material is apply | coated many times with respect to the same location of a masking tape by sending out and winding up a masking tape by a sending part and a winding part. Can be suppressed. Thereby, it is possible to suppress the flowable material from flowing out from the masking tape surface to the substrate.

Further, according to the coating apparatus according to the second aspect, since the masking tape is moved so as to coincide with the moving direction and the moving amount of the substrate, it is possible to reduce generation of dust or the like due to the substrate rubbing against the masking tape. be able to.

Moreover, according to the coating device which concerns on a 3rd aspect, a masking tape can be extended in the moving direction of a board | substrate, and can be made to adsorb | suck by arrange | positioning a some magnetic body along the moving direction of a board | substrate. In addition, by disposing a plurality of magnetic bodies at intervals, the material cost of the magnetic field generation unit can be reduced as compared with the case of disposing one large magnetic body.

Moreover, according to the coating device which concerns on a 4th aspect, a non-application area | region can be formed in the several location on a board | substrate.

Moreover, according to the coating device which concerns on a 5th aspect, a fluid material can be removed by wash | cleaning a mask part.

Moreover, according to the coating device which concerns on a 6th aspect, an organic EL liquid or a hole transport liquid can be apply | coated to a board | substrate.

Moreover, according to the coating apparatus which concerns on a 7th aspect, the fluidity | liquidity from a discharge part is monitored by monitoring the coating pattern formed in the remaining area | regions except the effective area | region utilized as a device among the main surfaces of a board | substrate. It is possible to monitor fluctuations in the material discharge direction.

Moreover, according to the coating apparatus which concerns on an 8th aspect, the fluctuation | variation of a discharge direction can be monitored by monitoring the coating pattern on a mask part.

Moreover, according to the coating device which concerns on a 9th aspect, since the fluid material discharged by the mask part can be hold | maintained in an adhesion position, the fluctuation | variation of a discharge direction can be grasped | ascertained correctly.

It is a schematic plan view of the coating device which concerns on embodiment. It is a schematic front view of the coating device shown by FIG. It is a schematic perspective view of the mask mechanism arrange | positioned on a board | substrate. It is a schematic side view of the masking tape adsorbed on the substrate. It is a schematic plan view which shows the several masking tape distribute | arranged on the board | substrate. It is a schematic perspective view which shows the masking tape wash | cleaned by the washing | cleaning mechanism. It is a figure which shows the flow of the application | coating operation | movement of a coating device. It is a figure which shows the flow of the washing | cleaning operation | movement of a coating device. It is a figure which shows a mode that the stripe pattern formed in the board | substrate is image | photographed and monitored with a camera.

  Hereinafter, the coating apparatus 1 which concerns on embodiment of this invention is demonstrated, referring drawings. In the drawings, for easy understanding, the size and number of each part may be exaggerated or simplified as necessary. Further, in FIG. 1 and the subsequent drawings, for convenience of explanation, an XYZ orthogonal coordinate system is shown in which the X direction and the Y direction perpendicular thereto are defined as the horizontal direction and the vertical direction is defined as the Z direction. However, these directions are not intended to limit the arrangement relationship of the elements.

<1. Embodiment>
<1.1. Configuration and Function>
FIG. 1 is a schematic plan view of a coating apparatus 1 according to the embodiment. FIG. 2 is a schematic front view of the coating apparatus 1 shown in FIG.

  The coating apparatus 1 is configured as an apparatus for manufacturing an organic EL display device that uses a fluid material such as an organic EL liquid, a hole transport material, or a hole injection material as a coating liquid. In the coating apparatus 1, a plurality of coating liquids such as an organic EL liquid, a hole transport material, and a hole injection material can be used. In the following description, the organic EL liquid 3 is applied as a representative of them. The case of using a liquid will be described.

  The coating apparatus 1 includes a substrate holding device 2, an organic EL coating mechanism 5, a mask mechanism 6, a cleaning mechanism 7 (see FIG. 6), and a control unit 10.

  As shown in FIG. 2, the substrate holding device 2 includes a stage 21, a turning unit 22, a parallel movement table 23, a guide receiving unit 24, and a guide member 25.

  The stage 21 is a horizontal thick plate-like rigid material that holds a substrate P such as a glass substrate to be coated on its upper surface. The lower part of the stage 21 is supported by the turning unit 22, and the stage 21 is configured to be able to turn in a horizontal plane in the illustrated θ direction by the turning operation of the turning unit 22.

  Although not shown, a heating mechanism for preheating the substrate P coated with the organic EL liquid 3 on the surface of the stage 21 and holding the substrate P from below are held inside the stage 21. An adsorption mechanism and a delivery pin mechanism used when delivering the substrate P to and from the transport mechanism are provided. The stage 21 is a holding unit that holds the substrate P with a flat upper surface. Although details will be described later, a plurality of magnets 91 are embedded in the stage 21. The plurality of magnets 91 are an example of a magnetic body that attracts the masking tape 611 to the stage 21 via the substrate P by generating a magnetic field.

  The guide member 25 is disposed so as to extend in the Y-axis direction so as to pass under the organic EL coating mechanism 5 and is horizontally fixed to the floor surface. A guide receiving portion 24 that is in contact with the guide member 25 and slides on the guide member 25 is fixed to the lower surface of the parallel movement table 23.

  A swivel unit 22 is fixed to the upper surface of the parallel movement table 23. The parallel movement table 23 receives a driving force from, for example, a linear motor (not shown) and can move in the Y-axis direction along the guide member 25, and the stage 21 supported by the swivel unit 22 moves in a straight line. Is also possible. A stage moving mechanism 26 is constituted by a translation mechanism 23, a guide receiving portion 24, a guide member 25, and a drive mechanism including, for example, a linear motor (not shown).

  The organic EL coating mechanism 5 has a nozzle unit 50 and a nozzle moving mechanism 51.

  The nozzle unit 50 includes a plurality of application nozzles 52 (three application nozzles 52a, 52b, and 52c in FIG. 1) that discharge the organic EL liquid 3 of any one of red, green, and blue in parallel. Hold in state. The nozzle unit 50 is an example of a discharge unit that discharges the organic EL liquid 3 onto the main surface of the substrate P held on the stage 21. The “main surface of the substrate” refers to a surface parallel to the longitudinal direction and the width direction of the substrate P when the substrate P is rectangular. Of course, the shape of the substrate P is not limited to a rectangle, and various shapes are assumed. In general, the substrate P is assumed to be a plate-like member having a flat surface as a main surface. Is done.

  The coating nozzles 52a to 52c are supplied with the organic EL liquid 3 of any one color of red, green, and blue from a supply unit (not shown). The organic EL liquid 3 having the same color may be discharged from the plurality of application nozzles 52.

  The tips of the application nozzles 52a to 52c have the same height (position with respect to the Z-axis direction), and are arranged in a straight line at regular intervals in an oblique direction inclined from the X-axis direction in a horizontal plane. Has been. Further, the nozzle pitch (interval in the Y direction between the nozzles) can be set as appropriate, but in the embodiment, it matches the interval of three rows of stripe-shaped grooves formed in the substrate P. Is set to

  The nozzle moving mechanism 51 includes a shaft guide 511 and a ball screw 512 that extend in the X-axis direction, and a motor (not shown). A ball screw 512 is screwed into the nozzle unit 50 and a shaft guide 511 is passed therethrough. Therefore, when the ball screw 512 is rotated by a motor (not shown), the nozzle unit 50 screwed to the ball screw 512 moves in the X direction along the shaft guide 511.

  The controller 10 is held on the stage 21 by controlling the nozzle moving mechanism 51 so as to move the nozzle unit 50 along the X-axis direction while applying the organic EL liquid 3 from the application nozzles 52a to 52c. A predetermined flow rate of the organic EL liquid 3 is discharged from the coating nozzles 52a to 52c into the grooves of the substrate P. At this time, since the pitch of the coating nozzles 52a to 52c coincides with the three rows of grooves on the substrate P, the coating is performed on the three rows of grooves spaced by two rows from each other. That is, the X-axis direction is the main scanning direction.

  Further, at the discharge positions in the X-axis direction of the coating nozzles 52a to 52c, liquid receiving portions 53L that receive the organic EL liquid 3 discharged and discharged from the substrate P are disposed in both side spaces deviating from the substrate P held by the stage 21. 53R is provided. The nozzle moving mechanism 51 is disposed on the other outer side of the substrate P across the substrate P from the upper space of the liquid receiving portion 53 (for example, the liquid receiving portion 53L) disposed on the one side outer side of the substrate P. The organic EL liquid 3 is applied onto the substrate by reciprocating the nozzle unit 50 to the upper space of the liquid receiving part 53 (for example, the liquid receiving part 53R).

  Further, the parallel movement table 23 has a sub-scanning direction (here, the + Y direction orthogonal to the main scanning direction) intersecting the nozzle reciprocating direction when the nozzle unit 50 is disposed in the upper space of the liquid receiving portion 53. The stage 21 is moved by a predetermined pitch (for example, three times the nozzle pitch). By performing the operation of the nozzle moving mechanism 51 and the parallel movement table 23 and the discharge operation of discharging the organic EL liquid 3 from the coating nozzles 52a to 52c in a liquid column state, the red organic EL liquid 3 is transferred to the substrate P. A so-called stripe arrangement is formed on the substrate P for each of the stripe-shaped grooves formed on the substrate P.

  FIG. 3 is a schematic perspective view of the mask mechanism 6 disposed on the substrate P. As shown in FIG. FIG. 4 is a schematic side view of the masking tape 611 adsorbed on the substrate P. The mask mechanism 6 includes a plurality of (here, four) masking tape drive mechanisms 61 and an adjustment mechanism 63 (see FIG. 5) that adjusts the position of each masking tape drive mechanism 61 in the main scanning direction.

  Each masking tape drive mechanism 61 includes a masking tape 611 (mask portion), a delivery roller 612, and a take-up roller 613.

  The feed roller 612 and the take-up roller 613 are arranged so that their rotation axes extend in parallel with the main scanning direction (X-axis direction). The delivery roller 612 and the take-up roller 613 are arranged at a predetermined interval in the sub-scanning direction (+ Y direction).

  The masking tape 611 is a strip film having magnetism. The thickness of the masking tape 611 is smaller than the distance (for example, about 0.2 to 0.5 mm) between the coating nozzle 52 and the substrate P when the coating process is performed, for example, about 0.05 to 0.1 mm. It is said.

  Further, by sandwiching the upper and lower surfaces (front and back surfaces) of the magnetic masking tape 611 with, for example, a resin film, it is possible to suppress welding of the coating liquid, improve chemical resistance, prevent rusting, and prevent the substrate P and the masking tape 611. Protection against contact with can be performed.

  Each end of the masking tape 611 is wound around a feed roller 612 and a take-up roller 613, respectively. The masking tape 611 is delivered from the delivery roller 612 and taken up by the take-up roller 613.

  As shown in FIGS. 1 to 4, a plurality of magnets 91 are embedded in the stage 21. The plurality of magnets 91 constitute a magnetic field generator 9 that generates a magnetic field. When the magnetic field is generated by the magnetic field generator 9, the masking tape 611 is magnetized. As a result, the masking tape 611 is attracted toward the stage 21 and is attracted to the main surface of the substrate P. The magnet 91 may be a permanent magnet or an electromagnet.

  Although details will be described later, in this embodiment, the masking tape 611 is fed from the feed roller 612 as the masking tape 611 adsorbed on the substrate P is pulled by the magnet 91 moving in the sub-scanning direction. Done. And the used part (part to which the organic EL liquid 3 is applied) of the masking tape 611 moved in the main scanning direction is sequentially wound up by the winding roller 613.

  As shown in FIGS. 1 to 4, in the plurality of magnets 91, adjacent magnets 91 are arranged at a predetermined interval in the sub-scanning direction. In this manner, by disposing the plurality of magnets 91 in a distributed manner, the material cost can be suppressed as compared with the case where one magnet is disposed on the entire surface.

  Further, in the present embodiment, as shown in FIG. 1, a plurality of magnets 91 are arranged at a required interval from near one end of the stage 21 in the main scanning direction (X-axis direction) to near the other end. Yes. For this reason, at the position between the magnets 91 adjacent to each other in the main scanning direction, there is a possibility that the force for attracting the masking tape 611 may be weakened, and there is a case where it cannot be satisfactorily attracted. Therefore, instead of the plurality of magnets 91 arranged in the main scanning direction, one magnet extending from one end of the stage 21 to the other end may be provided. As a result, the masking tape 611 can be attracted to the substrate P at an arbitrary position in the main scanning direction. A magnet may also be arranged in the area outside the stage 21. In this case, when the substrate P having a size larger than that of the stage 21 is disposed, the masking tape 611 can be satisfactorily adsorbed also on the portion of the substrate P that protrudes from the stage 21.

  FIG. 5 is a schematic plan view showing a plurality of masking tapes 611 arranged on the substrate P. FIG. Although the detailed illustration is omitted, the adjustment mechanism 63 translates each of the plurality of masking tape drive mechanisms 61 in the main scanning direction by the guide mechanism, similarly to the nozzle movement mechanism 51. By driving the adjustment mechanism 63, each of the plurality of masking tapes 611 can be arranged at an arbitrary position in the main scanning direction. Thereby, a plurality of non-application areas can be formed at arbitrary positions on the substrate P in the main scanning direction.

  In addition, among the plurality of masking tapes 611, the masking tape 611 that is not used can be retracted to a position deviating from above the substrate P, and only the remaining masking tape 611 can be disposed on the substrate P for use. It is.

  If there is no need to change the position of the non-application area for each substrate P, the adjustment mechanism 63 can be omitted.

  If the magnet 91 is configured to be movable in the main scanning direction, the magnet 91 can be moved in accordance with the position where the masking tape 611 is disposed. Thereby, the masking tape 611 can be satisfactorily attracted to an arbitrary position of the substrate P in the main scanning direction.

  FIG. 6 is a schematic perspective view showing the masking tape 611 cleaned by the cleaning mechanism 7. The cleaning mechanism 7 includes an upper surface and a lower surface of the masking tape 611, a cleaning liquid supply unit 71 that supplies a cleaning liquid toward each surface, and a plurality of support rollers 73 that support the masking tape 611 from the back surface side. ing.

  Each cleaning liquid supply unit 71 is movable in the width direction (main scanning direction) of the masking tape 611, and is between a cleaning position that covers the upper and lower surfaces of the masking tape 611 and a retracted position that is retracted from the masking tape 611. Move with.

  When cleaning the masking tape 611, first, the cleaning mechanism 7 moves each cleaning liquid supply unit 71 to a side position (retracted position) of each masking tape 611. Then, the cleaning liquid supply unit 71 is moved to the cleaning position along the width direction of the masking tape 611. As a result, the upper and lower surfaces of the masking tape 611 face the U-shaped inner surface of the cleaning liquid supply unit 71. Then, the cleaning liquid is supplied from the cleaning liquid supply unit 71 to the upper and lower surfaces of the masking tape 611. Then, the sending roller 612 and the take-up roller 613 are reversely rotated, so that the masking tape 611 is fed back from the take-up roller 613 to the send roller 612. As a result, the portion to which the organic EL liquid 3 is adhered is sequentially fed into the cleaning liquid supply unit 71 and cleaned.

  Although not shown, an air supply unit that dries the masking tape 611 by supplying jet air or the like to the portion of the masking tape 611 that has come out of the cleaning liquid supply unit 71 may be provided. Of course, jet air may be supplied inside the cleaning liquid supply unit 71.

<1.2. Application operation>
FIG. 7 is a diagram illustrating the flow of the coating operation of the coating apparatus 1. In addition, each operation | movement of the coating device 1 demonstrated below is performed based on control of the control part 10, unless there is particular notice.

  First, the substrate P is transported onto the stage 21 by a transport mechanism (not shown) and held on the stage 21 (step S11).

  Next, the nozzle unit 50 is disposed at a position where the application on the substrate P is started by the stage 21 moving in the Y-axis direction. In the example shown in FIG. 7, the stage 21 is arranged on the + Y side of the nozzle unit 50 at the time of step S <b> 11. For this reason, the stage 21 moves in the −Y direction, whereby the substrate P is disposed below the nozzle unit 50. Further, by the movement of the stage 21, the masking tape 611 of the mask mechanism 6 is disposed above the substrate P (step S12).

  When the masking tape 611 is disposed above the substrate P, the mask mechanism 6 drives each masking tape drive mechanism 61 to move each masking tape 611 in the main scanning direction (X-axis direction). As a result, the interval between the masking tapes 611 in the main scanning direction is adjusted, and the masking tapes 611 are arranged above the portions corresponding to the non-application areas of the substrate P.

  Next, the masking tape 611 is attracted to the substrate P (step S13). Specifically, the masking tape 611 being pulled is loosened by the forward rotation of the delivery roller 612 and the reverse rotation of the winding roller 613. As a result, the masking tape 611 is lowered by its own weight. Then, it is attracted to the stage 21 through the substrate P by being attracted to the plurality of magnets 91 embedded in the stage 21. At this time, it is preferable that a margin is provided by slightly loosening the portion of the masking tape 611 between the adsorbed portion and the portion wound around the delivery roller 612 and the take-up roller 613. Further, whether or not the masking tape 611 is attracted to the substrate P is determined based on, for example, the detection result of the optical sensor 39.

  In addition, the aspect which makes the masking tape 611 adsorb | suck is not limited to said aspect, Various aspects can be considered. For example, by rotating only the winding roller 613 in the reverse direction, only part of the masking tape 611 extending in the Y-axis direction on the winding roller 613 side (+ Y side) is attracted to the substrate P. Thereafter, the reverse rotation of the take-up roller 613 is stopped and the feed roller 612 is rotated in the forward direction, so that the portion floating from the substrate P of the masking tape 611 is gradually attracted toward the -Y direction. According to this aspect, the generation of wrinkles on the masking tape 611 is suppressed, so that the masking tape 611 can be more favorably adsorbed to the substrate P.

  When the masking tape 611 is adsorbed to the substrate P, the nozzle unit 50 performs main scanning from one of the liquid receiving portions 53L and 53R toward the other while discharging the organic EL liquid 3 from the coating nozzles 52a to 52c. Move in the direction. As a result, the organic EL liquid 3 is applied in a stripe pattern on the substrate P and the plurality of masking tapes 611 disposed on the substrate P (step S14). When this one application operation in the main scanning direction is completed, the nozzle unit 50 stands by for a required time while discharging the organic EL liquid 3 on the liquid receiving portion 53L or 53R. While the nozzle unit 50 is standing by, the stage moving mechanism 26 moves the stage 21 in the + Y direction (sub-scanning direction) by a required distance (for example, a distance corresponding to three times the nozzle pitch). As a result, the substrate P held on the stage 21 is moved in the sub-scanning direction.

  When the stage 21 moves in the sub scanning direction, the masking tape 611 is pulled by the magnet 91. In synchronization with this, the sending roller 612 and the take-up roller 613 are rotated by an amount corresponding to the moving amount of the stage 21 (that is, the moving amount of the substrate P), and the masking tape 611 is moved. In other words, the delivery roller 612 sends out the masking tape 611 so that the moving direction of the masking tape 611 and the moving amount per unit time match the moving direction of the substrate P and the moving amount per unit time. That is, the moving speed of the masking tape 611 is controlled to match the moving speed of the substrate P. In this way, a new uncoated portion of the masking tape 611 is sent out onto the substrate P.

  In the present embodiment, the masking tape 611 is sequentially sent out each time the application position of the nozzle unit 50 with respect to the substrate P is changed in the sub-scanning direction. Thereby, it is possible to prevent the organic EL liquid 3 from being applied many times to the same place on the upper surface of the masking tape 611. Therefore, jumping of the organic EL liquid 3 can be reduced. Further, by causing the moving speed of the masking tape 611 to coincide with the moving speed of the substrate P, the rubbing between the substrate P and the masking tape 611 can be reduced. Thereby, generation | occurrence | production of dusts, such as dust, can be suppressed.

  As a result, one application operation in the main scanning direction and one feeding operation in the sub-scanning direction are repeatedly performed, so that the organic EL is applied to the effective region (region where the groove is formed) of the substrate P. Liquid 3 is applied.

  When the coating process is completed, at least one of the delivery roller 612 and the take-up roller 613 takes up the masking tape 611, whereby the masking tape 611 is peeled off from the substrate P and pulled up (step S15). Whether the lifting of the masking tape 611 is completed is determined based on the detection result of the optical sensor 39. The substrate P for which the coating process has been completed is transported in the Y-axis direction (+ Y direction in the illustrated example), and is unloaded from the coating apparatus 1 by a transport mechanism (not illustrated). For example, a drying process (baking process) is performed on the unloaded substrate P.

<1.3. Cleaning operation>
FIG. 8 is a diagram illustrating the flow of the cleaning operation of the coating apparatus 1. In parallel with the unloading process of the substrate P (FIG. 7: Step S15), the cleaning process by the cleaning mechanism 7 is performed on the masking tape 611 as shown in FIG.

  Specifically, first, the cleaning mechanism 7 places the cleaning liquid supply unit 71 and the plurality of support rollers 73 at the side position (retracted position) of each masking tape 611 (step S21). Then, the cleaning liquid supply unit 71 and the plurality of support rollers 73 are moved along the width direction of the masking tape 611 so that each masking tape 611 is inserted into the cleaning liquid supply unit 71 disposed at the cleaning position, and below that. A plurality of support rollers 73 are arranged.

  Next, when the feed roller 612 rotates in the forward direction and the winding roller 613 rotates in the reverse direction, the masking tape 611 is loosened and lowered by its own weight. Then, it is supported by a plurality of support rollers 73 (step S22). Note that the masking tape 611 may be lowered by rotating any one of the feed roller 612 and the take-up roller 613. Whether the masking tape 611 has been lowered to a required position is determined based on the detection result of the optical sensor 39.

  Then, when the delivery roller 612 and the take-up roller 613 are rotated in the reverse direction, the cleaning liquid supply unit 71 supplies the cleaning liquid to the upper and lower surfaces of the masking tape 61 while the masking tape 611 is fed back. Thereby, the masking tape 611 is cleaned (step S23).

  When the cleaning of the portion to be cleaned in the masking tape 611 is completed, at least one of the delivery roller 612 and the take-up roller 613 rotates to wind up the masking tape 611. Thereby, the masking tape 611 is pulled up. Whether the masking tape 611 is completely pulled up is determined based on the detection result of the optical sensor 39. Then, the cleaning liquid supply unit 71 and the plurality of support rollers 73 move to the retracted position, and move to a position that does not hinder the coating process. Thereby, preparation for the coating process for the next new substrate P is completed (step S24).

  When the application / drying process is completed for the organic EL liquid 3 of the specific color by the above operation, the light emitting layer of the organic EL display device is formed. In addition, although you may make it discharge the organic EL liquid 3 of a different color from each application nozzle 52, discharging the organic EL liquid 3 of the same color is also considered. In this case, the light emitting layer is formed by sequentially applying and drying the respective colors. An organic EL display device is manufactured by forming a cathode electrode on the light emitting layer by, for example, vacuum deposition on the substrate on which the light emitting layer is formed.

  According to the coating apparatus 1 according to the present embodiment, the masking tape 611 can be adsorbed to the portion corresponding to the non-application area of the substrate P on the stage 21 by the action of magnetic force. Therefore, the organic EL liquid 3 can be applied to the effective area while forming the non-application area on the substrate P. Further, it is not necessary to adhere the masking tape 611 to the substrate P with an adhesive, and it is not necessary to perform plasma treatment for removing the organic EL liquid 3. For this reason, there is less risk of the substrate P becoming dirty or damaged, and the non-application area can be formed effectively.

<1.4. Monitoring stripe patterns>
FIG. 9 is a diagram showing a state in which the stripe pattern ST1 formed on the substrate P is photographed and monitored by the camera 80. In FIG. 9, a part of the substrate P whose end in the main scanning direction is covered with the masking tape 611 is illustrated.

  As shown in FIG. 9, the stripe pattern ST <b> 1 (application pattern) is formed on the substrate P by the application head 50 moving in the main scanning direction. Here, when application is performed for a long time, dust adheres to the discharge holes of the application nozzles 52a to 52c, or dust accumulates, whereby the discharge direction of the fluid material from the application nozzles 52a to 52c. May fluctuate. When the ejection direction varies as described above, the interval between the lines constituting the stripe pattern ST1 varies.

  Therefore, conventionally, for example, an effective area SP1 (for example, an area indicated by hatching in FIG. 9 corresponding to a panel area used as a panel of an organic EL display) on which a groove or the like is formed on the substrate P. The formed stripe pattern ST1 is photographed and monitored by a camera (CCD or the like). However, in the effective area SP1, when a coating process such as a partition (bank) or an oil repellent process is performed, the flowable material may move immediately from the original adhesion position, and the line of the stripe pattern ST1 It was difficult to accurately detect fluctuations. As a means for monitoring the stripe pattern ST1, trial application may be performed in a pre-scan section provided near the stage 21 while the substrate P is being carried out or carried in. However, in this case, since the timing that can be monitored is limited, there is a high possibility that a poorly coated substrate P will occur. In addition, it is necessary to prepare a pre-scan unit separately.

  Therefore, in this embodiment, the stripe pattern ST1 of the flowable material discharged from the application nozzles 52a to 52c in the remaining area SP2 excluding the effective area SP1 in the main surface of the substrate 9 is displayed on the camera 80 (imaging unit). ) More specifically, as shown in FIG. 9, the camera 80 captures a portion of the remaining area SP2 on the main surface of the substrate P that is covered with the masking tape 611.

  Note that a covering portion 65 that holds the applied stripe pattern ST <b> 1 (that is, maintains the fluid material at the position at the time of attachment) may be formed on the surface of the masking tape 611. The material of the covering portion 65 is determined in accordance with the type of the fluid material used. For example, in the case of an oil fluid material, a coating process that reduces oil repellency is performed.

  The image signal acquired by the camera 80 is sent to the control unit 10. Then, the control unit 10 generates an image based on the image signal. The generated image may be displayed on a monitor (not shown). In addition, by performing image processing, an interval between a plurality of lines constituting the stripe pattern ST1 may be acquired, or a means for determining whether or not the interval is an allowable value may be provided.

  If the line spacing is outside the allowable value, one of the application nozzles 52a to 52c corresponding to the line out of the allowable value is moved by a predetermined distance in the sub-scanning direction, and the adjacent application nozzles 52 are moved. The interval (pitch) may be adjusted automatically or by a predetermined operation input.

  Thus, according to the present embodiment, the stripe pattern ST1 can be constantly monitored while performing the coating process. In addition, by photographing a region having no structure such as a bank, it is possible to satisfactorily monitor the adhesion position of the fluid material. Further, it is not necessary to prepare a pre-scan unit separately.

<2. Modification>
Although the embodiment has been described above, the present invention is not limited to the above, and various modifications are possible.

  For example, the width of the masking tape 611 is not necessarily constant, and a wide portion and a short portion may be provided. Further, a hole may be provided in the center in the width direction of the masking tape 611. When such a masking tape 611 is used, a fluid material can be applied in the non-application area corresponding to the hole shape.

  Further, the cleaning process of the masking tape 611 by the cleaning mechanism 7 is not necessarily performed after the coating process. For example, it may be determined whether or not the masking tape 611 needs to be cleaned, and the cleaning process may be performed only when it is determined that it is necessary. Alternatively, the cleaning process may be performed periodically.

  Moreover, in the said embodiment, although the structure which provides the washing | cleaning liquid supply part 71 is illustrated as the washing | cleaning mechanism 7, it is pressed on the surface of the masking tape 611 instead of the washing | cleaning liquid supply part 71, for example. A rubber member that removes (squeezes) the organic EL liquid 3 may be used.

  In the above embodiment, the nozzle unit 50 is moved in the X-axis direction and the substrate P is moved in the + Y direction, so that the relative movement of the nozzle unit 50 with respect to the substrate P in the main scanning direction and the sub-scanning direction is realized. Has been. However, the coating apparatus 1 may be configured to move the nozzle unit 50 in the + Y direction or move the substrate P in the X-axis direction. Of course, the coating apparatus 1 may be configured to move only one of the nozzle unit 50 and the substrate P in the X-axis direction and the + Y direction.

  Although the present invention has been described in detail, the above description is illustrative in all aspects, and the present invention is not limited thereto. It is understood that countless variations that are not illustrated can be envisaged without departing from the scope of the present invention. In addition, the configurations described in the above embodiments and modifications can be appropriately combined or omitted as long as they do not contradict each other.

DESCRIPTION OF SYMBOLS 1 Application | coating apparatus 10 Control part 2 Substrate holding | maintenance apparatus 21 Stage (holding part)
26 Stage moving mechanism 3 Organic EL liquid (fluid material)
DESCRIPTION OF SYMBOLS 5 Application | coating mechanism 50 Nozzle unit 51 Nozzle movement mechanism 6 Mask mechanism 61 Masking tape drive mechanism 611 Masking tape (mask part)
612 Sending roller (sending part)
613 Winding roller (winding part)
63 Adjustment mechanism 7 Cleaning mechanism 71 Cleaning liquid supply unit 73 Support roller 9 Magnetic field generation unit 91 Magnet (magnetic material)
P substrate

Claims (10)

An application apparatus that applies the fluid material while forming a non-application region where the fluid material is not applied to the substrate,
A holding unit for holding the substrate;
A discharge unit that discharges a flowable material toward the main surface of the substrate held by the holding unit;
A moving mechanism for moving the ejection unit relative to the substrate held by the holding unit;
A mask portion having magnetism is arranged so as to face a portion corresponding to the non-application area in the main surface of the substrate held by the holding portion, and the mask portion is adjusted according to the movement of the substrate. A moving mask mechanism;
A magnetic field generation unit that attracts the mask unit to the substrate by generating a magnetic field;
Equipped with a,
The moving mechanism is
A discharge unit moving mechanism for moving the discharge unit in a main scanning direction parallel to a main surface of the substrate held by the holding unit;
A holding unit moving mechanism for moving the holding unit holding the substrate in a sub-scanning direction intersecting the main scanning direction;
Have
The mask mechanism is
A masking tape that is a strip-shaped mask portion having magnetism;
A delivery section for delivering the masking tape;
A winding unit for winding the masking tape sent out from the sending unit;
With
A coating apparatus in which the delivery unit sends out the masking tape in the sub-scanning direction in accordance with the movement of the substrate in the sub-scanning direction by the holding unit moving mechanism . The coating apparatus according to claim 1 ,
The coating apparatus, wherein the delivery unit sends out the masking tape so that the movement direction and movement amount of the masking tape coincide with the movement direction and movement amount of the substrate. The coating apparatus according to claim 1 or 2 ,
The moving mechanism moves the substrate in the sub-scanning direction by moving the holding unit,
The delivery unit sends out the masking tape in the sub-scanning direction ,
The holding unit includes a stage having a plane for holding the substrate,
The said magnetic field generation | occurrence | production part is a coating device containing the magnetic body arrange | positioned in multiple numbers along the said subscanning direction in the said stage. In the coating device of any one of Claim 1 to 3 ,
The mask mechanism includes a plurality of the mask portions. In the coating device according to any one of claims 1 to 4 ,
A coating apparatus, further comprising a cleaning mechanism for cleaning the mask portion. In the coating device according to any one of claims 1 to 5 ,
A coating apparatus, wherein the fluid material is an organic EL liquid or a hole transport liquid. In the coating device according to any one of claims 1 to 6 ,
An imaging unit that captures an application pattern of the fluid material ejected from the ejection unit in an area excluding an effective area used as a device among the main surface of the substrate,
An applicator further comprising: The coating apparatus according to claim 7 , wherein
The said imaging | photography part is a coating device which image | photographs the application pattern of the said fluid material discharged on the said mask part. The coating apparatus according to claim 8 , wherein
The coating apparatus in which the coating | coated part holding the said coating pattern is formed in the surface of the said mask part. An application method for applying the flowable material to the substrate while forming a non-application area where the flowable material is not applied.
(a) holding the substrate;
(b) Of the main surface of the substrate held in the step (a), a step of arranging a mask portion having magnetism above a portion corresponding to the non-application region;
(c) discharging the flowable material from the discharge unit toward the substrate on which the mask unit is disposed in the step (b) while moving the discharge unit relative to the substrate;
(d) In the step (c), the mask portion disposed on the main surface of the substrate in the step (b) is formed on the substrate in the sub-scanning direction intersecting the main scanning direction parallel to the main surface. A process of moving according to the movement;
(E) the said mask portion arranged in step (b), the magnetic force adsorbing the main surface of the front Stories substrate,
Only including,
The step (c)
(c1) moving the ejection unit in a main scanning direction parallel to the main surface of the substrate;
(c2) moving the substrate in a sub-scanning direction intersecting the main scanning direction;
Including
The step (b) is a step of arranging a strip-shaped masking tape as the mask portion so as to face a portion corresponding to the non-application region,
The step (d)
(d1) sending the masking tape from the sending unit in accordance with the movement of the substrate in the sub-scanning direction in the step (c2);
(d2) a step of winding the masking tape sent out from the sending unit in the step (d1) by a winding unit;
Including, application methods.

Images