JP6294175B2 - Semiconductor device and power conversion system using the same - Google Patents

Description

  The present invention relates to a semiconductor device and a power conversion system using the same, and more particularly to a diode-configured semiconductor device and a power conversion system using the same.

Conventionally, as a technique for reducing tail current in a rectifier diode, there has been a technique for forming a low lifetime region in an n-type cathode layer on the cathode electrode side by particle beam irradiation such as proton irradiation / He ⁺ irradiation (for example, Patent Document 1).

  Conventionally, as a technique for suppressing generation of a voltage waveform and noise due to a decrease in tail current in a diode, there has been a technique in which a low lifetime region and a high lifetime region coexist (see, for example, Patent Document 2). ).

Japanese Patent Laid-Open No. 10-74959 JP 2000-332263 A

  A diode used as a freewheeling diode connected in reverse parallel to an IGBT (Insulated Gate Bipolar Transistor) or MOS (Metal-Oxide-Semiconductor) transistor to a power conversion device is used at the time of switching as the drive frequency of the device increases. Reduction of recovery loss, which is a loss of the diode, is further demanded.

  Since the recovery loss increases as the tail current flowing through the diode during recovery increases, a method of reducing the tail current has been proposed in order to reduce the recovery loss.

Conventionally, as such a method, for example, a rectifier diode whose cross-sectional structure is shown in FIG. In the rectifier diode shown in FIG. 31 of Patent Document 1, the n density on the cathode electrode 290 side is suppressed in advance in order to keep the carrier density in the n-type cathode layer 281 on the cathode electrode 290 side, which is a source of tail current, low. The low lifetime region 291 is formed in the type cathode layer 281 by particle beam irradiation such as proton irradiation He ⁺ irradiation.

  Further, in FIG. 1 of Patent Document 1, a low resistance p-type anode 2 is selectively diffused and formed on the surface of the high resistance n-type cathode layer 1, and a low resistance is formed on the back surface of the n-type cathode layer 1. There is described a rectifier diode in which an n-type cathode layer 3 is formed by diffusion and is composed of an n-type cathode layer 1, a p-type anode layer 2, and an n-type cathode layer 3. In order to reduce the tail current, it is described that the low lifetime region 8 is formed in the n-type cathode layer 3 by particle beam irradiation such as proton irradiation.

  However, when the tail current is reduced, di / dt at the time of reverse recovery increases and the jumping voltage increases, and in some cases, the voltage waveform oscillates and noise is generated. Therefore, as disclosed in Patent Document 2, a structure divided into a low lifetime region and a high lifetime region has been proposed.

  This structure promotes carrier annihilation by lateral diffusion of carriers, secures a region with a long carrier lifetime, lengthens tail time, suppresses increase in di / dt, reduces jumping voltage, and forms voltage waveform This suppresses the oscillation phenomenon.

  However, in the diode having the configuration disclosed in Patent Document 2, the low lifetime region is formed over the entire layer in the film pressure direction of the element. For this reason, carriers easily disappear and it is difficult to reduce the on-voltage.

  In addition, a low lifetime region pattern is formed by irradiating a particle beam such as He or proton through a mask using a material having a high ability to block these particle beams. In this process, unlike a photo process using a stepper or aligner in a normal semiconductor manufacturing process, pattern alignment accuracy is deteriorated.

  In addition, the mask is manufactured using a material having a high blocking ability. However, in order to ensure the blocking ability, it is necessary to increase the thickness of the material. Although a pattern is formed by making a hole in this material, it is difficult to increase the dimensional accuracy of the hole, that is, the pattern dimensional accuracy in the low lifetime region.

  Due to these deteriorations in alignment accuracy and dimensional accuracy, there arises a problem that variation in element characteristics increases.

  In addition, when a hole is made in a material having a high blocking ability, it is difficult to form a fine pattern. For this reason, miniaturization of the low lifetime region is limited, and there is a problem that the adjustment accuracy of the element characteristics deteriorates.

  Furthermore, the diodes disclosed in Patent Documents 1 and 2 require a step of irradiating a particle beam in order to form a low lifetime region. In order to irradiate protons and helium, a large cyclotron particle beam irradiation apparatus must be used. In addition, since a low lifetime region is formed in the n-type cathode layer, when a reverse voltage is applied to the diode, in the n-type cathode layer, when a depletion layer extends from the PN junction and reaches the low lifetime region, Leakage current increases due to crystal defects existing in the low lifetime region. In addition, when the amount of crystal defects is large, there arises a problem that the breakdown voltage is lowered.

  The present invention was devised in view of the above-described problems, and has an object to provide a diode structure that facilitates reduction of on-voltage, reduces variation in device characteristics, and improves adjustment accuracy of device characteristics. To do. It is another object of the present invention to provide a diode structure that can be manufactured by a simple method without causing a decrease in breakdown voltage.

The semiconductor device of the present invention, for example, a first semiconductor layer of a first conductivity type, a second semiconductor layer of a second conductivity type stripe shape in plan view which is provided adjacent to the first semiconductor layer, wherein The first conductivity type second semiconductor layer is provided on the opposite side of the first semiconductor layer from the side where the second semiconductor layer is provided and has a higher concentration of the first conductivity type impurity than the first semiconductor layer. A semiconductor device having a diode configuration, comprising: a third semiconductor layer; a first electrode that is ohmically connected to the second semiconductor layer; and a second electrode that is ohmically connected to the third semiconductor layer, An active region located between the third semiconductor layer and adjacent to the first semiconductor layer contains an impurity of the same type as the impurity of the first conductivity type contained in the third semiconductor layer; and Lifetime of carrier than the first semiconductor layer Short and the perpendicular to the second semiconductor layer, further comprising a fourth semiconductor layer of the stripe-shaped by a plurality of planar view, the lifetime of the regions adjacent in the horizontal direction to the layer of the fourth semiconductor layer is a first It is characterized by being longer than the lifetime of 4 semiconductor layers.

  The power conversion system of the present invention is connected, for example, in antiparallel to the first semiconductor switching element and the second semiconductor switching element connected in series with each other, and to the first semiconductor switching element and the second semiconductor switching element, respectively. A first diode and a second diode, wherein the first diode and the second diode are constituted by the semiconductor device of the present invention.

  According to the present invention, in a semiconductor device having a diode configuration and a power conversion system using the same, it is possible to reduce the on-voltage and noise of the diode.

It is typical sectional drawing of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is typical sectional drawing explaining a part of manufacturing process of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is typical sectional drawing explaining a part of manufacturing process of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is typical sectional drawing explaining a part of manufacturing process of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is typical sectional drawing explaining a part of manufacturing process of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is typical sectional drawing of another low lifetime area | region pattern of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is a figure which shows an example of the plane pattern of the low lifetime area | region of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is a figure which shows the other example of the planar pattern of the low lifetime area | region of the diode which concerns on Example 1 which is the 1st Embodiment of this invention. It is a graph which shows the result of the SIMS measurement and SR measurement which were measured from the surface by the side of the cathode of Si substrate of the diode concerning Example 1 which is the 1st embodiment of the present invention. It is typical sectional drawing of the diode which concerns on Example 2 which is the 2nd Embodiment of this invention. It is typical sectional drawing of the diode which concerns on Example 3 which is the 3rd Embodiment of this invention. It is typical sectional drawing of the diode which concerns on Example 4 which is the 4th Embodiment of this invention. It is typical sectional drawing of the diode which concerns on Example 5 which is the 5th Embodiment of this invention. It is a typical sectional view of a diode concerning Example 6 which is a 6th embodiment of the present invention. It is typical sectional drawing of the diode which concerns on Example 7 which is the 7th Embodiment of this invention. It is a block diagram of the power conversion system which concerns on Example 8 which is the 8th Embodiment of this invention. It is typical sectional drawing of the diode which concerns on the comparative example produced in order to verify the effect of this invention. It is a graph which shows the voltage waveform and current waveform at the time of the small current recovery of the diode which concerns on Example 1 of this invention, and the diode which concerns on a comparative example.

  The diode according to the semiconductor device of the present invention includes a first conductive type first semiconductor layer, a second conductive type second semiconductor layer provided adjacent to the first semiconductor layer, and the first semiconductor layer. A third semiconductor layer of the first conductivity type provided on a side opposite to the side on which the second semiconductor layer is provided and having a higher concentration of impurities of the first conductivity type than the first semiconductor layer; A first electrode that is ohmically connected to the second semiconductor layer and a second electrode that is ohmically connected to the third semiconductor layer, the third semiconductor being between the first semiconductor layer and the third semiconductor layer; A plurality of fourth semiconductor layers containing impurities of the same type as the first conductivity type contained in the layer and having a carrier lifetime shorter than that of the first semiconductor layer are provided in the active region. With a high lifetime area connected to the side Going on.

  Note that the third semiconductor layer may have a multilayer structure including a fifth semiconductor layer having a relatively low concentration of the first conductivity type impurity in a region adjacent to the fourth semiconductor layer.

  In the configuration of the present invention, the lifetime of almost the entire region of the first semiconductor layer (drift layer) is long. For this reason, it is easy to increase the amount of carriers in this region when a forward voltage is applied, and the on-voltage can be lowered.

  In this configuration, the fourth semiconductor layer having a low carrier lifetime is formed by ion implantation of the first conductivity type impurity and then activated by laser annealing. At this time, by adjusting the dose amount of the impurity and the laser irradiation amount, A low lifetime region is formed while leaving crystal defects due to ion implantation. At this time, a low carrier time region can be locally formed by forming a photomask pattern before ion implantation.

  By forming the photomask pattern using a double-sided aligner or the like, alignment with the surface pattern can be performed with high accuracy. In addition, since a photomask is used, it is possible to form a fine pattern with high pattern dimension accuracy. As a result, it is possible to reduce variations in the characteristics of the manufactured elements and to accurately adjust the element characteristics during manufacturing.

  In addition, crystal defects of the third semiconductor layer (n-type cathode layer) can be removed by laser annealing. For this reason, the leakage current at the time of reverse bias application can be suppressed, and the withstand voltage can be improved.

  Furthermore, since a low lifetime region is formed by impurity ion implantation, it is not necessary to irradiate particle beams such as He and protons, and an increase in cost due to the use of a large-scale apparatus such as a cyclotron can be avoided.

More specifically, the semiconductor device of the present invention includes, for example, a first semiconductor layer (n ⁻ drift layer) of a first conductivity type (for example, n-type) and a second semiconductor layer provided adjacent to the first semiconductor layer. A second semiconductor layer (anode p layer) of a conductive type (for example, p-type), and the first semiconductor layer provided on the opposite side to the side on which the second semiconductor layer is provided; The first conductivity type third semiconductor layer (cathode n layer) having a higher concentration of the first conductivity type impurity, the first electrode (anode electrode) in ohmic contact with the second semiconductor layer, the first conductivity type A semiconductor device having a diode configuration including a second electrode (cathode electrode) that is ohmically connected to three semiconductor layers, wherein the first semiconductor layer is between the first semiconductor layer and the third semiconductor layer. In the adjacent active region, the third semiconductor layer is The semiconductor device further comprises a plurality of fourth semiconductor layers (low lifetime regions) that contain impurities of the same type as the first conductivity type impurities and that have a carrier lifetime shorter than that of the first semiconductor layer. To do.

  The power conversion system of the present invention is connected, for example, in antiparallel to the first semiconductor switching element and the second semiconductor switching element connected in series with each other, and to the first semiconductor switching element and the second semiconductor switching element, respectively. A first diode and a second diode, wherein the first diode and the second diode are constituted by the semiconductor device of the present invention.

  In the above configuration, the plurality of fourth semiconductor layers may be such that a portion of the fourth semiconductor layer and a portion other than the fourth semiconductor layer appear periodically and repeatedly at a position adjacent to the first semiconductor layer. It is preferable to arrange.

  In the above configuration, it is preferable that an area of the plurality of fourth semiconductor layers on a plane is 5% or more and 50% or less of an area of the active region.

  Further, in the above configuration, the first conductivity type first impurity having a lower concentration of the first conductivity type impurity than the third semiconductor layer in a region between the third semiconductor layer and the fourth semiconductor layer. It is good also as a structure further provided with 5 semiconductor layers (cathode buffer n layer). In that case, it is preferable that a part of the fifth semiconductor layer extends to a region between the plurality of fourth semiconductor layers and is adjacent to the first semiconductor layer, and the fourth semiconductor layer The carrier lifetime in is preferably shorter than the carrier lifetime in the fifth semiconductor layer.

  In the above structure, it is preferable that the fourth semiconductor layer is disposed at a position isolated from the third semiconductor layer.

  In the above configuration, the activation rate, which is the ratio of the carrier concentration obtained based on the measurement of the spreading resistance to the concentration of the first conductivity type impurity obtained by secondary ion mass spectrometry, is The activation rate in the semiconductor layer may be smaller than the activation rate in the third semiconductor layer. In that case, as the fourth semiconductor layer, a layer having an activation rate of 10% or less is preferable.

  In the above structure, the fourth semiconductor layer may include a crystal defect. In that case, the crystal defect is preferably generated by ion implantation of the impurity of the first conductivity type, and in that case, the third semiconductor layer and the fourth semiconductor layer are 3 It is preferable that the first semiconductor layer is formed by ion implantation of the first conductivity type impurity to form a semiconductor layer and laser irradiation after the ion implantation.

  In the above structure, the fourth semiconductor layer has a position where the concentration of the crystal defect generated by ion implantation of the first conductivity type impurity in order to form the third semiconductor layer reaches a peak. You may comprise.

  In the above structure, the element type of the first conductivity type impurity contained in the third semiconductor layer may be phosphorus.

  In the above configuration, a semiconductor layer corresponding to the fourth semiconductor layer formed in the active region may be further formed in the termination region.

  The power conversion system of the present invention is connected, for example, in antiparallel to the first semiconductor switching element and the second semiconductor switching element connected in series with each other, and to the first semiconductor switching element and the second semiconductor switching element, respectively. A first diode and a second diode, wherein the first diode and the second diode are formed of any one of the semiconductor devices described above.

  According to the above configuration, a low on-voltage and low noise diode can be manufactured. In addition, it is possible to provide a diode that can reduce recovery loss and can be manufactured by a low-cost method without lowering the breakdown voltage. Furthermore, it is possible to suppress variations in element characteristics and improve the adjustment accuracy of the characteristics.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments of the present invention will be described in detail based on the drawings as examples. Note that components having the same function are denoted by the same reference symbols in the drawings for describing the embodiments, and repetitive description thereof will be omitted as appropriate. In the following description of the embodiments, the description of the same or similar parts is not repeated and is appropriately omitted unless particularly necessary.

  In the following embodiments, the first conductivity type is n-type, the second conductivity type is p-type, and a diode using an n-type Si substrate is described. However, the present invention is not limited to this. When the first conductivity type is p-type, the second conductivity type is n-type, and a p-type Si substrate is used, it can be handled in the same manner as when an n-type Si substrate is used.

  Hereinafter, a semiconductor device (diode) according to Example 1 which is the first embodiment of the present invention will be described with reference to FIGS. 1 to 9, 17, and 18.

[Configuration of diode]
First, with reference to FIG. 1, the structure of the diode which concerns on Example 1 which is the 1st Embodiment of this invention is demonstrated. FIG. 1 is a schematic cross-sectional view of the active region of the diode 1 according to the first embodiment. Although the description of the termination region is omitted, a conventional termination structure such as a FLR (Field Limiting Ring) type in which a p-type well and an electrode are arranged in a ring shape is used for the termination region.

As shown in FIG. 1, the diode 1 according to the first embodiment includes an n ⁻ drift layer 101, an anode p layer 102, an anode p ⁻ layer 103, a cathode n layer 104, a cathode buffer n layer 105, A low lifetime region 106, an anode electrode 107, and a cathode electrode 108 are included.

  In the following description, the entire semiconductor layer portion including the stage in the middle of the manufacturing process is referred to as the Si substrate 100.

The n ⁻ drift layer (first semiconductor layer) 101 is a semiconductor layer made of n-type Si, and is an n-type semiconductor region that is not modified by ion implantation, diffusion, or the like and remains in the original n-type Si substrate. Type semiconductor layer.

The cathode n layer (third semiconductor layer) 104 is an n-type semiconductor layer which is provided on the cathode side which is the back surface side of the Si substrate 100 and is made of an n-type impurity region having a higher concentration than the n ⁻ drift layer 101.

The cathode buffer n layer (fifth semiconductor layer) 105 is provided on the n ⁻ drift layer 101 side of the cathode n layer 104 and has a lower concentration than the cathode n layer 104 and a higher concentration than the n ⁻ drift layer 101. This is an n-type semiconductor layer made of a region. Although the cathode buffer n layer 105 may not be provided, by providing the cathode buffer n layer 105, when a reverse voltage is applied to the diode 1, the extension of the depletion layer from the PN junction to the anode side is suppressed, The breakdown voltage is improved.

A plurality of low lifetime regions (fourth semiconductor layer) 106 are locally formed between the cathode n layer 104 and the n ⁻ drift layer 101 in the active region, and the lifetime of carriers in the low lifetime region 106 (lifetime). Is an n-type semiconductor layer shorter than the lifetime of carriers in the n ⁻ drift layer 101 and the cathode buffer n layer 105. The low lifetime region 106 is provided at a position adjacent to the n ⁻ drift layer 101 having a long lifetime and contains the same type of impurity (element) as the n-type impurity contained in the cathode buffer n-layer 105 as an n-type impurity. doing.

  The structure of these n-type semiconductor layers will be described in more detail together with the description of [Ion implantation and laser annealing conditions] to be described later.

  The anode p layer (second semiconductor layer) 102 is a p-type semiconductor layer that is locally provided on the anode side, which is the surface side of the Si substrate 100, and includes a p-type impurity region.

The anode p ⁻ layer 103 is provided on the anode side, which is the surface side of the Si substrate 100, and is provided in a region where the anode p layer 102 is not provided, and is formed of a p-type impurity region having a lower concentration than the anode p layer 102. It is a p-type semiconductor layer.

That is, the p-type semiconductor layer is formed with the anode p ⁻ layer 103 which is a thin p-type impurity region layer having a small thickness and a low concentration on the surface side of the Si substrate 100, and locally from the high-concentration p-type impurity region. And a well structure provided with a thick anode p-layer 102.

  The present embodiment has a well structure in which the anode p layer 102 is locally disposed in the active region, so as to suppress the hole injection amount from the anode electrode 107 and soften the recovery, that is, at the time of recovery. The voltage jump is configured to be reduced.

The locally disposed anode p layer 102 shown in FIG. 1 can be formed in a dot (circle) shape, a stripe shape, or the like when viewed from the surface of the Si substrate 100 on the anode side. . For example, the anode p layer 102 may be a circle having a diameter of 10-100 μm, and the distance between the circles may be 10-200 μm. The depth of the anode p layer 102 can be about ³ to 10 μm, and the peak concentration of the p-type impurity can be about 1 × 10 ¹⁷ to 1 × 10 ¹⁹ cm ⁻³ . The impurity concentration and dimensions of the anode p layer 102 are appropriately set according to the breakdown voltage and specifications of the diode.

On the surface side of the Si substrate 100, an anode p ⁻ layer 103 made of a p-type impurity region having a lower concentration than the anode p layer 102 is formed in a region other than the region where the anode p layer 102 is provided. The peak concentration of the p-type impurity in the anode p ⁻ layer 103 is preferably about 1 × 10 ¹⁵ to 1 × 10 ¹⁷ cm ⁻³ .

When the anode p ⁻ layer 103 is provided, the leakage current flowing from the anode electrode 107 can be reduced as compared with the case where the anode p ⁻ layer 103 is not provided. If this leakage current is allowable, the anode p ⁻ layer 103 may be omitted, and only the anode p layer 102 locally provided as a p-type semiconductor layer may be used. In that case, the process can be simplified by omitting the ion implantation process of the p-type impurity for forming the anode p ⁻ layer 103.

  The anode electrode (first electrode) 107 is an electrode that is ohmically connected to the anode p layer 102.

  The cathode electrode (second electrode) 108 is an electrode that is ohmically connected to the cathode n layer 104.

[Diode manufacturing method]
Next, an example of a method for manufacturing the active region structure of the diode 1 according to the first embodiment will be described with reference to FIGS. The structure of the termination region is manufactured at the same time as the structure of the active region. However, the manufacturing method of the structure of the termination region is the same as that of the conventional diode, so the description is simplified.

(Preparation of substrate)
First, a Si wafer is prepared as the Si substrate 100 for manufacturing the diode 1. As the Si wafer, an FZ (Floating Zone) wafer having a specific resistance corresponding to the withstand voltage can be used. In this embodiment, the bulk of the FZ wafer is the n ⁻ drift layer 101. The specific resistance of the FZ wafer is, for example, about 250 Ωcm for a diode having a breakdown voltage of 3.3 kV.

(Active area formation process)
In the first step (not shown), an oxide film is formed on the entire surface of the Si substrate 100 by thermal oxidation. Next, a photolithography process for forming an active region, which is a region where the anode p ⁻ layer 103 is provided, is performed. In this photolithography process, a resist material is applied to the surface of the Si substrate 100, exposed, and developed to form a resist with the entire active region opened. At this time, in the termination region, the region where the p-type well is formed also opens the resist. Subsequently, the oxide film exposed in the opening of the resist is removed by wet etching, and the resist is also removed. In this step, an oxide film is formed on the surface of the Si substrate 100 in which the entire active region and a region for forming a p-type well in the termination region are opened.

(Anode p ^- layer formation process)
Thereafter, as shown in FIG. 2, an implant through oxide film 109 is formed on the surface of the Si substrate 100 by thermal oxidation, and a thick oxide film composed of the oxide film formed in the active region forming step and the implant through oxide film 109 is formed. Using the portion as a mask, p-type impurities for forming the anode p ⁻ layer 103 are ion-implanted through the implant-through oxide film 109 which is a thin film portion. As a result, the p-type impurity of the anode p ⁻ layer 103 is ion implanted into the entire active region.

(Anode p layer forming step)
Next, as shown in FIG. 3, a photolithography process for forming the anode p layer 102 is performed. In this photolithography process, a resist material is applied, exposed and developed on the surface of the Si substrate 100 to form a resist 110 having an opening in a region where the anode p layer 102 in the active region is to be formed. At this time, in a termination region (not shown), a resist is also opened in a region where a p-type well is formed.

  Thereafter, using the resist 110 as a mask, p-type impurities for forming the anode p layer 102 are ion-implanted. At the same time, ion implantation of p-type impurities is also performed in a region for forming a p-type well in a termination region (not shown).

Next, after removing the resist 110, high-temperature annealing and oxidation are performed to diffuse the ion-implanted p-type impurity to form the anode p layer 102 and the anode p ⁻ layer 103 as shown in FIG. An oxide film (not shown) formed on the surface of the Si substrate 100 is grown.

(Anode electrode formation process)
Subsequently, a photolithography process for forming the contact portion is performed. In this photolithography step, a resist material is applied, exposed, and developed to form a resist (not shown) having an opening over the entire active region.

  Subsequently, the oxide film (not shown) exposed in the opening of the resist is removed by etching, and the resist is also removed. Thereafter, a film made of a conductive material to be the anode electrode 107, for example, an AlSi film is formed by sputtering or vapor deposition.

  Then, an electrode on the p-type well is formed by performing a photolithography process and an etching process for forming an electrode provided on the p-type well in a termination region (not shown). At this time, as shown in FIG. 4, the AlSi film as it is formed on the entire surface of the active region becomes the anode electrode 107.

  Next, after removing a resist for processing an electrode provided in a termination region (not shown), a protective film is formed in the termination region. As a method for forming the protective film, for example, a polyimide protective material is applied onto the termination region by applying a solution containing a polyimide precursor material and a photosensitive material, exposing the termination region to polyimidize the precursor. Can be formed.

  Thus, the anode side structure is completed.

  Next, as shown in FIG. 5, a structure on the cathode side is formed.

(Cathode buffer n layer / cathode n layer / low lifetime region forming process)
Thereafter, ion implantation of n-type impurities for forming the cathode buffer n layer 105 and the cathode n layer 104 is sequentially performed from the back surface side of the Si substrate 100 to the entire surface of the wafer. Further, n-type impurities are ion-implanted to form the low lifetime region 106. At this time, the resist 110 is formed using a double-side aligner before ion implantation of n-type impurities for forming the low lifetime region 106. The ion implantation is performed at a higher concentration and with an equivalent implantation energy as compared with ion implantation of n-type impurities for forming the cathode buffer n layer 105. Next, the resist is removed.

Subsequently, laser annealing is performed to activate the ion-implanted n-type impurity. By using laser annealing for activation, an electrode and a protective film (not shown) formed on the surface side which is the anode side of the Si substrate 100 are not heated to a temperature higher than the heat resistant temperature, and the n-type impurity on the back side is activated. It can be performed. At this time, among the regions into which the n-type impurity has been implanted to form the low lifetime region 106, the region on the cathode n layer 104 side sufficiently activated by laser annealing becomes the cathode buffer n layer 105. The region on the n ⁻ drift layer 101 side where the activation rate is low becomes the low lifetime region 106.

  Laser annealing can be performed in two steps. First, laser annealing is performed to activate the cathode buffer n layer 105. At this time, the laser irradiation amount is increased to activate the entire cathode buffer n layer 105. After impurity implantation through the resist pattern and removal of the resist, laser annealing is performed to form the low lifetime region 106. At this time, the laser irradiation amount is reduced and the low lifetime region 106 is formed.

By forming the low lifetime region 106 periodically, variation in characteristics can be suppressed. As shown in FIG. 1, the characteristics can be stabilized by adjusting to the pattern period on the anode side. Moreover, the pattern shown in FIG. 6 can also be produced as another pattern example. Further, similarly to the anode p layer, the stripe pattern shown in the plan view of FIG. 7 and the dot pattern shown in FIG. 8 can be produced. If the anode p layer is a stripe pattern, it is possible to expand the combined likelihood when to Cartesian stripes of low lifetime region. As described above, characteristic variations can be reduced by forming the anode p layer so as to match the anode p layer pattern.

  The area on the plane of the low lifetime region 106 is desirably 5% to 50% of the entire active region. If the area of the low lifetime region 106 is smaller than 5%, it is difficult to reduce the loss. On the other hand, when the area of the low lifetime region 106 exceeds 50%, it becomes difficult to suppress the oscillation of the voltage waveform.

The laser used for laser annealing is a second harmonic of a YLF (Yttrium Lithium Fluoride) laser with a wavelength of 532 nm, a YAG (Yttrium Aluminum Garnet) laser with a wavelength of 532 nm, a YVO ₄ laser with a wavelength of 532 nm, or the like. Can be used. Further, an XeCl excimer laser with a shorter wavelength of 308 nm and a KrF excimer laser with a wavelength of 248 nm can also be used. The energy and wavelength of laser irradiation can be appropriately selected according to the depth at which the n-type impurity is activated.

(Cathode electrode formation process)
After the laser annealing, the cathode electrode 108 is formed on the back surface that is the cathode side. Note that the cathode electrode 108 can be formed by a method similar to that of the anode electrode 107 using an appropriate conductive material such as metal.

  Thereafter, if necessary, in order to adjust the lifetime of the carrier for the entire wafer, electron beam irradiation may be performed from the back side, and further, annealing treatment may be performed to recover damage due to electron beam irradiation. .

  Further, in order to locally shorten the carrier lifetime on the anode side and reduce the jumping voltage at the time of recovery, the anode side may be irradiated with He or proton and annealed.

(Division process)
Finally, the wafer is divided by dicing or the like to complete the diode 1 chip.

[Conditions for ion implantation and laser annealing]
Next, conditions for ion implantation and laser annealing will be described.

  The depth at which the concentration of crystal defects generated by ion implantation reaches a peak is preferably deeper than the depth at which n-type impurities implanted by laser annealing are activated. By increasing the depth at which the concentration of crystal defects reaches a peak, it remains in the low lifetime region 106 due to variations in the crystal defect distribution in the depth direction and variations in the depth direction activated by laser annealing. Variation in the amount of crystal defects can be reduced.

  Here, the structure in the depth direction of the n-type semiconductor layer on the cathode side will be described with reference to FIG. 9 (refer to FIG. 1 as appropriate). FIG. 9 shows an n-type impurity concentration profile in the depth direction from the back surface of the Si substrate 100, that is, the cathode side surface (solid line) in the low lifetime region 106 of the diode according to the example manufactured under the conditions described later. And a concentration profile (broken line) of the activated n-type impurity.

  The concentration profile of the n-type impurity can be obtained by measuring the concentration of the n-type impurity element by secondary ion mass spectrometry (SIMS) from the cathode side surface of the Si substrate 100 of the diode 1. it can. Further, the concentration profile of the activated n-type impurity can be obtained by measuring the distribution of the spreading resistance (SR) in the depth direction and converting the measured SR value into the carrier concentration.

  The activation rate is defined as (carrier concentration determined by SR measurement) / (n-type impurity concentration determined by SIMS measurement). Here, the carrier concentration is the concentration of the activated n-type impurity obtained by SR measurement.

  The density profile shown in FIG. 9 will be described.

In the region A from the cathode side surface (depth 0 μm) of the Si substrate 100 to a depth of about 0.3 μm, both the impurity concentration obtained by SIMS measurement and the carrier concentration obtained by SR measurement are 1 × 10 ¹⁹ cm ^−. High concentration of ³ or more and a substantially constant value. This region is a region in which phosphorus as an n-type impurity is ion-implanted at a high concentration in order to form the cathode n layer 104. Since the crystal near the surface on the cathode side of the Si substrate 100 is melted by laser annealing, the region is box-shaped. It has become a profile. This region A corresponds to the cathode n layer 104.

If the carrier concentration in this region is low, electron injection from the cathode electrode 108 is reduced during conduction, and the forward voltage of the diode 1 increases. In addition, since the carrier concentration on the cathode side during conduction is low, voltage jumping and vibration are likely to occur during recovery. Accordingly, the carrier concentration of the cathode n layer 104 is preferably higher, and is preferably 1 × 10 ¹⁹ cm ⁻³ or more.

  The activation rate of the n-type impurity in the region A of the box-shaped profile indicating the cathode n layer 104 is about 20 to 100%, although it depends on the irradiation energy of the laser. The cathode n layer 104 may have a high carrier concentration itself even if the activation rate is less than 100%.

  It should be noted that the activation rate of the region where the n-type impurity concentration and the carrier concentration near the depth of 0.3 μm from the surface of the cathode side of the Si substrate 100 rapidly decrease is not sufficiently accurate at present. Detailed examination is omitted. The reason why sufficient accuracy cannot be obtained is that sufficient accuracy cannot be obtained at the origin in the depth direction in SR measurement, and the accuracy of SR measurement decreases due to the influence of the depletion layer near the PN junction. It is.

Regions (region B and region C) having a depth of 0.3 to 2.7 μm from the cathode-side surface of the Si substrate 100 are regions into which n-type impurities have been implanted in order to form the cathode buffer n layer 105. . Among these regions, in the region B having a depth of 0.3 to 1.0 μm, the n-type impurity concentration obtained by SIMS measurement and the carrier concentration obtained by SR measurement coincide with each other, and the activation rate is Nearly 100%. Transmitted to sufficient heat to the cathode side surface of the heated pressurized the Si substrate 100 by laser irradiation to a depth of 1.0 .mu.m, n-type impurity is due to be fully activated. This region B corresponds to the electrically effective cathode buffer n layer 105.

  Of the region up to a depth of 0.3 to 2.7 μm into which the n-type impurity has been implanted to form the cathode buffer n layer 105, the region C that is deeper than 1.0 μm is obtained by SIMS measurement. This is a region where the carrier concentration obtained by SR measurement is lower than the n-type impurity concentration and the activation rate of the n-type impurity is reduced. Heat is not sufficiently transmitted to this region due to laser irradiation, and there is a region where the crystal defect due to ion implantation remains, the activation rate is low, and the activation rate is less than 5%. Since crystal defects remain, this region C is a region with a short carrier lifetime, and this region C corresponds to the low lifetime region 106. From this figure, it can be seen that the low lifetime region (region C) is located away from the cathode n layer (region A). In this configuration, crystal defects are separated from the high-concentration n layer, which is effective in improving the breakdown voltage.

A region D of 2.7 μm or more is a region where n-type impurity ions are not implanted, and corresponds to the n ⁻ drift layer 101.

  Here, the low lifetime region 106 is defined. As described above, the low lifetime region 106 can be determined based on the profile shown in FIG. At this time, it is desirable that the low lifetime region 106 has an activation rate of 10% or less in order to reduce recovery loss.

  In the example shown in FIG. 9, the depth of the peak concentration of the n-type impurity ion-implanted for forming the cathode buffer n layer 105 is about 1.2 μm. In addition, the peak depth of the amount of crystal defects is about 1.1 μm because phosphorus is ion-implanted at an energy of 720 keV as an n-type impurity and is about 10% shallower than the peak concentration of the n-type impurity. Become.

  The activation rate can be controlled by the impurity dose, ion implantation energy, laser irradiation amount, laser wavelength, and the like. In the embodiment of FIG. 1, the low lifetime region 106 is formed by increasing the impurity dose.

  In order to deepen the distribution of crystal defects, a lighter element is used as the n-type impurity for ion implantation, or the energy for ion implantation is increased. When proton (hydrogen) or helium is used as an ion implantation element, the ion implantation range becomes too large, resulting in an excessively large width in the ion implantation depth, and large cyclotron particle beam irradiation. Requires equipment. Further, in order to form a pattern, it is necessary to form a mask with a material having a high blocking ability. However, it becomes difficult to ensure and miniaturize the pattern accuracy and deteriorate the pattern alignment accuracy. Therefore, in the manufacture of LSI (Large Scale Integrated Circuit), it is most desirable to pattern by a photo process using the lightest phosphorus among n-type impurity elements used to form an n-type impurity layer.

  As for the wavelength of the laser, in the example shown in FIG. 9, the second harmonic of the YLF laser having a wavelength of 532 nm is used, but an XeCl excimer laser having a shorter wavelength of 308 nm and a KrF excimer laser having a wavelength of 248 nm are used. Thus, the activation of n-type impurities can also be controlled.

[Comparison experiment]
Next, referring to FIG. 1, FIG. 17, and FIG. 18, the diode 1 according to Example 1, which is the first embodiment of the present invention shown in FIG. 1, is compared with the comparative example shown in FIG. An experiment conducted by the inventors for this purpose will be described.

(Production conditions)
The diode 1 of Example 1 uses an n-type Si wafer as the Si substrate 100, phosphorus as an n-type impurity for forming the cathode buffer n layer 105, an energy of 720 keV, an off angle of 0 °, and a dose of 2 × 10 ¹¹ cm. Inject at ^-2 . Further, phosphorus is implanted as an n-type impurity of the cathode n layer 104 at an energy of 60 keV, an off angle of 7 °, and a dose of 1 × 10 ¹⁵ cm ⁻² . Further, in order to form the low lifetime region 106, a resist pattern is formed, and phosphorus is implanted at an energy of 720 keV, an off angle of 0 °, and a dose of 4 × 10 ¹² cm ⁻² . Thereafter, after removing the resist, as laser annealing for activating the implanted n-type impurity, a second harmonic of a YLF laser having a wavelength of 532 nm was irradiated with an energy of 1.5 J / cm ² .

Moreover, the diode 1G shown in FIG. 17 was created as a comparative example. Since the low lifetime region 106 is not patterned in this diode, phosphorus is implanted into the front surface at an energy of 720 keV, an off angle of 0 °, and a dose of 1 × 10 ¹² cm ⁻² . Next, as laser annealing for activating the ion-implanted n-type impurity, the laser irradiation energy was increased to 1.5 J / cm ² to produce a diode. Other conditions in the comparative example are the same as those in the first embodiment.

  In Example 1, the area ratio of the low lifetime region 106 was adjusted in order to make the on-voltages of the diodes uniform. As a result, the on-voltage could be aligned with 2.7V. It was found that the recovery loss at the rated operation was 1.43 J in the comparative example, whereas it was almost equal to or less than 1.42 J in the example.

(Current / voltage waveforms during recovery)
FIG. 18 shows a current waveform and a voltage waveform of a small current (rated current X1 / 10) recovery characteristic at room temperature of each of the diodes 1 and 1G of Example 1 (solid line) and the comparative example (broken line).

  From this figure, it can be seen that vibration is observed in the waveform of the comparative example, whereas no vibration is observed in the waveform of Example 1.

  From this result, it was confirmed that a configuration in which a plurality of low lifetime regions 106 of the diode of the present invention are arranged in the active region is extremely effective for reducing noise. By applying this diode to a power conversion system and configuring a power conversion system according to Example 8 to be described later, it is possible to improve reliability and reduce EMI in the power conversion system.

  Next, with reference to FIG. 10, the structure of the diode which concerns on Example 2 which is the 2nd Embodiment of this invention is demonstrated. FIG. 10 is a schematic cross-sectional view of the active region of the diode 1A according to the second embodiment. Although the description of the termination region is omitted, a conventional termination structure such as an FLR type in which a p-type well and an electrode are arranged in a ring shape is used as in the first embodiment.

As shown in FIG. 10, the diode 1A according to the second embodiment is different from the diode 1 according to the first embodiment shown in FIG. 1 in that the anode p layer 102 does not have a well structure and the anode p ⁻ The difference is that the anode p layer (second semiconductor layer) 102 is formed on the entire surface of the active region on the anode side without providing the layer 103. Since other configurations are the same as those in the first embodiment, the description thereof is omitted.

In the diode 1A according to the present embodiment, the anode p layer 102 is formed on the entire surface of the active region on the anode electrode 107 side, so that a photolithography process for locally forming the anode p layer 102 is not required. ^- since the ion implantation process for forming the layer 103 can be omitted, the manufacturing cost can be reduced. The other steps are the same as those in the first embodiment, and thus the description thereof is omitted.

  Next, with reference to FIG. 11, the structure of the diode which concerns on Example 3 which is the 3rd Embodiment of this invention is demonstrated. FIG. 11 is a schematic cross-sectional view of the active region of the diode 1B according to the third embodiment. Although the description of the termination region is omitted, a conventional termination structure such as an FLR type in which a p-type well and an electrode are arranged is used as in the first embodiment.

  As shown in FIG. 11, the diode 1 </ b> B according to the second embodiment is formed such that the low lifetime region 106 is in contact with the cathode n layer 103 compared to the diode 1 according to the first embodiment shown in FIG. 1. It is the composition which is.

  As in Example 1, the diode 1B according to the present embodiment performs n-type impurity ion implantation for forming the cathode buffer n layer 105 and the cathode n layer 104 in order, and forms a resist pattern. In order to form the lifetime region 106, n-type impurities are ion-implanted. At this time, the impurity dose is set larger than the ion implantation of the n-type impurity for forming the cathode buffer n layer 105. The ion implantation energy is also increased.

  Subsequently, the resist was removed, and laser annealing was performed to activate impurities in the cathode buffer n layer 105 and the cathode n layer 104, and at the same time, a low lifetime region 106 was formed. Here, by adjusting the laser irradiation amount, the low lifetime region 106 is formed up to the region in contact with the cathode n layer 104 while reducing crystal defects in the cathode buffer n layer 105. The other steps are the same as those in the first embodiment, and thus the description thereof is omitted. Even in this configuration, since a crystal defect does not occur in the cathode n layer 104, a breakdown voltage can be secured.

  Next, with reference to FIG. 12, the structure of the diode which concerns on Example 4 which is the 4th Embodiment of this invention is demonstrated. FIG. 12 is a schematic cross-sectional view of the active region of the diode 1C according to the fourth embodiment. Although the description of the termination region is omitted, a conventional termination structure such as an FLR type in which a p-type well and an electrode are arranged in a ring shape is used as in the first embodiment.

  As shown in FIG. 12, the diode 1 </ b> C according to the second embodiment has a low lifetime region 106 formed in the n− drift layer 101 compared to the diode 1 according to the first embodiment shown in FIG. 1. It is the composition which is.

  Similarly to Example 1, the diode 1C according to the present embodiment performs n-type impurity ion implantation for forming the cathode buffer n layer 105 and the cathode n layer 104 in order, and forms a resist pattern. In order to form the lifetime region 106, n-type impurities are ion-implanted. At this time, the ion energy was compared with the ion implantation of the n-type impurity for forming the cathode buffer n layer 105, and the ion energy was increased and the impurity was implanted deeply.

  Subsequently, the resist was removed, and laser annealing was performed to activate impurities in the cathode buffer n layer 105 and the cathode n layer 104, and at the same time, a low lifetime region 106 was formed. The other steps are the same as those in the first embodiment, and thus the description thereof is omitted.

  Next, with reference to FIG. 13, the structure of the diode which concerns on Example 5 which is the 5th Embodiment of this invention is demonstrated. FIG. 13 is a schematic cross-sectional view of the active region of the diode 1D according to the fifth embodiment. Although the description of the termination region is omitted, a conventional termination structure such as an FLR type in which a p-type well and an electrode are arranged in a ring shape is used as in the first embodiment.

  As shown in FIG. 13, the diode 1D according to the fifth embodiment has a low lifetime region 106 formed in the cathode buffer n layer 105 compared to the diode 1 according to the first embodiment shown in FIG. It is the composition which is. The anode side of the low lifetime region is in contact with the cathode buffer n layer 105 having a longer carrier lifetime than this region.

In the diode 1D according to this embodiment, first, an n-type impurity such as P is ion-implanted on the cathode side, and then diffused and activated by heat treatment to form the cathode buffer n layer 105. Thereafter, similarly to Example 1, an anode p ⁻ layer 103 and an anode p layer 102 are formed. Next, n-type impurities are ion-implanted to form the cathode n-layer 104, a resist pattern is formed, and then n-type impurities are ion-implanted to form the low lifetime region 106.

  Next, the resist was removed and laser annealing was performed to activate impurities in the cathode n layer 104, and at the same time, a low lifetime region 106 was formed. The other steps are the same as those in the first embodiment, and thus the description thereof is omitted.

  Next, with reference to FIG. 14, the structure of the diode according to Example 6 which is the sixth embodiment of the present invention will be described. FIG. 14 is a schematic cross-sectional view of the active region and the termination region of the diode 1E according to the sixth embodiment. For the termination region, an FLR type termination structure in which a p-type well (111) and a field plate electrode (114) are arranged in a ring shape is used. The number of FLRs is not limited to the number shown. As the termination structure, a structure such as JTE (Junction Termination Extension) can be applied in addition to the FLR.

  As shown in FIG. 14, the diode 1E according to the sixth embodiment has a structure in which the diode 1C according to the fourth embodiment shown in FIG. 12 is applied to the active region, and the low lifetime region 106 is also provided in the termination region. It has become.

  The termination region p-well (111) was formed simultaneously with the active region anode p-layer (102). The channel stopper layer (112) was formed by ion implantation of p-type impurities such as B through a resist pattern having an opening in this portion. Further, the field plate electrode (114) was formed simultaneously with the anode electrode (107).

  When the low lifetime region 106 is formed, by opening the resist pattern in the termination region, the low lifetime region 106 can be formed in the termination region simultaneously with the active.

  The diode 1 </ b> C according to this embodiment can suppress carrier injection into the termination region. For this reason, it is possible to provide a diode with excellent recovery tolerance.

  Next, with reference to FIG. 15, the structure of the diode according to Example 7 which is the seventh embodiment of the present invention will be described. FIG. 15 is a schematic cross-sectional view of the active region and the termination region of the diode 1F according to the seventh embodiment. As in the sixth embodiment, for the termination region, an FLR type termination structure in which a p-type well (111) and a field plate electrode (114) are arranged in a ring shape is used. The number of FLRs is not limited to the number shown. As the termination structure, a structure such as JTE (Junction Termination Extension) can be applied in addition to the FLR.

  As shown in FIG. 15, the diode 1F according to the seventh embodiment has a structure in which the cathode n layer 104 is formed only in the active region, compared to the diode 1E according to the sixth embodiment shown in FIG. ing.

  This structure can be formed by applying a resist pattern having an opening in the active region and implanting ions when forming the cathode n layer. Next, when the low lifetime region 106 is formed, the low lifetime region 106 is formed in the termination region simultaneously with the active by opening a resist pattern in the termination region.

  The diode 1F according to the present embodiment can suppress carrier injection into the termination region. For this reason, it is possible to provide a diode with excellent recovery tolerance.

  Next, with reference to FIG. 16, the power conversion system which concerns on Example 8 which is the 8th Embodiment of this invention is demonstrated. A power conversion system 10 according to the eighth embodiment shown in FIG. 16 is a power conversion system using a diode according to the present invention.

  As shown in FIG. 16, the power conversion system 10 according to the present embodiment includes a three-phase inverter circuit for driving a motor. Diodes 201a to 201f according to the present invention are connected in antiparallel to the IGBTs 200a to 200f, which are semiconductor switching elements. That is, the diodes 201a to 201f operate as freewheeling diodes. As these diodes 201a to 201f, the diodes according to any of the above-described embodiments or modifications thereof are used. IGBTs (first semiconductor switching elements) 200a to 200c and IGBTs (second semiconductor switching elements) 200d to 200f are combined one by one and connected in series. Accordingly, an anti-parallel circuit of an IGBT and a diode Are connected in series to form a half-bridge circuit for one phase.

  Half bridge circuits are provided for the number of alternating phases, that is, for three phases in this embodiment. An AC output is output from a series connection point of two IGBTs 200a and 200d, that is, a series connection point of two anti-parallel circuits, and is connected to a motor 206 such as an induction machine or a synchronous machine as a U-phase AC output. ing. Similarly, the other half-bridge circuits output V-phase and W-phase AC outputs from the series connection points of the two IGBTs, and are connected to the motor 206.

  The collectors of the IGBTs 200 a to 200 c on the upper arm side are connected in common and connected to the DC high potential side of the rectifier circuit 203. Further, the emitters of the IGBTs 200d to 200f on the lower arm side are connected in common and connected to the ground side of the rectifier circuit 203. The rectifier circuit 203 converts alternating current from the alternating current power source 202 into direct current. The IGBTs 200a to 200f perform on / off switching to convert direct current received from the rectifier circuit 203 into alternating current and drive the motor 206. The upper arm drive circuit 204 and the lower arm drive circuit 205 supply drive signals to the gates of the upper arm IGBTs 200a to 200c and the lower arm IGBTs 200d to 200f, respectively, to turn on / off the IGBTs 200a to 200f.

  According to this embodiment, since the diode according to the present invention is connected in reverse parallel to the IGBTs 200a to 200f as a free wheel diode, recovery loss during switching can be reduced. Thereby, the energy efficiency of the whole power conversion system 10 can be improved. In addition, since the diode of the present invention has low noise, the switching operation is stabilized and EMI (Electromagnetic Interference) can be reduced.

  Embodiments of the present invention are not limited to those described above, and various embodiments are possible within the scope of the technical idea of the present invention. For example, the present invention may be applied to a diode built in a reverse conducting semiconductor switching element. Further, instead of the IGBTs 200a to 200f in the power conversion system 10 shown in FIG. 15, a MOSFET (Metal Oxide Semiconductor Field Effect Transistor), a junction bipolar transistor, a junction FET, a static induction transistor, a GTO thyristor (Gate Turn Off) A semiconductor switching element such as Thyristor can be used.

1, 1A, 1B, 1C, 1D, 1E, 1F, 1G Diode 10 Power conversion system 100 Si substrate 101 n ⁻ drift layer (first semiconductor layer)
102 Anode p layer (second semiconductor layer)
103 Anode p ⁻ layer 104 Cathode n layer (third semiconductor layer)
105 Cathode buffer n layer (fifth semiconductor layer)
106 Low lifetime region (4th semiconductor layer)
107 Anode electrode (first electrode)
108 Cathode electrode (second electrode)
109 Implant Through Oxide Film 110 Resist 111 P Well 112 Channel Stopper Layer 113 Insulating Layer 114 Field Plate Electrode 200a-200c IGBT (First Semiconductor Switching Element)
200d to 200f IGBT (second semiconductor switching element)
201a to 201f Diode 202 AC power supply 203 Rectifier circuit 204 Upper arm drive circuit 205 Lower arm drive circuit 206 Motor

Claims (14)

A first semiconductor layer of a first conductivity type;
A second semiconductor layer of a second conductivity type stripe shape in plan view which is provided adjacent to the first semiconductor layer,
The first conductivity type is provided on a side opposite to the side on which the second semiconductor layer is provided with respect to the first semiconductor layer, and the concentration of the first conductivity type impurity is higher than that of the first semiconductor layer. A third semiconductor layer;
A first electrode ohmically connected to the second semiconductor layer;
A diode-configured semiconductor device comprising a second electrode that is ohmically connected to the third semiconductor layer,
Impurities of the same type as the first conductivity type impurities contained in the third semiconductor layer in an active region located between the first semiconductor layer and the third semiconductor layer and adjacent to the first semiconductor layer contains, and the short lifetime of carriers than the first semiconductor layer, and perpendicular to the second semiconductor layer, further comprising a fourth semiconductor layer-shaped stripe in the plurality of planar view,
A semiconductor device, wherein a lifetime of a region adjacent to the fourth semiconductor layer in a horizontal direction is longer than a lifetime of the fourth semiconductor layer. The semiconductor device according to claim 1,
Before SL fourth semiconductor layer, characterized in that the portion and the fourth portion other than the semiconductor layer of the fourth semiconductor layer at a position adjacent to the first semiconductor layer is arranged to appear repeatedly periodically A semiconductor device. The semiconductor device according to claim 1,
Before Symbol a planar area of the fourth semiconductor layer, wherein a said more than 5% of the area of the active region and 50% or less. The semiconductor device according to claim 1,
A fifth conductive layer of the first conductivity type having a lower concentration of the first conductivity type impurity than the third semiconductor layer in a region between the third semiconductor layer and the fourth semiconductor layer;
Some of the fifth semiconductor layer extends to a region before Symbol fourth semiconductor layers adjacent to the first semiconductor layer,
A semiconductor device characterized in that a carrier lifetime in the fourth semiconductor layer is shorter than a carrier lifetime in the fifth semiconductor layer. The semiconductor device according to claim 1,
The semiconductor device, wherein the fourth semiconductor layer is disposed at a position isolated from the third semiconductor layer. The semiconductor device according to claim 1,
The activation rate, which is the ratio of the carrier concentration obtained based on the measurement of the spreading resistance to the concentration of the first conductivity type impurity obtained by secondary ion mass spectrometry, is the activation rate of the fourth semiconductor layer. The semiconductor device is characterized by being smaller than the activation rate in the third semiconductor layer. The semiconductor device according to claim 6.
The fourth semiconductor layer has a region where the activation rate is 10% or less. The semiconductor device according to claim 1,
The semiconductor device, wherein the fourth semiconductor layer includes a crystal defect. The semiconductor device according to claim 8,
2. The semiconductor device according to claim 1, wherein the crystal defect is generated by ion implantation of the first conductivity type impurity. The semiconductor device according to claim 9.
The third semiconductor layer and the fourth semiconductor layer are formed by ion implantation of the first conductivity type impurity performed to form the third semiconductor layer and laser irradiation after the ion implantation. A semiconductor device characterized by the above. The semiconductor device according to claim 8,
A semiconductor is characterized in that a position where the concentration of crystal defects generated by ion implantation of the first conductivity type impurity in order to form the third semiconductor layer has a peak exists in the fourth semiconductor layer. apparatus. The semiconductor device according to claim 9.
The semiconductor device, wherein the element type of the first conductivity type impurity contained in the third semiconductor layer is phosphorus. The semiconductor device according to claim 1,
A semiconductor device, wherein a semiconductor layer corresponding to the fourth semiconductor layer formed in the active region is further formed in a termination region. A first semiconductor switching element and a second semiconductor switching element connected in series with each other; and a first diode and a second diode connected in antiparallel to the first semiconductor switching element and the second semiconductor switching element, respectively.
The power conversion system, wherein the first diode and the second diode are constituted by the semiconductor device according to any one of claims 1 to 13.