JP6273578B2 - Three-dimensional additive manufacturing apparatus and three-dimensional additive manufacturing method - Google Patents

Description

  The present invention relates to a three-dimensional additive manufacturing apparatus and a three-dimensional additive manufacturing method for forming a layer by layering thin layers of powder samples on a stage one by one.

  In recent years, three-dimensional additive manufacturing technology has been attracting attention, in which thin layers of powder samples are layered one by one, and many kinds of three-dimensional additive manufacturing technologies have been developed due to differences in powder sample materials and modeling methods. (For example, refer to Patent Document 1).

  FIG. 7 is a schematic cross-sectional view of a three-dimensional additive manufacturing apparatus 100 according to the prior art.

  The three-dimensional additive manufacturing apparatus 100 uses the powder supply unit 107 to spread the metal powder M1 on the upper surface of the stage 104, which is a powder table, layer by layer. Next, with respect to the metal powder M1 spread on the stage 104, only the two-dimensional structure corresponding to one cross section of the shaped object P1 is melted with an electron beam. And a modeling thing is formed by stacking such a layer of metal powder M1 one by one in the height direction (Z direction).

  As shown in FIG. 7, the three-dimensional additive manufacturing apparatus 100 has an electron gun 108 mounted on an upper part of a vacuum vessel 102, and a cylindrical modeling frame base 103 is provided inside the vacuum vessel 102. The electron gun 108 is connected to an electron beam control unit 111 that controls the electron gun 108. Below the pit 103a formed at the center of the modeling frame 103, a drive mechanism 105 that supports the stage 104 so as to be movable is provided. The drive mechanism 105 is connected to the shaft portion 104d of the stage 104 and drives the stage 104 in the vertical direction. The inside of the vacuum vessel 102 is maintained in a vacuum.

  Then, the stage 104 is arranged at a position lower by ΔZ in the vertical direction from the upper surface of the modeling frame base 103 by the drive mechanism 105. Then, the powder supply unit 107 spreads the metal powder M1 for the thickness ΔZ on the stage 104.

  Next, an electron beam L1 is emitted from the electron gun 108 to the metal powder M1 in accordance with a two-dimensional shape obtained by slicing a design object prepared in advance with a ΔZ interval. The electron beam L1 emitted from the electron gun 108 melts the metal powder M1 corresponding to the two-dimensional shape. The molten metal powder M1 is solidified when a predetermined time corresponding to the material has elapsed. After the metal powder M1 for one layer is melted and solidified, the stage 104 is lowered by ΔZ by the drive mechanism 105. Next, the metal powder M1 for ΔZ is spread on the layer (lower layer) spread just before. Then, the metal powder M1 in the region corresponding to the two-dimensional shape corresponding to the layer is irradiated with the electron beam L1, and the metal powder M1 is melted and solidified. This series of processes is repeated, and a modeled object is constructed by stacking layers of the molten and solidified metal powder M1.

Special table 2010-526694

  However, as shown in FIG. 8, in the three-dimensional additive manufacturing apparatus 100 according to the prior art, in the region A1 irradiated with the electron beam L1, the temperature at which the energy of the electron beam L1 is converted into heat rises, and the metal powder M1 Melts into a molten powder M3. Therefore, a temperature difference occurs between the region B1 that is away from the region A1 and is not irradiated with the electron beam L1 and the region A1. As a result, in the three-dimensional additive manufacturing apparatus 100 according to the prior art, due to this temperature difference, thermal distortion occurs in the metal powder M1 spread on the stage 104, or the shape and material of the formed object P1 are not uniform. It had a problem of being generated.

  An object of the present invention is to provide a three-dimensional additive manufacturing apparatus and a three-dimensional additive manufacturing method that can form a good object by making the temperature distribution of a powder sample spread on a stage uniform in consideration of the above-described problems. Is to provide.

In order to solve the above-described problems and achieve the object of the present invention, a three-dimensional additive manufacturing apparatus of the present invention includes a stage, a first electron gun, and a second electron gun. On the stage, a powder sample for forming a shaped object is spread. The first electron gun irradiates a predetermined powder sample among the powder samples spread on the stage with an electron beam and melts the predetermined powder sample. The second electron gun preheats the powder sample by irradiating the powder sample spread on the stage with an electron beam. The second electron gun irradiates the sample surface formed of a powder sample spread on the stage with an electron beam inclined, and the irradiation spot diameter of the second electron gun is set to the sample surface. On the other hand, it is irradiated more than when irradiated from the vertical.

Moreover, the three-dimensional additive manufacturing method of this invention includes the process shown to (1)-(3) below.
(1) A step of spreading a powder sample for forming a shaped object on one surface of the stage.
(2) A step of irradiating an electron beam from a first electron gun to a predetermined powder sample among powder samples spread on the stage to melt the predetermined powder sample.
(3) A step of preheating the powder sample by irradiating an electron beam from a second electron gun different from the first electron gun onto the powder sample spread on the stage.
The second electron gun irradiates the sample surface formed of a powder sample spread on the stage with an electron beam inclined, and the irradiation spot diameter of the second electron gun is set to the sample surface. On the other hand, it is irradiated more than when irradiated from the vertical.

  According to the three-dimensional additive manufacturing apparatus and the three-dimensional additive manufacturing method of the present invention, while the powder sample is melted with the first electron gun, the powder samples at different locations can be preheated with the second electron gun. Thereby, the temperature distribution of the powder sample spread on the stage can be made uniform, and a good model can be modeled.

It is explanatory drawing which shows typically the three-dimensional layered modeling apparatus concerning the 1st Embodiment of this invention. It is explanatory drawing which shows typically the principal part of operation | movement in the three-dimensional layered modeling apparatus concerning the 1st Example of this invention. It is explanatory drawing which shows typically the three-dimensional layered modeling apparatus concerning the 2nd Example of this invention. It is explanatory drawing which shows typically the state by which the electron beam was irradiated from the 3rd electron gun in the three-dimensional layered modeling apparatus concerning the 2nd Example of this invention. It is explanatory drawing shown about the effect in the three-dimensional layered modeling apparatus concerning the 2nd Example of this invention. It is explanatory drawing which shows typically the three-dimensional layered modeling apparatus concerning the 3rd Embodiment of this invention. It is a schematic sectional drawing which shows the three-dimensional additive manufacturing apparatus concerning a prior art. It is explanatory drawing which shows the irradiation state of the electron beam in the three-dimensional additive manufacturing apparatus concerning a prior art.

Hereinafter, embodiments of the three-dimensional additive manufacturing apparatus of the present invention will be described with reference to FIGS. In addition, the same code | symbol is attached | subjected to the common member in each figure. Moreover, although description is given in the following order, this invention is not necessarily limited to the following forms.
1. 1. First Embodiment 1-1. Configuration of a 1.3-dimensional additive manufacturing apparatus 1-2. Operation of a three-dimensional additive manufacturing apparatus Second embodiment example 3. FIG. Third embodiment

1. First Embodiment 1-1. Configuration of 1.3-Dimensional Layered Modeling Apparatus First, a first embodiment example of a three-dimensional layered modeling apparatus of the present invention will be described with reference to FIG.
FIG. 1 is an explanatory view schematically showing the three-dimensional layered manufacturing apparatus of this example.

  A three-dimensional additive manufacturing apparatus 1 shown in FIG. 1, for example, irradiates a powder sample made of metal powder such as titanium, aluminum, iron, etc. with an electron beam to melt the powder sample, and stacks the solidified layers of the powder sample. It is an apparatus for modeling a three-dimensional object.

  The three-dimensional additive manufacturing apparatus 1 includes a hollow vacuum vessel 2, a modeling frame 3, a stage 4, a drive mechanism 5 that supports the stage 4 movably, and a metal powder M1 that shows an example of a powder sample on the stage 4. A powder supply unit 7 to be supplied, a first electron gun 8, and a second electron gun 9 are provided. The three-dimensional additive manufacturing apparatus 1 includes a first electron beam control unit 11 that controls the first electron gun 8 and a second electron beam control unit 12 that controls the second electron gun 9. ing.

  A vacuum pump (not shown) is connected to the vacuum vessel 2. And the atmosphere in the vacuum vessel 2 is exhausted by the vacuum pump, so that the inside of the vacuum vessel 2 is maintained in a vacuum. In the vacuum vessel 2, a modeling frame 3, a stage 4, a drive mechanism 5, and a powder supply unit 7 are provided.

  The modeling frame 3 is disposed at the lower part of the vacuum vessel 2 in the vertical direction. The modeling frame 3 is formed with pits 3a penetrating from the upper side to the lower side in the vertical direction. The pit 3a is opened in a substantially quadrangular prism shape. In addition, a part of the outer peripheral surface of the pit 3a in the modeling frame 3 is opened so that the completed modeling object P1 can be taken out.

  A stage 4 and a drive mechanism 5 are arranged in the pit 3 a in the modeling frame 3. The stage 4 is formed in a substantially flat plate shape. The stage 4 is a powder base on which the metal powder M1 for forming the shaped object P1 is laminated. Further, a heat-resistant and flexible sealing member 14 is provided at the side end of the stage 4. The seal member 14 is slidably in contact with the wall surface of the pit 3a. The seal member 14 seals the space below and above the stage 4 in the vertical direction.

  Moreover, the shaft part 4d is provided in the other surface on the opposite side to the one surface where the metal powder M1 in the stage 4 is laminated | stacked. The shaft portion 4d protrudes downward from the other surface of the stage 4 in the vertical direction. The shaft portion 4 d is connected to the drive mechanism 5. The drive mechanism 5 drives the stage 4 in the vertical direction via the shaft portion 4d. Examples of the drive mechanism 5 include a rack, a pinion, and a ball screw.

  Further, a powder supply unit 7 is disposed above the vertical direction of the modeling frame 3. The metal powder M1 is sent to the powder supply unit 7 from a metal powder storage unit (not shown) via a delivery tube. The powder supply unit 7 discharges the metal powder M1 from a discharge port 7a provided below in the vertical direction. Then, the powder supply unit 7 discharges the metal powder M1 and spreads the metal powder M1 on one surface of the stage 4. Further, a leveling plate that flattens the metal powder M <b> 1 supplied to one surface of the stage 4 may be installed in the vacuum container 2.

  The mechanism for supplying the metal powder M1 to one surface of the stage 4 is not limited to the one described above. For example, the metal powder M1 previously supplied in the vacuum vessel 2 may be conveyed to the stage 4 via a flat arm member, and the metal powder M1 may be spread on one surface of the stage 4.

  A first electron gun 8 and a second electron gun 9 are mounted on the upper part of the vacuum container 2 in the vertical direction. The first electron gun 8 and the second electron gun 9 are arranged to face one surface of the stage 4 in the upper part of the vacuum vessel 2 in the vertical direction.

  The first electron gun 8 irradiates the predetermined metal powder M1 of the metal powder M1 spread on one surface of the stage 4 with the melting electron beam L1 to melt the metal powder M1. The first electron gun 8 is connected to the first electron beam control unit 11. The first electron beam control unit 11 determines the output value of the melting electron beam L1 emitted from the first electron gun 8 and the position where the first electron gun 8 irradiates the melting electron beam L1. Then, the first electron beam control unit 11 outputs the determined information to the first electron gun 8 to drive the first electron gun 8.

  The second electron gun 9 preheats the metal powder M1 by irradiating the entire metal powder M1 spread on one surface of the stage 4 with the preheating electron beam L2. The second electron gun 9 is connected to the second electron beam control unit 12. The second electron beam control unit 12 determines the output value of the preheating electron beam L2 emitted from the second electron gun 9 and the irradiation position. Then, the second electron beam control unit 12 outputs the determined information to the second electron gun 9 to drive the second electron gun 9.

  The second electron gun 9 may irradiate the preheating electron beam L2 substantially perpendicularly to a plane (hereinafter referred to as “sample surface”) formed of the metal powder M1 spread on one surface of the stage 4. Alternatively, the preheating electron beam L2 may be irradiated at an angle inclined with respect to the plane of the sample surface. By irradiating the preheating electron beam L2 with an inclination, the diameter of the irradiation spot of the preheating electron beam L2 formed on the sample surface can be increased as compared with the case of irradiation from substantially vertical. As a result, it is possible to quickly irradiate the entire sample surface with the preheating electron beam L2.

1-2. Operation of 3D additive manufacturing apparatus Next, the operation of the 3D additive manufacturing apparatus 1 having the configuration described above with reference to FIGS. 1 and 2 will be described.
FIG. 2 is an explanatory view schematically showing a main part of the operation of the three-dimensional additive manufacturing apparatus 1 of this example.

  First, as shown in FIG. 1, the stage 4 is arranged at a position lower by ΔZ in the vertical direction than the upper surface of the modeling frame 3 by the drive mechanism 5. This ΔZ corresponds to the vertical layer thickness of the metal powder M1 spread thereafter. Next, the powder supply unit 7 spreads a metal powder M1 having a thickness ΔZ on one surface of the stage 4.

  Next, the melting electron beam L1 is emitted from the first electron gun 8 and the preheating electron beam L2 is emitted from the second electron gun 9 to the metal powder M1. The second electron gun 9 irradiates the entire sample surface with the preheating electron beam L2. The temperature of the metal powder M1 irradiated with the preheating electron beam L2 is increased by the preheating electron beam L2. As a result, the entire sample surface is preheated.

  The first electron gun 8 is a metal powder according to a two-dimensional shape obtained by slicing a design object prepared in advance (a model object represented by three-dimensional CAD (Computer-Aided Design) data) at ΔZ intervals. A melting electron beam L1 is emitted to M1. The melting electron beam L1 emitted from the first electron gun 8 melts the metal powder M1 in a region corresponding to the two-dimensional shape.

  Specifically, as shown in FIG. 2, while the melting electron beam L1 is irradiated onto the region A1 of the sample surface, the second electron gun 9 is preheated in a region B1 away from the region A1. Irradiate the beam L2. In the region A1, the energy of the melting electron beam L1 is converted into heat, the temperature of the metal powder M1 rises, and the metal powder M1 melts to become a molten powder M3. Further, in the region B1, the energy of the preheating electron beam L2 is converted into heat, the temperature of the metal powder M1 is increased, and the surface of the preheated powder M2 is melted.

  Thereby, the temperature difference between the region A1 and the region B1 can be reduced, and the temperature of the entire sample surface can be made substantially uniform. Thereby, generation | occurrence | production of the thermal strain produced by the temperature difference of a sample surface can be suppressed.

  Furthermore, by raising the temperature of the metal powder M1 in advance by the preheating electron beam L2, the speed at which the metal powder M1 is melted by the melting electron beam L1 can be increased and emitted from the first electron gun 8. The output of the melting electron beam L1 can also be suppressed.

  Further, the three-dimensional additive manufacturing apparatus 1 of the present example is provided with a first electron gun 8 that emits a melting electron beam L1 and a second electron gun 9 that emits a preheating electron beam L2 separately. The first electron beam control unit 11 and the second electron beam control unit 12 are independently controlled. Thereby, it is possible to simultaneously irradiate the melting electron beam L1 and the preheating electron beam L2 to the regions A1 and B1 having different sample surfaces. Since the preheating process and the melting process of the metal powder M1 can be performed simultaneously, it is possible to shorten the time for the modeling process.

  Next, the molten metal powder M1 is solidified when a predetermined time corresponding to the material has elapsed. After the metal powder M1 for one layer is melted and solidified, the stage 4 is lowered by ΔZ by the drive mechanism 5. The movement of the stage 4 in the Z direction is realized by the sealing member 14 sliding on the inner surface of the pit 3 a of the modeling frame 3.

  Next, the powder supply unit 7 again spreads the metal powder M1 for ΔZ on the layer (lower layer) spread just before. The entire sample surface corresponding to the layer is preheated by the preheating electron beam L2 emitted from the second electron gun 9, and the layer is obtained by the melting electron beam L1 emitted from the first electron gun 8. The metal powder M1 in the region corresponding to the two-dimensional shape corresponding to is melted and solidified. This series of processes is repeated to build a shaped article P1 by stacking layers of molten and solidified metal powder M1. Thereby, the operation of the three-dimensional additive manufacturing apparatus 1 of this example is completed.

  In the three-dimensional additive manufacturing apparatus 1 of this example, a temperature measuring device that two-dimensionally measures the temperature of the sample surface may be provided. In this case, the second electron beam control unit 12 controls the second electron gun 9 so that the temperature of the sample surface is uniform based on the temperature of the sample surface measured by the temperature measuring device. Thereby, the temperature of the sample surface can be made more accurate and uniform.

2. Second Embodiment Next, a second embodiment of the three-dimensional additive manufacturing apparatus of the present invention will be described with reference to FIGS.
FIG. 3 is an explanatory view schematically showing a three-dimensional additive manufacturing apparatus.

  The three-dimensional additive manufacturing apparatus 21 according to the second embodiment is different from the three-dimensional additive manufacturing apparatus 1 according to the first embodiment in that a third electron gun 22 and a third electron beam are used. This is the point that a control unit 23 is provided. Therefore, here, the third electron gun 22 and the third electron beam control unit 23 will be described, and the same reference numerals are given to the portions common to the three-dimensional additive manufacturing apparatus 1 according to the first embodiment. Thus, duplicate explanations are omitted.

  As shown in FIG. 3, the three-dimensional additive manufacturing apparatus 21 includes a first electron gun 8, a second electron gun 9, and a third electron gun 22 on the top of the vacuum vessel 2 in the vertical direction. Yes. In addition, the three-dimensional additive manufacturing apparatus 21 includes a third electron beam control unit 23 that controls the third electron gun 22.

  The third electron gun 22 irradiates the electron beam L3 for neutralizing the charge with an inclination of a predetermined angle θ1 with respect to the plane of the sample surface. The angle θ1 for inclining the charge neutralizing electron beam L3 is set, for example, within approximately 45 degrees from the plane of the sample surface. The output of the charge neutralizing electron beam L3 emitted from the third electron gun 22 is set to a value lower than that of the preheating electron beam L2 emitted from the second electron gun 9.

FIG. 4 is an explanatory view schematically showing a state in which the charge neutralizing electron beam L3 is irradiated.
As shown in FIG. 4, the third electron gun 22 irradiates the charging neutralization electron beam L3 to the same irradiation position Q1 as the irradiation position Q1 of the melting electron beam L1 emitted from the first electron gun 8. . Further, the charge neutralizing electron beam L3 is irradiated with an inclination with respect to the sample surface. Therefore, the diameter of the irradiation spot of the charging neutralizing electron beam L3 can be made larger than the diameter of the irradiation spot of the melting electron beam L1.

  Then, the irradiation spot of the melting electron beam L1 scans on the predetermined metal powder M1 in synchronization with each other while being included in the irradiation spot of the charging neutralization electron beam L3.

Next, the effect of the three-dimensional layered manufacturing apparatus 21 according to the second embodiment will be described with reference to FIG.
FIGS. 5A to 5C are explanatory views schematically showing the state of electrons when the melting electron beam L1 and / or the charge neutralizing electron beam L3 are irradiated onto the metal powder M1.

  As shown in FIG. 5A, when the melting electron beam L1 is irradiated substantially perpendicularly to the sample surface, most of the irradiated electrons enter the inside of the sample surface and are more than the spread metal powder M1. Diffusion inside the underlying sample. Some of the electrons remain in the metal powder M1. When the metal powder M1 is an insulator, the metal powder M1 is negatively charged by the melting electron beam L1. Even when the metal powder M1 is a conductor, the grounding area is small and the current amount of the melting electron beam L1 is large, so that it is negatively charged as in the case of the insulator. Therefore, there is a possibility that the negatively charged metal powders M1 repel each other and the metal powder M1 is scattered.

  On the other hand, as shown in FIG. 5B, the charge neutralizing electron beam L3 is irradiated at an angle θ1 with respect to the sample surface. At this time, the charging neutralization electron beam L3 has a smaller depth of penetration into the sample surface than the melting electron beam L1 irradiated perpendicularly to the sample surface. Furthermore, as described above, the diameter of the irradiation spot formed on the sample surface is larger than when the electron beam is irradiated substantially vertically. Therefore, the area of secondary electrons emitted from the metal powder M1 can be widened. As a result, secondary electrons exceeding the amount of incident electrons are emitted from the sample surface. Furthermore, the metal powder M1 is temporarily positively charged, but is quickly neutralized by the emitted secondary electrons.

Next, with reference to FIG. 5C, the case where the same irradiation position is irradiated with the melting electron beam L1 and the charging neutralization electron beam L3 will be described.
As shown in FIG. 5C, the metal powder M1 is negatively charged by the melting electron beam L1 irradiated substantially perpendicularly to the sample surface. However, secondary electrons are emitted from the metal powder M1 by the charge neutralizing electron beam L3 irradiated obliquely with respect to the sample surface. Then, the secondary electrons emitted according to the charge amount of the metal powder M1 are redistributed. Thus, the negatively charged metal powder M1 can be removed from the charge, and the metal powder M1 can be neutralized. As a result, it is possible to prevent the metal powder M1 from being scattered due to the negatively charged metal powder M1.

  Other configurations are the same as those of the three-dimensional additive manufacturing apparatus 1 according to the first embodiment, and thus the description thereof is omitted. Also with the three-dimensional additive manufacturing apparatus 21 having such a configuration, the same operational effects as those of the three-dimensional additive manufacturing apparatus 1 according to the first embodiment described above can be obtained.

3. Third Embodiment Next, a third embodiment of the three-dimensional additive manufacturing apparatus of the present invention will be described with reference to FIG.
FIG. 6 is an explanatory view schematically showing a three-dimensional additive manufacturing apparatus.

  The three-dimensional additive manufacturing apparatus 31 according to the third embodiment is different from the three-dimensional additive manufacturing apparatus 1 according to the first embodiment in that the second electron gun and the second electron beam control are performed. The part has a charge neutralization function. Therefore, here, the second electron gun 32 and the second electron beam control unit 33 will be described, and the same reference numerals are given to the parts common to the three-dimensional additive manufacturing apparatus 1 according to the first embodiment. Thus, duplicate explanations are omitted.

  As shown in FIG. 5, the three-dimensional additive manufacturing apparatus 31 is provided with a first electron gun 8 and a second electron gun 32 on the upper part of the vacuum vessel 2 in the vertical direction. The three-dimensional additive manufacturing apparatus 31 includes a preheating and second electron beam control unit 33 that controls the second electron gun 32.

  The second electron gun 32 irradiates the preheating electron beam L2 or the charge neutralizing electron beam L3 with a predetermined angle θ1 with respect to the plane of the sample surface.

  When preheating the metal powder M1, the second electron beam control unit 33 controls the second electron gun 32 to emit the preheating electron beam L2. In this case, the preheating electron beam L2 is irradiated to an irradiation position different from the irradiation position of the melting electron beam L1 emitted from the first electron gun 8. Thereby, preheating of the metal powder M1 is performed.

  When the metal powder M1 is neutralized by charging, the second electron beam control unit 33 controls the second electron gun 32, and the neutralizing electrons having a lower output than the output of the preheating electron beam L2. The beam L3 is emitted. In this case, the charging neutralization electron beam L3 is irradiated to the same irradiation position as the irradiation position of the melting electron beam L1 emitted from the first electron gun 8. Thereby, when the metal powder M1 is melted, the charge neutralization of the metal powder M1 is performed.

  When the preheating electron beam L2 is emitted from the second electron gun 32, the output of the preheating electron beam L2 is set to 60 kV, for example, and the charging neutralization electron beam L3 is emitted from the second electron gun 32. At this time, the output of the charge neutralizing electron beam L3 is set to 1 kV, for example.

  Other configurations are the same as those of the three-dimensional additive manufacturing apparatus 1 according to the first embodiment, and thus the description thereof is omitted. Also with the three-dimensional additive manufacturing apparatus 31 having such a configuration, the same operational effects as those of the three-dimensional additive manufacturing apparatus 1 according to the first embodiment described above can be obtained.

  The present invention is not limited to the embodiment described above and shown in the drawings, and various modifications can be made without departing from the scope of the invention described in the claims.

  DESCRIPTION OF SYMBOLS 1, 21, 31 ... Three-dimensional layered modeling apparatus, 2 ... Vacuum container, 3 ... Modeling frame, 4 ... Stage, 7 ... Powder supply part, 8 ... 1st electron gun, 9, 32 ... 2nd electron gun 11 ... 1st electron beam control part, 12, 33 ... 2nd electron beam control part, 22 ... 3rd electron gun, 23 ... 3rd electron beam control part, L1 ... Electron beam for melting, L2 ... Electron beam for preheating, L3 ... Electron beam for neutralization of charging, A1, B1 ... Area, M1 ... Metal powder, P1 ... Modeled object, Q1 ... Irradiation position

Claims (4)

A stage on which powder samples for forming a shaped object are spread,
A first electron gun that irradiates a predetermined powder sample among the powder samples spread on the stage with an electron beam and melts the predetermined powder sample;
A second electron gun that preheats the powder sample by irradiating the powder sample spread on the stage with an electron beam;
With
The second electron gun irradiates the sample surface formed by the powder sample spread on the stage with an electron beam inclined,
The three-dimensional additive manufacturing apparatus in which the irradiation spot diameter of the second electron gun is irradiated larger than when irradiated from the perpendicular to the sample surface . A temperature measuring device for measuring the temperature of the powder sample spread on the stage;
It said temperature measuring device based on the measured temperature, a three-dimensional laminate molding apparatus according to claim 1, and a control unit, further comprising a for controlling the second electron gun. A third electron gun for irradiating the sample surface formed by the powder sample spread on the stage with an electron beam tilted to remove the charge of the powder sample;
It said third electron gun, three-dimensional laminate molding apparatus according to claim 1 or 2 is irradiated with an electron beam at the same irradiation position with the electron beam emitted from the first electron gun. Laying a powder sample to form a shaped object on one side of the stage;
Irradiating an electron beam from a first electron gun to a predetermined powder sample among the powder samples spread on the stage on the stage, and melting the predetermined powder sample;
Irradiating an electron beam from a second electron gun different from the first electron gun to the powder sample spread on the stage, and preheating the powder sample;
It includes,
The second electron gun irradiates the sample surface formed by the powder sample spread on the stage with an electron beam inclined,
The three-dimensional additive manufacturing method in which the irradiation spot diameter of the second electron gun is irradiated larger than when irradiated from the perpendicular to the sample surface .

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