JP6129545B2 - Spatial coordinate measuring apparatus and spatial coordinate measuring method - Google Patents

Description

  The present invention relates to a spatial coordinate measuring apparatus and a spatial coordinate measuring method for measuring spatial coordinates of an object such as a product, a building, or a natural object in the fields of industry and measurement.

Laser tracking technology for obtaining the spatial coordinates (three-dimensional position information) of a target by controlling the direction of a laser beam serving as a guide with a biaxial motor to follow a moving target has been known for a long time. In this tracking device (hereinafter referred to as “laser tracker”), it is possible to know the spatial direction (angle) of a moving target by using a biaxial encoder attached to each motor.
The target is generally a retro-reflector or a reflector using three mirrors each called an orthogonal reflector. In any case, the reflector can return light in the incident direction. Further, a technique for measuring a distance with a laser has been established. For example, with a laser interferometer, a distance of several meters can be measured with a resolution of a nanometer unit.

A laser tracker, which is a device combining these two techniques, can measure the distance and spatial angle from the device to the target, and specify the spatial position of the target with reference to the device. The measurement is performed according to the following procedure.
(1) Install a laser tracker near the object to be measured.
(2) Bring the target into contact with the measurement object.
(3) The laser beam is emitted from the laser tracker toward the target, and the light reflected by the target is received again by the device. The spatial coordinates (three-dimensional position information) of the target are obtained from the encoder value at this time and the value of the laser interferometer.

JP-A-8-82509 JP-A-10-82610

  As described above, it is a laser tracker that can easily measure position information in a three-dimensional space, but there are cases where it is greatly adversely affected by the working environment of the measurement site. Particularly in an environment where there is an air flow (hereinafter referred to as “air fluctuation”) such as an air conditioner, the emission direction of the laser beam is bent, and the measurement accuracy is deteriorated. This problem has been known for some time and various attempts have been made.

Conventional examples are listed below.
(1) Provide a cover that can be expanded and contracted in the laser optical axis direction, or sandwich the optical path between two parallel plates to prevent the inflow of gas from the outside into the optical path and stop the air flow in the cover (Patent Document 1). Although this example is a measure that is not easily affected by air fluctuations, it is necessary to change the position of the cover for each measurement, which is not realistic.
(2) An air guide means that sends an air flow (laminar flow) in the vicinity of the optical path is placed, and air at a constant temperature and humidity is blown into the optical path from a predetermined angle to stabilize the gas in the optical path. (Patent Document 2). In this example, a device for creating an air flow is required separately, which is expensive and uneasy about stability.
(3) Prepare three identical laser trackers, measure only the distance from each device to the target, and specify the spatial position by triangulation from the distance data of the three points. In this case, since angle data is not used, it is difficult to be affected by air fluctuations, but it is very expensive because three devices are required.
As described above, the conventional technique has not yet established a method that allows inexpensive and highly accurate measurement.

  The retroreflector used as a target is manufactured by embedding three mirrors orthogonal to each other in a sphere, so that the incident laser light can be regarded as reflected from the center of the sphere. It has become. Actually, three mirrors are embedded in the metal sphere, and there is an incorporation error between the center of the metal sphere and the center of the mirror, and an error also occurs in the angle measurement result depending on the rotational position of the retroreflector at the time of measurement.

  An object of the present invention is to provide a spatial coordinate measuring apparatus and a spatial coordinate measuring method that can measure spatial coordinates with high accuracy in an environment where air fluctuates, and that have little influence on measurement accuracy due to target assembly errors. It is to be.

A spatial coordinate measuring apparatus 1 of the present invention is a spatial coordinate measuring apparatus for obtaining the spatial coordinates of a target Tg provided on a measurement object W,
The laser light source 2 that emits the laser light Lb, the irradiation angle changing means 3 that can change the irradiation angle of the laser light Lb emitted from the laser light source 2, and the irradiation angle changing means 3 that moves the laser light to the target Tg that moves. The light receiving unit 5 that recognizes the position information of the reflected light of the laser beam irradiated with Lb and reflected by the target Tg, and the laser light of the irradiation angle changing unit 3 based on the position information recognized by the light receiving unit 5 The control means 7 capable of tracking the target Tg by changing the irradiation angle of Lb, the reflected light of the laser light reflected by the target Tg, and the laser light Lb emitted from the laser light source 2 and the reflected light received. The distance measuring means 6 for measuring the distance from the target Tg to the target Tg, the distance measured by the distance measuring means 6 and the irradiation of the laser beam Lb And a degree, and an arithmetic unit 8 for calculating the spatial coordinates of the target Tg,
Imaging means 9 for imaging the target Tg;
Image processing means 10 for detecting the position of the target Tg by performing image processing on an image picked up by the image pickup means 9;
The control means 11 changes the irradiation angle of the laser beam of the irradiation angle changing means 3 based on the position of the target detected by the image processing means 10 and the spatial coordinates of the target calculated by the calculating means 8. be to an image processing result reflecting means 11 for reflecting the position of said detected target Tg by the image processing unit 10 to the calculation result of the spatial coordinates of the target Tg for computing by the computing means 8,
Is provided .

  According to this configuration, the laser light Lb emitted from the laser light source 2 reaches the target Tg via the irradiation angle changing means 3. The reflected light reflected by the target Tg returns to the light source spatial coordinate measuring apparatus 1 through substantially the same path. The light receiving unit 5 recognizes the position information of the reflected light. The control means 7 tracks the target Tg by changing the irradiation angle of the laser light Lb of the irradiation angle changing means 3 based on the position information from the light receiving unit 5. The calculating means 8 calculates the spatial coordinates of the target Tg from the distance measured by the distance measuring means 6 and the irradiation angle of the laser beam Lb.

  As described above, the spatial coordinates of the target Tg are calculated, but a large error occurs in the measurement value of the irradiation angle in a use environment where the air flow fluctuates severely. When the flow of air (air fluctuation) fluctuates, pressure distribution is generated in the air, the refractive index of the air changes, the direction of travel of the laser light passing through it is bent, and the reflected laser light is received. This is because the position in the section 5 varies (see FIG. 8) and affects the angle measurement values in the horizontal and vertical directions.

  Therefore, in the present invention, the imaging means 9, the image processing means 10, and the image processing result reflecting means 11 are provided. The imaging means 9 images the target Tg. The image processing unit 10 detects the position of the target Tg by performing image processing on the image captured by the imaging unit 9 in order to detect the degree of influence of air fluctuation. The image processing result reflecting means 11 reflects the position of the target Tg detected by the image processing means 10 in the calculation result of the spatial coordinates of the target Tg calculated by the calculating means 8. As a result, the influence of air fluctuation can be avoided or corrected, and the influence of the production error of the target Tg can be avoided. Therefore, the spatial coordinates can be measured at a lower cost and with higher accuracy than those of the prior art provided with a cover or the like.

  A zoom lens 9 b may be used as the imaging lens of the imaging means 9. The zoom lens 9b can be used to enlarge and capture the target Tg, and the captured image can be processed by the image processing means 10 to detect the position of the target Tg. For this reason, it is possible to measure the three-dimensional spatial coordinates with high accuracy even when the target position is far away.

  The irradiation angle changing unit 3 includes first and second driving units 14 and 15 that can adjust the angle of the laser beam Lb about two axes orthogonal to the target Tg, respectively. An optical unit that is attached to the irradiation angle changing unit 3 and that adjusts the optical axis of the laser beam Lb toward the target Tg after the angle adjustment by the first and second driving units 14 and 15, and the optical axis of the imaging unit 9. A device 21 may be provided. As described above, since the optical device 21 that matches the optical axis of the laser beam Lb toward the target Tg and the optical axis of the imaging unit 9 is provided, the imaging unit 9 can follow the movement of the target Tg. Therefore, the target Tg can be easily imaged by the imaging means 9 regardless of the movement of the target Tg.

The image processing result reflecting means 11 stops the tracking by the control means 7 and, in the stopped state, causes the imaging means 9 to image the target Tg, and the image processing means 10 performs image processing on the captured image. The position of the target Tg is detected, and the control means 7 changes the irradiation angle of the laser light Lb of the irradiation angle changing means 3 based on the position of the target Tg detected by the image processing means 10, and,
The calculating means 8 may calculate the spatial coordinates of the target Tg from the changed irradiation angle and the distance measured by the distance measuring means 6.

  According to this configuration, the image processing result reflecting unit 11 is the control unit in a state in which the target Tg is irradiated with the laser beam Lb by the irradiation angle changing unit 3 and the distance measuring unit 6 can measure the distance to the target Tg. The tracking according to 7 is stopped. Since tracking with the laser beam Lb is affected by air fluctuation as described above, the tracking control is turned off at this point. Thereafter, the image processing result reflecting means 11 causes the control means 7 to change the irradiation angle of the laser light Lb of the irradiation angle changing means 3 based on the position of the target Tg detected by the image processing means 10. Thereby, the position of the target Tg and the optical axis center of the imaging means 9 can be matched. The calculating means 8 can calculate the spatial coordinates of the target Tg with high accuracy from the changed irradiation angle and the distance measured by the distance measuring means 6.

The image processing result reflecting means 11 causes the image pickup means 9 to pick up the target Tg, and the image processing means 10 performs image processing on the picked up image to detect the position of the target Tg. Based on the position of the target Tg detected by the image processing means 10, the irradiation angle of the laser light of the irradiation angle changing means 3 is changed, and
The calculating means 8 may calculate the spatial coordinates of the target Tg from the changed irradiation angle and the distance measured by the distance measuring means 6.

  According to this configuration, the image processing result reflecting unit 11 detects the position of the target Tg by causing the imaging unit 9 to capture an image of the target Tg and performing image processing on the captured image of the target Tg by the image processing unit 10. The image processing result reflecting unit 11 causes the control unit 7 to perform tracking control based on the detected position of the target Tg. At this time, the distance measuring means 6 is ready to measure the distance to the target Tg. Thereafter, the calculating means 8 can calculate the spatial coordinates of the target Tg with high accuracy from the changed irradiation angle and the distance measured by the distance measuring means 6.

  The image processing unit 10 includes a contour extracting unit 30 that extracts a contour of an image captured by the imaging unit 9, and a target center position that calculates a center position TgO of the target Tg from the contour extracted by the contour extracting unit 30. It is good also as what has the calculation means 31. FIG. Thus, since the center position TgO of the target Tg is calculated using the contour image of the target Tg, the influence on the measurement accuracy due to the assembly error of the target Tg can be reduced.

  When the contour extraction means 30 extracts the contour of the image, the determination unit 30a determines whether there is an influence due to air fluctuations, and the determination part 30a determines that there is an influence due to air fluctuations. It is also possible to have an extraction unit 30b that extracts the contour after waiting until the influence of air fluctuations is eliminated or the range is reduced to a predetermined range. The extraction unit 30b extracts the contour after waiting until the influence of the air fluctuation is eliminated or the range is reduced to a predetermined range. Even in an environment with air fluctuation, the spatial coordinates of the target Tg can be calculated with high precision by performing fine control of extracting the contour when the influence of air fluctuation is reduced.

When the contour extraction unit 30 extracts the contour of the image, the determination unit 34 determines whether or not the influence of the air fluctuation continues for a predetermined time, and the determination unit 34 determines the influence of the air fluctuation. An informing means 35 may be provided for notifying the measurer when it is determined that it will last for a predetermined time or longer. In this case, the measurer can receive a notification from the notification unit 35 and take measures to alleviate the influence of air fluctuation, for example.
The “predetermined time” is a time that is an allowable limit when measuring spatial coordinates, and is appropriately determined according to conditions such as the type of measurement object and the measurement location.
A plurality of contours of the image are extracted by the contour extraction means 30, and the target center position calculation means 31 may calculate the center position TgO of the target Tg from data obtained by averaging the plurality of extracted measurement results. . For example, when the influence of fluctuation continues for a long time, the target Tg is repeatedly imaged by the imaging unit 9, and the captured image is averaged by the contour extracting unit 30. The target center position calculation means 31 can calculate the center position TgO of the target Tg with high accuracy from the averaged image. Thus, even when there is an influence of fluctuation, highly accurate three-dimensional spatial coordinates can be measured.

The spatial coordinate measurement method of the present invention is a spatial coordinate measurement method for obtaining a spatial coordinate of a target provided on a measurement object,
A laser light source that emits laser light; an irradiation angle changing unit that can change an irradiation angle of the laser light emitted from the laser light source; and a laser beam that is irradiated to the moving target by the irradiation angle changing unit. A light receiving unit for recognizing the position information of the reflected light of the reflected laser light, and the target can be tracked by changing the irradiation angle of the laser light of the irradiation angle changing means based on the position information recognized by the light receiving unit. And a distance measuring means for receiving the reflected light of the laser light reflected by the target and measuring the distance from the laser light emitted by the laser light source and the received reflected light to the target, and the distance measurement Using the calculation means for calculating the spatial coordinates of the target from the distance measured by the means and the irradiation angle of the laser beam,
An imaging process for imaging the target;
An image processing process for detecting the position of the target by performing image processing on an image captured in the imaging process;
By changing the irradiation angle of the laser light of the irradiation angle changing means based on the position of the target detected in the image processing process and the spatial coordinates of the target calculated by the calculating means by the control means, an image processing result reflecting process for reflecting the calculation result of the spatial coordinates of the target for calculating the detected position of the target by the computing means by the image processing step,
It is characterized by including .

  According to this configuration, the target is imaged during the imaging process. In the image processing process, in order to detect the influence degree of air fluctuation, the image captured in the imaging process is subjected to image processing to detect the position of the target. In the image processing result reflection process, the position of the target detected in the image processing process is reflected in the calculation result of the spatial coordinates of the target calculated by the calculation means. As a result, the influence of air fluctuation can be avoided or corrected, and the influence of target manufacturing errors can be avoided. Therefore, the spatial coordinates can be measured at a lower cost and with higher accuracy than those of the prior art provided with a cover or the like.

A spatial coordinate measuring device of the present invention is a spatial coordinate measuring device for obtaining a spatial coordinate of a target provided on a measurement object, and a laser light source that emits laser light, and an irradiation angle of the laser light emitted from the laser light source An irradiation angle changing means capable of changing the position, a light receiving unit for recognizing positional information of reflected light of the laser light reflected by the target when the moving target is irradiated with laser light from the irradiation angle changing means, Based on the position information recognized by the unit, the control means capable of tracking the target by changing the irradiation angle of the laser light of the irradiation angle changing means, and the reflected light of the laser light reflected by the target, Distance measuring means for measuring the distance from the laser light emitted from the laser light source and the received reflected light to the target, and the distance measurement And a radiation angle of the distance and the laser beam measured by the stage, and a calculating means for calculating the spatial coordinates of the target,
Imaging means for imaging the target; image processing means for detecting the position of the target by performing image processing on an image captured by the imaging means; and position of the target detected by the control means by the image processing means And the spatial coordinates of the target calculated by the calculation means, the position of the target detected by the image processing means is changed by the calculation means by changing the irradiation angle of the laser light of the irradiation angle changing means. Image processing result reflecting means for reflecting the calculation result of the spatial coordinates of the target to be calculated is provided . For this reason, it is possible to measure spatial coordinates with high accuracy in an environment where air fluctuates, and to further reduce the influence on measurement accuracy due to an assembly error of the target.

The spatial coordinate measurement method of the present invention is a spatial coordinate measurement method for obtaining a spatial coordinate of a target provided on a measurement object, the laser light source emitting a laser beam, and the irradiation angle of the laser beam emitted from the laser light source An irradiation angle changing means capable of changing the position, a light receiving unit for recognizing positional information of reflected light of the laser light reflected by the target when the moving target is irradiated with laser light from the irradiation angle changing means, Based on the position information recognized by the unit, the control means capable of tracking the target by changing the irradiation angle of the laser light of the irradiation angle changing means, and the reflected light of the laser light reflected by the target, Distance measuring means for measuring the distance from the laser light emitted from the laser light source and the received reflected light to the target, and the distance measurement From the measured distance and irradiation angle of the laser beam by the step, using a calculating means for calculating spatial coordinates of the target,
An imaging process for imaging the target, an image processing process for detecting the position of the target by performing image processing on an image captured in the imaging process, and the position of the target detected by the control means in the image processing process And the spatial coordinates of the target computed by the computing means, the position of the target detected in the image processing step is changed by the computing means by changing the irradiation angle of the laser light of the irradiation angle changing means. and an image processing result reflecting process for reflecting the calculation result of the spatial coordinates of the target to be calculated. For this reason, it is possible to measure spatial coordinates with high accuracy in an environment where air fluctuates, and to further reduce the influence on measurement accuracy due to an assembly error of the target.

1 is a perspective view schematically showing a configuration of a spatial coordinate measuring apparatus according to a first embodiment of the present invention. It is a figure which shows schematic structure of the light-receiving part of the same space coordinate measuring device. It is a block diagram of the control system of the same space coordinate measuring device. It is explanatory drawing of the spatial coordinate of the spatial coordinate measuring device. (A) is a top view of the position detection part in the spatial coordinate measuring device, (B) is an AA line end view of FIG. 5 (A). It is a figure explaining the influence of the fluctuation of the air at the time of target image detection. (A) is a figure explaining the case where the influence of the air fluctuation at the time of target image detection becomes large, (B) is a figure explaining the case where there is no influence of the air fluctuation at the time of target image detection. It is a figure which shows the influence by fluctuation | variation of air and shows the relationship between elapsed time and a light-receiving part output.

A spatial coordinate measuring apparatus according to a first embodiment of the present invention will be described with reference to FIGS.
The spatial coordinate measurement device according to this embodiment follows a movement of a target provided on a measurement object and obtains spatial coordinates. The following description also includes a description of the spatial coordinate measurement method. As shown in FIG. 1, in this example, the target Tg is attached in a stationary state at one place on the measurement object W. As the target Tg, for example, a spherical retro reflector is used.

  The spatial coordinate measuring apparatus 1 mainly includes a laser light source 2, an irradiation angle changing unit 3, an angle detecting unit 4, a light receiving unit 5, a distance measuring unit 6, a control unit 7, a calculating unit 8, an imaging unit 9, and an image processing unit 10. And image processing result reflecting means 11. The laser light source 2 emits laser light having a predetermined wavelength, and the distance measuring means measures the distance to the target Tg using the laser light Lb reflected by the target. As the distance measuring means 6, for example, a length measuring device comprising an interferometer or an absolute distance meter is used. The laser light source 2 and the length measuring device constitute a laser length measuring device which is an integrated device and are accommodated in, for example, a cylindrical casing 12.

  The irradiation angle changing means 3 is capable of changing the irradiation angle of the laser light Lb emitted from the laser light source 2, and includes a rotating body 13, a θ-axis motor 14 that is a first driving means, and a second driving means. It has a certain ψ-axis motor 15, a half mirror 16, and a mirror 17. The θ axis and the ψ axis in the θ axis motor 14 and the ψ axis motor 15 are two orthogonal axes, and the θ axis is disposed concentrically with the axis of the bottomed cylindrical casing 12. The rotating body 13 is configured to be angularly displaceable around the θ axis relative to the casing 12 via a bearing or the like at the upper end portion of the casing 12. The rotating body 13 is configured to be able to be driven to rotate relative to the casing 12 by a θ-axis motor 14. For example, the motor body of the θ-axis motor 14 is fixed to the upper end portion of the casing 12, and the motor shaft of the θ-axis motor 14 is connected to the rotating body 13 via a driving force transmission means or the like not shown.

  A ψ-axis motor 15 is supported on the upper end portion of the rotating body 13 via a concave frame 18. The axis of the ψ-axis motor 15 is arranged along the ψ axis. In this example, the θ axis extends in the vertical direction, and the ψ axis is disposed in the horizontal direction perpendicular to the θ axis. The mirror 17 is attached to the motor shaft of the ψ-axis motor 15 so as to be capable of angular displacement. The rotator 13 and the frame 18 are formed with holes through which the laser light Lb and the reflected light pass.

  The angle detection means 4 detects and outputs the irradiation angle changed by the irradiation angle changing means 3, and has a θ-axis encoder 19 and a ψ-axis encoder 20. The θ-axis encoder 19 outputs a detection angle around the θ-axis from the measurement origin at the target Tg. The ψ-axis encoder 20 outputs a detection angle around the ψ axis from the measurement origin at the target Tg. In this example, the θ-axis encoder 19 is provided integrally with the θ-axis motor 14, and the ψ-axis encoder 20 is provided integrally with the ψ-axis motor 15.

  The laser beam Lb emitted from the laser light source 2 passes through the half mirror 16 and is reflected by the mirror 17, and then reaches the target Tg via the optical device 21. The reflected light reflected by the target Tg returns to the light source spatial coordinate measuring device 1 through the same path, is reflected by the half mirror 16, and reaches the light receiving unit 5 in the casing 12. The light receiving unit 5 recognizes the position information of the reflected light, and includes, for example, a semiconductor position detecting element (abbreviated as PSD) or a four-divided photodiode. The “positional information” of the reflected light refers to the X and Y coordinates with respect to the origin O of the laser spot in the biaxial directions of the X axis and Y axis orthogonal to each other on the light receiving unit 5. Based on the signal from the light receiving unit 5, the control unit 7 controls the θ axis motor 14 and the ψ axis motor 15 of the irradiation angle changing unit 3 so that the reflected light reaching the light receiving unit 5 returns to the center of the light receiving unit 5. Control.

  For example, when the light receiving unit 5 is formed of a two-dimensional semiconductor position detecting element, two orthogonal directions (X and Y axis directions) with respect to a reference position O such as a center position on the surface of the light receiving unit in a laser spot that reaches the surface of the light receiving unit. ), A current represented by coordinates (x, y) is obtained. X of coordinates (x, y) indicates only the amount of displacement in the X-axis direction among the laser spots on the surface of the light receiving unit, and y of coordinates (x, y) indicates the Y axis of the laser spots on the surface of the light receiving unit. Only the amount of displacement in the direction is shown. This current is converted into a voltage and input to, for example, the θ-axis control unit 22 (FIG. 3) and the ψ-axis control unit 23 (FIG. 3). When the laser beam Lb deviates from the center of the target Tg, the laser spot that reaches the surface of the light receiving unit deviates from the semiconductor position detection element, and an error signal is generated. When the target Tg is moved manually or automatically on the measurement object W in order to obtain a large number of spatial coordinates, and the movement of the target Tg is tracked by the spatial coordinate measuring apparatus 1, the position information from the light receiving unit 5 is used. The center of each target Tg can be tracked with the laser beam Lb. It is assumed that the target Tg is not moved when the tracking control is off.

  As shown in FIG. 2, when the light receiving unit 5 is formed of, for example, a four-division photodiode, a change in the center of gravity position of the projected image of the laser spot that has reached the surface of the light receiving unit is measured. That is, the displacement is measured as a voltage from the differential output of the photodiode in each of the four divided regions. If the output (current value) of each of the four divided regions of the photodiode is A, B, C, D on the surface of the light receiving portion, the displacement amount in the two orthogonal directions relative to the reference position O on the surface of the light receiving portion Of these, the displacement in the X-axis direction is represented as (B + C)-(D + A), and the displacement in the Y-axis direction is represented as (A + B)-(C + D). These displacements in the X and Y axis directions are converted into voltages as in the case of the two-dimensional semiconductor position detecting element, and are transferred to, for example, the θ axis control unit 22 (FIG. 3) and the ψ axis control unit 23 (FIG. 3). Entered.

  As shown in FIG. 1, a part of the reflected light returned to the spatial coordinate measuring device 1 enters the distance measuring means 6 without being reflected by the half mirror 16, and the distance measuring means 6 includes the received reflected light, The measured distance obtained by measuring the distance from the laser beam projected by the laser light source 2 to the target Tg is output to the computing means 8.

  The control unit 7 includes a tracking control unit 7 a and an image processing result reflecting unit 11. The tracking control unit 7a performs control for tracking the target Tg by changing the irradiation angle of the laser light Lb of the irradiation angle changing unit 3 based on the position information from the light receiving unit 5 or the image processing unit 10. As shown in FIG. 3, the tracking control unit 7 a includes, for example, a θ-axis control unit 22, a ψ-axis control unit 23, a θ-axis driver 24, and a ψ-axis driver 25. The θ-axis control unit 22 and the ψ-axis control unit 23 are composed of, for example, a microcomputer and other electronic devices. The θ-axis control unit 22 and the ψ-axis control unit 23 make the reflected light always return to the center of the light-receiving unit to the θ-axis driver 24 and the ψ-axis driver 25 based on the position information signal from the light receiving unit 5, respectively. To The θ-axis motor 14 and the ψ-axis motor 15 cause the mirror 17 (FIG. 1) to be angularly displaced about the orthogonal θ-axis and ψ-axis based on the command values.

As a result, the mirror 17 is always pointed in an appropriate direction to track the target Tg. For example,
theta axis control unit 22, the [psi axis control unit 23, respectively, a predetermined gain kappa _theta, kappa _[psi is set. Control means 7, the position information of the laser spot reaches the light receiving portion surface, kappa _theta, using kappa _[psi, to control the irradiation angle by the irradiation angle changing means 3 (Fig. 1).
As shown in FIG. 1, the calculation means 8 calculates the spatial coordinates (three-dimensional position) of the target Tg from the distance measurement values measured by the distance measurement means 6 and the angle measurement values of the θ-axis encoder 19 and the ψ-axis encoder 20. Information).

  As described above, the spatial coordinate measuring apparatus 1 obtains the spatial coordinates from the horizontal and vertical angle measurement values and the distance measuring means 6 by calculation. A large error occurs in the measured value. Here, FIG. 8 is a diagram showing the influence of air fluctuation and the relationship between the elapsed time and the light receiving unit output. When the flow of air (air fluctuation) fluctuates, a pressure distribution is generated in the air, the refractive index of the air changes, and the traveling direction of the laser light passing therethrough is bent. This is because the position of the reflected laser beam at the light receiving portion, that is, the light receiving portion output fluctuates as shown in FIG. 8 and affects the angle measurement values in the horizontal and vertical directions.

  In this embodiment, in order to solve this problem, the space coordinate measuring apparatus 1 is provided with an imaging unit 9, an image processing unit 10, the image processing result reflecting unit 11, and an optical device 21. In other words, the imaging unit 9 that is an observation optical system using the zoom lens 9b and the CCD camera 9a is incorporated in the angular position detection unit of the spatial coordinate measuring apparatus 1, and the degree of influence of air fluctuation is detected to detect the influence of air fluctuation. While avoiding or correcting, it is possible to avoid the influence of manufacturing errors of the retro reflector. The image processing result reflecting means 11 is a means for performing a series of control and processing for reflecting the position of the target Tg detected by the image processing means 10 in the calculation result of the spatial coordinates of the target Tg calculated by the calculating means 8.

FIG. 5A is a plan view of a position detection unit in this spatial coordinate measuring apparatus, and FIG. 5B is an end view taken along line AA of FIG. This will be described with reference to FIG. As shown in FIG. 5A, the imaging means 9 includes, for example, a CCD camera 9a that images the target Tg, and a zoom lens 9b that is an imaging lens. In this example, the image processing result reflecting unit 11 causes the imaging unit 9 to image the target Tg while the tracking control by the tracking control unit 7a is stopped, and detects the target position from the captured target image by the image processing unit 10. Let
The CCD camera 9a and the zoom lens 9b are integrally provided in the middle of the optical path between the mirror 17 and the target Tg so as to change the angle together with the mirror 17 in the mirror 17. As shown in FIG. 5B, the CCD camera 9a and the zoom lens 9b are configured to be angularly displaceable around the ψ axis together with the mirror 17 by driving the ψ axis motor 15 (FIG. 1). Further, as shown in FIG. 5A, the CCD camera 9a and the zoom lens 9b are configured to be angularly displaceable around the θ axis by driving the θ axis motor 14 (FIG. 1).

  The optical device 21 matches the optical axis of the laser beam Lb reflected by the mirror 17 toward the target Tg and the optical axis of the image pickup means 9, and sequentially includes first to third mirrors along the optical path. 26, 27, 28 and a dichroic mirror 29. The first to third mirrors 26, 27, 28 and the dichroic mirror 29 are also provided integrally with the mirror 17 so as to change the angle together with the mirror 17. Therefore, as shown in FIG. 1, the first to third mirrors 26, 27, 28, the dichroic mirror 29, the CCD camera 9 a, the zoom lens 9 b, and the mirror 17 are driven by the ψ axis motor 15 to drive the ψ axis. It is configured to be angularly displaceable around, and is configured to be angularly displaceable about the θ axis by driving the θ axis motor 14. The laser beam Lb emitted from the laser light source 2 and reflected by the mirror 17 is bent by the first to third mirrors 26, 27, and 28, and then bent again by the dichroic mirror 29, whereby the optical axis of the laser beam Lb toward the target Tg. And the optical axis of the imaging means 9 are made to coincide.

  The image processing means 10 detects the position of the target Tg (in this example, the center position TgO of the target Tg) by processing the image picked up by the image pickup means 9. The image processing unit 10 includes a contour extracting unit 30 and a target center position calculating unit 31. The contour extracting unit 30 extracts the contour of the image captured by the image capturing unit 9. The target center position calculating unit 31 calculates the center position TgO of the target Tg from the contour extracted by the contour extracting unit 30.

  Here, FIG. 6 is a diagram for explaining the influence of air fluctuation at the time of target image detection. This will be described with reference to FIG. As shown in FIG. 6, when a part of the contour image extracted by the contour extraction unit 30 is affected by air fluctuation, a target 32 is used that is not affected by air fluctuation in the contour image. The center position TgO of Tg is calculated. As shown in FIG. 1, when the contour extraction means 30 extracts the contour of an image, a determination unit 30a for determining whether or not there is an influence of air fluctuation, and the influence of the air fluctuation by the determination unit 30a. When it is determined that there is an extraction unit 30b that extracts the contour after waiting for the influence of air fluctuation to disappear or to be reduced to a predetermined range. The “predetermined range” is determined by experiments, simulations, or the like, for example, that the portion affected by air fluctuation is 1/3 or less of the entire contour image.

As shown in FIG. 6, if, for example, the portion 33 of the contour image that is affected by air fluctuation is 1/3 or less of the outer periphery of the target, the remaining 2/2 that is not affected by the air fluctuation in the contour image. The center position of the target Tg is calculated using three or more contour data.
FIG. 7A is a diagram illustrating a case where the influence of air fluctuation at the time of target image detection is large, and FIG. 7B is a case where there is no influence of air fluctuation at the time of target image detection. It is a figure explaining. This will be described with reference to FIG. As shown in FIG. 7A, when the portion 33 affected by air fluctuation covers the entire contour image, the determination unit 30a determines that there is an influence of air fluctuation, and the extraction unit 30b determines the contour of the image. Do not extract. As shown in FIG. 7B, when the influence due to the air fluctuation disappears, the extraction unit 30b extracts the contour when the influence due to the fluctuation disappears.

The target center position calculation means 31 calculates the center position TgO of the target Tg from the extracted contour. The image processing result reflecting means 11 reflects the center position TgO of the target Tg calculated as described above in the calculation result calculated by the calculation means 8. That is, the calculation means 8 determines whether the target is determined based on the angle measurement value and the distance measurement value of the θ-axis encoder 19 and the ψ-axis encoder 20 when there is no influence due to fluctuation or when the influence due to fluctuation is reduced to a predetermined range. The three-dimensional space coordinates of Tg are obtained.
As described above, when the contour of the image is extracted by the contour extracting means 30, the determining means 34 for determining whether or not the influence of the air fluctuation continues for a predetermined time or more, and the influence of the air fluctuation by the determining means 34. The spatial coordinate measuring device may be provided with a notification means 35 for notifying the measurer when it is determined that the time is determined to last for a predetermined time. The determination unit 34 is connected to the determination unit 30 a in the contour extraction unit 30.

The effect will be described.
(1) When the tracking control by the control means 7 is turned on and the laser beam Lb reaches the target Tg and the target Tg is moved to the position to be measured on the workpiece W and installed, the tracking is performed as follows. The laser beam Lb tracks the center of the target Tg by the controller 7a.
The laser light Lb emitted from the laser light source 2 reaches the target Tg via the irradiation angle changing means 3, the first to third mirrors 26, 27, 28, and the dichroic mirror 29 in order. The reflected light reflected by the target Tg returns to the space coordinate measuring apparatus 1 through substantially the same path. The light receiving unit 5 recognizes the position information of the reflected light. The control means 7 tracks the target Tg by changing the irradiation angle of the laser light Lb of the irradiation angle changing means 3 based on the position information from the light receiving unit 5. That is, the control means 7 causes the laser beam to automatically track the center of the target Tg (detected by the light receiving unit 5) by angularly displacing the mirror 17 so that the laser spot on the surface of the light receiving unit returns to the reference position O. Tracking control). At this time, the distance to the target Tg can be measured by the distance measuring means 6.

(2) The tracking control detected by the light receiving unit 5 by the tracking control unit 7a is turned off. Since tracking with the laser beam Lb is affected by air fluctuation as described above, the tracking control is turned off at this point.
(3) Next, the image processing result reflecting means 11 causes the imaging means 9 to image the target Tg (imaging process), and the image processing means 10 determines the amount of deviation between the center of the target Tg and the optical axis center of the imaging means 9. Let it be detected.
(4) The image processing result reflecting unit 11 drives the θ-axis motor 14 and the ψ-axis motor 15 by the tracking amount by the tracking control unit 7a, so that the center of the target Tg and the optical axis center of the imaging unit 9 are set. Match.

(5) In the image of the target Tg imaged by the imaging unit 9, the determination unit 30a of the contour extraction unit 30 determines whether there is an influence of air fluctuation when extracting the contour of the image. When the determination unit 30a determines that there is an influence due to air fluctuation, the extraction unit 30b extracts the image outline after waiting until the influence due to the air fluctuation disappears or is reduced to a predetermined range.
The target center position calculation means 31 calculates the center position TgO of the target Tg from the extracted contour and the angle measurement values of the θ-axis encoder 19 and the ψ-axis encoder 20 at the time of the contour extraction (image processing process).
(6) The computing means 8 is based on the measured angle value and the measured distance value of the θ-axis encoder 19 and the ψ-axis encoder 20 when there is no fluctuation effect or when the fluctuation influence is reduced to a predetermined range. Then, the three-dimensional space coordinates of the target Tg are obtained (image processing result reflection process).

  According to the spatial coordinate measuring apparatus 1 and the spatial coordinate measuring method according to this embodiment, the state of fluctuation at the time of coordinate measurement is confirmed by analyzing the state of the captured image of the target Tg by the image processing unit 10 as described above. Therefore, the center position TgO of the target Tg is obtained by using only the information of the portion 32 of the contour image that is not affected by the air fluctuation, or the center position TgO of the target Tg is obtained when the influence of the air fluctuation is eliminated. Can be sought. For this reason, it is possible to measure the three-dimensional space coordinates with high accuracy and at low cost, compared to the conventional technology provided with a cover or the like.

  In addition, since the position of the target Tg is detected using the contour image of the target Tg imaged using the imaging means 9, measurement can be performed without the influence of the assembly error of the mirror to the retroreflector, and high accuracy. Measurement of three-dimensional space coordinates is possible. In the measurement of the distance to the target Tg, the reflected light reflected from the mirror to the retroreflector is used, but there is no problem because the influence of the assembly error of the mirror to the retroreflector is very small.

Since the target Tg is magnified by the zoom lens 9b and imaged by the CCD camera 9a, high-precision three-dimensional spatial coordinates can be measured even if the target position is far away.
Since the image pickup means 9 and the optical device 21 are integrally provided on the mirror 17, the angular displacement of the image pickup means 9, the optical device 21, and the mirror 17 can be integrally made around the ψ axis by driving the ψ-axis motor 15. By driving the θ-axis motor 14, the imaging means 9, the optical device 21, and the mirror 17 can be angularly displaced integrally around the θ-axis.

The extracting unit 30b of the contour extracting unit 30 extracts the contour after waiting for the influence of air fluctuation to disappear or to be reduced to a predetermined range. Even in such an environment with air fluctuations, it is possible to calculate the spatial coordinates of the target Tg with high precision by performing fine control of extracting the contour when the influence of air fluctuations is reduced. .
When the contour of the image is extracted by the contour extracting means 30, the determining means 34 for determining whether or not the influence of the air fluctuation continues for a predetermined time or more, and the influence of the air fluctuation is determined by the determining means 34. When the spatial coordinate measuring apparatus 1 is provided with the notification means 35 for notifying the measurer when it is determined that it will last for more than the time, the measurer receives the notification by the notification means 35 and, for example, the air fluctuation Measures can be taken to mitigate the impact.

Another embodiment will be described.
(1) The image processing result reflecting unit 11 causes the imaging unit 9 to capture an image of the target Tg, and the image processing unit 10 performs image processing on the captured image to detect the position of the target Tg. The image processing result reflecting means 11 performs tracking control in which the tracking control unit 7a drives and controls the θ-axis motor 14 and the ψ-axis motor 15 based on the detected position of the target Tg to position the laser beam Lb in the target direction. Let it be done. In a state where the tracking control by the control means 7 is performed, the target Tg is moved to the position on the workpiece W to be measured and installed. At this time, the laser beam Lb emitted from the spatial coordinate measuring device 1 is directed in the target direction, and the distance to the target Tg can be measured by the distance measuring means 6.

(2) In the captured image of the target Tg, the determination unit 30a determines whether there is an influence of air fluctuation when extracting the contour of the image. When the determination unit 30a determines that there is an influence due to air fluctuation, the extraction unit 30b extracts the image outline after waiting until the influence due to the air fluctuation disappears or is reduced to a predetermined range. The target center position calculation means 31 calculates the center position TgO of the target Tg from the extracted contour and the angle measurement values of the θ-axis encoder 19 and the ψ-axis encoder 20 at the time of the contour extraction.
Similar to the above-described embodiment, when extracting the contour of an image, an informing means for informing the measurer when the influence of air fluctuation continues for a predetermined time or more may be provided.

(3) The calculation means 8 is based on the measured angle value and the measured distance value of the θ-axis encoder 19 and the ψ-axis encoder 20 when there is no influence of fluctuation or when the influence of fluctuation is reduced to a predetermined range. The three-dimensional space coordinates of the target Tg are obtained.
By the way, the tracking control in which the position of the return beam of the laser beam is detected and tracked by the light receiving unit 5 can be tracked at high speed, but there are restrictions on the detection range of the light receiving unit 5 and the like, and the target Tg is moved. Therefore, it is necessary to always move the mirror of the target Tg toward the space coordinate measuring device accurately, and the measurement workability is slightly worse.

  On the other hand, in the tracking control based on the position of the target Tg detected by the image processing unit 10 as in this embodiment, the mirror of the target Tg is placed on the spatial coordinate measuring device side so that the measurement by the interferometer is not interrupted. However, the workability is improved compared to the tracking control detected by the light receiving unit 5. Moreover, since the state of the fluctuation at the time of coordinate measurement can be confirmed by analyzing the state of the captured image of the target Tg by the image processing means 10, only the information on the portion 32 that is not affected by the fluctuation of the air in the contour image is used. Thus, the center position TgO of the target Tg can be obtained, or the center position TgO of the target Tg can be obtained when the influence of the air fluctuation is eliminated. For this reason, it is possible to measure the three-dimensional space coordinates with high accuracy and at low cost, compared to the conventional technology provided with a cover or the like.

  When the influence of air fluctuation continues for a long time, a plurality of contours of the target image are extracted by the contour extraction unit 30, and the target center position calculation unit 31 calculates the center position of the target Tg from the data obtained by averaging the plurality of extracted measurement results. TgO may be calculated. The target center position calculation means 31 can calculate the center position TgO of the target Tg with high accuracy from the averaged data. Thus, even when there is an influence of fluctuation, highly accurate three-dimensional spatial coordinates can be measured.

DESCRIPTION OF SYMBOLS 1 ... Spatial coordinate measuring device 2 ... Laser light source 3 ... Irradiation angle change means 5 ... Light-receiving part 6 ... Distance measuring means 7 ... Control means 8 ... Calculation means 9 ... Imaging means 9b ... Zoom lens 10 ... Image processing means 11 ... Image processing Result reflecting means 14 .theta.-axis motor (first driving means)
15... Ψ-axis motor (second driving means)
DESCRIPTION OF SYMBOLS 21 ... Optical apparatus 30 ... Contour extraction means 30a ... Determination part 30b ... Extraction part 31 ... Target center position calculation means 34 ... Determination means 35 ... Notification means Lb ... Laser beam Tg ... Target W ... Measurement object

Claims (10)

A spatial coordinate measuring device for obtaining a spatial coordinate of a target provided on a measurement object,
A laser light source that emits laser light; an irradiation angle changing unit that can change an irradiation angle of the laser light emitted from the laser light source; and a laser beam that is irradiated to the moving target by the irradiation angle changing unit. A light receiving unit for recognizing the position information of the reflected light of the reflected laser light, and the target can be tracked by changing the irradiation angle of the laser light of the irradiation angle changing means based on the position information recognized by the light receiving unit. And a distance measuring means for receiving the reflected light of the laser light reflected by the target and measuring the distance from the laser light emitted by the laser light source and the received reflected light to the target, and the distance measurement Calculating means for calculating the spatial coordinates of the target from the distance measured by the means and the irradiation angle of the laser beam,
Imaging means for imaging the target;
Image processing means for detecting the position of the target by performing image processing on an image captured by the imaging means;
By changing the irradiation angle of the laser light of the irradiation angle changing means based on the position of the target detected by the image processing means and the spatial coordinates of the target calculated by the calculating means by the control means, an image processing result reflecting means for reflecting the position of the target detected by said image processing means on the calculation results of the spatial coordinates of the target to be calculated by the calculating means,
A spatial coordinate measuring device characterized in that is provided .   2. The spatial coordinate measuring apparatus according to claim 1, wherein a zoom lens is used as an imaging lens of the imaging means.   3. The spatial coordinate measuring apparatus according to claim 1, wherein the irradiation angle changing unit is a first and second driving unit capable of adjusting an angle of the laser beam about two axes orthogonal to the target. The imaging means is attached to the irradiation angle changing means, and the optical axis of the laser light that is angle-adjusted by the first and second driving means and travels toward the target coincides with the optical axis of the imaging means Spatial coordinate measuring device provided with optical equipment. In the space coordinate measuring device according to any one of claims 1 to 3,
The image processing result reflecting means stops the tracking by the control means, and in the stopped state, causes the imaging means to image the target, performs image processing on the captured image by the image processing means, and positions of the target And the control means changes the irradiation angle of the laser light of the irradiation angle changing means based on the position of the target detected by the image processing means, and
The calculation means is a spatial coordinate measurement device that calculates the spatial coordinates of the target from the changed irradiation angle and the distance measured by the distance measurement means. In the space coordinate measuring device according to any one of claims 1 to 3,
The image processing result reflecting means causes the imaging means to pick up the target, detects the position of the target by performing image processing on the picked-up image by the image processing means, and detects the target by the control means. Changing the irradiation angle of the laser beam of the irradiation angle changing means based on the position of the target, and
The calculation means is a spatial coordinate measurement device that calculates the spatial coordinates of the target from the changed irradiation angle and the distance measured by the distance measurement means. In the space coordinate measuring device according to any one of claims 1 to 5,
The image processing unit includes a contour extracting unit that extracts a contour of an image captured by the imaging unit, and a target center position calculating unit that calculates a center position of the target from the contour extracted by the contour extracting unit. Spatial coordinate measuring device. The spatial coordinate measuring device according to claim 6,
The contour extracting means determines whether there is an influence due to air fluctuation when extracting the contour of the image, and when it is determined that there is an influence due to air fluctuation, A space coordinate measuring apparatus comprising: an extraction unit that extracts an outline after waiting for the influence of fluctuation to disappear or to be reduced to a predetermined range.   8. The spatial coordinate measuring apparatus according to claim 6, wherein when the contour extracting unit extracts the contour of the image, it determines whether or not the influence of air fluctuation continues for a predetermined time or more. And a notifying means for notifying the measurer when it is determined by the determining means that the influence of air fluctuations continues for a predetermined time or longer.   9. The spatial coordinate measurement apparatus according to claim 6, wherein a plurality of contours of the image are extracted by the contour extraction unit, and the target center position calculation unit calculates the plurality of extracted measurement results. A spatial coordinate measuring device that calculates the center position of the target from the averaged data. A spatial coordinate measurement method for obtaining a spatial coordinate of a target provided on a measurement object,
A laser light source that emits laser light; an irradiation angle changing unit that can change an irradiation angle of the laser light emitted from the laser light source; and a laser beam that is irradiated to the moving target by the irradiation angle changing unit. A light receiving unit for recognizing the position information of the reflected light of the reflected laser light, and the target can be tracked by changing the irradiation angle of the laser light of the irradiation angle changing means based on the position information recognized by the light receiving unit. And a distance measuring means for receiving the reflected light of the laser light reflected by the target and measuring the distance from the laser light emitted by the laser light source and the received reflected light to the target, and the distance measurement Using the calculation means for calculating the spatial coordinates of the target from the distance measured by the means and the irradiation angle of the laser beam,
An imaging process for imaging the target;
An image processing process for detecting the position of the target by performing image processing on an image captured in the imaging process;
By changing the irradiation angle of the laser light of the irradiation angle changing means based on the position of the target detected in the image processing process and the spatial coordinates of the target calculated by the calculating means by the control means, an image processing result reflecting process for reflecting the calculation result of the spatial coordinates of the target for calculating the detected position of the target by the computing means by the image processing step,
Spatial coordinate measuring method characterized by including the.

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