JP6110111B6 - Dust remover - Google Patents

Description

  The present invention removes dust or contaminated fine particles adhering to the surface of an object to be cleaned such as a substrate (glass substrate for display, ceramic substrate, printed circuit board, etc.) or a sheet, floats it, and removes the suspended matter by suction. Relates to the device.

  2. Description of the Related Art Conventionally, for example, a dust removal device disclosed in Patent Document 1 is known as a dust removal device for dust or contaminated fine particles adhering to a substrate (glass substrate for display, ceramic substrate, printed circuit board, etc.) or sheet. The dust removing device includes an air supply chamber having an air discharge slit for injecting high-pressure air, and an air intake chamber having air intake slits on both sides of the air supply chamber. High-pressure air is sprayed toward the object to be cleaned, and dust or contaminated fine particles (hereinafter simply referred to as dust) adhering to the object to be cleaned are peeled off by the wind pressure, and then passed through the air intake slits into each intake chamber. Configured to be removed by suction.

  In addition, in the patent document 2, the applicant of the present application proposes an air curtain device in which long air discharge slits are formed intermittently or continuously along the longitudinal direction of the exterior body (air supply chamber). The device shown in Patent Document 2 is used as an air curtain device that blows off water droplets on a glass substrate in the cleaning field or the like. The intake chamber shown in Patent Document 1 is provided on both sides of an air supply chamber that injects high-pressure air. If it is arranged, it can be diverted to a dust removing device.

JP 2006-346515 A Japanese Patent Application 2000-277252 (Japanese Patent Laid-Open No. 2002-89925)

  In the apparatus shown in Patent Documents 1 and 2, an air discharge slit for injecting high-pressure air is formed along the longitudinal direction of the air supply chamber. 2 discloses a method of intermittently forming a plurality of air discharge slits and a method of forming a series of continuous air discharge slits, but when a plurality of air discharge slits are intermittently formed, Since there is a portion where the air discharge slit is not partially formed, that is, there is a portion where air is not sprayed on the substrate, there is a concern that the dust removal effect is reduced. On the other hand, when the air discharge slit is continuously opened, there is a concern that the state in which the width of the long intake slit cannot be kept constant due to the internal pressure of the air supplied into the air supply chamber is concerned. . That is, when a continuous intake slit is formed along the longitudinal direction of the supply chamber, the intake slit becomes a break, and the intake slit portion that becomes a break is opened by the internal pressure of the supply chamber. Since the injection pressure of the high-pressure air injected from the air cannot be kept constant, there is a problem that a stable dust removal effect cannot be exhibited due to the strength of the injection pressure.

  Such a problem also applies to an intake slit that sucks air at high speed. That is, when the intake slit is continuously formed along the longitudinal direction of the intake chamber, the negative slit in the supply chamber locally narrows the intake slit, resulting in non-uniform air suction pressure. When the dust cannot be completely sucked from the intake slit, the dust blown off by the high-pressure air is scattered in a clean room or the like where the dust remover is installed, and the clean environment is also impaired.

  Accordingly, the present invention has been made paying attention to the above-mentioned problems, and effectively cleans the object to be cleaned by ejecting stable uniform air at a high pressure from a slit-like air discharge port formed along the longitudinal direction of the clean head. A first object is to provide a dust removing device capable of separating dust from the surface of the steel.

  In addition, a second object of the present invention is to provide a dust removing device that can stably suck dust separated from the surface of an object to be cleaned by the jetted high-pressure air and can effectively suppress dust scattering.

  A dust removing device according to the present invention includes a clean head including an air supply chamber that injects high-pressure air and a pair of intake chambers that are located on both sides of the air supply chamber and sucks air. The high-pressure air is jetted toward the upper surface of the object to be cleaned that is transported on the transport path by the air supply chamber, and dust adhering to the object to be cleaned is separated and floated. In the dust removing apparatus configured to be sucked by the chamber, a plurality of rows of air discharge ports are opened in a slit shape along the longitudinal direction of the clean head, and the ends of the air discharge ports of each row are formed. The air discharge ports in each row are arranged in a staggered manner so that the portions overlap.

  Further, the dust removing device of the present invention is characterized in that a plurality of rows of air suction ports communicating with the intake chamber are arranged in a staggered manner on both sides of the air discharge port in parallel with the air discharge port.

  Moreover, the dust removing apparatus of the present invention is characterized in that a recess for generating a turbulent flow is formed at least on the inner edge side of the lower end of the air suction port.

  In the dust removing device of the present invention, an inner pipe having both ends opened in the air supply chamber is disposed, and a discharge opening is formed in the inner pipe, and the pressure is fed from the air supply means into the air supply chamber. 2/3 of the air flow into the inner pipe, the remaining 1/3 separately flows between the inner pipe and the air supply chamber, and half of the air that has flowed into the inner pipe. Is discharged into the air supply chamber through the discharge opening hole, and the other half is discharged into the air supply chamber from the other end of the inner pipe, and these air and the air are directly introduced into the air supply chamber. Further, the air is uniformly ejected from the air discharge port toward the object to be cleaned.

  In the dust removing device of the present invention, an inner pipe having both ends opened in each intake chamber is formed, an intake opening is formed in each inner pipe, and the air in the intake chamber is discharged by an intake means. At the time of suction, 2/3 of the air amount is sucked separately from the inner pipe, the remaining 1/3 is sucked separately from the inner pipe and the intake chamber, and half of the air sucked from the inner pipe is further reduced. The suction pipe is sucked into the inner pipe through the intake opening hole, and the remaining half is sucked from the other end of the inner pipe.

  In the present invention, the high-speed air jetted from the air discharge port toward the object to be cleaned that is transported on the transport path collides with the object to be cleaned, and the dust adhering to the object to be cleaned is peeled off by the wind pressure. The air is sucked into each intake chamber from the suction port. Since the plurality of rows of air discharge ports formed in the air supply chamber are arranged in parallel with each other in a staggered manner, the slit width changes due to the local expansion of the air discharge ports due to the internal pressure of the air supply chamber. Therefore, since the slit width of each air discharge port can be kept constant, air can be uniformly injected from each air discharge port, and variations in injection pressure can be suppressed.

  In addition, by arranging a plurality of rows of air suction ports formed in the intake chamber in a staggered manner, the slit width of each air suction port can be kept constant, so that air can be uniformly sucked from each air discharge port. it can. Furthermore, since the hollow portion is formed at the inner edge of the air suction port, the flow velocity of the high-speed air injected from the air discharge port changes in the hollow portion, and the Kalman is formed in the hollow portion and the air suction port communicating with the hollow portion. A vortex (turbulent flow) is generated, and the air curtain effect caused by the Karman vortex (turbulent flow) causes the dust separated from the object to be washed to stay at the inlet of the air inlet, and the dust is effective from the air inlet to the intake chamber. Can be inhaled.

It is sectional drawing of the clean head which shows one Example of this invention. It is a front view of a dust remover same as the above. It is a top view of a dust remover same as the above. FIG. 3 is a partially enlarged bottom view showing the arrangement of the air discharge port and the air suction port. It is the same as the above and it is sectional drawing which expanded a part of air suction port which shows the turbulent flow in an air suction port.

  Hereinafter, embodiments of the dust removing device according to the present invention will be described in detail with reference to the accompanying drawings.

  In FIG. 1, P is a plate such as a liquid crystal substrate as an object to be cleaned, W is a transport path of a plate P constituted by a roller conveyor, and the plate P is transported along the transport path W in the direction of arrow A. The dust removing device 1 is disposed on the upper portion of the conveyance path W so as to face the conveying path W.

  The dust removing apparatus 1 includes a clean head 2 made of, for example, stainless steel, and an air supply chamber 11 that injects high-pressure air onto the plate P at the center of the clean head 2 to separate dust on the surface of the plate P. And a pair of intake chambers 21 and 21 for sucking dust that has been separated from the plate P by the high-pressure air and floated on both sides of the air supply chamber 11.

  A cylindrical inner pipe 12 having both ends opened is disposed inside the air supply chamber 11, and an upper portion of the air supply chamber 11 in which the inner pipe 12 is disposed has a cylindrical inner wall that substantially surrounds the inner pipe 12. A portion 13 is formed, and a double structure of the inner wall portion 13 and the inner tube 12 is formed. An air supply duct 14 for supplying high-pressure air from an air supply means (not shown) to the air supply chamber 11 is connected to one end of the air supply chamber 11, and the high-pressure air supplied into the air supply duct 14 is The air supply chamber 11 and the inner pipe 12 are branched and sent, and a plurality of discharge openings 15 for discharging high-pressure air supplied into the inner pipe 12 to the air supply chamber 11 on the upper side of the inner pipe 12. A slit-like air discharge port 16 for injecting high-pressure air onto the plate P is formed at the bottom of the air supply chamber 11. That is, the injection directions from the discharge opening 15 of the inner pipe 12 and the air discharge port 16 of the air supply chamber 11 are injected in opposite directions. Further, both corners of the lower portion of the air supply chamber 11 forming the air discharge port 16 form a funnel shape having a continuous gentle curved surface, and the air discharge port 16 opens in a direction perpendicular to the plate P at the bottom thereof. ing.

  The intake chambers 21 and 21 have substantially the same configuration as the air supply chamber 11 and will not be described in detail. Cylindrical inner pipes 22 and 22 are arranged above the intake chambers 21 and 21, respectively, and curved inner walls 23 are formed on the upper parts of the intake chambers 21 and 21 so as to surround the inner pipes 22 and 22. Yes. A plurality of intake openings 25 for sucking air in the intake chambers 21 and 21 are formed in the upper portions of the inner pipes 22 and 22, and a first air suction for sucking outside air into the intake chambers 21 and 21. A port 26 and a second air suction port 27 are formed.

  In the above configuration, the length of the inner pipes 22 and 22 with respect to the intake chambers 21 and 21 and the ratio of the area between the inner pipes 22 and 22 and the intake opening hole 25 formed in the inner pipes 22 and 22 will be described. These relationships are the same in the air supply chamber 11, and the intake chambers 21 and 21 will be described as representative examples with reference to FIG. As shown in FIG. 3, the length L <b> 2 of the inner pipes 22, 22 is shorter than the length L <b> 1 of the intake chambers 21, 21, and the region where the intake opening hole 25 is formed in the intake chambers 21, 21 is the intake chamber 21. , 21 in the vicinity of the central portion in the longitudinal direction, and the size of the formation region is preferably {(1/2) × L2}. Further, the {(1/4) × L2} portion at both ends of the inner pipes 22 and 22 is not formed with an intake opening 25, and the length of {(1/4) × L2} from the middle point to the left and right. It is preferable to form the intake opening hole 25 only in this portion.

  When the amount of air sucked from the intake duct 24 is (V), the amount V1 sucked from the inner tube 22 is {(2/3) × V}, and the inner wall portion 23 and the inner tube 22 The cross-sectional shapes of the inner wall portion 23 and the inner tube 22 are determined so that the amount V2 sucked from between becomes {(1/3) × V}. As a result, the air amount {(2/3) × V} is sucked from the inner pipe 22, and further, {(1/3)} from the plurality of intake opening holes 25 arranged in the central portion of the inner pipe 12. XV} is sucked from the end of the inner pipe 22 by the amount {(1/3) × V}, whereby the first and second air suctions formed in the intake chambers 21 and 21 respectively. Air is evenly sucked from the ports 26 and 27.

  Similarly to the intake duct 24, the amount of high-pressure air introduced from the air supply duct 14 is (V) in the air supply chamber 11, and the amount V1 pumped into the air supply duct 14 is { (2/3) × V}, the inner wall portion 13 of the air supply chamber 11 and the air supply so that the amount V2 introduced between the air supply chamber 11 and the inner pipe 12 becomes {(1/3) × V}. The cross-sectional shape of the air duct 14 is determined. Thus, the amount of {(2/3) × V} high-pressure air fed to the inner pipe 12 is then {(1/3) from the plurality of discharge opening holes 15 arranged in the central portion of the inner pipe 12. ) × V} and {(1/3) × V} from the end of the inner pipe 12 are discharged into the air supply chamber 11 and further formed in the air supply chamber 11. Equalized from the slit-like air discharge port 16 and sprayed to the plate P.

  Next, in the above configuration, the air discharge port 16 formed in the air supply chamber 11, and the details of the first air suction port 26 and the second air suction port 27 formed in the intake chambers 21, 21 are as follows. The arrangement of the first air suction port 26 and the second air suction port 27 (only one of both sides) will be described with reference to FIG. As shown in FIG. 4, the air discharge ports 16 have two rows of air discharge ports 16 formed in parallel to each other in the central portion in the width direction of the supply chamber 11 along the longitudinal direction of the supply chamber 11. The air discharge ports 16 in each row are arranged in a staggered manner so that the end portions thereof overlap each other. The air discharge port 16 has a slit width of approximately 0.65 mm, a total length of approximately 227 mm, and the wrap amount at the end of each air discharge port 16 is approximately 1 mm.

  The first air suction ports 26 formed in the intake chambers 21 and 21 are formed intermittently at an interval of about 3 mm outside the air discharge ports 16 so as to be substantially parallel to the air discharge ports 16. Furthermore, a second air suction port 27 is formed on the outside of the first air suction port 26 so as to be different from the first air suction port 26. As shown in FIG. 1, the first air suction port 26 has a slit width of approximately 6 mm and is inclined 60 ° toward the outside. The second air suction port 27 has a slit width of approximately 2 mm and is inclined by 75 ° toward the outside.

  In addition, as shown in FIG. 5, a curved recess 28 is formed at the lower end of the first air inlet 26, and an inclined recess 29 is formed at the lower end of the second air intake 27. Is formed. In addition, although the hollow part 28 formed in the said 1st air suction inlet 26 is formed so that both the edges of the 1st air suction inlet 26 may be straddled, the center of the hollow part 28 has shifted | deviated inside, Most of them are formed on the inner edge side of the first air suction port 26. On the other hand, the recess 29 formed in the second air suction port 27 is a flat surface formed only on the inner edge side of the second air suction port 27, and its inclination angle is relative to the bottom surfaces of the intake chambers 21, 21. 15 degrees.

  In the present embodiment configured as described above, air is pumped from the air supply duct 14 to the air supply chamber 11 by an air supply means (not shown), and 2/3 of the air amount is supplied to the inner pipe 12 and the remaining air. 1/3 is supplied separately between the inner pipe 12 and the air supply chamber 11. Further, half of the air flowing into the inner pipe 12 is discharged into the air supply chamber 11 from the discharge opening 15, and the other half is discharged into the air supply chamber 11 from the other end of the inner pipe 12. . The air discharged into the air supply chamber 11 via the inner pipe 12 and the air directly introduced into the air supply chamber 11 are combined to form an air discharge port 16 formed at the bottom of the air supply chamber 11. It is sprayed uniformly toward the plate P. The high-speed air jetted vertically from the air discharge port 16 toward the plate P peels off the dust adhering to the plate P by its wind pressure, and then each of the dust from the first and second air suction ports 26 and 27 together with the dust. The air is sucked into the intake chambers 21 and 21.

  Further, when the air in the intake chamber 21 is sucked, 2/3 of the air amount is sucked separately from the inner pipe 22 and the remaining one third is sucked separately from between the inner pipe 22 and the intake chamber 21. Furthermore, half of the air sucked from the inner pipe 22 is sucked into the inner pipe 22 through the intake opening hole 25, and the other half is sucked from the other end of the inner pipe 22, Air is uniformly sucked from the first and second air suction ports 26 and 27.

  Further, the high-speed air jetted vertically from the air discharge port 16 toward the plate P collides with the plate P and diffuses radially, and the first air suction port 26 and further the second air outside thereof. Although it is sucked into the intake chambers 21 and 21 together with dust from the suction port 27, the gap between the clean head 1 and the plate P is extremely narrow as 1 to 1.5 mm, and the inner edge of the first air suction port 26 is curved. Therefore, as shown in FIG. 5, the flow speed of the high-speed air changes in the wide hollow portion 28, and the hollow portion 28 and the first air communicating with the hollow portion 28 are formed. A Karman vortex (turbulent flow) is generated in the suction port 26. Thereby, an air curtain by Karman vortex (turbulent flow) is formed at the entrance portion of the first air suction port 26, and the dust separated from the plate P stays at the entrance portion of the first air suction port 26. The air is sucked into the intake chamber 21 through the air suction port 26. In addition, since the second air suction port 27 having the recessed portion 29 is also formed in the outer side of the first air suction port 26, the second air suction port 27 is formed outward from the first first air suction port 26. The leaked dust can be prevented from leaking due to the air curtain effect of the recess 29 of the second air suction port 27, and can be sucked and captured by the second air suction port 27.

  The air discharge ports 16 formed in the air supply chamber 11 are formed intermittently, but the two rows of air discharge ports 16 are arranged in a staggered manner in parallel with each other. 16 functions as a series of continuous air discharge ports, and there is no portion where air is not jetted partially toward the plate P. Further, since the air discharge ports 16 in each row are formed intermittently, the air discharge ports 16 do not change because the air discharge ports 16 are locally expanded by the internal pressure of the air supply chamber 11. The 16 slit widths can be kept constant. For this reason, air can be uniformly injected from each air discharge port 16, and variation in injection pressure can be suppressed. Further, the first air suction port 26 and the second air suction port 27 are arranged in a staggered manner similarly to the air discharge port 16 so that the first air suction port 26 and the second air suction port 27 are uniform. The air can be sucked.

  Although the present invention has been described in detail above, the present invention is not limited to the above-described embodiments, and various modifications can be made within the scope of the gist of the present invention. For example, in the above-described embodiment, an example in which the two rows of air discharge ports 16 and the first air suction ports 26 and the second air suction ports 27 are provided has been described, but three rows or more may be provided. Also, the dimensions of each part are not limited to the above-described embodiments.

DESCRIPTION OF SYMBOLS 1 Dust removal apparatus 2 Clean head 11 Air supply chambers 12 and 22 Inner pipe 14 Air supply duct 15 Discharge opening hole 16 Air discharge port 21 Intake chamber 24 Intake duct 25 Intake opening hole 26 1st air suction port 27 2nd Air inlet 28, 29 Recessed part P Plate (object to be cleaned)
W Transport path

Claims (5)

A clean head having an air supply chamber for injecting high-pressure air and a pair of air intake chambers on both sides of the air supply chamber for sucking air is provided. A configuration in which high-pressure air is jetted toward the upper surface of an object to be cleaned that is transported on the transport path by an air chamber to separate and float dust adhering to the object to be cleaned, and the floating object is sucked in the intake chamber. In the dust remover
A plurality of rows of air discharge ports are opened in a slit shape along the longitudinal direction of the clean head, and the air discharge ports of the rows are overlapped so that the ends of the air discharge ports of the rows overlap. A dust remover characterized in that the outlets are arranged in a staggered pattern.   2. The dust removing device according to claim 1, wherein a plurality of rows of air suction ports communicating with the intake chamber are arranged in a staggered manner on both sides of the air discharge port in parallel with the air discharge port. The dust removing device according to claim 1 or 2, wherein a recess for generating a turbulent flow is formed at least on the inner edge side of the lower end of the air suction port.   An inner pipe having both ends opened in the air supply chamber is disposed, and a discharge opening is formed in the inner pipe, and the air pressure-fed into the air supply chamber from the air supply means 2/3 flows into the inner pipe, and the remaining 1/3 flows separately between the inner pipe and the air supply chamber, and half of the air flowing into the inner pipe passes through the discharge opening hole. The air is discharged into the air supply chamber, and the other half is discharged from the other end of the inner pipe into the air supply chamber. The dust removing device according to any one of claims 1 to 3, wherein the dust is uniformly ejected from an air discharge port toward the object to be cleaned.   In each intake chamber, an inner pipe having both ends opened is disposed, and an intake opening is formed in each inner pipe. When the air in the intake chamber is sucked by the intake means, the amount of air is reduced to 2 / 3 is sucked separately from the inner pipe, the remaining one third is sucked separately from between the inner pipe and the intake chamber, and half of the air sucked from the inner pipe passes through the intake opening hole. The dust removing device according to any one of claims 1 to 3, wherein the dust is sucked into the inner pipe and the remaining half is sucked from the other end of the inner pipe.

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