JP6151927B2 - Active vibration isolator - Google Patents

Description

  The present invention relates to an active vibration isolator for vibration isolation from an installation floor and attenuation of vibration of the apparatus itself in a vibration isolator such as a precision measuring / processing apparatus and a semiconductor exposure apparatus.

  As precision instruments such as precision measurement / processing devices and semiconductor exposure devices become more accurate, vibration isolation devices used in such devices are required to have higher vibration isolation performance. In response to this requirement, a conventional vibration isolator employs a method in which a sensor for controlling the motion of the vibration isolation table and an active actuator are combined as one set and each point is individually controlled. However, this method has a problem in that the driving forces of the active actuators interfere with each other, causing unintended vibrations.

  As a prior art, in Patent Document 1, in order to reduce the interference of the driving force between the active actuators with a mechanical arrangement, there are two degrees of freedom in the vertical translation of the vibration-isolated device supported elastically and the rotation around its axis. Assuming that the elastic support center coincides with the center of gravity, the conversion between the controlled variable having a total of six degrees of freedom and the manipulated variable, consisting of four degrees of freedom of translation in the horizontal plane and rotation around its axis, It has been proposed to provide a calculation control means that performs based on the two-dimensional positional relationship between the sensor and the active actuator.

JP 2002-122179 A

  In Patent Document 1, a method of reducing interference between control forces of active actuators with a mechanical arrangement is employed. However, this method has a problem that the actuator and elastic support of the vibration isolator are restricted by mechanical arrangement. In addition, interference that cannot be removed by mechanical arrangement alone can be ignored, or a control system that considers a state in which each horizontal translational motion and rotational motion about its axis are coupled can be applied. However, since there is no description about a specific control system in consideration of the coupling, there is a problem that unintended vibration occurs.

  In order to solve this problem, an active vibration isolation device according to the present invention includes a vibration isolation table for mounting a vibration isolation object, a plurality of elastic supports that support the vibration isolation table, and a vibration isolation table. A plurality of position measuring means for measuring displacement, a plurality of driving means for driving the vibration isolation table, and a position target value commander for outputting a target displacement and a target rotation amount at a predetermined position with respect to the vibration isolation table A displacement calculation unit that inputs outputs of the plurality of position measuring means, calculates displacements and rotation amounts at the predetermined position, and outputs the position target value command unit and the displacement conversion calculation. A position control unit that calculates and outputs a translational force and a torque corresponding to the difference at a point of the predetermined position based on a difference in output of the unit, and inputs the output of the displacement calculation unit, and the plurality of elastic supports That of the body A non-interacting control unit that outputs an operation for canceling the motion accompanied by interference generated at the point of the predetermined position by the displacement and the elastic force, and the output of the position control unit and the non-interacting control And a thrust calculation unit that outputs a command to each of the plurality of driving means based on the output of the unit.

  According to the active vibration isolator according to the present invention, by providing the control circuit of the non-interference control loop, the elastic support and the mounting device cannot be freely arranged, that is, subject to restrictions due to mechanical arrangement. On the other hand, while the mechanical arrangement of the elastic support and the mounting device is relatively free, it is possible to reduce the interference between the shafts and prevent the control performance from deteriorating. Even when the barycentric point changes, the non-interacting control can be easily maintained by recalculating the control parameters.

It is a block diagram of the active vibration isolator which concerns on Example 1 of this invention. It is a block diagram of the active vibration isolator which concerns on Example 1 of this invention. It is a figure which shows the connection of the active vibration isolator which concerns on Example 1 of this invention, and a block diagram. It is a block diagram of the active vibration isolator which concerns on Example 2 of this invention. It is a block diagram of the active vibration isolator which concerns on Example 2 of this invention. It is a block diagram of the active vibration isolator which concerns on Example 3 of this invention. It is a block diagram of the active vibration isolator which concerns on Example 3 of this invention. It is a figure which shows the connection of the active vibration isolator which concerns on Example 4 of this invention, and a block diagram. It is a figure which shows the connection of the active vibration isolator which concerns on Example 5 of this invention, and a block diagram.

  Embodiments of the present invention will be described below with reference to the accompanying drawings. In each embodiment, a point at a predetermined position as a coordinate reference is made to coincide with the center of gravity when no displacement or rotation occurs in the active vibration isolator, for example, X, Y, Z as shown in the figure Although the three-axis coordinate system orthogonal to each other and the direction of each axis are defined, the present invention is not limited to these.

  FIG. 1 shows the configuration of an active vibration isolator according to Embodiment 1 of the present invention. FIG. 2 is a block diagram for controlling the active vibration isolator according to the first embodiment of the present invention. FIG. 3 shows a connection relationship between a plurality of elements mounted on the active vibration isolator according to the first embodiment of the present invention and a block diagram.

  1 and 2, the active vibration isolator is a vibration isolation table 1 (device main body) on which a vibration isolation object is mounted, three elastic supports 2r, 2l, and 2b, and displacement in the Y-axis direction. A displacement sensor 3b to detect, a displacement sensor 3d to detect displacement in the Z-axis direction, a linear motor 4b to drive in the Y-axis direction, a linear motor 4d to drive in the Z-axis direction, and a displacement in the Y-axis direction are detected. Displacement sensor 3c, displacement sensor 3e that detects displacement in the Z-axis direction, linear motor 4c that drives in the Y-axis direction, linear motor 4e that drives in the Z-axis direction, and displacement sensor that detects displacement in the X-axis direction 3a, a displacement sensor 3f that detects displacement in the Z-axis direction, a linear motor 4a that drives in the X-axis direction, and a linear motor 4f that drives in the Z-axis direction. Further, the active vibration isolator includes a position target value command unit 6, a center-of-gravity point displacement coordinate conversion calculation unit 7 (displacement calculation unit), a position control unit 8, a thrust distribution calculation unit 9 (thrust calculation unit), And a non-interacting control unit 10.

  The displacement sensors 3b and 3c as position measuring means are arranged at different positions in the XZ plane, and the displacement sensors 3d, 3e, and 3f as position measuring means are also different from each other in the XY plane. Placed in position.

  With the above configuration, by combining the outputs from the displacement sensors 3a to 3f, in the 6-degree-of-freedom system having the center of gravity described below as the origin, the displacement in the X, Y, and Z axial directions at the center of gravity and The amount of rotation about each of the X, Y, and Z axes can be detected.

  Here, the center of gravity refers to the center of gravity when all the devices supported by the elastic supports 2b, 2r, and 2l, such as the mounting apparatus of the active vibration isolator and the vibration isolation table 1, are considered as one rigid body. It is.

  On the other hand, the linear motors 4b and 4c are arranged at different positions in the XZ plane, and the linear motors 4d, 4e, and 4f are arranged at positions in the XY plane. With the above configuration, by combining the driving of the linear motors 4a to 4f (a plurality of driving means), in the 6-degree-of-freedom system having the center of gravity as the origin, translation in the X, Y, and Z axial directions, Desired driving can be performed for the rotation amounts around the Y and Z axes.

  Next, the control circuit of the position control loop for performing the position control will be specifically described below with reference to FIGS.

  The control circuit of the position control loop includes the displacement sensors 3a to 3f, the position target value command unit 6, the center-of-gravity point displacement coordinate conversion calculation unit 7, the position control unit 8, the thrust distribution calculation unit 9, and the linear motors 4a to 4a. 4f and has connections as shown in FIG. 2 and FIG.

  In the center-of-gravity point displacement coordinate transformation calculation unit 7, based on the outputs from the displacement sensors 3 a to 3 f, the X-, Y-, and Z-axis displacements at the center of gravity of the 6-degree-of-freedom system with the center of gravity as the origin, and , The rotation amount around each axis of Z is calculated. With respect to the displacement in the X, Y, and Z axis directions at the center of gravity of the 6-degree-of-freedom system with the center of gravity as the origin, and the rotation amount around the X, Y, and Z axes at the center of gravity, the displacement sensors 3a to 3f The output is expressed by the following equation (1) from the respective positional relationships.

Here, P _P is a matrix representing outputs from the displacement sensors 3a to 3f, and in detail, p _bx , p _ry , p _ly , p _rz , p _lz , and p _bz are respectively given to the respective displacement sensors. The output value from each of 3a, 3b, 3c, 3d, 3e, and 3f is represented. Also, P _G is a matrix comprising a X, Y, in the direction of each axis in the Z displacement of the center of gravity of the six degrees of freedom system whose origin the center of gravity, X at the center of gravity, Y, the rotation amount around the axis of the Z, _{specifically,} px G, py _G, and pz _G represents X at the center of gravity, Y, the displacement of each axial Z, pωx _G, pωy _G, and Piomegaz _G is X at the center of gravity, Y, and Z The amount of rotation around each axis is shown. Furthermore, with the elements of the matrix T _P represents the center of gravity as the origin and the coordinate system the coordinates of the detected position of the displacement sensors 3a to 3f in each. y _Pbx and z _Pbx represent the Y and Z coordinates of the detection position of the displacement sensor 3a, respectively, x _Pry and z _Pry represent the X and Z coordinates of the detection position of the displacement sensor 3b, respectively, and x _Ply and z _Ply represent _Represents the X and Z coordinates of the detection position of the displacement sensor 3c, x _Prz and y _Prz represent the X and Y coordinates of the detection position of the displacement sensor 3d, respectively, and x _Plz and y _Plz represent the detection of the displacement sensor 3e. The X and Y coordinates of the position are represented, respectively, and x _Pbz and y _Pbz represent the X and Y coordinates of the detection position of the displacement sensor 3f, respectively.

  From the equation (1), the equation for obtaining the displacement and rotation amount at the center of gravity from the value of each displacement sensor is expressed by the following equation (2).

Here, it will be referred an inverse matrix T _P ^-1 of T _P between the center of gravity displacement coordinate transformation matrix. The center-of-gravity point displacement coordinate transformation calculation unit 7 receives the output P _P of the displacement sensors 3a to 3f as an input, and multiplies the center-of-gravity point displacement coordinate transformation matrix T _P ⁻¹ , that is, a 6-degree-of-freedom system having the center of gravity as the origin. The displacement in the X, Y, and Z axis directions at the center of gravity and the rotation amount around the X, Y, and Z axes at the center of gravity are output.

  The position control unit 8 outputs the target displacement in the X, Y, and Z axial directions at the center of gravity of the 6-degree-of-freedom system having the center of gravity as the origin and the X, Y, and Z at the center of gravity output from the position target value command unit 6. A calculation for determining a position control input, which will be described later, is performed by a PI compensator that performs proportional-integral compensation (PI compensation) using the difference between the target rotation amount around each axis and the output of the center-of-gravity point displacement coordinate transformation computation unit 7 as an input. Do. The calculation in the position control unit 8 is performed independently for each of the X, Y, and Z axes.

  Based on the desired position control input values of the X, Y, and Z axes at the center of gravity of the six-degree-of-freedom system with the center of gravity as the origin, the thrust distribution replacement calculation unit 9 outputs the linear motor 4a. To calculate the input required for 4f. With respect to the outputs of the linear motors 4a to 4f, the translational forces in the X, Y, and Z axial directions at the center of gravity of the 6-degree-of-freedom system having the center of gravity as the origin, and the torque around the X, Y, and Z axes at the center of gravity Is expressed by the following equation (3) from the respective positional relationships.

Here, _{F M} is a matrix representing the driving of the linear motors 4a to 4f, in _{particular, F Mbx, F Mry, F} Mly, F Mrz, F Mlz, and _{F MBZ} are respectively a linear motors 4a 4b, 4c, 4d, 4e, and 4f drive values are shown. Further, _FGM is a position control input, and the translational force in the X, Y, and Z axial directions at the center of gravity of the six-degree-of-freedom system having the center of gravity as the origin and the torque around the X, Y, and Z axes at the center of gravity. Is a matrix containing Specifically, F _Mx , F _My , and F _Mz represent translational forces in the X, Y, and Z axial directions at the center of gravity, and T _Mx , T _My , and T _Mz are X, Y, and Z at the center of gravity. Represents the torque around each axis. Additionally, elements in the matrix T _M, represents the coordinates of the point of action of the linear motor 4a to 4f in the coordinate system whose origin is a center of gravity. y _Mbx and z _Mbx represent the Y and Z coordinates of the operating point of the linear motor 4a, respectively, x _Mry and z _Mry represent the X and Z coordinates of the operating point of the linear motor 4b, respectively, and x _Mly and z _Mly represent represents X point of action of the linear motor 4c, the Z-coordinate, _{respectively, x MRZ} and _{y MRZ} represent X point of action of the linear motor 4d, Y coordinates, _{respectively, X MLZ} and _{y MLZ} is the action of the linear motor 4e The X and Y coordinates of the point are respectively represented, and x _Mbz and y _Mbz represent the X and Y coordinates of the operating point of the linear motor 4f, respectively.

  From the desired position control input for each of the X, Y, and Z axes at the center of gravity of the 6-degree-of-freedom system with the center of gravity as the origin, which is output from the position control unit 8 according to the expression (3), the thrust distribution calculation unit 9 The conversion to necessary input for the linear motors 4a to 4f is performed by the following equation (4).

Here, it is assumed that an inverse matrix _T ^{M -1} of _{T M} is referred to as a thrust distribution matrix. The thrust distribution calculation unit 9 receives a desired position control input for each of the X, Y, and Z axes at the center of gravity of the 6-degree-of-freedom system that is the output from the position control unit 8 and has the center of gravity as the origin, and a thrust distribution matrix Output necessary inputs to the linear motors 4a to 4f with respect to the driving force of the X, Y, and Z axes at the center of gravity of the six-degree-of-freedom system having the center of gravity as the origin, that is, the value multiplied by T _M ^-1. ing.

In the passive vibration isolator, there is a problem that vibration having the same frequency as the natural vibration frequency of the elastic support is amplified by the resonance phenomenon, and thus oscillates. However, in the active vibration isolator, a control circuit of a position control loop as shown in FIG. 2 is configured, and by controlling the linear motor, oscillation can be suppressed and vibration can be attenuated.
The above is the configuration of the active vibration isolator having a general position control loop control circuit.

  In this general configuration, in the 6-degree-of-freedom system having the center of gravity as the origin, the thrust distribution calculation unit 9 executes control value input to the linear motors 4a to 4f independently of each other. Control outputs are independent of each other. However, the interference caused by the coupling between the X, Y, and Z axes at the center of gravity of the elastic force generated by the elastic supports 2r, 2l, and 2b that support the mounting device and the vibration isolation table 1 is considered. It has not been. Here, the interference means that the displacement in each axial direction or the rotation around each axis affects other than the translational force only in the corresponding axial direction or the torque around the corresponding axis. In a six-degree-of-freedom system with the center of gravity as the origin, the elastic force in the translational direction in the X, Y, and Z axial directions at the center of gravity by the elastic supports 2r, 2l, and 2b is Since torque, which is a rotational action component, is generated depending on the distance, interference due to coupling occurs between the X, Y, and Z axes.

Therefore, in the present invention, in order to remove interference due to the elastic force, a control circuit of a non-interference control loop including a non-interference control unit is configured.
The control circuit of the non-interacting control loop includes displacement sensors 3a to 3f, a centroid displacement coordinate conversion calculation unit 7, a non-interacting control unit 10, a thrust distribution calculation unit 9, and linear motors 4a to 4f. It is configured.

  In configuring the control circuit of the non-interacting control loop, first, interference between the X, Y, and Z axes due to the elastic force of the elastic supports 2r, 2l, and 2b will be described below. Since the same calculation is performed for the elastic supports 2r, 2l, and 2b, the subscript i in the equation is expressed for the elastic supports 2r, 2l, and 2b in the order of 1, 2, and 3.

  First, the elastic support points of the elastic supports 2r, 2l, and 2b with respect to the displacement in the X, Y, and Z axial directions at the center of gravity of the 6-degree-of-freedom system having the center of gravity as the origin and the rotation amount around each axis at the center of gravity. The displacement at is expressed by the following equation (5).

Matrix _{X ki} of _{x ki, y ki,} and _{z ki} represent each elastic support 2r in coordinate system with its origin at the centroid, 2l, and 2b of the X, Y, the elastic support point displacement in the direction of each axis in the Z , _x G matrix _{X G, y G, z G} , ωx G, ωy G, and .omega.z _G is the center of gravity in the coordinate system with its origin at the centroid respectively X, Y, of the axial displacement and the center of gravity of the Z The amount of rotation about each of the X, Y, and Z axes is shown. Further, T _Ki is an elastic support point displacement matrix, and x _i , y _i , and z _i are X of elastic support points of the elastic supports 2r, 2l, and 2b in a coordinate system with the center of gravity as the origin, Y and Z coordinates are shown.

  Next, the elastic force generated at each elastic support point with respect to the elastic support point displacement of the elastic supports 2r, 2l, and 2b is expressed by the following equation (6).

Here, F _kxi , F _kyi , and F _kzi represent the elastic forces generated by the elastic supports 2 r, 2 l, 2 b at the elastic support points in the coordinate system with the center of gravity as the origin, respectively, k _xi , k _yi , And k _zi indicate elastic coefficients for the X, Y, and Z axes of the elastic supports 2r, 2l, and 2b in the coordinate system with the center of gravity as the origin.

  Further, the elastic force generated at the elastic support points of the elastic supports 2r, 2l, and 2b is expressed in terms of the X, Y, and Z axial translational forces at the center of gravity of the six-degree-of-freedom system with the center of gravity as the origin and X at the center of gravity. Conversion to torque around each axis of Y, Y and Z is performed by the following equation (7).

Here, F _GKi is the translational force in the X, Y, and Z axial directions at the center of gravity of the six-degree-of-freedom system having the center of gravity as the origin and the center of gravity at the center of gravity due to the elastic force generated by the elastic supports 2r, 2l, and 2b. F _Gkxi , F _Gkyi , and F _Gkzi represent the translational forces in the X, Y, and Z axial directions at the center of gravity, and represent T _Gkxi , T _Gkyi , _{respectively.} , And T _Gkzi represent torques about the X, Y, and Z axes at the center of gravity.

  From the equations (5), (6), and (7), the displacement in the X, Y, and Z axial directions at the center of gravity of the 6-DOF system with the center of gravity as the origin and the X, Y, and Z axes around the center of gravity. The rotational force in the X, Y, and Z axial directions of the center of gravity and the torque around the X, Y, and Z axes of the center of gravity due to the elastic force of the elastic supports 2r, 2l, and 2b are It is expressed by the following formula.

Therefore, the elastic supports 2r, 2l with respect to the displacement in the X, Y, and Z axial directions at the center of gravity of the six-degree-of-freedom system having the center of gravity as the origin and the rotation amount around the X, Y, and Z axes at the center of gravity. , And 2b, the sum of the translational force in the X, Y, and Z axial directions of the center of gravity and the torque around the X, Y, and Z axes of the center of gravity is the sum of F _GK1 , F _GK2, and F _GK3 . Is expressed by the following equation (9).

Here, ΣK _i is called an elastic matrix. At this time, if the elastic matrix is not a diagonal matrix, that is, if the elastic matrix has a component other than 0 as a component other than the diagonal component, the motion of the elastic supports 2r, 2l, and 2b at each elastic support point is The movements are not independent of each other but involve mutual interference. Accordingly, the center of gravity is determined by the displacement in the X, Y, and Z axial directions at the center of gravity of the six-degree-of-freedom system having the center of gravity as the origin and the elastic force generated with respect to the rotation amount around the X, Y, and Z axes at the center of gravity. Translational force due to interference in the X, Y, and Z axial directions and torque due to interference around the X, Y, and Z axes at the center of gravity.

  Therefore, in the present invention, the non-interacting configured by the displacement sensors 3a to 3f, the centroid displacement coordinate transformation calculation unit 7, the non-interacting control unit 10, the thrust distribution calculating unit 9, and the linear motors 4a to 4f. The control circuit of the control loop cancels the interference between the axes due to the elastic force. The specific method will be described below.

First, by the displacement sensors 3a to 3f and the center of gravity displacement coordinate transformation calculator 7, (9) corresponding to the formula X _G, X at the center of gravity of the six degrees of freedom system whose origin the center of gravity, Y, each Z directions And the amount of rotation around the X, Y, and Z axes at the center of gravity.

  The non-interacting control unit 10 multiplies the output value of the center-of-gravity point displacement coordinate transformation calculation unit 7 by the non-interacting matrix K ′ of the following equation (10) and outputs the result. The non-interacting matrix K ′ is obtained by setting the diagonal component of the elastic matrix of the formula (9) to 0.

  The output value of the calculation result of the non-interacting control unit 10 is added to the output value of the position control unit 8, is input to the thrust distribution calculation unit 9, and is output to the apparatus main body by the linear motors 4a to 4f.

By the above-described control using the control circuit of the non-interacting control loop, the terms other than the diagonal component of the elastic matrix ΣK _{i in} the equation (9), that is, the elastic supports 2r, 2l, and 2b at the elastic support points The interference component due to the coupling of motion can be eliminated. Therefore, without taking the method of disposing the elastic supports 2r, 2l, and 2b in a point-symmetrical position with respect to the center of gravity, X by elastic force by the control using the control circuit of the non-interacting control loop according to the present invention, It becomes possible to remove the interference between the Y and Z axes.

Here, the non-diagonal component that is the interference component of the elastic matrix ΣK _i is the product of the coordinates of the elastic support points of the elastic supports 2r, 2l, and 2b with the center of gravity as the origin and the elastic coefficient. State.

  For example, in the configuration of FIG. 1, as the position of the center of gravity increases upward in the Z-axis direction in FIG. 1, the distance in the Z-axis direction between the center of gravity and the elastic support points of the elastic supports 2r, 2b, and 2l increases. Since the length becomes longer, the interference increases with respect to the X axis direction and the Y axis, and the Y axis direction and the X axis. Therefore, in an active vibration isolator in which the distance between the center of gravity and the elastic support point is long and it is difficult to eliminate interference due to the arrangement, control using the control circuit of the non-interference control loop of the present invention is particularly effective.

  In the control system using the control circuit of the non-interacting control loop of the present invention, even when the position of the center of gravity changes due to the change of the device mounted on the active vibration isolator, it is possible to easily cope with it. is there. Specifically, the detection position coordinates of the displacement sensors 3 a to 3 f of the barycentric point displacement coordinate conversion calculation unit 7, the action point coordinates of the linear motors 4 a to 4 f of the thrust distribution calculation unit 9, and the elasticity of the non-interacting control unit 10. Using the elastic support point coordinates of the supports 2r, 2l, and 2b, and recalculating in the coordinate system with the new center of gravity as the origin by the above-described calculation method, The effects of the invention can be obtained.

  FIG. 4 shows the configuration of an active vibration isolator according to Embodiment 2 of the present invention, and FIG. 5 shows a block diagram of the active vibration isolator according to Embodiment 2 of the present invention.

  The second embodiment is a configuration for the case where the vibration isolation table 1 and the mounting device have a larger weight, and the elastic supports 2r, 2l, and 2b of the first embodiment are replaced with the air spring actuators 11r, 11l, and 11b ( The first plurality of driving means) is replaced.

  In the first embodiment, a linear motor is used as the actuator of the control circuit of the position control loop. However, in the second embodiment, since the vibration isolation table 1 and the mounting device have a larger weight, the position control of the active vibration isolation device is performed. On the other hand, an air spring actuator having a higher output than that of a linear motor is generally used. On the other hand, in order to perform non-interference control that requires an output with quick response, the linear motor (second plurality of driving means) is provided as in the first embodiment. Therefore, the active vibration isolation device of the second embodiment includes the vibration isolation table 1, the three air spring actuators 11r, 11l, and 11b, the displacement sensor 3b that detects the displacement in the Y-axis direction, and the displacement in the Z-axis direction. A displacement sensor 3d for detection, a linear motor 4b driven in the Y-axis direction, a linear motor 4d driven in the Z-axis direction, a displacement sensor 3c for detecting displacement in the Y-axis direction, and a displacement in the Z-axis direction are detected. A displacement sensor 3e, a linear motor 4c driven in the Y-axis direction, a linear motor 4e driven in the Z-axis direction, a displacement sensor 3a that detects displacement in the X-axis direction, and a displacement sensor that detects displacement in the Z-axis direction 3f, a linear motor 4a that drives in the X-axis direction, and a linear motor 4f that drives in the Z-axis direction. Further, the active vibration isolator of the second embodiment includes a position target value command unit 6, a center-of-gravity point displacement coordinate conversion calculation unit 7, a position control unit 8, a thrust distribution calculation unit 9, and a non-interacting control unit 10. And an air spring actuator propulsion distribution calculating unit 12.

  Each of the air spring actuators 11r, 11l, and 11b can drive two axes in the horizontal direction and the vertical direction. Specifically, the air spring actuator 11b drives in the X-axis direction and the Z-axis direction, The air spring actuators 11r and 11l are driven in the Y-axis direction and the Z-axis direction. Here, the air spring actuators 11r and 11l are arranged at different positions in the XZ plane, and the air spring actuators 11r, 11l, and 11b are arranged at different positions in the XY plane. Yes.

  By combining the driving of each air spring actuator with the above-described configuration, the X, Y, and Z axes at the center of gravity of the 6-DOF system with the center of gravity as the origin and the X, Y, and Z axes at the center of gravity Each can be driven as desired. Here, the center of gravity refers to the center of gravity when all of the devices supported by the air spring actuators 11b, 11r, and 11l such as the mounting device of the active vibration isolator and the vibration isolation table 1 are considered as one rigid body. Means.

  The position control loop control circuit according to the second embodiment includes displacement sensors 3a to 3f, a centroid displacement coordinate conversion calculation unit 7, a position control unit 8, and an air spring actuator thrust distribution calculation unit 12 (first thrust calculation unit). ) And air spring actuators 11r, 11l, and 11b. The control circuit of the non-interacting control loop according to the second embodiment includes the displacement sensors 3a to 3f, the centroid displacement coordinate conversion calculation unit 7, the non-interacting control unit 10, and the thrust distribution calculation unit 9 (second (Thrust calculating part) and linear motors 4a to 4f.

  As in the case of the position control of the active vibration isolator using the linear motor of the first embodiment, the X, Y, and Z at the center of gravity of the six-degree-of-freedom system with the center of gravity as the origin with respect to the output of each air spring actuator. The translational force in each axial direction and the torque around each of the X, Y, and Z axes at the center of gravity are expressed by the following equation (11) from the respective positional relationships.

Here, F _S is a matrix representing the driving force of each of the air spring actuators 11r, 11l, and 11b, and F _Sbx , F _Sry , F _Sly , F _Srz , F _Slz , and F _Sbz are respectively in order for each air The drive values in the directions of the X axis, 11r Y axis, 11l Y axis, 11r Z axis, 11l Z axis, and 11b Z axis of the spring actuator 11b are shown. F _GS is a matrix that includes the translational force in the X, Y, and Z axial directions at the center of gravity of the six-degree-of-freedom system having the center of gravity as the origin, and the torque around the X, Y, and Z axes at the center of gravity. F _Sx , F _Sy , and F _Sz represent translational forces in the X, Y, and Z axial directions, and T _Sx , T _Sy , and T _Sz represent torques about the X, Y, and Z axes, respectively. Additionally, elements in the matrix T _S, represents in the coordinate system of the center of gravity as the origin, each air spring actuator 11r, 11l, and the coordinates of the point of action of 11b. y _Sbx and z _Sbx represent the Y and Z coordinates of the operating point of the air spring actuator 11b, respectively. x _Sry and z _Sry represent the X and Z coordinates of the operating point of the air spring actuator 11r, respectively. x _Sly and z _Sly represents the X and Z coordinates of the action point of the air spring actuator 11l, respectively, x _Srz and y _Srz represent the X and Y coordinates of the action point of the air spring actuator 11r, respectively, and x _Slz and y _Slz represent the air The X and Y coordinates of the action point of the spring actuator 11l are respectively represented, and x _Sbz and y _Sbz represent the X and Y coordinates of the action point of the air spring actuator 11b, respectively.

  From equation (11), the desired translational force in the X, Y, and Z axis directions at the center of gravity of the 6-degree-of-freedom system with the center of gravity as the origin, and the desired torque around the X, Y, and Z axes at the center of gravity. On the other hand, the calculation of the driving force required for each air spring actuator is performed by the following equation (12).

Here, the inverse matrix T _S ^-1 of the T _S will be referred to as air springs actuators thrust distribution matrix. In the air spring actuator thrust distribution calculation unit 12, a desired position control input for each of the X, Y, and Z axes at the center of gravity of the 6-degree-of-freedom system having the center of gravity as the origin, which is an output from the position control unit 8, is input. Required for each air spring actuator for the driving force of each axis of X, Y, Z at the center of gravity of the 6 degrees of freedom system with the center of gravity as the origin, that is, the value multiplied by the air spring actuator thrust distribution matrix T _S ⁻¹ The correct input is output.

  As in the second embodiment of the present invention described above, the use of an air spring actuator in the control circuit of the position control loop enables high output, and even when the vibration isolation table 1 or the mounting device has a larger weight, it is easy. Control becomes possible.

  FIG. 6 shows the configuration of an active vibration isolator according to Embodiment 3 of the present invention, and FIG. 7 shows a block diagram of the active vibration isolator according to Embodiment 3 of the present invention.

  In the third embodiment, an acceleration sensor 5b that detects acceleration in the Y-axis direction with respect to the active vibration isolator having the air spring actuators 11r, 11l, and 11b (first plurality of driving units) of the second embodiment, and Z An acceleration sensor 5d that detects acceleration in the axial direction, an acceleration sensor 5c that detects acceleration in the Y-axis direction, an acceleration sensor 5e that detects acceleration in the Z-axis direction, and an acceleration sensor 5a that detects acceleration in the X-axis direction , The acceleration sensor 5f for detecting the acceleration in the Z-axis direction, a vibration control unit 13, a barycentric vibration coordinate conversion calculation unit 14 (vibration calculation unit), and integrators 15a to 15f.

  The acceleration sensors 5b and 5c as acceleration measuring means are arranged at different positions in the XZ plane, and the acceleration sensors 5d, 5e, and 5f as acceleration measuring means are different from each other in the XY plane. Placed in position.

  By combining the driving of the acceleration sensors 5a to 5f with the above-described configuration, the X-, Y-, and Z-axis accelerations at the center of gravity of the six-degree-of-freedom system with the center of gravity as the origin and the X, Y, and Z at the center of gravity are combined. Angular acceleration around the axis can be detected. Here, the center of gravity refers to the center of gravity when all of the devices supported by the air spring actuators 11b, 11r, and 11l such as the mounting device of the active vibration isolator and the vibration isolation table 1 are considered as one rigid body. Means.

  The control circuit of the position control loop and the control circuit of the non-interacting control loop of the third embodiment are the same as those of the second embodiment.

  In the third embodiment, by adding a control circuit of a vibration control loop based on the output of each acceleration sensor, a vibration damping effect due to efficient linear motor control is added to the active vibration isolator to further reduce vibration. The control circuit of the vibration control loop includes the acceleration sensors 5a to 5f, the center-of-gravity point vibration coordinate transformation calculation unit 14, the integrators 15a to 15f, the vibration control unit 13, and the propulsion distribution calculation unit 9. And linear motors 4a to 4f (second plurality of driving means).

  For each acceleration sensor 5a to 5f with respect to the acceleration in the X, Y, and Z axis directions at the center of gravity and the angular acceleration around the X, Y, and Z axes at the center of gravity in the six-degree-of-freedom system with the center of gravity as the origin. The output is expressed by the following equation (13) from each positional relationship.

Here, A _A is a matrix representing the outputs of the acceleration sensors 5a to 5f, and a _bx , a _ry , a _ly , a _rz , a _lz , and a _bz are respectively the acceleration sensors 5a, 5b, 5c, The output values are 5d, 5e, and 5f. Further, _AG is a matrix including the acceleration in the X, Y, and Z axis directions at the center of gravity of the 6 degrees of freedom system with the center of gravity as the origin and the angular acceleration around the X, Y, and Z axes at the center of gravity. , Ax _G , ay _G , and az _G are accelerations in the X, Y, and Z axial directions, and aωx _G , aωy _G , and aωz _G are angular accelerations about the X, Y, and Z axes. Additionally, elements in the matrix T _A, shows the coordinates of the acceleration sensor 5a to 5f in the coordinate system whose origin is a center of gravity. y _Abx and z _Abx represent the Y and Z coordinates of the acceleration sensor 5a, respectively, x _Ary and z _Ary represent the X and Z coordinates of the acceleration sensor 5b, respectively, and x _Aly and z _Aly represent X of the acceleration sensor 5c. X _Arz and y _Arz respectively represent the X and Y coordinates of the acceleration sensor 5d, x _Alz and y _Alz represent the X and Y coordinates of the acceleration sensor 5e, respectively, and x _Abz and y _Abz represents the X and Y coordinates of the acceleration sensor 5f, respectively.

  From equation (13), from the output value of each acceleration sensor, the X-, Y-, and Z-axis accelerations at the center of gravity of the six-degree-of-freedom system with the center of gravity as the origin and the X, Y, and Z axes around the center of gravity. The angular acceleration is calculated by the following equation (14).

Here, it will be referred an inverse matrix T _A ^-1 of the T _A and the center of gravity vibrating coordinate transformation matrix. The center-of-gravity point vibration coordinate transformation calculation unit 14 receives the output values from the acceleration sensors 5a to 5f and multiplies the center-of-gravity point vibration coordinate transformation matrix, that is, X at the center of gravity of a six-degree-of-freedom system having the center of gravity as the origin. The acceleration in the Y and Z axis directions and the angular acceleration around the X, Y and Z axes at the center of gravity are output.

  The acceleration around the X, Y, and Z axes in the center of gravity of the 6-degree-of-freedom system centered on the center of gravity and the angles around the X, Y, and Z axes at the center of gravity output from the center-of-gravity point vibration coordinate transformation calculation unit 14 The accelerations are respectively converted by the integrators 15a to 15f into X, Y, and Z axial speeds at the center of gravity and angular velocities around the X, Y, and Z axes at the center of gravity.

  In the vibration control unit 13, the output values of the integrators 15 a to 15 f are input, and a value obtained by multiplying each of them by a proportional gain is output to the thrust distribution calculation unit 9. In this vibration control loop control circuit, a linear motor is used instead of an air spring actuator. This is because the linear motor is more responsive than the air spring actuator.

  As in the third embodiment of the present invention described above, by adding a control circuit of a vibration control loop based on the output value of each acceleration sensor, the vibration damping effect by the efficient linear motor control is added to the active vibration isolator. The effect of improving the vibration isolation performance can be obtained.

  FIG. 8 shows a connection relationship between a plurality of elements mounted on the active vibration isolator according to Embodiment 4 of the present invention and a block diagram for controlling the elements.

  In the first embodiment, the control system is a six-degree-of-freedom system using six displacement sensors and six actuators, each having a center of gravity as the origin, but in the fourth embodiment, the horizontal displacement sensor and the actuator are excluded. An example of a control system of a vertical three-degree-of-freedom system with the center of gravity as the origin is taken.

  With respect to the displacement in the Z direction at the center of gravity of the vertical three-degree-of-freedom system with the center of gravity as the origin and the amount of rotation about the X and Y axes at the center of gravity, the outputs of the displacement sensors 3d to 3f are It is expressed by the following equation (15).

  The equation for obtaining the displacement and the rotation amount at the center of gravity from the values of the respective displacement sensors is expressed by equation (2) as in the first embodiment.

In the center of gravity displacement coordinate transformation operation part 7, and receives outputs P _P of the displacement sensor 3d to 3f, a value obtained by multiplying the center of gravity displacement coordinate transformation matrix T _P ^-1, i.e., vertical three degrees of freedom system for the center of gravity as the origin The displacement in the Z direction at the center of gravity and the rotation amount around the X and Y axes at the center of gravity are output.

  Based on the desired position control input values for the X, Y, and Z axes at the center of gravity of the vertical three-degree-of-freedom system with the center of gravity as the origin, the thrust distribution conversion calculation unit 9 outputs the linear motor. The inputs required for 4d to 4f are calculated. With respect to the outputs of the linear motors 4d to 4f, the translational force in the Z direction at the center of gravity of the vertical three-degree-of-freedom system having the center of gravity as the origin and the torque around the X and Y axes at the center of gravity are It is expressed by the following equation (16).

  The linear motor 4d that is output from the position control unit 8 and is executed by the thrust distribution calculation unit 9 from the desired position control input of each axis of X, Y, and Z at the center of gravity of the vertical three degrees of freedom system with the center of gravity as the origin. Conversion to necessary input for 4 to 4f is performed by the expression (4) as in the first embodiment.

The thrust distribution calculation unit 9 receives as input the desired position control input for each of the X, Y, and Z axes at the center of gravity of the vertical three-degree-of-freedom system having the center of gravity as the origin, which is the output from the position control unit 8. For a value obtained by multiplying the matrix T _M ⁻¹ , that is, the translational force in the Z direction at the center of gravity of the vertical three-degree-of-freedom system having the center of gravity as the origin, and the torque around the X and Y axes at the center of gravity, the linear motor 4d Output necessary for 4 to 4f.

  In the vertical three-degree-of-freedom system having the center of gravity as the origin, the non-interacting control unit 10 multiplies the output value of the center-of-gravity point displacement coordinate transformation calculation unit 7 by the non-interacting matrix K ′ of the following equation (17). Output.

  The output value of the calculation result of the non-interacting control unit 10 is added to the output value of the position control unit 8, is input to the thrust distribution calculation unit 9, and is output to the apparatus main body by the linear motors 4d to 4f.

  By the above control using the control circuit of the non-interacting control loop, in the vertical three degrees of freedom system having the center of gravity as the origin, the interference component due to the coupled motion of the elastic supports 2r, 2l, and 2b at each elastic support point Can be erased.

  As in the fourth embodiment, the configuration of a vertical three-degree-of-freedom system having the center of gravity as the origin contributes to cost reduction by reducing the number of displacement sensors and linear motors. At this time, in the configuration of the fourth embodiment, the horizontal three degrees of freedom are not controlled, so that the elastic supports 2r, 2l, and 2b have a center of gravity on the horizontal plane so that the coupling of the three horizontal degrees of freedom is reduced. It is preferable to arrange them symmetrically.

  In the fourth embodiment, the configuration of the vertical three-degree-of-freedom control system excluding the horizontal displacement sensor and the linear motor from the configuration described in the first embodiment has been described. Similarly, in the second and third embodiments, a vertical three-degree-of-freedom control system can be configured. Specifically, it is easy to change the degrees of freedom of the air spring actuator thrust calculation unit 12, the vibration control unit 13, and the center-of-gravity point vibration coordinate conversion calculation unit 14 except for the horizontal air spring actuator and acceleration sensor. It is feasible.

  FIG. 9 shows a connection relationship between a plurality of elements mounted on the active vibration isolator according to Embodiment 5 of the present invention and a block diagram for controlling the elements.

  In the first embodiment, a six-degree-of-freedom control system using the center of gravity as the origin using six displacement sensors and six actuators is used. However, in the fifth embodiment, the vertical displacement sensor and actuator are excluded. An example of a horizontal three-degree-of-freedom control system with the center of gravity as the origin is given.

  With respect to the displacement in the X and Y axial directions at the center of gravity of the horizontal three-degree-of-freedom system with the center of gravity as the origin and the amount of rotation about the Z axis at the center of gravity, the outputs of the displacement sensors 3a to 3c are based on their positional relationships. Is expressed by the following equation (18).

各変位センサの値から重心における変位や回転量を求める式は、実施例１と同様に（２）式で表わされる。

The equation for obtaining the displacement and the rotation amount at the center of gravity from the values of the respective displacement sensors is expressed by equation (2) as in the first embodiment.

In the center of gravity displacement coordinate transformation operation part 7, and receives outputs P _P of the displacement sensors 3a to 3c, a value obtained by multiplying the center of gravity displacement coordinate transformation matrix T _P ^-1, i.e., the horizontal three-degree-of-freedom system for the center of gravity as the origin The displacement in the X and Y axial directions at the center of gravity and the rotation amount around the Z axis at the center of gravity are output.

  Based on the desired position control input value for each of the X, Y, and Z axes at the center of gravity of the horizontal three-degree-of-freedom system with the center of gravity as the origin, the thrust distribution replacement calculation unit 9 outputs the linear motor. The inputs necessary for 4a to 4c are calculated. With respect to the outputs of the linear motors 4a to 4c, the translational forces in the X and Y axial directions at the center of gravity of the horizontal three-degree-of-freedom system with the center of gravity as the origin and the torque around the Z axis at the center of gravity are Is expressed by the following equation (19).

  A linear motor 4a performed by the thrust distribution calculation unit 9 from the desired position control input of the X, Y, and Z axes at the center of gravity of the horizontal three-degree-of-freedom system with the center of gravity as the origin, output from the position control unit 8. Conversion to necessary input for 4 to 4c is performed by the expression (4) as in the first embodiment.

The thrust distribution calculation unit 9 receives a desired position control input of each of the X, Y, and Z axes at the center of gravity of the horizontal three-degree-of-freedom system that is the output from the position control unit 8 and has the center of gravity as the origin, and distributes the thrust. A linear motor with respect to a value obtained by multiplying the matrix T _M ⁻¹ , that is, a translational force in the X and Y axial directions at the center of gravity of the horizontal three-degree-of-freedom system having the center of gravity as the origin, and a torque around the Z axis at the center of gravity. Input necessary for 4a to 4c is output.

  In the horizontal three-degree-of-freedom system having the center of gravity as the origin, the non-interacting control unit 10 multiplies the output value of the center-of-gravity point displacement coordinate transformation calculation unit 7 by the non-interacting matrix K ′ of the following equation (20). Output.

  The output value of the calculation result of the non-interacting control unit 10 is added to the output value of the position control unit 8, is input to the thrust distribution calculation unit 9, and is output to the apparatus main body by the linear motors 4a to 4c.

  By the above-described control using the control circuit of the non-interacting control loop, in the horizontal three-degree-of-freedom system having the center of gravity as the origin, the interference component due to the coupled motion of the elastic supports 2r, 2l, and 2b at each elastic support point Can be erased.

  By adopting a horizontal three-degree-of-freedom system configuration with the center of gravity as the origin as in the fifth embodiment, the number of displacement sensors and linear motors is reduced, thereby contributing to cost reduction. At this time, in the configuration of the fifth embodiment, since the vertical three degrees of freedom are not controlled, the elastic supports 2r, 2l, and 2b are arranged on the vertical plane so that the coupling of the vertical three degrees of freedom becomes small. It is preferable to arrange them symmetrically with respect to the center of gravity.

  In the fifth embodiment, the configuration of the horizontal three-degree-of-freedom control system that excludes the vertical displacement sensor and the linear motor from the configuration described in the first embodiment has been described. Similarly, in the second and third embodiments, a horizontal three-degree-of-freedom control system can be configured. Specifically, it is easy to change the degrees of freedom of the air spring actuator thrust calculation unit 12, the vibration control unit 13, and the center-of-gravity point vibration coordinate conversion calculation unit 14 except for the vertical air spring actuator and acceleration sensor. It is feasible.

  In the fourth and fifth embodiments, the configurations of the vertical three-degree-of-freedom system having the center of gravity as the origin and the horizontal three-degree-of-freedom system having the center of gravity as the origin have been described. Similarly, it can be easily realized by changing the determinant according to the degree of freedom.

  Further, in the first to fifth embodiments, the coordinate system having the center of gravity as the origin has been described in order to simplify the mathematical expression. However, if each coordinate in each expression is a relative coordinate from the center of gravity, an arbitrary point It can also be realized in a coordinate system with the origin as.

In each embodiment, when the coordinate system has an arbitrary point as the origin, specifically, if the X, Y, and Z coordinates of the center of gravity are x _G , y _G , and z _G , respectively,
For each expression,
x _Pry (x _Pry −x _G ),
x _Prz (x _Prz −x _G ),
x _Ply (x _Ply −x _G ),
x _Plz is (x _Plz −x _G ),
x _Pbz (x _Pbz −x _G ),
y _Prz (y _Prz −y _G ),
y _Plz (y _Plz− y _G ),
y _Pbx (y _Pbx −y _G ),
y _Pbz (y _Pbz −y _G ),
z _{Pry is set} to (z _Pry −z _G ),
z _Ply (z _Ply -z _G ),
_replace z _Pby with (z _Pby −z _G ),
x _Mry (x _Mry −x _G ),
x _Mly (x _Mly -x _G ),
the _{x Mrz (x Mrz -x G)} ,
x _Mlz (x _Mlz −x _G ),
x _Mbz (x _Mbz −x _G ),
y _Mrz (y _Mrz −y _G ),
y _Mlz (y _Mlz −y _G ),
y _Mbx (y _Mbx −y _G ),
y _Mbz (y _Mbz −y _G ),
z _Mry (z _Mry −z _G ),
z _Mly (z _Mly -z _G ),
_Replace z _Mbx with (z _Mbx −z _G ),
x _i is (x _i −x _G ),
y _i (y _i -y _G ),
replace z _i with (z _i −z _G ),
x _Sry (x _Sry −x _G ),
x _Srz (x _Srz −x _G ),
x _Sly (x _Sly −x _G ),
x _S1z (x _S1z -x _G ),
x _Sbz (x _Sbz −x _G ),
y _Srz (y _Srz −y _G ),
y _S1z (y _S1z -y _G ),
y _Sbx (y _Sbx −y _G ),
y _Sbz (y _Sbz −y _G ),
z _Sry (z _Sry -z _G ),
z _Sly (z _Sly -z _G ),
_Replace z _Sbx with (z _Sbx −z _G ),
x _Ary (x _Ary −x _G ),
x _Arz is (x _Arz −x _G ),
x _Aly (x _Aly −x _G ),
x _Alz (x _Alz −x _G ),
x _Abz (x _Abz -x _G ),
y _Arz (y _Arz −y _G ),
y _Alz (y _Alz −y _G ),
y _Abx (y _Abx -y _G ),
y _Abbz (y _Abz −y _G ),
z _Ary (z _Ary −z _G ),
z _Aly (z _Aly -z _G ),
z _Abx may be replaced with (z _Abx -z _G ).

  A vibration isolator having the active vibration isolator of the first, second, third, fourth or fifth embodiment as a vibration isolator for insulating a vibration or attenuating the vibration in a precision measuring / processing apparatus or a semiconductor exposure apparatus. By doing so, it is possible to realize a vibration isolator that can enjoy the effects of the present invention.

  As mentioned above, although the preferable Example of this invention was described, this invention is not limited to these Examples, A various deformation | transformation and change are possible within the range of the summary.

1 Vibration isolation table 2r, 2l, 2b Elastic support 3a, 3b, 3c, 3d, 3e, 3f Displacement sensor 4a, 4b, 4c, 4d, 4e, 4f Linear motor 5a, 5b, 5c, 5d, 5e, 5f Acceleration Sensor 6 Position target value command unit 7 Center-of-gravity point displacement coordinate conversion calculation unit 8 Position control unit 9 Thrust distribution calculation unit 10 Decoupling control unit 11r, 11l, 11b Air spring actuator 12 Air spring actuator thrust distribution calculation unit 13 Vibration control unit 14 Center-of-gravity point vibration coordinate transformation calculation unit 15a, 15b, 15c, 15d, 15e, 15f Integrator

Claims (12)

Active vibration isolator
A vibration isolation table for mounting a vibration isolation object;
A plurality of elastic supports for supporting the vibration isolation table;
A plurality of position measuring means for measuring the displacement of the vibration isolation table;
A plurality of driving means for driving the vibration isolation table;
Wherein at the point of a predetermined position with respect to anti-vibration table X-axis direction, and the target displacement in the Y-axis direction and the Z-axis direction, around the X-axis, Y-axis and the position target value commander that outputs a target rotation amount about the Z axis And
Receiving the output of said plurality of position measuring means, the X-axis direction at the point of a predetermined position, and displacement in the Y-axis direction and the Z-axis direction, around the X axis, and the rotation amount around the Y-axis and Z-axis A displacement calculator for calculating and outputting;
Based on the difference between the output of the position target value command unit and the output of the displacement calculation unit, a position control unit that calculates and outputs a translational force or torque corresponding to the difference at the point of the predetermined position;
The output of the displacement calculation unit is input, and the calculation for canceling the motion with interference generated at the point of the predetermined position by the displacement and elastic force of each of the plurality of elastic supports is performed and output. An interference control unit;
Based on the output of the position control unit and the output of the non-interacting control unit, a thrust calculation unit that outputs a command for each of the plurality of driving means,
Comprising
An active vibration isolator characterized by the above.   2. The active vibration isolation device according to claim 1, wherein the output of the position control unit and the output of the non-interacting control unit are added to each other and input to the thrust calculation unit. The plurality of driving means includes a first plurality of driving means and a second plurality of driving means,
The thrust calculation unit includes a first thrust calculation unit and a second thrust calculation unit,
The first thrust calculation unit inputs the output of the position control unit, and outputs the output to the first plurality of driving means,
The second thrust calculation unit inputs the output of the non-interacting control unit and outputs the input to the second plurality of driving units.
The active vibration isolator according to claim 1. A plurality of acceleration measuring means for measuring the acceleration of the vibration isolation table;
A vibration calculation unit that inputs the outputs of the plurality of acceleration measurement means, calculates and outputs acceleration and angular acceleration at the point of the predetermined position;
A plurality of integrators for inputting and integrating the output of the vibration calculation unit, and for outputting the velocity and angular velocity at the point of the predetermined position;
A vibration control unit that inputs outputs from the plurality of integrators, performs an operation for controlling the velocity and the angular velocity at the point of the predetermined position, and outputs the vibration control unit;
Further comprising
The output of the vibration control unit is added to the output of the non-interacting control unit and input to the second plurality of driving means.
The active vibration isolator according to claim 3.   5. The active vibration isolation device according to claim 1, wherein the point at the predetermined position is a center of gravity of the vibration isolation object and the vibration isolation table.   The active vibration isolation device according to claim 1, wherein the plurality of driving units are a plurality of linear motors.   5. The active vibration isolation device according to claim 3, wherein the first plurality of driving units are a plurality of air spring actuators. 6.   5. The active vibration isolation device according to claim 3, wherein the second plurality of driving units are a plurality of linear motors. 6.   A vibration isolator comprising the active vibration isolator according to claim 1. A method of controlling an active vibration isolator having a vibration isolation table for mounting a vibration isolation object is as follows:
Measuring displacements at a plurality of positions of the vibration isolation table;
From the displacement of the plurality of positions of the anti-vibration table, X-axis direction at the point of location of Jo Tokoro, and displacement in the Y-axis direction and the Z-axis direction, around the X axis, and the rotation amount around the Y-axis and Z-axis Computing
Target displacements in the X-axis direction, Y-axis direction and Z-axis direction at the predetermined position point , target rotation amounts around the X-axis, Y-axis and Z-axis, and calculated displacements at the predetermined position point and Based on the difference from the calculated amount of rotation, calculating a translational force and torque corresponding to the difference at the point of the predetermined position;
From the calculated displacement and the calculated amount of rotation at the predetermined position point, cancel the motion with interference generated at the predetermined position point by the displacement and elastic force of each of the plurality of elastic supports. Doing the operation for
Based on the translational force and the torque corresponding to the difference at the point of the predetermined position, and a calculation result for canceling the motion accompanied by the interference generated at the point of the predetermined position, a plurality of driving means Outputting a command for each,
including,
A method for controlling an active vibration isolator.   The calculation results for canceling the translational force or the torque corresponding to the point of the predetermined position and the motion accompanied by the interference generated at the point of the predetermined position are added together, and each of the plurality of driving means The method for controlling an active vibration isolator according to claim 10, wherein the command is output. Measuring acceleration at a plurality of positions of the vibration isolation table;
Calculating acceleration and angular acceleration at a point of the predetermined position from accelerations of the plurality of positions of the vibration isolation table;
Integrating the acceleration and the angular acceleration at the point of the predetermined position to obtain a velocity and an angular velocity at the point of the predetermined position;
Performing an operation for controlling the speed and the angular velocity at the point of the predetermined position from the speed and the angular velocity at the point of the predetermined position;
Further including
The translational force and the torque corresponding to the difference at the predetermined position point, the calculation result for canceling the motion accompanied by the interference occurring at the predetermined position point, and the above-mentioned at the predetermined position point The method for controlling an active vibration isolator according to claim 10, wherein a command for each of the plurality of driving units is output based on a speed and a calculation result for controlling the angular velocity.

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