JP6084127B2

JP6084127B2 - Transparent planar substrate with electrode and touch panel

Info

Publication number: JP6084127B2
Application number: JP2013151716A
Authority: JP
Inventors: 勝正鴻野; 圭作木村; 貴裕小野
Original assignee: Gunze Ltd
Current assignee: Gunze Ltd
Priority date: 2013-07-22
Filing date: 2013-07-22
Publication date: 2017-02-22
Anticipated expiration: 2033-07-22
Also published as: JP2015022627A; TW201504913A; TWI557623B; CN203941515U

Description

本発明は、電極付透明面状基材及びこの電極付透明面状基材を用いたタッチパネルに関する。 The present invention relates to a transparent planar substrate with an electrode and a touch panel using the transparent planar substrate with an electrode.

近年、コンピューターや携帯端末などの電子機器において、押しボタンを用いずにディスプレイの表示を利用した操作の開発が盛んである。その操作のために、操作者による接触を検出する部材として、タッチパネルを備える電子機器が増えている。タッチパネルの種類としては、抵抗膜式、表面弾性波式、赤外線方式などがあり、指のタッチや近接による静電容量の変化でタッチ位置を検出する静電容量式もある。 In recent years, in electronic devices such as computers and portable terminals, development of operations using display on a display without using push buttons has been active. For this operation, electronic devices equipped with a touch panel are increasing as members for detecting contact by an operator. As the types of touch panels, there are a resistive film type, a surface acoustic wave type, an infrared type, and the like, and there is also a capacitance type that detects a touch position by a change in capacitance due to finger touch or proximity.

静電容量式のタッチパネルは、透明な基材上にタッチ位置検出のための電極が複数形成された電極付透明面状基材を備えているが、従来の静電容量式のタッチパネルでは、電極が透明なＩＴＯを用いて形成されている。しかしながら、ＩＴＯは抵抗率が高く、２００Ω/□〜１０００Ω/□が一般的である。特に大型のタッチパネルでは、電極の端子間の抵抗値が増加し、これに伴い静電容量検出の感度が低下するため、タッチパネルとして動作させることが困難になる場合がある。 A capacitive touch panel includes a transparent planar substrate with electrodes in which a plurality of electrodes for touch position detection are formed on a transparent substrate. However, in a conventional capacitive touch panel, an electrode Is formed using transparent ITO. However, ITO has a high resistivity, and is generally 200Ω / □ to 1000Ω / □. In particular, in a large-sized touch panel, the resistance value between the terminals of the electrodes increases, and the sensitivity of capacitance detection decreases accordingly, which may make it difficult to operate as a touch panel.

そこで、ＩＴＯを使用しない静電容量式のタッチパネルが提案されている。具体的には、基材上に銅や銅合金、銀からなる複数の導体線で所定のパターン形状を有する電極を形成することで、電極の光線透過率を７０％以上にし、かつ、低抵抗としたタッチパネルが提案されている。 Therefore, a capacitive touch panel that does not use ITO has been proposed. Specifically, by forming an electrode having a predetermined pattern shape with a plurality of conductor wires made of copper, copper alloy, or silver on a base material, the light transmittance of the electrode is set to 70% or more, and low resistance A touch panel has been proposed.

導体線の形成方法としては、銅などの極微細な導電性粒子を樹脂バインダー中に分散させたペースト（インク）を基材にスクリーン印刷などで印刷する方法が知られている。しかしながら、このような印刷法により導体線を形成した場合、導体線の線幅を１００μｍ以下、特に５０μｍ以下とすることが困難である。そのため、電極のパターン形状が目立ってしまってタッチパネルの視認性が悪くなるという問題がある。一方、銅などの金属箔を基材上に積層した後、金属箔上にレジストパターンを形成し、金属箔をエッチングするフォトリソグラフィーによる方法も知られている。フォトリソグラフィーにより導体線を形成した場合には、導体線の線幅を例えば１μｍ〜１０μｍ程度に非常に細くすることが可能である（例えば特許文献１を参照）。 As a method for forming a conductor wire, a method is known in which paste (ink) in which ultrafine conductive particles such as copper are dispersed in a resin binder is printed on a substrate by screen printing or the like. However, when the conductor line is formed by such a printing method, it is difficult to make the line width of the conductor line 100 μm or less, particularly 50 μm or less. Therefore, there is a problem in that the electrode pattern shape is conspicuous and the visibility of the touch panel is deteriorated. On the other hand, there is also known a photolithography method in which a metal foil such as copper is laminated on a substrate, a resist pattern is formed on the metal foil, and the metal foil is etched. When the conductor line is formed by photolithography, the line width of the conductor line can be very thin, for example, about 1 μm to 10 μm (see, for example, Patent Document 1).

特表２０１１−５１３８４６号公報Special table 2011-513846 gazette

しかしながら、フォトリソグラフィーにより線幅の非常に細い導体線を形成すると、エッチング時に所定のエッチングよりもエッチング過多となるオーバーエッチングが発生し、形成される導体線が部分的に過度に細くなって断線するという問題がある。 However, when a conductor line having a very narrow line width is formed by photolithography, overetching that causes excessive etching than the predetermined etching occurs at the time of etching, and the formed conductor line is partially thinned and disconnected. There is a problem.

本発明は、上記問題に着目してなされたもので、当初から線幅の細い導体線を形成するのではなく、導体線の線幅を部分的に細らすことで、タッチパネルの電極を構成する導体線を細線化することを目的とする。 The present invention has been made paying attention to the above problems, and does not form a conductor wire with a narrow line width from the beginning, but configures the electrode of the touch panel by partially reducing the line width of the conductor wire. The purpose is to make the conductor wire to be thin.

本発明の上記目的は、基材と、前記基材の少なくとも一方面に配置される複数の電極とを備え、前記電極は、複数の導体線で形成され、前記導体線の長さ方向に沿う少なくとも一方の側縁には、前記導体線を切り欠く凹部が間隔をあけて複数設けられている電極付透明面状基材によって達成される。 The object of the present invention includes a base material and a plurality of electrodes disposed on at least one surface of the base material, and the electrodes are formed of a plurality of conductor wires and extend along the length direction of the conductor wires. At least one side edge is achieved by a transparent planar substrate with an electrode in which a plurality of recesses that cut out the conductor wires are provided at intervals.

上記構成のタッチパネルにおける好ましい実施態様は、前記導体線の線幅Ｗは、３μｍ以上５０μｍ以下の範囲に入ることを特徴としている。 A preferred embodiment of the touch panel having the above-described configuration is characterized in that a line width W of the conductor wire falls within a range of 3 μm or more and 50 μm or less.

また、さらに好ましい実施態様は、前記凹部の深さＤは、前記導体線の一方の側縁から他方の側縁までの線幅Ｗ_０の１／２より小さいことを特徴としている。 In a further preferred embodiment, the depth D of the recess is smaller than ½ of a line width W ₀ from one side edge to the other side edge of the conductor wire.

また、さらに好ましい実施態様は、前記凹部は、前記導体線の両側縁に設けられ、一方の側縁の前記凹部と他方の側縁の前記凹部とが交互に設けられていることを特徴としている。 In a further preferred embodiment, the concave portion is provided on both side edges of the conductor wire, and the concave portion on one side edge and the concave portion on the other side edge are alternately provided. .

また、さらに好ましい実施態様は、前記導体線の一方の側縁に設けられた前記凹部と他方の側縁に設けられた前記凹部とが、部分的に対向していることを特徴としている。 In a further preferred embodiment, the concave portion provided on one side edge of the conductor wire and the concave portion provided on the other side edge are partially opposed to each other.

また、さらに好ましい実施態様は、前記導体線の一方の側縁又は他方の側縁において、隣接する前記凹部の間隔Ｉは、前記凹部の幅をＬとすると、０．５×Ｌ以上５×Ｌ以下であることを特徴としている。 In a more preferred embodiment, the interval I between the adjacent recesses on one side edge or the other side edge of the conductor wire is 0.5 × L or more and 5 × L, where L is the width of the recess. It is characterized by the following.

また、さらに好ましい実施態様は、複数の前記凹部の形状が全て略同一であることを特徴としている。 In a further preferred embodiment, the plurality of concave portions are all substantially the same in shape.

本発明の上記目的は、上記構成の電極付透明面状基材を備えたタッチパネルによっても達成される。 The object of the present invention is also achieved by a touch panel provided with the transparent planar substrate with an electrode having the above-described configuration.

本発明によれば、タッチパネルの電極を構成する導体線の側縁に凹部を設けることで、導体線を細線化しているので、当初から線幅の細い導体線を形成しなくても導体線を所望の細さに細らせることができる。当初から線幅の細い導体線を形成すると、導体線の細さや形状が安定せず、断線のおそれもあったが、本発明では、安定した細さや形状の導体線を形成されるので、電極付透明面状体やタッチパネルの生産性を向上できる。かつ、導体線の細線化により、電極の光線透過率を向上でき、また、電極のパターン形状を目立たなくすることができるので、タッチパネルの視認性を良好なものにできる。 According to the present invention, since the conductor wire is thinned by providing the concave portion on the side edge of the conductor wire constituting the electrode of the touch panel, the conductor wire can be formed without forming a conductor wire having a narrow line width from the beginning. It can be reduced to a desired thickness. When a conductor wire with a narrow line width was formed from the beginning, the conductor wire was not stable and the shape could be broken, but in the present invention, a conductor wire having a stable thickness and shape was formed. The productivity of attached transparent sheet and touch panel can be improved. Moreover, the light transmittance of the electrode can be improved by thinning the conductor wire, and the pattern shape of the electrode can be made inconspicuous, so that the visibility of the touch panel can be improved.

本発明の一実施形態に係る電極付透明面状基材の平面図である。It is a top view of the transparent planar substrate with an electrode concerning one embodiment of the present invention. 本発明の他の実施形態に係る電極付透明面状基材の平面図である。It is a top view of the transparent planar base material with an electrode concerning other embodiments of the present invention. 本発明の他の実施形態に係る電極付透明面状基材の平面図である。It is a top view of the transparent planar base material with an electrode concerning other embodiments of the present invention. 導体線の一例を示す拡大図である。It is an enlarged view which shows an example of a conductor wire. 凹部の変形例を示す導体線の拡大図である。It is an enlarged view of the conductor wire which shows the modification of a recessed part. 凹部の変形例を示す導体線の拡大図である。It is an enlarged view of the conductor wire which shows the modification of a recessed part. 凹部の変形例を示す導体線の拡大図である。It is an enlarged view of the conductor wire which shows the modification of a recessed part. 凹部の変形例を示す導体線の拡大図である。It is an enlarged view of the conductor wire which shows the modification of a recessed part. 凹部の変形例を示す導体線の拡大図である。It is an enlarged view of the conductor wire which shows the modification of a recessed part. 導体線の他の例を示す拡大図である。It is an enlarged view which shows the other example of a conductor wire. 凹部の変形例を示す導体線の拡大図である。It is an enlarged view of the conductor wire which shows the modification of a recessed part. 本発明の他の実施形態に係る電極付透明面状基材の平面図である。It is a top view of the transparent planar base material with an electrode concerning other embodiments of the present invention.

以下、本発明の実態形態について添付図面を参照して説明する。尚、各図面は、構成の理解を容易にするため、実寸比ではなく部分的に拡大又は縮小されている。 Hereinafter, actual forms of the present invention will be described with reference to the accompanying drawings. Each drawing is partially enlarged or reduced to facilitate understanding of the configuration, not the actual size ratio.

図１は、本発明の一実施形態に係る電極付透明面状基材１の平面図である。本実施形態に係る電極付透明面状基材１は、例えば、銀行端末（キャッシュディスペンサー）、券売機、携帯電話、スマートフォン、タブレットデバイス、ノート型パソコン、ディスプレイ一体型パソコン、カーナビゲーションシステム、ゲーム機器、ＰＯＳ端末などの表示装置に取り付けられて使用される静電容量式のタッチパネルを構成するものであり、透明な基材２と、基材２の一方面側に所定間隔をあけて設けられた複数の帯状の電極３とを備えている。 FIG. 1 is a plan view of a transparent planar substrate 1 with an electrode according to an embodiment of the present invention. The transparent planar substrate 1 with an electrode according to the present embodiment includes, for example, a bank terminal (cash dispenser), a ticket vending machine, a mobile phone, a smartphone, a tablet device, a notebook computer, a display-integrated personal computer, a car navigation system, and a game machine. The capacitive touch panel is used by being attached to a display device such as a POS terminal, and is provided at a predetermined interval on one side of the transparent base material 2 and the base material 2. And a plurality of strip-like electrodes 3.

電極３は、第１方向（図示例では縦（Ｙ）方向）に延びるとともに、第１方向と直交する第２方向（図示例では横（Ｘ）方向）に所定間隔をあけて配置されており、隣接する電極３間は電気的に絶縁されている。各電極３には配線４が接続されている。各配線４は、基材２の端縁まで延びており、その先端部が静電容量検出回路（図示省略）に接続されている。 The electrodes 3 extend in the first direction (vertical (Y) direction in the illustrated example) and are disposed at a predetermined interval in a second direction (lateral (X) direction in the illustrated example) orthogonal to the first direction. The adjacent electrodes 3 are electrically insulated. A wiring 4 is connected to each electrode 3. Each wiring 4 extends to the edge of the substrate 2, and its tip is connected to a capacitance detection circuit (not shown).

タッチパネルは、基材２の一方面側に電極３が形成された上記構成の２枚の電極付透明面状基材１を、電極３が対向するとともに、電極３が交差する向きとなる（つまり、一方の電極付透明面状基材１の電極３が縦方向に延びかつ他方の電極付透明面状基材１の電極３が横方向に延びる）ようにして重ね合わせ、粘着層を介して貼着することで構成される。 In the touch panel, the two transparent planar substrates 1 with electrodes having the above-described configuration in which the electrodes 3 are formed on one surface side of the substrate 2 are oriented so that the electrodes 3 face each other and the electrodes 3 intersect (that is, The electrode 3 of the transparent planar substrate 1 with one electrode extends in the vertical direction and the electrode 3 of the transparent planar substrate 1 with the other electrode extends in the lateral direction), and the adhesive layer is interposed therebetween. Consists of sticking.

なお、タッチパネルを構成する電極付透明面状基材１は、上記構成のものに限られるものではなく、基材２の一方面側に第１電極として縦方向に延びる電極３を複数並列に配置するとともに、基材２の他方面側に第２電極として横方向に延びる電極３を複数並列に配置して第１電極の電極３と交差させた電極付透明面状基材１によりタッチパネルを構成してもよい。さらに、基材２の一方面側に第１電極として縦方向に延びる電極３を複数並列に配置するとともに、第２電極として横方向に延びる電極３を複数並列に配置して第１電極の電極３と交差させた電極付透明面状基材１によりタッチパネルを構成してもよい。なお、この場合には、縦方向に延びる電極３と、横方向に延びる電極３とが交差する部分については絶縁層を両者の間に介在させることで、両者を絶縁する。絶縁層は、透明でかつ導電性がない絶縁材料であれば、材料は特に限定されない。当該構成の電極付透明面状基材１によれば、粘着層を介して２枚の電極付透明面状基材１を貼り合わせる必要が無くなるので、タッチパネルの製造上の作業性を高めることができる。 In addition, the transparent planar base material 1 with an electrode which comprises a touch panel is not restricted to the thing of the said structure, The electrode 3 extended in the vertical direction as a 1st electrode on the one surface side of the base material 2 is arrange | positioned in parallel. In addition, a plurality of electrodes 3 extending in the lateral direction as second electrodes are arranged in parallel on the other surface side of the base material 2 to form a touch panel with the transparent planar base material 1 with electrodes crossing the electrodes 3 of the first electrode. May be. Furthermore, a plurality of electrodes 3 extending in the vertical direction as first electrodes are arranged in parallel on one surface side of the substrate 2, and a plurality of electrodes 3 extending in the horizontal direction are arranged in parallel as second electrodes to form an electrode of the first electrode You may comprise a touch panel by the transparent planar base material 1 with an electrode crossed by 3. FIG. In this case, an insulating layer is interposed between the electrodes 3 that extend in the vertical direction and the electrodes 3 that extend in the horizontal direction to insulate them from each other. The insulating layer is not particularly limited as long as it is a transparent and non-conductive insulating material. According to the transparent sheet-like base material 1 with an electrode having such a configuration, it is not necessary to bond two transparent sheet-like base materials 1 with an electrode through an adhesive layer, so that the workability in manufacturing a touch panel can be improved. it can.

基材２は、誘電体基材である。基材２の材料は、ガラス、ポリエステル、ポリエチレンテレフタレート、ポリカーボネート、ポリメチルメタクリレート、ポリエチレンナフタレートなどの透明材料が挙げられる。ガラスであれば、厚みは０．１ｍｍ〜３ｍｍ程度が好ましく、プラスチックフィルムであれば厚みは１０μｍ〜２０００μｍ程度が好ましい。また、これらの材料を多層に積層してもよい。また、基材２の表面に、表面保護のためのハードコート層や、反射防止層、防汚層、アンチブロッキング層、受容層などの機能層を設けたり、プラズマ処理などを施したりしてもよい。 The substrate 2 is a dielectric substrate. Examples of the material of the substrate 2 include transparent materials such as glass, polyester, polyethylene terephthalate, polycarbonate, polymethyl methacrylate, and polyethylene naphthalate. If it is glass, the thickness is preferably about 0.1 mm to 3 mm, and if it is a plastic film, the thickness is preferably about 10 μm to 2000 μm. Further, these materials may be laminated in multiple layers. Further, a hard coat layer for surface protection, a functional layer such as an antireflection layer, an antifouling layer, an antiblocking layer, a receiving layer, or a plasma treatment may be applied to the surface of the substrate 2. Good.

電極３は、本実施形態では、縦方向（Ｙ方向）に並ぶ複数の電極セル３０と、隣接する電極セル３０を電気的に接続する電極接続線３１とを備えた構成のものである。複数の電極セル３０は、複数の導体線５を交差させることによって網目状に形成されている。電極セル３０の外形は、菱形状に形成されているが、指などの接触ポイントを検出可能である限り、菱形状に限られることなく任意の形状とすることができる。また、電極３のパターン形状も、所定形状を有する複数の電極セル３０が電極接続線３１により直線状に連結された形状だけでなく、図２に示すような矩形状であってもよい。また、電極３は、必ずしも複数の導体線５によって網目状に形成されている必要はなく、図３に示すように、単に縦方向（Ｙ方向）に延びる導体線５を横方向（Ｘ方向）に並べた構成のものであっても構わない。なお、図３では、導体線５が鋸の歯のような形のジグザグ状（鋸歯状）に形成されているが、真っ直ぐな直線状で形成されていても構わない。 In this embodiment, the electrode 3 includes a plurality of electrode cells 30 arranged in the vertical direction (Y direction) and an electrode connection line 31 that electrically connects adjacent electrode cells 30. The plurality of electrode cells 30 are formed in a mesh shape by intersecting the plurality of conductor lines 5. The outer shape of the electrode cell 30 is formed in a rhombus shape. However, as long as a contact point such as a finger can be detected, the electrode cell 30 can have any shape without being limited to the rhombus shape. Further, the pattern shape of the electrode 3 is not limited to a shape in which a plurality of electrode cells 30 having a predetermined shape are linearly connected by the electrode connection line 31, but may be a rectangular shape as shown in FIG. 2. In addition, the electrode 3 does not necessarily have to be formed in a mesh shape by the plurality of conductor lines 5, and as shown in FIG. 3, the conductor lines 5 that simply extend in the vertical direction (Y direction) are arranged in the horizontal direction (X direction). You may be the thing of the structure arranged in order. In FIG. 3, the conductor wire 5 is formed in a zigzag shape (sawtooth shape) like a saw tooth, but may be formed in a straight straight line shape.

電極接続線３１は、隣り合う電極セル３０の導体線５同士を互いに接続するものであり、隣り合う電極セル３０の間に１本又は複数本設けられている。電極接続線３１の形状は、一方向に延びる直線的な形状であってもよいし、１箇所又は複数箇所で屈曲した形状（Ｌ字状、ジグザグ状など）であってもよいが、電極接続線３１の形状及び本数を適宜設定することで、タッチパネルの構成時に縦方向に延びる電極３と横方向に延びる電極３とを交差させる際、２つの電極３の交差部分が電極接続線３１同士により見かけ上網目に形成されるようにするのが好ましい。これにより、この交差部分の網目が各電極３の電極セル３０の網目と一様に並べられ、基材の一方面側から見た電極３の全体的な形状を均一な網目状パターンとすることができるので、電極３のパターン形状を目立ちにくくすることができ、その結果、タッチパネルの視認性を向上させることができる。なお、網目状とは、導体線５や電極接続線３１などの線と線とが見かけ上も含め交点を有するように交差していることに加えて、線が交わる部分において少なくとも一方の線が断続しているために線と線とが交点を有さないが交差していることも含んでいる。電極接続線３１は、電極セル３０の導体線５と同じ材料で形成されても異なる材料で形成されてもよいが、導体線５と同じ材料で一体に基材２の一方面側に形成するのが、効率よく形成することが可能であるので好ましい。 The electrode connection line 31 connects the conductor lines 5 of the adjacent electrode cells 30 to each other, and one or a plurality of electrode connection lines 31 are provided between the adjacent electrode cells 30. The shape of the electrode connection line 31 may be a linear shape extending in one direction, or may be a shape bent at one place or a plurality of places (L shape, zigzag shape, etc.). By appropriately setting the shape and the number of the lines 31, when the electrodes 3 extending in the vertical direction and the electrodes 3 extending in the horizontal direction are intersected when the touch panel is configured, the intersecting portion of the two electrodes 3 is formed by the electrode connection lines 31. It is preferable to form a mesh in appearance. As a result, the meshes of the intersecting portions are uniformly arranged with the meshes of the electrode cells 30 of each electrode 3, and the overall shape of the electrodes 3 viewed from one side of the base material is made a uniform mesh pattern. Therefore, the pattern shape of the electrode 3 can be made inconspicuous, and as a result, the visibility of the touch panel can be improved. Note that the mesh shape means that at least one of the lines where the lines intersect, in addition to the lines such as the conductor lines 5 and the electrode connection lines 31 intersecting each other so as to have an intersection. This includes the fact that the lines do not have an intersection because they are intermittent, but intersect. The electrode connection line 31 may be formed of the same material as the conductor line 5 of the electrode cell 30 or may be formed of a different material, but is integrally formed on the one surface side of the substrate 2 with the same material as the conductor line 5. Is preferable because it can be formed efficiently.

導体線５には、図４に示すように、長さ方向に沿う少なくとも一方の側縁５０Ａに、導体線５を切り欠く凹部５１が間隔Ｉをあけて複数設けられている。導体線５は、凹部５１が設けられることで、導体線５の線幅Ｗが部分的に細くなっており、凹部５１が設けられることなく一定の線幅Ｗ_０に形成されている場合と比較して、導体線５（電極３）の光線透過率が向上する。また、凹部５１が設けられることで、導体線５の側縁における反射光が拡散されるため、電極３が外部から視認しにくくなる。なお、上記した導体線５の側縁における反射光拡散の効果を向上させるためには、幅Ｌの小さな凹部５１を導体線５に対して高密度で多数形成することが好ましい。上記した導体線５の線幅Ｗ_０は、凹部５１が存在していない導体線５の元の線幅、つまりは、導体線５の一方の側縁５０Ａから他方の側縁５０Ｂまでの距離を示している。 As shown in FIG. 4, the conductor wire 5 is provided with a plurality of recesses 51 with a gap I formed in at least one side edge 50 A along the length direction. Comparative conductor lines 5, by the concave portion 51 is provided, the line width W of the conductor lines 5 has become partially thin, and if the recess 51 is formed at a constant line width W ₀ without being provided Thus, the light transmittance of the conductor wire 5 (electrode 3) is improved. Moreover, since the reflected light in the side edge of the conductor wire 5 is spread | diffused by providing the recessed part 51, it becomes difficult to visually recognize the electrode 3 from the outside. In order to improve the effect of diffusion of reflected light at the side edge of the conductor wire 5 described above, it is preferable to form a large number of concave portions 51 having a small width L at a high density with respect to the conductor wire 5. The above-described line width W ₀ of the conductor line 5 is the original line width of the conductor line 5 in which the recess 51 does not exist, that is, the distance from one side edge 50A of the conductor line 5 to the other side edge 50B. Show.

凹部５１の形状は、特に限定されるものではなく、図４に示す楕円形状（楕円の弧の一部を描くように湾曲した形状を含む）に加え、図５に示す半円形状（円弧の一部を描くように湾曲した形状を含む）、図６に示す矩形状、図７に示す三角形状、図８に示す台形状の他、多角形状など、種々の形状に形成することができる。また、図９に示すように、凹部５１自体の一部又は全部が、凸凹５２となっていてもよい。 The shape of the recess 51 is not particularly limited. In addition to the elliptical shape shown in FIG. 4 (including a shape curved so as to draw a part of the elliptical arc), the shape of the concave portion 51 shown in FIG. In addition to a rectangular shape shown in FIG. 6, a triangular shape shown in FIG. 7, a trapezoidal shape shown in FIG. 8, a polygonal shape, and the like can be formed. In addition, as shown in FIG. 9, a part or all of the recess 51 itself may be an unevenness 52.

凹部５１は、本実施形態では、導体線５の両側縁５０Ａ，５０Ｂにそれぞれ間隔をあけて複数設けられており、一方の側縁５０Ａの凹部５１と他方の側縁５０Ｂの凹部５１とが、導体線５の長さ方向に沿って交互に設けられている。図１０に示すように、導体線５の一方の側縁５０Ａのみに凹部５１が設けられている場合には、導体線５の凹部５１の間の部分は線幅Ｗが細くならないので、導体線５の元の線幅Ｗ_０に対する凹部５１の深さＤによっては、凹部５１が存在する部分と、凹部５１が存在しない凹部５１の間の部分とで線幅Ｗが大きく変わり、導体線５に局所的に線幅Ｗの大きな部分が存在して目立ってしまうおそれがある。これに対して、導体線５の両側縁５０Ａ，５０Ｂに凹部５１を交互に配置することにより、一方の側縁５０Ａの隣接する２つの凹部５１の間に他方の側縁５０Ｂの凹部５１が配置され、上記した凹部５１の間の部分の線幅Ｗについても細くできるので、導体線５のほぼ全長にわたって線幅Ｗを細くすることができる。また、導体線５が両側縁５０Ａ，５０Ｂから均等に凹部５１により切り欠かれるので、導体線５の形状がいびつなものとならず、凹部５１の存在によりタッチパネルの視認性に悪影響を与えることを防止できる。 In the present embodiment, a plurality of recesses 51 are provided at intervals on both side edges 50A and 50B of the conductor wire 5, and the recesses 51 on one side edge 50A and the recesses 51 on the other side edge 50B are: The conductor lines 5 are alternately provided along the length direction. As shown in FIG. 10, when the concave portion 51 is provided only on one side edge 50A of the conductor wire 5, the portion between the concave portions 51 of the conductor wire 5 does not have a thin line width W. Depending on the depth D of the recess 51 with respect to the original line width W ₀ of 5, the line width W varies greatly between the portion where the recess 51 exists and the portion between the recesses 51 where the recess 51 does not exist. There is a possibility that a portion having a large line width W exists locally and becomes conspicuous. On the other hand, the concave portions 51 of the other side edge 50B are arranged between two adjacent concave portions 51 of one side edge 50A by alternately arranging the concave portions 51 on both side edges 50A, 50B of the conductor wire 5. In addition, since the line width W of the portion between the recesses 51 described above can also be reduced, the line width W can be reduced over almost the entire length of the conductor wire 5. Further, since the conductor wire 5 is equally cut out from the side edges 50A and 50B by the recess 51, the shape of the conductor wire 5 is not distorted, and the presence of the recess 51 adversely affects the visibility of the touch panel. Can be prevented.

凹部５１を導体線５の両側縁５０Ａ，５０Ｂに設ける場合には、図４に示すように、導体線５の一方の側縁５０Ａの凹部５１と他方の側縁５０Ｂの凹部５１とが、部分的に対向（重複）する、具体的には、一方の側縁５０Ａの凹部５１と、これを間に挟む他方の側縁５０Ｂの２つの凹部５１とが、幅方向両側の一部分５３において対向（重複）するように、各凹部５１が配置されるのが好ましい。これにより、導体線５の線幅Ｗをより細くすることができる。なお、図６、図８及び図９では、図４のように、導体線５の一方の側縁５０Ａの凹部５１と他方の側縁５０Ｂの凹部５１とが部分的に対向（重複）しているが、必ずしも対向（重複）していなくてもよい。一方で、図５及び図７では、図４とは異なり、導体線５の一方の側縁５０Ａの凹部５１と他方の側縁５０Ｂの凹部５１とが対向（重複）していないが、部分的に対向（重複）していてもよい。 When the recess 51 is provided on both side edges 50A and 50B of the conductor wire 5, as shown in FIG. 4, the recess 51 of one side edge 50A of the conductor wire 5 and the recess 51 of the other side edge 50B are partially Specifically, the concave portion 51 of one side edge 50A and the two concave portions 51 of the other side edge 50B sandwiching the concave portion 51 face each other at the portions 53 on both sides in the width direction ( It is preferable that the concave portions 51 are arranged so as to overlap. Thereby, the line width W of the conductor wire 5 can be made thinner. 6, 8, and 9, as shown in FIG. 4, the concave portion 51 of one side edge 50 A of the conductor wire 5 and the concave portion 51 of the other side edge 50 B are partially opposed (overlapped). However, they are not necessarily opposed (overlapping). On the other hand, in FIG. 5 and FIG. 7, unlike FIG. 4, the concave portion 51 of one side edge 50A of the conductor wire 5 and the concave portion 51 of the other side edge 50B are not opposed (overlapping). May be opposed (overlapping).

導体線５の線幅Ｗを細くすれば、光線透過率を向上できるとともに導体線５を目立ちにくくできる一方で、線幅Ｗを細くし過ぎると、断線などの問題があって導体線５に凹部５１を形成するための加工が難しくなるほか、導体線５の抵抗値が大きくなるおそれがある。よって、導体線５の線幅Ｗは、最も細い部分で３μｍ以上であり、最も太い部分で５０μｍ以下である、つまり、３μｍ以上５０μｍ以下の範囲に入っていることが好ましく、３μｍ以上２５μｍ以下の範囲に入っていることがさらに好ましく、３μｍ以上１０μｍ以下の範囲に入っていることがさらに好ましい。 If the line width W of the conductor wire 5 is reduced, the light transmittance can be improved and the conductor line 5 can be made inconspicuous. On the other hand, if the line width W is too thin, there is a problem such as disconnection and the conductor line 5 has a recess. In addition to the difficulty in processing to form 51, the resistance value of the conductor wire 5 may increase. Therefore, the line width W of the conductor wire 5 is preferably 3 μm or more at the thinnest portion and 50 μm or less at the thickest portion, that is, preferably in the range of 3 μm or more and 50 μm or less. More preferably, it is in the range of 3 μm or more and 10 μm or less.

隣り合う凹部５１の間隔Ｉは、特に限定されるものではなく、間隔Ｉが小さければ小さいほど、導体線５のほぼ全長にわたって線幅Ｗを細くすることができるので望ましいが、導体線５の側縁５０Ａ，５０Ｂに凹部５１を並べて形成するための加工が難しくなる。一方で、隣り合う凹部５１の間隔Ｉが大きいと、上述したように凹部５１の間の部分は線幅Ｗが細くならないため（特に図９のように導体線５の一方の側縁５０Ａのみに凹部５１を設けた場合）、導体線５に局所的に線幅Ｗの広い部分が存在してしまって目立つおそれがある。よって、隣り合う凹部５１の間隔Ｉは、後述する凹部５１の幅Ｌとの比較で、０．５×Ｌ以上５×Ｌ以下であることが好ましく、０．５×Ｌ以上２×Ｌ以下であることがさらに好ましい。なお、隣り合う凹部５１の間隔Ｉとは、隣接する凹部５１の、導体線５の側縁５０Ａ，５０Ｂにおける幅方向両側の端部同士の間の距離を指す。 The interval I between the adjacent recesses 51 is not particularly limited, and the smaller the interval I is, the more preferable it is because the line width W can be reduced over almost the entire length of the conductor wire 5. Processing for forming the recesses 51 side by side on the edges 50A and 50B becomes difficult. On the other hand, if the interval I between the adjacent recesses 51 is large, the line width W does not decrease in the portion between the recesses 51 as described above (particularly only on one side edge 50A of the conductor wire 5 as shown in FIG. 9). In the case where the recess 51 is provided), there is a possibility that a portion having a wide line width W locally exists in the conductor wire 5 and is conspicuous. Therefore, the interval I between the adjacent recesses 51 is preferably 0.5 × L or more and 5 × L or less, and 0.5 × L or more and 2 × L or less in comparison with the width L of the recess 51 described later. More preferably it is. In addition, the space | interval I of the adjacent recessed part 51 refers to the distance between the edge parts of the width direction both sides in 50A and 50B of the side edges 50A and 50B of the adjacent recessed part 51. As shown in FIG.

凹部５１の幅Ｌは、特に限定されるものではないが、幅Ｌが大きければ大きいほど、導体線５のほぼ全長にわたって凹部５１を設ける数を少なくした上で線幅Ｗを細くすることができるので望ましいが、幅Ｌが大きすぎると、導体線５自体が細いことと違いがなくなる。一方で、幅Ｌが小さすぎると、導体線５に対して凹部５１を高密度で多数形成する必要があり、凹部５１を形成するための加工が難しくなる。よって、凹部５１の幅Ｌは、導体線５の元の線幅Ｗ_０との比較で、０．５×Ｗ_０以上１０×Ｗ_０以下であることが好ましく、０．５×Ｗ_０以上５×Ｗ_０以下であることがさらに好ましい。なお、凹部５１の幅Ｌとは、凹部５１の、導体線５の側縁５０Ａ，５０Ｂにおける幅方向両端部の間の距離を指す。 The width L of the recess 51 is not particularly limited, but the larger the width L, the smaller the number of the recesses 51 provided over almost the entire length of the conductor wire 5 and the thinner the line width W. Although it is desirable, if the width L is too large, there is no difference from the fact that the conductor wire 5 itself is thin. On the other hand, if the width L is too small, it is necessary to form a large number of concave portions 51 with respect to the conductor wire 5 at a high density, and processing for forming the concave portions 51 becomes difficult. Therefore, the width L of the recess 51, in comparison with the original line width _{W 0} of the conductor lines 5, preferably at 0.5 × _{W 0} or 10 × _{W 0} or less, 0.5 × _{W 0} or 5 × W ₀ or less is more preferable. Note that the width L of the recess 51 refers to the distance between both ends in the width direction of the side edges 50 A and 50 B of the recess 51 of the recess 51.

凹部５１の深さＤは、特に限定されるものではないが、深さＤが大きすぎると、断線などの問題があって導体線５に凹部５１を形成するための加工が難しくなることに加え、特に導体線５の元の線幅Ｗ０が大きい場合には、凹部５１の深さＤを大きくすることで、凹部５１が存在する部分と凹部５１が存在しない部分とで線幅Ｗが大きく変わり、導体線５に局所的に線幅Ｗの大きな部分が存在して目立ってしまうおそれがある。一方で、深さＤが小さすぎると、凹部５１を設けても線幅Ｗを大して細くすることができず、導体線５の光線透過率を効果的に向上させることができないおそれがある。よって、凹部５１の深さＤは、導体線５の元の線幅Ｗ_０の５０％よりも小さく設定することが好ましい。ただ、凹部５１の形成後の導体線５が線幅Ｗで３μｍ以上残るように設定することが必要である。なお、凹部５１の深さＤとは、導体線Ｌの側縁５０Ａ，５０Ｂから凹部５１の最深部までの距離を指す。 The depth D of the recess 51 is not particularly limited. However, if the depth D is too large, there is a problem such as disconnection, which makes it difficult to process the recess 51 in the conductor wire 5. In particular, when the original line width W0 of the conductor wire 5 is large, increasing the depth D of the recess 51 greatly changes the line width W between the portion where the recess 51 exists and the portion where the recess 51 does not exist. There is a possibility that a portion having a large line width W exists locally on the conductor wire 5 and becomes conspicuous. On the other hand, if the depth D is too small, the line width W cannot be increased and reduced even if the recess 51 is provided, and the light transmittance of the conductor wire 5 may not be effectively improved. Therefore, the depth D of the recess 51 is preferably set to be smaller than 50% of the original line width W ₀ of the conductor wire 5. However, it is necessary to set so that the conductor wire 5 after the formation of the recess 51 remains with a line width W of 3 μm or more. The depth D of the recess 51 refers to the distance from the side edges 50A and 50B of the conductor wire L to the deepest portion of the recess 51.

線幅Ｗ_０の導体線５に対し、幅Ｌ、間隔Ｉ、深さＤが上記した範囲に設計された凹部５１を複数形成することで、導体線５に対する凹部５１の占める割合を適宜設計する。図４を例にして説明すると、例えば、線幅Ｗ_０＝１０μｍの導体線５に対し、幅Ｌ＝２０μｍ、間隔Ｉ＝１０μｍ、深さＤ＝５μｍの半楕円状の凹部５１を複数形成すると、導体線５の基準長さ（ここでは、凹部５１及び間隔が繰り返し３つ現れる長さ（９０μｍ）としている）あたりの面積における凹部５１の面積は５２％程度となる。 By forming a plurality of recesses 51 whose width L, interval I, and depth D are designed in the above-described range for the conductor line 5 having the line width W ₀ , the ratio of the recesses 51 to the conductor line 5 is appropriately designed. . When taking FIG. 4 as an example, for example, when a plurality of semi-elliptical concave portions 51 having a width L = 20 μm, a spacing I = 10 μm, and a depth D = 5 μm are formed on a conductor line 5 having a line width W ₀ = 10 μm. The area of the recess 51 in the area around the reference length of the conductor wire 5 (here, the recess 51 and a length (90 μm) at which three intervals repeatedly appear) is about 52%.

凹部５１は、全て同じ形状に形成されていてもよく、また、異なる形状のものが含まれていてもよいが、全て同じ形状に形成するのが、導体線５の形状がいびつなものとならず、かつ、凹部５１を効率よく形成することが可能であるので好ましい。なお、同じ形状とは、凹部５１の形状の大部分が同じ形状であることも含む概念であり、図１１を図４と比較して示すように、凹部５１の幅方向両側の一部分５３が設計（図４）よりも広がってしまうなどの製造上のバラつきにより形状が僅かに異なった場合も、略同一として同じ形状に含まれる。 The recesses 51 may all be formed in the same shape or may include different shapes, but if the recesses 51 are all formed in the same shape, the shape of the conductor wire 5 is irregular. And the recess 51 can be efficiently formed. The same shape is a concept including that most of the shape of the concave portion 51 is the same shape, and as shown in FIG. 11 in comparison with FIG. 4, portions 53 on both sides in the width direction of the concave portion 51 are designed. Even if the shape is slightly different due to manufacturing variation such as spreading more than (FIG. 4), it is included in the same shape as substantially the same.

上記構成の導体線５は、例えば（１）金、銀、銅、白金、パラジウム、カーボン、インジウム錫酸化物（ＩＴＯ）、酸化インジウムに酸化亜鉛を混合した導電性酸化物（ＩＺＯ［ｉｎｄｉｕｍｚｉｎｃｏｘｉｄｅ］）、又は酸化インジウムに酸化珪素を混合した導電性酸化物（ＩＴＳＯ）などの極微細な導電性粒子を含む導電性ペーストを基材２上にスクリーン印刷する方法（特開２００７−１４２３３４など参照）、あるいは、（２）銅などの金属箔を基材２上に積層した後、金属箔上にレジストパターンを形成し、金属箔をエッチングする方法（特開２００８−３２８８４など参照）などにより、まず、所定の線幅Ｗ_０を有する導体線５を基材２上に形成する。なお、上記（１）、（２）の方法に限定されず、上記（１）以外のグラビア印刷やインクジェット印刷などの公知の印刷法や、上記（２）以外のフォトリソグラフィーを使用してもよい。また、電極接続線３１や配線４も上記方法で導体線５と一緒に形成することが好ましい。 For example, the conductor wire 5 having the above-described configuration is (1) gold, silver, copper, platinum, palladium, carbon, indium tin oxide (ITO), conductive oxide in which indium oxide is mixed with zinc oxide (IZO [indium zinc oxide]). ), Or a method of screen-printing a conductive paste containing ultrafine conductive particles such as conductive oxide (ITSO) in which silicon oxide is mixed with indium oxide on the substrate 2 (see Japanese Patent Application Laid-Open No. 2007-142334, etc.) Or (2) a method in which a metal foil such as copper is laminated on the substrate 2, a resist pattern is formed on the metal foil, and the metal foil is etched (see JP 2008-32884 A). A conductor wire 5 having a predetermined line width W ₀ is formed on the substrate 2. In addition, it is not limited to the method of said (1) and (2), You may use well-known printing methods, such as gravure printing other than said (1), and inkjet printing, and photolithography other than said (2). . The electrode connection line 31 and the wiring 4 are preferably formed together with the conductor line 5 by the above method.

上記導体線５を形成するのと同時に、側縁５０Ａ，５０Ｂの凹部５１を形成することができる。上記方法により形成した線幅Ｗ_０の導体線５に対して、例えばレーザを照射して導体線５の側縁５０Ａ，５０Ｂを凸状に切り欠くことで、当該部分の導体線５を物理的に除去する。これにより、導体線５の側縁５０Ａ，５０Ｂに凹部５１が形成され、凹部５１によって線幅Ｗが元の線幅Ｗ_０よりも細線化された導体線５が形成される。導体線５の除去には例えばＹＡＧレーザなどを使用することができる。本実施形態のように、複数の導体線５により電極３を網目状に形成している場合には、交差する全ての導体線５（つまり、各方向ごとに延びる導体線５）に対して凹部５１を形成する。なお、導体線５が交差する交点部については、できる限り凹部５１を設けないようにするのが好ましい。また、導体線５だけでなく、電極接続線３１や配線４に対しても、凹部５１を形成することで、線幅を元の線幅よりも細線化することが好ましい。 At the same time when the conductor wire 5 is formed, the concave portions 51 of the side edges 50A and 50B can be formed. The conductor line 5 having the line width W ₀ formed by the above method is irradiated with a laser, for example, and the side edges 50A and 50B of the conductor line 5 are cut out in a convex shape, whereby the conductor line 5 of the part is physically removed. To remove. Thus, the side edge 50A of the conductor lines 5, 50B recess 51 is formed in a line width W by the recess 51 is the conductor line 5 is thinned than the original line width W ₀ is formed. For example, a YAG laser can be used to remove the conductor wire 5. When the electrode 3 is formed in a mesh shape with a plurality of conductor wires 5 as in the present embodiment, the concave portions are formed on all the intersecting conductor wires 5 (that is, the conductor wires 5 extending in each direction). 51 is formed. In addition, it is preferable not to provide the recessed part 51 as much as possible about the intersection part which the conductor wire 5 cross | intersects. Moreover, it is preferable to make the line width thinner than the original line width by forming the recess 51 not only for the conductor line 5 but also for the electrode connection line 31 and the wiring 4.

本実施形態の電極付透明面状基材１によれば、複数の導体線５を交差させることで網目状の電極３を形成しているので、ＩＴＯを電極材料として使用した場合と比べて基材２上に形成される電極３の低抵抗化を図ることができる。また、電極３を構成する導体線５や電極接続線３１、さらには配線４が、凹部５１により所望の細さに細線化されているので、電極３の光線透過率を効果的に向上でき、また、電極３のパターン形状や配線４を効果的に目立たなくすることができるので、タッチパネルの視認性も向上させることができ、静電容量式のタッチパネルとして好適に用いることができる。さらに、導体線５や電極接続線３１、配線４の側縁に凹部５１を設けることで細線化しているので、当初から線幅の細い導体線５や電極接続線３１、配線４を形成しなくても、これらの線を所望の細さに細らすことができる。当初から線幅の細い導体線５や電極接続線３１、配線４を形成すると、線の細さや形状が安定せず、断線のおそれもあったが、本実施形態では、安定した細さや形状の導体線５や電極接続線３１、配線４を形成できるので、電極付透明面状体１やタッチパネルの生産性を向上できる。 According to the transparent planar substrate 1 with an electrode of this embodiment, since the mesh-like electrode 3 is formed by intersecting a plurality of conductor wires 5, the base is compared with the case where ITO is used as an electrode material. The resistance of the electrode 3 formed on the material 2 can be reduced. Moreover, since the conductor wire 5 and the electrode connection line 31 which comprise the electrode 3, and also the wiring 4 are thinned to the desired thinness by the recessed part 51, the light transmittance of the electrode 3 can be improved effectively, Moreover, since the pattern shape of the electrode 3 and the wiring 4 can be effectively made inconspicuous, the visibility of the touch panel can be improved and can be suitably used as a capacitive touch panel. Further, since the conductor line 5, the electrode connection line 31, and the wiring 4 are provided with the concave portions 51 on the side edges, the conductor line 5, the electrode connection line 31, and the wiring 4 having a narrow line width are not formed from the beginning. However, these lines can be reduced to a desired fineness. When the conductor line 5, the electrode connection line 31, and the wiring 4 having a narrow line width were formed from the beginning, the thinness and shape of the line were not stable and there was a risk of disconnection, but in this embodiment, the stable thinness and shape Since the conductor wire 5, the electrode connection line 31, and the wiring 4 can be formed, the productivity of the electrode-equipped transparent sheet 1 and the touch panel can be improved.

以上、本発明の一実施形態について説明したが、本発明の具体的な態様は上記実施形態に限定されない。例えば、隣り合う電極３の隙間に、上記した導体線５の線幅と略等しい導体線を用いて電極３とは電気的に独立した網目状のダミーパターンを形成することで、電極３のパターン形状を目立ちにくくしてもよいが、このダミーパターンを構成する導体線に対しても凹部５１を形成することで導体線を同様に細線化してもよい。 As mentioned above, although one Embodiment of this invention was described, the specific aspect of this invention is not limited to the said embodiment. For example, by forming a mesh-like dummy pattern that is electrically independent from the electrode 3 using a conductor wire substantially equal to the line width of the conductor wire 5 in the gap between the adjacent electrodes 3, the pattern of the electrode 3 is formed. The shape may be inconspicuous, but the conductor wire may be similarly thinned by forming the recess 51 in the conductor wire constituting the dummy pattern.

また、上記実施形態では、電極３の導体線５や電極接続線３１、配線４は真っ直ぐな直線状であるが、波のような形の波形状や鋸の歯のような形の鋸歯状など、種々の形状とすることができる。 Moreover, in the said embodiment, although the conductor wire 5, the electrode connection line 31, and the wiring 4 of the electrode 3 are straight straight lines, the wave shape of a wave, the sawtooth shape of a sawtooth shape, etc. Various shapes can be used.

また、上記実施形態では、電極３を帯状に形成し、帯状の電極３を複数並列しているが、電極３を、図１２に示すように、アイランド状に形成し、アイランド状の電極３を縦横に複数並べるように構成してもよい。電極３をアイランド状に形成する場合、各電極３に配線４がそれぞれ接続されるため、配線４の一部は各電極３の間に配置される。この実施形態において、電極３を複数の導体線５を交差させることで網目状に形成し、導体線５及び配線４に対して凹部５１を形成することで細線化してもよい。なお、図１２の実施形態では、アイランド状の電極３を有する電極付透明面状基材１のみでタッチパネルとしての機能を備える。 Moreover, in the said embodiment, although the electrode 3 was formed in strip | belt shape and the strip | belt-shaped electrode 3 was arranged in multiple numbers, as shown in FIG. 12, the electrode 3 was formed in island shape and the island-shaped electrode 3 was formed. You may comprise so that two or more may be arranged vertically and horizontally. When the electrodes 3 are formed in an island shape, the wiring 4 is connected to each electrode 3, and a part of the wiring 4 is disposed between the electrodes 3. In this embodiment, the electrode 3 may be formed in a mesh shape by intersecting a plurality of conductor lines 5, and the conductor line 5 and the wiring 4 may be thinned by forming a recess 51. In addition, in embodiment of FIG. 12, it has a function as a touch panel only by the transparent planar base material 1 with an electrode which has the electrode 3 of an island shape.

１電極付透明面状基材
２基材
３電極
５導体線
５０Ａ，５０Ｂ側縁
５１凹部 DESCRIPTION OF SYMBOLS 1 Transparent planar base material with an electrode 2 Base material 3 Electrode 5 Conductor wire 50A, 50B Side edge 51 Recessed part

Claims

A substrate;
A plurality of electrodes disposed on at least one surface of the substrate;
The electrode is formed of a plurality of conductor wires,
A transparent planar substrate with an electrode, wherein at least one side edge along the length direction of the conductor wire is provided with a plurality of recesses cut out from the conductor wire at intervals.

The line width W of the said conductor wire is a transparent planar substrate with an electrode of Claim 1 which falls in the range of 3 micrometers or more and 50 micrometers or less.

The depth D of the concave portion, less than 1/2 claim 1 or 2 electrode with transparent planar substrate according to the line width W ₀ from one side edge of the conductor wire to the other side edge.

The said recessed part is provided in the both-sides edge of the said conductor wire, The said recessed part of one side edge and the said recessed part of the other side edge are provided alternately, With an electrode in any one of Claims 1-3 Transparent planar substrate.

The transparent surface with an electrode according to any one of claims 1 to 4, wherein the concave portion provided on one side edge of the conductor wire and the concave portion provided on the other side edge are partially opposed to each other. Substrate.

The gap I between adjacent recesses on one side edge or the other side edge of the conductor wire is 0.5 × L or more and 5 × L or less, where L is the width of the recess. The transparent planar substrate with an electrode according to any one of the above.

The shape of the said several recessed part is all substantially the same, The transparent planar base material with an electrode in any one of Claims 1-6.

A touch panel provided with the transparent planar base material with an electrode in any one of Claims 1-7.