JP6080494B2 - Solid-state imaging device and imaging system - Google Patents

Description

  The present invention relates to a solid-state imaging device and an imaging system.

  In general, a back-illuminated solid-state imaging device has a photoelectric conversion portion thinner than a front-illumination type, so that incident light (particularly light having a long wavelength) can be transmitted without being sufficiently absorbed by the photoelectric conversion portion. . Patent Documents 1 and 2 disclose a structure in which a reflection part that reflects light transmitted through a photoelectric conversion part toward the photoelectric conversion part has a curvature. According to the structure of Patent Document 1, the microlens (110) condenses incident light inside the photoelectric conversion unit (130), and the reflection unit (150) having a curvature condenses the reflected light inside the photoelectric conversion unit. I am letting. Further, according to the structure of Patent Document 2, light (L1 and L3) incident perpendicularly to the solid-state imaging device is collected on the surface (126) of the reflecting section (128).

JP 2010-1118412 A U.S. Pat. No. 7,755,123

  In order to improve the light reflection efficiency by the reflection part and improve the photosensitivity, a method of arranging a reflection part with a large area can be considered, but wiring patterns for power supply, pixel driving or signal reading are arranged. It becomes difficult. Therefore, it is desirable to arrange the reflecting portion while suppressing its size from the viewpoint of layout design.

  However, under a configuration in which a small-area reflecting unit is arranged, as in Patent Document 1, if the solid-state imaging device is designed so that the condensing position of incident light is located inside the photoelectric conversion unit, of the incident light, The stray light is generated by not being reflected at the reflecting portion. This can lead to color mixing between adjacent pixels. Under the same configuration, as in Patent Document 2, when the solid-state imaging device is designed so that the condensing position is located on the surface of the reflecting portion, the reflected light from the reflecting portion proceeds toward the adjacent pixel. There is light and this can lead to color mixing.

  An object of the present invention is to provide a technique advantageous in layout design for improving light sensitivity while preventing color mixing in a back-illuminated solid-state imaging device.

One aspect of the present invention relates to a solid-state imaging device, and the solid-state imaging device includes a semiconductor layer having first and second surfaces that are opposite to each other, and a semiconductor layer on the first surface side of the semiconductor layer. A solid-state imaging device comprising: a first region provided; and a second region provided on the second surface side of the semiconductor layer, wherein a plurality of photoelectric conversion units are arranged in the semiconductor layer In the first region, a plurality of lens portions each for focusing light are arranged along the first surface, and in the second region, a plurality of reflection portions for reflecting light are provided. The solid-state imaging device is arranged along the second surface, and in the solid-state imaging device, a light beam incident on the photoelectric conversion unit from the first surface side through the lens unit passes through the second surface and the reflection unit. A pixel that is reflected by the reflective surface of the light and enters the photoelectric conversion unit from the second surface side. The light beam is in the pixel, is reflected toward the photoelectric conversion unit by the reflecting surface of the reflecting portion passes through the photoelectric conversion unit, and, before re-entering the photoelectric conversion unit, the focus It has the structure which ties.

  ADVANTAGE OF THE INVENTION According to this invention, the layout design which improves a photosensitivity is possible, preventing a color mixture in a back irradiation type solid-state imaging device.

The figure explaining the structural example of this embodiment. The figure explaining the structural example of this embodiment. The figure explaining the comparison result with another structural example. The figure explaining the structural example of other embodiment.

  The solid-state imaging device I according to the first embodiment will be described with reference to FIGS. As shown in FIG. 1A, the solid-state imaging device I has a back-illuminated structure, and includes a front surface A that is a light incident surface and a rear surface B that is the opposite surface. Have The solid-state imaging device I includes an optical region 10, a semiconductor region 20, and a wiring region 30 from the front surface A toward the rear surface B. The semiconductor region 20 includes a semiconductor layer 22 having a front surface C (second surface) and a back surface D (first surface). In the solid-state imaging device I, the extending direction of the front surface A in which the pixels P each including a part of the optical region 10, a part of the semiconductor region 20, and a part of the wiring region 30 are light incident surfaces. Arranged along the line. A support substrate 40 is disposed on the rear surface B side.

  The optical region 10 includes a microlens array 11 that forms the front surface A (first region). The microlens array 11 is configured by arranging a plurality of lens portions, each focusing light, along the back surface D. The optical region 10 can include an intermediate film 12 (light transmission portion or light passage portion) made of a material that transmits light (for example, silicon oxide or silicon nitride). Further, the optical region 10 includes a color filter array 13 disposed between the microlens array 11 and the intermediate film 12.

  The intermediate film 12 can have a role of adjusting the distance between the semiconductor region 20 and the microlens array 11. The intermediate film 12 can also serve as a protective film (passivation film), an antireflection film, and a planarization film. The intermediate film 12 may be a single layer film or a multilayer film.

  In the semiconductor layer 22 of the semiconductor region 20, a plurality of photoelectric conversion portions 21 are arranged along the front surface C and the back surface D. A typical photoelectric conversion unit 21 is a photodiode having a P-type impurity region and an N-type impurity region. The light that has entered from the front surface A and passed through the optical region 10 enters the semiconductor layer 22 from the back surface D, undergoes photoelectric conversion in the photoelectric conversion unit 21, and an electrical signal corresponding to the amount of incident light is obtained.

  The semiconductor region 20 includes a semiconductor element such as a transistor in addition to the photoelectric conversion unit 21. The semiconductor region 20 can also include a gate electrode provided on the surface C of the semiconductor layer 22 to form a MOS transistor. Further, the semiconductor region 20 may include element isolation that electrically isolates the photoelectric conversion unit 21 and the semiconductor element.

Further, the wiring region 30 includes, for example, a wiring pattern 31 formed inside an interlayer insulating film 33 made of SiO ₂ and made of a metal material such as aluminum or copper. The wiring pattern 31 is used, for example, for supplying power or driving various transistors to read out signals.

FIG. 1B schematically shows a layout top view of the solid-state imaging device I. The plurality of pixels P can be composed of a plurality of types. The type of each pixel P differs, for example, in the light selection section of the color filter array 13 in the pixel P. A pixel corresponding to a blue light selection unit (blue filter) that selectively transmits blue light (wavelength λ _R = about 430 to 480 [nm]) is a blue pixel P _B. Green light (wavelength λ _G = 500~570 [nm] C.) a green light selecting unit for selectively transmitting a corresponding pixel (green filter) and green pixel _{P G.} Red light selecting unit that selectively transmits red light (wavelength λ _R = 610~780 [nm] about) the pixel corresponding to the (red filter) and red pixel _{P R.} These blue filter, green filter, and red filter can be arranged according to a Bayer arrangement. In FIGS. 1A and 1B, three or four pixels P are illustrated for ease of explanation.

Each pixel P is provided with a transistor (pixel transistor) for reading out the electric signal corresponding to the photoelectric conversion unit 21. The pixel transistor includes, for example, a transfer transistor M _TX , a reset transistor M _RES , and a source follower transistor M _SF . A signal line for transmitting the control signal TX can be connected to the gate terminal of the transfer transistor _MTX . When the control signal TX is activated, the transfer transistor _MTX transfers the electric charge generated and stored by receiving light in the photoelectric conversion unit 21 to the floating diffusion FD. The amount of current flowing through the source follower transistor M _SF may vary depending on the potential change due to charges transferred to the floating diffusion FD. In this way, a pixel signal can be read from each pixel P. A signal line for transmitting the control signal RES can be connected to the gate terminal of the reset transistor _MRES . When the control signal RES is activated, the reset transistor _MRES can reset the potential of the floating diffusion FD. Each pixel P may be provided with a selection transistor (not shown) for selectively outputting a pixel signal. Incidentally, in FIG. 1 (a) illustrates a gate electrode _{G TX} of the transfer transistor _{M TX.}

In the backside illumination type solid-state imaging device, the thickness of the semiconductor layer 22 is generally smaller than that of the front side illumination type, being about 1 to 10 [μm] and about 2 to 5 [μm]. Therefore, for example, for light having a long wavelength such as red light, a part of the light incident on the semiconductor layer 22 from the back surface D can be transmitted without being subjected to photoelectric conversion. The depth at which half of the red light having a wavelength of 700 [nm] is absorbed is 3 [μm] with respect to the silicon single crystal. That is, half of the red light incident on the 3 [μm] silicon layer is transmitted through the silicon layer. Therefore, for example, for the red pixel P _R, the left and so on of the pixel P shown at the center, it may be arranged a reflector unit 32 in the wiring region 30 (second region) in FIG. 1 (a).

The reflection part 32 may be formed in the first wiring layer (wiring layer closest to the semiconductor layer 22) or the second or higher wiring layer, or a wiring layer for forming the wiring pattern 31. May be formed in different layers. In order to improve the reflectance, it is preferable that the reflecting surface R of the reflecting portion 32 is made of aluminum. The wiring layer can be made of copper having a higher conductivity than aluminum, and the reflecting portion 32 can be made of aluminum having a higher reflectance than copper. The green pixel P _G, sensitivity to green light, as compared with the sensitivity to the red light and blue light, since it greatly affects the resulting image quality in the solid-state imaging device, it is preferable to provide the reflecting portion 32.

The blue pixel P _B may be configured to be provided with the reflective portion 32, but the reflective portion 32 may be omitted, and instead, for example, a wiring pattern may be arranged as necessary. For light having a short wavelength such as blue light, a part of the light incident on the semiconductor layer 22 from the back surface D is absorbed by the semiconductor layer 22 before reaching the front surface C, and is almost transmitted through the semiconductor layer 22. It is because it does not. The depth at which half of the blue light having a wavelength of 460 [nm] is absorbed is about 0.3 [μm] with respect to the silicon single crystal. It is also conceivable that a metal pattern that can function as a reflection portion is provided on the blue pixel P _B that does not require the reflection portion 32 at a position where the distance from the semiconductor layer 22 is equal to the reflection portion 32. However, it is conceivable that stray light from pixels of other colors is reflected by the metal pattern of the blue pixel P _B and causes color mixing. Therefore, in the blue pixel P _B , the metal pattern does not exist at a position where the distance from the semiconductor layer 22 is equal to the reflection part 32, or the area of the metal pattern is made smaller than the reflection part 32 of the pixels of other colors, It is preferable to omit the reflection part 32.

In the red pixel P _R (and the green pixel P _G ) provided with the reflection unit 32, the light beam formed through the lens unit of the microlens array 11 enters the photoelectric conversion unit 21 from the back surface D of the semiconductor layer 22. As described above, this light beam can pass through the semiconductor layer 22. In the present embodiment, the reflecting surface R of the reflecting portion 32 is located away from the semiconductor layer 22. The light beam emitted from the surface C of the semiconductor layer 22 passes through the intermediate portion 333 that is a portion of the interlayer insulating film 33 between the reflecting portion 32 and the semiconductor layer 22 (a portion between the surface C and the reflecting surface R). The light is transmitted from the photoelectric conversion unit 21 toward the reflection unit 32. The light beam is reflected by the reflection surface of the reflection unit 32 and travels from the reflection unit 32 to the photoelectric conversion unit 21. Then, the light enters the photoelectric conversion unit 21 from the surface of the semiconductor layer 22. In this way, there may be a light flux that passes through the surface C after passing through the back surface D, is reflected by the reflecting surface R, and passes through the surface C again. This light beam will be described in more detail with reference to FIG. 2 (FIGS. 2A and 2B).

  FIG. 2 is an enlarged view of the vicinity of a portion of the interlayer insulating film 33 located between the reflecting portion 32 and the semiconductor layer 22. The dashed-dotted line in FIG. 2 indicates the outline of a light beam (hereinafter referred to as an outward light beam) from the photoelectric conversion unit 21 toward the reflection unit 32. A two-dot chain line in FIG. 2 indicates an outline of a light beam (hereinafter referred to as a return light beam) traveling from the reflection unit 32 to the photoelectric conversion unit 21. The forward beam and the return beam are beams whose pointing vectors are opposite to each other. Let S1 be the cross-sectional area of the surface beam C of the semiconductor layer 22 of the outward light flux. Let S2 be the cross-sectional area of the forward light flux at the intermediate portion 333. Let S3 be the cross-sectional area of the outgoing beam (and the returning beam) at the reflecting surface R. Let S4 be the cross-sectional area of the return beam at the intermediate portion 333. The cross-sectional area of the return path light beam on the surface C of the semiconductor layer 22 is S5.

In FIG. 2, a portion corresponding to the width of the light beam is shown as a cross-sectional area for convenience. In the red pixel P _R (and the green pixel P _G ) including the reflection part 32, the cross-sectional area S3 of the outward light flux in the reflection surface R is smaller than the cross-sectional area S2 of the outward light flux in the intermediate part 333, and the return light flux in the intermediate part 333. It has a structure (S2>S3> S4) that is larger than the cross-sectional area S4. Further, the cross-sectional area S5 of the return light beam on the surface C is smaller than the cross-sectional area S1 of the forward light beam on the surface C (S1> S5). In the above description, FIG. 2A shows a case where S4 <S3 and S4 <S5. FIG. 2 (b) shows that S3>S4> S5. The cross-sectional area S5 of the return light beam on the surface C is preferably smaller than the cross-sectional area S3 of the return light beam on the reflecting surface R (S3> S5). As a result, color mixing caused by the return light beam entering the photoelectric conversion unit 21 different from the forward light beam can be suppressed.

  In the fixed imaging device I, wiring for supplying power, driving pixels, or reading signals is provided on the surface C side (second surface side) of the semiconductor layer 22. For this reason, it is difficult to provide a reflecting portion having a reflecting surface R having the same size as the entire area of the surface C. If the reflection part is divided and provided, a wiring pattern or a plug constituting the wiring described above can be arranged between the reflection parts. A plurality of reflecting portions having a relatively large reflecting surface can be provided over a plurality of types of pixels. By arranging the reflection part 32 having a reflection surface having a large area with respect to the photoelectric conversion part 21 over a plurality of pixels, the utilization efficiency of incident light can be improved and the photosensitivity of the solid-state imaging device I can be improved. In addition to layout constraints, color mixing due to stray light can also increase. Therefore, it is preferable that the reflection part 32 has the area S0 as small as possible. The area S0 of the reflection surface R is preferably larger than the cross-sectional area S1 on the surface C of the outward light beam (S0> S1).

FIG. 3A shows five examples in which the positions of the condensing points X are different from each other.
The first example illustrates the relationship of S1 <S2 <S3. That is, the first example schematically shows a case where the condensing point X is formed inside the photoelectric conversion unit 21. The second example illustrates the relationship of S2 <S1 and S2 <S3, and the second example schematically illustrates a case where the condensing point X is formed between the photoelectric conversion unit 21 and the reflection unit 32. Show. That is, the second example shows a case where S2 <S1 and S2 <S3 are satisfied in at least a part of the intermediate portion 333. The third example schematically shows a case where the condensing point X is formed on the surface of the reflecting portion 32 in the case where the relationship of S1>S2> S3 is established.

  In the fourth example, among the cases where the relationship of S1> S2> S3 holds, S2> S3> S4 is satisfied, and S4 <S3 and S4 <S5 (that is, the condensing point X is the same as the photoelectric conversion unit 21). The case where it is formed between the reflecting portions 32) is schematically shown. Here, S4 <S3 and S4 <S5 indicate a case where at least a part of the intermediate portion 333 is satisfied. In the fifth example, among the cases where the relationship of S1> S2> S3 holds, S2> S3> S4 is established, and S3> S4> S5 (that is, the condensing point X is inside the photoelectric conversion unit 21). (When formed) is schematically shown.

  The condensing point X indicates a point where the cross-sectional area of the light flux of the normal incident light becomes the smallest after the light passes through the optical region 10 and before or is reflected by the reflecting portion 32. Yes. Similarly, the condensing point Y is the point at which the cross-sectional area of the light beam of obliquely incident light becomes the smallest after the light passes through the optical region 10 and before or is reflected by the reflecting portion 32. Is shown. The condensing point X or Y is a point at which the cross-sectional area of the light beam of the normal incident light or the oblique incident light becomes the smallest by the entire optical system of the solid-state imaging device I. The magnitude relation of the cross-sectional area of the light beam described above can be similarly established not only in vertically incident light but also in obliquely incident light.

  The position of the condensing point X or Y is not determined only by the focal length of one lens portion of the microlens array 11. That is, the normal incident light or the oblique incident light is refracted at each interface of the members constituting the optical system, and the cross-sectional area of the light beam becomes the smallest when the light is reflected or reflected by the reflecting portion 32. Let the point be the condensing point X or Y. Refraction at the back surface C and the front surface D can greatly affect the positions of the condensing points X and Y. This is because the refractive index difference between silicon oxide or silicon nitride used for the insulator layer and silicon used for the semiconductor layer is larger than the refractive index difference between silicon oxide and silicon nitride. Note that the back surface C may be an interface between the optical region 10 and the semiconductor region 20. The surface D can be an interface between the semiconductor region 20 and the wiring region 30.

  FIG. 3B shows the calculation result of the color mixture ratio generated between adjacent pixels in the solid-state imaging device I for each of the normal incident light and the oblique incident light. Here, the normal incident light exemplifies light (incident angle 0 °) incident on the front surface A that is the incident surface from a direction perpendicular to the surface C, and the oblique incident light is in a direction oblique to the surface C. The light (incident angle 15 degrees) which injected into the front surface A which is an incident surface is illustrated. Similarly, FIG. 3C shows calculation results of the light sensitivity of the solid-state imaging device I for each of the vertically incident light and the obliquely incident light. These calculation results illustrate green light having a wavelength λ = 550 [nm].

  Here, in the first to third examples, since the vertical incident light is reflected toward the outside of the pixel P by the reflection unit 32, stray light incident on the adjacent pixel is generated, and color mixing is performed between the adjacent pixels. Can bring.

  Further, as described above, the area of the reflecting portion 32 is preferably as small as possible. However, when the condensing points X and Y are in the semiconductor layer 22 as in the first example, the cross-sectional area of the light flux near the reflecting surface R exceeds the area S0 of the reflecting surface R and is not reflected by the reflecting portion 32. Light can be generated. Further, since the condensing point Y of obliquely incident light is shifted from the condensing point X of vertically incident light, the ratio of light that removes the reflecting surface R increases. As a result, according to the first example, the amount of light that is not reflected by the reflecting portion 32 in the oblique incident light increases, and the photosensitivity can be lowered.

  In the third example, obliquely incident light is not reflected by the reflecting section 32, and the photosensitivity may be lowered. This is because in the third example, since the cross-sectional area S3 of the light beam on the reflecting surface R is very small, most of the light is not reflected if the reflecting surface R is removed even a little.

  On the other hand, in the fourth example and the fifth example, the vertically incident light is reflected toward the inside of the pixel P (or the inside of the photoelectric conversion unit 21) by the reflection unit 32, thereby suppressing color mixing between adjacent pixels. To do. In particular, in the fourth comparative example, the photoelectric conversion efficiency in the photoelectric conversion unit 21 of incident light and reflected light is the best, and the result is that the photosensitivity of the solid-state imaging device I is improved. In addition, with respect to the oblique incident light, under the above structure, the light is effectively reflected toward the photoelectric conversion unit 21 in the reflection unit 32, and a decrease in light sensitivity can be suppressed.

  Therefore, according to the present embodiment, in the backside illumination type solid-state imaging device I, it is possible to improve the photosensitivity while preventing color mixture with respect to both the normal incident light and the oblique incident light. Therefore, the solid-state imaging device I can realize a good F value proportionality in the imaging system. In addition, it is possible to reduce the sensitivity difference between the central portion and the peripheral portion of the imaging region of the solid-state imaging device I and to achieve good in-screen uniformity.

That is, the solid-state imaging device I may be designed to satisfy the condition that the cross-sectional area of the light beam becomes the smallest after the normal incident light passes through the optical region 10 and is reflected by the reflection unit 32. This can, for example, may if made the above design for the green light for the green pixel P _G, it suffices made the above design for red light for a red pixel P _R.

  The behavior of light in the solid-state imaging device I can be examined by using a three-dimensional wave optical analysis simulator using a time domain difference method (FDTD method: Finite Difference Time Domain method). The forward light flux and the backward light flux can be distinguished by the direction of the pointing vector. The condensing points X and Y can be determined by the strength of the pointing vector.

  The solid-state imaging device I can be manufactured using a known semiconductor manufacturing process. Specifically, for example, first, an N-type impurity is injected from the surface C side of the P-type semiconductor substrate to form the photoelectric conversion unit 21. Next, on the surface C, for example, the wiring region 30 including the interlayer insulating film 33 and each wiring layer and the reflection portion 32 provided therein is formed. Next, it polishes from the opposite side to the surface C of the semiconductor substrate in which the photoelectric conversion part 21 was formed, and the semiconductor layer 22 of appropriate thickness is obtained.

  Thereafter, the optical region 10 is provided on the back surface D (the first surface side), which is the surface on the polished side of the semiconductor layer 22. Considering the configuration of the optical region 10, the thickness of the semiconductor layer 22, the refractive index of the members constituting these, and the like, the position and size of the reflecting portion 32 so as to satisfy the above-described conditions of the condensing points X and Y. Can also be designed. Further, for example, the intermediate film 12 may be composed of a plurality of layers having light transmittance, or for each type of pixel P so as to satisfy the above-described condition for the wavelength of light corresponding to the type of pixel P. The intermediate film 12 may be designed.

  As mentioned above, although embodiment was described, this invention is not restricted to these, According to the objective, a state, a use, a function, and other specifications, it can change suitably and can also be made by other embodiment. sell. For example, as illustrated in FIG. 4A, the optical region 10 may include a light blocking unit 14 that blocks light at the boundary with the adjacent pixel P. According to this configuration, the light incident on the microlens 11 of the pixel P is prevented from entering the adjacent pixel without entering the corresponding photoelectric conversion unit 21, and color mixing between the adjacent pixels is prevented. be able to.

  Further, as illustrated in FIG. 4B, in the optical region 10, a portion (low refractive index portion 15) having a lower refractive index than the light passing portion is formed at the boundary with the adjacent pixel P. Also good. In the example of FIG. 4B, the light passage portion is a wavelength selection portion of the color filter array 13, but may be a light passage portion of the microlens array 11 or the intermediate film 12. The low refractive index portion 15 can be made of, for example, gas, resin, or silicon oxide. As illustrated in FIG. 4B, the low refractive index portion 15 is disposed between the light passing portions (light transmitting portions) of the color filter array 13. For example, in the intermediate film 12, a plurality of silicon nitride portions may be arranged as light passage portions, and a silicon oxide portion as a low refractive index portion may be disposed between the silicon nitride portions. As described above, according to the configuration having the low refractive index portion, the light that is directed to the low refractive index portion 15 among the light incident on the microlens 11 of the pixel P is converted by the low refractive index portion 15 into the photoelectric conversion portion 21 of the pixel P. Therefore, it is possible to prevent color mixture between adjacent pixels.

  Further, as illustrated in FIG. 4C, the intermediate film 12 may be configured by at least two members (or layers) having different refractive indexes. Further, the in-layer lens array 16 may be formed in the intermediate film 12 by the boundary between the at least two members (or layers) having a curved surface (or a predetermined curvature). The in-layer lens array 16 is provided between the microlens array 11 and the semiconductor region 20 in which the photoelectric conversion units 21 are arranged. The intralayer lens array 16 is provided between the semiconductor region 20 in which the photoelectric conversion units 21 are arranged and the color filter array 13. In one pixel, the microlens array 11 may constitute a first lens unit, and the in-layer lens array 16 may constitute a second lens unit.

  Furthermore, as illustrated in FIG. 4D, the reflection surface of the reflection unit 32 may have a concave shape that reflects light toward the center of the photoelectric conversion unit 21. The shape of the reflecting surface may be, for example, a curved surface shape having a predetermined curvature or a triangular shape. According to this configuration, since the light transmitted through the photoelectric conversion unit 21 is effectively reflected toward the photoelectric conversion unit 21 by the reflection unit 32, the photosensitivity is further improved compared to the case where the reflection surface is flat. Yes.

  An imaging system can be constructed using the solid-state imaging device described above. The imaging system includes not only a camera whose main purpose is photography but also an electronic device (for example, a personal computer or a portable terminal) that is supplementarily provided with a photography function. The imaging system can include a solid-state imaging device exemplified as the above-described embodiment and a processing unit that processes a signal output from the solid-state imaging device. The processing unit can include, for example, a processor that processes digital data based on signal charges generated in the photoelectric conversion unit 21. An A / D converter that generates digital data can be mounted on-chip in a solid-state imaging device, or can be a separate chip. Alternatively, an SIP (System In Package) may be configured by forming an integrated circuit such as a processor on the support substrate 40. The imaging system can include a display unit that displays an image obtained from the solid-state imaging device and a storage unit that stores image data.

Claims (11)

A semiconductor layer having first and second surfaces opposite to each other; a first region provided on the first surface side of the semiconductor layer; and on the second surface side of the semiconductor layer. A solid-state imaging device comprising: a second region provided;
A plurality of photoelectric conversion units are arranged in the semiconductor layer, and in the first region, a plurality of lens units each focusing light are arranged along the first surface, and the second region A plurality of reflecting portions each reflecting light are arranged along the second surface,
The solid-state imaging device
A light beam that has entered the photoelectric conversion unit from the first surface side through the lens unit passes through the second surface and is reflected by the reflection surface of the reflection unit, and the photoelectric conversion from the second surface side. Including pixels incident on the part,
In the pixel, after the light beam passes through the photoelectric conversion unit and is reflected toward the photoelectric conversion unit by the reflection surface of the reflection unit, and before entering the photoelectric conversion unit again, a focal point is obtained. A solid-state imaging device characterized by having a structure connecting the two . The cross-sectional area of the light beam on the reflection surface is smaller than the cross-sectional area of the light beam traveling from the photoelectric conversion unit to the reflection unit between the photoelectric conversion unit and the reflection unit. Greater than the cross-sectional area of the light flux toward the conversion unit at the portion between the photoelectric conversion unit and the reflection unit, and
The cross-sectional area of the light beam traveling from the reflection unit to the photoelectric conversion unit at a portion between the photoelectric conversion unit and the reflection unit is smaller than the cross-sectional area of the light beam from the reflection unit on the second surface.
The solid-state imaging device according to claim 1. The cross-sectional area on the second surface of the light beam traveling from the reflection unit to the photoelectric conversion unit is smaller than the cross-sectional area on the second surface of the light beam traveling from the photoelectric conversion unit to the reflection unit. Or the solid-state imaging device of Claim 2 . From the reflecting section according to any one of claims 1 to 3, wherein the cross-sectional area of the second surface of the light beam toward the photoelectric conversion section is smaller than the cross-sectional area in the reflective surface of the light flux Solid-state imaging device. The first region is provided with a red light selection portion that selectively transmits red light, a green light selection portion that selectively transmits green light, and a blue light selection portion that selectively transmits blue light. , the light beam is a solid-state imaging device according to any one of claims 1 to 4, characterized in that through the said red light selecting unit and the green light selecting unit. In a pixel including a photoelectric conversion unit on which a light beam having passed through the blue light selection unit is incident, an area of a metal pattern whose distance from the semiconductor layer is equal to that of the reflection unit is smaller than an area of the reflection surface, or the semiconductor layer The solid-state imaging device according to claim 5 , wherein a metal pattern does not exist at a position where the distance from the reflector is equal to the reflecting portion. Wherein the first region, the solid-state imaging device according to any one of claims 1 to 6, characterized in that it comprises a light blocking portion for blocking light. The first region includes a plurality of light transmission parts and a low refractive index part having a refractive index lower than that of the light transmission parts and disposed between the light transmission parts. 8. The solid-state imaging device according to any one of items 1 to 7 . The said 1st area | region further contains a wavelength selection part and the lens part provided between the said wavelength selection part and the said photoelectric conversion part. The any one of Claims 1 thru | or 8 characterized by the above-mentioned. The solid-state imaging device described. The reflective surface, the solid-state imaging device according to any one of claims 1 to 9, wherein the concave. A solid-state imaging device according to any one of claims 1 to 10 ,
An imaging system comprising: a processing unit that processes a signal output from the solid-state imaging device.