JP5953795B2 - Photosensitive resin composition, method for producing patterned cured film, and electronic component - Google Patents

Description

  The present invention relates to a heat-resistant positive photosensitive resin composition containing a heat-resistant polymer having photosensitivity, a pattern production method using the same, and an electronic component. In particular, the present invention relates to a photosensitive resin composition that is excellent in sensitivity and excellent in mechanical properties and heat resistance even when cured at a low temperature of 230 ° C. or less, a method for producing a patterned cured film using the same, and an electronic component.

  Conventionally, a resin film containing polyimide having both excellent heat resistance, electrical characteristics, mechanical characteristics, and the like has been used for a surface protective film and an interlayer insulating film of a semiconductor element. In general, this resin film is obtained by reacting tetracarboxylic dianhydride and diamine in a solvent, thinning a polyimide precursor (polyamic acid) solution (so-called resin composition) by spin coating or the like, and thermally dehydrating and closing the ring. Form. This resin composition can simplify the pattern cured film forming process by imparting photosensitive characteristics (see, for example, Patent Document 1).

Conventionally, an organic solvent such as N-methylpyrrolidone has been used for development in the pattern cured film forming step of the resin composition. However, recently, development with an alkaline aqueous solution is desired from the viewpoint of environment and cost. Yes. Thus, a method of mixing a naphthoquinonediazide compound with a polyimide precursor or polybenzoxazole precursor that can be developed with an alkaline aqueous solution has been proposed (for example, see Patent Document 2).
On the other hand, in the pattern cured film forming step, a process of curing at a low temperature is desired. Normally, when a polyimide precursor or polybenzoxazole precursor is thermally dehydrated and closed to form a polyimide thin film or polybenzoxazole thin film, a high temperature of around 350 ° C. is required. In some cases, the yield of the chip is lowered. In recent years, a package using an organic material as a base material has been developed, and if it is processed at a high temperature, the base material may be defective. However, when the conventional photosensitive resin film is cured at a low temperature, the mechanical properties and heat resistance of the pattern cured film tend to be lowered.

In order to meet such a demand, a composition composed of a soluble polyimide (see, for example, Patent Document 3), a composition composed of an aliphatic polybenzoxazole precursor (see, for example, Patent Document 4), and the like have been proposed. .
However, a composition comprising a soluble polyimide has low UV transmittance because it is imidized, has low sensitivity because it needs to be exposed excessively to form a pattern by exposure / development, and a cured film. There is a problem that the mechanical properties, particularly the elongation is low.
On the other hand, a composition comprising an aliphatic polybenzoxazole precursor can be dehydrated and closed at a low temperature of less than 230 ° C., but has a problem of low thermal properties, particularly a glass transition temperature of less than about 200 ° C. If the glass transition temperature is low, there is a high possibility that a failure will occur in a process that takes about 250 ° C. heat such as a solder reflow process.
That is, the photosensitive resin composition developed so far has not been able to satisfy all of good sensitivity and good mechanical properties and heat resistance when cured at a low temperature of about 230 ° C.

JP 56-38038 A JP-A 64-60630 JP 2006-313237 A JP 2008-224984 A

Accordingly, an object of the present invention is to provide a photosensitive resin composition that provides a patterned cured film having good sensitivity and having good mechanical properties and heat resistance even when cured at a low temperature of about 230 ° C. And
Another object of the present invention is to provide a method for producing a pattern that can be developed with an aqueous alkali solution and that has a good shape with excellent heat resistance and mechanical properties.
It is another object of the present invention to provide a highly reliable electronic component by having a pattern having a good shape and characteristics.

（式中、Ｕ及びＶは各々２価の有機基を示し、Ｖは炭素数１〜３０の脂肪族鎖状構造を有する。）
で示される構造単位を有するポリベンゾオキサゾール前駆体と、
（ｂ）有機溶剤及びアルカリ溶液に可溶のポリイミドと、
（ｃ）加熱により（ａ）及び（ｂ）成分と反応し得る化合物と、
（ｄ）活性光線照射により酸を発生する化合物と、
（ｅ）溶剤と、
を含有し、（ａ）成分と（ｂ）成分の総量１００質量部に対して、（ａ）成分が３０〜７０質量部である、感光性樹脂組成物。
（２）（ａ）成分が、以下に示す一般式（II）：

（式中、Ｒ^１、Ｒ^２は各々独立に水素、フッ素又は炭素数１〜６のアルキル基、Ｕは２価の有機基を示し、ａ’は１〜３０の整数である。）
で表されることを特徴とする前記感光性樹脂組成物。
（３）前記一般式（II）のａ’が７〜３０の整数である、前記感光性樹脂組成物。
（４）前記（ｂ）成分が、下記一般式（III）：

（式中、Ｚは二価の有機基、Ｗは四価の有機基である。）
で示される構造単位を有する、前記感光性樹脂組成物。
（５）（ｃ）成分が、分子内に二つ以上のメチロール基又はアルコキシアルキル基を有する化合物である前記感光性樹脂組成物。
（６）（ｄ）成分が、ｏ−キノンジアジド化合物である前記感光性樹脂組成物。
（７）さらに、（ｆ）成分として加熱により酸を発生する熱酸発生剤を含む前記感光性樹脂組成物。
（８）前記感光性樹脂組成物を支持基板上に塗布し乾燥し、感光性樹脂膜を得る工程と、前記乾燥工程により得られた感光性樹脂膜を露光する工程と、前記露光後の感光性樹脂膜をアルカリ水溶液を用いて現像しパターン樹脂膜を得る工程と、前記現像後の感光性樹脂膜を加熱処理する工程とを含むパターン硬化膜の製造方法。
（９）前記の製造方法において、現像後の感光性樹脂膜を加熱処理する工程が２３０℃以下で行なわれることを特徴とするパターン硬化膜の製造方法。
（１０）前記パターン硬化膜の製造方法により得られるパターン硬化膜を用いた層間絶縁膜又は表面保護膜。
（１１）前記層間絶縁膜又は表面保護膜を有する電子部品。 The present invention relates to the following.
(1) (a) The following general formula (I):

(In the formula, U and V each represent a divalent organic group, and V has an aliphatic chain structure having 1 to 30 carbon atoms.)
A polybenzoxazole precursor having a structural unit represented by:
(B) a polyimide soluble in an organic solvent and an alkaline solution;
(C) a compound capable of reacting with the components (a) and (b) by heating;
(D) a compound that generates an acid upon irradiation with actinic rays;
(E) a solvent;
The photosensitive resin composition whose (a) component is 30-70 mass parts with respect to 100 mass parts of total amounts of (a) component and (b) component.
(2) The component (a) is represented by the following general formula (II):

(In the formula, R ¹ and R ² are each independently hydrogen, fluorine or an alkyl group having 1 to 6 carbon atoms, U is a divalent organic group, and a ′ is an integer of 1 to 30.)
The said photosensitive resin composition characterized by these.
(3) The said photosensitive resin composition whose a 'of the said general formula (II) is an integer of 7-30.
(4) The component (b) is represented by the following general formula (III):

(In the formula, Z is a divalent organic group, and W is a tetravalent organic group.)
The said photosensitive resin composition which has a structural unit shown by these.
(5) The photosensitive resin composition, wherein the component (c) is a compound having two or more methylol groups or alkoxyalkyl groups in the molecule.
(6) The said photosensitive resin composition whose (d) component is an o-quinonediazide compound.
(7) The photosensitive resin composition further comprising a thermal acid generator that generates an acid by heating as the component (f).
(8) A step of applying the photosensitive resin composition onto a support substrate and drying to obtain a photosensitive resin film, a step of exposing the photosensitive resin film obtained by the drying step, and a photosensitivity after the exposure. A method for producing a cured pattern film, comprising: developing a photosensitive resin film with an alkaline aqueous solution to obtain a patterned resin film; and heating the photosensitive resin film after the development.
(9) In the manufacturing method described above, the process for heat-treating the photosensitive resin film after development is performed at 230 ° C. or lower.
(10) An interlayer insulating film or a surface protective film using a patterned cured film obtained by the method for producing a patterned cured film.
(11) An electronic component having the interlayer insulating film or surface protective film.

  The photosensitive resin composition of the present invention has high sensitivity, and the film formed and heat-cured has excellent heat resistance and mechanical properties.

It is a figure which shows the manufacturing process of the semiconductor device which has a multilayer wiring structure.

（式中、Ｕ及びＶは各々２価の有機基を示し、Ｖは炭素数１〜３０の脂肪族鎖状構造を有する。）
（ｂ）有機溶剤及びアルカリ溶液に可溶のポリイミド
（ｃ）加熱により（ａ）及び（ｂ）成分と反応し得る化合物
（ｄ）活性光線照射により酸を発生する化合物
（ｅ）溶剤
そして、（ａ）成分と（ｂ）成分の総量１００質量部に対して、（ａ）成分が３０〜７０質量部である。
以下、各成分について説明する。 Hereinafter, embodiments of the present invention will be described. The present invention is not limited to the following embodiments.
(Resin composition)
The resin composition of the present invention is characterized by containing the following components (a) to (e).
(A) a polybenzoxazole precursor having a structural unit represented by the following general formula (I)

(In the formula, U and V each represent a divalent organic group, and V has an aliphatic chain structure having 1 to 30 carbon atoms.)
(B) a polyimide soluble in an organic solvent and an alkaline solution (c) a compound capable of reacting with the components (a) and (b) by heating (d) a compound that generates an acid upon irradiation with active light (e) and ( (a) component is 30-70 mass parts with respect to 100 mass parts of total amounts of a) component and (b) component.
Hereinafter, each component will be described.

(A: polybenzoxazole precursor)
The resin composition of the present invention contains a polybenzoxazole precursor having a structural unit represented by the above general formula (I).
The amide unit containing the hydroxy group of the polyoxazole precursor represented by the general formula (I) is converted into an oxazole body excellent in heat resistance, mechanical properties, and electrical properties by dehydration ring closure at the time of curing.
The alkaline solution is an alkaline solution such as a tetramethylammonium hydroxide aqueous solution, a metal hydroxide aqueous solution, or an organic amine aqueous solution.

  One criterion that the component (a) used in the present invention is soluble in an alkaline solution is as follows. (A) After the component is dissolved in an arbitrary solvent to form a solution, spin coating / baking (solvent removal step: 120 ° C./3 minutes) is performed on a substrate such as a silicon wafer to produce a coating film of about 5 μm. . This substrate is immersed in one of a tetramethylammonium hydroxide aqueous solution, a metal hydroxide aqueous solution, and an organic amine aqueous solution at 20 to 25 ° C. When all the coating films can be dissolved by this treatment, the component (a) used is soluble in an alkaline solution.

（式中、Ｒ^１、Ｒ^２は各々独立に水素、フッ素又は炭素数１〜６のアルキル基、Ｕは２価の有機基を示し、ａ’は１〜３０の整数である。）
で表される化合物であることがより好ましい。 The component (a) has a high dehydration ring closure rate in the heating step at a low temperature (about 230 ° C. or less), and is shown below from the viewpoint of showing good heat resistance, mechanical properties, and high transparency in the ultraviolet and visible light regions. General formula (II):

(In the formula, R ¹ and R ² are each independently hydrogen, fluorine or an alkyl group having 1 to 6 carbon atoms, U is a divalent organic group, and a ′ is an integer of 1 to 30.)
It is more preferable that it is a compound represented by these.

  The divalent organic group represented by U in the general formula (I) is generally a diamine residue that reacts with a dicarboxylic acid to form a polyamide structure. The divalent organic group represented by V in the general formula (I) is generally a dicarboxylic acid residue that reacts with a diamine to form a polyamide structure. When V is a group containing an aliphatic chain structure, dehydration ring closure tends to occur at a low temperature (230 ° C. or lower), and high transparency is obtained in the ultraviolet and visible light range. Further, when V is an aliphatic straight chain structure having 7 to 30 carbon atoms, that is, a ′ in the formula (II) is an integer of 7 to 30, the polymer may be γ-butyrolactone in addition to N-methyl-2-pyrrolidone. And is easily soluble in solvents such as propylene glycol monomethyl ether acetate and not only has high storage stability when dissolved in a solvent, but also has a low elastic modulus and high elongation at break when cured to polybenzoxazal. More preferable.

  Since the polybenzoxazole precursor (a) used in the present invention is usually developed with an alkaline solution, it is preferably soluble in the alkaline solution. In the present invention, for example, a structure of a polyamide that is not a polybenzoxazole precursor other than the general formula (I), a structure of a polybenzoxazole precursor other than (I), a polyimide or a polyimide precursor (polyamic acid or polyamic acid ester) ) Together with the structure of the polyoxazole precursor of the general formula (I).

  The molecular weight of the component (a) is preferably 3,000 to 200,000, more preferably 5,000 to 100,000 in terms of weight average molecular weight. Here, the molecular weight is a value obtained by measuring by a gel permeation chromatography method and converting from a standard polystyrene calibration curve.

In this invention, there is no restriction | limiting in particular in the manufacturing method of the polybenzoxazole precursor represented by general formula (I) of (a) component, Generally it can synthesize | combine from a dicarboxylic acid derivative and hydroxy group containing diamine. Specifically, it can be synthesized by converting a dicarboxylic acid derivative into a dihalide derivative and then reacting with the diamines. As the dihalide derivative, a dichloride derivative is preferable.
The dichloride derivative can be synthesized by reacting a dicarboxylic acid derivative with a halogenating agent. As the halogenating agent, thionyl chloride, phosphoryl chloride, phosphorus oxychloride, phosphorus pentachloride, etc., which are used in the usual acid chlorideation reaction of carboxylic acid can be used.
As a method of synthesizing the dichloride derivative, it can be synthesized by reacting the dicarboxylic acid derivative and the halogenating agent in a solvent, or reacting in an excess halogenating agent and then distilling off the excess. As the reaction solvent, N-methyl-2-pyrrolidone, N-methyl-2-pyridone, N, N-dimethylacetamide, N, N-dimethylformamide, toluene, benzene and the like can be used.

  The amount of these halogenating agents to be used in a solvent is preferably 1.5 to 3.0 mol, more preferably 1.7 to 2.5 mol relative to the dicarboxylic acid derivative. When making it react in an agent, 4.0-50 mol is preferable and 5.0-20 mol is more preferable. The reaction temperature is preferably -10 to 70 ° C, more preferably 0 to 20 ° C.

  The reaction between the dichloride derivative and the diamine is preferably performed in an organic solvent in the presence of a dehydrohalogenating agent. When an amide solvent is used as the solvent, the reaction can be performed without using a dehydrohalogenating agent. As the dehydrohalogenating agent, organic bases such as pyridine and triethylamine are usually used. As the organic solvent, N-methyl-2-pyrrolidone, N-methyl-2-pyridone, N, N-dimethylacetamide, N, N-dimethylformamide and the like can be used. The reaction temperature is preferably −10 to 30 ° C., more preferably 0 to 20 ° C.

  Examples of the diamine used for synthesizing the polybenzoxazole precursor represented by the general formula (I) include 3,3′-diamino-4,4′-dihydroxybiphenyl, 4,4′-diamino-3,3 ′. -Dihydroxybiphenyl, bis (3-amino-4-hydroxyphenyl) sulfone, bis (4-amino-3-hydroxyphenyl) sulfone, 2,2-bis (3-amino-4-hydroxyphenyl) -1,1, 1,3,3,3-hexafluoropropane, 2,2-bis (4-amino-3-hydroxyphenyl) -1,1,1,3,3,3-hexafluoropropane, 2,2-bis ( 3-amino-4-hydroxyphenyl) propane, 2,2-bis (4-amino-3-hydroxyphenyl) propane, and the like, but are not limited thereto. . These diamines can be used alone or in combination of two or more.

  Moreover, the following diamine can also be used together with the above-mentioned diamine having a hydroxy group. Examples of such diamines include 4,4′-diaminodiphenyl ether, 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenylsulfone, 4,4′-diaminodiphenyl sulfide, benzidine, m-phenylenediamine, p. -Phenylenediamine, 1,5-naphthalenediamine, 2,6-naphthalenediamine, bis (4-aminophenoxyphenyl) sulfone, bis (3-aminophenoxyphenyl) sulfone, bis (4-aminophenoxy) biphenyl, bis [4 Commercially available product name "LP" as aromatic diamine compounds such as-(4-aminophenoxy) phenyl] ether, 1,4-bis (4-aminophenoxy) benzene, and other silicone-containing diamines. -7100 "," X-22-161AS "," -22-161A "," X-22-161B "," X-22-161C "and" X-22-161E "(all manufactured by Shin-Etsu Chemical Co., Ltd.), etc., but are not limited thereto. It is not a thing. These compounds can be used alone or in combination of two or more.

  Examples of the dicarboxylic acids used for synthesizing the polybenzoxazole precursor represented by the general formula (I) include malonic acid, dimethylmalonic acid, ethylmalonic acid, isopropylmalonic acid, di-n-butylmalonic acid, and succinic acid. Acid, tetrafluorosuccinic acid, methylsuccinic acid, 2,2-dimethylsuccinic acid, 2,3-dimethylsuccinic acid, dimethylmethylsuccinic acid, glutaric acid, hexafluoroglutaric acid, 2-methylglutaric acid, 3 -Methyl glutaric acid, 2,2-dimethyl glutaric acid, 3,3-dimethyl glutaric acid, 3-ethyl-3-methyl glutaric acid, adipic acid, octafluoroadipic acid, 3-methyladipic acid, octafluoroadipic acid, Pimelic acid, 2,2,6,6-tetramethylpimelic acid, suberic acid, dodecafluoro Beric acid, azelaic acid, sebacic acid, hexadecafluorosebacic acid, 1,9-nonanedioic acid, dodecanedioic acid, tridecanedioic acid, tetradecanedioic acid, pentadecanedioic acid, hexadecanedioic acid, heptadecanedioic acid, octadecanedioic acid , Nonadecanedioic acid, eicosandioic acid, heneicosandioic acid, docosandioic acid, tricosandioic acid, tetracosandioic acid, pentacosandioic acid, hexacosandioic acid, heptacosandioic acid, octacosandioic acid, nonacosandioic acid, triacontanedioic acid, Examples include hentriacontanedioic acid, dotriacontanedioic acid, and diglycolic acid.

  In addition, the following aromatic dicarboxylic acid may be used in combination with the above-described dicarboxylic acid having an aliphatic chain. Aromatic dicarboxylic acids include isophthalic acid, terephthalic acid, 2,2-bis (4-carboxyphenyl) -1,1,1,3,3,3-hexafluoropropane, 4,4′-dicarboxybiphenyl, 4,4′-dicarboxydiphenyl ether, 4,4′-dicarboxytetraphenylsilane, bis (4-carboxyphenyl) sulfone, 2,2-bis (p-carboxyphenyl) propane, 5-tert-butylisophthalic acid, 5-Bromoisophthalic acid, 5-fluoroisophthalic acid, 5-chloroisophthalic acid, 2,6-naphthalenedicarboxylic acid and the like can be mentioned, and these compounds can be used alone or in combination of two or more.

  Furthermore, when the polybenzoxazole having a repeating unit represented by the general formula (I) has any functional group of a phenolic hydroxyl group, an amino group or an alkylamino group at the polymer terminal, the reaction with the component (c) From the point of view, it is more preferable. For example, a terminal group having a phenol hydroxyl group can be introduced into the polymer by using a phenol derivative having an amino group and a hydroxybenzoic acid derivative.

(Component (b): polyimide soluble in organic solvents and alkaline solutions)
The component (b) used in the present invention is a polyimide that is soluble in an organic solvent and is an alkaline solution, and is not particularly limited as long as it can react with the component (c) by heat.
Examples of the organic solvent include N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, γ-butyrolactone, N, N-dimethylacetamide, N, N-dimethylformamide, 1,3-dimethyl-2- Imidazolidinone, tetramethylurea, N-formylpiperidine, dimethyl sulfoxide, 2-methoxyethanol, diethylene glycol diethyl ether, diethylene glycol dibutyl ether, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, methyl lactate, lactic acid Ethyl, butyl lactate, methyl-1,3-butylene glycol acetate, 1,3-butylene glycol acetate, cyclohexanone, cyclopentanone, tetrahydride There is furan or the like may be used singly or in admixture.

In addition, as one reference | standard that (b) component of this invention is soluble with an organic solvent, (b): solvent = 50 by the weight ratio of (b) component to at least one of the solvent illustrated above. : It is charged at a ratio of 50 to 20:80, and completely dissolved when stirred and mixed with a mix rotor or the like at 20 to 25 ° C.
Furthermore, the component (b) used in the present invention is a polyimide that is soluble in an alkaline solution.
One criterion for alkali solubility is as follows. (B) After the component is dissolved in an arbitrary solvent to form a solution, spin coating / baking (solvent removal step: 120 ° C./3 minutes) is performed on a substrate such as a silicon wafer to produce a coating film of about 5 μm. . This substrate is immersed in one of a tetramethylammonium hydroxide aqueous solution, a metal hydroxide aqueous solution, and an organic amine aqueous solution at 20 to 25 ° C. When all the coating films can be dissolved by this treatment, the component (b) used is soluble in an alkaline solution.
As such (b) component, what is represented by the following general formula is mentioned as a preferable thing.

（式中、Ｘ：４価の有機基、Ｙ：（２＋ｎ）価の有機基、Ｒ：フェノール性水酸基あるいはカルボキシル基を有する１価の有機基又はＹの芳香環に直結する水酸基あるいはカルボキシル基を表す。ｎ：１から４の整数を表し、同一構造中に複数ある場合は同じであっても異なっていても良い。また、Ｘ’：３価の有機基、Ｙ’：２価の有機基、Ｚ：２価の有機基を表す。）

(Wherein X: a tetravalent organic group, Y: a (2 + n) valent organic group, R: a monovalent organic group having a phenolic hydroxyl group or a carboxyl group, or a hydroxyl group or a carboxyl group directly bonded to the Y aromatic ring. N: represents an integer of 1 to 4, and may be the same or different when there are a plurality of them in the same structure, X ′: a trivalent organic group, Y ′: a divalent organic group Z represents a divalent organic group.)

  Here, the general formula (A) is preferable in that it does not require chemical change in the heat treatment process to exhibit sufficient film properties, and is preferable in that it is suitable for processing at a lower temperature. (B) to (D) Is preferable in terms of low water absorption because the hydroxyl group is converted in the heat treatment step.

  X and X ′ in the structural units represented by the general formulas (A) to (D) are specifically benzene, naphthalene, perylene, biphenyl, diphenyl ether, diphenylsulfone, diphenylpropane, diphenylhexafluoropropane, Typical examples include tetravalent or trivalent aromatic hydrocarbon residues each having a skeleton such as benzophenone, or tetravalent or trivalent aliphatic hydrocarbon residues each having a skeleton such as butane and cyclobutane. However, it is not limited to these. The number of carbon atoms is preferably 4-30. Preferred groups are tetravalent or trivalent residues of benzene, biphenyl, diphenyl ether and diphenylhexafluoropropane. If necessary, two or more of the groups exemplified above as X or X ′ may be contained in the molecule of the polyamic acid derivative.

  Y or Y ′ in the structural units represented by the general formulas (A) to (D) is specifically diphenyl ether, diphenylthioether, benzophenone, diphenylmethane, diphenylpropane, diphenylhexafluoropropane, diphenylsulfoxide, diphenylsulfone. Aromatic hydrocarbon residues having a skeleton such as biphenyl and benzene are exemplified as typical examples, but are not limited thereto. The number of carbon atoms is preferably 6-30. Preferred groups are divalent residues of diphenylhexafluoropropane, diphenyl ether, biphenyl and benzene. If necessary, Y or Y ′ may contain two or more of the groups exemplified above.

  In the structural units represented by the general formulas (A) to (D), the organic group represented by Z is an alkylene group having 1 to 10 carbon atoms such as a methylene group, an ethylene group or a propylene group, or an ethylidene group. An alkylidene group having 2 to 10 carbon atoms such as an arylene group having 6 to 30 carbon atoms such as a phenylene group, a group in which some or all of the hydrogen atoms of these hydrocarbon groups are substituted with a halogen atom such as a fluorine atom, A sulfone group, a carbonyl group, an ether bond, a thioether bond, an amide bond, and the like are exemplified as typical examples, but are not limited thereto.

Moreover, in the said general formula (A)-(D), it is more preferable from the point of reaction with (c) component to have any functional group of a phenolic hydroxyl group, an amino group, and an alkylamino group at the polymer terminal. . For example, a terminal group having a phenol hydroxyl group can be introduced into the polymer by using a phenol derivative having an amino group and a hydroxybenzoic acid derivative.
Furthermore, in the polyimide having the structure represented by the general formulas (A) to (D), a part of the repeating unit other than the repeating unit in the structure represented by the general formulas (A) to (D) is included. You may have. In this case, the ratio is preferably 50% or less in all repeating units.

（式中、Ｚは２価の有機基、Ｗは四価の有機基である。）
本発明において（ｂ）成分の合成方法に特に限定は無いが、ジアミンと、テトラカルボン酸二無水物を攪拌した後、加熱環流を行なって、イミド環の環化を行なうことにより得られる。 In the general formula (A), a compound having a structural unit represented by the general formula (III) is preferably used from the viewpoint of solubility in an organic solvent and an alkaline solution.

(In the formula, Z is a divalent organic group, and W is a tetravalent organic group.)
In the present invention, the method for synthesizing the component (b) is not particularly limited, but it can be obtained by stirring the diamine and tetracarboxylic dianhydride and then carrying out heating reflux to cyclize the imide ring.

Specific examples of Z include an alkylene group, a group in which part or all of hydrogen in the alkylene group is replaced with fluorine, an ether group, and the like.
Specifically, W is a tetravalent aromatic hydrocarbon residue having a skeleton such as benzene, naphthalene, perylene, biphenyl, diphenyl ether, diphenylsulfone, diphenylpropane, diphenylhexafluoropropane, benzophenone, or butane, Although each tetravalent aliphatic hydrocarbon residue having a skeleton such as cyclobutane is exemplified as a typical example, it is not limited thereto. The number of carbon atoms is preferably 4-30. Preferred groups are tetravalent residues of benzene, biphenyl, diphenyl ether and diphenylhexafluoropropane.

  Examples of diamines used for synthesizing the polymer represented by the general formula (III) include 2,2-bis (3-amino-4-hydroxyphenyl) -1,1,1,3,3,3-hexa. Fluoropolopan, bis (3-amino-4-hydroxyphenyl) sulfone, bis (3-amino-4-hydroxyphenyl) ether, 2,2-bis (3-amino-4-hydroxyphenyl) propane, and the like. These compounds can be used alone or in combination of two or more.

  Examples of the tetracarboxylic dianhydride used for synthesizing the polymer represented by the general formula (III) include 4,4′-oxydiphthalic anhydride, 3,3 ′, 4,4′-benzophenone tetracarboxylic acid dihydrate. Anhydride, 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride, 3,3 ′, 4,4′-diphenylsulfonic acid tetracarboxylic dianhydride, 1,2,4,5-benzenetetra Carbic acid dianhydride, 4,4 ′-(hexafluoroisopropylidene) diphthalic anhydride, 1,2,3,4-cyclobutanetetracarboxylic dianhydride, 1,2,4,5-cyclohexanetetracarboxylic acid A dianhydride etc. are mentioned, These compounds can be used individually or in combination of 2 or more types.

  In the synthesis of component (b), a more preferred combination of diamine and tetracarboxylic dianhydride is 2,2-bis (3-amino-4-hydroxyphenyl) -1,1,1,3,3. 3-hexafluoropolopan and 4,4′-oxydiphthalic anhydride, 2,2-bis (3-amino-4-hydroxyphenyl) -1,1,1,3,3,3-hexafluoropolopan and 4, 4 ′-(hexafluoroisopropylidene) diphthalic anhydride, bis (3-amino-4-hydroxyphenyl) sulfone and 4,4′-oxydiphthalic anhydride, bis (3-amino-4-hydroxyphenyl) sulfone 4,4 ′-(hexafluoroisopropylidene) diphthalic anhydride and the like.

The molecular weight of the component (b) is preferably 3,000 to 200,000, more preferably 5,000 to 100,000 in terms of weight average molecular weight. Here, the molecular weight is a value obtained by measuring by a gel permeation chromatography method and converting from a standard polystyrene calibration curve.
Furthermore, it is more preferable from the point of reaction with (c) component that (b) component has any functional group of a phenolic hydroxyl group, an amino group, and an alkylamino group at the polymer terminal. For example, a terminal group having a phenol hydroxyl group can be introduced into the polymer by using a phenol derivative having an amino group and a hydroxybenzoic acid derivative. From the viewpoint of mechanical properties and heat resistance, it is preferable to use a polybenzoxazole precursor having a functional group at the polymer terminal as the component (a) and a polyimide having a functional group at the polymer terminal as the component (b). .

The resin composition of this invention contains 30-70 mass parts of (a) component with respect to 100 mass parts of total amounts of (a) component and (b) component. (A) By containing 30-70 mass parts of components, it has the characteristic which is excellent in heat resistance and a mechanical characteristic.
When the total amount of component (a) and component (b) is 100 parts by mass, the content of component (a) is preferably 35 to 65 parts by mass, more preferably 40 to 60 parts by mass.

((C) component: a compound capable of reacting with the (a) component and the (b) component by heating)
The compound capable of reacting with the component (a) and the component (b) by heating, which is the component (c) used in the present invention, is a compound that undergoes heat treatment after coating, exposing and developing the photosensitive resin composition. Reacts with benzoxazole precursor and polyimide, ie bridges. Alternatively, the compound itself is polymerized in the heat treatment step. With the component (c), the cured film can be made tough in curing at a relatively low temperature (230 ° C. or lower), and mechanical properties, chemical resistance, and flux resistance can be improved.

The component (c) is not particularly limited except that it is a compound that reacts with (a) and (b) or the compound itself is polymerized in the heat treatment step, but a methylol group, an alkoxymethyl group, A compound having an epoxy group or a vinyl ether group is preferred. Further, a compound in which these groups are bonded to a benzene ring, or a melamine resin or urea resin in which the N-position is substituted with a methylol group and / or an alkoxymethyl group is preferable. Furthermore, a compound in which these groups are bonded to a benzene ring having a phenolic hydroxyl group is more preferable in that the sensitivity can be improved by increasing the dissolution rate of the exposed area during development.
Among them, a compound having two or more methylol groups and alkoxymethyl groups in the molecule is more preferable in that the film can be prevented from melting when the film is cured after the pattern is formed, and the stability of the varnish.

（式中、Ｘは単結合又は１〜４価の有機基を示し、Ｒ^１１、Ｒ^１２は各々独立に水素原子又は一価の有機基を示し、ｇは１〜４の整数であり、ｐ及びｑは各々独立に０〜４の整数である）

（式中、２つのＹは各々独立に水素原子又は炭素原子数１〜１０のアルキル基で酸素原子、フッ素原子を含んでいても良く、Ｒ^１３〜Ｒ^１６は各々独立に水素原子又は一価の有機基を示し、ｍ及びｎは各々独立に１〜３の整数であり、ｐ及びｑは各々独立に０〜４の整数である） Examples of such compounds include compounds represented by the following general formulas (IV) to (VI).

(In the formula, X represents a single bond or a monovalent to tetravalent organic group, R ¹¹ and R ¹² each independently represents a hydrogen atom or a monovalent organic group, g is an integer of 1 to 4, p And q are each independently an integer of 0 to 4).

(In the formula, two Y's are each independently a hydrogen atom or an alkyl group having 1 to 10 carbon atoms and may contain an oxygen atom or a fluorine atom, and R ^{13 to} R ¹⁶ are each independently a hydrogen atom or a monovalent group. And m and n are each independently an integer of 1 to 3, and p and q are each independently an integer of 0 to 4)

（式中、Ｒ^１７、Ｒ^１８は各々独立に水素原子又は一価の有機基を示し、複数あるＲ^１８は環構造を有していてもよく、また、互いに連結していても良い。）
また、アルカリ水溶液への溶解性の観点から、一般式（IV）〜（VI）で表される化合物の中でも、下記に示される化合物のいずれかであることがより好ましい。

(In the formula, R ¹⁷ and R ¹⁸ each independently represent a hydrogen atom or a monovalent organic group, and a plurality of R ¹⁸ may have a ring structure or may be linked to each other.)
Moreover, from the viewpoint of solubility in an alkaline aqueous solution, among the compounds represented by the general formulas (IV) to (VI), any of the compounds shown below is more preferable.

  Moreover, these compounds can be used individually or in combination of 2 or more types.

Moreover, it is more preferable that it is either the compound represented by the following C1 or C2 from a viewpoint of giving favorable heat resistance and mechanical characteristics to a resin composition.

  The amount of component (c) used in the present invention is such that the sensitivity and resolution during exposure and the melting of the pattern during curing are suppressed, with respect to 100 parts by mass of the total amount of components (a) and (b). The amount is preferably 0.1 to 50 parts by mass, more preferably 0.5 to 40 parts by mass, and still more preferably 1 to 30 parts by mass.

((D) component: a compound that generates an acid upon irradiation with actinic rays)
The compound (d) used in the present invention, which generates an acid by light, is a photosensitizer and has a function of generating an acid and increasing the solubility of the light irradiated part in an alkaline aqueous solution. . However, it is preferable that the acid generated does not cause a reaction between the component (a) or the component (b) and the component (c). Examples of the type include o-quinonediazide compounds, aryldiazonium salts, diaryliodonium salts, triarylsulfonium salts, and the like. Although there is no particular limitation, o-quinonediazide compounds are preferable because they have high sensitivity.

  The o-quinonediazide compound can be obtained, for example, by subjecting o-quinonediazidesulfonyl chlorides to a hydroxy compound, an amino compound or the like in the presence of a dehydrochlorinating agent. Examples of the o-quinonediazide sulfonyl chlorides include benzoquinone-1,2-diazide-4-sulfonyl chloride, naphthoquinone-1,2-diazide-5-sulfonyl chloride, and naphthoquinone-1,2-diazide-4-sulfonyl chloride. Etc. can be used.

  Examples of the hydroxy compound include hydroquinone, resorcinol, pyrogallol, bisphenol A, bis (4-hydroxyphenyl) methane, 2,2-bis (4-hydroxyphenyl) hexafluoropropane, and 2,3,4-trihydroxybenzophenone. 2,3,4,4′-tetrahydroxybenzophenone, 2,2 ′, 4,4′-tetrahydroxybenzophenone, 2,3,4,2 ′, 3′-pentahydroxybenzophenone, 2,3,4, 3 ′, 4 ′, 5′-hexahydroxybenzophenone, bis (2,3,4-trihydroxyphenyl) methane, bis (2,3,4-trihydroxyphenyl) propane, 4b, 5,9b, 10-tetrahydro -1,3,6,8-tetrahydroxy-5,10-dimethylindeno [2, -a] indene, tris (4-hydroxyphenyl) methane, tris (4-hydroxyphenyl) ethane and the like can be used.

  Examples of amino compounds include p-phenylenediamine, m-phenylenediamine, 4,4′-diaminodiphenyl ether, 4,4′-diaminodiphenylmethane, 4,4′-diaminodiphenylsulfone, and 4,4′-diaminodiphenyl sulfide. , O-aminophenol, m-aminophenol, p-aminophenol, 3,3′-diamino-4,4′-dihydroxybiphenyl, 4,4′-diamino-3,3′-dihydroxybiphenyl, bis (3- Amino-4-hydroxyphenyl) propane, bis (4-amino-3-hydroxyphenyl) propane, bis (3-amino-4-hydroxyphenyl) sulfone, bis (4-amino-3-hydroxyphenyl) sulfone, bis ( 3-amino-4-hydroxyphenyl) hexafluo Propane, bis (4-amino-3-hydroxyphenyl) hexafluoropropane and the like can be used.

  The o-quinonediazide sulfonyl chloride and the hydroxy compound and / or amino compound may be blended so that the total of hydroxy group and amino group is 0.5 to 1 equivalent with respect to 1 mol of o-quinonediazide sulfonyl chloride. preferable. A preferred ratio of the dehydrochlorinating agent and o-quinonediazide sulfonyl chloride is in the range of 0.95 / 1 to 1 / 0.95. A preferable reaction temperature is 0 to 40 ° C., and a preferable reaction time is 1 to 10 hours.

  As the reaction solvent, solvents such as dioxane, acetone, methyl ethyl ketone, tetrahydrofuran, diethyl ether, N-methylpyrrolidone and the like are used. Examples of the dehydrochlorination agent include sodium carbonate, sodium hydroxide, sodium hydrogen carbonate, potassium carbonate, potassium hydroxide, trimethylamine, triethylamine, pyridine and the like.

  In the composition of the present invention, the content of the component (d) is 0.1% with respect to 100 parts by mass of the total amount of the components (a) and (b) in order to improve sensitivity and resolution during exposure. It is preferable to set it as -50 mass parts, It is more preferable to set it as 0.5-20 mass parts, It is further more preferable to set it as 1-20 mass parts.

((E) component: solvent)
In the present invention, as the solvent for the component (e), in order to dissolve the components (a), (b), (c), (d) and other components added as necessary, to form a resin composition used. Solvents include N-methyl-2-pyrrolidone, N-ethyl-2-pyrrolidone, γ-butyrolactone, N, N-dimethylacetamide, N, N-dimethylformamide, 1,3-dimethyl-2-imidazolidinone, Tetramethylurea, N-formylpiperidine, dimethyl sulfoxide, 2-methoxyethanol, diethylene glycol diethyl ether, diethylene glycol dibutyl ether, propylene glycol monomethyl ether, dipropylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, methyl lactate, ethyl lactate, butyl lactate Methyl-1,3-butylene glycol acetate, 1,3-butylene glycol acetate, cyclohexanone, cyclopentanone, tetrahydrofuran, etc. , It may be used alone or in admixture.
In the composition of the present invention, a solvent is used as the component (e). This amount is preferably adjusted appropriately depending on the thickness of the resin film to be formed.

(Component (f): thermal acid generator that generates acid by heating)
The present invention may contain a thermal acid generator that generates an acid by heating as component (f), if necessary. In the step of forming the photosensitive resin film, the component (f) generates an acid in the heating step, the reaction of the components (a) and (b) and the component (c), and the polybenzoxazole precursor (a). Promotes cyclization.

The acid generated from the thermal acid generator is preferably a strong acid. Specifically, for example, p-toluenesulfonic acid, arylsulfonic acid such as benzenesulfonic acid, camphorsulfonic acid, trifluoromethanesulfonic acid, nonafluoro Perfluoroalkylsulfonic acid such as butanesulfonic acid, methanesulfonic acid, ethanesulfonic acid, alkylsulfonic acid such as butanesulfonic acid, and the like are preferable. These acids efficiently act as a catalyst when the polybenzoxazole precursor phenolic hydroxyl group-containing polyamide structure undergoes a dehydration reaction and cyclizes. In contrast, acid generators that generate hydrochloric acid, bromic acid, iodic acid, and nitric acid have weak acidity and are likely to volatilize when heated. It is considered that it is hardly involved in the dehydration reaction, and it is difficult to obtain a sufficient effect of the present invention.
These acids are added to the photosensitive resin composition of the present invention as a thermal acid generator in the form of a salt as an onium salt or in the form of a covalent bond such as imide sulfonate.

  Examples of the onium salt include diaryliodonium salts such as diphenyliodonium salt, di (alkylaryl) iodonium salts such as di (t-butylphenyl) iodonium salt, trialkylsulfonium salts such as trimethylsulfonium salt, dimethyl A dialkyl monoarylsulfonium salt such as a phenylsulfonium salt, a diarylmonoalkyliodonium salt such as a diphenylmethylsulfonium salt, and the like are preferable. These preferably have a decomposition initiation temperature in the range of 150 to 250 ° C., are stable in the process before curing, function as an acid in the curing step of 230 ° C. or less, and promote the reaction. On the other hand, triphenylsulfonium salt is not desirable as the thermal acid generator of the present invention. Since triphenylsulfonium salt has high thermal stability and generally has a decomposition temperature exceeding 300 ° C., no decomposition occurs during the cyclization dehydration reaction of the polybenzoxazole precursor at 280 ° C. or less, and a catalyst for cyclization dehydration. It is because it is thought that it does not work enough.

  From the above points, the thermal acid generator as an onium salt as the thermal acid generator includes, for example, aryl sulfonic acid, camphor sulfonic acid, perfluoroalkyl sulfonic acid or diaryl iodonium salt of alkyl sulfonic acid, di (alkylaryl) ) Iodonium salts, trialkylsulfonium salts, dialkylmonoarylsulfonium salts or diarylmonoalkyliodonium salts are preferred from the viewpoints of storage stability and developability. More specifically, di (t-butylphenyl) iodonium salt of paratoluenesulfonic acid (1% weight reduction temperature 180 ° C., 5% weight reduction temperature 185 ° C.), di (t-butylphenyl) trifluoromethanesulfonic acid Iodonium salt (1% weight loss temperature 151 ° C, 5% weight loss temperature 173 ° C), trimethylsulfonium salt of trifluoromethanesulfonic acid (1% weight loss temperature 255 ° C, 5% weight loss temperature 278 ° C), trifluoromethanesulfonic acid Dimethylphenylsulfonium salt (1% weight loss temperature 186 ° C., 5% weight loss temperature 214 ° C.), diphenylmethylsulfonium salt of trifluoromethanesulfonic acid (1% weight loss temperature 154 ° C., 5% weight loss temperature 179 ° C.), Nonafluorobutanesulfonic acid di (t-butylphenyl) iodoni Can be mentioned salts, diphenyliodonium salts of camphorsulfonic acid, diphenyliodonium salt of ethanesulfonic acid, dimethylphenyl sulfonium salt of benzenesulfonic acid, as preferred diphenyl methyl sulfonium salts of toluenesulfonic acid and the like.

  The imide sulfonate is preferably naphthoyl imide sulfonate. On the other hand, phthalimide sulfonate is not desirable because it has poor thermal stability, so that an acid is generated before the curing reaction and deteriorates storage stability. Specific examples of naphthoylimide sulfonate include, for example, 1,8-naphthoylimide trifluoromethyl sulfonate (1% weight loss temperature 189 ° C., 5% weight loss temperature 227 ° C.), 2,3-naphthoyl imide. Trifluoromethylsulfonate (1% weight reduction temperature 185 ° C., 5% weight reduction temperature 216 ° C.) and the like can be mentioned as preferable examples.

Further, as the component (f) (thermal acid generator), as shown in the following chemical formula (VIII), a compound having a structure of R ¹⁹ R ²⁰ C═N—O—SO ₂ —R (weight loss of 1%) A temperature of 204 ° C., a 5% weight loss temperature of 235 ° C.) can also be used.
Here, as R, for example, an aryl group such as a p-methylphenyl group and a phenyl group, an alkyl group such as a methyl group, an ethyl group and an isopropyl group, a perfluoroalkyl group such as a trifluoromethyl group and a nonafluorobutyl group Etc. Examples of R ¹⁹ include a cyano group, and examples of R ²⁰ include a methoxyphenyl group and a phenyl group.

In addition, as the component (f), as shown in the following chemical formula (IX), a compound having an amide structure —HN—SO ₂ —R ′ (1% weight reduction temperature 104 ° C., 5% weight reduction temperature 270 ° C.) Can also be used.
Here, examples of R ′ include alkyl groups such as methyl group, ethyl group, and propyl group, aryl groups such as methylphenyl group and phenyl group, perfluoroalkyl groups such as trifluoromethyl group, and nonafluorobutyl. It is done. Examples of the group to which the amide structure —HN—SO 2 —R ′ is bonded include 2,2, -bis (4-hydroxyphenyl) hexafluoropropane, 2,2, -bis (4-hydroxyphenyl) propane, Examples include di (4-hydroxyphenyl) ether.

  In addition, as the component (f) used in the present invention, a salt formed from a strong acid other than an onium salt and a base can also be used. Examples of such strong acids include arylsulfonic acids such as p-toluenesulfonic acid and benzenesulfonic acid, perfluoroalkylsulfonic acids such as camphorsulfonic acid, trifluoromethanesulfonic acid and nonafluorobutanesulfonic acid, and methanesulfone. Alkyl sulfonic acids such as acids, ethane sulfonic acids, butane sulfonic acids are preferred. As the base, for example, pyridine, alkylpyridine such as 2,4,6-trimethylpyridine, N-alkylpyridine such as 2-chloro-N-methylpyridine, halogenated-N-alkylpyridine and the like are preferable. More specifically, p-toluenesulfonic acid pyridine salt (1% weight loss temperature 147 ° C., 5% weight reduction temperature 190 ° C.), p-toluenesulfonic acid L-aspartic acid dibenzyl ester salt (1% weight) Decrease temperature 202 ° C, 5% weight loss temperature 218 ° C), 2,4,6-trimethylpyridine salt of p-toluenesulfonic acid, 1,4-dimethylpyridine salt of p-toluenesulfonic acid, etc., storage stability, development It is mentioned as a preferable thing from the point of property. These are also decomposed during the cyclization dehydration reaction of the polybenzoxazole precursor at 280 ° C. or less, and can act as a catalyst.

Among the above-mentioned components (f), the following F1 is most preferred from the viewpoint of storage stability of the photosensitive resin composition and reaction promotion by addition.

  The blending amount of the component (f) is preferably 0.1 to 30 parts by mass, more preferably 0.2 to 20 parts by mass with respect to 100 parts by mass of the sum of the components (a) and (b). More preferably, it is 10 mass parts.

(Other ingredients)
In the present invention, in order to adjust the solubility of the component (a) or the component (b) in an alkaline aqueous solution, a compound that inhibits the solubility can be contained. As such compounds, onium salts, diaryl compounds and tetraalkylammonium salts are preferred. Examples of the onium salt include iodonium salts such as diaryliodonium salts, sulfonium salts such as triarylsulfonium salts, diazonium salts such as phosphonium salts, aryldiazonium salts, and the like. Examples of the diaryl compound include those in which two aryl groups such as diaryl urea, diaryl sulfone, diaryl ketone, diaryl ether, diaryl propane, and diaryl hexafluoropropane are bonded via a bonding group. Groups are preferred.
Examples of the tetraalkylammonium salt include tetraalkylammonium halides in which the alkyl group is a methyl group or an ethyl group.

  Among these, those showing a good dissolution inhibiting effect include diaryl iodonium salts, diaryl urea compounds, diaryl sulfone compounds, tetramethyl ammonium halide compounds, etc., and diaryl urea compounds include diphenyl urea, dimethyl diphenyl urea and the like. Examples of the tetramethylammonium halide compound include tetramethylammonium chloride, tetramethylammonium bromide, and tetramethylammonium iodide.

（式中、Ｘ⁻は対陰イオンを示し、Ｒ^７及びＲ^８は各々独立に１価の有機基を示し、ａ及びｂは各々独立に０〜５の整数である）で表されるジアリールヨードニウム塩化合物が好ましい。
陰イオンとしては、硝酸イオン、４弗化硼素イオン、過塩素酸イオン、トリフルオロメタンスルホン酸イオン、ｐ−トルエンスルホン酸イオン、チオシアン酸イオン、塩素イオン、臭素イオン、沃素イオン等が挙げられる。 Among them, general formula (VII)

Diaryl ^- (wherein, X represents a counter anion, R ⁷ and R ⁸ is a monovalent organic group each independently, a and b are the are each independently an integer of 0-5) is represented by Iodonium salt compounds are preferred.
Examples of the anion include nitrate ion, boron tetrafluoride ion, perchlorate ion, trifluoromethanesulfonate ion, p-toluenesulfonate ion, thiocyanate ion, chlorine ion, bromine ion, iodine ion and the like.

Examples of the diaryliodonium salt include diphenyliodonium nitrate, bis (p-tert-butylphenyl) iodonium nitrate, diphenyliodonium trifluoromethanesulfonate, bis (p-tert-butylphenyl) iodonium trifluoromethanesulfonate, and diphenyliodonium. Bromide, diphenyliodonium chloride, diphenyliodonium iodide and the like can be used.
Among these, diphenyliodonium nitrate, diphenyliodonium trifluoromethanesulfonate, and diphenyliodonium-8-anilinonanaphthalene-1-sulfonate are preferable because of their high effects.

  In the case of containing a compound that inhibits dissolution, the content is 0.1 to 20 masses with respect to 100 parts by mass of the total amount of the component (a) and the component (b) from the viewpoint of sensitivity and the allowable range of development time. Part is preferable, 0.1 to 15 parts by mass is more preferable, and 0.5 to 10 parts by mass is further preferable.

  The photosensitive resin composition of the present invention can contain an organic silane compound, an aluminum chelate compound, and the like as necessary in order to enhance the adhesion of the cured film to the substrate. Examples of the organic silane compound include vinyltriethoxysilane, γ-glycidoxypropyltriethoxysilane, γ-methacryloxypropyltrimethoxysilane, urea propyltriethoxysilane, methylphenylsilanediol, ethylphenylsilanediol, n- Propylphenylsilanediol, isopropylphenylsilanediol, n-butylphenylsilanediol, isobutylphenylsilanediol, tert-butylphenylsilanediol, diphenylsilanediol, ethylmethylphenylsilanol, n-propylmethylphenylsilanol, isopropylmethylphenylsilanol, n-butylmethylphenylsilanol, isobutylmethylphenylsilanol, tert-butylmethylphenylsilanol Ethyl n-propylphenylsilanol, ethylisopropylphenylsilanol, n-butylethylphenylsilanol, isobutylethylphenylsilanol, tert-butylethylphenylsilanol, methyldiphenylsilanol, ethyldiphenylsilanol, n-propyldiphenylsilanol, isopropyldiphenylsilanol, n-butyldiphenylsilanol, isobutyldiphenylsilanol, tert-butyldiphenylsilanol, phenylsilanetriol, 1,4-bis (trihydroxysilyl) benzene, 1,4-bis (methyldihydroxysilyl) benzene, 1,4-bis ( Ethyldihydroxysilyl) benzene, 1,4-bis (propyldihydroxysilyl) benzene, 1,4-bis (butyldihi Loxysilyl) benzene, 1,4-bis (dimethylhydroxysilyl) benzene, 1,4-bis (diethylhydroxysilyl) benzene, 1,4-bis (dipropylhydroxysilyl) benzene, 1,4-bis (dibutylhydroxysilyl) ) Benzene and the like. Examples of the aluminum chelate compound include tris (acetylacetonate) aluminum, acetylacetate aluminum diisopropylate, and the like. When using these adhesiveness imparting agents, 0.1-20 mass parts is preferable with respect to 100 mass parts of the total amount of (a) component and (b) component, and 0.5-10 mass parts is more preferable.

(Method for producing patterned cured film)
The method for producing a patterned cured film of the present invention includes a step of applying a photosensitive resin composition onto a support substrate and drying to obtain a photosensitive resin film, and a step of exposing the photosensitive resin film obtained by the drying step. And a step of developing the exposed photosensitive resin film with an alkaline aqueous solution to obtain a patterned resin film, and a step of heat-treating the photosensitive resin film after the development. Usually, through these steps, a film having a thickness of 5 to 10 μm is formed after the heat treatment.
In the step of applying and drying on a support substrate, this positive photosensitive resin composition is applied on a support substrate such as a glass substrate, a semiconductor, a metal oxide insulator (for example, TiO ₂ , SiO _2, etc.), silicon nitride, After spin coating using a spinner or the like, a photosensitive resin film is formed by drying using a hot plate, oven, or the like.

  Next, in the exposure step, the photosensitive resin film is irradiated with actinic rays such as ultraviolet rays, visible rays, and radiations through a mask. In the development process, the pattern is obtained by removing the exposed portion with a developer. Preferred examples of the developer include aqueous alkali solutions such as sodium hydroxide, potassium hydroxide, sodium silicate, ammonia, ethylamine, diethylamine, triethylamine, triethanolamine, and tetramethylammonium hydroxide. The base concentration of these aqueous solutions is preferably 0.1 to 10% by weight. Furthermore, alcohols and surfactants can be added to the developer and used. Each of these can be blended in the range of preferably 0.01 to 10 parts by mass, more preferably 0.1 to 5 parts by mass with respect to 100 parts by mass of the developer. A pattern resin film is formed by an exposure process and a development process.

Then, in the heat treatment step, the pattern cured film is formed by heat-treating the pattern resin film preferably at 150 to 450 ° C. In the present invention, sufficient film properties can be obtained even if the heat treatment is performed at 230 ° C. or less, preferably 180 to 230 ° C. This heat treatment process closes the oxazole ring of the polybenzoxazole precursor of component (a), and the crosslinking reaction of components (a) and (b) with component (c) proceeds, resulting in good mechanical properties and heat resistance. A patterned cured film having properties can be provided.
In general, a diffusion furnace, an oven, or a hot plate can be used for the heat treatment.

  The time for heat curing in the photosensitive resin composition of the present invention is the time until the remaining solvent and volatile components are sufficiently scattered, but is approximately 5 hours or less in view of work efficiency. The atmosphere for the heat treatment can be selected from the air or an inert atmosphere such as nitrogen.

(Semiconductor device)
The cured pattern film of the present invention can be used as an electronic component such as a multilayer wiring board as a surface protective film or an interlayer insulating film. The semiconductor device of the present invention is not particularly limited except that it has a surface protective film and an interlayer insulating film formed using the composition, and can have various structures.
An example of a manufacturing process of a semiconductor device (electronic component) using the photosensitive resin composition of the present invention will be described below. FIG. 1 is a manufacturing process diagram of a semiconductor device having a multilayer wiring structure.
In FIG. 1, a semiconductor substrate 1 such as a Si substrate having circuit elements is covered with a protective film 2 such as a silicon oxide film except for a predetermined portion of the circuit elements, and a first conductor layer 3 is formed on the exposed circuit elements. Has been. An interlayer insulating film layer 4 such as a polyimide resin as an interlayer insulating film is formed on the semiconductor substrate by a spin coat method or the like (step (a)).

Next, a chlorinated rubber-based or phenol novolac-based photosensitive resin layer 5 is formed on the interlayer insulating film layer 4 by a spin coating method so that a predetermined portion of the interlayer insulating film layer 4 is exposed by a known photolithography technique. Is provided with a window 6A (step (b)). The interlayer insulating film 4 exposed through the window 6A is selectively etched by dry etching means using a gas such as oxygen or carbon tetrafluoride to open the window 6B. Next, the photosensitive resin layer 5 is completely removed using an etching solution that corrodes only the photosensitive resin layer 5 without corroding the first conductor layer 3 exposed from the window 6B (step (c)). .
Further, the second conductor layer 7 is formed by using a known photolithography technique, and the electrical connection with the first conductor layer 3 is completely performed (step (d)). When a multilayer wiring structure having three or more layers is formed, each layer can be formed by repeating the above steps.

  Next, the surface protective film layer 8 is formed. In this example, the surface protective film layer is coated with the photosensitive resin composition by a spin coat method, dried, irradiated with light from a mask on which a pattern for forming a window 6C is formed in a predetermined portion, and then applied to an alkaline aqueous solution. And developing to form a pattern and heating to form a heat resistant polymer film. This heat-resistant polymer film protects the conductor layer from external stress, α rays, etc., and the obtained semiconductor device is excellent in reliability. In the above example, the interlayer insulating film layer can be formed using the positive photosensitive resin composition of the present invention.

Hereinafter, based on an Example and a comparative example, it demonstrates further more concretely about this invention. In addition, this invention is not limited to the following Example.
Synthesis Example 1 Synthesis of Polybenzoxazole Precursor (PA1) In a 0.2 liter flask equipped with a stirrer and a thermometer, 200 g of N-methylpyrrolidone was charged, and 2,2′-bis (3-amino- 15.0 g (41.0 mmol) of 4-hydroxyphenyl) hexafluoropropane was added and dissolved by stirring. Subsequently, 9.3 g (38.9 mmol) of sebacic acid dichloride was added dropwise over 10 minutes while maintaining the temperature at 0 to 5 ° C., and then stirring was continued for 60 minutes. The solution was poured into 1.5 liters of water, and the precipitate was collected, washed with pure water three times, and then decompressed to obtain polyhydroxyamide (polybenzoxazole precursor) (hereinafter referred to as polymer PA1). And). The polymer PA1 had a weight average molecular weight of 43,100 and a dispersity of 2.5 determined by GPC standard polystyrene conversion.
In addition, the weight average molecular weight was calculated | required by standard polystyrene conversion using the gel permeation chromatography method (GPC, the apparatus made by Hitachi, Ltd., the column the Hitachi Chemical Co., Ltd. gel pack).

Synthesis Example 2 Synthesis of Polybenzoxazole Precursor (PA2) 200 g of N-methylpyrrolidone was charged into a 0.2 liter flask equipped with a stirrer and a thermometer, and 2,2′-bis (3-amino- 4-Hydroxyphenyl) hexafluoropropane 15.0 g (41.0 mmol) and m-aminophenol 0.53 g (4.8 mmol) were added and dissolved by stirring. Subsequently, 10.4 g (43.4 mmol) of sebacic acid dichloride was added dropwise over 10 minutes while maintaining the temperature at 0 to 5 ° C., and then stirring was continued for 60 minutes. The solution was poured into 1.5 liters of water, the precipitate was collected, washed with pure water three times, and then decompressed to obtain polyhydroxyamide (polybenzoxazole precursor) (hereinafter referred to as polymer PA2). And). The polymer PA2 had a weight average molecular weight of 41,500 and a dispersity of 2.5 determined by GPC standard polystyrene conversion.

Synthesis Example 3 Synthesis of Polyimide (PB1) 200 g of N-methylpyrrolidone was charged into a 0.5 liter flask equipped with a stirrer and a thermometer, and bis (3-amino-4-hydroxyphenyl) hexafluoropropane 15 0.0 g (41.0 mmol) was added and dissolved by stirring. 14.3 g (45.5 mmol) of 3,3 ′, 4,4′-diphenyl ether tetracarboxylic dianhydride was added thereto at room temperature (25 ° C.) over 30 minutes, and stirring was continued for 12 hours. To this reaction solution, 20 g of m-xylene was added and heated to reflux at 150 ° C. for 2 hours. At this time, the water generated by cyclization of the imide ring was refluxed while being removed from the system by azeotropy. Then, after m-xylene was distilled off and cooled to room temperature, this reaction solution was added dropwise to distilled water, and the precipitate was collected by filtration and dried under reduced pressure to obtain polyimide. (Hereinafter referred to as polymer PB1). The weight average molecular weight was 32,500.
This polyimide was dissolved in N-methylpyrrolidone, which is an organic solvent used for synthesis, without precipitation, and was sufficiently soluble in the organic solvent.

[Synthesis Example 4] Synthesis of polyimide (PB2) 200 g of N-methylpyrrolidone was charged into a 0.5 liter flask equipped with a stirrer and a thermometer, and bis (3-amino-4-hydroxyphenyl) hexafluoropropane 15 0.0 g (41.0 mmol) and 1.79 g (16.4 mmol) of m-aminophenol were added and dissolved by stirring. 15.3 g (49.1 mmol) of 3,3 ′, 4,4′-diphenyl ether tetracarboxylic dianhydride was added thereto at room temperature (25 ° C.) over 30 minutes, and stirring was continued for 12 hours. Thereafter, the same operation as in Synthesis Example 3 was performed to obtain polyimide. (Hereinafter referred to as polymer PB2). The weight average molecular weight was 23,500.
This polyimide was dissolved in N-methylpyrrolidone, which is an organic solvent used for synthesis, without precipitation, and was sufficiently soluble in the organic solvent.

(Examples 1-7, Comparative Examples 1-6)
The (a) polybenzoxazole precursor synthesized in Synthesis Examples 1 and 2 and the (b) polyimide synthesized in Synthesis Examples 3 and 4 (c), (d), (e) and (f) components are shown in Table 1. Blended at the indicated content. Further, in order to adjust the solubility, the following iodonium salt was added as appropriate so that the dissolution rate of the unexposed area was approximately constant at about 20 nm / s for each sample. The dissolved solution was filtered through a 3 μm Teflon (registered trademark) filter and used for evaluation.

[Evaluation of photosensitive properties]
The resin compositions of Examples 1 to 7 and Comparative Examples 1 to 6 were spin-coated on a silicon wafer and dried at 120 ° C. for 3 minutes to adjust the film thickness to 11.5 to 12 μm. Thereafter, exposure (365 nm) was performed using a Canon stepper (trade name: FPA3000iW). After the exposure, development was performed with a 2.38 wt% aqueous solution of tetramethylammonium hydroxide until the remaining film ratio in the unexposed area was about 80%, and then rinsed with water to form a pattern. The minimum aperture exposure (sensitivity) was determined from the obtained pattern, and the results are shown in Table 1.

[Evaluation of membrane properties]
Next, the solution of the photosensitive resin composition was spin-coated on a silicon wafer and heated at 120 ° C. for 3 minutes to form a coating film having a thickness of 12 to 13 μm. Thereafter, the coating film was heated in an inert gas oven manufactured by Koyo Thermo Systems Co., Ltd. in a nitrogen atmosphere at 150 ° C. for 30 minutes, and further heated at 200 ° C. for 1 hour or 180 ° C. for 1 hour to obtain a cured film.
Next, the cured film was peeled off using a 4.9% hydrofluoric acid aqueous solution, washed with water, dried, and then examined for glass transition point (Tg) and elongation at break. Tg was determined from the inflection point of thermal expansion using a TMA / SS6000 manufactured by Seiko Instruments Inc. at a heating rate of 5 ° C./min. As the sample, a cured film that had been peeled was cut into a size of 2 mm in width and 20 mm in length with a razor. The elongation at break was determined from a tensile test using an autograph AGS-100NH manufactured by Shimadzu Corporation, and the results are shown in Table 1. As the sample, a cured film that had been peeled off was cut into a size of 10 mm in width and 70 mm in length with a razor.

In Table 1, (C) component C1, C2, (d) component D1, (e) component GBL, (f) component F1 are the following compounds.

  The resin compositions of Examples 1 to 7 had good sensitivity, and gave a cured pattern film having good heat resistance and mechanical properties even when cured at a low temperature. On the other hand, in Comparative Examples 1 to 6 lacking either the component (a) or the component (b), it is possible to obtain a photosensitive resin composition that gives a patterned cured film that satisfies all of sensitivity, heat resistance, and mechanical properties. could not.

The photosensitive resin composition of the present invention is suitable for forming a patterned cured film that becomes a surface protective film or an interlayer insulating film of an electronic component or the like.
The photosensitive resin composition of the present invention does not require high-temperature heat treatment after pattern formation, and even when heat-treated at a low temperature of 230 ° C. or lower, it has good cured film properties equivalent to those processed at a higher temperature. can get.
According to the method for producing a pattern of the present invention, by using the composition, a pattern having a good shape and excellent sensitivity, resolution and heat resistance can be obtained.
The electronic component of the present invention is highly reliable by having a pattern with a good shape and characteristics.

DESCRIPTION OF SYMBOLS 1 Semiconductor substrate 2 Protective film 3 1st conductor layer 4 Interlayer insulating film layer 5 Photosensitive resin layer 6A, 6B, 6C Window 7 2nd conductor layer 8 Surface protective film layer

Claims (17)

(A) The following general formula (I):

(In the formula, U and V each represent a divalent organic group, and V has an aliphatic chain structure having 1 to 30 carbon atoms.)
A polybenzoxazole precursor having a structural unit represented by:
(B) a polyimide soluble in an organic solvent and an alkaline solution;
(C) a compound capable of reacting with the components (a) and (b) by heating;
(D) a compound that generates an acid upon irradiation with actinic rays;
(E) a solvent;
Containing
The photosensitive resin composition whose (a) component is 30-70 mass parts with respect to 100 mass parts of total amounts of the said (a) component and (b) component. The component (a) is represented by the following general formula (II):

(In the formula, R ¹ and R ² are each independently hydrogen, fluorine or an alkyl group having 1 to 6 carbon atoms, U is a divalent organic group, and a ′ is an integer of 1 to 30.)
The photosensitive resin composition of Claim 1 represented by these.   The photosensitive resin composition of Claim 2 whose a 'of the said general formula (II) is an integer of 7-30. The component (b) is represented by the following general formula (III):

(In the formula, Z is a divalent organic group, and W is a tetravalent organic group.)
The photosensitive resin composition in any one of Claims 1-3 which has a structural unit shown by these.   The photosensitive resin composition according to claim 1, wherein the component (c) is a compound having two or more methylol groups or alkoxyalkyl groups in the molecule.   The photosensitive resin composition in any one of Claims 1-5 containing only 1 type of said (c) component. Wherein component (d), the photosensitive resin composition according to any one of claims 1 to 6, which is a o- quinonediazide compound.   The photosensitive resin composition according to claim 1, comprising only the components (a) to (e). Further, the photosensitive resin composition according to any one of claims 1 to 7 including a thermal acid generator which generates an acid by heating as component (f).   The photosensitive resin composition of Claim 9 which consists only of said (a)-(f) component.   The photosensitive resin composition according to claim 1, wherein the component (a) is 35 to 65 parts by mass with respect to 100 parts by mass of the total amount of the components (a) and (b).   The photosensitive resin composition according to claim 1, wherein the component (a) is 40 to 60 parts by mass with respect to 100 parts by mass of the total amount of the component (a) and the component (b). The method of producing a patterned cured film by using the photosensitive resin composition according to any one of claims 1 to 12
Applying the photosensitive resin composition onto a support substrate and drying to obtain a photosensitive resin film;
Exposing the photosensitive resin film obtained by the drying step;
Developing the exposed photosensitive resin film using an aqueous alkaline solution to obtain a patterned resin film;
Heat-treating the photosensitive resin film after the development;
The manufacturing method of the pattern cured film containing this. The method for producing a cured pattern film according to claim 13 , wherein the step of heat-treating the developed photosensitive resin film is performed at 230 ° C. or lower. The interlayer insulation film using the pattern cured film of the photosensitive resin composition in any one of Claims 1-12 . The surface protective film using the pattern cured film of the photosensitive resin composition in any one of Claims 1-12 . An electronic component having the interlayer insulating film according to claim 15 or the surface protective film according to claim 16 .

Images