JP5894811B2 - ポリイミドシートおよびその製造方法 - Google Patents
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- JP5894811B2 JP5894811B2 JP2012021622A JP2012021622A JP5894811B2 JP 5894811 B2 JP5894811 B2 JP 5894811B2 JP 2012021622 A JP2012021622 A JP 2012021622A JP 2012021622 A JP2012021622 A JP 2012021622A JP 5894811 B2 JP5894811 B2 JP 5894811B2
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- 229920001721 polyimide Polymers 0.000 title claims description 113
- 239000004642 Polyimide Substances 0.000 title claims description 64
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 238000010030 laminating Methods 0.000 claims description 16
- 238000005452 bending Methods 0.000 claims description 13
- 238000012360 testing method Methods 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 6
- GTDPSWPPOUPBNX-UHFFFAOYSA-N ac1mqpva Chemical compound CC12C(=O)OC(=O)C1(C)C1(C)C2(C)C(=O)OC1=O GTDPSWPPOUPBNX-UHFFFAOYSA-N 0.000 claims description 5
- 150000004985 diamines Chemical class 0.000 claims description 5
- CBCKQZAAMUWICA-UHFFFAOYSA-N 1,4-phenylenediamine Chemical compound NC1=CC=C(N)C=C1 CBCKQZAAMUWICA-UHFFFAOYSA-N 0.000 claims description 4
- HLBLWEWZXPIGSM-UHFFFAOYSA-N 4-Aminophenyl ether Chemical compound C1=CC(N)=CC=C1OC1=CC=C(N)C=C1 HLBLWEWZXPIGSM-UHFFFAOYSA-N 0.000 claims description 4
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 claims description 3
- WKDNYTOXBCRNPV-UHFFFAOYSA-N bpda Chemical compound C1=C2C(=O)OC(=O)C2=CC(C=2C=C3C(=O)OC(C3=CC=2)=O)=C1 WKDNYTOXBCRNPV-UHFFFAOYSA-N 0.000 claims description 2
- JVERADGGGBYHNP-UHFFFAOYSA-N 5-phenylbenzene-1,2,3,4-tetracarboxylic acid Chemical compound OC(=O)C1=C(C(O)=O)C(C(=O)O)=CC(C=2C=CC=CC=2)=C1C(O)=O JVERADGGGBYHNP-UHFFFAOYSA-N 0.000 claims 1
- 238000000034 method Methods 0.000 description 21
- 230000000704 physical effect Effects 0.000 description 7
- 238000009864 tensile test Methods 0.000 description 5
- 229920005575 poly(amic acid) Polymers 0.000 description 4
- OISVCGZHLKNMSJ-UHFFFAOYSA-N 2,6-dimethylpyridine Chemical compound CC1=CC=CC(C)=N1 OISVCGZHLKNMSJ-UHFFFAOYSA-N 0.000 description 3
- BSKHPKMHTQYZBB-UHFFFAOYSA-N 2-methylpyridine Chemical compound CC1=CC=CC=N1 BSKHPKMHTQYZBB-UHFFFAOYSA-N 0.000 description 3
- SJRJJKPEHAURKC-UHFFFAOYSA-N N-Methylmorpholine Chemical compound CN1CCOCC1 SJRJJKPEHAURKC-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 235000014113 dietary fatty acids Nutrition 0.000 description 3
- 229930195729 fatty acid Natural products 0.000 description 3
- 239000000194 fatty acid Substances 0.000 description 3
- -1 fatty acid halides Chemical class 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 238000003475 lamination Methods 0.000 description 3
- 239000009719 polyimide resin Substances 0.000 description 3
- 238000006798 ring closing metathesis reaction Methods 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- BWZVCCNYKMEVEX-UHFFFAOYSA-N 2,4,6-Trimethylpyridine Chemical compound CC1=CC(C)=NC(C)=C1 BWZVCCNYKMEVEX-UHFFFAOYSA-N 0.000 description 2
- JYYNAJVZFGKDEQ-UHFFFAOYSA-N 2,4-Dimethylpyridine Chemical compound CC1=CC=NC(C)=C1 JYYNAJVZFGKDEQ-UHFFFAOYSA-N 0.000 description 2
- NURQLCJSMXZBPC-UHFFFAOYSA-N 3,4-dimethylpyridine Chemical compound CC1=CC=NC=C1C NURQLCJSMXZBPC-UHFFFAOYSA-N 0.000 description 2
- HWWYDZCSSYKIAD-UHFFFAOYSA-N 3,5-dimethylpyridine Chemical compound CC1=CN=CC(C)=C1 HWWYDZCSSYKIAD-UHFFFAOYSA-N 0.000 description 2
- ITQTTZVARXURQS-UHFFFAOYSA-N 3-methylpyridine Chemical compound CC1=CC=CN=C1 ITQTTZVARXURQS-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- 239000000654 additive Substances 0.000 description 2
- 239000003054 catalyst Substances 0.000 description 2
- 239000012024 dehydrating agents Substances 0.000 description 2
- 230000018044 dehydration Effects 0.000 description 2
- 238000006297 dehydration reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000010954 inorganic particle Substances 0.000 description 2
- AWJUIBRHMBBTKR-UHFFFAOYSA-N isoquinoline Chemical compound C1=NC=CC2=CC=CC=C21 AWJUIBRHMBBTKR-UHFFFAOYSA-N 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- CYIDZMCFTVVTJO-UHFFFAOYSA-N pyromellitic acid Chemical compound OC(=O)C1=CC(C(O)=O)=C(C(O)=O)C=C1C(O)=O CYIDZMCFTVVTJO-UHFFFAOYSA-N 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- IMNIMPAHZVJRPE-UHFFFAOYSA-N triethylenediamine Chemical compound C1CN2CCN1CC2 IMNIMPAHZVJRPE-UHFFFAOYSA-N 0.000 description 2
- GETQZCLCWQTVFV-UHFFFAOYSA-N trimethylamine Chemical compound CN(C)C GETQZCLCWQTVFV-UHFFFAOYSA-N 0.000 description 2
- AUHZEENZYGFFBQ-UHFFFAOYSA-N 1,3,5-Me3C6H3 Natural products CC1=CC(C)=CC(C)=C1 AUHZEENZYGFFBQ-UHFFFAOYSA-N 0.000 description 1
- NRGGMCIBEHEAIL-UHFFFAOYSA-N 2-ethylpyridine Chemical compound CCC1=CC=CC=N1 NRGGMCIBEHEAIL-UHFFFAOYSA-N 0.000 description 1
- XWKFPIODWVPXLX-UHFFFAOYSA-N 2-methyl-5-methylpyridine Natural products CC1=CC=C(C)N=C1 XWKFPIODWVPXLX-UHFFFAOYSA-N 0.000 description 1
- LFBALUPVVFCEPA-UHFFFAOYSA-N 4-(3,4-dicarboxyphenyl)phthalic acid Chemical compound C1=C(C(O)=O)C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)C(C(O)=O)=C1 LFBALUPVVFCEPA-UHFFFAOYSA-N 0.000 description 1
- DBOLXXRVIFGDTI-UHFFFAOYSA-N 4-benzylpyridine Chemical compound C=1C=NC=CC=1CC1=CC=CC=C1 DBOLXXRVIFGDTI-UHFFFAOYSA-N 0.000 description 1
- HVCNXQOWACZAFN-UHFFFAOYSA-N 4-ethylmorpholine Chemical compound CCN1CCOCC1 HVCNXQOWACZAFN-UHFFFAOYSA-N 0.000 description 1
- FRGXNJWEDDQLFH-UHFFFAOYSA-N 4-propan-2-ylpyridine Chemical compound CC(C)C1=CC=NC=C1 FRGXNJWEDDQLFH-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 150000001244 carboxylic acid anhydrides Chemical class 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- XXBDWLFCJWSEKW-UHFFFAOYSA-N dimethylbenzylamine Chemical compound CN(C)CC1=CC=CC=C1 XXBDWLFCJWSEKW-UHFFFAOYSA-N 0.000 description 1
- 150000004665 fatty acids Chemical class 0.000 description 1
- 101150074899 gpa-10 gene Proteins 0.000 description 1
- 101150062058 gpa-8 gene Proteins 0.000 description 1
- 238000006358 imidation reaction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- CIXSDMKDSYXUMJ-UHFFFAOYSA-N n,n-diethylcyclohexanamine Chemical compound CCN(CC)C1CCCCC1 CIXSDMKDSYXUMJ-UHFFFAOYSA-N 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005191 phase separation Methods 0.000 description 1
- SKFLCXNDKRUHTA-UHFFFAOYSA-N phenyl(pyridin-4-yl)methanone Chemical compound C=1C=NC=CC=1C(=O)C1=CC=CC=C1 SKFLCXNDKRUHTA-UHFFFAOYSA-N 0.000 description 1
- 229920003223 poly(pyromellitimide-1,4-diphenyl ether) Polymers 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- GFYHSKONPJXCDE-UHFFFAOYSA-N sym-collidine Natural products CC1=CN=C(C)C(C)=C1 GFYHSKONPJXCDE-UHFFFAOYSA-N 0.000 description 1
- 150000003512 tertiary amines Chemical class 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L79/00—Compositions of macromolecular compounds obtained by reactions forming in the main chain of the macromolecule a linkage containing nitrogen with or without oxygen or carbon only, not provided for in groups C08L61/00 - C08L77/00
- C08L79/04—Polycondensates having nitrogen-containing heterocyclic rings in the main chain; Polyhydrazides; Polyamide acids or similar polyimide precursors
- C08L79/08—Polyimides; Polyester-imides; Polyamide-imides; Polyamide acids or similar polyimide precursors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/06—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material
- B32B27/08—Layered products comprising a layer of synthetic resin as the main or only constituent of a layer, which is next to another layer of the same or of a different material of synthetic resin
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B27/00—Layered products comprising a layer of synthetic resin
- B32B27/28—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42
- B32B27/281—Layered products comprising a layer of synthetic resin comprising synthetic resins not wholly covered by any one of the sub-groups B32B27/30 - B32B27/42 comprising polyimides
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B7/00—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers
- B32B7/03—Layered products characterised by the relation between layers; Layered products characterised by the relative orientation of features between layers, or by the relative values of a measurable parameter between layers, i.e. products comprising layers having different physical, chemical or physicochemical properties; Layered products characterised by the interconnection of layers with respect to the orientation of features
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/50—Properties of the layers or laminate having particular mechanical properties
- B32B2307/546—Flexural strength; Flexion stiffness
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B32—LAYERED PRODUCTS
- B32B—LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B32B2307/00—Properties of the layers or laminate
- B32B2307/70—Other properties
- B32B2307/732—Dimensional properties
- B32B2307/734—Dimensional stability
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
- Y10T156/10—Methods of surface bonding and/or assembly therefor
Landscapes
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Laminated Bodies (AREA)
Description
この時の添加物の好ましい形態は、粒子径が3.0μm以下の無機粒子をフィルム樹脂重量あたり0.1〜0.9重量%の割合で添加することが好ましい。
(αM+αT)/2)−0.5[GPa]≦β1≦(αM+αT)/2)+0.5[GPa]、
(αM+αT)/2)−0.5[GPa]≦β2≦(αM+αT)/2)+0.5[GPa]
となることが好ましい。
(γM+γT)/2)−20[MPa]≦δ1≦(γM+γT)/2)+20[MPa]、
(γM+γT)/2)−20[MPa]≦δ2≦(γM+γT)/2)+20[MPa]
となることが好ましい。
(εM+εT)/2)−1.0[GPa]≦ζ1≦(εM+εT)/2)+1.0[GPa]、
(εM+εT)/2)−1.0[GPa]≦ζ2≦(εM+εT)/2)+1.0[GPa]
となることが好ましい。
(ηM+ηT)/2)−30[MPa]≦θ1≦(ηM+ηT)/2)+30[MPa]、
(ηM+ηT)/2)−30[MPa]≦θ2≦(ηM+ηT)/2)+30[MPa]
となることが好ましい。
この際、角度は自由に設定でき、かつ角度は固定する必要は無く、積層するフィルム毎に任意の角度を設定できる。
また、角度の方向もプラス方向、マイナス方向どちらを選んでもよく、かつ積層するフィルム毎に任意の方向を選ぶことができる。
ASTM D690に準じた。試験片サイズをt3.2mm×W12.7mm×L63.5mmとし、万能試験機を用いた。速度は5mm/min、弾性率は10MPa〜20MPaの間のこの時の値を最小二乗法により算出した。
TMAを用いて5℃/minの昇温速度で、室温〜400℃まで測定した。このときの50〜200℃平均膨張の値を熱膨張係数とした。
東レ・デュポン株式会社製「カプトン150EN−A」を60cmに裁断し、MD方向とTD方向を直交するように1枚ずつ、150枚重ねて、上下にガラステフロン製の厚さ3mmのクッション材を置いて、北川精機株式会社製真空プレス機を用いて、350℃130kg/cm2の条件で30分プレスし、100℃に冷却後圧力を解放し、ポリイミドシートを取り出した。得られたポリイミドシートの物性を表1に示す。なお、表1において、平均値とは、任意の方向をMDとしたとき、それに直交する方向をTDとし、MD方向の熱膨張係数、曲げ弾性率、曲げ強度と、TD方向の熱膨張係数、曲げ弾性率、曲げ強度と、それらの平均値を示している。
積層時にMD方向とTD方向を同じ向きにした以外は実施例と同じ方法でポリイミドシートを得た。得られたポリイミドシートの物性を表1に示す。
Claims (7)
- ポリイミドフィルムを10〜3000枚積層したポリイミドシートであって、ポリイミドフィルムを構成する酸二無水物として、ピロメリット酸二無水物、3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を併用し、ポリイミドフィルムを構成するジアミン成分として、4,4’−ジアミノジフェニルエーテル、パラフェニレンジアミンを併用し、該ポリイミドシートの厚みが0.2mm以上であり、且つ任意の平面の直交する2方向の線膨張係数がいずれも10ppm/℃以下であるポリイミドシート。
- 平面方向の少なくとも1方向の引張モードでの線膨張係数が10ppm/℃以上のポリイミドフィルムを10〜3000枚積層した請求項1に記載のポリイミドシート。
- ポリイミドフィルムを同一方向に積層して得られる、ポリイミドシートの曲げ試験におけるMD方向の弾性率αM、TD方向の弾性率αTとし、ポリイミドフィルムを1枚ずつ任意の角度に回転させながら積層して得られるポリイミドシートの曲げ試験における任意の方向の弾性率β1、β1に直交する方向の弾性率β2とした場合に、
(αM+αT)/2)−0.5[GPa]≦β1≦(αM+αT)/2)+0.5[GPa]、
(αM+αT)/2)−0.5[GPa]≦β2≦(αM+αT)/2)+0.5[GPa]
である請求項1または2に記載のポリイミドシート。 - ポリイミドフィルムを同一方向に積層して得られる、ポリイミドシートの曲げ試験におけるMD方向の最大応力γM、TD方向の最大応力γTとし、ポリイミドフィルムを1枚ずつ任意の角度に回転させながら積層して得られるポリイミドシートの曲げ試験における任意の方向の最大応力δ1、δ1に直交する方向の最大応力δ2とした場合に、
(γM+γT)/2)−20[MPa]≦δ1≦(γM+γT)/2)+20[MPa]、
(γM+γT)/2)−20[MPa]≦δ2≦(γM+γT)/2)+20[MPa]
である請求項1〜3のいずれかに記載のポリイミドシート。 - ポリイミドフィルムを10〜3000枚積層した後、プレスするポリイミドシートの製造方法であって、ポリイミドフィルムを構成する酸二無水物として、ピロメリット酸二無水物、3,3’,4,4’−ビフェニルテトラカルボン酸二無水物を併用し、ポリイミドフィルムを構成するジアミン成分として、4,4’−ジアミノジフェニルエーテル、パラフェニレンジアミンを併用し、ポリイミドフィルムを積層する際に、積層するフィルムが、積層されるフィルムに対して、積層されるフィルムの任意の点を中心にフィルム平面方向に実質的に角度をつけて積層するポリイミドシートの製造方法。
- ポリイミドシートの厚みが0.2mm以上であり、且つ任意の平面の直交する2方向の線膨張係数がいずれも10ppm/℃以下である請求項5に記載のポリイミドシートの製造方法。
- ポリイミドフィルムを、1枚ずつ任意の角度に回転させながら積層する請求項5または6に記載のポリイミドシートの製造方法。
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JP2012021622A JP5894811B2 (ja) | 2012-02-03 | 2012-02-03 | ポリイミドシートおよびその製造方法 |
US13/753,891 US20130202871A1 (en) | 2012-02-03 | 2013-01-30 | Polyimide sheet and manufacturing method thereof |
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JP2013158984A JP2013158984A (ja) | 2013-08-19 |
JP5894811B2 true JP5894811B2 (ja) | 2016-03-30 |
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US8491745B2 (en) | 2007-02-03 | 2013-07-23 | The Boeing Company | Method and material efficient tooling for continuous compression molding |
US20150129118A1 (en) * | 2006-02-02 | 2015-05-14 | The Boeing Company | Compression Molding of Composite Structures Using Flexible Tooling |
US10449736B2 (en) | 2006-02-02 | 2019-10-22 | The Boeing Company | Apparatus for fabricating thermoplastic composite parts |
US10232532B1 (en) | 2006-02-02 | 2019-03-19 | The Boeing Company | Method for fabricating tapered thermoplastic composite parts |
US10821653B2 (en) | 2010-02-24 | 2020-11-03 | Alexander M. Rubin | Continuous molding of thermoplastic laminates |
JP6509630B2 (ja) * | 2015-05-13 | 2019-05-08 | 株式会社アルバック | シート状のマスク |
WO2017073507A1 (ja) * | 2015-10-29 | 2017-05-04 | 東レ株式会社 | 仮貼り用積層体フィルム、仮貼り用積層体フィルムを用いた基板加工体および積層基板加工体の製造方法、ならびにこれらを用いた半導体装置の製造方法 |
WO2019026280A1 (ja) * | 2017-08-04 | 2019-02-07 | シャープ株式会社 | 樹脂基板および表示デバイス |
CN115175816B (zh) * | 2020-03-23 | 2024-03-08 | 东洋纺株式会社 | 层叠体 |
CN114683647B (zh) * | 2022-03-01 | 2022-11-22 | 哈尔滨工业大学 | 一种形状记忆聚酰亚胺板材及其制备方法 |
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EP1868016A1 (en) * | 2005-03-25 | 2007-12-19 | JSR Corporation | Polarizing plate manufacturing method and polarizing plate manufacturing equipment |
CN101160202B (zh) * | 2005-04-14 | 2010-11-03 | 三菱瓦斯化学株式会社 | 聚酰亚胺薄膜的制备方法 |
JP2008094015A (ja) * | 2006-10-13 | 2008-04-24 | Toyobo Co Ltd | ポリイミド成形体及びその製造方法 |
JP2010031107A (ja) * | 2008-07-28 | 2010-02-12 | Mitsubishi Plastics Inc | 帯電防止機能を有するシート |
JP5545033B2 (ja) * | 2010-05-25 | 2014-07-09 | 東洋紡株式会社 | 積層体およびその製造方法 |
JP5556416B2 (ja) * | 2010-06-22 | 2014-07-23 | 東洋紡株式会社 | ポリイミドボード、金属積層ポリイミドボード、およびプリント配線板 |
-
2012
- 2012-02-03 JP JP2012021622A patent/JP5894811B2/ja active Active
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2013
- 2013-01-30 US US13/753,891 patent/US20130202871A1/en not_active Abandoned
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JP2013158984A (ja) | 2013-08-19 |
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