JP5652692B2 - Film substrate transfer device - Google Patents

Description

  The present invention relates to a film substrate transport apparatus in which a film substrate (hereinafter referred to as “substrate”) is disposed and transported in a vertical posture with one end on the upper side in the width direction.

  2. Description of the Related Art A thin film laminate manufacturing apparatus (hereinafter referred to as “manufacturing apparatus”) is used to form a photoelectric conversion layer made of a thin film photoelectric conversion element on a surface of a substrate. This manufacturing apparatus is configured such that the substrate is formed in an airtight state in the film forming chamber, and the substrate wound around the unwinding core is further transferred to the film forming chamber in order to transport the substrate into the film forming chamber. After being sent out toward the substrate and passing through the film forming chamber, the film is wound up by the winding core.

  With respect to the substrate transport system of a film substrate transport device (hereinafter referred to as “transport device”) mainly provided in such a manufacturing apparatus, the substrate is placed in a vertical posture with one end on the upper side in the width direction and transported. A standing conveyance method may be employed. This vertical transfer type transfer device is superior in that it prevents particles from being deposited on the surface of the substrate, thereby preventing contamination of the substrate, and reducing the space of the manufacturing apparatus by placing the substrate vertically. Yes. On the other hand, since the substrate is mainly pulled and held between the unwinding core and the winding core, the substrate tends to hang downward due to its own weight, and may snake in the width direction. In such a case, the substrate is displaced in the width direction, and the substrate is bent in the width direction. This deflection causes a stress concentration biased on the substrate, and wrinkles are generated, which deteriorates the characteristics of the thin film photoelectric conversion element formed on the substrate.

  Therefore, as in Patent Document 1, a transport apparatus that transports a substrate in the forward feed direction employs a structure provided with a grip roller for adjusting the position of the substrate in the width direction. In such a manufacturing apparatus, a plurality of pairs of grip rollers are provided so as to sandwich the upper end portion and the lower end portion of the substrate, respectively, and the grip roller on the upper end side is located on the upper side with respect to the forward feed direction of the substrate. The grip roller on the lower end side is disposed to be inclined downward with respect to the forward feed direction of the substrate.

  An elastic body is provided on the outer peripheral surface of the grip roller for protecting the substrate. However, when this elastic body deteriorates due to wear or the like, the grip force acting between the grip roller and the substrate is reduced, and a sufficient force to lift the substrate cannot be obtained. Therefore, in Patent Document 1, in response to the deterioration of the elastic body, the gripping force is increased by increasing the force with which the paired grip rollers sandwich the substrate (hereinafter referred to as “substrate clamping force”). .

JP 2009-38276 A

  However, in Patent Document 1, the grip roller on the upper end side is disposed to be inclined upward only with respect to the forward feed direction of the substrate, and the grip roller on the lower end portion is disposed downward with respect to the forward feed direction of the substrate. Tilt to the side only. Therefore, when the substrate is transported in both the forward feed direction and the reverse feed direction, these grip rollers can adjust the position of the substrate transported in the forward feed direction with high accuracy, but the substrate transported in the reverse feed direction is high. It is difficult to adjust the position with accuracy.

  Further, in Patent Document 1, when the substrate clamping force of the grip roller whose outer peripheral surface is an elastic body is increased, the elastic body of the outer peripheral surface is crushed, and the cross-sectional shape of the outer peripheral surface is changed to an ellipse, The grip roller diameter may change. In such a case, it is difficult to move the substrate to a desired position because a desired grip force cannot be obtained and a sufficient force to lift the substrate cannot be obtained. Therefore, the accuracy of the substrate position adjustment is lowered.

  The present invention has been made in view of such a situation, and an object of the present invention is to make it possible to adjust the position of each of the substrates conveyed in both the forward feed direction and the reverse feed direction with high accuracy. It is to provide a transport device.

In order to solve the problem, the film substrate transport apparatus of the present invention is a film substrate transport apparatus that transports a belt-shaped film substrate in a vertical posture with one end portion on the upper side in the width direction, At least a pair of first grip rollers disposed so as to sandwich an upper end portion of the film substrate, and a rotation axis angle of the first grip roller is higher than a conveyance direction of the first grip roller. A first angle adjusting mechanism that allows adjustment of an inclination direction and an inclination angle of the first grip roller so that the first grip roller can be inclined to the side, and the first angle adjusting mechanism includes the first angle adjusting mechanism. One grip roller is rotatably attached, and is configured to be movable so as to change the rotation direction of the first grip roller between an upper side and a lower side with respect to the conveying direction. An urging portion, an urging means for urging the roller attachment portion so as to change the rotation direction of the first grip roller toward the upper side or the lower side with respect to the conveyance direction, and the roller attachment portion. An engagement roller configured to move in conjunction with the movement, and engages with the engagement roller so as to oppose the movement of the engagement roller accompanying the urging of the roller mounting portion by the urging means. An arm and an actuator for driving the arm, and the engagement roller is moved by the driving of the arm, and the roller mounting portion is moved to bring about a change in the rotation direction of the first grip roller. It has a configuration .

In the film substrate transport apparatus according to the present invention, at least a pair of second grip rollers disposed so as to sandwich a lower end portion of the film substrate, and a rotation axis angle of the second grip roller is the second grip. And a second angle adjusting mechanism that can adjust the inclination direction and the inclination angle of the second grip roller so that the rotation direction of the roller can be inclined downward with respect to the conveyance direction. Yes. Further, the second angle adjusting mechanism rotatably attaches the second grip roller, and changes the rotation direction of the second grip roller between the upper side and the lower side with respect to the transport direction. An urging force for urging the roller mounting portion so as to change the rotation direction of the roller mounting portion configured to be movable and the second grip roller toward the upper side or the lower side with respect to the transport direction. Means, an engagement roller configured to move in conjunction with the movement of the roller mounting portion, and the movement of the engagement roller accompanying the biasing of the roller mounting portion by the biasing means An arm that engages with the engagement roller; and an actuator that drives the arm. The engagement roller is moved by the drive of the arm, and the roller mounting portion is moved to It has a structure in which change in the rotation direction of the second grip rollers is provided.

  In the film substrate transport apparatus of the present invention, the film substrate transport apparatus further includes a detecting unit that detects a height position of an end portion in the width direction of the film substrate, and when the detecting unit detects a positional shift of the film substrate, the first grip The roller and / or the second grip roller is controlled to be tilted by the first angle adjusting mechanism and / or the second angle adjusting mechanism in an inclination direction corresponding to the transport direction of the film substrate. .

  In the film substrate transport apparatus of the present invention, the first angle adjustment mechanism and / or the second angle adjustment mechanism may be configured such that the first grip roller and / or the first angle adjustment mechanism corrects a positional deviation of the substrate. The tilt angle of the second grip roller is controlled to change.

According to the film substrate transport apparatus of the present invention, the following effects can be obtained.
The transport device for a film substrate of the present invention is a transport device for a film substrate that transports a band-shaped film substrate in a vertical posture with one end portion on the upper side in the width direction, and the upper end portion of the film substrate is The at least one pair of first grip rollers disposed so as to be sandwiched, and the rotation axis angle of the first grip roller is inclined so that the rotation direction of the first grip roller is the upper side with respect to the transport direction A first angle adjusting mechanism that enables adjustment of an inclination direction and an inclination angle of the first grip roller so that the first grip roller can be rotated, and the first angle adjustment mechanism rotates the first grip roller. A roller mounting portion configured to be movable and configured to be movable so as to change a rotation direction of the first grip roller between an upper side and a lower side with respect to a conveying direction; An urging means for urging the roller mounting portion and a movement of the lip roller in conjunction with the movement of the roller mounting portion so as to change the rotation direction of the lip roller upward or downward with respect to the conveying direction. An engagement roller configured as described above, an arm that engages with the engagement roller so as to oppose movement of the engagement roller that accompanies the urging of the roller mounting portion by the urging means, and drives the arm The actuator includes an actuator, and the engagement roller is moved by driving the arm, and the roller mounting portion is moved to change the rotation direction of the first grip roller.
Further, at least a pair of second grip rollers disposed so as to sandwich a lower end portion of the film substrate, and a rotation angle of the second grip roller is set such that a rotation direction of the second grip roller is a lower side. And a second angle adjusting mechanism for adjusting the inclination direction and the inclination angle of the second grip roller so as to be able to be inclined.
Further, the second angle adjusting mechanism attaches the second grip roller rotatably, and changes the rotation direction of the second grip roller between the upper side and the lower side with respect to the transport direction. And a biasing means for biasing the roller mounting portion so as to change the rotation direction of the second grip roller toward the upper side or the lower side with respect to the conveying direction. And an engagement roller configured to move in conjunction with the movement of the roller attachment portion, and the movement of the engagement roller accompanying the urging of the roller attachment portion by the urging means. An arm that engages with the engagement roller; and an actuator that drives the arm. The drive of the arm causes the engagement roller to move, and the roller attachment portion moves to Change in the rotational direction is configured to be brought in the two gripping rollers.
In addition, the film substrate transport apparatus according to the present invention further includes a detecting unit that detects a height position of an end portion in the width direction of the film substrate, and when the detecting unit detects a positional shift of the film substrate, One grip roller and / or the second grip roller is tilted by the first angle adjustment mechanism and / or the second angle adjustment mechanism in an inclination direction corresponding to the transport direction of the film substrate. Be controlled.
Therefore, it is possible to adjust the position with high accuracy for both the film substrate conveyed in the forward feed direction and the reverse feed direction.

  In the film substrate transport apparatus of the present invention, the first angle adjustment mechanism and / or the second angle adjustment mechanism may be configured such that the first grip roller and / or the first angle adjustment mechanism corrects a positional deviation of the substrate. 2 is controlled so as to change the tilt angle of the second grip roller. For example, the grip force of the first grip roller decreases due to wear of the first grip roller, and the force that lifts the film substrate. If the inclination of the first grip roller is increased, the movement amount of the film substrate in the width direction can be increased to correct the position adjustment of the film substrate. Therefore, it is possible to prevent an excessive load from being applied to the film substrate without increasing the force for sandwiching the film substrate by the first grip roller. On the other hand, if the grip force of the first grip roller becomes too high due to variations or the like, and the force to lift the film substrate becomes too large, if the inclination of the first grip roller is reduced, the film substrate The position adjustment of the film substrate can be corrected by reducing the amount of movement in the width direction. Therefore, it can prevent that the position adjustment precision of the said film substrate falls.

It is a cross-sectional top view which shows typically the manufacturing apparatus of the thin film laminated body in 1st Embodiment of this invention. (A) is a cross-sectional plan view schematically showing the film forming chamber of FIG. 1 in an enlarged manner, and (b) is a cross-sectional view taken along the line CC in FIG. 2 (a). (A) is a schematic front view which shows an angle adjustment mechanism in case the rotating shaft of a grip roller is arrange | positioned along the width direction of a film board | substrate in 1st Embodiment of this invention, (b) is a figure. It is a schematic side view of the angle adjustment mechanism of 3 (a), (c) is DD sectional drawing of Fig.3 (a). (A) is a schematic front view which shows the angle adjustment mechanism which inclines the grip roller so that the position of the board | substrate conveyed in a forward feed direction may be adjusted in 1st Embodiment of this invention, (b), It is D'-D 'sectional drawing of Fig.4 (a). It is a general | schematic enlarged front view which shows the grip roller of Fig.4 (a). (A) is a schematic front view which shows the angle adjustment mechanism which inclines the grip roller so that the position of the board | substrate conveyed in a reverse feed direction may be adjusted in 1st Embodiment of this invention, (b). FIG. 7 is a cross-sectional view along D ″ -D ″ in FIG. It is a general | schematic enlarged front view which shows the grip roller of Fig.6 (a). It is CC sectional drawing of Fig.2 (a) in 2nd Embodiment of this invention. It is a graph which shows the relationship between the inclination angle of a grip roller, and the force which lifts the film substrate of a grip roller.

[First Embodiment]
The film substrate transfer apparatus according to the first embodiment of the present invention will be described below.
Referring to FIG. 1, in a thin film laminate manufacturing apparatus (hereinafter referred to as “manufacturing apparatus”) 1 including a film substrate transport apparatus (hereinafter referred to as “transport apparatus”), a strip-shaped film substrate (hereinafter referred to as “production apparatus”). 2 is referred to as a “substrate”) 2 is arranged and conveyed in a vertical posture with one end on the upper side in the width direction, and a thin film is formed on the surface of the substrate 2. In addition, in 1st Embodiment, although illustrated and demonstrated in the state which set the width direction of the board | substrate 2 to the perpendicular direction, it is not limited to this.
In order to transport the substrate 2, the manufacturing apparatus 1 is provided with an unwinding chamber 3 for unwinding the substrate 2 and a winding chamber 4 for winding the substrate 2. As an example, six film forming chambers 5 a to 5 f are provided between the chamber 4 and the take-up chamber 4. Further, the substrate 2 is fed in a forward direction from the unwinding chamber 3 to the winding chamber 4 (hereinafter, indicated by an arrow A in the drawing) and a reverse feeding direction from the winding chamber 4 to the unwinding chamber 3 (hereinafter, in the drawing). (Indicated by an arrow B). Further, a transfer section between the unwinding chamber 3 and the film forming chamber 5a, a transfer section between five adjacent film forming chambers, and a transfer section between the winding chamber 4 and the film forming chamber 5f are: As an example, a pair of first grip rollers 6 is provided.

  An unwinding core 3 a capable of unwinding the wound substrate 2 is provided inside the unwinding chamber 3 so as to be rotatable about a rotation axis along the width direction of the substrate 2. Further, in the unwinding chamber 3, for example, five rollers 3b to 3f are disposed downstream of the unwinding core 3a in the forward direction with respect to the width direction of the substrate 2 in order to drive the substrate 2 and control tension. It is provided in the state which can be rotated centering on the rotating shaft along. The unwinding core 3a and the rollers 3b to 3f are configured to rotate so that the substrate 2 can be conveyed in the forward feed direction and the reverse feed direction. Note that the number of rollers for conveyance driving, tension control, and the like of the substrate 2 shown in FIG. 1 is an example, and is not limited thereto, and can be changed according to the specifications of the manufacturing apparatus 1. A configuration may be adopted in which a roller for driving the substrate 2 and controlling tension is not provided.

  Inside the take-up chamber 4, a take-up core 4 a configured to take up the substrate 2 is provided so as to be rotatable about a rotation axis along the width direction of the substrate 2. In addition, in the winding chamber 4, for example, seven rollers 4 b to 4 h are provided on the upstream side in the forward feed direction from the winding core 4 a for the conveyance drive and tension control of the substrate 2. It is provided so as to be rotatable around a rotation axis along the direction. The winding core 4a and the rollers 4b to 4h are configured to rotate so that the substrate 2 can be conveyed in the forward feed direction and the reverse feed direction. Note that the number of rollers for conveyance driving, tension control, and the like of the substrate 2 shown in FIG. 1 is an example, and is not limited thereto, and can be changed according to the specifications of the manufacturing apparatus 1. A configuration may be adopted in which a roller for driving the substrate 2 and controlling tension is not provided.

  With reference to FIG. 2A and FIG. 2B, the structure of the film forming chambers 5a to 5f will be described. 2A and 2B show a state in which the substrate 2 is fed in the forward feed direction (indicated by arrow A), and the first grip roller 6 is fed in the forward feed direction. The state corresponds to the substrate 2. In the film forming chambers 5a to 5f, high voltage electrodes 7a to 7f and ground electrodes 8a to 8f are arranged to face each other, and the substrate 2 has high voltage electrodes 7a to 7f and ground electrodes 8a to 8f. It is comprised so that it may pass between. The lengths of the high voltage electrodes 7a to 7f and the ground electrodes 8a to 8f along the width direction of the substrate 2 are shorter than the width of the substrate 2, respectively. The thin film stack is not formed. A film forming gas is supplied into the film forming chambers 5a to 5f. The insides of the film forming chambers 5a to 5f are configured to be able to maintain an airtight state. A thin film is formed on the substrate 2 when the substrate 2 is positioned between the high voltage electrodes 7a to 7f and the ground electrodes 8a to 8f in the film forming chambers 5a to 5f. Become. As a method for forming a film on the surface of the substrate 2, for example, a method such as CVD (Chemical Vapor Deposition) or PVD (Physical Vapor Deposition) may be used. Note that the number of film forming chambers shown in FIG. 1 is an example and is not limited to this, and can be changed according to the specifications of the manufacturing apparatus 1. In addition to the film formation chamber, a heating chamber for heating the substrate 2 may be provided.

  In addition, the manufacturing apparatus 1 is provided with detection means 9 for detecting the position of the substrate 2 in the width direction. This detection means 9 is good to be comprised so that detection of the position of the edge part of the width direction in the board | substrate 2, for example is possible. Furthermore, the detection means 9 is particularly preferably a non-contact type sensor, and as an example, it may be a transmissive laser sensor, a reflective photosensor, or the like. The detection means 9 is connected to the control means 10.

  The pair of first grip rollers 6 is configured to be rotatable around a rotation shaft 6a, and is disposed so as to sandwich the upper end portion of the substrate 2 between adjacent film forming chambers. Therefore, the pair of first grip rollers 6 sandwich the portion of the substrate 2 where the thin film laminate is not formed. The outer peripheral surface 6b of the first grip roller 6 is preferably formed of an elastic body. For example, heat resistant rubber such as silicon rubber or fluoro rubber may be used as the elastic body. As another example, the outer peripheral surface 6b of the first grip roller 6 may be formed of a synthetic resin such as PTFE or polyimide, or may be formed of a material subjected to stainless steel, iron, chrome plating, or the like. Furthermore, the outer peripheral surface 6b of the first grip roller 6 may be formed of other materials as long as predetermined performance such as protection of the substrate 2 and grip force can be obtained.

  Such a 1st grip roller 6 is comprised so that adjustment of the inclination is possible. The first angle adjusting mechanism 11 that adjusts the inclination of the first grip roller 6 will be described with reference to FIGS. 3 (a) to 3 (c). In FIG. 3A to FIG. 3C, the first angle adjusting mechanism 11 adjusts the rotation shaft 6 a of the first grip roller 6 to the neutral state arranged along the width direction of the substrate 2. Yes. A roller shaft 6 c is disposed on the first grip roller 6 so as to extend upward from the upper end along the width direction of the substrate 2. The upper end of the roller shaft 6 c is rotatably attached to the roller attachment portion 12. A link 13 extending from the roller mounting portion 12 to the upper side along the width direction of the substrate 2 is disposed. An engagement roller 14 is provided on the upper portion of the link 13. The link 13 is provided with a link mounting portion 13 a in the middle of the width direction of the substrate 2 between the roller mounting portion 12 and the engaging roller 14. The link mounting portion 13 a connects the link 13 to the surface of the substrate 2. In contrast, it is configured to be rotatable around a link rotation shaft 13b extending in the width direction and attached to the support portion 15. Therefore, the link 13 can rotate with respect to the support portion 15. Further, an urging means 16 is disposed between the link 13 and the support portion 15 along the transport direction of the substrate 2. The biasing means 16 may be configured to be able to return the link 13 to the neutral position using a coil spring, a leaf spring, a torsion spring, a rubber member, or the like.

  An actuator 17 is disposed above the link 13. The actuator 17 includes an arm 18 arranged along the width direction with respect to the surface of the substrate 2. A distal end portion 18 a of the arm 18 is engaged with an engagement roller 14 attached to the link 13. On the other hand, a rotation shaft 19 extending along the width direction of the substrate 2 is attached to the base end portion 18 b of the arm 18. The lower end of the rotating shaft 19 is attached to the proximal end portion 18 b of the arm 18, and the upper end of the rotating shaft 19 is attached to the drive source 20. Therefore, the arm 18 can be rotated by the rotational drive of the drive source 20. The drive source 20 is supported by the support portion 15, and the drive source 20 of the actuator 17 is connected to the control means 10.

Operation | movement of the manufacturing apparatus 1 in 1st Embodiment of this invention is demonstrated.
The conveyance and film formation of the substrate 2 in the manufacturing apparatus 1 will be described with reference to FIG. 1 again. In the unwinding chamber 3, the substrate 2 wound around the unwinding core 3a is unwound while being driven and guided by the rollers 3b to 3f. The substrate 2 exits the unwind chamber 3 and is sequentially transferred into the film forming chambers 5a to 5f along the forward feeding direction. Various thin films are formed on the surface of the substrate 2 in the film forming chambers 5a to 5f. Is deposited. The film-formed substrate 2 is transported into the winding chamber 4 and wound around the winding core 4a while being driven and guided by the rollers 4b to 4h. Moreover, the board | substrate 2 is conveyed along a reverse feed direction as needed.

The position adjustment of the substrate 2 transported in the forward feed direction will be described with reference to FIGS. 4 (a), 4 (b), and 5. FIG. When the detection means 9 (see FIG. 2B) detects a positional shift of the substrate 2 conveyed in the forward feed direction to the lower side, the detection means 9 controls the control means 10 (see FIG. 2B). Send a signal to. Next, the control means 10 sends a signal to the drive source 20 of the actuator 17, and the drive source 20 is rotationally controlled so as to move the tip 18a of the arm 18 in the reverse feed direction. At this time, the engaging roller 14 that engages with the tip 18a of the arm 18 also moves in the reverse feed direction, and the link 13 rotates about the link rotation shaft 13b. As a result, the first grip roller 6 is inclined at an inclination angle θ _{1 with} respect to the width direction of the substrate 2 so that the lower side of the first grip roller 6 faces the forward feed direction side along the surface of the substrate 2. Will be. That is, the first grip roller 6 is tilted upward with respect to the forward feed direction of the substrate 2. In a state where the first grip roller 6 is tilted inclination angle theta _1, link 13 is biased to the first gripping roller 6 by the biasing means 16 so as to return to the neutral state.

The position adjustment of the substrate 2 transported in the reverse feed direction will be described with reference to FIGS. When the detection unit 9 (see FIG. 2B) detects a positional shift of the substrate 2 conveyed in the reverse feed direction to the lower side, the detection unit 9 refers to the control unit 10 (see FIG. 2B). ). Next, the control means 10 sends a signal to the drive source 20 of the actuator 17, and the rotation is controlled so that the drive source 20 moves the tip 18 a of the arm 18 to the forward feed direction side. At this time, the engaging roller 14 that engages with the tip 18a of the arm 18 also moves in the forward feed direction, and the link 13 rotates about the link rotation shaft 13b. As a result, the first grip roller 6 has an inclination angle θ _{2 with} respect to the width direction of the substrate 2 so that the lower side of the first grip roller 6 faces the reverse feed direction along the surface of the substrate _2. It will be tilted. That is, the first grip roller 6 is tilted upward with respect to the reverse feed direction of the substrate 2. Incidentally, in a state where the first grip roller 6 is tilted inclination angle theta _2, the link 13 is biased to the first gripping roller 6 by the biasing means 16 so as to return to the neutral state.

Here, when the gripping force of the first gripping roller 6 is reduced, the detection means 9 indicates that the substrate 2 after the position correction is still displaced downward without obtaining a sufficient lifting force. If detected, the control means 10 controls the drive source 20 of the actuator 17 so that the inclination angle θ ₁ or θ ₂ of the first grip roller 6 is increased, and the position adjustment of the substrate 2 is corrected. On the other hand, when the detection means 9 detects that the lifting force is increased due to the grip force of the first grip roller 6 being too high and the substrate 2 after position correction is shifted upward, The control means 10 controls the drive source 20 of the actuator 17 so that the inclination angle θ ₁ or θ ₂ of the _one grip roller 6 is reduced, and the position adjustment of the substrate 2 is corrected.

[Second Embodiment]
The manufacturing apparatus of the thin film laminated body in 2nd Embodiment of this invention is demonstrated below. The basic configuration of the thin-film stack manufacturing apparatus in the second embodiment is the same as that of the thin-film stack manufacturing apparatus in the first embodiment. Elements similar to those in the first embodiment will be described using the same symbols and names as those in the first embodiment. Here, a configuration different from the first embodiment will be described.

  As shown in FIG. 8, a pair of second grip rollers 6 ′ configured to sandwich the lower end portion of the substrate 2 are further provided. Similar to the first grip roller 6, the second grip roller 6 ′ has a rotating shaft 6 a ′ and an outer peripheral surface 6 b ′. Although not shown, the second grip roller 6 'can be inclined with its outer peripheral surface 6b along the surface of the substrate 2 and the second grip roller 6' downward with respect to the transport direction. In addition, a second angle adjustment mechanism is provided that makes it possible to adjust the inclination direction and the inclination angle so as to incline toward both the forward feed direction and the reverse feed direction with respect to the transport direction. The basic configuration of the second angle adjustment mechanism corresponds to the second grip roller 6 ′ and is the same as that of the first angle adjustment mechanism 11. FIG. 8 shows a state in which the substrate 2 is fed in the forward feed direction (indicated by an arrow A), and the second grip roller 6 ′ corresponds to the substrate 2 fed in the forward feed direction. In this state, the upper side of the grip roller 6 'is inclined toward the forward feed direction.

  As described above, according to the first embodiment and the second embodiment of the present invention, the first and / or second grip rollers 6 and 6 ′ are provided with the first angle adjusting mechanism 11 and / or the second angle. Since the adjustment mechanism can adjust the inclination direction and the inclination angle so as to incline toward both the forward feed direction and the reverse feed direction in the conveyance direction of the substrate 2, the substrate 2 conveyed in the forward feed direction and the reverse feed direction. Both can be adjusted with high accuracy.

  According to the first embodiment and the second embodiment of the present invention, for example, the grip force of the first grip roller 6 is reduced due to wear of the first grip roller 6, and the force for lifting the substrate 2 is increased. If the inclination of the first grip roller 6 is increased when it cannot be obtained sufficiently, the amount of movement of the substrate 2 in the width direction can be increased and the position adjustment of the substrate 2 can be corrected. Therefore, it is possible to prevent an excessive load from being applied to the substrate 2 without increasing the force for sandwiching the substrate 2 by the first grip roller 6. On the other hand, if the gripping force of the first gripping roller 6 becomes too high due to variations and the force to lift the substrate 2 is too large, the width of the substrate 2 can be reduced by reducing the inclination of the first gripping roller 6. The positional adjustment of the substrate 2 can be corrected by reducing the amount of movement in the direction. Therefore, it can prevent that the position adjustment precision of the board | substrate 2 falls.

  Although the embodiments of the present invention have been described so far, the present invention is not limited to the above-described embodiments, and various modifications and changes can be made based on the technical idea of the present invention.

  As a first modification of the embodiment of the present invention, the first and / or second grip rollers 6, 6 ′ are configured to be able to adjust the force for sandwiching the substrate 2 (hereinafter referred to as “substrate clamping force”). May be. For example, it is detected that the gripping force of the first gripping roller 6 is reduced, so that a sufficient force to lift the substrate 2 is not obtained and the substrate 2 after position correction is still shifted downward. 9 is detected, the control means 10 controls the pair of first grip rollers 6 so as to increase the substrate clamping force between the pair of first grip rollers 6, and the position adjustment of the substrate 2 is corrected. Also good. On the other hand, when the grip force of the first grip roller 6 is too high, the force for lifting the substrate 2 is increased, and the detection means 9 detects that the substrate 2 after the position correction is shifted upward. In this case, the position adjustment of the substrate 2 may be corrected by the control means 10 controlling the pair of first grip rollers 6 so as to reduce the substrate clamping force between the pair of first grip rollers 6. The same effect as the embodiment of the present invention can be obtained.

  As a second modification of the embodiment of the present invention, a transfer section between the unwinding chamber 3 and the film forming chamber 5a, a transfer section between five adjacent film forming chambers, a winding chamber 4 and a film forming chamber. The first and / or second grip rollers 6, 6 ′ may be provided in at least one of the conveyance sections between 5f, and the first and / or second grip rollers 6, 6 may be provided. The number of transfer sections provided with 'can be changed to optimally adjust the position of the substrate 2. In addition, the number of the first and / or second grip rollers 6, 6 'provided in each conveyance section may be two or more. The same effect as the embodiment of the present invention can be obtained.

  As a third modification of the embodiment of the present invention, a drive source for rotating the first and / or second grip rollers 6 and 6 ′ is provided instead of the roller mounting portion 12, and the first and / or The second grip rollers 6, 6 ′ may be configured to be rotatable by a drive source. Further, this drive source may be connected to the control means 10 to control the rotation of the first and / or second grip rollers 6, 6 '. The same effect as the embodiment of the present invention can be obtained.

[Example]
The Example using the manufacturing apparatus 1 of 1st Embodiment of this invention is demonstrated. In the embodiment of the present invention, when the substrate clamping force of the pair of first grip rollers 6 is 4.4 N, 8.9 N, or 16.3 N, the inclination angle θ ₁ or θ _{2 of} the first grip roller 6 is set. Was changed between 0 ° and 8 °, a change in force F (hereinafter referred to as “lifting force”) F for lifting the substrate 2 in the pair of first grip rollers 6 was measured.

In FIG. 9, as for the relationship between the inclination angle θ ₁ or θ ₂ of the first grip roller 6 and the lifting force F of the substrate 2 of the first grip roller 6, the case where the substrate clamping force is 4.4 N is a solid line. A case where the substrate clamping force is 8.9N is indicated by a broken line Q, and a case where the substrate clamping force is 16.3N is indicated by a one-dot chain line R.

Referring to FIG. 9, it can be confirmed that when the inclination angle θ ₁ or θ ₂ is increased, the lifting force F is also proportionally increased. For example, if the force F for lifting the substrate 2 is about 2N, the tilt angle θ ₁ or θ ₂ may be about 3.5 ° when the substrate clamping force is 4.4 N. When the substrate clamping force is 8.9 N, the tilt angle θ ₁ or θ ₂ is preferably about 2 °. When the substrate clamping force is 16.3 N, the tilt angle θ ₁ or θ ₂ is preferably about 1 °. From the above, in the embodiment of the present invention, instead of increasing the substrate holding force in the first gripping roller 6 of the pair, by increasing the inclination angle theta ₁ or theta ₂ of the first gripping roller 6, lifting It was confirmed that the force F increased.

1 Thin film laminate manufacturing equipment (manufacturing equipment)
2 Film substrate (substrate)
6 1st grip roller 6 '2nd grip roller 6a, 6a' Rotating shaft 6b, 6b 'Outer peripheral surface 9 Detection means 11 Angle adjustment mechanism A, B, C, D, D', D '' Arrow F Lifting force θ ₁ , θ ₂ inclination angle P solid line Q broken line R alternate long and short dash line

Claims (5)

A film substrate transport apparatus for transporting a belt-shaped film substrate in a vertical posture with one end on the upper side in the width direction,
At least a pair of first grip rollers disposed so as to sandwich an upper end portion of the film substrate;
The inclination direction and inclination of the first grip roller so that the rotation axis angle of the first grip roller can be inclined so that the rotation direction of the first grip roller is on the upper side with respect to the transport direction. A first angle adjustment mechanism capable of adjusting the angle ;
The first angle adjustment mechanism includes:
A roller mounting portion configured to rotatably mount the first grip roller, and to be movable so as to change a rotation direction of the first grip roller between an upper side and a lower side with respect to a transport direction;
Biasing means for biasing the roller mounting portion so as to change the rotation direction of the first grip roller toward the upper side or the lower side with respect to the transport direction;
An engagement roller configured to move in conjunction with movement of the roller mounting portion;
An arm that engages with the engagement roller so as to oppose the movement of the engagement roller accompanying the urging of the roller mounting portion by the urging means;
An actuator for driving the arm;
Including
The apparatus for transporting a film substrate, wherein the engagement roller is moved by driving the arm and the roller mounting portion is moved to change the rotation direction of the first grip roller . At least a pair of second grip rollers arranged to sandwich the lower end of the film substrate;
The inclination direction and inclination of the second grip roller so that the rotation axis angle of the second grip roller can be inclined so that the rotation direction of the second grip roller is the lower side with respect to the transport direction. The film substrate transport apparatus according to claim 1, further comprising: a second angle adjustment mechanism that allows the angle to be adjusted. The second angle adjusting mechanism is
A roller mounting portion configured to rotatably mount the second grip roller, and to be movable so as to change a rotation direction of the second grip roller between an upper side and a lower side with respect to a transport direction;
Biasing means for biasing the roller mounting portion so as to change the rotation direction of the second grip roller toward the upper side or the lower side with respect to the transport direction;
An engagement roller configured to move in conjunction with movement of the roller mounting portion;
An arm that engages with the engagement roller so as to oppose the movement of the engagement roller accompanying the urging of the roller mounting portion by the urging means;
An actuator for driving the arm;
Including
3. The film according to claim 2, wherein the engagement roller is moved by driving the arm and the roller mounting portion is moved to change a rotation direction of the second grip roller. 4. Substrate transfer device. Further comprising a detecting means for detecting the height position of the width direction end of the film substrate,
When the detection means detects the positional deviation of the film substrate, the first grip roller and / or the second grip roller are moved by the first angle adjustment mechanism and / or the second angle adjustment mechanism, The conveyance apparatus of the film substrate as described in any one of Claims 1-3 controlled so that it may incline in the inclination direction corresponding to the conveyance direction of the said film substrate. The first angle adjustment mechanism and / or the second angle adjustment mechanism changes an inclination angle of the first grip roller and / or the second grip roller in order to correct a positional deviation of the substrate. The film substrate transport apparatus according to claim 1, which is controlled as described above.

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