JP5508709B2 - Coating processing apparatus and substrate processing apparatus - Google Patents

Description

  The present invention relates to a semiconductor substrate, a glass substrate for a liquid crystal display device, a substrate for a plasma display, a substrate for an optical disk, a substrate for a magnetic disk, a substrate for a magneto-optical disk, a glass substrate for a photomask (hereinafter simply referred to as “substrate”). The present invention relates to a substrate processing apparatus that performs processing.

  Products such as semiconductors and liquid crystal displays are manufactured by performing a series of processes (for example, a series of processes such as cleaning, resist coating, exposure, development, etching, interlayer insulation film formation, heat treatment, and dicing) on the substrate. Is done.

  This series of processing includes a processing process (coating process) in which various processing liquids are applied to the substrate to form a coating film on the substrate surface. For example, a treatment process for forming an antireflection film by supplying an antireflection film coating liquid (BARC liquid), a treatment process for forming a resist film by supplying a resist liquid, and a cover film coating liquid for protecting the resist film. This corresponds to a processing step of supplying and forming a resist cover film. However, the processing step for forming the resist cover film is often incorporated into a recipe, particularly when performing exposure processing by a liquid immersion method. The immersion method is a state in which a liquid having a refractive index n larger than the atmosphere (n = 1) (for example, pure water with n = 1.44) is filled between the projection optical system and the substrate. In this exposure method, the exposure light on the substrate surface is shortened to form a fine exposure pattern. In this exposure method, since the liquid directly contacts the surface of the substrate at the time of exposure, it is desirable to form a cover film that protects the upper layer of the resist film formed on the substrate.

  Conventionally, a spin coating method has been adopted as a method for performing the coating treatment. A configuration of an apparatus that performs a coating process by a spin coating method is disclosed in Patent Document 1, for example. In the coating process by the spin coating method, the processing liquid is spread around the periphery of the substrate by a centrifugal force generated by rotating the substrate to form a coating film on the substrate surface. Here, the processing liquid is subjected to centrifugal force and spreads toward the periphery of the substrate. On the other hand, the solvent contained in the processing liquid gradually evaporates, so that the processing liquid does not easily spread over time. To go. Therefore, the thickness of the coating film formed on the substrate is defined by both the centrifugal force due to rotation and the volatilization rate of the solvent contained in the processing liquid, and the film thickness is uniform over the entire surface of the substrate. In order to form a coating film, it is necessary to maintain an appropriate balance between these two.

  However, this balance is particularly difficult to maintain in the edge region of the substrate (annular region of 1 to 2 mm from the edge of the substrate), and the film thickness of the edge region is 3 mm from the edge of the substrate (for example, 3 mm from the edge of the substrate). The symptom (thickening of the film thickness) occurs that the thickness is increased by 5 to 10 A compared to the film thickness in the inner area.

  In recent years when the pattern miniaturization is progressing, uniformity is required even to the film thickness of the edge region, and a technique for eliminating the increase in the film thickness of the edge region is required. . Various techniques have been proposed to meet this demand.

  For example, Patent Document 2 proposes to eliminate the increase in the film thickness of the edge region by forming an atmosphere sampling port for exhausting the atmosphere at the peripheral edge of the substrate at a position far from the end surface of the substrate. If the atmosphere sampling port is formed at a position close to the end surface of the substrate, the coating film in the edge region is easily dried due to the influence of the exhaust air flow, and as a result, the film thickness becomes thick. If it is formed at a position far from the end face of the substrate, the influence of the exhaust air flow is reduced, and a reduction in the film thickness of the edge region can be expected.

  For example, Patent Documents 3 and 4 propose a technique for eliminating the increase in the film thickness of the edge region by providing an airflow control plate disposed so as to surround the outer periphery of the substrate. Here, it is considered that a unique air flow that is different from other surface portions near the edge region is the cause of the increase in film thickness, and the air flow that flows along the surface of the substrate is continuously distributed to the surface of the air flow control plate. By doing so, it is intended to avoid the formation of such a specific air flow and reduce the increase in the film thickness of the edge region.

JP 2002-361155 A JP 2004-207573 A US Pat. No. 6,527,860 US Pat. No. 6,673,151

  According to the technique described in Patent Document 2, it is necessary to provide a member (upper ring) for guiding the atmosphere at the peripheral edge of the substrate to the atmosphere sampling port formed on the upper side of the substrate. However, since it is expected that not a few droplets of the processing liquid will adhere to this member during the substrate processing, it is necessary to wash it at a high frequency, resulting in poor practicality.

  In the techniques described in Patent Documents 3 and 4, the outer edge of the airflow control plate is fixed to the inner wall surface of a cup provided around the substrate so as to receive the splash of the processing liquid from the rotating substrate. Yes. When the outer edge of the airflow control plate is joined to another member in this way, the airflow that continuously flows from the surface of the substrate along the surface of the airflow control plate toward the outside cannot be exhausted from the outer edge. Therefore, in Patent Documents 3 and 4, a plurality of exhaust holes are formed on the airflow control plate, and the airflow is exhausted through the exhaust holes. However, in the configuration in which exhaust is performed through such a discontinuous exhaust hole, the exhaust pressure along the peripheral direction of the substrate is not constant, so uniform exhaust cannot be performed. As a result, the air current in the vicinity of the edge region is disturbed, and it is considered difficult to sufficiently obtain the effect of reducing the increase in the film thickness of the edge region.

  The present invention has been made in view of such circumstances, and the edge region in which the film thickness of the edge region of the substrate becomes thicker than the film thickness of the inner region without causing the disadvantages of the prior art. An object of the present invention is to provide a technique capable of suppressing the occurrence of the phenomenon of rising film thickness.

A first aspect of the present invention is a coating processing apparatus for applying a processing liquid to a substrate, the holding means rotating the substrate while holding the substrate, and supplying the processing liquid onto the substrate held by the holding means. A treatment liquid supply means, a splash prevention cup provided so as to surround the holding means, and recovering a treatment liquid scattered around from the substrate, and an inner space of the splash prevention cup provided at a lower portion of the splash prevention cup An exhaust means for evacuating the atmosphere around the substrate with a negative pressure and an annular plate-shaped member surrounding the side periphery of the substrate, the outer peripheral radius being smaller than the inner wall radius of the anti-scattering cup together are, an inner peripheral radius is formed larger than the radius of the substrate, are disposed on the substrate concentrically held on said holding means, the exhaust between the inner wall of the scatter prevention cup and the outer periphery thereof Thereby forming an annular gap in a plan view in communication with the stage, and side rectifying member for forming a gap between the annular said in plan view which communicates with the exhaust means between the end face of the inner and peripheral said substrate, A height adjusting mechanism for changing a height relationship between the side rectifying member and the substrate .

  Invention of Claim 2 is a coating processing apparatus of Claim 1, Comprising: It is an annular plate-shaped member arrange | positioned under the said board | substrate and the said side rectification | straightening member, Comprising: The upper surface, The said board | substrate A lower rectifying member that forms a minute space between a peripheral region on the back surface of the rear surface and the lower surface of the side rectifying member, and the side rectifying member communicates with the exhaust unit between the lower rectifying member and the lower rectifying member. It is attached to the lower rectifying member while forming a communication opening.

  A third aspect of the present invention is the coating apparatus according to the second aspect, wherein the side rectifying member is detachable from the lower rectifying member.

  Invention of Claim 4 is a coating processing apparatus of Claim 2 or 3, Comprising: The said downward rectification member is provided with several fitting ditch | groove, Each of the said side rectification member is said plurality. A plurality of fitting claws for fitting with each of the fitting concave grooves.

A fifth aspect of the present invention is the coating apparatus according to any one of the first to fourth aspects, wherein the side rectifying member has a shape in which an upper surface thereof is inclined downward toward an outer side.

The invention of claim 6 is a substrate processing apparatus that is arranged adjacent to a predetermined external device and performs a series of processing on a substrate, each of which includes one or more substrate processing units that perform predetermined processing on a substrate, A processing unit including a main transport mechanism that transports the substrate to one or more substrate processing units in a predetermined order; and a transport mechanism that transports the substrate between the processing unit and the external device, At least one of the one or more substrate processing units surrounds the holding unit, a holding unit that rotates while holding the substrate, a processing liquid supply unit that supplies the processing liquid onto the substrate held by the holding unit, and the holding unit. The anti-scattering cup for recovering the processing liquid that scatters from the substrate to the surroundings and the lower portion of the anti-scattering cup, the internal space of the anti-scattering cup is set to a negative pressure and the periphery of the substrate And exhaust means for exhausting the atmosphere, a circular plate-shaped member surrounding the lateral periphery of the substrate, the outer peripheral radius, together are smaller than the inner wall radius of the scattering prevention cup, the inner radius The annular member is formed larger than the radius of the substrate, is arranged concentrically with the substrate held by the holding means, and communicates with the exhaust means between its outer periphery and the inner wall of the anti-scattering cup in a plan view. A side rectifying member that forms an annular gap in plan view communicating with the exhaust means between an inner periphery thereof and an end face of the substrate, and the side rectifying member and the substrate And a height adjusting mechanism for changing the height relationship of .

According to invention of Claim 1, 6 , the annular plate-shaped side rectification | straightening member surrounding the side periphery of the board | substrate hold | maintained at the holding means is provided. An annular minute gap is formed between the outer periphery of the side rectifying member and the inner wall of the anti-scattering cup in a plan view communicating with the exhaust means, and the exhaust means is also provided between the inner periphery and the end face of the substrate. An annular minute gap is formed in plan view in communication. According to this configuration, the substrate flows around the rotating substrate from the surface of the substrate along the upper surface of the side rectifying member, and passes through a minute gap formed between the outer edge of the side rectifying member and the anti-scattering cup. The airflow (first airflow) that flows downward and is exhausted and flows along the surface of the substrate, and flows downward through the minute gap formed between the outer edge of the substrate and the side rectifying member. Air stream (second air stream) is formed. As a result of the formation of these two airflows, the airflow formed in the vicinity of the edge region of the substrate is stabilized, and an increase in the film thickness of the edge region can be suppressed.
Moreover, according to invention of Claim 1, 6, the height relationship between the side rectification member and the board | substrate hold | maintained at the holding means can be changed. Therefore, even when the processing conditions are changed, the height of the side rectifying member can be adjusted to be set at an appropriate height position with respect to the substrate. As a result, the increase in the film thickness of the edge region can be appropriately suppressed.

  In particular, since the minute gap formed between the outer periphery of the side rectifying member and the inner wall of the anti-scattering cup is annular in plan view, the first airflow can be exhausted from the entire outer periphery of the side rectifying member. it can. In addition, since the minute gap formed between the inner periphery of the side rectifying member and the end surface of the substrate is also annular in plan view, the second airflow can be exhausted from the entire outer periphery of the substrate. Therefore, the exhaust pressure along the peripheral direction of the substrate is constant, and the airflow formed near the edge region of the substrate is very stable. As a result, the effect of suppressing the increase in the film thickness of the edge region is enhanced.

  According to invention of Claim 2, a side rectification member is mounted | worn with a downward rectification member. As a result, the side rectifying member and the scattering prevention cup can be arranged apart from each other, and an annular minute gap can be formed between the side rectifying member and the scattering prevention cup with a simple configuration. In addition, since a minute space is formed between the upper surface of the lower rectifying member and the peripheral region of the back surface of the substrate and the lower surface of the side rectifying member, the second air flow described above is outside along the upper surface of the lower rectifying member. Then, the air is exhausted through the communication opening. As a result, it is possible to prevent a situation in which the second air stream is caught in the back side of the substrate and the back side of the substrate is contaminated.

  According to the third and fourth aspects of the invention, since the side rectifying member can be attached to and detached from the lower rectifying member, the maintenance and replacement of the side rectifying member can be easily performed. If the side rectifying members having different heights are prepared, the height relationship between the side rectifying member and the substrate held by the holding means can be changed by exchanging the members. Therefore, even when the processing conditions are changed, the side rectifying member can be placed at an appropriate height position with respect to the substrate by selecting and using the side rectifying member having an appropriate height. it can. As a result, the increase in the film thickness of the edge region can be appropriately suppressed.

According to the fifth aspect of the present invention, since the side rectifying member has a shape in which the upper surface is inclined downward toward the outside, excess processing liquid supplied onto the substrate flows into the side rectifying member. But it flows down to the outside. Therefore, it is difficult for the processing liquid to remain on the upper surface of the side rectifying member.

  Hereinafter, a substrate processing apparatus 1 including a coating processing apparatus according to an embodiment of the present invention will be described with reference to the drawings. In FIGS. 1 to 3 referred to in the following description, a common XYZ orthogonal coordinate system is attached in order to clarify the positional relationship and operation direction of each part.

  In the present application, the term “annular plate shape” is used as a concept including not only a flat annular shape but also an annular shape inclined downward toward the outer periphery.

<1. Overall configuration of substrate processing apparatus>
FIG. 1 is a plan view showing the overall configuration of the substrate processing apparatus 1. The substrate processing apparatus 1 is an apparatus for performing a series of processes such as a coating process, a heat treatment, and a development process on a semiconductor substrate W (hereinafter simply referred to as “substrate W”) before and after the immersion exposure process. As shown in FIG. 1, the substrate processing apparatus 1 mainly includes an indexer block 9, an antireflection film processing block 10, a resist film processing block 11, a development processing block 12, a resist cover film processing block 13, and a resist cover film. The removal block 14, the cleaning / drying processing block 15, and the interface block 16 are arranged in this order.

  An exposure device 17 separate from the substrate processing apparatus 1 is connected to the + Y side of the interface block 16. The exposure apparatus 17 has a function of performing immersion exposure processing on the substrate W.

  The indexer block 9 is provided with a main controller (control unit) 91 that controls the operation of each block, a plurality of carrier platforms 92, and an indexer robot IR. The indexer robot IR has two hands IRH1 and IRH2 that transfer the substrate W up and down.

  The anti-reflection film processing block 10 includes anti-reflection film heat treatment units 100 and 101, an anti-reflection film coating processing unit 30, and a first central robot CR1. The antireflection film heat treatment units 100 and 101 and the antireflection film application processing unit 30 are disposed to face each other with the second central robot CR1 interposed therebetween. The first center robot CR1 has two hands CRH1a and CRH1b that transfer the substrate W up and down.

  A partition wall 20 is provided between the indexer block 9 and the anti-reflection film processing block 10 for shielding the atmosphere. In addition, substrate placement portions PASS 1 and PASS 2 for transferring the substrate W between the indexer block 9 and the antireflection film processing block 10 are provided in a part of the partition wall 20 in the vertical direction. The upper substrate platform PASS1 is used when the substrate W is transported from the indexer block 9 to the antireflection film processing block 10, and the lower substrate platform PASS2 is used to transport the substrate W to the antireflection film processing block 10. Is used when transporting from one to the indexer block 9.

  The resist film processing block 11 is provided with resist film heat treatment units 110 and 111, a resist film coating processing unit 40, and a second center robot CR2. The resist film heat treatment units 110 and 111 and the resist film coating processing unit 40 are disposed to face each other with the second central robot CR2 interposed therebetween. The second center robot CR2 has two hands CRH2a and CRH2b that transfer the substrate W up and down.

  A partition wall 21 is provided between the antireflection film processing block 10 and the resist film processing block 11 for shielding the atmosphere. In addition, substrate placement portions PASS3 and PASS4 for transferring the substrate W between the antireflection film processing block 10 and the resist film processing block 11 are provided close to each other in a part of the partition wall 21 in the vertical direction. ing. The upper substrate platform PASS3 is used when the substrate W is transferred from the antireflection film processing block 10 to the resist film processing block 11, and the lower substrate platform PASS4 is used to process the substrate W on the resist film. Used when transported from the block 11 to the processing block 10 for antireflection film.

  The development processing block 12 is provided with development heat treatment units 120 and 121, a development processing unit 50, and a third center robot CR3. The development heat treatment units 120 and 121 and the development processing unit 50 are arranged to face each other with the third central robot CR3 interposed therebetween. The third central robot CR3 has two hands CRH3a and CRH3b that transfer the substrate W up and down.

  A partition wall 22 is provided between the resist film processing block 11 and the development processing block 12 for shielding the atmosphere. In addition, substrate platforms PASS5 and PASS6 for transferring the substrate W between the resist film processing block 11 and the development processing block 12 are provided in a part of the partition wall 22 so as to be close to each other in the vertical direction. The upper substrate platform PASS5 is used when the substrate W is transported from the resist film processing block 11 to the development processing block 12, and the lower substrate platform PASS6 is used to transfer the substrate W from the development processing block 12 to the resist film. Used when transporting to the processing block 11.

  The resist cover film processing block 13 is provided with resist cover film heat treatment units 130 and 131, a resist cover film coating processing unit 60, and a fifth central robot CR5. The resist cover film heat treatment units 130 and 131 and the resist cover film coating processing unit 60 are disposed to face each other with the fourth central robot CR4 interposed therebetween. The fourth central robot CR4 has two hands CRH4a and CRH4b that transfer the substrate W up and down.

  A partition wall 23 is provided between the development processing block 12 and the resist cover film processing block 13 for shielding the atmosphere. In addition, substrate placement portions PASS7 and PASS8 for transferring the substrate W between the development processing block 12 and the resist cover film processing block 13 are provided in a part of the partition wall 23 in the vertical direction. . The upper substrate platform PASS7 is used when the substrate W is transported from the development processing block 12 to the resist cover film processing block 13, and the lower substrate platform PASS8 is used to transfer the substrate W to the resist cover film processing block. 13 is used when transported from 13 to the development processing block 12.

  The resist cover film removal block 14 is provided with resist cover film removal processing units 70a and 70b and a fifth central robot CR5. The resist cover film removal processing units 70a and 70b are arranged to face each other with the fifth central robot CR5 interposed therebetween. The fifth central robot CR5 has two hands CRH5a and CRH5b that transfer the substrate W up and down.

  A partition wall 24 is provided between the resist cover film processing block 13 and the resist cover film removal block 14 for shielding the atmosphere. In addition, substrate placement parts PASS9 and PASS10 for transferring the substrate W between the resist cover film processing block 13 and the resist cover film removal block 14 are provided in a part of the partition wall 24 so as to be close to each other in the vertical direction. ing. The upper substrate platform PASS9 is used to transport the substrate W from the resist cover film processing block 13 to the resist cover film removal block 14, and the lower substrate platform PASS10 removes the substrate W from the resist cover film. It is used when transporting from the block 14 to the resist cover film processing block 13.

  The cleaning / drying processing block 15 is provided with post-exposure baking heat treatment units 150 and 151, a cleaning / drying processing unit 80, and a sixth central robot CR6. The post-exposure bake heat treatment section 151 is adjacent to the interface block 16 and includes substrate platforms PASS13 and PASS14 as described later. The post-exposure bake heat treatment units 150 and 151 and the cleaning / drying processing unit 80 are disposed to face each other with the sixth central robot CR6 interposed therebetween. The sixth central robot CR6 has two hands CRH6a and CRH6b that transfer the substrate W up and down.

  A partition wall 25 is provided between the resist cover film removal block 14 and the cleaning / drying processing block 15 for shielding the atmosphere. In addition, substrate platforms PASS11 and PASS12 for transferring the substrate W between the resist cover film removal block 14 and the cleaning / drying processing block 15 are provided in a part of the partition wall 25 so as to be close to each other in the vertical direction. Yes. The upper substrate platform PASS11 is used when the substrate W is transported from the resist cover film removal block 14 to the cleaning / drying processing block 15, and the lower substrate platform PASS12 is used to clean / dry the substrate W. 15 is used when transported from 15 to the resist cover film removal block 14.

  The interface block 16 is provided with a seventh central robot CR7, a feed buffer unit SBF, an interface transport mechanism IFR, and an edge exposure unit EEW. Further, below the edge exposure unit EEW, there are provided substrate platforms PASS15, PASS16 and a return buffer unit RBF which will be described later. The seventh central robot CR7 has two hands CRH7a and CRH7b that transfer the substrate W up and down, and the interface transport mechanism IFR has two hands H1 and H2 that transfer the substrate W. It has up and down.

  FIG. 2 is a side view of the substrate processing apparatus 1 of FIG. 1 viewed from the + X side.

  In the antireflection film coating processing section 30 (see FIG. 1) of the antireflection film processing block 10, three coating units BARC are stacked in a vertical direction. Each coating unit BARC has a spin chuck 31 that rotates while adsorbing and holding the substrate W in a horizontal posture, and a supply nozzle 32 that supplies a coating solution (BARC solution) for the antireflection film to the substrate W held on the spin chuck 31. Is provided.

  In the resist film coating processing section 40 (see FIG. 1) of the resist film processing block 11, three coating units RES are vertically stacked. Each coating unit RES includes a spin chuck 41 that rotates while adsorbing and holding the substrate W in a horizontal posture, and a supply nozzle 42 that supplies a coating solution (resist solution) for a resist film to the substrate W held on the spin chuck 41. Is provided.

  In the development processing unit 50 (see FIG. 1) of the development processing block 12, five development processing units DEV are vertically stacked. Each development processing unit DEV includes a spin chuck 51 that rotates while adsorbing and holding the substrate W in a horizontal posture, and a supply nozzle 52 that supplies developer to the substrate W held on the spin chuck 51.

  In the resist cover film coating processing unit 60 (see FIG. 1) of the resist cover film processing block 13, three coating units COV are vertically stacked. Each coating unit COV includes a spin chuck 61 that rotates while adsorbing and holding the substrate W in a horizontal posture, and a supply nozzle that supplies a coating liquid (topcoat liquid) for the resist cover film to the substrate W held on the spin chuck 61. 62.

  In the resist cover film removal processing section 70b (see FIG. 1) of the resist cover film removal block 14, three removal units REM are vertically stacked. Each removal unit REM supplies a spin chuck 71 that rotates while adsorbing and holding the substrate W in a horizontal position, and a removal liquid (for example, a fluororesin) that dissolves the resist cover film on the substrate W held on the spin chuck 71. And a supply nozzle 72.

  In the cleaning / drying processing unit 80 (see FIG. 1) of the cleaning / drying processing block 15, three cleaning / drying processing units SD are stacked and arranged.

  In the interface block 16, two edge exposure units EEW, a substrate platform PASS15, PASS16, and a return buffer unit RBF are stacked one above the other and a seventh central robot CR7 (see FIG. 1). Also, an interface transport mechanism IFR is arranged. Each edge exposure unit EEW includes a spin chuck 98 that rotates while sucking and holding the substrate W in a horizontal posture, and a light irradiator 99 that exposes the periphery of the substrate W held on the spin chuck 98.

  FIG. 3 is a side view of the substrate processing apparatus 1 of FIG. 1 viewed from the −X side.

  Two heating units (hot plates) HP and two cooling units (cooling plates) CP are vertically stacked on the antireflection film heat treatment units 100 and 101 of the antireflection film processing block 10, respectively. ing. In addition, local controllers LC for controlling the temperatures of the cooling unit CP and the heating unit HP are arranged at the top of the heat treatment units 100 and 101 for the antireflection film, respectively.

  In the resist film heat treatment units 110 and 111 of the resist film processing block 11, two heating units HP and two cooling units CP are vertically stacked. Further, local controllers LC for controlling the temperatures of the cooling unit CP and the heating unit HP are respectively arranged on the uppermost portions of the resist film heat treatment units 110 and 111.

  In the development heat treatment sections 120 and 121 of the development processing block 12, two heating units HP and two cooling units CP are vertically stacked. In addition, local controllers LC for controlling the temperatures of the cooling unit CP and the heating unit HP are disposed at the top of the development heat treatment units 120 and 121, respectively.

  In the resist cover film heat treatment sections 130 and 131 of the resist cover film processing block 13, two heating units HP and two cooling units CP are vertically stacked. In addition, a local controller LC for controlling the temperatures of the cooling unit CP and the heating unit HP is disposed at the top of the resist cover film heat treatment sections 130 and 131, respectively.

  In the resist cover film removal processing unit 70a of the resist cover film removal block 14, three removal units REM are vertically stacked.

  In the post-exposure baking heat treatment sections 150 and 151 of the cleaning / drying processing block 15, two heating units HP and two cooling units CP are vertically stacked. In addition, in the post-exposure bake heat treatment section 151, substrate platforms PASS13 and 14 are also disposed. In addition, local controllers LC for controlling the temperatures of the cooling unit CP and the heating unit HP are disposed at the top of the post-exposure baking heat treatment units 150 and 151, respectively.

  The numbers of coating units BARC, RES, COV, cleaning / drying processing unit SD, removal unit REM, development processing unit DEV, heating unit HP, and cooling unit CP are appropriately changed according to the processing speed of each block. Also good.

<2. Overall operation of substrate processing equipment>
Next, an outline of the overall operation of the substrate processing apparatus 1 will be described with reference to the flowcharts of FIGS. 1 to 3 and FIG. 4. When processing the substrate W in the substrate processing apparatus 1, first, the carrier C in which a plurality of substrates W are stored in multiple stages is carried onto the carrier mounting base 92 of the indexer block 9 (step S1).

  When the carrier C is mounted on the carrier mounting table 92, the indexer robot IR takes out the unprocessed substrate W stored in the carrier C using the upper hand IRH1. Then, the indexer robot IR rotates in the θ direction while moving in the X axis direction, and places the unprocessed substrate W on the substrate platform PASS1.

  The first central robot CR1 of the antireflection film processing block 10 receives the substrate W placed on the substrate platform PASS1, and transports the substrate W to the coating unit BARC of the antireflection film coating processor 30. . In the coating unit BARC, an antireflection film for reducing standing waves and halation generated during the exposure process is formed on the upper surface of the substrate W (step S2).

  Thereafter, the second central robot CR1 takes out the substrate W from the antireflection film coating processing unit 30 and carries the substrate W into the antireflection film heat treatment units 100 and 101. In the heat treatment units 100 and 101 for the antireflection film, predetermined heat treatment (heating treatment and cooling treatment) is performed on the substrate W (step S3). When the heat treatment in the antireflection film heat treatment units 100 and 101 is completed, the first central robot CR1 takes out the substrate W from the antireflection film heat treatment units 100 and 101 and places the substrate W on the substrate platform PASS3. To do.

  The second central robot CR2 of the resist film processing block 11 receives the substrate W placed on the substrate platform PASS3 and transports the substrate W to the coating unit RES of the resist film coating processor 40. In the coating unit RES, a resist film is applied and formed on the upper surface of the antireflection film on the upper surface of the substrate W (step S4).

  Thereafter, the second central robot CR2 takes out the substrate W from the resist film coating processing unit 40 and carries the substrate W into the resist film heat treatment units 110 and 111. In the resist film heat treatment units 110 and 111, predetermined heat treatment (heating treatment and cooling treatment) is performed on the substrate W (step S5). When the heat treatment in the resist film heat treatment units 110 and 111 is completed, the second central robot CR2 takes out the substrate W from the resist film heat treatment units 110 and 111 and places the substrate W on the substrate platform PASS5. To do.

  The third central robot CR3 of the development processing block 12 receives the substrate W placed on the substrate platform PASS5, and places the substrate W on the substrate platform PASS7.

  The fourth central robot CR4 of the resist cover film processing block 13 receives the substrate W placed on the substrate platform PASS7 and transports the substrate W to the coating unit COV of the resist cover film coating processing unit 60. . In the coating unit COV, a resist cover film is applied and formed on the upper surface of the resist film on the upper surface of the substrate W. (Step S6).

  Thereafter, the fourth central robot CR4 takes out the substrate W from the resist cover film coating processing unit 60 and carries the substrate W into the resist cover film heat treatment units 130 and 131. In the resist cover film heat treatment units 130 and 131, a predetermined heat treatment (heating treatment and cooling treatment) is performed on the substrate W (step S7). When the heat treatment in the resist cover film heat treatment units 130 and 131 is completed, the fourth central robot CR4 takes out the substrate W from the resist cover film heat treatment units 130 and 131 and puts the substrate W on the substrate platform PASS9. Place.

  The fifth central robot CR5 of the resist cover film removal block 14 receives the substrate W placed on the substrate platform PASS9, and places the substrate W on the substrate platform PASS11. Further, the sixth central robot CR6 of the cleaning / drying processing block 15 receives the substrate W placed on the substrate platform PASS11 and places the substrate W on the substrate platform PASS13. Further, the seventh central robot CR7 of the interface block 16 receives the substrate W placed on the substrate platform PASS13, and places the substrate W on the substrate platform PASS15. Note that the substrate W may be carried into the edge exposure unit EEW in the interface block 16, and an exposure process may be performed on the peripheral portion of the substrate W.

  The interface transport mechanism IFR of the interface block 16 carries the substrate W placed on the substrate platform PASS15 into the substrate carry-in portion 17a of the exposure apparatus 17 (step S8). When the exposure apparatus 17 cannot accept the substrate W, the substrate W is temporarily stored and stored in the sending buffer unit SBF. In the exposure apparatus 17, immersion exposure processing is performed on the substrate W, and a predetermined electronic pattern is exposed on the upper surface of the substrate W.

  Thereafter, the interface transport mechanism IFR of the interface block 16 takes out the substrate W after the exposure processing from the substrate carry-out portion 17b of the exposure device 17 (step S9), and applies it to the cleaning / drying processing portion 80 of the cleaning / drying processing block 15. The substrate W is carried in. When the cleaning / drying processing unit 80 cannot accept the substrate W, the substrate W is temporarily stored and stored in the return buffer unit RBF. In the cleaning / drying processing unit SD of the cleaning / drying processing unit 80, cleaning processing and drying processing are performed on the substrate W after the exposure processing (step S10).

  When the cleaning process and the drying process in the cleaning / drying processing unit 80 are completed, the interface transport mechanism IFR of the interface block 16 takes out the substrate W from the cleaning / drying processing unit 80 and places the substrate W on the substrate platform PASS16. Put.

  The seventh central robot CR7 of the interface block 16 receives the substrate W placed on the substrate platform PASS16, and transports the substrate W to the post-exposure baking heat treatment units 150 and 151 of the cleaning / drying processing block 15. . In the post-exposure baking heat treatment units 150 and 151, predetermined heat treatment (heating treatment and cooling treatment) is performed on the substrate W after the exposure treatment (step S11). When the heat treatment in the post-exposure bake heat treatment units 150 and 151 is completed, the seventh central robot CR7 of the interface block 16 takes out the substrate W from the post-exposure bake heat treatment units 150 and 151, and places the substrate W on the substrate. Place it on the placement part PASS14. Further, the sixth central robot CR6 of the cleaning / drying processing block 15 receives the substrate W placed on the substrate platform PASS14 and places the substrate W on the substrate platform PASS12.

  The fifth central robot CR5 of the resist cover film removal block 14 receives the substrate W placed on the substrate platform PASS12 and carries the substrate into the removal unit REM of the resist cover film removal processing units 70a and 70b. . In the removal unit REM, the resist cover film is removed from the upper surface of the substrate W with a predetermined removal liquid (step S12).

  Thereafter, the fifth central robot CR5 takes out the substrate W from the resist cover film removal processing units 70a and 70b, and places the substrate W on the substrate platform PASS10. The fourth central robot CR4 of the resist cover film processing block 13 receives the substrate W placed on the substrate platform PASS10 and places the substrate W on the substrate platform PASS8.

  Further, the third central robot CR3 of the development processing block 12 receives the substrate W placed on the substrate platform PASS8 and carries the substrate W into the development processing unit DEV of the development processing unit 50. In the development processing unit DEV, development processing is performed by supplying the developer onto the upper surface of the substrate W (step S13).

  Thereafter, the third central robot CR3 takes out the substrate W from the development processing unit 50 and carries the substrate W into the development heat treatment units 120 and 121. In the development heat treatment units 120 and 121, predetermined heat treatment (heating treatment and cooling treatment) is performed on the substrate W (step S14). When the heat treatment in the development heat treatment units 120 and 121 is completed, the third central robot CR3 takes out the substrate W from the development heat treatment units 120 and 121 and places the substrate W on the substrate platform PASS6.

  The second central robot CR2 of the resist film processing block 11 receives the substrate W placed on the substrate platform PASS6 and places the substrate W on the substrate platform PASS4. The first central robot CR1 of the antireflection film processing block 10 receives the substrate W placed on the substrate platform PASS4 and places the substrate W on the substrate platform PASS2. Further, the indexer robot IR of the indexer block 9 receives the substrate W placed on the substrate platform PASS 2 and stores the substrate W in the carrier C on the carrier platform 92. Thereafter, the carrier C is unloaded from the carrier mounting table 92 (step S15), and a series of substrate processing in the substrate processing apparatus 1 is completed.

<3. Application unit>
Next, the coating processing unit provided in the substrate processing apparatus 1 will be described. The substrate processing apparatus 1 includes a coating unit that performs various coating processes (a coating unit BARC that performs a BARC liquid coating process, a coating unit RES that performs a resist liquid coating process, and a top coat liquid coating process. Unit COV). The present invention does not limit the type of treatment liquid, and can be applied to any of these coating units. In the following, a coating unit RES to which the present invention is applied will be described as an example.

<3A. First Embodiment>
<3A-1. Constitution>
The configuration of the coating unit RES according to the first embodiment of the present invention will be described with reference to FIG. FIG. 5 is a side sectional view showing the overall configuration of the coating unit RES according to the first embodiment. As described above, the coating unit RES includes the spin chuck 41 and the supply nozzle 42. In addition, a cup 43 and a side rectifying member 45 are provided. Moreover, the control part 400 which controls these each part is provided.

  The spin chuck 41 will be described. The spin chuck 41 is fixed to the upper end of the rotation shaft 411 rotated by the rotation drive mechanism 412. The spin chuck 41 has an intake passage (not shown). The substrate W to be processed loaded into the coating unit RES is placed on the spin chuck 41 so that the center thereof coincides with the rotation center of the rotation shaft 411. When the inside of the suction path is exhausted in this state, the substrate W is vacuum-sucked by the suction pressure of the suction path and is fixedly held on the spin chuck 41 in a horizontal posture. Furthermore, when the rotation drive mechanism 412 rotates the rotation shaft 411 in this state, the substrate W is rotated around a vertical rotation shaft passing through the center thereof. The rotation drive mechanism 412 is electrically connected to the control unit 400, and the control unit 400 controls the rotation drive mechanism 412 at a predetermined timing so that the substrate W adsorbed and held on the spin chuck 41 is controlled. Rotate.

  The supply nozzle 42 will be described. The supply nozzle 42 supplies a predetermined processing liquid (a predetermined coating liquid, or a resist liquid in the case of the coating unit RES) to the substrate W held on the spin chuck 41. The supply nozzle 42 is attached to the tip of an arm (not shown) to which a turning mechanism (not shown) is connected. When the rotation mechanism rotates the arm, the supply nozzle 42 moves between an upper position (processing position) of the substrate W held on the spin chuck 41 and a position away from the substrate W (retreat position). . The rotation mechanism is electrically connected to the control unit 400, and the control unit 400 drives and controls the rotation mechanism at a predetermined timing to move the supply nozzle 42 between the processing position and the retracted position. Let

  The supply nozzle 42 is connected with a supply pipe 421 having an open / close valve 422 interposed therein. The other end of the supply pipe 421 is connected to a processing liquid supply source 423 that stores a predetermined processing liquid (here, a resist liquid). As the supply nozzle 42, for example, a so-called straight nozzle that discharges the supplied processing liquid as it is can be adopted. When the opening / closing valve 422 is opened with the supply nozzle 42 in the processing position, the processing liquid is discharged from the supply nozzle 42 toward the substrate W held on the spin chuck 41. The on-off valve 422 is electrically connected to the control unit 400, and the control unit 400 opens or closes the on-off valve 422 at a predetermined timing.

  The cup 43 will be described. The cup 43 is formed with a recovery part 43a and a downward rectification part 43b. The recovery unit 43a is a component that recovers the processing liquid scattered around from the substrate W held on the spin chuck 41, and surrounds the periphery of the substrate W held on the spin chuck 41 on the side, and A recess is formed over the entire circumference. Specifically, the recovery unit 43a includes a cylindrical outer wall portion 431 that surrounds the side of the substrate W held on the spin chuck 41, a cylindrical inner wall portion 432 disposed below the substrate W, A cylindrical middle wall portion 433 disposed between the outer wall portion 431 and the inner wall portion 432, and a lower wall portion 434 on which lower end surfaces of the outer wall portion 431, the inner wall portion 432, and the middle wall portion 433 are attached. Prepare. However, the outer wall portion 431 is formed of a cylindrical vertical wall portion 4311 and an inclined wall portion 4312 that is attached to the upper end of the outer wall portion 431 and tilts inward and upward.

  A drainage pipe 436 having a drainage valve 435 inserted therein is connected to the bottom surface of a recess (outer recess) formed by the outer wall portion 431, the middle wall portion 433, and the low wall portion 434. Excess processing liquid scattered from the rotating substrate W is received by the inner wall surface of the outer wall portion 431, flows into the outer concave portion, and is drained to the outside through the drain pipe 436. The drain valve 435 is electrically connected to the control unit 400, and the control unit 400 opens the drain valve 435 at a predetermined timing to drain the processing liquid captured in the outer recess to the outside. Liquid.

  An exhaust pipe 439 in which an exhaust valve 437 and an exhaust pump 438 are inserted is connected to the bottom surface of a recess (inner recess) formed by the inner wall portion 432, the middle wall portion 433 and the low wall portion 434. The vapor of the processing liquid generated around the substrate W held by the spin chuck 41 is guided to the internal space of the recovery unit 43a that has been made negative pressure while forming an air flow, and is exhausted to the outside through the exhaust pipe 439. The The exhaust valve 437 and the exhaust pump 438 are electrically connected to the control unit 400, and the control unit 400 drives the exhaust pump 438 at a predetermined timing and opens the exhaust valve 437 so that the recovery unit 43a Negative pressure in the internal space.

  The lower rectification unit 43b will be described. The lower rectification unit 43b is an annular plate-shaped component disposed inside the collection unit 43a and below the substrate W held on the spin chuck 41. The lower rectification unit 43 b forms a minute space between the upper surface thereof and the peripheral region of the back surface of the substrate W held on the spin chuck 41 and the lower surface of the side rectification member 45 described later.

  More specifically, the lower rectification unit 43b includes a cylindrical side wall portion 441 and an inclined wall portion 442 formed on the upper side and inclined inward toward the upper end. The side wall portion 441 is disposed at a horizontal position concentric with the substrate W held on the spin chuck 41. Further, the upper surface of the inclined wall portion 442 and the rear surface of the substrate W held on the spin chuck 41 are arranged at a height position that is separated by a predetermined distance. However, the inner peripheral radius of the lower rectifying unit 43b is smaller than the radius of the substrate W (specifically, the upper end edge of the inclined wall portion 442 is positioned inward by a predetermined distance from the peripheral edge of the substrate W on the spin chuck 41). The outer peripheral radius is larger than the radius of the substrate W (specifically, the lower end edge of the side wall portion 441 is positioned between the middle wall portion 433 and the outer wall portion 431 of the collection portion 43a). To be formed. As a result, a minute space is formed between the upper surface of the inclined wall portion 442 and the peripheral edge portion of the back surface of the substrate W held on the spin chuck 41. A minute space is also formed between the upper surface of the inclined wall portion 442 and the lower surface of the side rectifying member 45 described later.

  Here, the minute space formed between the upper surface of the lower rectification unit 43b and the peripheral portion of the back surface of the substrate W held on the spin chuck 41 and the lower surface of the side rectification member 45 described later is formed on the substrate W. It plays a role as a passage that guides an airflow that flows along the surface and flows downward through an inner circumferential annular gap K2 described later in the direction opposite to the substrate W (outside).

  A plurality of fitting grooves 443 are formed on the outer periphery of the lower rectifying portion 43b (see FIG. 6). Each of the fitting grooves 443 is formed in a shape corresponding to each of the plurality of fitting claws 451 formed in the side rectifying member 45 described later.

  The side rectifying member 45 will be described. The side rectifying member 45 is an annular plate-like member that is disposed inside the cup 43 and surrounds the side periphery of the substrate W held by the spin chuck 41.

  Specifically, the side rectifying member 45 is disposed concentrically with the substrate W held on the spin chuck 41, and the outer peripheral radius thereof is formed to be slightly smaller than the inner wall radius of the cup 43. Further, the inner peripheral radius is formed slightly larger than the radius of the substrate W. Thereby, an annular minute gap (outer ring gap K1) is formed between the outer periphery of the side rectifying member 45 and the inner wall of the cup 43 in plan view. Further, an annular minute gap (inner circumferential annular gap K2) is formed in plan view between the inner circumference of the side rectifying member 45 and the end face of the substrate W held on the spin chuck 41. These outer ring gap K1 and inner ring gap K2 communicate with the bottom surface of the cup 43 in which the exhaust pipe 439 is formed.

  Here, the upper surface of the side rectifying member 45 serves as a guide surface that guides the airflow flowing on the upper surface of the substrate W held on the spin chuck 41 further outward from the edge of the substrate W. The outer peripheral annular gap K <b> 1 serves as an exhaust groove that exhausts the airflow flowing along the upper surface of the side rectifying member 45. Further, the inner circumferential annular gap K2 allows a part of the airflow flowing along the surface of the substrate W to flow below the side rectifying member 45 (specifically, the lower surface of the side rectifying member 45 and the upper surface of the lower rectifying unit 43b). It plays a role as an introduction groove leading to a minute space formed between the two.

  In addition, as shown in the drawing, the side rectifying member 45 is preferably molded into a shape that decreases in thickness toward the inner periphery. For example, it is desirable that the lower surface has a shape that inclines upward toward the inside.

  Further, the side rectifying member 45 may have a shape in which the upper surface thereof is horizontal, or may have a shape that is inclined downward toward the outside as illustrated. In particular, in the latter case, even if excess processing liquid supplied onto the substrate W flows onto the side rectifying member 45, it flows down toward the outside. Therefore, the processing liquid is unlikely to remain on the upper surface of the side rectifying member 45. As a result, it is possible to avoid the rebound phenomenon (a phenomenon in which the processing liquid scattered from the substrate and attached to the members disposed in the vicinity thereof flows back toward the substrate again over time).

  Please refer to FIG. 6 and FIG. FIG. 6 is a side view of the cup 43 and the side rectifying member 45, and FIG. 7 is a view showing a state in which the side rectifying member 45 is attached to the cup 43. As shown in FIG. 6, the side rectifying member 45 is formed with a plurality of fitting claws 451 protruding from the lower end edge thereof. Each of the fitting claws 451 is formed in a shape corresponding to each of the plurality of fitting grooves 443 formed in the cup 43 described above. Thereby, the corresponding fitting claw 451 and the fitting concave groove 443 can be fitted to each other. By fitting the fitting claws 451 of the side rectifying member 45 into the corresponding fitting concave grooves 443 of the cup 43, the side rectifying member 45 can be attached to the cup 43 as shown in FIG. it can.

  However, in a state where the side rectifying member 45 is mounted, a minute space formed between the side rectifying member 45 and the lower rectifying portion 43b of the cup 43 is a cup in which the exhaust pipe 439 is formed. A communication opening (opening K3) that communicates with the bottom surface of 43 is formed. The opening K3 can be formed, for example, by appropriately adjusting the length of the fitting claw 451. That is, in the mounted state, if the length of the fitting claw 451 is adjusted so that the lower surface of the lateral rectifying member 45 is positioned at a predetermined distance from the upper surface of the lower rectifying portion 43b, The rectifying member 45 is attached to the cup 43 while forming an opening K3 communicating with the bottom surface of the cup 43 in which the exhaust pipe 439 is formed between the rectifying member 45 and the lower rectifying portion 43b.

  Here, the opening K3 exhausts the airflow guided to the minute space formed between the lower surface of the side rectifying member 45 and the upper surface of the lower rectifying portion 43b of the cup 43 through the inner circumferential annular gap K2. It serves as an exhaust opening.

<3A-2. Processing action>
Next, the processing operation executed in the coating unit RES will be described. When the second central robot CR2 (see FIG. 1) carries the substrate W into the coating unit RES and places it on the spin chuck 41, the control unit 400 causes the spin chuck 41 to hold the substrate W by suction.

  Subsequently, a resist film coating process is performed. That is, the control unit 400 controls the rotation drive mechanism 412 to rotate the substrate W, and opens the opening / closing valve 422 to discharge the processing liquid (here, resist liquid) from the supply nozzle 42 toward the upper surface of the substrate W. Let When a predetermined amount of the processing liquid is supplied to the upper surface of the substrate W, the control unit 400 closes the opening / closing valve 422 to stop the discharge of the processing liquid from the supply nozzle 42 and continue the rotation of the substrate W only. As a result, the treatment liquid spreads on the surface of the substrate W and a coating film (here, a resist film) is formed. When the predetermined time has elapsed, the control unit 400 controls the rotation drive mechanism 412 to stop the rotation of the substrate W. This completes the coating process. When the coating process is completed, the second center robot CR2 carries the substrate W out of the coating unit RES.

<3A-3. effect>
As described above, in the coating process, the rising phenomenon of the film thickness in the edge region is a problem. This phenomenon is considered to be one of the causes of the turbulence of airflow (turbulent flow region) in the vicinity of the edge region of the rotated substrate W. When a turbulent flow region occurs in the vicinity of the edge region, the volatilization rate of the solvent contained in the coating solution increases, making it difficult for the coating solution to spread. It is thought that the film thickness of the edge region is increased due to the collapse.

  In the above embodiment, by providing the side rectifying member 45, the increase in the film thickness of the edge region can be suppressed. The reason why the rising of the film thickness in the edge region is suppressed by providing the side rectifying member 45 is as follows. That is, as shown in FIGS. 5 and 8, when the lateral rectifying member 45 is provided, when the coating film forming process is performed on the substrate W, the rotating substrate W is surrounded by the side from the surface of the substrate W. An airflow (first airflow AR1) that flows along the upper surface of the rectifying member 45 and flows downward from the outer edge of the side rectifying member 45 through the outer circumferential annular gap K1 and along the surface of the substrate W. An air flow (second air flow AR2) is formed that flows and flows downward from the outer edge of the substrate through the inner circumferential annular gap K2 and exhausts downward. As a result of the formation of these two airflows, the airflow formed in the vicinity of the edge region of the substrate W is stabilized, and a turbulent region is unlikely to be generated in the vicinity of the edge region of the substrate W. As a result, the coating liquid spreads smoothly even in the vicinity of the edge region, and it is difficult for the film thickness in the edge region to increase.

  In particular, since the outer circumferential annular gap K1 is an annular minute gap in plan view, the first air flow AR1 can be exhausted from the entire outer circumference of the side rectifying member 45. Further, since the inner circumferential annular gap K2 is also an annular minute gap in plan view, the second air flow AR2 can be exhausted from the entire outer circumference of the substrate W. Therefore, the exhaust pressure along the peripheral direction of the substrate W becomes constant, and the airflow formed in the vicinity of the edge region of the substrate W is very stable. As a result, the effect of suppressing the increase in the film thickness of the edge region is enhanced.

  As described above, since the increase in the film thickness of the edge region can be suppressed by providing the side rectifying member 45, the conventional processing conditions are maintained (that is, without changing the already established recipe). ), The film thickness uniformity of the substrate W can be improved.

  Further, since the side rectifying member 45 is mounted on the lower rectifying portion 43b of the cup 43, the side rectifying member 45 and the collecting portion 43a can be arranged apart from each other, and the side rectifying member 45 can be arranged with a simple configuration. An annular minute gap (outer ring gap K <b> 1) can be formed between the rectifying member 45 and the cup 43. Further, the width of the outer peripheral annular gap K1 can be adjusted by adjusting the width of the side rectifying member 45.

  In addition, since a minute space is formed between the upper surface of the lower rectification unit 43b and the peripheral region on the back surface of the substrate W and the lower surface of the side rectification member 45, the second air flow AR2 is generated in the lower rectification unit 43b. It is guided to the outside along the upper surface and is exhausted through the opening K3. As a result, it is possible to prevent a situation in which the second air flow AR2 is caught on the back surface side of the substrate W and the back surface of the substrate W is contaminated.

  Further, the side rectifying member 45 is detachably attached to the cup 43 by fitting the fitting claw 451 into the fitting concave groove 443. According to this configuration, maintenance and replacement of the side rectifying member 45 can be easily performed. For example, since the side rectifying member 45 can be removed and easily cleaned, the side rectifying member 45 can always be kept clean.

  By the way, the situation where the side rectifying member 45 is placed at such a height position that the upper surface of the substrate W held on the spin chuck 41 and the upper surface of the side rectifying member 45 are flush with each other (the side rectifying member 45 The case where the top surface is horizontal) or the situation where the top surface of the substrate W and the inner edge of the side rectifying member 45 are at the same height (the top surface of the side rectifying member 45 faces outward). However, there is a process in which it is inconvenient to place the side rectifying member 45 at such a position. For example, the end surface portion of the substrate W is caused by the processing liquid (removal liquid, adhesion enhancing agent, etc.) discharged from the nozzle (so-called back rinse nozzle) discharging the processing liquid from the lower surface side of the substrate W around the end surface of the substrate W. A process for supplying a processing liquid to the substrate W (for example, Beberis), a process for supplying the processing liquid to the peripheral edge of the substrate W by wrapping up to the upper surface of the substrate W (for example, a back rinse), and the like correspond to such a process. To do.

  In the above embodiment, the side rectifying member 45 can be easily removed. Therefore, when a recipe incorporating such a process is executed, the side rectifying member 45 may be removed in advance. If the side rectifying member 45 is removed, a recipe incorporating the above processing can be executed without any problem.

  By the way, in order to suppress the increase in the film thickness of the edge region, it is necessary that the first air flow AR1 and the second air flow AR2 be smoothly formed. Specifically, it is desirable that the inner edge of the side rectifying member 45 be positioned at an appropriate height with respect to the substrate W held on the spin chuck 41. Here, the appropriate height position is a value defined by various factors such as the viscosity of the processing liquid, the film thickness of the coating film, and the number of rotations during film formation, and varies depending on the processing conditions and the like. .

  In the above embodiment, the height position of the side rectifying member 45 with respect to the cup 43 can be adjusted by adjusting the height of the fitting claws 451 formed on the side rectifying member 45. Since the cup 43 is disposed at a predetermined relative position with respect to the substrate W on the spin chuck 41, the side rectifying member with respect to the substrate W held by the spin chuck 41 is adjusted by adjusting the height of the fitting claw 451. The height position of 45 can be adjusted.

  Further, if a plurality of side rectifying members 45 having different heights of the fitting claws 451 are prepared in advance, the side rectifying members 45 to be attached to the cup 43 are exchanged to be held by the spin chuck 41. Further, the height position of the side rectifying member 45 with respect to the substrate W can be easily changed. That is, even when the processing conditions are changed, by selecting and using the side rectifying member 45 having the fitting claw 451 having an appropriate height, the height position corresponding to the processing conditions is obtained. The side rectifying member 45 can be placed, and the increase in the film thickness in the edge region can be appropriately suppressed.

<3B. Second Embodiment>
<3B-1. Constitution>
A configuration of the coating unit RES according to the second embodiment of the present invention will be described. The coating unit RES according to this embodiment has the same configuration as that of the coating unit RES according to the first embodiment, and the height relationship between the side rectifying member 45 and the substrate W held on the spin chuck 41. Is further provided with a mechanism (height adjustment mechanism 46) for changing. In the following description, the same components as those of the coating unit RES according to the first embodiment are not described and are denoted by the same reference numerals. Further, since the processing operation performed in the coating unit RES according to this embodiment is the same as that of the coating unit RES according to the first embodiment, the description thereof is omitted.

  The height adjustment mechanism 46 will be described with reference to FIG. FIG. 9 is a side sectional view of the coating unit RES according to the second embodiment, in which the vicinity of the side rectifying member 45 is enlarged. The height adjustment mechanism 46 includes a plurality of adjustment pins 461 and a lifting mechanism 462 that lifts and lowers the plurality of adjustment pins 461 all at once.

  Each of the plurality of adjustment pins 461 is provided on the bottom surface of the fitting groove 443 formed in the cup 43 so as to be able to appear and retract. The adjustment pin 461 is in contact with the bottom surface of the fitting claw 451 of the side rectifying member 45 in a state where the side rectifying member 45 is attached to the cup 43, so that the height position of the side rectifying member 45 with respect to the cup 43 is adjusted. Stipulate.

  The elevating mechanism 462 elevates and lowers the plurality of adjustment pins 461 all at once. As the adjustment pin 461 moves up and down, the height position of the side rectifying member 45 in contact with the adjustment pin 461 with respect to the cup 43 is changed. Since the cup 43 is disposed at a predetermined relative position with respect to the substrate W on the spin chuck 41, the substrate W held on the spin chuck 41 is changed by changing the height position of the side rectifying member 45 with respect to the cup 43. The height position of the side rectifying member 45 with respect to can be changed. The elevating mechanism 462 is electrically connected to the control unit 400, and the control unit 400 drives and controls the elevating mechanism 462 in accordance with an instruction from the operator to raise or lower the adjustment pin 461.

<3B-2. effect>
As described above, in order to suppress the increase in the film thickness of the edge region, it is desirable that the side rectifying member 45 is positioned at an appropriate height with respect to the substrate W held on the spin chuck 41. However, this appropriate height position varies depending on various factors. In the above embodiment, the height adjustment mechanism 46 causes the height position of the side rectification member 45 relative to the cup 43 (that is, the height position of the side rectification member 45 relative to the substrate W held by the spin chuck 41). Can be adjusted. Therefore, if the height position of the side rectifying member 45 is adjusted according to the processing conditions and the like, the side rectifying member 45 can be placed at the height position according to the processing conditions, and the film thickness of the edge region can be increased. Swelling can be suppressed appropriately.

  Further, as described above, the lateral rectification is performed at a position where the upper surface of the substrate W held on the spin chuck 41 and the upper surface of the lateral rectification member 45 (or the inner edge of the lateral rectification member 45) are at the same height. Although there is a process in which it is inconvenient to place the member 45, in the above-described embodiment, the height adjustment mechanism 46 can change the height position of the side rectifying member 45, and thus such a process is executed. At this time, the side rectifying member 45 may be raised (or lowered). Thereby, the side rectification member 45 does not get in the way, and the process can be executed without any problem.

<4. Modification>
The coating unit RES according to the second embodiment includes a height adjusting mechanism 46 as a mechanism for changing the height of the side rectifying member 45, and the height of the side rectifying member 45 is increased and lowered by the adjustment pin 461. Although it was set as the structure which adjusts a position, the aspect which changes the height of the side rectification | straightening member 45 is not restricted to this. For example, a mechanism for raising and lowering the cup 43 is provided, and by raising and lowering the cup 43, the height position of the side rectifying member 45 attached thereto with respect to the substrate W held on the spin chuck 41 is changed. Also good.

  In the above, the recovery part 43a and the lower rectification part 43b are integrally formed to form the cup 43. However, the recovery part 43a and the lower rectification part 43b are formed separately, and one of them is the other. It is good also as a structure attached or adhere | attached.

  Moreover, in the above, although the structural example at the time of applying this invention to the coating processing unit with which the substrate processing apparatus 1 is provided was naturally possible to apply to the independent coating processing apparatus. That is, the present invention can be applied to various processing apparatuses that perform coating processing by spin coating. For example, the present invention can be applied to a coating processing apparatus that performs a BARC liquid coating process, a coating processing apparatus that performs a resist liquid coating process, a coating processing apparatus that performs a top coating liquid coating process, and the like.

  Further, the configuration and arrangement of the processing units provided in the substrate processing apparatus 1 according to the above embodiment and the number of each processing unit are not limited to those described above.

  In the above embodiment, the exposure apparatus EXP is disposed adjacent to the substrate processing apparatus 1, but various other apparatuses may be disposed adjacent to each other.

  In the above embodiment, the semiconductor substrate W is a processing target. However, the substrate processing apparatus according to the present invention targets other substrates such as a liquid crystal display glass substrate and a photomask glass substrate as a processing target. You may do.

It is a top view of a substrate processing apparatus. It is the side view which looked at the substrate processing apparatus from the + X side. It is the side view which looked at the substrate processing apparatus from the -X side. It is a flowchart which shows the flow of the whole operation | movement of a substrate processing apparatus. It is a sectional side view which shows the whole structure of a coating unit. It is a side view of a cup and a baffle member. It is a figure of the state which attached the baffle member to the cup. It is sectional drawing which expands and shows a part of application | coating unit. It is a figure which shows the structure of a height adjustment mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Substrate processing apparatus 10 Processing block for antireflection film 11 Processing block for resist film 12 Development processing block 13 Processing block for resist cover film 14 Resist cover film removal block 15 Cleaning / drying processing block 16 Interface block 17 Exposure apparatus 41 Spin chuck 42 Supply nozzle 43 Cup 43a Recovery part 43b Lower rectification part 45 Side rectification member 46 Height adjustment mechanism 400 Control part 443 Fitting groove 451 Fitting claw RES Application unit W Substrate

Claims (6)

A coating processing apparatus for applying a processing liquid to a substrate,
Holding means for rotating while holding the substrate;
Treatment liquid supply means for supplying the treatment liquid onto the substrate held by the holding means;
A splash prevention cup that is provided so as to surround the holding means and collects the processing liquid splashed around from the substrate;
An exhaust unit provided at a lower portion of the anti-scattering cup, and exhausting the atmosphere around the substrate by setting the internal space of the anti-scattering cup to a negative pressure;
An annular plate-like member surrounding a side periphery of the substrate, wherein an outer peripheral radius is formed smaller than an inner wall radius of the anti-scattering cup, and an inner peripheral radius is formed larger than a radius of the substrate. And an annular gap is formed between the outer periphery of the substrate and the inner wall of the anti-scattering cup in a plan view and communicates with the exhaust means. A side rectifying member that forms an annular gap in a plan view communicating with the exhaust means between a circumference and an end face of the substrate;
A height adjusting mechanism for changing a height relationship between the side rectifying member and the substrate;
A coating processing apparatus comprising: The coating treatment apparatus according to claim 1,
An annular plate-like member disposed below the substrate and the side rectifying member, wherein a minute space is formed between the upper surface thereof and the peripheral region of the back surface of the substrate and the lower surface of the side rectifying member. A lower flow straightening member to be formed,
With
The coating processing apparatus, wherein the side rectification member is attached to the lower rectification member while forming a communication opening communicating with the exhaust means between the side rectification member and the lower rectification member. The coating treatment apparatus according to claim 2,
The coating treatment apparatus, wherein the side rectifying member is detachable from the lower rectifying member. It is a coating processing apparatus of Claim 2 or 3,
The lower flow straightening member is
Multiple mating grooves,
With
The side rectifying member is
A plurality of fitting claws each fitting with each of the plurality of fitting grooves,
A coating processing apparatus comprising:   A coating treatment apparatus according to any one of claims 1 to 4,
  The said side rectification | straightening member is the shape where the upper surface inclines below toward the outer side, The coating processing apparatus characterized by the above-mentioned.   A substrate processing apparatus that is arranged adjacent to a predetermined external device and performs a series of processing on a substrate,
  A processing unit including one or more substrate processing units each performing predetermined processing on a substrate, and a main transport mechanism that transports the substrates to the one or more substrate processing units in a predetermined order;
  A transport mechanism for transporting a substrate between the processing unit and the external device;
With
  At least one of the one or more substrate processing units is
  Holding means for rotating while holding the substrate;
  Treatment liquid supply means for supplying the treatment liquid onto the substrate held by the holding means;
  A splash prevention cup that is provided so as to surround the holding means and collects the processing liquid splashed around from the substrate;
  An exhaust unit provided at a lower portion of the anti-scattering cup, and exhausting the atmosphere around the substrate by setting the internal space of the anti-scattering cup to a negative pressure;
  An annular plate-like member surrounding a side periphery of the substrate, wherein an outer peripheral radius is formed smaller than an inner wall radius of the anti-scattering cup, and an inner peripheral radius is formed larger than a radius of the substrate. And an annular gap is formed between the outer periphery of the substrate and the inner wall of the anti-scattering cup in a plan view and communicates with the exhaust means. A side rectifying member that forms an annular gap in a plan view communicating with the exhaust means between a circumference and an end face of the substrate;
  A height adjusting mechanism for changing a height relationship between the side rectifying member and the substrate;
A substrate processing apparatus comprising:

Images