JP5588582B2 - Cleaning device - Google Patents

Description

  The present invention relates to a cleaning apparatus that cleans an object to be cleaned using a liquid containing microbubbles. In particular, the present invention relates to a semiconductor substrate storage container cleaning apparatus that requires a high degree of cleanness.

  It is known that the microbubble is a fine bubble having a diameter of 50 μm or less and has a fine bubble volume, so that the rising speed is slow and the liquid stays in the liquid for a long time. Microbubbles are said to be created by re-foaming gas that has been dissolved under pressure, or by dispersing the gas-liquid two phases while swirling them.

  It is known that microbubbles form free radicals by decomposing water molecules present in and around microbubbles. Since free radicals are extremely reactive, it is possible to clean dirty water in wastewater treatment and to decompose harmful chemical substances contained in wastewater from factories.

  Microbubbles are known to have an effect of adsorbing and removing oil and fat components (dirt). This is because the oil and fat component is adsorbed on the surface of the microbubble and the oil and fat component is repeatedly removed from the surface of the object to be cleaned, so that the oil and fat component on the surface of the object to be cleaned is finally completely removed. Is due to. In order to remove a large amount of oil and fat components in a short time, it is necessary to increase the density of microbubbles, that is, increase the number of microbubbles per unit volume (Non-Patent Document 1).

  On the other hand, it is known that microbubbles disappear when microbubbles are jetted into water. This is because the microbubbles frequently collide in water and the bubbles repeat coalescence, and the microbubbles disappear (Non-Patent Document 1).

  Furthermore, it is said that microbubbles disappear when microbubbles are ejected from a spray nozzle into the air. This is thought to be because a sufficient amount of microbubbles cannot be present in the water droplets ejected from the spray nozzle, but this has not been clarified in detail.

  Therefore, Non-Patent Document 1 describes a method of cleaning by immersing an object to be cleaned in a water tank in which microbubbles are generated at a high density. On the other hand, Patent Documents 1 to 5 disclose inventions of apparatuses for cleaning by mixing and injecting gas and liquid.

  In the cleaning apparatus disclosed in Patent Document 1, in order to efficiently remove contaminants on a semiconductor wafer, a liquid supply means and a gas supply means are connected to the ejection nozzle, and the contaminants are not damaged without damaging the substrate surface. Particles are removed.

  The spray nozzle disclosed in Patent Document 2 is supplied with fluid from at least one end of a linear nozzle tip, and a plurality of spray holes are formed along the axis on the outer peripheral surface of the tubular nozzle tip. The fluid is sprayed onto the object from the numerous spray holes.

  The fine bubble generating nozzle disclosed in Patent Document 3 relates to a nozzle that generates a water flow containing fine bubbles at a wide angle without reducing the flow velocity or the collision force. The bubble generating nozzle includes a liquid channel and a gas channel that form a venturi tube, and ejects fine bubbles at a wide angle.

  In the invention described in Patent Document 4, water particles containing microbubbles are sprayed from a spray nozzle provided with a mesh body using a microbubble generator that causes a cavitation phenomenon, and volatile organic compounds in the airflow are removed. To be removed.

  In the invention disclosed in Patent Document 5, gas is pressurized and dissolved in a liquid to obtain a saturated state, and then the pressure is reduced to atmospheric pressure, and a gas-liquid mixture is ejected by a pump that generates a pulsating flow.

Makoto Miyamoto, “Environmentally friendly cleaning technology using microbubbles”, Mitsubishi Electric Technical Bulletin, Mitsubishi Electric Corporation, August 2008, Volume 82, Number 8, pages 489-492

JP-A-8-318181 JP 2003-311189 A JP 2009-273966 A JP 2009-297698 A JP 2009-154059 A

  However, the method described in Non-Patent Document 1 uses an additive in order to generate microbubbles at a high concentration, and is not preferable because the additive causes contamination in a field where a high clean state is required. . In addition, as a cleaning method, a method of immersing the object to be cleaned in a water tank in which microbubbles are generated is taken. If the object to be cleaned has a complicated shape or unevenness, a complicated shape portion or the like is sufficiently cleaned. Can not do it. In addition, a large object to be cleaned that cannot be immersed in the water tank cannot be cleaned, and further attention must be paid to contamination inside the water tank, which requires a great deal of labor for liquid management.

  An object of the invention described in Patent Document 1 is to clean a semiconductor wafer by simply using a liquid as a droplet by a gas supply pressure without using the cleaning power of microbubbles. However, the liquid supply means and the gas supply means are connected to the ejection nozzle, and the structure of the spray nozzle is complicated. Therefore, there is a problem that the entire apparatus becomes complicated when cleaning with a plurality of spray nozzles.

  In the invention described in Patent Document 2, the tubular nozzle tip is provided with a gas-liquid mixed fluid in which water and air are mixed at one end of the tubular nozzle tip formed in a straight line without using the detergency of microbubbles. It sprays from the sprayed hole. In addition, the main purpose of Patent Document 2 is to spray the liquid by opening the spray hole in the tube so that there is no movement of the nozzle when washing the washing object and washing is performed without any unevenness. is not.

  In the invention described in Patent Document 3, a Venturi tube is used to generate fine bubbles, and a liquid is ejected by combining wide-angle nozzles. There is a problem of complexity. Further, there is no suggestion regarding the concentration of microbubbles, and this is an apparatus for cleaning at a wide angle with a high collision force, and is not an invention for cleaning by the effect of microbubbles.

  In the invention described in Patent Document 4, a microbubble generator that causes a cavitation phenomenon is an essential component, but a microbubble generator that causes a cavitation phenomenon has a complicated shape and the structure of the apparatus is complicated. There's a problem.

  Moreover, it is said that about 10,000 microbubbles / ml with a bubble diameter of 10 to 19 μm are generated by passing a microbubble generator directly from tap water, but this value is not a value after passing through a spray nozzle. Therefore, it is unclear how many microbubbles are contained in the water particles after actually passing through the spray nozzle. Furthermore, the spray nozzle is attached linearly to the microbubble generator and is not intended for extensive cleaning with a plurality of spray nozzles.

  In addition, when not using the gas containing water which fully contained the bubble in water, even if it uses the microbubble generator which raise | generates the cavitation phenomenon of patent document 4, it has been confirmed that a microbubble does not generate | occur | produce. .

  The invention described in Patent Document 5 requires a pump that generates a pulsating flow and a decompression unit that decompresses the liquid that is saturated by pressurizing and dissolving the gas into the liquid, and the configuration of the apparatus is complicated. It becomes. In addition, there is a description in the specification that sufficiently fine bubbles are generated on the surface of the object to be cleaned, but there is no description of how much fine bubbles are generated quantitatively, whether or not fine bubbles are actually generated Is doubtful.

  None of the above prior art documents clearly described how many microbubbles exist in the water droplets sprayed from the tip of the spray nozzle with an aqueous solution containing microbubbles, and the synergistic effect of microbubbles and spray injection It does not show the cleaning power by.

  The present invention has been made to solve the above-described problems, and does not require a complicated nozzle shape or special device, is compactly configured, and ejects fluid containing many microbubbles from the tip of the nozzle. It is an object of the present invention to provide a cleaning apparatus that can achieve a high cleaning effect by cleaning.

The cleaning device according to the present invention includes a bubble mixing device that mixes bubbles into a fluid, an introduction portion into which the fluid in which bubbles are mixed by the bubble mixing device, and one end portion connected to the introduction portion. A plurality of nozzles for ejecting the fluid from an end portion, and the nozzle has a cylindrical inner peripheral surface to which the fluid is supplied from the introduction portion, and an inner diameter of the cylindrical inner peripheral surface is constant. A pressure adjusting unit having a flow channel part and having a plurality of holes on the one end side of the flow channel unit for reducing the pressure P1 of the fluid in the introduction unit to the pressure P2 of the fluid in the flow channel unit Is disposed on the other end portion side of the flow path portion, and an ejection portion in which a substantially circular ejection port for ejecting the decompressed fluid is integrally formed is disposed, and pressures of the pressures P1 and P2 are provided. The ratio P1 / P2 is set to 20-100, and the pressure Distance from the adjustment portion to the ejection portion is set to 10Mm～70mm, the diameter of the ejection port in the jetting portion is characterized in that it is set to 3 mm to 6 mm.

  In the cleaning apparatus, the plurality of holes are inclined holes that are rotationally symmetric with respect to the extending direction of the flow path portion and generate a swirling flow in the fluid.

The plurality of holes are provided in parallel to the extending direction of the flow path portion, and the flow path of the fluid is swirled in the flow path by changing the path of the fluid from a straight traveling direction to an oblique direction. A swirling flow generating member is provided for generating.

In the cleaning apparatus, the ejection port is substantially elliptical and diffuses the fluid .

  In the cleaning apparatus, the object to be cleaned is a storage container that stores a semiconductor substrate.

  In the cleaning device of the present invention, the fluid containing the microbubbles generated by the pressure adjusting unit is depressurized by the pressure adjusting unit at a predetermined depressurization ratio, and the diameter of the fluid is adjusted via the flow path unit in which the fluid moving distance is optimized. By introducing the optimized ejection port to the ejection port, a solution containing a large amount of microbubbles can be ejected from the ejection units of the plurality of nozzles to clean the object to be cleaned. In addition, by making the fluid into a swirl flow by the pressure adjusting unit or swirl flow generation unit that also has a swirl flow generation function, or by forming the diffusion unit integrally with the discharge unit, the liquid is formed in a conical or fan shape from the discharge unit. The object to be cleaned can be cleaned extensively.

  As a result, the cleaning apparatus of the present invention can efficiently clean a cleaning object having a complicated uneven shape by ejecting a fluid containing high-density microbubbles from a nozzle. In addition, due to the synergistic effect of the fluid injection and the microbubbles, a result with a very high cleanliness can be obtained in a short time.

  In addition, the use of this apparatus eliminates the need for additives and surfactants, so that it is possible to reduce the amount of cleaning liquid for washing away additives and surfactants, and to prevent contamination due to residual additives and surfactants. It can be avoided reliably.

It is a whole composition perspective view of the washing device of this embodiment. It is sectional drawing of the nozzle arrange | positioned at the washing | cleaning apparatus of this embodiment. It is a perspective view of the pressure adjustment part arrange | positioned inside the nozzle of this embodiment. It is IV-IV sectional drawing of the pressure adjustment part shown in FIG. It is sectional drawing of the modification of the nozzle arrange | positioned at the washing | cleaning apparatus of this embodiment. It is a perspective view of the modification of the pressure adjustment part arrange | positioned inside the nozzle of this embodiment. It is sectional drawing of the nozzle which comprised the pressure adjustment part and the turning flow production | generation part separately. It is a perspective view of the modification of the pressure adjustment part arrange | positioned inside the nozzle of this embodiment. It is a partially cutaway perspective view of a swirl flow generating unit disposed inside the nozzle of the present embodiment. It is sectional drawing of the nozzle by which the diffusion part of the fluid was integrally formed in the jet nozzle in this embodiment. It is a front view of the nozzle by which the diffusion part of the fluid was integrally formed in the jet nozzle in this embodiment. It is a perspective view of the nozzle by which the diffusion part of the fluid was integrally formed in the jet nozzle in this embodiment. In this embodiment, it is explanatory drawing by which washing water is injected through the inside of a nozzle. It is explanatory drawing of the number measurement of microbubbles in a present Example. It is a measurement result of various data in Example 1. It is a measurement result of the number of microbubbles in Example 2. It is a measurement result of various data in comparative example 1. 6 is a graph of the number of microbubbles versus the pressure adjustment position in Example 1 and Comparative Example 1. It is a graph of the number of microbubbles in Example 1 and Comparative Example 1 versus the diameter of a jet nozzle. It is a graph of the ejection angle versus the ejection port diameter in Example 1 and Comparative Example 1.

  Embodiments of the present invention will be described below with reference to the drawings.

  FIG. 1 is an overall configuration perspective view of a cleaning apparatus 10 according to the present embodiment.

  The cleaning device 10 generates microbubbles from the liquid containing bubbles generated in the bubble mixing device 12 by the pressure adjusting unit 42 (FIG. 2), and jets the cleaning water 20 from the nozzle 34 as a swirling flow, thereby cleaning objects. 36 is an apparatus for cleaning. The bubble mixing device 12 includes a water tank 14 that stores the cleaning water 20, an air pump 18 that is disposed above the water tank 14 and supplies air to the cleaning water 20, a barometer 16 that measures the atmospheric pressure in the water tank 14, And an air bubble generator 22 attached to the lower end portion of the air introduction pipe 24 connected to the air pump 18. A water supply pipe (not shown) for supplying cleaning water 20 and a valve for releasing the inside of the water tank 14 to atmospheric pressure are connected to the water tank 14. Further, a valve 26 is connected to the water tank 14 via a water flow pipe 28a, and a lower end portion of the introduction part 32 is connected to the valve 26 via a water flow pipe 28b.

  A plurality of nozzles 34 are arranged on the side surface of the introduction portion 32 at a predetermined interval. The cleaning target 36 is disposed at an appropriate position where it can be cleaned with the cleaning water 20 including microbubbles ejected from the tip of the nozzle 34.

  FIG. 2 is a cross-sectional view of the nozzle 34 disposed in the cleaning device 10 of the present embodiment. The nozzle 34 has a flow path portion 40 in which a cylindrical inner peripheral surface 38 that is a flow path of the cleaning water 20 is formed. One end of the flow path part 40 is connected to the introduction part 32. A pressure adjustment unit 42 is disposed at one end of the flow path unit 40. In addition, an ejection portion 46 in which a substantially circular ejection port 44 is formed is integrally formed at the other end portion of the flow path portion 40.

  The pressure adjusting unit 42 is a member that expands the air present in the cleaning water 20 to generate microbubbles and generates a swirling flow. For example, as shown in FIGS. 3 and 4, a circular plate body In addition, a plurality of inclined holes 48 are formed at positions that are rotationally symmetric with respect to the extending direction of the flow path portion 40 that is the direction of the central axis. In FIG. 3, the arrows indicate the flow direction of the cleaning water 20 that has passed through the inclined holes 48 of the pressure adjusting unit 42. The position of the pressure adjusting unit 42 is set so that the distance L from the pressure adjusting unit 42 to the ejection port 44 is 10 mm to 70 mm, preferably 30 mm to 50 mm. Moreover, the diameter d of the ejection port 44 formed in the ejection part 46 is set to 3 mm-6 mm, Preferably it is 3 mm-5 mm.

  Moreover, the nozzle 34 can also be comprised as a nozzle 34a divided | segmented into two members, the introduction part side flow path part 50 and the ejection part side flow path part 52, as shown in FIG. The introduction portion side flow passage portion 50 and the ejection portion side flow passage portion 52 have a cylindrical inner peripheral surface 38 a that is a flow passage of the cleaning water 20. Moreover, the ejection part side flow path part 52 is integrally formed with an ejection part 46a in which a circular ejection port 44a is formed. The ejection part side flow path part 52 can be appropriately replaced by being screwed into the introduction part side flow path part 50.

  Further, if the inclined hole 48 is arranged in a rotationally symmetrical manner with respect to the extending direction of the flow path portion 40 that is the direction of the central axis of the circular plate body, for example, the pressure adjusting portion 42 is shown in FIG. As shown, a central hole 54 for allowing the cleaning water 20 to pass therethrough is formed in the central portion, and a pressure adjusting portion 42a in which a plurality of inclined holes 48a are formed around the central hole 54 can be configured. The number of inclined holes 48 or 48a is preferably about 3 to 5. Moreover, in FIG. 6, the arrow shows the flow direction of the cleaning water 20 that has passed through each inclined hole 48a of the pressure adjusting portion 42a.

  FIG. 7 is a cross-sectional view of the nozzle 34b in which the pressure adjusting unit 56 and the swirling flow generating unit 60 are configured separately. As shown in FIG. 8, the pressure adjusting unit 56 is configured by forming a plurality of introduction holes 58 in a circular plate. The introduction hole 58 is provided in parallel to the extending direction of the flow path portion 40.

  The introduction hole 58 can form a central hole for allowing the cleaning water 20 to pass through the central part, or can be provided with a plurality of about five holes. In FIG. 8, the arrow indicates the flow direction of the cleaning water 20 that has passed through the introduction hole 58 of the pressure adjusting unit 56.

  FIG. 9 is a partially cutaway perspective view of the swirl flow generator 60. The swirling flow generating unit 60 is provided with a swirling flow generating plate 62 for generating a swirling flow by changing the traveling direction of the fluid in an oblique direction. The fluid is introduced into the swirling flow generating unit 60 from an inflow portion 64 provided on the pressure adjusting unit 56 side of the swirling flow generating unit 60, and the swirling flow generating plate 62 causes, for example, a part of the fluid to move obliquely downward in the traveling direction. In the direction, the remainder of the fluid is guided obliquely upward to form a swirl flow, and flows out as a swirl flow from the outflow portion 66 provided on the ejection portion 46 side of the swirl flow generation unit 60. Thereafter, the fluid that has turned into a swirling flow is ejected from the ejection port 44 in a conical shape.

  FIG. 10 is a cross-sectional view of a nozzle 34c in which a jet outlet 44c serving as a fluid diffusion portion is formed integrally with the jet portion 46c. The fluid passes from the introducing portion 32 through the pressure adjusting plate 56a, flows into the flow path portion 40c having the cylindrical inner peripheral surface 38c, and is guided to the ejection port 44c. As shown in FIG. 11, the spout 44c is formed in an elliptical shape so that the spout is ejected in a fan shape in the long direction of the spout 44c without generating a swirling flow in the cleaning water 20. (Fig. 12)

  The cleaning apparatus 10 of the present embodiment is basically configured as described above. Next, the operation of the cleaning apparatus 10 will be described below with reference to FIG.

  First, wash water 20 is supplied from a water supply pipe (not shown) to the water tank 12 shown in FIG. 1, and a predetermined amount is stored. At that time, a valve connected to the water tank 14 (not shown) is opened to bring the water tank 14 into a released state. Thereafter, the air pump 18 is driven, and air is bubbled by the air bubble generator 22 into the cleaning water 20 stored in the water tank 14 through the air introduction pipe 24. After bubbling for a predetermined time, a valve connected to a water tank 14 (not shown) is closed to make the water tank 14 sealed, and air is bubbled until the water tank 14 reaches a predetermined pressure. Thereafter, the valve 26 is opened, and the cleaning water 20 containing bubbles in the water tank 14 is introduced into the introduction part 32 via the water flow pipes 28 a and 28 b, and to a plurality of nozzles 34 arranged on the side surface of the introduction part 32. Sent.

  When the cleaning water 20 containing air bubbles is sent from the introduction part 32 to the nozzle 34, it passes through the plurality of inclined holes 48 formed in the pressure adjustment part 42 and flows into the flow path part 40. As shown in FIG. 3, the cleaning water 20 is introduced to the flow path part 40 side through a plurality of inclined holes 48 formed rotationally symmetrical with respect to the central axis of the pressure adjusting part 42, and as indicated by arrows, While being swung along the cylindrical inner peripheral surface 38 of the flow path portion 40, the gas is supplied to the ejection port 44 of the ejection portion 46. In this case, in the pressure adjustment unit 42, the pressure of the cleaning water 20 on the introduction unit 32 side is greatly reduced by passing through the plurality of inclined holes 48 and supplied to the flow path unit 40. And by optimizing the distance L from the pressure adjusting unit 42 to the jet port 44, preferably by setting it to be 30 mm to 50 mm, microbubbles are effectively generated from the fluid containing air, Washing water 20 containing microbubbles at a high concentration is supplied to the ejection port 44.

  Next, the washing water 20 that has reached the ejection part 46 while turning by passing through the pressure adjustment part 42 is ejected from the ejection port 44 while spreading in a conical shape, and is jetted onto the object 36 to be washed. . In this case, the cleaning water 20 is jetted onto the cleaning target 36 in a state where the microbubbles are generated at a high concentration by optimizing the diameter d of the jet port 44 and preferably by setting it to 3 mm to 5 mm. The

  As shown in FIG. 7, when the nozzle 34 b in which the pressure adjusting unit 56 and the swirling flow generating unit 60 are disposed inside the flow path unit 40 is used, the cleaning water 20 is supplied from the introducing unit 32 to the pressure adjusting unit. It passes through the introduction hole 58 formed in 56, flows into the swirling flow generation unit 60, becomes a swirling flow in the swirling flow generation unit 60, and is ejected in a conical shape from the ejection port 44 as described above.

  As shown in FIG. 10, when a nozzle 34 c having an outlet 44 c in which a fluid diffusing portion is integrally formed in the pressure adjustment portion 56 and the ejection portion 46 c is used in the flow path portion 40, the cleaning water 20 Flows from the introduction part 32 through the pressure adjusting plate 56a, into the flow path part 40c having the cylindrical inner peripheral surface 38c, led to the ejection port 44c, and from the ejection port 44c formed in an elliptical shape, the ejection port Other than ejecting in a fan shape in the long direction of 44c, it is as described above.

  Hereinafter, the measurement of the number of microbubbles in the fluid ejected by the above-described configuration, the ejection angle, the cleaning effect, and the ratio P1 / the fluid pressure P1 in the introduction portion 32 and the fluid pressure P2 in the flow passage portion 40 The Example which measured P2 is shown.

Example 1
As the cleaning device 10, the bubble generating device 12, the introduction unit 32, and the nozzle 34 shown in FIG. 1 were prepared. First, 100 liters of pure water was supplied to the water tank 12 as the washing water 20, and the water temperature was then heated to 30 ° C. After the water temperature was stabilized, the air pump 18 was driven to send air into the water, and bubbles were discharged from the air bubble generator 22 into the washing water 20 for 5 minutes. At this time, the water tank 14 is opened by opening a valve (not shown). Thereafter, the water tank 14 was closed by closing a valve (not shown), and then the inside of the water tank 14 was pressurized to a predetermined pressure. After the inside of the water tank 14 has been pressurized to a predetermined pressure, the valve 26 is released, and the water in the water tank 14 is introduced from the introduction part 32 to the nozzle 34 via the water flow pipes 28a and 28b, and FIG. As shown, the washing water 20 containing microbubbles was ejected from the ejection port 44 of the ejection part 46.

  As shown in FIG. 14, the washing water 20 ejected from the ejection part 44 was received by the tray 70, and the number of microbubbles was measured using the microbubble measuring device 68. As a microbubble measuring apparatus, a particle sensor KS-42D manufactured by Rion Co., Ltd. was used. For the number of microbubbles, the number of microbubbles from 6 μm to 38 μm was measured three times, and the average value was taken.

  In the measurement of the number of microbubbles, the number of microbubbles was measured when the diameter d of the nozzle 44 of the nozzle 34 was changed from 3 mm to 6 mm. At the same time, the number of microbubbles was measured in the case where the distance from the pressure adjusting unit 42 of the nozzle 34 to the jet port 44 was changed from 15 mm to 70 mm.

  Further, under the above-described conditions, the ejection angle of the cleaning water 20 ejected from the ejection port 44, the cleaning effect, and the ratio P1 / P2 of the fluid pressure P1 in the introduction section 32 and the fluid pressure P2 in the flow path section 40. Was measured.

  As for the ejection angle, the washing water 20 ejected from the ejection port 44 was photographed, and the angle of the washing water 20 ejected from the ejection port 44 was measured by image analysis software.

  In the cleaning effect test, an acrylic plate (50 mm × 50 mm × 3 mm) was prepared, and processing oil was applied to the entire surface. Thereafter, the washing water 20 containing microbubbles from the ejection part 44 was ejected on the entire surface of the acrylic plate for 1 minute, and the remaining state of the processing oil was observed.

  The ratio P1 / P2 between the pressure P1 of the fluid in the introduction section 32 and the pressure P2 of the fluid in the flow path section 40 was measured by the pressure gauges 72 and 74 shown in FIG. 14, and P1 / P2 was calculated. The above results are shown in FIG.

  From FIG. 15, when d = 3 mm to 6 mm and L = 15 mm to 70 mm, the average number of microbubbles generated is 4,000 / ml or more, and the processing oil is completely removed by washing for 1 minute. I was able to. Further, the fluid ejected from the ejection port 44 has a conical shape with an apex angle of 30 degrees or more, and has an angle at which cleaning by spraying can be suitably performed. Furthermore, it was found that the pressure ratio P1 / P2 showed a value of 20 or more.

Example 2
The diameter d of the jet port 44 of the nozzle 34 is 3 mm and 4 mm, the distance from the pressure adjusting unit 42 of the nozzle 34 to the jet port 44 is 15 mm and 50 mm, and only the pressure adjusting unit 42 and the pressure adjusting unit 56 (FIG. 8) are pressurized. The number of microbubbles was measured when the adjusting unit 56 and the swirling flow generating unit 60 (FIG. 7) were used together. All other conditions were the same as in Example 1. The results are shown in FIG.

  From FIG. 16, when only the pressure adjustment unit 56 was used, the number of microbubbles was larger than that of the pressure adjustment unit 42. Further, when the pressure adjusting unit 56 and the swirling flow generating unit 60 were used in combination, the same result as that of the pressure adjusting unit 42 was obtained.

Comparative Example 1
For conditions other than Example 1, when the diameter d of the ejection port 44 of the nozzle 34 is changed from 1 mm to 10 mm, and at the same time, the distance from the pressure adjusting unit 42 of the nozzle 34 to the ejection port 44 is changed from 5 mm to 160 mm; The number of microbubbles, the ejection angle, the cleaning effect, and the pressure ratio P1 / P2 were measured when the pressure adjusting unit 42 was not used. The other conditions were tested under the same conditions as in Example 1. The results are shown in FIG.

  From the result of FIG. 17, when there was no pressure adjustment part 42, the generation amount of microbubbles was extremely small and was 1,000 pieces / ml or less. When the cleaning test was conducted under the conditions, the processing oil remained considerably and the cleaning was insufficient. Further, when d = 1 mm and 2 mm, the number of microbubbles was as low as 3,000 / ml as a whole regardless of the position L of the pressure adjusting portion 42, and a sufficient cleaning effect could not be exhibited. (See FIGS. 18 and 19)

  Further, even when the diameter d of the jet port 44 is 3 mm to 10 mm, when the position L of the pressure adjusting portion 42 is 5 mm, the number of microbubbles is as low as 2,000 / ml, and a sufficient cleaning effect could not be exhibited. .

  And when the position L of the pressure adjustment part 42 is 120 mm, 160 mm, and when the diameter d of the ejection port 44 is 10 mm and a large diameter, the spray angle of the cleaning liquid 20 is 20 degrees or less, and as cleaning by the spray nozzle, Only a very narrow range of cleaning can be performed (FIG. 20).

  From the above results, the diameter d of the jet port 44 of the nozzle 34 is 3 mm to 6 mm, and the distance from the pressure adjusting unit 42 of the nozzle 34 to the jet port 44 is 10 mm to 70 mm. It has been found that it has a good detergency and has an appropriate ejection angle.

  The present invention is not limited to the above-described embodiment, and can be modified without departing from the gist of the present invention.

  For example, instead of the air pump 18, air compressed by a compressor or the like is sent into the water tank 14, so that the air can be bubbled into the wash water 20 and the wash water 20 can be sent to the introduction unit 32 by air pressure. .

  Or the bubble mixing apparatus 12 arrange | positions the water tank 14 which stores the wash water 20, and the pump which can mix air into the water tank 14 via the water flow pipe 28a, and mixes the wash water 20 with the said pump with air. At the same time, water can be supplied to the introduction section 32.

DESCRIPTION OF SYMBOLS 10 ... Cleaning apparatus 12 ... Bubble mixing apparatus 14 ... Water tank 16 ... Pressure gauge 18 ... Air pump 20 ... Washing water 22 ... Air bubble generator 24 ... Air introduction pipe 26 ... Valve 28a, 28b ... Water flow pipe 32 ... Introduction part 34, 34a, 34b, 34c ... Nozzle 36 ... Objects to be cleaned 38, 38a, 38c ... Cylindrical inner peripheral surfaces 40, 40b, 40c ... Channel portions 42, 42a ... Pressure adjusting portions 44, 44a, 44c ... Jet 46, 46a, 46c ... ejection portion d ... ejection port diameter L ... distance 48, 48a from ejection port to pressure adjusting portion ... inclined hole 50 ... introduction portion side flow passage portion 52 ... ejection portion side flow passage portion 54 ... central holes 56, 56a ... pressure adjusting sections 58 and 58a ... introduction hole 60 ... swirling flow generating section 62 ... swirling flow generating plate 64 ... inflow section 66 ... outflow section 68 ... microbubble measuring device 70 ... tray 72 ... pressure gauge P1
74 ... Pressure gauge P2

Claims (5)

In a cleaning apparatus that performs cleaning by injecting a fluid containing microbubbles onto an object to be cleaned,
A bubble mixing device for mixing bubbles in the fluid;
An introduction part for introducing the fluid mixed with bubbles by the bubble mixing device;
One end portion is connected to the introduction portion, and includes a plurality of nozzles for ejecting the fluid from the other end portion,
The nozzle has a flow path portion in which a cylindrical inner peripheral surface to which the fluid is supplied from the introduction portion is formed, and an inner diameter of the cylindrical inner peripheral surface is constant ,
A pressure adjusting part having a plurality of holes for reducing the pressure P1 of the fluid in the introduction part to the pressure P2 of the fluid in the flow path part is disposed on the one end side of the flow path part,
On the other end portion side of the flow path portion, a jet portion integrally formed with a substantially circular jet port for jetting the decompressed fluid is disposed,
The pressure ratio P1 / P2 of the pressures P1 and P2 is set to 20-100,
The distance from the pressure adjustment part to the ejection part is set to 10 mm to 70 mm,
The diameter of the said ejection outlet in the said ejection part is set to 3 mm-6 mm, The washing | cleaning apparatus characterized by the above-mentioned. The cleaning device according to claim 1,
The cleaning device according to claim 1, wherein the plurality of holes are inclined holes that are formed rotationally symmetrically with respect to an extending direction of the flow path portion and generate a swirling flow in the fluid. The cleaning device according to claim 1,
The plurality of holes are provided in parallel to the extending direction of the flow path part,
The cleaning device according to claim 1, wherein a swirl flow generating member that generates a swirl flow in the fluid by changing a course of the fluid from a straight traveling direction to an oblique direction is disposed in the flow path portion. The cleaning device according to claim 1,
The cleaning device is characterized in that the jet port is substantially elliptical and diffuses the fluid . In the washing | cleaning apparatus of any one of Claims 1-4,
The cleaning apparatus, wherein the object to be cleaned is a storage container for storing a semiconductor substrate.

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